CN112210775A

CN112210775A - Part coating preparation device, part coating preparation method and terminal device

Info

Publication number: CN112210775A
Application number: CN202011075185.4A
Authority: CN
Inventors: 郭馨; 江锐; 王倩; 崔惠绒; 周翊; 赵江山; 王宇
Original assignee: Institute of Microelectronics of CAS
Current assignee: Institute of Microelectronics of CAS
Priority date: 2020-10-09
Filing date: 2020-10-09
Publication date: 2021-01-12
Anticipated expiration: 2040-10-09
Also published as: CN112210775B

Abstract

The invention discloses a part coating preparation device, a part coating preparation method and a terminal device, relates to the technical field of coating manufacture for an excimer laser discharge cavity, and aims to solve the problems that parts are corroded by halogen working gas to generate harmful gas, and discharge environment is unstable due to sound waves and shock waves generated by discharge, so that the output performance of a laser is influenced. The part coating preparation device comprises: the device comprises a vacuum sample chamber and a powder feeding device, and is used for providing coating powder to the surface of the part in the vacuum sample chamber. The material of the coating powder at least comprises high-entropy alloy. And the laser forming device is used for carrying out forming treatment on the coating powder provided by the powder feeding device to obtain a part coating, and the part coating at least comprises a compact coating and a porous coating formed on the compact coating. The part coating preparation method comprises the part coating preparation device provided by the technical scheme. The part coating preparation device provided by the invention is used for preparing the part coating.

Description

Part coating preparation device, part coating preparation method and terminal device

Technical Field

The invention relates to the technical field of manufacturing of coatings for excimer laser discharge cavities, in particular to a part coating preparation device, a part coating preparation method and a terminal device.

Background

Excimer lasers are important laser devices in the ultraviolet band and generate laser light by the transition of molecules formed by excited mixed gas to the ground state. However, the halogen gas in the mixed gas has strong corrosiveness and can react with the excimer laser discharge cavity and internal parts thereof, so that the surface of the excimer laser discharge cavity is polluted and harmful gas is released. The chemical stability of the discharge cavity of the excimer laser is seriously influenced, and the output performance of the laser is influenced.

On the other hand, shock waves and acoustic waves are generated during the discharge of the excimer laser. Partial shock waves and sound waves are reflected by the blocking structure to return to the discharge area, so that the pressure gradient change of the discharge area is caused, the uniformity of working gas in the discharge area is reduced, and the stability of the output energy of the excimer laser is influenced.

Disclosure of Invention

The invention aims to provide a part coating preparation device, a part coating preparation method and a terminal device, which are used for preparing a part coating on the surface of a part and preventing the problems that the output performance of a laser is influenced due to the influence of sound waves and shock waves, the working gas is not uniform and the part is polluted in the using process.

In a first aspect, the present invention provides an apparatus for preparing a coating for parts, comprising: and the vacuum sample chamber is used for providing a vacuum containing environment for the parts. And the powder feeding device is connected with the vacuum sample chamber and is used for supplying coating powder to the surface of the part in the vacuum sample chamber. The material of the coating powder at least comprises high-entropy alloy. And the laser forming device is used for carrying out forming treatment on the coating powder provided by the powder feeding device to obtain a part coating, and the part coating at least comprises a compact coating and a porous coating formed on the compact coating.

Compared with the prior art, in the part coating preparation device provided by the invention, the high-entropy alloy is used as the coating powder, and the element composition and the element content in the high-entropy alloy can be adjusted, so that when the part coatings are prepared on the surfaces of parts with different passivation requirements, the high-entropy alloy powder with different composition components is selected, and the obtained corresponding high-entropy alloy coatings have better corrosion resistance. And because the high-entropy alloy has the effect of inhibiting diffusion, the diffusion between corrosive gas and component elements of the part can be inhibited, so that the reaction rate between the part and the corrosive gas is reduced, the chemical stability of the part is improved, and the output performance of the laser is improved.

In addition, in the part coating preparation device provided by the invention, the part coating at least comprises a compact coating and a porous coating formed on the compact coating, so that the sound wave and the shock wave on the surface of the part are attenuated, the stability of the discharge environment of the laser is improved, and the output performance of the laser is improved.

In a second aspect, the invention provides a method for preparing a part coating, which is applied to a part coating preparation device with a vacuum sample chamber, a powder feeding device and a laser forming device. The vacuum sample chamber is provided with parts. The preparation method of the part coating comprises the following steps:

and controlling the powder feeding device to provide coating powder to the surface of the part in the vacuum sample chamber. The material of the coating powder at least comprises high-entropy alloy.

And controlling a laser forming device to form the coating powder provided by the powder feeding device to obtain a compact coating.

And controlling a laser forming device to form the coating powder provided by the powder feeding device to obtain the porous coating.

The beneficial effects of the method for preparing a part coating provided by the second aspect are the same as those of the device for preparing a part coating described in the first aspect or any possible implementation manner, and are not described herein again.

In a third aspect, the present invention provides a terminal device. The terminal device includes: a processor and a communication interface coupled to the processor. The processor is used for running a computer program to implement the method for preparing the coating of the part described in the second aspect or any possible implementation manner of the second aspect.

The beneficial effects of the terminal device provided by the third aspect are the same as those of the device for preparing a coating layer of a part described in the first aspect or any possible implementation manner, and are not described herein again.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic structural view of a coating layer preparing apparatus for parts according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a method for preparing a coating of a part according to an embodiment of the present invention.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Excimer lasers are important laser devices in ultraviolet bands and mainly generate laser light by virtue of transition of molecules formed by excited mixed gas to a ground state. The mixed gas here is generally composed of an inert gas and a halogen gas, such as argon (Ar) and fluorine gas (F)₂) Krypton (Kr) and fluorine (f), xenon (Xe) and chlorine (Cl)₂) And the like. Studies have shown that gaseous corrosion products, such as HF, SiF, are in the order of ppm₄And HCl, etc., will cause the output energy of the excimer laser of ArF, KrF, etc. to decrease by more than 10%, and affect various parameters such as the line width/stability of the beam. Therefore, control of the composition of the molecular laser discharge chamber component material is required. The low content of the pollution components on the surface of the material needs to be ensured, so that the pollutant can be reacted with the halogen medium in a short time, and the harmful gas can not be released by slow reaction in the operation process of the excimer laser. And the diffusion degree of harmful elements in the material is low under the long-time working state, and the material cannot run through an excimer laserThe process gradually gathers to the surface generating a large amount of hazardous elements.

On the other hand, a large amount of energy is injected into the gas in a small space in the discharge region within tens of nanoseconds during the discharge process of the excimer laser, the working gas in the discharge region does not expand (namely constant volume heating) in the time, but jump of temperature and pressure is generated, and then the isentropic expansion of the gas forms a shock wave which propagates to the neutral gas at supersonic velocity, and the shock wave is generated simultaneously in the process. The generated sound waves and shock waves propagate to the periphery and are reflected to different directions when reaching the blocking structure. The sound wave and the shock wave in the reflection discharge region cause pressure gradient change, the uniformity of working gas in the discharge region is reduced, and the stability of the output energy of the excimer laser is influenced. Therefore, it is necessary to control the sound waves and the shock waves by using the structure in the discharge chamber to reduce the adverse effects thereof.

The two problems set high requirements on the design and preparation of discharge chamber parts. On the one hand, the raw material of the part often contains a certain amount of interstitial elements such as carbon, nitrogen, hydrogen, oxygen, and elements such as silicon, phosphorus, etc. which are partially gaseous substances with the halogen dielectric product, and it is necessary to suppress the diffusion of these elements to the surface as much as possible. In the conventional processing process of the part, hazardous elements are easily introduced into the surface, and a complex surface pollution layer is generated. In addition, when the parts are exposed to the air environment, the surfaces of the parts can slowly react with carbon, nitrogen and oxygen elements to generate a pollution layer. The hazardous substances are difficult to completely remove through passivation cleaning, the chemical stability of discharge cavity parts is obviously influenced, and the output performance of the laser is directly influenced. On the other hand, due to the special flow field environment and the corrosion environment in the discharge cavity, it is difficult to directly use conventional materials for eliminating the acoustic shock waves, and the design method is complicated only by adding special gas path structures or special surface structures, such as reflectors with special surfaces, grooves or layered porous/stacked plates on the cavity wall, and the adoption of circuitous gas path structures.

The prepared part coating has good halogen corrosion resistance, extremely low harmful component content, can inhibit the diffusion of harmful elements, can effectively attenuate sound waves and shock waves, can reduce the generation of harmful gas and sound wave shock waves to a great extent, improves the stability of the discharge environment of the excimer laser, and lays a foundation for obtaining high-performance excimer laser devices. Therefore, how to simultaneously realize good halogen corrosion resistance, extremely low content of harmful elements, inhibition of diffusion of harmful elements and effective attenuation of sound waves and shock waves becomes an important problem for ensuring the stability of the discharge environment of the excimer laser.

Fig. 1 illustrates a schematic structural diagram of a part coating preparation device provided by an embodiment of the invention. As shown in FIG. 1, the coating preparation device for parts comprises a vacuum sample chamber 100, a powder feeding device 101 and a laser forming device 102. The powder feeding device 101 is connected with the vacuum sample chamber 100.

As shown in fig. 1, the component a may be a component near the laser electrode, or may be a component at another part of the laser, but is not limited thereto. The parts placed in the vacuum sample chamber are parts for removing the pollution layer.

As shown in FIG. 1, the vacuum sample chamber 100 is used to provide a vacuum containing environment for the component A. It should be understood that the vacuum containing environment may be achieved by a vacuum device 1001 connected to the vacuum sample chamber 100. Specifically, a part a is placed in a vacuum sample chamber 100, and the vacuum sample chamber 100 is vacuumized by using a vacuum device 1001, so that the part a is placed in a vacuum environment, and the problems that in the preparation process of a part coating, the surface material of the part a reacts with carbon, nitrogen and oxygen elements in the air to generate a pollution layer and is difficult to remove are solved. Wherein, the vacuum degree of the vacuum sample chamber 100 is 10^-5Pa～10^-4Pa。

As shown in fig. 1, the powder feeder 101 is used to supply coating powder to the surface of the part a in the vacuum chamber. The material of the coating powder at least comprises high-entropy alloy. High-entropy alloys (HEA), are alloys formed from five or more metals in equal or approximately equal amounts. Because the element composition and the element content in the high-entropy alloy can be adjusted, when the part coating is prepared on the surface of parts with different passivation requirements, high-entropy alloy powder with different composition components is correspondingly selected, and the obtained corresponding high-entropy alloy coating has better corrosion resistance. And because the high-entropy alloy has the effect of inhibiting diffusion, the diffusion between the corrosive gas and the component elements of the part A can be inhibited, so that the reaction rate between the part A and the corrosive gas is reduced, the chemical stability of the part A is improved, and the output performance of the laser is improved.

As shown in fig. 1, the laser forming apparatus 102 is used for forming the coating powder supplied from the powder feeder 101 to obtain a part coating. The part coating herein includes at least a dense coating layer and a porous coating layer formed on the dense coating layer. On the one hand, the dense coating serves to isolate the part from corrosive gases, prevent the part from being contaminated, and release hazardous gases. On the other hand, the porous coating can weaken the sound wave and the shock wave on the surface of the part A, so that the stability of the discharge environment of the laser is improved, and the output performance of the laser is improved.

Therefore, the part coating preparation device provided by the embodiment of the invention is used for preparing at least a high-entropy alloy coating on the surface of a part, so that the part has good halogen corrosion resistance, and the generation of harmful elements in the use process of the part is greatly reduced. Meanwhile, the reaction rate between the part and the corrosive gas can be reduced, the chemical stability of the part is improved, and the output performance of the laser is improved. The porous coating is prepared on the surface of the part, so that the effective attenuation of shock waves and sound waves is realized, the quality of the part is obviously improved, the service life of the part is obviously prolonged, and the stability of the discharge environment of the laser is improved. And the design and preparation difficulty of preparing the part coating by using the laser forming device is lower, and the controllability of the preparation process is higher.

As a possible implementation manner, as shown in FIG. 1, the device for preparing a coating of parts further comprises a moving stage 1002 positioned in the vacuum sample chamber 100 and a heating device 1002A positioned on the moving stage 1002. The movable carrier 1002 is used for carrying a part a, and the heating device 1002A is used for drying the part a with surface contaminants removed.

In practical application, the part with the surface pollutants removed is placed on a movable carrier of a vacuum sample chamber, and the part with the surface pollutants removed is dried by using a heating device so as to remove residual moisture on the part and prevent the part coating from being influenced.

In an alternative, as shown in FIG. 1, the above-described coating preparation apparatus for parts further includes a control terminal 103. Control terminal 103 is connected to mobile stage 1002 and laser forming apparatus 102 in communication. The communication connection may be wireless communication or wired communication. The wireless communication may be based on networking technologies such as wifi, zigbee, and the like. Wired communication may implement a communication connection based on a data line or a power line carrier. The communication interface may be a standard communication interface. The standard communication interface may be a serial interface or a parallel interface. For example: the control terminal and the mobile carrier may communicate by using an I2C (Inter-Integrated Circuit) bus, or may be connected by using a power line carrier communication technology. At this time, the control terminal may be configured to control the movement of the mobile carrier and report the position information of the mobile carrier to the control terminal.

The control terminal can be an industrial personal computer or a mobile phone, a tablet personal computer and the like which can realize the functions of the industrial personal computer, and can control the movement of the movable carrying platform and the laser forming device. For example: when the laser forming device is in a static state, the control terminal is used for controlling the movable carrier to move, so that the laser beam emitted by the laser forming device forms the coating powder on the surface of the part to form the part coating. For another example, when the laser forming device is in a moving state, the control terminal is used for controlling the laser forming device and the moving stage to move relatively, so that the laser beam emitted by the laser forming device forms the coating powder on the surface of the part to form the part coating.

In one example, the control terminal can control the laser forming device to move under the condition that the position of the moving carrier is not changed, so that the laser beam emitted by the laser forming device forms the coating powder on the surface of the part to form the part coating.

In another example, when the position of the laser beam emitted by the laser forming device is not changed, the control terminal may control the moving stage to move, so that the coating powder on the surface of the part on the moving stage is subjected to forming processing by the laser beam emitted by the laser forming device to form the part coating.

In an alternative, as shown in fig. 1, the laser forming apparatus 102 includes a laser controller 1021, a laser 1022, a grating 1023, a mirror 1024, and a focusing lens 1025. The focusing lens 1025 may be CaF₂And materials having a high light transmittance such as optical materials.

As shown in fig. 1, the laser 1022 described above is used to generate a laser beam under the control of the laser controller 1021. The grating 1023 is used for splitting the laser beam to obtain a split beam. Mirror 1024 is used to reflect the split beam to change the split beam path. The focusing lens 1025 is used for focusing the beam splitting beam on the coating powder on the surface of the part, so that the part coating is formed after the coating powder on the surface of the part is cladded.

In an alternative, as shown in FIG. 1, the device for coating parts further comprises an energy detection device 104 connected to the control terminal 103. The energy detection device 104 detects the laser energy emitted by the laser forming device 102 under the control of the control terminal 103, so as to prevent the situation that the ablation and evaporation of the coating powder are easily caused by too high laser energy, or the situation that the coating powder is not completely melted into a uniform part coating due to too low laser energy occurs. Because the energy range of the laser beam is related to the characteristics of the prepared material, the energy range of the selected laser beam is different for different materials.

In practical application, a laser emits a laser beam under the control of a laser controller, the laser beam is split by a grating, after a light path is changed by a reflector, a control terminal controls an energy detection device to detect the energy of the laser beam, and the energy detection device sends the energy detection result of the laser beam to the control terminal. And the detected laser beam is focused by the focusing lens and then irradiated on the coating powder on the surface of the part, and the coating powder on the surface of the part is subjected to forming treatment to form a part coating. The laser beam here may be a continuous laser beam, a pulse laser beam, or the like, and is not limited thereto. The laser wavelength is 150 nm-10.6 μm. The laser spot diameter ranges from about 30 μm to 1000 μm.

In an alternative, as shown in fig. 1, the device for preparing a coating of parts further comprises a control valve connected to the vacuum chamber 100 for filling the vacuum chamber with gas.

As shown in fig. 1, the control valve includes a halogen gas valve 1003 connected to the vacuum chamber, and the halogen gas valve 1003 is used for introducing halogen gas into the vacuum chamber 100. The preparation environment of the part coating can be selected according to the requirement on the passivation degree of the part material. For example, parts applied near the electrodes will be subjected to higher temperatures and a lower amount of halogen ion bombardment, thus requiring a higher degree of passivation and tighter control of the hazardous elements. For the preparation environment of the part coating, a normal pressure argon environment with the volume content of the halogen-containing medium of 0.1-0.5% is selected as the preparation environment, and the preparation and the implementation of the halogenation of the part coating are accelerated, at this time, a halogen gas valve 1003 is needed to introduce halogen gas into the vacuum sample chamber 100. Also for example, for parts in other locations where a high degree of passivation is not required, vacuum 10 is used^-5Pa～10^-4The preparation in a Pa vacuum environment is only needed, and certainly, a normal-pressure argon environment with the halogen-containing medium volume content of 0.1-0.5% can also be used as a preparation environment to prepare parts with higher passivation degree.

As shown in FIG. 1, the control valve includes an air valve 1004 coupled to a vacuum sample chamber. The air valve 1004 is used for introducing air into the vacuum sample chamber 100 after the preparation of the part coating is completed, and releasing the pressure in the vacuum sample chamber 100, so that the vacuum sample chamber 100 reaches a normal pressure state, and the part with the part coating is convenient to take out.

Alternatively, as shown in fig. 1, at least one of the material of the vacuum sample chamber 100, the material of the powder feeder 101, the material of the movable stage 1002, the material of the heater 1002A, and the material of the control valve may be a passivated halogen-corrosion-resistant metal or a passivated halogen-corrosion-resistant rubber. So as to prevent the halogen medium from corroding and influencing the service life of the part coating preparation device. The passivation treatment may be an oxidation treatment with a strong oxidant or an electrochemical method, but is not limited thereto. The halogen corrosion resistant metal can be nickel metal, high entropy alloy and the like. The halogen corrosion resistant rubber may be perfluororubber or the like, and is not limited thereto.

The embodiment of the invention also provides the terminal equipment. The terminal device includes: a processor and a communication interface coupled to the processor. The processor is used for operating a computer program to realize the preparation method of the part coating.

The following describes a method for preparing a part coating provided by the embodiment of the invention by taking a terminal device as an execution subject. The preparation method of the part coating can be carried out by steps executed by the terminal equipment and can also be executed by a chip applied to the terminal equipment. The following embodiments are described with the terminal device as the main execution subject. Fig. 2 illustrates a schematic structural diagram of a method for preparing a coating of a part according to an embodiment of the present invention. As shown in fig. 2, the part coating preparation method is applied to a part coating preparation apparatus having a vacuum sample chamber, a powder feeding apparatus, and a laser forming apparatus. The vacuum sample chamber is provided with parts. The vacuum degree of the vacuum sample chamber is 10^-5Pa～10^-4Pa。

As shown in FIG. 2, the preparation method of the part coating comprises the following steps:

step S101: the terminal equipment controls the powder feeding device to provide coating powder to the surface of the part in the vacuum sample chamber. The material of the coating powder at least comprises high-entropy alloy.

As shown in fig. 2, the above-described component is a component for removing a contamination layer. The mode of removing the part pollution layer can be as follows: and cleaning the part to be coated by using ultrasonic distilled water for 5-20 min to remove stains attached to the surface of the part. And then, cleaning the surface of the part for 2-5 min by using an HCl solution or an HF solution with the concentration of 2-5 mol/L to remove oxides on the surface of the part, finally, washing away the acid liquor remaining on the surface of the part by using distilled water, quickly drying the surface water by blowing, and putting the part into a vacuum sample chamber. Of course, other methods of removing contaminants from the surface of the part may be used, and are not limited thereto.

As shown in FIG. 2, the high-entropy alloy is at least five elements of eight elements of Fe, Co, Ni, Cu, Mn, Cr, Ti and Al. For example, the high entropy alloy may be FeCoNiCuMn, CrFeCoNiTi, AlCoCrFeNi, Fe, Co, Ni, Cu, Mn, Cr, Ti, Al, or the like. The high-entropy alloy is spherical high-purity powder with the granularity of 20-200 mu m.

Of course, the chemical stability of the parts is improved in order to better suppress the diffusion of the corrosive gas. Nanoparticles of high entropy alloys and halogen-containing media may be selected as coating powders. The nanoparticles of the halogen-containing medium are CaF₂、MgF₂And CaCl₂One or more of (a). The particle size of the nanoparticles of the halogen-containing medium is 1nm to 1000 μm.

Step S102: and the terminal equipment controls the laser forming device to form the coating powder provided by the powder feeding device to obtain a compact coating.

Step S103: and the terminal equipment controls the laser forming device to form the coating powder provided by the powder feeding device to obtain the porous coating.

In the above-mentioned part coating preparation method, the part coating is prepared by using the coating powder including at least the high-entropy alloy, diffusion between constituent elements of the part and the corrosive gas is suppressed, the reaction of the part and the corrosive gas is weakened, generation of harmful gas is prevented, and at the same time, the part is made to have good halogen corrosion resistance. Through forming the porous coating, the sound wave and the shock wave are weakened, and the stability of the laser discharge environment is improved.

In an alternative, as shown in fig. 2, the coating preparation apparatus for parts described above further includes a heating device. Before the terminal equipment controls the powder feeding device to provide coating powder for the surface of the part in the vacuum sample chamber, the part coating preparation method further comprises the following steps:

step S1011A: and the terminal equipment controls the heating device to heat the parts in the vacuum sample chamber. So as to remove residual moisture on the surface of the part and prevent the forming of the part coating from being influenced. Wherein the heating temperature of the part is 100-110 ℃, and the heating time of the part is 30 min.

In an alternative mode, the device for preparing a coating of a part further comprises a heating device. Before the terminal equipment controls the powder feeding device to provide coating powder for the surface of the part in the vacuum sample chamber, the part coating preparation method further comprises the following steps:

step S1012A: the terminal equipment provides halogen medium to the vacuum sample chamber according to the application information of the parts, and a normal-pressure argon environment with the halogen medium volume content of 0.1-0.5% is obtained. The coating is fully halogenated, and the fully halogenated coating hardly reacts with corrosive gas when being reused, so that the prepared part is more stable.

In an alternative, as shown in fig. 2, the device for preparing a coating of a part further includes a movable stage. The terminal equipment controls the laser forming device to form the coating powder provided by the powder feeding device, and the step of obtaining the compact coating comprises the following steps:

step S1021A: when the laser forming device is in a static state, the terminal equipment controls the movable carrier to move, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the part, and a dense coating with the density of more than 95% is obtained.

Step S1022A: when the laser forming device is in a motion state, the terminal equipment controls the laser forming device and the movable carrier to move relatively, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the part, and a dense coating with the density of more than 95% is obtained. The relative movement of the laser forming device and the movable stage is described above, and is not described herein again.

The number of the dense coating layers may be selected according to the application environment of the component, and for example, the number of the dense coating layers may be 1, 2, or 3. The compact coating is formed on the surface of the part to isolate the part from corrosive gas, so that the part is prevented from reacting with halogen gas to generate pollutants, and the performance of the laser is prevented from being influenced.

In an alternative, as shown in fig. 2, the above-mentioned part coating preparation apparatus further includes a movable stage, and the terminal device controls the laser forming apparatus to perform a forming process on the coating powder provided by the powder feeding apparatus, so as to obtain the porous coating, including:

step S1031A: the terminal equipment controls the powder feeding device to provide coating powder to the surface of the dense coating.

Step S1031B: when the laser forming device is in a static state, the terminal equipment controls the movable carrier to move, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the compact coating to form the porous coating with the porosity of 20% -40%.

Step S1032B: when the laser forming device is in a motion state, the terminal equipment controls the laser forming device and the movable carrier to move relatively, so that laser beams emitted by the laser forming device form coating powder on the surface of the dense coating, and the porous coating with the porosity of 20% -40% is formed. The relative movement of the laser forming device and the movable stage is described above, and is not described herein again.

The number of layers of the porous coating layer may be selected according to the application environment of the component, and for example, the number of layers of the porous coating layer may be 1, 2, 3, or the like. By adjusting parameters such as laser power density, sample scanning speed and sample defocusing amount, a porous coating is formed on the compact coating, so that sound waves and shock waves can be weakened, and the performance of a laser is improved.

Because the intensity and the reflection direction of the shock wave and the sound wave at the part placing position are different, a porous coating with better wave absorbing effect needs to be formed on the parts in the area with stronger intensity of the sound wave and the shock wave. Based on this, as shown in fig. 2, the above-mentioned part coating preparation apparatus further includes a movable stage, and after the terminal device controls the laser forming apparatus to perform forming processing on the coating powder provided by the powder feeding apparatus, and obtain the porous coating, the part coating preparation method further includes:

step S1041A: the terminal equipment controls the powder feeding device to supply the coating powder to the surface of the porous coating layer.

Step S1041B: when the laser forming device is in a static state, the terminal equipment controls the movable carrier to move, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the porous coating to form a porous structure.

Step S1042B: when the laser forming device is in a motion state, the terminal equipment controls the laser forming device and the movable carrier to move relatively, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the porous coating to form a porous structure. The relative movement of the laser forming device and the movable stage is described above, and is not described herein again.

In an alternative, as shown in fig. 2, the porous structure includes one or a combination of a porous coating layer having a porosity of 20% to 40% and a periodic groove structure having a pitch of 10 μm to 500 μm and a thickness of 100 μm to 1000 μm. For example, the porous structure can be a periodic groove structure with the spacing of 10-500 μm and the thickness of 100-1000 μm, so as to improve the wave absorbing effect of the porous coating, attenuate sound waves and shock waves and improve the performance of the laser.

In an alternative mode, as shown in fig. 2, after the terminal device controls the laser forming device to perform forming processing on the coating powder provided by the powder feeding device, and obtain the porous coating, the method for preparing the part coating further includes:

step S105A: and supplying air to the vacuum sample chamber, so that the vacuum sample chamber forms an ordinary pressure environment. It should be noted that, when the environment for preparing the part coating is a vacuum environment, the terminal device controls the air valve to charge air into the vacuum sample chamber to normal pressure. When the preparation environment of the part coating is halogen-containing gas environment, the gas in the vacuum sample chamber needs to be exhausted and vacuumized to 10 DEG^-5Pa, filling air and then vacuumizing to 10 DEG^-5Pa, and then filling air to normal pressure. So as to prevent the halogen gas from overflowing, pollute the environment and cause harm to operators.

The preparation method of the part coating provided by the embodiment of the invention is further explained by combining the embodiment.

Example 1

The selected part is a copper alloy gasket of an ArF excimer laser discharge cavity. The preparation method of the part coating comprises the following steps:

1) and cleaning the copper alloy gasket part with the prepared coating for about 10min by using ultrasonic distilled water to remove pollutants attached to the surface.

2) And (3) cleaning the surface of the copper alloy gasket part for 2min by using an HCl solution with the concentration of 2.5mol/L, and removing a surface oxidation layer.

3) And (3) washing acid liquor remained on the surface of the part by using distilled water, quickly drying the surface water, and putting the part into a vacuum sample chamber.

4) Starting a vacuum device to vacuumize the vacuum sample chamber to 10 DEG^-5And Pa, starting a heating device to heat the sample to 100 ℃, drying for 30min, removing residual moisture, and closing the heating device.

5) And opening a halogen gas valve, and introducing a normal-pressure argon environment with the content of fluorine-containing gas medium being 0.1% as a preparation environment.

6) According to the principle of part matrix material, lattice matching and corrosion resistance, the high-entropy alloy is selected to be FeCoNiCuMn, and stable CaF is selected₂The particles act as halogen diffusion inhibiting particles. Spherical high-purity powder with the granularity of 20 mu m of high-entropy alloy is added into a powder feeding device for laser preparation.

7) And starting a laser controller and a laser, wherein a laser beam acts on the surface of the part through a grating, a reflecting mirror and a focusing mirror, the laser is continuous laser of 1.06 micrometers, and the diameter of a light spot is about 500 micrometers. The control terminal controls the movable carrier to realize the movement of the sample, and the high-entropy alloy coating with halogen gas corrosion resistance is prepared on the surface of the part.

8) And (3) adjusting parameters such as laser power density, sample scanning speed, sample defocusing amount and the like by using a laser controller, and printing 2 layers of compact coatings with the density not lower than 95%.

9) And (3) continuously preparing the porous coating with the porosity of about 20% by using a laser controller and a movable carrier to adjust parameters such as laser power density, sample scanning speed, sample defocusing amount and the like.

10) According to the conditions of intensity/reflection direction and the like of shock waves and sound waves at the position where the part is placed, a laser controller is used for adjusting parameters such as laser power density, sample scanning speed and sample defocusing amount, and a periodic right-angle groove structure with the distance of 10 mu m and the thickness of 100 mu m is continuously prepared on the porous coating;

11) exhausting the fluorine-containing gas in the vacuum sample chamber and vacuumizing to 10 DEG^-5Pa, opening an air valve, filling air to normal pressure, closing, opening a vacuum device, and vacuumizing to 10^-5Is closed after PaAnd opening the air valve to fill air to normal pressure, and taking out the copper alloy gasket part.

Example 2

1) and cleaning the copper alloy gasket part with the prepared coating for about 15min by using ultrasonic distilled water to remove pollutants attached to the surface.

2) And (3) cleaning the surface of the copper alloy gasket part for 3min by using HCl solution with the concentration of 3mol/L, and removing the surface oxidation layer.

4) Starting a vacuum device to vacuumize the vacuum sample chamber to 10 DEG^-5And Pa, starting a heating device to heat the sample to 105 ℃, drying for 30min, removing residual moisture, and closing the heating device.

5) And opening a halogen gas valve, and introducing a normal-pressure argon environment with the content of the chlorine-containing gas medium being 0.25% as a preparation environment.

6) According to the principle of part substrate material, lattice matching and corrosion resistance, selecting a high-entropy alloy type of CrFeCoNiTi and selecting stable MgF₂The particles act as halogen diffusion inhibiting particles. Spherical high-purity powder with the granularity of 40 mu m of high-entropy alloy is added into a powder feeding device for laser preparation.

8) And (3) adjusting parameters such as laser power density, sample scanning speed, sample defocusing amount and the like by using a laser controller, and printing 1 layer of compact coating with the density not lower than 97%.

9) And (3) continuously preparing 2 layers of porous coatings with the porosity of about 30 percent by using a laser controller and a movable carrier to adjust parameters such as laser power density, sample scanning speed, sample defocusing amount and the like.

10) According to the conditions of intensity/reflection direction and the like of shock waves and sound waves at the position where the part is placed, a laser controller is used for adjusting parameters such as laser power density, sample scanning speed and sample defocusing amount, and a periodic right-angle groove structure with the distance of 255 mu m and the thickness of 500 mu m is continuously prepared on the porous coating;

11) exhausting the fluorine-containing gas in the vacuum sample chamber and vacuumizing to 10 DEG^-5Pa, opening an air valve, filling air to normal pressure, closing, opening a vacuum device, and vacuumizing to 10^-5And (4) closing after Pa, opening an air valve to fill air to normal pressure, and taking out the copper alloy gasket part.

Example 3

1) and cleaning the copper alloy gasket part with the prepared coating for about 20min by using ultrasonic distilled water to remove pollutants attached to the surface.

2) And (3) cleaning the surface of the copper alloy gasket part for 5min by using an HCl solution with the concentration of 5mol/L, and removing a surface oxidation layer.

4) Starting a vacuum device to vacuumize the vacuum sample chamber to 10 DEG^-5And Pa, starting a heating device to heat the sample to 110 ℃, drying for 30min, removing residual moisture, and closing the heating device.

5) And opening a halogen gas valve, and introducing a normal-pressure argon environment with the content of the chlorine-containing gas medium being 0.5% as a preparation environment.

6) According to the principle of part substrate material, lattice matching and corrosion resistance, the high-entropy alloy is selected to be AlCoCrFeNi, and stable CaCl is selected₂The particles act as halogen diffusion inhibiting particles. Spherical high-purity powder with the granularity of 200 mu m of high-entropy alloy is added into a powder feeding device for laser preparation.

8) And (3) adjusting parameters such as laser power density, sample scanning speed, sample defocusing amount and the like by using a laser controller, and printing 1 layer of compact coating with the density not lower than 98%.

9) And (3) continuously preparing 2 layers of porous coatings with the porosity of about 40 percent by using a laser controller and a movable carrier to adjust parameters such as laser power density, sample scanning speed, sample defocusing amount and the like.

10) According to the conditions of intensity/reflection direction and the like of shock waves and sound waves at the position where the part is placed, a laser controller is used for adjusting parameters such as laser power density, sample scanning speed and sample defocusing amount, and a periodic right-angle groove structure with the distance of 500 mu m and the thickness of 1000 mu m is continuously prepared on the porous coating;

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims

1. A device for preparing a coating for a part, comprising:

the vacuum sample chamber is used for providing a vacuum accommodating environment for the parts;

the powder feeding device is connected with the vacuum sample chamber and is used for providing coating powder to the surface of the part in the vacuum sample chamber; the material of the coating powder at least comprises high-entropy alloy;

and the laser forming device is used for carrying out forming treatment on the coating powder provided by the powder feeding device to obtain a part coating, and the part coating at least comprises a compact coating and a porous coating formed on the compact coating.

2. The part coating preparation apparatus of claim 1, further comprising a mobile stage located within the vacuum sample chamber; the mobile carrier is used for bearing the part.

3. The part coating preparation apparatus of claim 2, further comprising a control terminal;

when the laser forming device is in a static state, the control terminal is used for controlling the movable carrying platform to move, so that laser beams emitted by the laser forming device form coating powder on the surface of the part to form a part coating;

when the laser forming device is in a motion state, the control terminal is used for controlling the laser forming device and the movable carrying platform to move relatively, so that laser beams emitted by the laser forming device carry out forming processing on coating powder on the surface of the part, and a part coating is formed.

4. The part coating preparation device of claim 1, further comprising a heating device on the moving stage.

5. The device for preparing a coating of a part according to any one of claims 1 to 4, wherein the laser forming device comprises:

a laser controller;

a laser for generating a laser beam under the control of a laser controller;

the grating is used for splitting the laser beam to obtain a split beam;

a mirror for reflecting the split beam to change a path of the split beam;

and a focusing lens for focusing the split beam onto the coating powder on the surface of the part; the focusing lens is made of CaF₂An optical material.

6. The device for preparing the part coating according to any one of claims 1 to 4, further comprising an energy detection device connected with the control terminal; and the control terminal controls the energy detection device to detect the laser energy emitted by the laser forming device.

7. The device for preparing the part coating according to any one of claims 1 to 4, further comprising a control valve connected to the vacuum sample chamber for filling the vacuum sample chamber with gas; wherein the content of the first and second substances,

the control valve comprises a halogen gas valve connected with the vacuum sample chamber; and/or the presence of a gas in the gas,

the control valve includes an air valve coupled to the vacuum sample chamber.

8. The device for preparing a coating on a part according to claim 7, wherein at least one of a material of the vacuum sample chamber, a material of the powder feeding device, a material of the movable stage, a material of the heating device, and a material of the control valve is a passivated halogen-corrosion-resistant metal or a passivated halogen-corrosion-resistant rubber.

9. The method is characterized by being applied to a part coating preparation device with a vacuum sample chamber, a powder feeding device and a laser forming device, wherein a part is arranged in the vacuum sample chamber; the preparation method of the part coating comprises the following steps:

controlling a powder feeding device to provide coating powder to the surface of the part in the vacuum sample chamber; the material of the coating powder at least comprises high-entropy alloy;

controlling a laser forming device to form the coating powder provided by the powder feeding device to obtain a compact coating;

10. The method for preparing a coating for parts according to claim 9, wherein the vacuum degree of the vacuum sample chamber is 10^-5Pa～10^-4Pa; and/or the presence of a gas in the gas,

the parts placed in the vacuum sample chamber are parts for removing a pollution layer.

11. The method for preparing the coating of the part according to claim 9, wherein the coating powder is made of nanoparticles of a high-entropy alloy and a halogen-containing medium.

12. The method for preparing the part coating according to any one of claims 9 to 11, wherein the high-entropy alloy is at least five of eight elements of Fe, Co, Ni, Cu, Mn, Cr, Ti and Al; and/or the presence of a gas in the gas,

the state of the high-entropy alloy is spherical high-purity powder with the granularity of 20-200 mu m; and/or the presence of a gas in the gas,

the nanoparticles of the halogen-containing medium are CaF₂、MgF₂And CaCl₂One or more of (a).

13. The method for preparing a coating of a part according to any one of claims 9 to 11, wherein the device for preparing a coating of a part further comprises a heating device, and before the device for controlling powder feeding supplies the coating powder to the surface of the part in the vacuum sample chamber, the method for preparing a coating of a part further comprises:

controlling a heating device to heat the parts in the vacuum sample chamber; and/or the presence of a gas in the gas,

before the powder feeding control device provides coating powder to the surface of the part in the vacuum sample chamber, the part coating preparation method further comprises the following steps:

and providing a halogen medium to the vacuum sample chamber according to the application information of the part to obtain a normal-pressure argon environment with the halogen medium volume content of 0.1-0.5%.

14. The method for preparing the part coating according to any one of claims 9 to 11, wherein the part coating preparation device further comprises a movable carrier, and the controlling the laser forming device to perform forming treatment on the coating powder provided by the powder feeding device to obtain a dense coating comprises:

when the laser forming device is in a static state, controlling the movable carrying table to move, so that laser beams emitted by the laser forming device form coating powder on the surface of the part, and obtaining a compact coating with the density of more than 95%;

when the laser forming device is in a motion state, the laser forming device and the movable carrier are controlled to move relatively, so that laser beams emitted by the laser forming device form coating powder on the surface of the part, and a dense coating with the density of more than 95% is obtained.

15. The method for preparing the coating of the part according to any one of claims 9 to 11, wherein the part coating preparation device further comprises a movable stage, and the step of controlling the laser forming device to perform forming treatment on the coating powder provided by the powder feeding device to obtain the porous coating comprises the following steps:

controlling a powder feeding device to provide coating powder to the surface of the dense coating;

when the laser forming device is in a static state, controlling the movable carrying platform to move, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the dense coating to form a porous coating with the porosity of 20% -40%;

and when the laser forming device is in a motion state, controlling the laser forming device and the movable carrier to move relatively, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the dense coating to form a porous coating with the porosity of 20-40%.

16. The method for preparing the coating of the part according to any one of claims 9 to 11, wherein the device for preparing the coating of the part further comprises a movable stage, the laser forming device is controlled to perform forming treatment on the coating powder provided by the powder feeding device, and after the porous coating is obtained, the method for preparing the coating of the part further comprises:

controlling a powder feeding device to supply coating powder to the surface of the porous coating;

when the laser forming device is in a static state, controlling the movable carrying platform to move so that the laser beam emitted by the laser forming device forms coating powder on the surface of the porous coating to form a porous structure;

and when the laser forming device is in a motion state, controlling the laser forming device and the movable carrying platform to move relatively, so that the laser beam emitted by the laser forming device forms coating powder on the surface of the porous coating to form a porous structure.

17. The method for preparing a coating for parts according to claim 16, wherein the porous structure comprises one or a combination of a porous coating layer having a porosity of 20-40% and a periodic groove structure having a pitch of 10-500 μm and a thickness of 100-1000 μm.

18. The method for preparing the coating of the part according to any one of claims 9 to 11, wherein after the controlling the laser forming device to perform forming treatment on the coating powder provided by the powder feeding device to obtain the porous coating, the method for preparing the coating of the part further comprises:

and providing air to the vacuum sample chamber, so that the vacuum sample chamber forms an ordinary pressure environment.

19. A terminal device, comprising: a processor and a communication interface coupled with the processor, wherein the processor is used for running a computer program to realize the part coating preparation method of any one of claims 9 to 18.