CN112397363A - Electron gun beam spot correction device and correction method - Google Patents

Electron gun beam spot correction device and correction method Download PDF

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Publication number
CN112397363A
CN112397363A CN202011044023.4A CN202011044023A CN112397363A CN 112397363 A CN112397363 A CN 112397363A CN 202011044023 A CN202011044023 A CN 202011044023A CN 112397363 A CN112397363 A CN 112397363A
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electron gun
calibration
beam spot
parameters
fine
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CN112397363B (en
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王志翔
赵纪元
王红宇
凌楷
韩莉娜
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National Institute Corp of Additive Manufacturing Xian
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National Institute Corp of Additive Manufacturing Xian
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The invention provides a device and a method for correcting beam spots of an electron gun, and solves the problems that the conventional electron gun has high beam spot calibration cost, is not beneficial to sealing a box body and maintaining the vacuum degree. The proofreading device comprises a coarse proofreading component and a fine proofreading component; the rough calibration pair assembly comprises a rough calibration pair plate, a rough calibration pair base and a rough calibration pair supporting plate, and the rough calibration pair plate is arranged above the rough calibration pair base through the rough calibration pair supporting plate; a plurality of rough calibration holes are formed in the rough calibration plate; the fine correction pair assembly comprises a fine correction plate, an insulating support plate, a fine correction base, a follow current resistor and a current detection table; a plurality of precise calibration holes are formed in the precise calibration plate, and a cross-shaped tungsten wire is arranged in each precise calibration hole; the fine calibration plate is arranged above the fine calibration base through an insulation support plate, so that a certain distance is reserved between the fine calibration plate and the fine calibration base and the fine calibration plate and the fine calibration base are insulated from each other to form a capacitor; the both ends of afterflow resistance are connected with the base electricity of accurate school pair board and accurate school respectively, and the current checking table is used for detecting the electric current through afterflow resistance.

Description

Electron gun beam spot correction device and correction method
Technical Field
The invention belongs to the field of additive manufacturing, and particularly relates to a device and a method for correcting beam spots of an electron gun.
Background
Electron Beam Selective Melting (EBSM) metal additive manufacturing techniques use an electron beam as an energy source to manufacture solid parts by melting metal powder layer by layer in a high vacuum environment. Because the power of the electron beam is high, and the material has high energy absorption rate to the electron beam, the finished piece has the characteristics of high density, low oxygen content, low thermal stress, difficult deformation and cracking, high printing efficiency, high material utilization rate and the like, and is widely applied to the fields of medical treatment, aerospace and the like.
The process of Electron Beam Selective Melting (EBSM) metal additive manufacturing comprises the following steps: firstly, spreading a layer of powder on the surface of a powder spreading plane, and preheating and insulating the powder by an electron beam to meet the requirements of printing process parameters; secondly, selectively melting the electron beams under the control of a computer according to the cross section profile information, melting the metal powder under the bombardment of the electron beams, and bonding the metal powder with the formed part below to realize layer-by-layer accumulation until the whole part is completely melted; and finally, removing redundant powder to obtain the required three-dimensional product.
At present, an electron beam selective melting forming technology is gradually matured, forming efficiency and forming precision are gradually improved, but the technology cannot meet the manufacturing requirement of large components and cannot form large-size components. Therefore, the method breaks through the technical bottleneck of continuous manufacturing of large-size components, and is a key technology for improving the forming efficiency of large-size electron beam forming equipment. If the manufacturing requirement of a large component is to be met, a plurality of electron guns are required to be orderly arranged according to a certain mode, each electron gun is responsible for one area, and all the areas form the whole printing surface. The electron beams are not completely vertical to the working surface after passing through the deflection coils, but form a certain included angle with the vertical direction. Along with the increase of the deflection angle of the electron beam, the beam quality of the electron beam is greatly reduced, and beam spots have certain deformation, so that the quality of a processing process is influenced. For example, an excessively large beam spot size can result in non-concentrated energy and processing defects; the distorted beam spot causes a reduction in the accuracy of processing, and the beam spot having a deviation in the position of the beam spot causes a reduction in the accuracy of processing. Therefore, the beam spot needs to be calibrated before the high-energy beam processing is performed.
Fig. 1 shows a prior art electron gun detection technique for additive manufacturing, which automatically calibrates a beam spot, that is, adjusts the size, shape and position of the beam spot to a preset state by means of a computer and a detector. The method scans an electron beam onto a reference object to generate an X-ray signal, thereby calibrating the size and position of a beam spot of the scanned electron beam. The reference object is a lower plate and an upper plate which are parallel and spaced apart from each other, the upper plate includes a plurality of holes and provides a predetermined hollow pattern in the holes, and the electron beam is detected and recorded at the edges of the pattern while being scanned over the tungsten plate having the hollow pattern. However, this method has the following drawbacks: 1) shooting and extracting beam spot size, shape and position information through an imaging device; for example, the detector employs an X-ray camera (CCD camera), so that the cost of the calibration apparatus is greatly increased; 2) the upper plate (detection plate) is made of a tungsten plate and other metal plates with higher cost, so that the detection cost is higher; 3) the detector is arranged on the outer side of the vacuum box body, and a plurality of detection openings are required to be formed in the vacuum box body at the moment, so that the sealing of the box body and the maintenance of the vacuum degree are not facilitated; 4) when the detector is used on a large-size EBSM, a larger detection range is needed, the view field of the detector is required to be larger, and a plurality of detectors are needed for detection.
Disclosure of Invention
The invention aims to solve the problems that the existing electron gun beam spot calibration cost is high, the sealing of a box body is not facilitated, and the vacuum degree is kept, and provides an electron gun beam spot calibration device and a calibration method.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
a kind of electron gun beam spot calibration device, including rough calibration assembly and fine calibration assembly; the rough calibration pair assembly comprises a rough calibration pair plate, a rough calibration pair base and a rough calibration pair supporting plate, and the rough calibration pair plate is arranged above the rough calibration pair base through the rough calibration pair supporting plate; the rough calibration plate is provided with a plurality of rough calibration holes which are arranged according to a matrix, and the arrangement range of the rough calibration holes is more than or equal to the scanning area of the electron gun; the fine correction pair assembly comprises a fine correction plate, an insulating support plate, a fine correction base, a follow current resistor and a current meter; the fine calibration plate is provided with a plurality of fine calibration holes which are arranged according to a matrix, and the arrangement range of the fine calibration holes is more than or equal to the scanning area of the electron gun; a cross tungsten wire is arranged in each fine calibration hole, or a cross tungsten wire is arranged above each fine calibration hole and is used as a calibration target; the fine calibration plate and the fine calibration base are both conductive plates, and the fine calibration plate is arranged above the fine calibration base through an insulating support plate, so that a certain distance is reserved between the fine calibration plate and the fine calibration base and the fine calibration plate and the fine calibration base are mutually insulated to form a capacitor; the current detection table is connected with the follow current resistor and is used for detecting the current passing through the follow current resistor.
Further, the diameter of the coarse calibration hole is smaller than that of the fine calibration hole.
Further, the cross-shaped tungsten wire is arranged above the fine calibration hole and is pressed tightly through the pressing ring.
Further, the planeness of the rough calibration plate and the fine calibration plate is within 0.01 mm.
Further, the rough calibration plate and the fine calibration plate are both stainless steel plates.
Further, the number of the coarse alignment holes is 81, the coarse alignment holes are arranged in a 9 × 9 matrix, the diameter of each coarse alignment hole is 0.8mm, and the distance between every two adjacent coarse alignment holes is 37.5 mm.
Further, the diameter of the cross-shaped tungsten wire is 0.2mm, and the fine calibration holes are arranged in a 9 x 17 matrix.
Meanwhile, the invention also provides an electron gun beam spot correction method based on the electron gun beam spot correction device, which comprises the following steps:
step one, rough proofreading
1.1) installing an electron gun A1 and a rough calibration pair assembly on an electron gun test bed, and adjusting the relative positions of a rough calibration plate and the electron gun so that the distance between the calibration surface of the rough calibration plate and the electron gun A1 is equal to the distance between the printing surface of equipment and the electron gun A1;
1.2) after the vacuum box body is vacuumized, opening an electron gun A1, and enabling an electron beam to be incident on a rough calibration plate, wherein a beam spot bright spot can be observed;
1.3) adjusting parameters of an electron gun A1, controlling a beam spot to move to a rough calibration hole to be calibrated on a rough calibration plate, when a bright spot of the beam spot disappears, enabling the beam spot to enter the rough calibration hole, and recording the parameters of the electron gun at the moment;
1.4) controlling the electron gun to move the beam spot to the next rough calibration hole, and repeating the step 1.3) to record the electron gun parameters of all the rough calibration holes;
1.5) carrying out interpolation calculation on the electron gun parameters of all the rough calibration holes to obtain the electron gun parameters of all the arbitrary positions in the scanning range of the electron gun A1;
1.6) repeating the steps 1.1) to 1.5), and performing coarse proofreading on all the electron guns to obtain the electron gun parameters of all the proofread electron guns;
step two, fine calibration
2.1) installing all the electron guns subjected to rough calibration on a vacuum box body, installing a fine calibration assembly on an equipment workbench, wherein the elevation of the fine calibration plate is equal to the horizontal elevation of a printing working position;
2.2) vacuumizing the vacuum box body;
2.3) starting the electron gun A1, controlling the electron beam of the electron gun A1 to be incident into a fine calibration hole of a fine calibration plate according to the coarse positioning parameters of the electron gun A1, and then moving the electron beam along the positive direction of the X, Y axis to enable the beam spot of the electron gun A1 to be in the first quadrant of the cross tungsten filament;
2.4) adjusting the electron gun parameters of the electron gun A1, controlling the electron beam to move according to a certain rule, and recording the current and the electron gun parameters of the current meter when the electron beam touches the cross tungsten filament;
2.41) adjusting the parameters of the electron gun to control the electron beam to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.42) moving the electron beam into a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.43) controlling the electron beam in a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.44) moving the electron beam into a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards an X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.45) controlling the electron beam in a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.46) moving the electron beam into the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.47) controlling the electron beam in the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.48) moving the electron beam into the first quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.5) calculating the parameters obtained in the step 2.4) to obtain fine positioning parameters and beam spot size;
2.51) acquiring a fine positioning parameter;
taking an average value of the electron gun parameters obtained in the step 2.41), the step 2.42), the step 2.45) and the step 2.46) as a fine positioning parameter of the X coordinate of the fine calibration hole; taking an average value of the electron gun parameters obtained in the step 2.43), the step 2.44), the step 2.47) and the step 2.48) as a fine positioning parameter of the Y coordinate of the fine calibration hole; thereby obtaining the fine positioning parameters of the X and Y coordinates of the fine calibration hole;
2.52) acquiring the beam spot size;
converting the parameter difference obtained in the step 2.41) and the step 2.42) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionX1(ii) a Converting the parameter difference obtained in the step 2.45) and the step 2.46) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionX2(ii) a Converting the parameter difference obtained in the step 2.43) and the step 2.44) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the Y-axis directionY1(ii) a Converting the parameter difference obtained in the step 2.47) and the step 2.48) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionY2(ii) a Get DX1And DX2The average value is taken as the beam spot diameter D in the X-axis directionXTaking DY1And DY2The average value is the beam spot diameter D in the Y-axis directionY；
2.6) judging whether the size and the shape of the beam spot meet the requirements or not;
2.61) correcting the size of the beam spot;
will DX1And DY1If the diameter D meets the requirement, recording the parameters of the electron gun meeting the requirement of the value D; if the diameter D does not meet the requirement, adjusting the parameters of the electron gun, repeating the step 2.4) and the step 2.5) after adjustment until the diameter D meeting the requirement is obtained, and recording the parameters of the electron gun meeting the requirement of the diameter D value;
2.62) Beam Spot shape correction
Judgment of DXAnd DYIf the beam spot is equal, the beam spot is a standard beam spot, if the beam spot is not equal, the beam spot is a non-standard beam spot, the parameters of the electron gun are adjusted, and the step 2.4) and the step 2 are repeated after the adjustment5) up to DX＝DYForming a standard beam spot and recording the parameter value of the electron gun at the spot;
2.7) controlling the electron beam of the electron gun A1 to be incident into the next fine calibration hole on the fine calibration plate according to the coarsely positioned electron gun parameters, and repeating the steps 2.3) to 2.6) until all the fine calibration holes are detected;
2.8) carrying out interpolation calculation on the point position parameters and the electron gun parameters of all the fine calibration holes to obtain the electron gun parameters, the size of an electron beam spot and the shape of the electron beam spot of any position in the scanning range of the electron gun A1;
2.9) closing the electron gun A1, starting other corrected electron guns, and repeating the steps 2.3) to 2.8) to obtain the electron gun parameters, the electron beam spot size and the electron beam spot shape of any position in the scanning range of all the electron guns.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
1. the detection signal obtained by the electron gun beam spot calibration device and the calibration method is a current signal, and compared with the traditional method, detection parts such as an X-ray camera (CNC) and the like are omitted, so that the cost of detection equipment is reduced; meanwhile, the cross tungsten wire is used as the target, so that the using amount of tungsten metal is saved, and the detection cost is greatly reduced.
2. After the electron gun is calibrated by the electron gun beam spot calibration device and the electron gun beam spot calibration method, the electron gun parameters of any point in an electron beam scanning area can be obtained, so that the position, the size and the shape of a beam spot can be accurately controlled by controlling the parameters of the electron gun during printing, and the printing quality is improved.
3. The electron gun beam spot correction device of the invention places all the devices in the vacuum chamber box body, and the vacuum chamber box body is not required to be provided with holes used by an X-ray camera, thereby being beneficial to sealing the box body and keeping the vacuum degree of the box body.
Drawings
Fig. 1 is a structural diagram of a conventional electron beam metal additive manufacturing apparatus;
FIG. 2 is a schematic view of an electron gun and a coarse alignment assembly according to the present invention;
FIG. 3 is a schematic view of the coarse alignment plate of the present invention with coarse alignment holes disposed therein;
FIG. 4 is a schematic structural diagram of a fine calibration assembly according to the present invention;
FIG. 5 is a schematic view of the relative position of the fine calibration plate and the worktable of the present invention;
FIG. 6 is a schematic diagram of the scanning area and powder bed position of each electron gun according to the present invention;
FIG. 7 is a schematic diagram of the movement of the beam spot during fine calibration according to the present invention;
FIG. 8 is a schematic view of a non-standard beam spot of the present invention.
Reference numerals: 1-electron gun, 2-coarse calibration component, 3-fine calibration component, 5-vacuum chamber box, 11-cathode, 12-grid, 13-high voltage power supply, 14-grid voltage, 15-anode, 16-dynamic coil, 17-astigmatic coil, 18-focusing coil, 19-deflection coil, 21-coarse calibration base, 22-coarse calibration support plate, 23-coarse calibration plate, 231-coarse calibration hole, 31-fine calibration base, 32-insulating support plate, 33-free-wheeling resistor, 34-fine calibration plate, 35-current meter, 36-cross tungsten filament, 37-pressing ring, 341-fine calibration hole and 51-window.
Detailed Description
The invention is further illustrated by the following specific figures and examples.
The invention provides a device and a method for correcting beam spots of an electron gun. The area required to be calibrated is a scanning area, namely, specific parameters of the electron gun are calibrated at any point of the scanning area, which is the purpose and the result of the calibration work. The rough calibration of the electron gun is carried out after the electron gun is installed or overhauled and parts are replaced, and each electron gun needs to be calibrated to obtain rough positioning parameters of the beam spot position of the electron gun. The fine calibration is carried out after the equipment is adjusted and installed or after parts are overhauled and replaced, particularly after an electron gun is adjusted and installed in a box body and before the additive manufacturing equipment starts to manufacture workpieces, the position parameters of the beam spot of the electron gun are calibrated and recorded, the size of the beam spot is detected and corrected, the parameters of the electron gun corresponding to the high-quality beam spot of any point in a printing area are obtained, and therefore when the workpieces are printed, the parameters are used for ensuring the printing accuracy.
As shown in fig. 2, the electron gun 1 is mainly composed of a cathode 11, a grid 12, a high voltage power supply 13 (also called an acceleration power supply), a grid voltage 14, an anode 15, a dynamic coil 16, an astigmatism coil 17, a focusing coil 18 (also called a magnetic focusing mirror), and a deflection coil 19 (also called a magnetic focusing mirror). The rough calibration is carried out on an electron gun test bed, and the calibration is carried out gradually by a single electron gun. The rough calibration pair assembly 2 comprises a rough calibration pair plate 23, a rough calibration pair base 21 and a rough calibration pair supporting plate 22, wherein the rough calibration pair plate 23 is arranged above the rough calibration pair base 21 through the rough calibration pair supporting plate 22; the coarse alignment plate 23 is provided with a plurality of coarse alignment holes 231, the plurality of coarse alignment holes 231 are arranged in a matrix (may be 9 × 9 — 81), and the arrangement range of the coarse alignment is equal to or larger than the scanning area of the electron gun.
As shown in fig. 3, the rough calibration plate 23 is a key component of the rough calibration assembly 2, and is made of stainless steel, the upper surface of the rough calibration plate has a certain levelness, the flatness is required to be within a certain range, specifically, 0.01mm, the shape of the rough calibration plate 23 is the same as the scanning area, the size of the rough calibration plate is 10mm larger than the range of the scanning area, and the distance between the calibration surface and the electron gun must be equal to the distance between the printing surface and the electron gun in the device. A plurality of coarse calibration holes 231 with a diameter a (which may be 0.8mm) are uniformly distributed on the coarse calibration plate 23, and the arrangement range of the coarse calibration holes 231 is the same as the scanning area. Each coarse calibration hole 231 is a point for coarse calibration, and the error of the coarse calibration is a value. The position degree of the coarse calibration hole 231 also has certain requirements, which is the premise of ensuring the calibration accuracy, and the smaller the hole diameter is, the smaller the hole interval is, and the more accurate the calibration is; however, the more calibration work and the more time consuming, the more accurate and economic relationship needs to be considered comprehensively to determine a reasonable spacing. The hole spacing in the device is set to 37.5mm in consideration of economy while ensuring accuracy. During calibration, an electron beam sweeps on a calibration plate, when the electron beam does not meet a hole, a light spot is visible, when the hole is swept, the light spot is invisible, at the moment, the position coordinates of the hole and parameters of an electron gun are recorded, the hole sweeps one by one and the parameters are recorded to obtain a group of corresponding parameters of the electron gun, spline function interpolation is carried out on the parameters to obtain parameters (deflection current of the electron gun and the like) of the electron gun at any point in a scanning area, the parameters are the basis for fine calibration, and if the diameter and the position of the hole on the calibration plate are ideal and accurate, the error of a calibration result is the value a.
After the electron gun is roughly calibrated, the precise calibration work is carried out, the precise calibration makes the calibration precision of the beam spot position smaller than the value a, and the precise electron gun parameters of any point in the printing area are obtained through a spline function interpolation method. The shape and diameter of the beam spot at each calibration position are measured in the fine calibration, and then the shape and diameter of the beam spot are idealized by adjusting the parameters of the electron gun, and the parameters after the fine calibration are the basis for accurately finishing printing.
As shown in fig. 4, the fine calibration pair assembly 3 includes a fine calibration plate 34, an insulating support plate 32, a fine calibration base 31, a freewheeling resistor 33, a clamping ring 37 and a current meter 35; the fine calibration plate 34 is provided with a plurality of fine calibration holes 341, the fine calibration holes 341 are arranged in a matrix, and the arrangement range is larger than or equal to the scanning area of the electron gun; a cross-shaped tungsten wire 36 is arranged in each fine calibration hole 341 and used as a calibration target, or the cross-shaped tungsten wire 36 is arranged above the fine calibration hole 341 and is pressed by a pressing ring 37. The fine calibration plate 34 and the fine calibration base 31 are both conductive plates, and the fine calibration plate 34 is arranged above the fine calibration base 31 through an insulating support plate 32; both ends of the free wheel resistor 33 are electrically connected to the precision correction board 34 and the precision correction base 31, respectively, and the current detection table 35 is connected to the free wheel resistor 33 for detecting a current passing through the free wheel resistor 33. During calibration, the fine calibration base 31 is grounded, and the fine calibration plate 34 and the base are isolated from each other to form a capacitor. When electrons bombard the fine calibration plate 34 or the tungsten wire, the fine calibration plate 34 is electrified, the electrons are detected by the current detection table 35 through the freewheeling resistor 33, and the detected signals are transmitted to a computer for recording.
As shown in fig. 5, the fine alignment plate 34 is a key component of the fine alignment assembly 3, and is made of stainless steel, the shape of the fine alignment plate is the same as the scanning area, the size of the fine alignment plate is 10mm larger than the range of the scanning area, and the upper surface of the fine alignment plate has a certain levelness, which is specifically required to be within 0.01 mm. A plurality of precise calibration holes 341 with the diameter b (larger than a) are uniformly distributed on the precise calibration plate 34, the arrangement range of the precise calibration holes 341 is the same as the scanning area, and the position degree of the precise calibration holes 341 also has certain requirements. The diameter of the tungsten filament is c (0.2 mm can be selected), two tungsten filaments in each hole form an angle of 90 degrees and are respectively positioned on an X axis and a Y axis, and the cross central point of the two tungsten filaments is a calibration datum point, so that the tungsten filaments and the calibration plate are accurately machined and installed. The fine calibration is to be carried out after all electron guns are installed on the equipment and the equipment is installed and adjusted, during the fine calibration, the fine calibration is to accurately position the assembly 3 on the equipment workbench, the upper surface of the tungsten filament is required to keep the same elevation with the printing surface, and the intersection center point of the tungsten filament is accurately positioned.
As shown in FIG. 6, the fine calibration assembly 3 is used for high-efficiency continuous double-helix printing, and the powder bed is in a circular ring shape, with an inner diameter of 350mm and an outer diameter of 1500 mm. The fine calibration plate 34 is two 320mm × 620mm rectangular plates, which are respectively responsible for calibrating two 300mm × 600mm scanning areas, and the two fine calibration plates 34 are symmetrically arranged on the powder bed with the printing center. Each calibration plate has 9 × 17 ═ 153 orifices uniformly arranged in the range of 300mm × 600mm, and each 300mm × 600mm scanning zone is composed of the scanning zones of two 300mm × 300mm single electron guns. The number of holes to be calibrated for each gun is 9 x 9 (arranged in a square matrix), and 9 holes at the joint of the two guns are calibrated for both guns.
The scanning area and powder bed position of each electron gun are shown in fig. 6, the apparatus has 4 electron guns a1, a2, A3 and a4, the scanning area range of each electron gun is 300mm × 300mm, the electron beams of the electron guns a1 and a2 form a scanning area E1 (area 300mmX600mm), the electron beams of the electron guns B1 and B2 form a scanning area E1 (area 300mmX600mm), the powder bed is formed on the substrate of the workbench, the rotary workbench rotates and descends continuously, and the powder falling from the powder laying device is spirally swept and laid on the substrate of the workbench by taking the radius of a circular ring as a sweep line, so that continuous powder laying is completed, and then continuous printing is performed in the printing area.
The invention uses a simpler calibrating device to accurately calibrate the position of the scanning electron beam, the obtained detection signal is a current signal, and compared with the traditional method, the invention saves detection parts such as an X-ray camera (CNC) and the like, thereby reducing the manufacturing cost of detection equipment, and the vacuum chamber box body 5 is not required to be provided with a hole used by the X-ray camera, thus being beneficial to sealing the box body and keeping the vacuum degree. Meanwhile, the cross tungsten filaments 36 used by the device are uniformly distributed on the detection plate in a matrix mode, and the cross tungsten filaments 36 are used as the targets, so that the using amount of tungsten metal is saved.
Meanwhile, the invention also provides an electron gun beam spot correction method based on the electron gun beam spot correction device, which comprises the following steps:
step one, rough proofreading
1.1) installing an electron gun A1 and a rough calibration pair assembly 2 on an electron gun test bed, adjusting the relative positions of a rough calibration plate 23 and the electron gun to ensure that the distance between the calibration surface of the rough calibration plate 23 and an electron gun A1 is equal to the distance between the equipment printing surface and an electron gun A1, and then fixing the adjusted rough calibration plate 23 and the electron gun A1;
1.2) after the vacuum box body is vacuumized, opening an electron gun A1, and enabling an electron beam to be incident on the rough calibration plate 23, wherein a beam spot can be observed from the window 51;
1.3) adjusting parameters such as the current of a deflection coil of an electron gun A1, controlling a beam spot to move to a rough calibration hole 231 to be calibrated on the rough calibration plate 23, when a bright spot of the beam spot disappears, the beam spot enters the rough calibration hole 231, and recording the parameters of the electron gun at the moment;
1.4) controlling the electron gun to move the beam spot to the next rough calibration hole, and repeating the step 1.3) to record the parameters of the electron gun at all the rough calibration holes 231;
1.5) carrying out interpolation calculation on the electron gun parameters of all the rough calibration holes to obtain the electron gun parameters of all the arbitrary positions in the scanning range of the electron gun A1;
1.6) repeating the steps 1.1) to 1.5), and checking the electron gun A2, the electron gun B1 and the electron gun B2 to obtain all checked electron gun parameters;
step two, fine calibration
2.1) installing an electron gun A1, an electron gun A2, an electron gun B1 and an electron gun B2 on a vacuum box body of the equipment, installing a fine calibration assembly 3 on a workbench of the equipment, wherein the elevation of a fine calibration plate 34 is equal to the horizontal elevation of a printing working position;
2.2) closing the door of the vacuum box body and vacuumizing the vacuum box body;
2.3) starting the electron gun A1, controlling the electron beam of the electron gun A1 to be incident into the fine alignment hole 341 of the fine alignment plate 34 according to the coarse positioning parameters, and then moving the electron beam in the positive direction of the X, Y axis, so that the beam spot of the electron gun A1 is in the first quadrant of the cross tungsten wire;
2.4) as shown in FIG. 7, adjusting the parameters of the electron gun to control the electron beam to move according to a certain rule, and recording the current and the parameters of the electron gun of the current meter 35 when the beam spot touches the cross tungsten filament;
2.41) adjusting the parameters of the electron gun to control the electron beam to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.42) moving the electron beam into a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.43) controlling the electron beam in a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.44) moving the electron beam into a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards an X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.45) controlling the electron beam in a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.46) moving the electron beam into the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.47) controlling the electron beam in the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.48) moving the electron beam into the first quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.5) calculating the parameters obtained in the step 2.4) to obtain fine positioning parameters and beam spot size;
2.51) obtaining fine positioning parameters
Taking an average value of the electron gun parameters obtained in the step 2.41), the step 2.42), the step 2.45) and the step 2.46) as a fine positioning parameter of the X coordinate of the fine calibration hole 341; taking an average value of the electron gun parameters obtained in the step 2.43), the step 2.44), the step 2.47) and the step 2.48) as a fine positioning parameter of the Y coordinate of the fine calibration hole 341; obtaining fine positioning parameters (equivalent current of a deflection coil of the electron gun) of the X and Y coordinates of the fine calibration hole 341, storing the calibration parameters into a lookup table, finishing the fine position calibration of the beam spot of the electron gun at the moment, and performing accurate position printing by using the fine positioning parameters when performing 3D printing;
2.52) obtaining the size of the beam spot
Converting the parameter difference of the electron gun obtained in the step 2.41) and the step 2.42) into a distance value (the distance value can be obtained by searching a calibrated curve chart), and subtracting the diameter c of the cross tungsten wire to be used as the beam spot diameter DX in the X-axis direction1(ii) a Converting the parameter difference obtained in the step 2.45) and the step 2.46) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionX2(ii) a Converting the parameter difference obtained in the step 2.43) and the step 2.44) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the Y-axis directionY1(ii) a Converting the parameter difference obtained in the step 2.47) and the step 2.48) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionY2(ii) a Get DX1And DX2The average value is taken as the beam spot diameter D in the X-axis directionXTaking DY1And DY2The average value is the beam spot diameter D in the Y-axis directionY(ii) a In the steps, more values can be measured to obtain the average value, so that a more accurate measured value is obtained;
2.6) judging whether the size and the shape of the beam spot meet the requirements or not, and recording the parameters of the electron gun according with the requirements; adjusting the parameters of the electron gun which do not meet the requirements, detecting again until the parameters of the electron gun are recorded after meeting the requirements;
2.61) correcting the size of the beam spot;
will DX1And DY1As the diameter D of the beam spot size; if the diameter D meets the requirement, recording the parameters of the electron gun meeting the D value requirement; if D does not meet the requirement, adjusting parameters (dynamic coil current and the like) of the electron gun, repeating the step 2.4) and the step 2.5) after adjustment until D meeting the requirement is obtained, recording the parameters of the electron gun meeting the D value requirement, forming the parameters of the electron gun meeting the D value requirement into a parameter table, and finishing the size correction of the beam spot; when 3D printing is carried out, the size of an electron beam spot with high accuracy at each position is provided, and accurate printing is carried out;
2.62) Beam Spot shape correction
After the position is corrected, the beam spot shape is corrected at each point, and the correction process is that whether the beam spot is a standard beam spot or not is judged firstly, namely DXAnd DYIf the two are equal, the beam spot is a standard beam spot, if the two are not equal, as shown in fig. 8, the beam spot is a non-standard beam spot, the parameters (stigmatic coil current, etc.) of the electron gun are adjusted, and step 2.4) and step 2.5) are repeated after the adjustment until DX＝DYForming a standard beam spot, recording the parameter value of the electron gun at the spot, and forming a parameter table, thereby finishing the shape correction of the beam spot; when 3D printing is carried out, the electron beam spot shape with high accuracy at each position is provided for accurate printing;
2.7) controlling the beam spot of the electron gun to be incident into the next fine calibration hole 341 on the fine calibration plate 34 according to the coarsely positioned electron gun parameters, and repeating the steps 2.3) -2.6) until all the fine calibration holes 341 are detected;
2.8) carrying out interpolation calculation on the electron gun parameters at all the fine calibration holes 341 to obtain the electron gun parameters, the size of the electron beam spot and the shape of the electron beam spot at any position in the scanning range of the electron gun A1;
2.9) closing the electron gun A1, starting the electron gun A2, and repeating the steps 2.3) to 2.8) to finish the beam spot detection of the scanning area of the A2 electron gun; closing the electron gun A2, starting the electron gun B1, and repeating the steps from 2.3) to 2.8), thereby completing the beam spot detection of the B1 electron gun scanning area; closing the electron gun B1, starting the electron gun B2, and repeating the steps from 2.3) to 2.8), thereby completing the beam spot detection of the B2 electron gun scanning area;
2.10) arranging all the parameters and storing for later use.

Claims (8)

1. The utility model provides an electron gun beam spot correcting device which characterized in that: comprises a rough calibration component (2) and a fine calibration component (3);
the rough calibration assembly (2) comprises a rough calibration plate (23), a rough calibration base (21) and a rough calibration support plate (22), wherein the rough calibration plate (23) is arranged above the rough calibration base (21) through the rough calibration support plate (22);
the rough calibration plate (23) is provided with a plurality of rough calibration holes (231), the rough calibration holes (231) are arranged according to a matrix, and the arrangement range of the rough calibration holes is more than or equal to the scanning area of the electron gun (1);
the fine calibration assembly (3) comprises a fine calibration plate (34), an insulating support plate (32), a fine calibration base (31), a follow current resistor (33) and a current meter (35); the fine calibration plate (34) is provided with a plurality of fine calibration holes (341), the fine calibration holes (341) are arranged according to a matrix, and the arrangement range of the fine calibration holes is larger than or equal to the scanning area of the electron gun (1); a cross tungsten wire (36) is arranged in each fine calibration hole (341) or a cross tungsten wire (36) is arranged above the fine calibration hole (341) and is used as a calibration target;
the fine correction plate (34) and the fine correction base (31) are both conductive plates, and the fine correction plate (34) is arranged above the fine correction base (31) through an insulating support plate (32), so that a certain distance is reserved between the fine correction plate (34) and the fine correction base (31) and the fine correction plate and the fine correction base (31) are insulated from each other to form a capacitor; two ends of the follow current resistor (33) are respectively and electrically connected with the fine correction plate (34) and the fine correction base (31), and the current detection table (35) is connected with the follow current resistor (33) and used for detecting the current passing through the follow current resistor (33).
2. The electron gun beam spot proofreading apparatus according to claim 1, characterized in that: the diameter of the coarse calibration hole (231) is smaller than that of the fine calibration hole (341).
3. The electron gun beam spot proofreading apparatus according to claim 2, characterized in that: the cross-shaped tungsten wire (36) is arranged above the fine calibration hole (341) and is pressed by the pressing ring (37).
4. The electron gun beam spot proofreading apparatus according to claim 1, 2 or 3, characterized in that: the planeness of the rough calibration plate (23) and the fine calibration plate (34) is within 0.01 mm.
5. The electron gun beam spot proofreading apparatus according to claim 4, wherein: the rough calibration plate (23) and the fine calibration plate (34) are both stainless steel plates.
6. The electron gun beam spot proofreading apparatus according to claim 5, characterized in that: the number of the coarse calibration holes (231) is 81, the coarse calibration holes are arranged in a 9 multiplied by 9 matrix, the diameter is 0.8mm, and the distance between the adjacent coarse calibration holes (231) is 37.5 mm.
7. The electron gun beam spot proofreading apparatus according to claim 6, wherein: the diameter of the cross-shaped tungsten wire (36) is 0.2mm, and the fine calibration holes (341) are arranged in a 9 x 17 matrix.
8. An electron gun beam spot correction method based on the electron gun beam spot correction apparatus according to any one of claims 1 to 7, characterized by comprising the steps of:
step one, rough proofreading
1.1) installing an electron gun A1 and a rough calibration pair assembly on an electron gun test bed, and adjusting the relative positions of a rough calibration plate and the electron gun so that the distance between the calibration surface of the rough calibration plate and the electron gun A1 is equal to the distance between the printing surface of equipment and the electron gun A1;
1.2) after the vacuum box body is vacuumized, opening an electron gun A1, and enabling an electron beam to be incident on a rough calibration plate, wherein a beam spot bright spot can be observed;
1.3) adjusting parameters of an electron gun A1, controlling a beam spot to move to a rough calibration hole to be calibrated on a rough calibration plate, when a bright spot of the beam spot disappears, enabling the beam spot to enter the rough calibration hole, and recording the parameters of the electron gun at the moment;
1.4) controlling the electron gun to move the beam spot to the next rough calibration hole, and repeating the step 1.3) to record the electron gun parameters of all the rough calibration holes;
1.5) carrying out interpolation calculation on the electron gun parameters of all the rough calibration holes to obtain the electron gun parameters of all the arbitrary positions in the scanning range of the electron gun A1;
1.6) repeating the steps 1.1) to 1.5), and performing coarse proofreading on all the electron guns to obtain the electron gun parameters of all the proofread electron guns;
step two, fine calibration
2.1) installing all the electron guns subjected to rough calibration on a vacuum box body, installing a fine calibration assembly on an equipment workbench, wherein the elevation of the fine calibration plate is equal to the horizontal elevation of a printing working position;
2.2) vacuumizing the vacuum box body;
2.3) starting the electron gun A1, controlling the electron beam of the electron gun A1 to be incident into a fine calibration hole of a fine calibration plate according to the coarse positioning parameters of the electron gun A1, and then moving the electron beam along the positive direction of the X, Y axis to enable the beam spot of the electron gun A1 to be in the first quadrant of the cross tungsten filament;
2.4) adjusting the electron gun parameters of the electron gun A1, controlling the electron beam to move according to a certain rule, and recording the current and the electron gun parameters of the current meter when the electron beam touches the cross tungsten filament;
2.41) adjusting the parameters of the electron gun to control the electron beam to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.42) moving the electron beam into a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.43) controlling the electron beam in a second quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.44) moving the electron beam into a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards an X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.45) controlling the electron beam in a third quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.46) moving the electron beam into the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the Y axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.47) controlling the electron beam in the fourth quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.48) moving the electron beam into the first quadrant of the cross tungsten filament, adjusting the parameters of the electron gun to control the beam spot to move towards the X axis, and recording the current of the current meter and the parameters of the electron gun when the beam spot touches the cross tungsten filament;
2.5) calculating the parameters obtained in the step 2.4) to obtain fine positioning parameters and beam spot size;
2.51) acquiring a fine positioning parameter;
taking an average value of the electron gun parameters obtained in the step 2.41), the step 2.42), the step 2.45) and the step 2.46) as a fine positioning parameter of the X coordinate of the fine calibration hole; taking an average value of the electron gun parameters obtained in the step 2.43), the step 2.44), the step 2.47) and the step 2.48) as a fine positioning parameter of the Y coordinate of the fine calibration hole; thereby obtaining the fine positioning parameters of the X and Y coordinates of the fine calibration hole;
2.52) acquiring the beam spot size;
converting the parameter difference obtained in the step 2.41) and the step 2.42) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionX1(ii) a Converting the parameter difference obtained in the step 2.45) and the step 2.46) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain XDiameter D of beam spot in axial directionX2(ii) a Converting the parameter difference obtained in the step 2.43) and the step 2.44) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the Y-axis directionY1(ii) a Converting the parameter difference obtained in the step 2.47) and the step 2.48) into a distance value, and subtracting the diameter c of the cross tungsten wire to obtain the beam spot diameter D in the X-axis directionY2(ii) a Get DX1And DX2The average value is taken as the beam spot diameter D in the X-axis directionXTaking DY1And DY2The average value is the beam spot diameter D in the Y-axis directionY；
2.6) judging whether the size and the shape of the beam spot meet the requirements or not;
2.61) correcting the size of the beam spot;
will DX1And DY1If the diameter D meets the requirement, recording the parameters of the electron gun meeting the requirement of the value D; if the diameter D does not meet the requirement, adjusting the parameters of the electron gun, repeating the step 2.4) and the step 2.5) after adjustment until the diameter D meeting the requirement is obtained, and recording the parameters of the electron gun meeting the requirement of the diameter D value;
2.62) Beam Spot shape correction
Judgment of DXAnd DYIf the beam spot is equal, the beam spot is a standard beam spot, if the beam spot is not equal, the beam spot is a non-standard beam spot, the parameters of the electron gun are adjusted, and the step 2.4) and the step 2.5) are repeated after the adjustment until the beam spot is DX＝DYForming a standard beam spot and recording the parameter value of the electron gun at the spot;
2.7) controlling the electron beam of the electron gun A1 to be incident into the next fine calibration hole on the fine calibration plate according to the coarsely positioned electron gun parameters, and repeating the steps 2.3) to 2.6) until all the fine calibration holes are detected;
2.8) carrying out interpolation calculation on the point position parameters and the electron gun parameters of all the fine calibration holes to obtain the electron gun parameters, the size of an electron beam spot and the shape of the electron beam spot of any position in the scanning range of the electron gun A1;
2.9) closing the electron gun A1, starting other corrected electron guns, and repeating the steps 2.3) to 2.8) to obtain the electron gun parameters, the electron beam spot size and the electron beam spot shape of any position in the scanning range of all the electron guns.
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