CN112285186A - Wide-area oxygen sensor with separated heating - Google Patents
Wide-area oxygen sensor with separated heating Download PDFInfo
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- CN112285186A CN112285186A CN202011220116.8A CN202011220116A CN112285186A CN 112285186 A CN112285186 A CN 112285186A CN 202011220116 A CN202011220116 A CN 202011220116A CN 112285186 A CN112285186 A CN 112285186A
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 239000001301 oxygen Substances 0.000 title claims abstract description 83
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 83
- 238000010438 heat treatment Methods 0.000 title claims abstract description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 104
- 238000001514 detection method Methods 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 238000000034 method Methods 0.000 claims abstract description 9
- 230000008569 process Effects 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 26
- 239000000919 ceramic Substances 0.000 claims description 12
- 230000002441 reversible effect Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 abstract description 21
- 230000004888 barrier function Effects 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 238000010344 co-firing Methods 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract description 2
- 230000008646 thermal stress Effects 0.000 abstract description 2
- 230000003014 reinforcing effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 230000000670 limiting effect Effects 0.000 description 8
- 230000036961 partial effect Effects 0.000 description 7
- 230000007613 environmental effect Effects 0.000 description 4
- 239000003570 air Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/41—Oxygen pumping cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
- G01N27/4072—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure characterized by the diffusion barrier
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/409—Oxygen concentration cells
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- Chemical Kinetics & Catalysis (AREA)
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The invention discloses a separated heating wide-area oxygen sensor, which comprises a sensor core; a heater is surrounded at the outer part of one end of the oxygen sensor chip core; the relative position between the heater and the sensor chip is unchanged and is not in contact with the sensor chip; the sensor core comprises a Nernst cell, a pump cell and a detection cavity which are respectively arranged on different stacked zirconia substrates. The invention adopts the combination of the pump battery, the closed detection cavity and the Nernst battery, the closed cavity prevents oxygen in the cavity from escaping or diffusing, and the Nernst voltage detection has higher precision and wide threshold value. The external heater design reduces the degree of difficulty of manufacturing process, stops the production of leakage current, improves measurement accuracy, and the even heating, everywhere uniformity is high, reduces the production of thermal stress, reinforcing reliability. Diffusion barriers do not need to be processed, and the process is simple; no diffusion barrier material is needed, the material types are few, the co-firing matching is good, and the yield is high. Simple structure, few lamination layers, light weight, enhanced anti-vibration capability and enhanced overall reliability.
Description
Technical Field
The invention relates to a separated heating high-precision wide-area sensor.
Background
The wide-area oxygen sensor has wide application in the automobile industry, is an important part of an automobile engine fuel feedback control system, and plays an important role in air-fuel ratio control. Two representative wide-area oxygen sensors are available, one is LSU4.2/LSU4.9 oxygen sensor of BOSCH company, and comprises a heater, a pump battery, an Nernst battery, a diffusion barrier and a reference air channel; the other is a limiting current type oxygen sensor of DENSO company, which consists of a heater, a pump cell, a diffusion barrier and a reference air channel. The two wide-area oxygen sensors adopt an open diffusion barrier current-limiting design and a reference air passage design which are in direct contact with the gas to be measured, and the oxygen concentration of the gas to be measured is measured by utilizing the fact that the magnitude of the limiting current and the concentration of the gas to be measured are in a certain proportional relation.
However, these two wide-area type oxygen sensors have the following disadvantages:
1. they require a reference gas or a reference electrical signal. In practical application, the reference gas or current is easy to be polluted or interfered, so that the measurement error is large and the accuracy is not high enough;
2. they all integrate a heater in a zirconia substrate, and although insulation treatment is performed, a small amount of leakage current still exists, which interferes with the output oxygen sensor signal, thus causing complex process, low yield and affecting the oxygen measurement accuracy.
3. Because the zirconia thermal conductivity is low, and the heater is in the unilateral, lead to everywhere temperature to have certain difference, also form the influence to the oxygen measurement precision, cause the influence to the reliability simultaneously.
The related patents are as follows: CN103822952A, a wide-area oxygen sensor and a method for manufacturing the same, introduces a design of a wide-area oxygen sensor and a method for manufacturing the same. The pump cell comprises a porous ceramic protective layer, a pump cell upper electrode, a pump electrode dielectric layer, a pump cell reference electrode, a reference cell dielectric layer, a reference cell electrode layer, a reference gas chamber layer, a gradient connecting layer, an upper substrate layer, a heating circuit layer and a lower substrate layer which are sequentially stacked; the transition technology of the gradient connecting layer composite material effectively solves the combination problem among heterogeneous materials; a diffusion hole and an upper annular electrode and a lower annular electrode which correspond to each other are arranged on the pump battery dielectric layer; a diffusion small cavity is arranged on the reference battery dielectric layer, and the diffusion small cavity adopts a porous ceramic filler supporting technology, so that the formation of a cavity and the sensitivity of a signal are ensured; and each layer is positioned, laminated and cut in sequence by adopting a combined mode of tape casting and screen printing to prepare a sensor blank body, and the sensor blank body is sintered to prepare the compact oxygen sensor.
The sensor structure in the patent adopts the design of limiting current type diffusion holes and porous diffusion small cavities used by the traditional wide-area type oxygen sensor. The open type (directly contacting with the ambient gas) diffusion barrier current limiting design enables the magnitude and consistency of the limiting current to be limited by factors such as the aperture size, the size of the diffusion small cavity, the alignment accuracy between the diffusion hole and the diffusion small cavity and the like. The consistency and quality of all the factors can cause the magnitude of the limiting current to change, so that the consistency is poor and the error is large. The control system of the sensor calibrates the oxygen concentration of the gas to be measured according to the magnitude of the limiting current, so that the consistency of the limiting current is poor, so that the result error of the calibrated oxygen concentration is large, and the accuracy is not high. In addition, the consistency of sintering shrinkage of the porous ceramic filler for the diffusion small cavity and zirconia substrate ceramic is difficult to control, so that more cracks exist between the diffusion small cavity and the ceramic, and the failure rate is higher.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a separated heating high-precision wide-area sensor, thereby avoiding the generation of leakage current and improving the measurement precision.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a high-precision wide-area sensor with separated heating comprises a sensor core; a heater is surrounded at the outer part of one end of the oxygen sensor chip core; the relative position between the heater and the sensor chip is unchanged and is not in contact with the sensor chip;
the sensor chip core comprises a Nernst cell, a pump cell and a detection cavity which are respectively arranged on different stacked zirconia substrates;
the detection cavity is a closed cavity;
the Nernst cell comprises a Nernst environment detection electrode facing the environment gas and a Nernst cavity detection electrode arranged facing the detection cavity; sensing the oxygen pressure of the ambient gas diffused into the closed chamber through the Nernst environment detection electrode, sensing the oxygen pressure in the detection chamber through the Nernst cavity detection electrode, and generating a Nernst voltage signal according to the oxygen pressure difference between the Nernst environment detection electrode and the Nernst cavity detection electrode;
the pump battery comprises a pump electrode and a pump battery ground electrode arranged towards the detection cavity; oxygen is pumped into or out of the detection chamber by applying constant currents in different directions between the pump electrode and the pump cell ground electrode.
Furthermore, the external heater is of an annular resistance wire structure, surrounds the outer part of the sensor core at equal intervals, and provides stable and abundant heat for the sensor, so that the pump battery and the Nernst battery work efficiently and stably.
Furthermore, the resistance wire of the heater is equidistantly surrounded on the head part of the sensing element surrounding the sensor chip core.
Further, the heater is fixed on the support column and is electrically connected with the support column; the supporting column and the sensor core both penetrate through the ceramic base, the relative position between the supporting column and the sensor core is limited by the ceramic base to be unchanged and free of contact, and the heater, the supporting column and the sensor core are guaranteed to be free of mechanical contact.
Further, pumping oxygen out of or into the detection chamber to cause the pressure in the chamber to reach a preset lower threshold V of Nernst voltage1Or upper limit V2At this time, a reverse current is applied to the pump cell.
Further, the Nernst cell is arranged on the first layer of the zirconia substrate, wherein the Nernst environment detection electrode is arranged on the back surface of the first layer of the zirconia substrate, and the Nernst cavity detection electrode is arranged on the front surface of the first layer of the zirconia substrate;
the detection cavity is arranged on the second layer of zirconia substrate;
the pump cell is arranged on the third zirconia substrate, wherein the pump electrode is arranged on the front surface of the third zirconia substrate, and the pump cell ground electrode is arranged on the back surface of the third zirconia substrate;
the first to third layers of zirconia substrates are sequentially overlapped from top to bottom and are formed by a substrate forming process.
Furthermore, the Nernst environment detection electrode and the pump electrode are both arranged at one end of the corresponding zirconia substrate layer; the Nernst cavity detection electrode passes through the second layer of zirconia substrate to be connected with the pump ground electrode, passes through the first layer of zirconia substrate and is led out to the front of the first layer of zirconia substrate.
Further, the oxygen concentration of the to-be-measured environmental gas is calculated according to the proportional relation between the change cycle time T of the Nernst voltage signal and the oxygen pressure of the to-be-measured environmental gas.
The invention mainly has the following technical advantages:
1) by adopting the combined design of the pump battery, the closed detection cavity and the Nernst battery, the closed cavity prevents oxygen in the cavity from escaping or diffusing, and the Nernst voltage detection has higher precision and wide threshold. The precision reaches within +/-4 percent, and the field value of the measured oxygen concentration is improved (l = 0.1- ∞);
2) the design of the external heater reduces the difficulty of the manufacturing process, avoids the generation of leakage current and improves the measurement precision.
3) The external ring heater is designed, so that the heating is uniform, the consistency at each position is high, the generation of thermal stress is reduced, and the reliability is enhanced.
3) The diffusion barrier design is not needed, the diffusion barrier does not need to be processed, and the process is simple;
4) the design of diffusion barrier is not needed, diffusion barrier materials are not needed, the variety of materials is few, the co-firing matching is good, and the yield is high.
5) Simple structure, few lamination layers, light weight, enhanced anti-vibration capability and enhanced overall reliability.
6) The heating wire is insulated, and even if the heating wire slightly touches the heating wire in the working process, the signal output cannot be influenced.
Drawings
FIG. 1 is a schematic diagram of an oxygen sensor configuration;
FIG. 2 is a block diagram of a pump battery and a Nernst battery;
FIG. 3 is a schematic diagram of an oxygen sensor;
in the figure, 1 is commonly led out; 2 Nernst environment detection electrode leading-out terminal; 11 pump electrode lead-out terminal; a 31 nernst environment detection electrode; a 32 nernst cavity detection electrode; 41 a ground electrode; 42 a pump electrode; c, detecting a cavity; 51-53 zirconia substrates.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Technical characteristics
The invention discloses a novel high-precision wide-area oxygen sensor, belonging to a zirconia-based oxygen sensor. Unlike most wide-area oxygen sensors, it is externally mounted with a heater, has no diffusion barrier current-limiting design, and does not require a reference gas, and can be automatically tested and recalibrated in normal ambient air. The oxygen measurement precision is as high as 4%, and the oxygen measurement threshold value is ultra-wide (l = 0.1- ∞). The oxygen sensor in the invention adopts a zirconia ceramic substrate, which is called a zirconium plate for short. The heater adopts iron-chromium alloy.
Technical scheme
2.1 sensor design
2.1.1 structural design
As shown in fig. 2 and 3, the split-type heated wide-area oxygen sensor in the present embodiment mainly includes a nernst cell, a pump cell, and a detection chamber C provided on a zirconia substrate. The detection chamber C is a sealed chamber provided on the zirconia substrate 52, and stores or releases oxygen by pumping in/out oxygen by a pump cell;
2.1.2 packaging Structure design
As shown in fig. 1 and 2, the package mainly includes a sensor die 13, a package base 16, a heater 15, and heater support pillars 12, 14.
The nernst environment detection electrode 31 provided on the back surface of the zirconia substrate 51 and the nernst cavity detection electrode 32 provided on the front surface of the zirconia substrate 51 together constitute a nernst cell. The Nernst environment sensing electrode 31 faces the environment, is in contact with the ambient gas, and is used to sense the ambient gas oxygen pressure. The nernst cavity detection electrode 32 faces the detection chamber C on the zirconia substrate 52 for sensing the oxygen pressure in the detection chamber C.
The pump electrode 42 provided on the front surface of the zirconia substrate 53 and the ground electrode 41 provided on the rear surface of the zirconia substrate 53 together constitute a pump cell. The ground electrode 41 faces the detection chamber C on the zirconia substrate 52.
The zirconia substrate 51, the zirconia substrate 52, and the zirconia substrate 53 were stacked in this order from top to bottom and formed by a substrate forming process.
The Nernst environment detection electrode leading-out terminal 2 is led out from the front surface of the zirconia substrate 51 through a hole, the Nernst environment detection electrode leading-out terminal 2 is arranged at the tail part of the zirconia substrate 51, namely the tail part of the sensor, and the pump electrode leading-out terminal 11 is arranged at the tail part of the zirconia substrate 53, namely the tail part of the sensor; both the nernst environment detection electrode 31 and the pump electrode 42 are provided at the head of the corresponding zirconia substrate 51, 53, that is, the head of the sensor. The nernst cavity detection electrode 32 and the pump cell ground electrode 41 are connected through a via hole from the zirconia substrate 52, and then are punched out of the zirconia substrate 51, and are led out from the front side to the common ground lead terminal 1 where the tail of the zirconia substrate 51 is provided.
Oxygen is pumped in/out to the closed detection chamber C by applying currents in different directions between the pump electrode 42 and the ground electrode 41 of the pump cell. The Nernst environment detecting electrode 31 of the Nernst system contacts with the environment gas to sense the oxygen pressure of the diffused environment gas, the Nernst cavity detecting electrode 32 senses the oxygen pressure in the detecting cavity C, and according to the Nernst cell principle, because of the difference of the oxygen pressure on the sensing electrode and the ground electrode, a Nernst voltage signal is generated, and the voltage signal is an output signal.
The combined fixing mode mainly comprises a ceramic base 16, a heater 15 and heater supporting columns 12 and 14.
The heater 15 is welded and fixed with the heater supporting columns 12 and 14 and forms an electric connection, and in order to provide stable working temperature, the ceramic base 16 fixes the relative positions of the supporting columns 12 and 14 and the sensor chip 13 to avoid the contact between the two.
2.2 introduction of sensor design principle and function of each part
The operation of the separately heated wide-area oxygen sensor in this embodiment is described with reference to fig. 3:
first, the heater 15 is responsible for heating the head, i.e., the end where the pump electrode 42 and the nernst environment detection electrode 31 are disposed, to about 700 ℃, so that the zirconia has stable ion conductivity, and the conditions for stable operation of the pump battery and the nernst battery are achieved. And simultaneously, the heating current has no interference to the working of the sensor. The pump cell is used as a reversible oxygen pump, and the Nernst cell senses the partial pressure P of oxygen in the detection cavity C in real time2And the partial pressure P of oxygen in the ambient gas1The difference between them brings about the nernst voltage V. The control circuit judges whether to apply a forward or reverse pump current + i/-i to the pump cell 3 according to the magnitude of the Nernst voltage V, and pumps oxygen out of/into the closed detection cavity C (applying the reverse pump current-i to pump oxygen into the detection cavity C at the moment of starting working, and pumping oxygen out of the detection cavity C when applying the forward pump current + i), so that the pressure in the cavity reaches a preset Nernst voltage threshold lower limit V1Or upper limit V2. And controls the direction of power up of the pump in response to its reaching a preset nernst voltage threshold (upper nernst voltage limit V2; lower limit V1). When a forward current + i is applied to the pump cell, the pump cell pumps oxygen out of the detection cavity C, and the partial pressure P2 of oxygen in the cavity decreases, so that the difference in oxygen concentration between the two electrodes of the nernst cell increases, the nernst voltage V gradually increases, and finally the upper threshold value V2 of the nernst voltage is reached. After the preset Nernst voltage upper limit is reached, the system controls the current to reverse, and reverse current-i is applied to the pump battery. The pump starts to pump oxygen into the closed detection cavity C, the oxygen partial pressure P2 in the cavity rises, so that the oxygen concentration difference between two electrodes of the Nernst cell is reduced, the Nernst voltage V is gradually reduced, and finally the lower limit V1 is reached. Finally, according to a certain proportional relation between the change cycle time T of the Nernst voltage and the oxygen partial pressure P1 of the environmental gas to be measured, the oxygen concentration of the gas to be measured can be obtained according to the time T.
The specific working principle is shown in fig. 3:
1) the pump cell pumps oxygen out of/into the closed detection chamber by using the electrochemical performance of the pump cell and adding pump current + i/-i, so that the pressure in the chamber reaches the preset oxygen partial pressure P2(low)/P2(high)。
2) At the same time, the output Nernst voltage signal of Nernst battery is detected, and according to the fact that it reaches preset value V2/V1To control the direction of energization of the pump.
3) Because the change period time T and the oxygen partial pressure of the environmental gas to be measured form a certain proportional relation, the oxygen concentration P of the gas to be measured can be obtained according to the time T1。
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (8)
1. A separated heating wide-area oxygen sensor is characterized by comprising a sensor core; a heater is surrounded at the outer part of one end of the oxygen sensor chip core; the relative position between the heater and the sensor chip is unchanged and is not in contact with the sensor chip;
the sensor chip core comprises a Nernst cell, a pump cell and a detection cavity which are respectively arranged on different stacked zirconia substrates;
the detection cavity is a closed cavity;
the Nernst cell comprises a Nernst environment detection electrode facing the environment gas and a Nernst cavity detection electrode arranged facing the detection cavity; sensing the oxygen pressure of the ambient gas diffused into the closed chamber through the Nernst environment detection electrode, sensing the oxygen pressure in the detection chamber through the Nernst cavity detection electrode, and generating a Nernst voltage signal according to the oxygen pressure difference between the Nernst environment detection electrode and the Nernst cavity detection electrode;
the pump battery comprises a pump electrode and a pump battery ground electrode arranged towards the detection cavity; oxygen is pumped into or out of the detection chamber by applying constant currents in different directions between the pump electrode and the pump cell ground electrode.
2. The split-heating wide-area oxygen sensor as claimed in claim 1, wherein the heater is in a ring-shaped resistance wire structure, and surrounds the sensor core at equal intervals.
3. The separately heated wide area oxygen sensor of claim 1 or 2, wherein the resistance wire of the heater is wound around the head of the sensor element surrounding the sensor core at equal intervals.
4. The separately heated, wide area oxygen sensor of claim 1, wherein the heater is fixed to and in electrical communication with a support column; the supporting column and the sensor core both penetrate through the ceramic base, and the relative position between the supporting column and the sensor core is limited by the ceramic base to be unchanged without contact.
5. The split-heated, wide-area oxygen sensor of claim 1, wherein oxygen is pumped out of or into the detection chamber to a preset lower Nernst threshold voltage limit V1Or upper limit V2At this time, a reverse current is applied to the pump cell.
6. The separately heated, wide area oxygen sensor of claim 1, wherein the nernst cell is disposed on a first zirconia substrate, wherein the nernst environment sensing electrode is disposed on a back side of the first zirconia substrate and the nernst cavity sensing electrode is disposed on a front side of the first zirconia substrate;
the detection cavity is arranged on the second layer of zirconia substrate;
the pump cell is arranged on the third zirconia substrate, wherein the pump electrode is arranged on the front surface of the third zirconia substrate, and the pump cell ground electrode is arranged on the back surface of the third zirconia substrate;
the first to third layers of zirconia substrates are sequentially overlapped from top to bottom and are formed by a substrate forming process.
7. The separately heated, wide-area oxygen sensor of claim 1, wherein the Nernst environment sensing electrode and the pump electrode are disposed at one end of the respective zirconia substrate layers; the Nernst cavity detection electrode passes through the second layer of zirconia substrate to be connected with the ground electrode of the pump battery and passes through the first layer of zirconia substrate to be led out to the front surface of the first layer of zirconia substrate.
8. The split-heating wide-area oxygen sensor as claimed in claim 1, wherein the oxygen concentration of the ambient gas to be measured is calculated from a proportional relationship between a change cycle time T of the nernst voltage signal and an oxygen pressure of the ambient gas to be measured.
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| CN110487874A (en) * | 2019-09-25 | 2019-11-22 | 中国兵器工业集团第二一四研究所苏州研发中心 | A kind of high-precision wide area type oxygen sensor chip |
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2020
- 2020-11-05 CN CN202011220116.8A patent/CN112285186A/en active Pending
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