CN112444275A - Sensor with a sensor element - Google Patents

Sensor with a sensor element Download PDF

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Publication number
CN112444275A
CN112444275A CN202010160142.XA CN202010160142A CN112444275A CN 112444275 A CN112444275 A CN 112444275A CN 202010160142 A CN202010160142 A CN 202010160142A CN 112444275 A CN112444275 A CN 112444275A
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China
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electrodes
electrode
conductive portion
conductive
fixed
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Granted
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CN202010160142.XA
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Chinese (zh)
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CN112444275B (en
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藤本明
富泽英之
中村直文
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Toshiba Corp
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Toshiba Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/011—Electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H01G5/014—Housing; Encapsulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0221—Variable capacitors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Provided is a sensor capable of improving sensitivity. According to one embodiment, a sensor includes a base, a1 st structure, and a2 nd structure. The 1 st structural body includes a1 st fixed portion, a1 st conductive portion, and a plurality of 1 st electrodes. The 1 st fixing part is fixed to the base. The 1 st conductive part is held by the 1 st fixing part. The 1 st conductive portion is separated from the base in the 1 st direction. A plurality of 1 st electrodes are held on the 1 st conductive part. A direction from one of the plurality of 1 st electrodes toward another of the plurality of 1 st electrodes is along a2 nd direction crossing the 1 st direction. The 2 nd structural body includes a2 nd conductive portion and a plurality of 2 nd electrodes. The 2 nd conductive portion is fixed to the base. A plurality of 2 nd electrodes are held by the 2 nd conductive part. One of the plurality of 2 nd electrodes is located between one of the plurality of 1 st electrodes and another of the plurality of 1 st electrodes. A1 st electrode length along a1 st direction of one of the plurality of 1 st electrodes is shorter than a1 st conductive portion length along a1 st direction of the 1 st conductive portion.

Description

Sensor with a sensor element
The application is based on Japanese patent application 2019 and 155984 (application date: 8 and 28 in 2019) and has the priority of the application. This application includes all of the contents of that application by reference thereto.
Technical Field
Embodiments of the present invention relate to sensors.
Background
For example, there are sensors that utilize MEMS construction. In the sensor, improvement in sensitivity is desired. By increasing the relative sensitivity, the SNR of the output voltage can be increased, for example.
Disclosure of Invention
Embodiments provide a sensor capable of improving sensitivity.
According to an embodiment, a sensor includes a base, a1 st structure, and a2 nd structure. The 1 st structural body includes a1 st fixed portion, a1 st conductive portion, and a plurality of 1 st electrodes. The 1 st fixing portion is fixed to the base. The 1 st conductive part is held by the 1 st fixing part. The 1 st conductive portion is separated from the base in a1 st direction. The plurality of 1 st electrodes are held by the 1 st conductive part. The distance between the plurality of No. 1 electrodes and the substrate is variable. A direction from one 1 st electrode of the plurality of 1 st electrodes toward another 1 st electrode of the plurality of 1 st electrodes is along a2 nd direction crossing the 1 st direction. The 2 nd structural body includes a2 nd conductive portion and a plurality of 2 nd electrodes. The 2 nd conductive portion is fixed to the base. The plurality of 2 nd electrodes are held by the 2 nd conductive portion. One 2 nd electrode of the plurality of 2 nd electrodes is located between the one 1 st electrode of the plurality of 1 st electrodes and the other 1 st electrode of the plurality of 1 st electrodes. A1 st electrode length along the 1 st direction of the one 1 st electrode of the plurality of 1 st electrodes is shorter than a1 st conductive portion length along the 1 st direction of the 1 st conductive portion.
According to the sensor having the above configuration, a sensor having improved sensitivity can be provided.
Drawings
Fig. 1 (a) to 1 (c) are schematic views illustrating a sensor according to embodiment 1.
Fig. 2 is a schematic diagram illustrating a sensor according to embodiment 1.
Fig. 3 (a) to 3 (c) are schematic views illustrating a sensor according to embodiment 2.
Fig. 4 (a) and 4 (b) are schematic views illustrating a sensor according to embodiment 2.
Description of the reference symbols
11-13 … 1 st to 3 rd structural bodies, 11E-13E … 1 st to 3 rd electrode pads, 11 c-14 c … 1 st to 4 th conductive portions, 11ce … end portions, 11E-15E … st 1 to 5 th electrodes, 11f, 11g … st 1 and 2 nd fixing portions, 11f, 11g … st 1 and 2 nd fixing portions, 11n, 11o … st 1 and 2 nd connecting portions, 11ne, 11nf … end portions, 14ce … end portions, 21, 22 nd 1 st and 2 nd fixed structural bodies, 21E, 22E … electrode pads, 21c … 1 st fixed conductive portion, 21E … 1 st fixed electrode, 50 … base body, 51 to 53 … st 1 to 3 rd insulating portions, 110, 120 sensor, AA … arrow 36874, Lc1 th to 4 th fixed electrode lengths, Le 72 th to Le4 th electrode lengths, Lx1 th and 1 th width 1, de5, dex1 … distance, gc1, gc4, ge1, ge4, gn1 and go1 … gap
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The drawings are schematic or conceptual drawings, and the relationship between the thickness and the width of each part, the ratio of the sizes of the parts, and the like are not necessarily the same as those in reality. In the case of representing the same parts, there are also cases where the sizes and/or ratios to each other are differently represented according to the drawings.
In the present specification and the drawings, the same reference numerals are given to the same elements as those described above with respect to the appearing drawings, and detailed description thereof is appropriately omitted.
(embodiment 1)
Fig. 1 (a) to 1 (c) and 2 are schematic views illustrating a sensor according to embodiment 1.
Fig. 1 (a) is a plan view as viewed in the direction of arrow AA in fig. 1 (b) and 1 (c). FIG. 1 (b) is a sectional view taken along line A1-A2 of FIG. 1 (a). FIG. 1 (c) is a sectional view taken along line B1-B2 of FIG. 1 (a). FIG. 2 is a sectional view taken along line C1-C2 of FIG. 1 (a).
As shown in fig. 1 (a), sensor 110 according to the embodiment includes base 50, 1 st structure 11, and 2 nd structure 12. The 1 st structural body 11 includes a1 st fixed portion 11f, a1 st conductive portion 11c, and a plurality of 1 st electrodes 11 e. As shown in fig. 2, in this example, the sensor 110 further includes a1 st insulating portion 51 and a2 nd insulating portion 52.
As shown in fig. 2, the 1 st fixing portion 11f is fixed to the base 50. In this example, the 1 st insulating portion 51 is provided between the base 50 and the 1 st fixing portion 11 f. The 1 st fixing portion 11f is fixed to the base 50 via the 1 st insulating portion 51.
As shown in fig. 1 (a), the 1 st conductive part 11c is held by the 1 st fixing part 11 f. For example, the 1 st conductive part 11c is connected to the 1 st fixing part 11 f. In this example, the 1 st structural body 11 further includes a1 st connecting portion 11 n. The 1 st fixing portion 11f and the 1 st conductive portion 11c are connected to each other by the 1 st connecting portion 11 n. The 1 st connecting portion 11n is, for example, a spring.
As shown in fig. 1 (b), the 1 st conductive part 11c is separated from the base 50 in the 1 st direction. As shown in fig. 1 (b), a gap gc1 is provided between the 1 st conductive part 11c and the base 50. For example, the 1 st conductive part 11c can be deformed.
The 1 st direction is set as the Z-axis direction. One direction perpendicular to the Z-axis direction is set as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is referred to as the Y-axis direction. The substrate 50 is, for example, substantially parallel with respect to the X-Y plane.
As shown in fig. 1 (a), a plurality of 1 st electrodes 11e are held by the 1 st conductive parts 11 c. For example, the 1 st electrodes 11e are connected to the 1 st conductive part 11 c. As shown in fig. 1 (b), a gap ge1 is provided between the plurality of 1 st electrodes 11e and the substrate 50. The distance de1 (see fig. 1 b) between the plurality of 1 st electrodes 11e and the base 50 is variable. As shown in fig. 1 (a), a direction from one of the plurality of 1 st electrodes 11e toward another one of the plurality of 1 st electrodes 11e is along the 2 nd direction. The 2 nd direction intersects with the 1 st direction (Z-axis direction). In this example, the 2 nd direction is the Y axis direction.
As shown in fig. 1 (a), the 2 nd structural body 12 includes a2 nd electrically conductive portion 12c and a plurality of 2 nd electrodes 12 e. As shown in fig. 1 (c), the 2 nd conductive portion 12c is fixed to the base 50. For example, the 2 nd insulating portion 52 is provided between the base 50 and the 2 nd conductive portion 12 c. The 2 nd conductive portion 12c is fixed to the base 50 via the 2 nd insulating portion 52. As shown in fig. 1 (a), a plurality of 2 nd electrodes 12e are held by the 2 nd conductive parts 12 c. For example, the plurality of 2 nd electrodes 12e are connected to the 2 nd conductive part 12 c. One of the plurality of 2 nd electrodes 12e is located between one of the plurality of 1 st electrodes 11e and another one of the plurality of 1 st electrodes 11 e. For example, one of the plurality of 1 st electrodes 11e is located between one of the plurality of 2 nd electrodes 12e and another one of the plurality of 2 nd electrodes 12 e.
As shown in fig. 1 (a), the 1 st electrode 11e and the 2 nd electrode 12e are alternately arranged along the Y-axis direction. For example, the plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e form comb-teeth electrodes.
The plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e form a capacitor. The electrostatic capacitance of the capacitor depends on the area of the plurality of 1 st electrodes 11e facing the plurality of 2 nd electrodes 12 e.
For example, acceleration such as external force is applied to the sensor 110. Due to the acceleration, a part of the 1 st structural body 11 is deformed, and the distance de1 between the plurality of 1 st electrodes 11e and the base 50 changes. On the other hand, the distance de2 between the plurality of 2 nd electrodes 12e and the base 50 does not substantially change. Therefore, the capacitance when an external force such as acceleration is applied to the sensor 110 changes from the capacitance when an external force such as acceleration is not applied to the sensor 110. By detecting the change in the electrostatic capacitance, an external force or the like applied to the sensor 110 can be detected. The sensor 110 is, for example, a sensor of the MEMS (Micro Electro Mechanical Systems) type.
For example, the electrostatic capacitance between the plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e changes in accordance with a change in the distance de1 between the plurality of 1 st electrodes 11e and the base 50. In the sensor 110, for example, an acceleration in the Z-axis direction is detected.
The electrostatic capacitance (initial capacitance C0) of the sensor 110 when an external force such as acceleration is not applied to the sensor 110 depends on the area where the plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e face each other. When an external force such as acceleration is applied to the sensor 110, the area of the plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e facing each other changes. The capacitance sensitivity of the capacitance at this time after the area change was C1. In general, the capacitance sensitivity C1 of the sensor is voltage-converted by a C-V conversion circuit and detected as an output voltage. To increase the SNR (Signal-to-Noise Ratio) of the output voltage, the Ratio of the capacitance sensitivity C1 to the initial capacitance C0 may be increased. In the sensor 110, the detected capacitance sensitivity C1 does not depend on the initial capacitance C0, but depends on the amount of displacement caused by an external force. Therefore, if the initial capacitance C0 is reduced, the ratio of the capacitance sensitivity C1 to the initial capacitance C0 can be increased, and the SNR can be improved. As a result, high sensitivity can be obtained.
In the embodiment, as shown in fig. 1 (b), for example, the length of the plurality of 1 st electrodes 11e in the height direction is shortened. As shown in fig. 1 (c), for example, the length of the plurality of 2 nd electrodes 12e in the height direction is shortened. This can reduce the initial capacitance C0. On the other hand, the capacitance sensitivity C1 does not change. This can provide high sensitivity.
For example, as shown in fig. 1 (b), the length of one of the 1 st electrodes 11e along the 1 st direction (Z-axis direction) is set as the 1 st electrode length Le 1. The length of the 1 st conductive portion 11c along the 1 st direction is defined as a1 st conductive portion length Lc 1. In an embodiment, the 1 st electrode length Le1 is shorter than the 1 st conductive portion length Lc 1. Thus, the area of the plurality of 1 st electrodes 11e facing the plurality of 2 nd electrodes 12e can be reduced as compared with the case where the 1 st electrode length Le1 and the 1 st conductive part length Lc1 are the same.
For example, as shown in fig. 1 (c), the length of one of the plurality of 2 nd electrodes 12e along the 1 st direction (Z-axis direction) is set as the 2 nd electrode length Le 2. The length of the 2 nd conductive portion 12c along the 1 st direction is defined as a2 nd conductive portion length Lc 2. In an embodiment, the 2 nd electrode length Le2 is shorter than the 2 nd conductive portion length Lc 2. Thus, the area of the plurality of 1 st electrodes 11e facing the plurality of 2 nd electrodes 12e can be reduced as compared with the case where the 2 nd electrode length Le2 and the 2 nd conductive part length Lc2 are the same.
In an embodiment, the initial capacitance C0 can be reduced. On the other hand, the capacitance sensitivity C1 does not change. This can provide a sensor with improved sensitivity.
In this way, in the embodiment, the 1 st electrode length Le1 is shorter than the 1 st conductive portion length Lc 1. Alternatively, the 2 nd electrode length Le2 is shorter than the 2 nd conductive portion length Lc 2. In the case of forming such a configuration, for example, the manufacturing process becomes complicated. Therefore, generally, the 1 st electrode length Le1 is the same as the 1 st conductive portion length Lc 1. The 2 nd electrode length Le2 is the same as the 2 nd conductive portion length Lc 2.
In the embodiment, the electrode length is also made shorter than the conductive portion length in consideration of the complexity of the manufacturing process and the like. This reduces the initial capacitance C0, resulting in high sensitivity.
In the embodiment, for example, the 1 st electrode length Le1 is shorter than the 2 nd conductive portion length Lc 2. For example, the 2 nd electrode length Le2 is shorter than the 1 st conductive portion length Lc 1.
For example, the 1 st electrode length Le1 may be substantially the same as the 2 nd electrode length Le 2. The 1 st electrode length Le1 may be 0.9 times or more and 1.1 times or less the 2 nd electrode length Le 2. In the case where these lengths are substantially the same, the manufacturing process becomes simple.
For example, the 1 st conductive portion length Lc1 may be substantially the same as the 2 nd conductive portion length Lc 2. The 1 st conductive portion length Lc1 may be 0.9 times or more and 1.1 times or less the 2 nd conductive portion length Lc 2. In the case where these lengths are substantially the same, the manufacturing process becomes simple.
In an embodiment, the 1 st electrode length Le1 is greater than or equal to 1/10 and less than or equal to 9/10 of the 1 st conductive portion length Lc 1. Since the 1 st electrode length Le1 is equal to or greater than 1/10 of the 1 st conductive part length Lc1, for example, the influence of variations in the initial capacitance C0 and the like can be easily suppressed. When the 1 st electrode length Le1 is equal to or less than 9/10 of the 1 st conductive part length Lc1, for example, sensitivity is easily improved. For example, the initial capacitance C0 can be stably reduced, and high sensitivity can be easily and stably obtained.
In the embodiment, the 2 nd electrode length Le2 is 1/10 or more and 9/10 or less of the 2 nd conductive portion length Lc 2. Since the 2 nd electrode length Le2 is equal to or greater than 1/10 of the 2 nd conductive portion length Lc2, for example, the influence of variations in the initial capacitance C0 and the like can be easily suppressed. When the 2 nd electrode length Le2 is equal to or less than 9/10 of the 2 nd conductive part length Lc2, for example, sensitivity is easily improved. For example, the initial capacitance C0 can be stably reduced, and high sensitivity can be easily and stably obtained.
As already described, as shown in fig. 1 (a), the 1 st structural body 11 includes the 1 st connecting portion 11 n. The 1 st connecting portion 11n connects the 1 st fixing portion 11f and the 1 st conductive portion 11 c. As shown in fig. 1 (b) and 1 (c), the 1 st connecting portion 11n is separated from the base 50 in the 1 st direction (Z-axis direction). As shown in fig. 1 (b), a gap gn1 is provided between the 1 st connection part 11n and the base 50. For example, the 1 st connecting portion 11n can be deformed. As shown in fig. 1 (a), the 1 st connecting portion 11n and the 1 st conductive portion 11c extend along the 2 nd direction (for example, the Y-axis direction). One end 11ne of the 1 st connecting portion 11n is fixed to the 1 st fixing portion 11 f. The other end 11nf of the 1 st connection part 11n is connected to one end 11ce of the 1 st conductive part 11 c. In the sensor 110, the 1 st connecting portion 11n is a torsion type spring.
As shown in fig. 1 (a), the sensor 110 may further include a 3 rd structural body 13. The 3 rd structural body 13 includes a 3 rd conductive part 13c and a plurality of 3 rd electrodes 13 e. As shown in fig. 1 (b) and 1 (c), the 3 rd conductive portion 13c is fixed to the base 50. In this example, the 3 rd insulating portion 53 is provided. The 3 rd insulating portion 53 is located between the base 50 and the 3 rd conductive portion 13 c. The 3 rd conductive portion 13c is fixed to the base 50 via the 3 rd insulating portion 53. As shown in fig. 1 (a), a plurality of 3 rd electrodes 13e are held by the 3 rd conductive parts 13 c. For example, the 3 rd electrodes 13e are connected to the 3 rd conductive parts 13 c.
As shown in fig. 1 (a), the 1 st structural body 11 includes a 4 th conductive portion 14c and a plurality of 4 th electrodes 14 e. The 4 th conductive part 14c is held by the 1 st fixing part 11 f. The 4 th conductive part 14c is connected to the 1 st fixing part 11 f. As shown in fig. 1 (b), the 4 th conductive part 14c is separated from the base 50 in the 1 st direction (Z-axis direction). For example, a gap gc4 is formed between the 4 th conductive portion 14c and the base 50. For example, the 4 th conductive part 14c can be deformed.
The plurality of 4 th electrodes 14e are held by the 4 th conductive parts 14 c. For example, the 4 th electrodes 14e are connected to the 4 th conductive part 14 c. The distance de4 (see fig. 1 (b)) between the plurality of 4 th electrodes 14e and the base 50 is variable. As shown in fig. 1 (a), a direction from one of the plurality of 4 th electrodes 14e toward another one of the plurality of 4 th electrodes 14e is along the 2 nd direction (Y-axis direction). Gaps ge4 are formed between the plurality of 4 th electrodes 14e and the substrate 50.
As shown in fig. 1 (a), one of the plurality of 3 rd electrodes 13e is positioned between one of the plurality of 4 th electrodes 14e and another one of the plurality of 4 th electrodes 14 e. For example, one of the plurality of 4 th electrodes 14e is located between one of the plurality of 3 rd electrodes 13e and another one of the plurality of 3 rd electrodes 13 e. The 3 rd and 4 th electrodes 13e and 14e form, for example, comb-teeth electrodes. A capacitor is formed by the plurality of 3 rd electrodes 13e and the plurality of 4 th electrodes 14 e. The capacitance of the capacitor depends on the area of the 3 rd electrodes 13e facing the 4 th electrodes 14 e.
For example, when acceleration such as an external force is applied to the sensor 110, the distance de4 changes. For example, as distance de1 becomes longer, distance de4 becomes shorter. For example, as distance de1 becomes shorter, distance de4 becomes longer.
As shown in fig. 1c, the length of one of the 3 rd electrodes 13e along the 1 st direction (Z-axis direction) is set as the 3 rd electrode length Le 3. The length of the 3 rd conductive portion 13c along the 1 st direction is defined as a 3 rd conductive portion length Lc 3. In an embodiment, for example, the 3 rd electrode length Le3 is shorter than the 3 rd conductive portion length Lc 3. This can reduce the capacitance (initial capacitance) formed by the plurality of 3 rd electrodes 13e and the plurality of 4 th electrodes 14 e. This can provide high sensitivity.
For example, as shown in fig. 1 (b), the length of one of the plurality of 4 th electrodes 14e along the 1 st direction (Z-axis direction) is set as the 4 th electrode length Le 4. The length of the 4 th conductive portion 14c along the 1 st direction is defined as a 4 th conductive portion length Lc 4. In the embodiment, the 4 th electrode length Le4 is shorter than the 4 th conductive part length Lc 4. This can reduce the capacitance (initial capacitance) formed by the plurality of 3 rd electrodes 13e and the plurality of 4 th electrodes 14 e. This can provide high sensitivity.
As shown in fig. 1 (a), for example, the 3 rd direction is defined as the X-axis direction. The 3 rd direction intersects a plane including the 1 st direction and the 2 nd direction. In the 3 rd direction, the 1 st conductive portion 11c is located between the 2 nd conductive portion 12c and the 3 rd conductive portion 13 c. In the 3 rd direction, the 4 th conductive portion 14c is located between the 1 st conductive portion 11c and the 3 rd conductive portion 13 c.
As shown in fig. 1 (a), the length of the 1 st conductive part 11c along the 3 rd direction (for example, the X-axis direction, a direction intersecting a plane including the 1 st direction and the 2 nd direction) is defined as a1 st conductive part width Lx 1. The length of the 4 th conductive part 14c along the 3 rd direction is set to the 4 th conductive part width Lx 4. The conductive portion 1 width Lx1 is different from the conductive portion 4 width Lx 4. In this example, the conductive portion 1 width Lx1 is narrower than the conductive portion 4 width Lx 4. In the embodiment, the 1 st conductive portion width Lx1 may be wider than the 4 th conductive portion width Lx 4. By making the 1 st conductive part 11c and the 4 th conductive part 14c asymmetric, these conductive parts are displaced efficiently when an external force is applied. Thereby, the change in the electrostatic capacitance can be increased. High sensitivity can be easily obtained.
As shown in fig. 1 (a), for example, the 1 st connecting portion 11n, the 1 st conductive portion 11c, and the 4 th conductive portion 14c extend along the 2 nd direction (for example, the Y-axis direction). One end 11ne of the 1 st connecting portion 11n is fixed to the 1 st fixing portion 11 f. The other end 11nf of the 1 st connection portion 11n is connected to one end 11ce of the 1 st conductive portion 11c and one end 14ce of the 4 th conductive portion 14 c. The sensor 110 is, for example, a torsion-type MEMS sensor.
As shown in fig. 2, the sensor 110 may include a1 st electrode pad 11E, a2 nd electrode pad 12E, and a 3 rd electrode pad 13E. The 1 st electrode pad 11E is electrically connected to the 1 st conductive part 11c, for example. In this example, the 1 st electrode pad 11E is electrically connected to the 1 st conductive portion 11c via the 1 st fixing portion 11 f. The 2 nd electrode pad 12E is electrically connected to the 2 nd conductive part 12c, for example. The 3 rd electrode pad 13E is electrically connected to, for example, the 3 rd conductive part 13 c.
For example, by detecting the electrical characteristics (e.g., voltage) between the 1 st electrode pad 11E and the 2 nd electrode pad 12E, the change in the electrostatic capacitance between the plurality of 1 st electrodes 11E and the plurality of 2 nd electrodes 12E can be known. For example, by detecting the electrical characteristics (e.g., voltage) between the 1 st electrode pad 11E and the 3 rd electrode pad 13E, the change in the electrostatic capacitance between the plurality of 4 th electrodes 14E and the plurality of 3 rd electrodes 13E can be known.
(embodiment 2)
Fig. 3 (a) to 3 (c), 4 (a), and 4 (b) are schematic views illustrating a sensor according to embodiment 2.
Fig. 3 (a) is a plan view as viewed from arrow AA in fig. 3 (b) and 3 (c). FIG. 3 (b) is a sectional view taken along line D1-D2 of FIG. 3 (a). FIG. 3 (c) is a sectional view taken along line E1-E2 of FIG. 3 (a). Fig. 4 (a) is a sectional view taken along line F1-F2 of fig. 3 (a). Fig. 4 (b) is a sectional view taken along line G1-G2 of fig. 3 (a).
As shown in fig. 3 (a), sensor 120 also includes base 50, 1 st structural body 11, and 2 nd structural body 12.
The 1 st structural body 11 includes a1 st fixed portion 11f, a1 st conductive portion 11c, and a plurality of 1 st electrodes 11 e. As shown in fig. 4 (a), the 1 st fixing portion 11f is fixed to the base 50. In this example, the 1 st fixing portion 11f is fixed to the base 50 via the 1 st insulating portion 51. As shown in fig. 3 (a), the 1 st conductive part 11c is held by the 1 st fixing part 11 f. As shown in fig. 3 (b), the 1 st conductive part 11c is separated from the base 50 in the 1 st direction (for example, Z-axis direction). A gap gc1 is formed between the 1 st conductive part 11c and the base 50. As shown in fig. 3 (a), a plurality of 1 st electrodes 11e are held by the 1 st conductive parts 11 c. For example, the 1 st conductive part 11c is connected to the 1 st fixing part 11 f. As shown in fig. 3 (b), gaps ge1 are formed between the plurality of 1 st electrodes 11e and the substrate 50. The distance de1 between the plurality of 1 st electrodes 11e and the substrate 50 may vary. As shown in (a) of fig. 3, a direction from one of the plurality of 1 st electrodes 11e toward another one of the plurality of 1 st electrodes 11e is along the 2 nd direction. The 2 nd direction intersects the 1 st direction. The 2 nd direction is, for example, the Y-axis direction.
As shown in fig. 3 (a), the 2 nd structural body 12 includes a2 nd electrically conductive portion 12c and a plurality of 2 nd electrodes 12 e. As shown in fig. 3 (c), the 2 nd conductive portion 12c is fixed to the base 50. In this example, the 2 nd conductive part 12c is fixed to the base 50 via the 2 nd insulating part 52. As shown in fig. 3 (a), a plurality of 2 nd electrodes 12e are held by the 2 nd conductive parts 12 c. For example, the plurality of 2 nd electrodes 12e are connected to the 2 nd conductive part 12 c. One of the plurality of 2 nd electrodes 12e is located between one of the plurality of 1 st electrodes 11e and the other of the plurality of 1 st electrodes 11 e.
In this example as well, as shown in fig. 3 (a), the 1 st electrode length Le1 along the 1 st direction (Z axis direction) of one of the plurality of 1 st electrodes 11e is shorter than the 1 st conductive part length Lc1 along the 1 st direction of the 1 st conductive part 11 c. This can reduce the initial capacitance C0. This can provide high sensitivity.
For example, as shown in fig. 3 (c), the 2 nd electrode length Le2 along the 1 st direction of one of the plurality of 2 nd electrodes 12e is shorter than the 2 nd conductive part length Lc2 along the 1 st direction of the 2 nd conductive part 12 c. This can reduce the initial capacitance C0. This can provide high sensitivity.
The sensor 120 is, for example, of a beam spring type. As shown in fig. 3 (a), the 1 st structural body 11 includes a1 st connecting portion 11 n. The 1 st connecting portion 11n connects the 1 st fixing portion 11f and the 1 st conductive portion 11 c. In this example, the 1 st structural body 11 further includes a2 nd fixing portion 11g and a2 nd connecting portion 11 o. As shown in fig. 4 (b), the 2 nd fixing portion 11g is fixed to the base 50. A gap go1 is provided between the 2 nd fixing portion 11g and the base 50. As shown in FIG. 3 (a), the 2 nd connecting portion 11o connects the 2 nd fixing portion 11g and the 1 st conductive portion 11 c. The 1 st link 11n and the 2 nd link 11o are beam springs, for example.
As shown in fig. 4 (a), the 1 st connecting portion 11n is separated from the base 50 in the 1 st direction (Z-axis direction). As shown in fig. 3 (a), the 1 st conductive part 11c extends along the 2 nd direction (for example, the Y-axis direction). One end 11ne of the 1 st connecting portion 11n is fixed to the 1 st fixing portion 11 f. The other end 11nf of the 1 st connection part 11n is connected to one end 11ce of the 1 st conductive part 11 c.
Similarly, as shown in fig. 4 (b), the 2 nd connecting portion 11o is separated from the base 50 in the 1 st direction (Z-axis direction). One end of the 2 nd connecting portion 11o is fixed to the 1 st fixing portion 11 f. The other end of the 2 nd connecting portion 11o is connected to the other end of the 1 st conductive portion 11 c.
As shown in fig. 3 (a), the sensor 120 may include the 3 rd structural body 13. The 3 rd structural body 13 includes a 3 rd conductive part 13c and a plurality of 3 rd electrodes 13 e. As shown in fig. 3 (c), the 3 rd conductive portion 13c is fixed to the base 50. In this example, the 3 rd conductive part 13c is fixed to the base 50 via the 3 rd insulating part 53. As shown in fig. 3 (a), a plurality of 3 rd electrodes 13e are held by the 3 rd conductive parts 13 c. For example, the 3 rd electrodes 13e are connected to the 3 rd conductive parts 13 c.
As shown in fig. 3 (a), the 1 st structural body 11 includes a plurality of 4 th electrodes 14 e. The plurality of 4 th electrodes 14e are held by the 1 st conductive part 11 c. For example, the plurality of 4 th electrodes 14e are connected to the 1 st conductive part 11 c. As shown in fig. 3 (b), a gap ge4 is provided between the plurality of 4 th electrodes 14e and the substrate 50. The distance de4 between the plurality of No. 4 electrodes 14e and the substrate 50 may vary. As shown in fig. 3 (a), a direction from one of the plurality of 4 th electrodes 14e toward another one of the plurality of 4 th electrodes 14e is along the 2 nd direction (e.g., Y-axis direction).
The 1 st conductive part 11c is located between the 2 nd conductive part 12c and the 3 rd conductive part 13c in a 3 rd direction (for example, an X-axis direction) intersecting a plane including the 1 st direction and the 2 nd direction. In the 3 rd direction (for example, the X-axis direction), the 1 st conductive part 11c is located between the plurality of 1 st electrodes 11e and the plurality of 4 th electrodes 14 e. As shown in (a) of fig. 3, one of the plurality of 3 rd electrodes 13e is located between one of the plurality of 4 th electrodes 14e and another one of the plurality of 4 th electrodes 14 e. One of the plurality of 4 th electrodes 14e is positioned between one of the plurality of 3 rd electrodes 13e and another one of the plurality of 3 rd electrodes 13 e. Comb-teeth electrodes are formed by the plurality of 3 rd electrodes 13e and the plurality of 4 th electrodes 14 e.
As shown in fig. 3c, the 3 rd electrode length Le3 along the 1 st direction (Z axis direction) of one of the 3 rd electrodes 13e is shorter than the 3 rd conductive part length Lc3 along the 1 st direction of the 3 rd conductive part 13 c. This can reduce the initial capacitance C0. This can provide high sensitivity.
As shown in fig. 3 (b), the 4 th electrode length Le4 along the 1 st direction of one of the plurality of 4 th electrodes 14e is shorter than the 1 st conductive part length Lc 1. This can reduce the initial capacitance C0.
This can provide high sensitivity.
For example, the 1 st electrode length Le1 is 1/10 or more and 9/10 or less of the 1 st conductive portion length Lc 1. For example, the 2 nd electrode length Le2 is 1/10 or more and 9/10 or less of the 2 nd conductive portion length Lc 2.
As shown in fig. 3 (a), the sensor 120 may further include the 1 st fixed structure 21. The 1 st fixed structure 21 includes a1 st fixed conductive part 21c and a plurality of 1 st fixed electrodes 21 e. As shown in fig. 3 (b), the 1 st electrically conductive fixed portion 21c is fixed to the base 50. As shown in fig. 3 (a), the 1 st fixed electrode 21e is held by the 1 st fixed conductive part 21 c. For example, the 1 st fixed electrode 21e is connected to the 1 st conductive fixed portion 21 c.
As shown in fig. 3 (a), the 2 nd structural body 12 includes a plurality of 5 th electrodes 15 e. The plurality of 5 th electrodes 15e are held by the 2 nd conductive parts 12 c. For example, the plurality of 5 th electrodes 15e are connected to the 2 nd conductive part 12 c. A direction from one of the plurality of 5 th electrodes 15e toward another one of the plurality of 5 th electrodes 15e is along a2 nd direction (e.g., Y-axis direction).
The 2 nd conductive part 12c is located between the 1 st fixed conductive part 21c and the 1 st conductive part 11c in a 3 rd direction (for example, X-axis direction) intersecting a plane including the 1 st direction and the 2 nd direction. In the 3 rd direction, the 2 nd conductive part 12c is located between the plurality of 5 th electrodes 15e and the plurality of 2 nd electrodes 12 e. One of the plurality of 1 st fixed electrodes 21e is located between one of the plurality of 5 th electrodes 15e and another one of the plurality of 5 th electrodes 15 e. One of the plurality of 5 th electrodes 15e is located between one of the plurality of 1 st fixed electrodes 21e and another one of the plurality of 1 st fixed electrodes 21 e. Comb-teeth electrodes are formed by the plurality of 1 st fixed electrodes 21e and the plurality of 5 th electrodes 15 e.
For example, the distance dex1 (see fig. 3 b) between the plurality of 1 st fixed electrodes 21e and the substrate 50 is substantially fixed. For example, the distance de5 (see fig. 3 c) between the plurality of 5 th electrodes 15e and the base 50 is substantially fixed. The capacitance of the capacitor formed by the plurality of 1 st fixed electrodes 21e and the plurality of 5 th electrodes 15e does not substantially change even when an external force is applied.
The capacitance between the 1 st fixed electrodes 21e and the 5 th electrodes 15e can be used as a reference value, for example. For example, the difference between the electrostatic capacitance between the plurality of 1 st fixed electrodes 21e and the plurality of 5 th electrodes 15e and the electrostatic capacitance between the plurality of 1 st electrodes 11e and the plurality of 2 nd electrodes 12e is detected. This enables detection with higher accuracy.
The 2 nd fixed structure 22 may have the same configuration as the 1 st fixed structure 21. Comb teeth electrodes are formed by the plurality of electrodes provided on the 2 nd fixed structure 22 and the plurality of electrodes provided on the 3 rd structure 13. For example, the difference between the capacitance of the comb-teeth electrode and the capacitance between the plurality of 4 th electrodes 14e and the plurality of 3 rd electrodes 13e is detected. This enables detection with higher accuracy.
For example, the sensor 120 may include the 1 st electrode pad 11E, the 2 nd electrode pad 12E, the 3 rd electrode pad 13E, the electrode pad 11F, the electrode pad 21E, and the electrode pad 22E. The 1 st electrode pad 11E is electrically connected to the 1 st conductive part 11c, for example. In this example, the 1 st electrode pad 11E and the electrode pad 11F are electrically connected to the 1 st conductive portion 11 c. The 2 nd electrode pad 12E is electrically connected to the 2 nd conductive part 12c, for example. The 3 rd electrode pad 13E is electrically connected to, for example, the 3 rd conductive part 13 c. The electrode pad 21E is electrically connected to the plurality of 1 st fixed electrodes 21E. The electrode pad 22E is electrically connected to a plurality of electrodes included in the 2 nd fixed structure 22. By detecting the electrical characteristics between these electrode pads, external force and the like can be detected.
In the above-described embodiment, for example, the substrate 50 includes silicon. The plurality of electrodes (the plurality of 1 st electrodes 11e, the plurality of 2 nd electrodes 12e, the plurality of 3 rd electrodes 13e, the plurality of 4 th electrodes 14e, the plurality of 5 th electrodes 15e, the plurality of 1 st fixed electrodes 21e, and the like) include, for example, silicon and the 1 st element. The 1 st element contains, for example, at least one element selected from germanium, phosphorus, arsenic, antimony, boron, gallium, and indium. The element 1 is, for example, an impurity.
Embodiments may include the following.
(technical means 1)
A sensor is provided with:
a substrate;
a1 st structure body including a1 st fixed portion, a1 st conductive portion, and a plurality of 1 st electrodes, the 1 st fixed portion being fixed to the base, the 1 st conductive portion being held by the 1 st fixed portion, the 1 st conductive portion being separated from the base in a1 st direction, the plurality of 1 st electrodes being held by the 1 st conductive portion, a distance between the plurality of 1 st electrodes and the base being variable, a direction from one 1 st electrode of the plurality of 1 st electrodes toward another 1 st electrode of the plurality of 1 st electrodes being along a2 nd direction intersecting the 1 st direction; and
a2 nd structural body including a2 nd electrically conductive portion and a plurality of 2 nd electrodes, the 2 nd electrically conductive portion being fixed to the base, the plurality of 2 nd electrodes being held by the 2 nd electrically conductive portion, one 2 nd electrode of the plurality of 2 nd electrodes being located between the one 1 st electrode of the plurality of 1 st electrodes and the other 1 st electrode of the plurality of 1 st electrodes,
a1 st electrode length along the 1 st direction of the one 1 st electrode of the plurality of 1 st electrodes is shorter than a1 st conductive portion length along the 1 st direction of the 1 st conductive portion.
(technical means 2)
The sensor according to claim 1, wherein a2 nd electrode length along the 1 st direction of the one 2 nd electrode of the plurality of 2 nd electrodes is shorter than a2 nd conductive part length along the 1 st direction of the 2 nd conductive part.
(technical means 3)
According to the sensor described in claim 2 of the present invention,
the 1 st electrode length is shorter than the 2 nd conductive portion length,
the 2 nd electrode length is shorter than the 1 st conductive portion length.
(technical means 4)
The sensor according to any one of claims 1 to 3,
the 1 st electrode length is 1/10 or more and 9/10 or less of the 1 st conductive part length.
(technical means 5)
A sensor is provided with:
a substrate;
a1 st structure body including a1 st fixed portion, a1 st conductive portion, and a plurality of 1 st electrodes, the 1 st fixed portion being fixed to the base, the 1 st conductive portion being held by the 1 st fixed portion, the 1 st conductive portion being separated from the base in a1 st direction, the plurality of 1 st electrodes being held by the 1 st conductive portion, a distance between the plurality of 1 st electrodes and the base being variable, a direction from one 1 st electrode of the plurality of 1 st electrodes toward another 1 st electrode of the plurality of 1 st electrodes being along a2 nd direction intersecting the 1 st direction; and
a2 nd structural body including a2 nd electrically conductive portion and a plurality of 2 nd electrodes, the 2 nd electrically conductive portion being fixed to the base, the plurality of 2 nd electrodes being held by the 2 nd electrically conductive portion, one 2 nd electrode of the plurality of 2 nd electrodes being located between the one 1 st electrode of the plurality of 1 st electrodes and the other 1 st electrode of the plurality of 1 st electrodes,
a2 nd electrode length along the 1 st direction of the one 2 nd electrode of the plurality of 2 nd electrodes is shorter than a2 nd conductive portion length along the 1 st direction of the 2 nd conductive portion.
(technical means 6)
The sensor according to any one of claims 2 to 4,
the 2 nd electrode length is 1/10 or more and 9/10 or less of the 2 nd conductive part length.
(technical means 7)
The sensor according to any one of claims 1 to 6,
the 1 st structural body further includes a1 st connecting portion connecting the 1 st fixing portion and the 1 st conductive portion,
the 1 st connecting portion is separated from the base body in the 1 st direction,
the 1 st connection portion and the 1 st conductive portion extend along the 2 nd direction,
one end of the 1 st connecting part is fixed to the 1 st fixing part,
the other end of the 1 st connecting portion is connected to one end of the 1 st conductive portion.
(technical means 8)
The sensor according to any one of claims 1 to 6,
further comprising a 3 rd structural body, wherein the 3 rd structural body comprises a 3 rd electrically conductive part and a plurality of 3 rd electrodes, the 3 rd electrically conductive part is fixed to the base, the plurality of 3 rd electrodes are held by the 3 rd electrically conductive part,
the 1 st structure body includes a 4 th conductive part held by the 1 st fixing part, the 4 th conductive part being separated from the base in the 1 st direction, and a plurality of 4 th electrodes held by the 4 th conductive part, distances between the plurality of 4 th electrodes and the base being variable, a direction from one 4 th electrode of the plurality of 4 th electrodes toward another 4 th electrode of the plurality of 4 th electrodes being along the 2 nd direction,
one 3 rd electrode of the plurality of 3 rd electrodes is located between the one 4 th electrode of the plurality of 4 th electrodes and the other 4 th electrode of the plurality of 4 th electrodes,
a 3 rd electrode length along the 1 st direction of the one 3 rd electrode of the plurality of 3 rd electrodes is shorter than a 3 rd conductive portion length along the 1 st direction of the 3 rd conductive portion.
(technical means 9)
The sensor according to claim 8, wherein a 4 th electrode length along the 1 st direction of the one 4 th electrode of the plurality of 4 th electrodes is shorter than a 4 th conductive part length along the 1 st direction of the 4 th conductive part.
(technical means 10)
According to the sensor of claim 8 or 9,
the 1 st conductive part is located between the 2 nd conductive part and the 3 rd conductive part in a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction,
in the 3 rd direction, the 4 th conductive portion is located between the 1 st conductive portion and the 3 rd conductive portion.
(technical means 11)
The sensor according to claim 8 or 9, wherein a1 st conductive part width of the 1 st conductive part along a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction is different from a 4 th conductive part width of the 4 th conductive part along the 3 rd direction.
(technical means 12)
The sensor according to any one of claims 8 to 11,
the 1 st structural body further includes a1 st connecting portion connecting the 1 st fixing portion and the 1 st conductive portion,
the 1 st connecting portion is separated from the base body in the 1 st direction,
the 1 st connection portion, the 1 st conductive portion, and the 4 th conductive portion extend along the 2 nd direction,
one end of the 1 st connecting part is fixed to the 1 st fixing part,
the other end of the 1 st connecting portion is connected to one end of the 1 st conductive portion and one end of the 4 th conductive portion.
(technical means 13)
The sensor according to any one of claims 1 to 6,
the 1 st structural body further includes a1 st connecting portion connecting the 1 st fixing portion and the 1 st conductive portion,
the 1 st connecting portion is separated from the base body in the 1 st direction,
the 1 st conductive portion extends along the 2 nd direction,
one end of the 1 st connecting part is fixed to the 1 st fixing part,
the other end of the 1 st connecting portion is connected to one end of the 1 st conductive portion.
(technical means 14)
The sensor according to any one of claims 1 to 6,
further comprising a 3 rd structural body, wherein the 3 rd structural body comprises a 3 rd electrically conductive part and a plurality of 3 rd electrodes, the 3 rd electrically conductive part is fixed to the base, the plurality of 3 rd electrodes are held by the 3 rd electrically conductive part,
the 1 st structural body includes a plurality of 4 th electrodes, the plurality of 4 th electrodes being held by the 1 st conductive portion, a distance between the plurality of 4 th electrodes and the base is variable, a direction from one 4 th electrode of the plurality of 4 th electrodes toward another 4 th electrode of the plurality of 4 th electrodes is along the 2 nd direction,
the 1 st conductive part is located between the 2 nd conductive part and the 3 rd conductive part in a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction,
in the 3 rd direction, the 1 st conductive portion is located between the plurality of 1 st electrodes and the plurality of 4 th electrodes,
one 3 rd electrode of the plurality of 3 rd electrodes is located between the one 4 th electrode of the plurality of 4 th electrodes and the other 4 th electrode of the plurality of 4 th electrodes,
a 3 rd electrode length along the 1 st direction of the one 3 rd electrode of the plurality of 3 rd electrodes is shorter than a 3 rd conductive portion length along the 1 st direction of the 3 rd conductive portion.
(technical means 15)
According to the sensor of claim 14 in which,
a 4 th electrode length along the 1 st direction of the one 4 th electrode of the plurality of 4 th electrodes is shorter than the 1 st conductive portion length.
(technical means 16)
The sensor according to any one of claims 8 to 15,
the device further comprises a1 st fixing structure body,
the 1 st fixed structure body includes a1 st fixed conductive portion and a plurality of 1 st fixed electrodes, the 1 st fixed conductive portion is fixed to the base, the plurality of 1 st fixed electrodes are held by the 1 st fixed conductive portion,
the 2 nd structural body includes a plurality of 5 th electrodes, the plurality of 5 th electrodes being held by the 2 nd conductive portion, a direction from one 5 th electrode of the plurality of 5 th electrodes toward another 5 th electrode of the plurality of 5 th electrodes being along the 2 nd direction,
the 2 nd conductive part is located between the 1 st fixed conductive part and the 1 st conductive part in a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction,
in the 3 rd direction, the 2 nd electrically conductive portion is located between the plurality of 5 nd electrodes and the plurality of 2 nd electrodes,
one 1 st fixed electrode of the plurality of 1 st fixed electrodes is located between the one 5 th electrode of the plurality of 5 th electrodes and the other 5 th electrode of the plurality of 5 th electrodes.
(technical means 17)
According to the sensor of claim 16 in which,
the distance between the plurality of 1 st fixed electrodes and the substrate is substantially fixed,
the distance between the plurality of 5 th electrodes and the substrate is substantially fixed.
(technical means 18)
The sensor according to any one of claims 1 to 17,
further comprises a1 st insulating part and a2 nd insulating part,
the 1 st insulating part is arranged between the basal body and the 1 st fixing part,
the 2 nd insulating portion is provided between the base and the 2 nd conductive portion.
(technical means 19)
The sensor according to any one of claims 1 to 18,
the substrate comprises silicon and is characterized in that,
the plurality of 1 st electrodes and the plurality of 2 nd electrodes comprise silicon and an element 1,
the 1 st element contains at least one element selected from germanium, phosphorus, arsenic, antimony, boron, gallium and indium.
(technical means 20)
The sensor according to any one of claims 1 to 19,
electrostatic capacitances between the plurality of 1 st electrodes and the plurality of 2 nd electrodes vary in accordance with a variation in the distance between the plurality of 1 st electrodes and the base.
According to the embodiment, a sensor which can improve sensitivity can be provided.
The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, specific configurations of the elements such as the base, the structure, the conductive portion, and the electrode included in the sensor are included in the scope of the present invention as long as the present invention can be similarly implemented and obtain similar effects by appropriately selecting from known ranges by those skilled in the art.
In addition, a combination of any two or more elements of each specific example within the technical scope is also included in the scope of the present invention as long as the gist of the present invention is included.
In addition, as the embodiment of the present invention, all sensors that can be implemented by a person skilled in the art by appropriately designing and modifying the above-described sensors are also within the scope of the present invention as long as the gist of the present invention is included.
Furthermore, it should be understood that: various modifications and alterations can be conceived by those skilled in the art within the scope of the idea of the present invention, and these modifications and alterations also fall within the scope of the present invention.
Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in other various ways, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and/or modifications thereof are included in the scope and/or gist of the invention, and are included in the invention described in the claims and the equivalent scope thereof.

Claims (7)

1. A sensor is provided with:
a substrate;
a1 st structure including a1 st fixing portion, a1 st conductive portion, and a plurality of 1 st electrodes, the 1 st fixing portion being fixed to the base, the 1 st conductive portion being held by the 1 st fixing portion, the 1 st conductive portion being separated from the base in a1 st direction, the plurality of 1 st electrodes being held by the 1 st conductive portion, a distance between the plurality of 1 st electrodes and the base being variable, a direction from one 1 st electrode of the plurality of 1 st electrodes toward another 1 st electrode of the plurality of 1 st electrodes being along a2 nd direction intersecting the 1 st direction; and
a2 nd structural body including a2 nd electrically conductive portion and a plurality of 2 nd electrodes, the 2 nd electrically conductive portion being fixed to the base, the plurality of 2 nd electrodes being held by the 2 nd electrically conductive portion, one 2 nd electrode of the plurality of 2 nd electrodes being located between the one 1 st electrode of the plurality of 1 st electrodes and the other 1 st electrode of the plurality of 1 st electrodes,
a1 st electrode length along the 1 st direction of the one 1 st electrode of the plurality of 1 st electrodes is shorter than a1 st conductive portion length along the 1 st direction of the 1 st conductive portion.
2. A sensor is provided with:
a substrate;
a1 st structure including a1 st fixing portion, a1 st conductive portion, and a plurality of 1 st electrodes, the 1 st fixing portion being fixed to the base, the 1 st conductive portion being held by the 1 st fixing portion, the 1 st conductive portion being separated from the base in a1 st direction, the plurality of 1 st electrodes being held by the 1 st conductive portion, a distance between the plurality of 1 st electrodes and the base being variable, a direction from one 1 st electrode of the plurality of 1 st electrodes toward another 1 st electrode of the plurality of 1 st electrodes being along a2 nd direction intersecting the 1 st direction; and
a2 nd structural body including a2 nd electrically conductive portion and a plurality of 2 nd electrodes, the 2 nd electrically conductive portion being fixed to the base, the plurality of 2 nd electrodes being held by the 2 nd electrically conductive portion, one 2 nd electrode of the plurality of 2 nd electrodes being located between the one 1 st electrode of the plurality of 1 st electrodes and the other 1 st electrode of the plurality of 1 st electrodes,
a2 nd electrode length along the 1 st direction of the one 2 nd electrode of the plurality of 2 nd electrodes is shorter than a2 nd conductive portion length along the 1 st direction of the 2 nd conductive portion.
3. The sensor according to claim 1, wherein the sensor is a piezoelectric sensor,
the 1 st structural body further includes a1 st connecting portion connecting the 1 st fixing portion and the 1 st conductive portion,
the 1 st connecting portion is separated from the base body in the 1 st direction,
the 1 st connection portion and the 1 st conductive portion extend along the 2 nd direction,
one end of the 1 st connecting part is fixed to the 1 st fixing part,
the other end of the 1 st connecting portion is connected to one end of the 1 st conductive portion.
4. The sensor according to claim 1, wherein the sensor is a piezoelectric sensor,
further comprising a 3 rd structural body, wherein the 3 rd structural body comprises a 3 rd electrically conductive part and a plurality of 3 rd electrodes, the 3 rd electrically conductive part is fixed to the base, the plurality of 3 rd electrodes are held by the 3 rd electrically conductive part,
the 1 st structure body includes a 4 th conductive part held by the 1 st fixing part, the 4 th conductive part being separated from the base in the 1 st direction, and a plurality of 4 th electrodes held by the 4 th conductive part, distances between the plurality of 4 th electrodes and the base being variable, a direction from one 4 th electrode of the plurality of 4 th electrodes toward another 4 th electrode of the plurality of 4 th electrodes being along the 2 nd direction,
one 3 rd electrode of the plurality of 3 rd electrodes is located between the one 4 th electrode of the plurality of 4 th electrodes and the other 4 th electrode of the plurality of 4 th electrodes,
a 3 rd electrode length along the 1 st direction of the one 3 rd electrode of the plurality of 3 rd electrodes is shorter than a 3 rd conductive portion length along the 1 st direction of the 3 rd conductive portion.
5. The sensor according to claim 1, wherein the sensor is a piezoelectric sensor,
the 1 st structural body further includes a1 st connecting portion connecting the 1 st fixing portion and the 1 st conductive portion,
the 1 st connecting portion is separated from the base body in the 1 st direction,
the 1 st conductive portion extends along the 2 nd direction,
one end of the 1 st connecting part is fixed to the 1 st fixing part,
the other end of the 1 st connecting portion is connected to one end of the 1 st conductive portion.
6. The sensor according to claim 1, wherein the sensor is a piezoelectric sensor,
further comprising a 3 rd structural body, wherein the 3 rd structural body comprises a 3 rd electrically conductive part and a plurality of 3 rd electrodes, the 3 rd electrically conductive part is fixed to the base, the plurality of 3 rd electrodes are held by the 3 rd electrically conductive part,
the 1 st structural body includes a plurality of 4 th electrodes, the plurality of 4 th electrodes being held by the 1 st conductive portion, a distance between the plurality of 4 th electrodes and the base is variable, a direction from one 4 th electrode of the plurality of 4 th electrodes toward another 4 th electrode of the plurality of 4 th electrodes is along the 2 nd direction,
the 1 st conductive part is located between the 2 nd conductive part and the 3 rd conductive part in a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction,
in the 3 rd direction, the 1 st conductive portion is located between the plurality of 1 st electrodes and the plurality of 4 th electrodes,
one 3 rd electrode of the plurality of 3 rd electrodes is located between the one 4 th electrode of the plurality of 4 th electrodes and the other 4 th electrode of the plurality of 4 th electrodes,
a 3 rd electrode length along the 1 st direction of the one 3 rd electrode of the plurality of 3 rd electrodes is shorter than a 3 rd conductive portion length along the 1 st direction of the 3 rd conductive portion.
7. The sensor according to claim 4, wherein the sensor is a piezoelectric sensor,
the device further comprises a1 st fixing structure body,
the 1 st fixed structure body includes a1 st fixed conductive portion and a plurality of 1 st fixed electrodes, the 1 st fixed conductive portion is fixed to the base, the plurality of 1 st fixed electrodes are held by the 1 st fixed conductive portion,
the 2 nd structural body includes a plurality of 5 th electrodes, the plurality of 5 th electrodes being held by the 2 nd conductive portion, a direction from one 5 th electrode of the plurality of 5 th electrodes toward another 5 th electrode of the plurality of 5 th electrodes being along the 2 nd direction,
the 2 nd conductive part is located between the 1 st fixed conductive part and the 1 st conductive part in a 3 rd direction intersecting a plane including the 1 st direction and the 2 nd direction,
in the 3 rd direction, the 2 nd electrically conductive portion is located between the plurality of 5 nd electrodes and the plurality of 2 nd electrodes,
one 1 st fixed electrode of the plurality of 1 st fixed electrodes is located between the one 5 th electrode of the plurality of 5 th electrodes and the other 5 th electrode of the plurality of 5 th electrodes.
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