CN111982854B - Substance terahertz spectrum analysis device based on frequency division multiplexing and analysis test method - Google Patents
Substance terahertz spectrum analysis device based on frequency division multiplexing and analysis test method Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1734—Sequential different kinds of measurements; Combining two or more methods
Abstract
The invention provides a material terahertz spectrum analysis device and an analysis and test method based on frequency division multiplexing, which belong to the technical field of material terahertz spectrum analysis, and frequency division multiplexing microwave signals excite a terahertz transceiver module to transmit terahertz signals, receive reflected terahertz wave signals and send the reflected terahertz wave signals to a calculation module; the first transmission control module performs beam shaping on the terahertz signals; the second transmission control module carries out the directional transmission of the wave division of the transmitted terahertz wave signal; the frequency division multiplexing local oscillation signal excites the terahertz wave detection module to detect the transmitted terahertz wave signal and sends the transmitted terahertz wave signal to the calculation module; the calculation module calculates and processes the reflected terahertz wave signals and the transmitted terahertz signals to obtain terahertz wave spectrums of the substances to be detected. According to the terahertz wave spectrum resolution ratio, the terahertz signal output power is improved, and the output power range is enlarged; synchronous acquisition of a transmission terahertz spectrum and a reflection terahertz spectrum is realized; high resolution terahertz spectroscopy of full electronics is achieved.
Description
Technical Field
The invention relates to the technical field of terahertz spectrum analysis of substances, in particular to a terahertz spectrum analysis device and an analysis and test method of substances based on frequency division multiplexing.
Background
In the nature, most substances have obvious response in the terahertz frequency band, such as the vibration and rotation energy levels of a plurality of biological macromolecules, and the phonon vibration energy levels of semiconductors, superconducting materials and the like are in the terahertz frequency band; many large material molecular vibration spectra have many characteristic absorption peaks in the terahertz wave band. Based on the above reality, terahertz waves become an electromagnetic medium for discovering substances and recognizing substances.
At present, the most commonly used substance terahertz spectrum analysis technology mainly uses a terahertz time-domain spectrometer and a Fourier transform spectrometer, both of which use a laser source as a broadband light source, and acquire a time-domain waveform of a spectrum in a time-domain measurement mode by using time delay, and then acquire frequency domain information by using Fourier transform.
However, the terahertz spectrum analyzer for the two substances has a plurality of defects, mainly including: the spectrum resolution is low (both are several GHz), and higher spectrum resolution precision can be obtained only by enlarging the time domain scanning length, so that the spectrum precision limit exists in the instrument, the required condition of the instrument at the spectrum edge is extremely severe, and the signal to noise ratio is difficult to ensure; limited by the wide spectrum source, the dynamic range is smaller (the dynamic range of the two is between 20 dB and 30 dB); terahertz signal power is low (typically on the order of μw), and so on.
The defects cause that the structure and the composition of the substance to be detected cannot be fully known, the differences of the detection part, the detection environment and the individual characteristics of the substance to be detected influence the stability of the identification result, the sample of the substance to be detected must be strictly consistent during the test, otherwise, the detection result may have larger deviation; and only the transition information of electrons in molecules of a substance and the vibration level information of a specific bonding structure can be tested, weak interaction among molecules in the substance and collective vibration rotation information of molecules can not be measured, and the application requirements of the terahertz spectrum fine test of the substance can not be met.
Disclosure of Invention
The invention aims to provide a terahertz spectrum analysis device and an analysis and test method for a substance based on frequency division multiplexing, which have the advantages of high terahertz spectrum resolution, wide output power range and realization of full electronics high-resolution terahertz spectrum analysis, so as to solve at least one technical problem in the background technology.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in one aspect, the present invention provides a terahertz spectrum analysis apparatus for substances based on frequency division multiplexing, comprising:
the signal source module generates a frequency division multiplexing microwave signal and a corresponding frequency division multiplexing local oscillation signal;
the terahertz receiving and transmitting module is excited by the frequency division multiplexing microwave signals to transmit terahertz signals, receives the terahertz wave signals reflected by the substance to be detected and transmits the terahertz wave signals to the computing module;
the first transmission control module is used for carrying out beam shaping on the terahertz signals transmitted by the terahertz receiving and transmitting module, converting Gaussian divergent beams into structured terahertz beams and transmitting the structured terahertz beams to a substance to be detected;
the second transmission control module is used for carrying out the wave division directional transmission on the terahertz wave signal transmitted through the substance to be detected to the terahertz wave detection module;
the terahertz wave detection module is excited by the frequency division multiplexing local oscillation signal to detect the received terahertz wave signal and then sends the terahertz wave signal to the calculation module;
the calculation module is used for calculating and processing the terahertz wave signals reflected by the substance to be detected and the terahertz signals transmitted by the substance to be detected to obtain the terahertz wave spectrum of the substance to be detected.
Preferably, the terahertz transceiver module comprises a plurality of terahertz transceiver units, each terahertz transceiver unit comprises a standard rectangular metal waveguide frequency band, a plurality of terahertz wave signals are transmitted through multiband spliced frequency division multiplexing microwave signals, and terahertz wave signals reflected by a substance to be detected are received and transmitted to the calculation module.
Preferably, the first transmission control unit comprises a shaping unit and a beam combining unit;
the shaping unit performs beam shaping on the plurality of paths of terahertz wave signals transmitted by the terahertz receiving and transmitting integrated unit, and realizes the conversion from Gaussian divergent beams to structured terahertz beams;
the beam combining unit is used for completing phase regulation, amplitude regulation, reflection and transmission of the terahertz beam.
Preferably, a first ultra-wideband lens is arranged between the beam combining unit and the substance to be detected, and the first ultra-wideband lens is used for focusing the incident terahertz wave on the substance to be detected and simultaneously completing transmission of the terahertz wave signal reflected by the substance to be detected.
Preferably, the second transmission control unit includes a beam splitting unit and a directional transmission unit;
the beam splitting unit is used for transmitting terahertz wave signals transmitted by the substance to be detected according to a plurality of paths of different frequency split beams;
the directional transmission unit is used for directionally transmitting the terahertz wave signals transmitted by the plurality of different frequency division beams to the terahertz detection module.
Preferably, a second ultra-wideband lens is arranged between the beam splitting unit and the substance to be detected, and the second ultra-wideband lens is used for shaping and parallel-propagating terahertz wave signals transmitted by the substance to be detected.
Preferably, the terahertz wave detection module comprises a plurality of terahertz wave detectors, each terahertz wave detector is provided with a standard rectangular metal waveguide frequency band, and under the excitation of a frequency division multiplexing local oscillator signal, the terahertz wave signals transmitted by the substances to be detected are detected by the plurality of terahertz wave detectors and sent to the calculation module.
Preferably, the shaping unit is composed of a pair of diffraction phase plates;
the beam combining unit consists of a polarizer, a beam splitter and a reflecting surface;
the polarizer is used for phase regulation and amplitude regulation of the terahertz wave beam;
the beam splitter is used for realizing reflection and transmission of terahertz wave signals in different terahertz frequency bands;
the reflection surface is used for realizing transmission path adjustment control of terahertz wave signal propagation.
Preferably, the beam splitting unit is composed of a pair of dispersion devices;
the directional transmission unit consists of a beam splitter, a reflecting surface and a directional lens;
the directional lens is used for respectively transmitting the terahertz wave signals transmitted by the substances to be detected to the corresponding terahertz detectors in a directional mode.
In another aspect, the present invention also provides a method for performing a terahertz spectrum analysis test of a substance using the terahertz spectrum analysis apparatus based on frequency division multiplexing as described above, including:
step S110: initializing a system: setting the output signal path number, the initial frequency, the cut-off frequency, the signal power, the signal scanning times and the stepping interval of the signal source module; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected;
step S120: and (3) reference signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of no substance to be detected, and transmitting the signals to a calculation module as reference signals;
step S130: sample signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of a substance to be detected, and transmitting the reflected terahertz wave signals and the transmitted terahertz wave signals as reference signals to a calculation module;
step S140: analyzing substances to be tested: according to the obtained reference signal and sample signal, the calculation module realizes extraction of reflection terahertz spectrum and transmission terahertz spectrum of the substance to be detected through a built-in terahertz characteristic spectrum extraction algorithm;
step S150: according to the reflection terahertz spectrum and the transmission terahertz spectrum of the substance to be tested, qualitative and quantitative analysis and class test of the substance to be tested are realized by calling a terahertz spectrum database.
The invention has the beneficial effects that: the resolution of the terahertz spectrum is increased from the magnitude of several GHz to the magnitude of Hz (optimally 1 Hz), by 6-9 magnitudes, and is adjustable between 1Hz and 1kHz; the output power of the terahertz signal is 10 -6 W is lifted to 10 -3 1W, 3-4 orders of magnitude lifting; the dynamic range is increased from 20-30 dB to 30-40 dB; the terahertz spectrum resolution is autonomously set, and the setting range is 1 Hz-1 kHz; synchronous acquisition of a transmission terahertz spectrum and a reflection terahertz spectrum of a sample to be detected is realized; high resolution terahertz spectroscopy of full electronics is achieved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic block diagram of a terahertz spectrum analyzer for substances based on frequency division multiplexing according to embodiment 1 of the present invention.
Fig. 2 is a schematic structural diagram of a terahertz spectrum analyzer based on a substance in frequency division multiplexing according to embodiment 2 of the present invention.
Fig. 3 is a block diagram of a first transmission control module of the terahertz spectrum analyzer based on the frequency division multiplexing substance according to embodiment 2 of the present invention.
Fig. 4 is a diagram showing a second transmission control module of the terahertz spectrum analyzer based on the frequency division multiplexing substance according to embodiment 2 of the present invention.
Fig. 5 is a schematic diagram of a terahertz spectrum analyzer based on frequency division multiplexing according to embodiment 3 of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by way of the drawings are exemplary only and should not be construed as limiting the invention.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless expressly stated otherwise, as understood by those skilled in the art. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, and/or groups thereof.
In the description of this patent, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the patent and simplify the description, and do not indicate or imply that the devices or elements being referred to must have a particular orientation, be configured and operated in a particular orientation, and are therefore not to be construed as limiting the patent.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
In order that the invention may be readily understood, a further description of the invention will be rendered by reference to specific embodiments that are illustrated in the appended drawings and are not to be construed as limiting embodiments of the invention.
It will be appreciated by those skilled in the art that the drawings are merely schematic representations of examples and that the elements of the drawings are not necessarily required to practice the invention.
Example 1
As shown in fig. 1, a terahertz spectrum analysis apparatus for a substance based on frequency division multiplexing provided in embodiment 1 of the present invention includes:
the signal source module generates a frequency division multiplexing microwave signal and a corresponding frequency division multiplexing local oscillation signal; the microwave signal is used for exciting the terahertz receiving and transmitting module to transmit terahertz wave signals, and the local oscillator signal is used for exciting the terahertz wave detection module to detect the transmitted terahertz wave signals.
And the terahertz receiving and transmitting module is excited by the frequency division multiplexing microwave signals to transmit terahertz signals, receives the terahertz wave signals reflected by the substance to be detected and transmits the terahertz wave signals to the computing module.
The terahertz receiving and transmitting module comprises a plurality of terahertz receiving and transmitting integrated units, each terahertz receiving and transmitting integrated unit comprises a standard rectangular metal waveguide frequency band, a plurality of terahertz wave signals are transmitted through multiband spliced frequency division multiplexing microwave signals, and terahertz wave signals reflected by a substance to be detected are received and transmitted to the computing module.
The first transmission control module is used for carrying out beam shaping on the terahertz signals transmitted by the terahertz receiving and transmitting module, converting Gaussian divergent beams into structured terahertz beams and transmitting the structured terahertz beams to a substance to be detected.
The first transmission control unit comprises a shaping unit and a beam combining unit; the shaping unit performs beam shaping on the plurality of paths of terahertz wave signals transmitted by the terahertz receiving and transmitting integrated unit, and realizes the conversion from Gaussian divergent beams to structured terahertz beams; the beam combining unit is used for completing phase regulation, amplitude regulation, reflection and transmission of the terahertz beam.
And a first ultra-wideband lens is arranged between the beam combination unit and the substance to be detected, and is used for focusing incident terahertz waves on the substance to be detected and simultaneously completing transmission of terahertz wave signals reflected by the substance to be detected.
And the second transmission control module is used for carrying out the wave division directional transmission on the terahertz wave signal transmitted through the substance to be detected to the terahertz wave detection module.
The second transmission control unit comprises a beam splitting unit and a directional transmission unit; the beam splitting unit is used for transmitting terahertz wave signals transmitted by the substance to be detected according to a plurality of paths of different frequency split beams; the directional transmission unit is used for directionally transmitting the terahertz wave signals transmitted by the plurality of different frequency division beams to the terahertz detection module.
And a second ultra-wideband lens is arranged between the beam splitting unit and the substance to be detected, and the second ultra-wideband lens is used for shaping and parallel transmitting terahertz wave signals transmitted by the substance to be detected.
The terahertz wave detection module is excited by the frequency division multiplexing local oscillation signal to detect the received terahertz wave signal and then sends the terahertz wave signal to the calculation module.
The terahertz wave detection module comprises a plurality of terahertz wave detectors, each terahertz detector is provided with a standard rectangular metal waveguide frequency band, and under the excitation of a frequency division multiplexing local oscillator signal, the terahertz wave signals transmitted by a plurality of substances to be detected are detected and sent to the calculation module.
The calculation module is used for calculating and processing the terahertz wave signals reflected by the substance to be detected and the terahertz signals transmitted by the substance to be detected to obtain the terahertz wave spectrum of the substance to be detected.
In embodiment 1 of the present invention, when the terahertz spectrum analysis device based on frequency division multiplexing is used for terahertz spectrum analysis and test of substances, the method comprises the following steps:
step S110: initializing a system: setting the output signal path number, the initial frequency, the cut-off frequency, the signal power, the signal scanning times and the stepping interval of the signal source module; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected;
step S120: and (3) reference signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of no substance to be detected, and transmitting the signals to a calculation module as reference signals;
step S130: sample signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of a substance to be detected, and transmitting the reflected terahertz wave signals and the transmitted terahertz wave signals as reference signals to a calculation module;
step S140: analyzing substances to be tested: according to the obtained reference signal and sample signal, the calculation module realizes extraction of reflection terahertz spectrum and transmission terahertz spectrum of the substance to be detected through a built-in terahertz characteristic spectrum extraction algorithm;
step S150: according to the reflection terahertz spectrum and the transmission terahertz spectrum of the substance to be tested, qualitative and quantitative analysis and class test of the substance to be tested are realized by calling a terahertz spectrum database.
Example 2
Aiming at the defects of the existing substance terahertz spectrum analyzer, the substance terahertz spectrum analyzing device based on frequency division multiplexing provided by the embodiment 2 of the invention provides a basis for researching qualitative and quantitative analysis and category accurate detection and identification of substance components extracted based on terahertz spectrum.
Fig. 2 is a schematic structural diagram of a terahertz spectrum analyzer based on a substance in frequency division multiplexing according to embodiment 2 of the present invention.
As shown in fig. 2, the terahertz spectrum analysis device for substances based on frequency division multiplexing mainly comprises a multifunctional microwave signal source, a terahertz transceiver unit, a transmission control unit 1, a sample chamber, a transmission control unit 2, a terahertz detection unit, a multipath data acquisition unit, a server, a controller and other units.
The multi-functional microwave signal source is used as a signal source module and can generate M paths of frequency division multiplexing microwave signals and M paths of frequency division multiplexing local oscillation signals, and the M paths of frequency division multiplexing microwave signals are used as excitation signals of a terahertz transceiver unit (terahertz transceiver module); the M-channel frequency division multiplexing local oscillation signal is used as the local oscillation signal of a terahertz detection unit (terahertz detection module); parameters such as the frequency range, the stepping interval, the power, the frequency sweep frequency and the like of each path of signal can be freely set according to the needs.
In practical application, the multifunctional microwave signal source is used as an M-channel frequency division multiplexing microwave signal and an M-channel frequency division multiplexing local oscillation signal generated by the signal source module, wherein M is more than or equal to 1, and a person skilled in the art can select a proper M channel according to practical requirements.
The terahertz transceiver unit (terahertz transceiver module) comprises M highly integrated terahertz transceiver integrated modules (terahertz transceiver integrated units), each terahertz transceiver integrated module is provided with a standard rectangular metal waveguide frequency band, and is subjected to multiband splicing frequency division multiplexing, seamless and non-overlapping transmission of full terahertz wave band signals covering 0.05-1.5 THz or even higher frequency bands and detection of reflected terahertz signals of a sample to be detected.
The terahertz wave transmitting frequency resolution can be freely set within the range of 1 Hz-1 kHz as required, the terahertz receiving and transmitting integrated module can detect amplitude and phase information of a reflected signal of a substance to be detected at the same time, the amplitude information can realize qualitative analysis of reflection characteristics of a sample to be detected, and the phase information can assist in realizing quantitative analysis of the sample to be detected.
In practical application, each terahertz receiving and transmitting integrated module has a standard rectangular metal waveguide frequency band, and the frequency band or the extended frequency band can be freely selected according to practical requirements through the transmission of the multiband spliced frequency division multiplexed full terahertz wave band signals, for example, the 1.5THz frequency band can be realized.
Fig. 3 is a block diagram of a first transmission control module of the terahertz spectrum analyzer based on the frequency division multiplexing substance according to embodiment 2 of the present invention.
In the present embodiment 2, when m=7 is selected, the terahertz transmission control unit 1 is structured as shown in fig. 3. The transmission control unit 1 (first transmission control module) includes a shaping unit and a beam combining unit. The shaping unit consists of a pair of diffraction phase plates working in different wave bands and is used for carrying out beam shaping on terahertz signals generated by the M terahertz receiving and transmitting integrated units, so that the Gaussian diverging beam is converted into the structured terahertz beam without obvious diffraction behaviors.
The terahertz signal frequency generated by the terahertz receiving and transmitting integrated unit is in a frequency band which is seamless and non-overlapping and covers 0.05-1.5 THz or even higher (frequency band or expansion frequency band can be freely selected according to actual requirements).
The beam combining unit consists of polarizers (gratings) working in different wave bands, beam splitters and reflecting surfaces. The polarizer (grating) is used for regulating and controlling the phase and amplitude of the terahertz wave beam, and realizing the accurate regulation and control of the terahertz wave beam. The beam splitter is used for realizing reflection and transmission behaviors of different terahertz frequency bands. The reflecting surface is used as an auxiliary device to realize the precise control of the terahertz wave propagation.
In order to achieve position adjustment of a substance to be measured, so that the transmitted terahertz signal can be more accurately focused on a certain fixed point of the substance to be measured, the transmitted terahertz signal can be accurately transmitted to the second ultra-wideband lens through the substance to be measured, and the reflected terahertz wave signal can be accurately reflected to the first ultra-wideband lens, in the embodiment, a sample chamber is provided, the first ultra-wideband lens and the second ultra-wideband lens are arranged in the sample chamber, and the first ultra-wideband lens and the second ultra-wideband lens can be moved in position in the sample chamber to adjust a proper position.
And a sample stage for placing a substance to be detected is arranged between the first ultra-wideband lens and the second ultra-wideband lens, the substance to be detected is placed on the sample stage, terahertz waves transmitted through the substance to be detected are transmitted on the second ultra-wideband lens, and terahertz waves reflected by the substance to be detected are incident on the first ultra-wideband lens.
The sample chamber is used for extracting terahertz characteristic spectrum of the substance to be detected. As shown in fig. 2, the sample chamber is mainly composed of an ultra-wideband lens 1 (first ultra-wideband lens), a two-dimensional moving table 1, a three-dimensional sample table, an ultra-wideband lens 2 (second ultra-wideband lens), a two-dimensional moving table 2, and the like.
The ultra-wideband lens 1 is used for focusing incident terahertz waves on a certain fixed point of a substance to be detected, and simultaneously realizing transmission control of reflected terahertz waves. The two-dimensional mobile station 1 is used for controlling the position of the ultra wideband lens 1, and the two-dimensional mobile station 1 is a prior art device, such as an MTS series mobile station; the three-dimensional sample stage is used for controlling the substance to be tested to perform high-precision three-dimensional rotation, and is also equipment in the prior art, for example, an MTS series mobile station can be used; the ultra-wideband lens 2 is used for transmitting terahertz wave shaping for parallel propagation; the two-dimensional mobile station 2 is used to control the position of the ultra wideband lens 2.
And the controller is used for controlling the two-dimensional moving table 1, the two-dimensional moving table 2 and the three-position sample table to adjust the positions of the first ultra-wideband lens, the substance to be tested and the second ultra-wideband lens.
The first ultra-wideband lens, the substance to be detected and the second ultra-wideband lens can be positioned at proper positions through the cooperation of the two-dimensional moving table 1, the three-dimensional sample table and the two-dimensional moving table 2, terahertz waves emitted by the beam combination unit are accurately and sequentially incident on the first ultra-wideband lens, the substance to be detected and the second ultra-wideband lens, and are emitted into the beam splitting unit by the second ultra-wideband lens.
The transmission control unit 2 (second transmission control module) includes two parts of a beam splitting unit and a control unit (directional transmission unit). In embodiment 2, when m=7 is selected, the second transmission control module structure is as shown in fig. 4.
The beam splitting unit is composed of a pair of dispersion devices and is used for realizing that terahertz beams can be transmitted according to different frequency splitting beams. The control unit consists of a beam splitter, a reflecting surface and a lens and is used for realizing the directional transmission of the space dispersion terahertz waves to the terahertz detection unit.
The terahertz detection unit comprises M terahertz detectors with high sensitivity, each terahertz detector is provided with a standard rectangular metal waveguide frequency band, high-sensitivity detection of the terahertz signals with the full frequency band of 0.05-1.5 THz or even higher frequency band (the frequency band or the extended frequency band can be freely selected according to actual requirements) can be realized under the excitation of local oscillation signals provided by a microwave signal source, and the terahertz signals are subjected to frequency mixing, down-conversion, low-noise amplification and other processing to obtain intermediate-frequency signals. The terahertz detection module can obtain the amplitude and phase information of the sample to be detected at the same time.
In this embodiment 2, in order to realize the collection of the terahertz wave signals reflected by the substance to be detected, a multi-path data collection unit is connected between the terahertz wave receiving and transmitting integrated unit and the calculation module, where the multi-path data collection unit includes hardware devices such as a high-speed ADC module and a high-performance FPGA, so as to realize the high-speed collection of the terahertz signals reflected by the substance to be detected.
Likewise, in order to realize the acquisition of the terahertz wave signals transmitted by the substance to be detected, a multi-path data acquisition unit is connected between the terahertz wave detection equipment and the calculation module, so that the high-speed acquisition of the terahertz signals transmitted by the substance to be detected is realized.
In this embodiment 2, the calculation module is executed in a server, and the server is internally provided with a control command and a signal processing core algorithm for processing the reflected signal and the transmitted signal of the sample to be measured, so as to obtain the terahertz spectrum of the sample to be measured in any band within the THz frequency range of 0.05-1.5, and the terahertz spectrum is used in the fields of qualitative and quantitative analysis of the sample, identification of the sample category and the like. And a terahertz spectrum database is also stored in the server, and is called to compare with the terahertz spectrum of the substance to be detected obtained by the calculation module, so as to perform qualitative and quantitative analysis on the substance to be detected.
In this embodiment 2, when the terahertz spectrum analysis apparatus based on frequency division multiplexing according to embodiment 2 of the present invention is used for terahertz spectrum analysis of a substance, the method includes the following steps:
A. system initialization
(1) Setting the output signal path number M and start-stop frequency f of a multifunctional microwave signal source l -f h Signal power p i (i=1, …, M), number of signal scans j, step interval, etc. parameter n;
(2) Setting sampling frequency f of terahertz signals reflected by multichannel data acquisition unit 1 s1 Time t of collection 1 Isoparametric parameters;
(3) Setting sampling frequency f of transmission terahertz signals of multichannel data acquisition unit 2 s2 Time t of collection 2 Isoparametric parameters;
(4) Setting the motion rate (v) of the xyz triaxial of the three-dimensional sample stage of the sample chamber x ，v y ，v z ) The method comprises the steps of carrying out a first treatment on the surface of the Position (p) x ，p y ，p z )；
(5) Under the unified control of the server, optical devices such as a transmission control unit 1, a sample chamber, a lens in a transmission control unit 2, a beam splitter, a reflecting surface and the like are automatically adjusted to a signal accurate transmission control state.
B. Reference signal acquisition
The three-dimensional sample stage is in a vacant state, the spectrum analyzer is in a working state, and the reflected terahertz wave and the transmitted terahertz wave in the vacant state are recorded respectively and marked as w 1 And w is equal to 2 And storing the data to a server side.
C. Sample signal acquisition
(1) Repeating the related treatment of the step (5) in the step A;
(2) Placing a sample to be tested on a three-dimensional sample table, and placing the sample to be tested in an effective area through a turntable controller;
(3) The spectrum analyzer is in working state, and respectively records reflected terahertz wave and transmitted terahertz wave in empty state, and is recorded as s 1 And s 2 And storing the data to a server side.
D. Sample analysis
(1) The server obtains the reference signal w 1 、w 2 Sample signal s 1 、s 2 According to a terahertz characteristic spectrum extraction algorithm built in the server, the extraction of a reflected terahertz spectrum and a transmitted terahertz spectrum of a sample to be detected is realized;
(2) According to the reflected terahertz spectrum and the transmitted terahertz spectrum of the sample to be tested, qualitative and quantitative analysis and class test of the sample to be tested are realized by calling a terahertz spectrum database built in a server.
Example 3
In embodiment 3 of the invention, the terahertz spectrum analysis device for substances based on frequency division multiplexing provides a basis for researching qualitative and quantitative analysis and accurate detection and identification of category of substance components based on terahertz spectrum fine extraction.
Fig. 5 is a schematic diagram of a terahertz spectrum analyzer based on frequency division multiplexing according to embodiment 3 of the present invention.
As shown in fig. 5, the terahertz spectrum analysis device for substances based on frequency division multiplexing mainly comprises a multifunctional microwave signal source, a terahertz transceiver unit, a transmission control unit 1, a sample chamber, a transmission control unit 2, a terahertz detection unit, a multipath data acquisition unit, a server and other units.
The multifunctional microwave signal source is used as a signal source module, 7 paths of frequency division multiplexing microwave signals and 7 paths of intermediate frequency signals (frequency division multiplexing local oscillation signals) are generated, and each path of frequency division multiplexing microwave signals is used as an excitation signal of a terahertz transceiver unit (terahertz transceiver module); each path of frequency division multiplexing local oscillation signal is used as a local oscillation signal of a terahertz detection unit (terahertz detection module); parameters such as the frequency range, the stepping interval, the power, the frequency sweep frequency and the like of each path of signal can be freely set according to the needs.
Correspondingly, the terahertz transceiver unit (terahertz transceiver module) comprises 7 highly integrated terahertz transceiver integrated units. As shown in fig. 5, in the present embodiment 3, the range of the terahertz wave band 1 excited by the first-path frequency division multiplexing microwave signal is 0.11 to 0.17THz, the range of the terahertz wave band 2 excited by the second-path frequency division multiplexing microwave signal is 0.17 to 0.22THz, the range of the terahertz wave band 3 excited by the third-path frequency division multiplexing microwave signal is 0.22 to 0.33THz, the range of the terahertz wave band 4 excited by the fourth-path frequency division multiplexing microwave signal is 0.33 to 0.5THz, the range of the terahertz wave band 5 excited by the fifth-path frequency division multiplexing microwave signal is 0.5 to 0.75THz, the range of the terahertz wave band 6 excited by the sixth-path frequency division multiplexing microwave signal is 0.75 to 1.1THz, and the range of the terahertz wave band excited by the seventh-path frequency division multiplexing microwave signal is 1.1 to 1.5THz.
In this embodiment 3, the transmission control unit 1 (first transmission control module) includes a shaping unit and a beam combining unit. The shaping unit package 7 is formed by diffraction phase plates working in different wave bands and is used for carrying out wave beam shaping on terahertz signals in different frequency bands generated by the 7 terahertz receiving and transmitting integrated units, so that the Gaussian divergent wave beam is converted into the structured terahertz wave beam without obvious diffraction behaviors.
The beam combining unit consists of polarizers (gratings) working in different wave bands, beam splitters and reflecting surfaces. The polarizer (grating) is used for regulating and controlling the phase and amplitude of the terahertz wave beam, and realizing the accurate regulation and control of the terahertz wave beam. The beam splitter is used for realizing reflection and transmission behaviors of different terahertz frequency bands. The reflecting surface is used as an auxiliary device to realize the precise control of the terahertz wave propagation.
As shown in fig. 5, in embodiment 3, the first terahertz wave signal (frequency band 1) first passes through the first pair of diffraction phase plates at the top in the shaping unit, then passes through the first polarizer in the corresponding beam combining unit, and then enters the reflecting surface at the right side. The second path terahertz wave signal (frequency band 2) enters the second path polarizer after passing through the second pair of diffraction phase plates, and then two beam splitters are sequentially arranged on the right side of the second path polarizer, and the right side of the beam splitter is a second path reflecting surface. The third path terahertz wave signal (frequency band 3) sequentially passes through a third pair of diffraction phase plates, a third path polarizer and a reflecting surface. The fourth path terahertz wave signal (wave band 4) sequentially passes through a fourth pair of diffraction phase plates, a fourth path polarizer and a reflecting surface. The fifth terahertz wave signal (wave band 5) sequentially passes through a fifth pair of diffraction phase plates and a fifth polarizer, the right side of the fifth polarizer is a beam splitter, and the right side of the beam splitter is a reflecting surface. The sixth path of terahertz wave signals (wave band 6) sequentially pass through a sixth pair of diffraction phase plates and a sixth path of polarizers, two beam splitters are arranged on the right side of each sixth path of polarizers, and a reflecting surface is arranged on the right side of each beam splitter. The seventh path of terahertz wave signal (wave band 7) sequentially passes through the seventh pair of diffraction phase plates and the seventh path of polarizer, and the right side of the seventh path of polarizer is a reflecting surface.
In order to achieve position adjustment of a substance to be measured, so that the transmitted terahertz signal can be more accurately focused on a certain fixed point of the substance to be measured, the transmitted terahertz signal can be accurately transmitted to the second ultra-wideband lens through the substance to be measured, and the reflected terahertz wave signal can be accurately reflected to the first ultra-wideband lens, in the embodiment, a sample chamber is provided, the first ultra-wideband lens and the second ultra-wideband lens are arranged in the sample chamber, and the first ultra-wideband lens and the second ultra-wideband lens can be moved in position in the sample chamber to adjust a proper position.
And a three-dimensional sample stage for placing a substance to be detected is arranged between the first ultra-wideband lens and the second ultra-wideband lens, and the three-dimensional position of the substance to be detected can be adjusted through the three-dimensional sample stage. Placing a substance to be measured on a sample stage, transmitting the terahertz wave transmitted by the substance to be measured on a second ultra-wideband lens, and incidence of the terahertz wave reflected by the substance to be measured on a first ultra-wideband lens.
The first ultra-wideband lens and the second ultra-wideband lens are respectively arranged on the two movable devices, and the positions of the first ultra-wideband lens and the second ultra-wideband lens are adjusted through the movable devices.
The transmission control unit 2 (second transmission control module) includes two parts of a beam splitting unit and a control unit (directional transmission unit). In this embodiment 3, as shown in fig. 5, the beam splitting unit is composed of a pair of dispersion devices for realizing that terahertz beams can be split into beam transmissions at different frequencies. The control unit consists of a beam splitter, a reflecting surface and a lens and is used for realizing the directional transmission of the space dispersion terahertz waves to the terahertz detection unit. The terahertz detection unit comprises 7 terahertz detectors with high sensitivity, and each terahertz detector detects 7 terahertz wave signals with different wave bands.
Terahertz wave signals emitted by the beam splitting unit are firstly incident on a beam splitting mirror, and the reflecting surfaces are arranged right above and right below the beam splitting mirror.
The right side of the reflecting surface right above is sequentially provided with two beam splitters of a second path terahertz wave band, the right sides of the two beam splitters are lenses of a second path, the upper part of the second path of lenses is provided with a first path of lenses, and the left side of the first path of lenses is provided with the reflecting surface. The lower part of the second path lens is provided with a third path lens, and the left side of the third path lens is provided with a reflecting surface of the third path. The lower part of the third path lens is provided with a fourth path lens, and the left side of the fourth path lens is provided with a reflecting surface of the fourth path. The third lens is arranged below the fourth lens, the beam splitter is arranged at the left side of the third lens, and the reflecting surface is arranged at the left side of the beam splitter.
The right side of the reflecting surface right below is sequentially provided with two beam splitters of a sixth terahertz wave band, the right sides of the two beam splitters are lenses of the sixth path, the lower part of the lenses of the sixth path is provided with a lens of a seventh path, and the left side of the lenses of the seventh path is provided with the reflecting surface of the seventh path.
7 paths of terahertz waves respectively enter 7 terahertz wave detectors through a first path of lens, a second path of lens, a third path of lens, a fourth path of lens, a fifth path of lens, a sixth path of lens and a seventh path of lens.
In this embodiment 3, in order to realize the collection of the terahertz wave signals reflected by the substance to be detected, a multi-path data collection unit is connected between the terahertz wave receiving and transmitting integrated unit and the calculation module, where the multi-path data collection unit includes hardware devices such as a high-speed ADC module and a high-performance FPGA, so as to realize the high-speed collection of the terahertz signals reflected by the substance to be detected.
Likewise, in order to realize the acquisition of the terahertz wave signals transmitted by the substance to be detected, a multi-path data acquisition unit is connected between the terahertz wave detection equipment and the calculation module, so that the high-speed acquisition of the terahertz signals transmitted by the substance to be detected is realized.
In this embodiment 3, the calculation module is executed in a server, and the server is internally provided with a control command and a signal processing core algorithm for processing the reflected signal and the transmitted signal of the sample to be measured, so as to obtain the terahertz spectrum of the sample to be measured in any band within the THz frequency range of 0.05-1.5, and the terahertz spectrum is used in the fields of qualitative and quantitative analysis of the sample, identification of the sample category and the like.
In embodiment 3, the core algorithm built in the server may be a substance marker-free detection and identification method based on terahertz waves. The method comprises the following three steps of:
A. the server carries out super-resolution reconstruction on the obtained reference signal, effectively suppresses the influence of Gaussian noise, and realizes the spectrum estimation of the reference terahertz signal in an empty state;
B. the server transmits the terahertz signals to the obtained samples subjected to multiple tests, and sequentially carries out the processing of terahertz signal invalid point detection, terahertz signal reconstruction, terahertz spectrum estimation, terahertz spectrum optimization and the like, so as to obtain a terahertz spectrum with a higher signal-to-noise ratio;
C. c, obtaining a sample absorption spectrum according to the terahertz frequency spectrum of the reference signal and the terahertz signal frequency spectrum of the sample transmission obtained in the step A and the step B; on the basis, the terahertz characteristic spectrum with obvious peak value is obtained through terahertz absorption spectrum bureau and optimization.
In summary, according to the terahertz spectrum analysis device and the analysis and test method for the substances based on frequency division multiplexing, the terahertz spectrum resolution is improved from the magnitude of several GHz to the magnitude of Hz (optimal 1 Hz), and the terahertz spectrum resolution is improved by 6-9 magnitudes; the output power of the terahertz signal is 10 -6 W is lifted to 10 -3 1W, 3-4 orders of magnitude lifting; the dynamic range is increased from 20-30 dB to 30-40 dB; the terahertz spectrum resolution is autonomously set, and the setting range is 1 Hz-1 kHz; realizing transmission terahertz spectrum and reflection terahertz of sample to be measuredSynchronous acquisition of the Z wave spectrum; fills the international blank of a full-electronics high-resolution terahertz spectrum analyzer.
The foregoing description of the preferred embodiments of the present disclosure is provided only and not intended to limit the disclosure so that various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
While the foregoing embodiments of the present disclosure have been described in conjunction with the accompanying drawings, it is not intended to limit the scope of the disclosure, and it should be understood that, based on the technical solutions disclosed in the present disclosure, various modifications or variations may be made by those skilled in the art without requiring any inventive effort, and are intended to be included in the scope of the present disclosure.
Claims (4)
1. A substance terahertz spectrum analysis device based on frequency division multiplexing, characterized by comprising:
the signal source module generates a frequency division multiplexing microwave signal and a corresponding frequency division multiplexing local oscillation signal;
the terahertz receiving and transmitting module is excited by the frequency division multiplexing microwave signals to transmit terahertz signals, receives the terahertz wave signals reflected by the substance to be detected and transmits the terahertz wave signals to the computing module;
the first transmission control module is used for carrying out beam shaping on the terahertz signals transmitted by the terahertz receiving and transmitting module, converting Gaussian divergent beams into structured terahertz beams and transmitting the structured terahertz beams to a substance to be detected;
the second transmission control module is used for carrying out the wave division directional transmission on the terahertz wave signal transmitted through the substance to be detected to the terahertz wave detection module;
the terahertz wave detection module is excited by the frequency division multiplexing local oscillation signal to detect the received terahertz wave signal and then sends the terahertz wave signal to the calculation module;
the calculation module is used for calculating the terahertz wave signals reflected by the substance to be detected and the terahertz signals transmitted by the substance to be detected to obtain terahertz wave spectrums of the substance to be detected;
the terahertz receiving and transmitting module comprises a plurality of terahertz receiving and transmitting integrated units, each terahertz receiving and transmitting integrated unit comprises a standard rectangular metal waveguide frequency band, a plurality of terahertz wave signals are transmitted through multiband spliced frequency division multiplexing microwave signals, and terahertz wave signals reflected by a substance to be detected are received and transmitted to the computing module;
the first transmission control module comprises a shaping unit and a beam combining unit;
the shaping unit performs beam shaping on the plurality of paths of terahertz wave signals transmitted by the terahertz receiving and transmitting integrated unit, and realizes the conversion from Gaussian divergent beams to structured terahertz beams;
the beam combining unit is used for completing phase regulation, amplitude regulation, reflection and transmission of the terahertz beam;
a first ultra-wideband lens is arranged between the beam combination unit and the substance to be detected, and is used for focusing incident terahertz waves on the substance to be detected and simultaneously completing transmission of terahertz wave signals reflected by the substance to be detected;
the second transmission control module comprises a beam splitting unit and a directional transmission unit;
the beam splitting unit is used for transmitting terahertz wave signals transmitted by the substance to be detected according to a plurality of paths of different frequency split beams;
the directional transmission unit is used for directionally transmitting a plurality of terahertz wave signals transmitted by different frequency sub-beams to the terahertz detection module;
the shaping unit consists of a pair of diffraction phase plates;
the beam combining unit consists of a polarizer, a beam splitter and a reflecting surface;
the polarizer is used for phase regulation and amplitude regulation of the terahertz wave beam;
the beam splitter is used for realizing reflection and transmission of terahertz wave signals in different terahertz frequency bands;
the reflecting surface is used for realizing the transmission path adjustment control of the terahertz wave signal propagation;
the beam splitting unit consists of a pair of dispersion devices;
the directional transmission unit consists of a beam splitter, a reflecting surface and a directional lens;
the directional lens is used for respectively transmitting the terahertz wave signals transmitted by the substances to be detected to the corresponding terahertz detectors in a directional mode.
2. The terahertz spectrum analysis apparatus for substances based on frequency division multiplexing according to claim 1, wherein:
and a second ultra-wideband lens is arranged between the beam splitting unit and the substance to be detected, and the second ultra-wideband lens is used for shaping and parallel transmitting terahertz wave signals transmitted by the substance to be detected.
3. The terahertz spectrum analysis apparatus for substances based on frequency division multiplexing according to claim 1, wherein:
the terahertz wave detection module comprises a plurality of terahertz wave detectors, each terahertz detector is provided with a standard rectangular metal waveguide frequency band, and under the excitation of a frequency division multiplexing local oscillator signal, the terahertz wave signals transmitted by a plurality of substances to be detected are detected and sent to the calculation module.
4. A method of performing a substance terahertz spectroscopy test using the frequency division multiplexing-based substance terahertz spectroscopy apparatus as set forth in any one of claims 1 to 3, comprising:
step S110: initializing a system: setting the output signal path number, the initial frequency, the cut-off frequency, the signal power, the signal scanning times and the stepping interval of the signal source module; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected; setting the sampling frequency and the acquisition time length of terahertz wave signals reflected by a substance to be detected;
step S120: and (3) reference signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of no substance to be detected, and transmitting the signals to a calculation module as reference signals;
step S130: sample signal acquisition: collecting reflected terahertz wave signals and transmitted terahertz wave signals under the state of a substance to be detected, and transmitting the reflected terahertz wave signals and the transmitted terahertz wave signals as reference signals to a calculation module;
step S140: analyzing substances to be tested: according to the obtained reference signal and sample signal, the calculation module realizes extraction of reflection terahertz spectrum and transmission terahertz spectrum of the substance to be detected through a built-in terahertz characteristic spectrum extraction algorithm;
step S150: according to the reflection terahertz spectrum and the transmission terahertz spectrum of the substance to be tested, qualitative and quantitative analysis and class test of the substance to be tested are realized by calling a terahertz spectrum database.
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| CN113281298B (en) * | 2021-05-19 | 2022-07-12 | 中国电子科技集团公司第四十一研究所 | Terahertz material micro-nano defect detection device and method based on multi-frequency point information fusion |
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