CN111665682A - Preparation method of inclined grating and imprinting template - Google Patents
Preparation method of inclined grating and imprinting template Download PDFInfo
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- CN111665682A CN111665682A CN202010561769.6A CN202010561769A CN111665682A CN 111665682 A CN111665682 A CN 111665682A CN 202010561769 A CN202010561769 A CN 202010561769A CN 111665682 A CN111665682 A CN 111665682A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
Abstract
The invention provides a preparation method of an inclined grating and an imprinting template, belongs to the technical field of grating preparation, and can at least partially solve the problem that the existing imprinting template and preparation method have certain difficulty in preparing the inclined grating. The invention discloses a preparation method of an inclined grating, which comprises the following steps: forming a flexible material layer on a substrate; forming a magnetic material layer on the surface of the flexible material layer far away from the substrate; patterning the flexible material layer and the magnetic material layer, wherein the flexible material layer forms a plurality of columnar flexible structures distributed at intervals, the magnetic material layer forms a plurality of columnar magnetic structures distributed at intervals, and the flexible structures and the magnetic structures correspond to each other one by one to form an imprinting template, wherein when the position of the substrate is unchanged, when the magnetic structure is subjected to position change by magnetic force, the flexible structure can be driven to generate position change; an embossed template is used to form the slanted grating.
Description
Technical Field
The invention belongs to the technical field of grating preparation, and particularly relates to a preparation method of an inclined grating and an imprinting template.
Background
The nano-imprinting technology is a novel micro-nano processing technology. The technology achieves ultrahigh resolution by means of mechanical transfer, is expected to replace the traditional photoetching technology in the future, and becomes an important processing means in the fields of microelectronics and materials. The nanoimprint technology is commonly used for forming a grating structure, specifically, an imprint template with a nano structure is formed at present, then the imprint template is used for imprinting a grating material layer, and finally the imprinted grating material layer is cured to form the grating structure.
However, the imprinting stamp and method of the prior art have certain difficulties with tilted gratings, such as preparing tilted gratings at a tilted angle may require multiple different imprinting stamps, thereby increasing the difficulty of tilted grating preparation.
Disclosure of Invention
The invention at least partially solves the problem that the existing imprinting template and the preparation method have certain difficulty in preparing the inclined grating, and provides the simple and easy-to-operate preparation method of the inclined grating.
The technical scheme adopted for solving the technical problem of the invention is a preparation method of an inclined grating, which comprises the following steps:
forming a flexible material layer on a substrate;
forming a magnetic material layer on the surface of the flexible material layer far away from the substrate;
patterning the flexible material layer and the magnetic material layer, wherein the flexible material layer forms a plurality of columnar flexible structures distributed at intervals, the magnetic material layer forms a plurality of columnar magnetic structures distributed at intervals, the flexible structures correspond to the magnetic structures one to form an imprinting template, and when the position of the substrate is unchanged, the magnetic structures are subjected to position change under the action of magnetic force, so that the flexible structures can be driven to change positions;
and forming an inclined grating by using the imprinting template.
Further preferably, the forming of the tilted grating using the imprint template comprises: an imprint material is formed on a substrate.
Further preferably, the forming of the tilted grating using the imprint template includes: orienting the magnetic structures of the imprinting template to the imprinting material and imprinting the imprinting material so that the imprinting material fills the spaces between the flexible structures and the spaces between the magnetic structures; applying magnetic force to the magnetic structure to enable the magnetic structure to generate position change, wherein the position change of the magnetic structure drives the flexible structure to generate position change relative to the substrate; and carrying out curing treatment on the imprinting material to form the inclined grating.
It is further preferable that, after the curing process is performed on the imprint material to form the tilted grating, the method further includes: detaching the imprint template from the tilted grating.
It is further preferred that the directing the magnetic structure of the imprint template towards the imprint material and imprinting the imprint material comprises: under the action of a first magnetic field, the axis of each flexible structure is vertical to the substrate; the applying of the magnetic force to the magnetic structure causes the magnetic structure to change in position, and the change in position of the magnetic structure drives the flexible structure to change in position relative to the substrate, including: under the action of a second magnetic field, the direction of the magnetic force and the substrate form an acute angle, and the axis of the flexible structure after the position change and the substrate form an acute angle.
It is further preferred that the patterning the flexible material layer and the magnetic material layer includes: the height of the magnetic structure is formed to be 0.1-0.3 times the height of the flexible structure.
It is further preferred that the forming of the flexible material layer on the substrate comprises: the flexible material layer is made of polyimide or polyethylene terephthalate.
It is further preferred that the forming of the magnetic material layer on the surface of the flexible material layer away from the substrate includes: the forming material of the magnetic material layer comprises one or more of iron, cobalt, nickel and organic materials doped with magnetic nanoparticles.
The technical scheme adopted for solving the technical problem of the invention is an imprinting template for preparing an inclined grating, and based on the preparation method of the inclined grating, the imprinting template comprises the following components:
a substrate;
the flexible structures are positioned on the substrate, are columnar and are distributed at intervals;
the magnetic structure is in a columnar shape, the flexible structures correspond to the magnetic structures one to one, and when the position of the substrate is unchanged, the magnetic structure is subjected to position change by magnetic force, so that the flexible structures can be driven to be opposite to the position change of the substrate.
It is further preferred that the height of the magnetic structure is 0.1-0.3 times the height of the flexible structure.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic flow chart of a method for manufacturing a tilted grating according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a method for fabricating a tilted grating according to an embodiment of the present invention;
fig. 3a to 3h are schematic structural diagrams of steps of a method for manufacturing an inclined grating according to an embodiment of the present invention;
fig. 4a and 4b are schematic diagrams illustrating the operation of an electromagnet device in a method for manufacturing an inclined grating according to an embodiment of the present invention;
FIGS. 5a and 5b are schematic views illustrating the magnetic behavior of an imprint template according to an embodiment of the present invention;
wherein the reference numerals are: 1. a substrate; 2. a layer of flexible material; 21. a flexible structure; 3. a magnetic material layer; 31. a magnetic structure; 4. imprinting a template; 5. a substrate; 6. imprinting a material; 61. tilting the grating; 7. an electromagnet device.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
In the present invention, the "patterning process" refers to a step of forming a structure having a specific pattern, which may be a photolithography process including one or more steps of forming a material layer, coating a photoresist, exposing, developing, etching, stripping a photoresist, and the like; of course, the "patterning process" may also be an imprinting process, an inkjet printing process, or other processes.
The invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by like reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale. Moreover, certain well-known elements may not be shown in the figures.
In the following description, numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of components, are set forth in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.
Example 1:
as shown in fig. 1 to fig. 5b, the present embodiment provides a method for manufacturing an inclined grating 61, including:
s11, as shown in fig. 3a, the flexible material layer 2 is formed on the substrate 1.
S12, as shown in fig. 3b, a magnetic material layer 3 is formed on the surface of the flexible material layer 2 away from the substrate 1.
In which a flexible material layer 2 and a magnetic material layer 3 are sequentially formed, that is, on the same surface of a substrate 1.
S13, as shown in fig. 3c and 3d, patterning the flexible material layer 2 and the magnetic material layer 3, forming a plurality of flexible structures 21 in a columnar shape at intervals on the flexible material layer 2, forming a plurality of magnetic structures 31 in a columnar shape at intervals on the magnetic material layer 3, and enabling the flexible structures 21 to correspond to the magnetic structures 31 one to form the imprinting stamp 4, wherein when the position of the substrate 1 is not changed, when the magnetic structures 31 are subjected to a magnetic force to change positions, the flexible structures 21 can be driven to change positions relative to the substrate 1.
In other words, after the patterning process, the flexible structure 21 and the magnetic structure 31 are formed, the patterning process may be performed once to simultaneously form the flexible structure 21 and the magnetic structure 31; it is also possible to perform two patterning processes to form the magnetic structure 31 and the flexible structure 21 in sequence. Since the flexible structure 21 and the magnetic structure 31 are stacked on each other, it is generally understood that the cross-section of the flexible structure 21 and the cross-sectional shape of the magnetic structure 31 are the same.
Meanwhile, since the flexible structure 21 and the magnetic structure 31 are connected to each other, when the magnetic structure 31 is subjected to a magnetic force to displace the magnetic structure 31, the magnetic structure 31 will also apply a corresponding force to the flexible structure 21, so that the shape or position of the flexible structure 21 is changed.
S14, the tilted grating 61 is formed by the imprint template 4.
Wherein the tilted grating 61 is formed by utilizing the deformable nature of the flexible structure 21 and the magnetic properties of the magnetic structure 31. In the process of forming the tilted grating 61, when the shape or position of the flexible structure 21 changes, that is, the relative position of the flexible structure 21 and the substrate 1 changes, the interval between adjacent flexible structures 21 changes, so that the tilted grating 61 with different tilt angles can be formed.
In the method for manufacturing the tilted grating 61 of the embodiment, the imprinting template 4 having the flexible structure 21 and the magnetic structure 31 is formed, and the relative position of the flexible structure 21 and the substrate 1 is changed to form the tilted grating 61 with different tilt angles, so that the difficulty in manufacturing the tilted grating 61 is reduced.
Example 2:
as shown in fig. 1 to fig. 5b, the present embodiment provides a method for manufacturing an inclined grating 61, including:
s21, as shown in fig. 3a, the flexible material layer 2 is formed on the substrate 1.
Preferably, the flexible material layer 2 is formed of Polyimide (PI) or polyethylene terephthalate (PET). The material for forming the flexible material layer 2 is not limited to the above-mentioned materials, and may be other suitable materials. The substrate 1 may be a wafer glass substrate, or other suitable substrate type.
Further, the flexible material layer 2 may be formed on the substrate 1 by coating.
S22, as shown in fig. 3b, a magnetic material layer 3 is formed on the surface of the flexible material layer 2 away from the substrate 1.
Preferably, the material for forming the magnetic material layer 3 includes one or more of iron, cobalt, nickel, and organic material doped with magnetic nanoparticles (e.g., iron-cobalt-nickel, alloys thereof, etc.). The material for forming the magnetic material layer 3 is not limited to the above-mentioned materials, and may be other suitable materials.
In addition, the magnetic material layer 3 may be formed on the flexible material layer 2 by coating or deposition.
S23, as shown in fig. 3c and 3d, patterning the flexible material layer 2 and the magnetic material layer 3, forming a plurality of flexible structures 21 in a columnar shape at intervals on the flexible material layer 2, forming a plurality of magnetic structures 31 in a columnar shape at intervals on the magnetic material layer 3, and enabling the flexible structures 21 to correspond to the magnetic structures 31 one to form the imprinting stamp 4, wherein when the position of the substrate 1 is not changed, when the magnetic structures 31 are subjected to a magnetic force to change positions, the flexible structures 21 can be driven to change positions relative to the substrate 1.
In other words, after the patterning process, the flexible structure 21 and the magnetic structure 31 are formed, the patterning process may be performed once to simultaneously form the flexible structure 21 and the magnetic structure 31; it is also possible to perform two patterning processes to form the magnetic structure 31 and the flexible structure 21 in sequence. Since the flexible structure 21 and the magnetic structure 31 are stacked on each other, it is generally understood that the cross-section of the flexible structure 21 and the cross-sectional shape of the magnetic structure 31 are the same. The patterning process may be a photolithography process (coating of photoresist PR, exposure, development, etc.).
Meanwhile, since the flexible structure 21 and the magnetic structure 31 are connected to each other, when the magnetic structure 31 is subjected to a magnetic force to displace the magnetic structure 31, the magnetic structure 31 will also apply a corresponding force to the flexible structure 21, so that the shape or position of the flexible structure 21 is changed.
Preferably, the height of the magnetic structure 31 is formed to be 0.1-0.3 times the height of the flexible structure 21.
The magnetic structure 31 thus makes it easier to effect a change in the position of the flexible structure 21 relative to the substrate 1.
Steps S21 to 23 are actually steps for forming the imprint template 4.
S24, as shown in fig. 3e, the imprint material 6 is formed on the substrate 5.
In this case, the marking material 6 is flowable, so that when the marking material 6 fills containers of different shapes, the marking material 6 changes to the corresponding shape.
S25, the tilted grating 61 is formed by the imprint template 4.
Specifically, the formation of the inclined grating 61 using the imprint template 4 includes:
s251, as shown in fig. 3f, the magnetic structures 31 of the imprint template 4 are directed toward the imprint material 6, and the imprint material 6 is imprinted so that the imprint material 6 fills the spaces between the flexible structures 21 and the spaces between the magnetic structures 31.
Wherein, that is to say the substrate 1 of the imprint template 4 is opposite the substrate 5, and the flexible structures 21 and the magnetic structures 31 of the imprint template 4 are inserted into the imprint material 6, i.e. the imprint material 6 fills the spaces between the flexible structures 21 and the spaces between the magnetic structures 31, at which point the imprint material 6 has formed the shape of the spaces between the flexible structures 21 and the spaces between the magnetic structures 31, i.e. portions of the imprint material 6 become spaced columns. Note that a gap is provided between the magnetic structure 31 and the substrate 5.
Further, under the action of the first magnetic field, the axis of each flexible structure 21 is perpendicular to the substrate 1, as shown in fig. 5 a.
Therein, that is to say during this step, the magnetic structures 31 are subjected to a first magnetic field and this magnetic field gives each magnetic structure 31 a force Fa perpendicular to the substrate 1 and directed in the direction of the magnetic structure 31 towards the flexible structure 21, so that each flexible structure 21 is also subjected to the same force given by the magnetic structure 31, so that the axis of the flexible structure 21 is perpendicular to the substrate 1. In this condition, the axes of the spacing of the flexible structures 21 and the spacing of the magnetic structures 31 are also perpendicular to the base 1, so that the axis of each columnar structure formed by the imprinting material 6 at that time is perpendicular to the substrate 5.
S252, as shown in fig. 3g, a magnetic force is applied to the magnetic structure 31, so that the magnetic structure 31 changes its position, and the change in the position of the magnetic structure 31 brings the flexible structure 21 to change its position relative to the substrate 1.
In other words, on the premise that the position of the substrate 1 of the imprint template 4 is fixed, the magnetic force applied to the magnetic structure 31 causes the magnetic structure 31 to drive one end of the flexible structure 21 to move, so that the position of the flexible structure 21 relative to the substrate 1 changes, that is, the axis of the flexible structure 21 is not perpendicular to the substrate 1.
Further, under the action of the second magnetic field, the magnetic force direction forms an acute angle with the substrate 1, and the axis of the flexible structure 21 after the position change forms an acute angle with the substrate 1, as shown in fig. 5 b.
In this case, that is to say during this step, the magnetic structures 31 are in the second magnetic field, and the direction of the magnetic force given to each magnetic structure 31 by the magnetic field is at an acute angle with respect to the substrate 1, which is equivalent to adding a force Fc parallel to the substrate 1 on the basis of the magnetic force Fb, and the resultant of the two forces is the magnetic force of the second magnetic field on the magnetic structures 31. The magnetic force of the second magnetic field on the magnetic structures 31 causes each flexible structure 21 to also be subjected to the same force given by the magnetic structures 31, thereby causing the flexible structures 21 to tilt with the axis of the flexible structures 21 at an acute angle to the substrate 1. In this condition, the axes of the spacing of the flexible structures 21 and the spacing of the magnetic structures 31 are also at an angle to the base 1, such that the axis of each columnar structure formed by the imprinting material 6 at that time is at an angle to the substrate 5.
It should be noted that the magnitude of the magnetic force is adjusted by adjusting the magnitude of the field strength of the second magnetic field, and thus the inclination angle of the flexible structure 21 relative to the substrate 1 can be adjusted, that is, the inclination angle of each columnar structure formed by the imprint material 6 relative to the substrate 5 can be adjusted, so that the inclined gratings 61 with different inclination angles can be formed.
In addition, the electromagnet device 7 may be used to generate a first magnetic field or a second magnetic field, the magnitude of the first magnetic field or the second magnetic field may be adjusted by the magnitude of the current, and the electromagnet device 7 may be placed on one side of the magnetic structure 31, as shown in fig. 4a and 4 b.
It should be noted that the device for generating the first magnetic field or the second magnetic field in the present embodiment is not limited to the electromagnet device 7 described above, and may be other suitable devices, which are not listed here.
S253, the imprint material 6 is subjected to a curing process (UV curing) to form the inclined grating 61.
In which the imprint material 6 having fluidity is solidified and molded, the imprint material 6 becomes an inclined grating 61 including a plurality of columnar structures, and axes of the columnar structures form an acute angle with the substrate 5.
S26, as shown in fig. 3h, the imprint template 4 is detached from the tilt grating 61.
Specifically, the second magnetic field may be removed before the imprint template 4 is detached from the tilted grating 61, so that the magnetic structure 31 is not subjected to the force generated by the applied magnetic field. Due to the nature of the flexible structure 21, the imprint template 4 can be easily separated from the tilted grating 61 even if the flexible structure 21 is located between the columnar structures of the tilted grating 61.
Compared with the prior art (the imprinting template 4 of the inclined grating 61 is rigid, the imprinting template 4 is not easy to separate from the inclined grating 61, and the inclined grating 61 is damaged in the separation process), the preparation method of the inclined grating 61 can not only reduce the separation difficulty of the imprinting template 4 and the inclined grating 61, but also ensure that the inclined grating 61 is not damaged by the imprinting template 4 in the separation process.
The tilted grating 61 formed by the present embodiment can be used in an augmented reality/virtual reality (AR/VR) device to improve diffraction efficiency.
Example 3:
as shown in fig. 1 to 5b, the present embodiment provides an imprint template 4 for producing an inclined grating 61, and based on the production method of the inclined grating 61 of embodiment 1 or embodiment 2, the imprint template 4 includes:
a substrate 1;
the flexible structures 21 are positioned on the substrate 1, and the flexible structures 21 are columnar and distributed at intervals;
a plurality of magnetic structure 31 is located the flexible structure 21 and keeps away from one side of basement 1, and magnetic structure 31 is the column, and flexible structure 21 and magnetic structure 31 one-to-one, when the position of basement 1 was unchangeable, when magnetic structure 31 receives magnetic force to take place position change, can drive flexible structure 21 and take place the position change of relative basement 1.
Wherein, that is to say the flexible structure 21 and the magnetic structure 31 are mutually superposed, the cross section of the flexible structure 21 and the cross section of the magnetic structure 31 are identical.
Preferably, the height of the magnetic structure 31 is 0.1-0.3 times the height of the flexible structure 21.
Wherein the magnetic structure 31 thus makes it easier to achieve a change of position of the flexible structure 21 with respect to the substrate 1.
The imprinting template 4 of the embodiment has the flexible structure 21 and the magnetic structure 31, and forms the tilted gratings 61 with different tilt angles by changing the relative positions of the flexible structure 21 and the substrate 1, thereby reducing the difficulty of preparing the tilted gratings 61. Simultaneously, compare with prior art (the imprint template 4 of slope grating 61 is rigid, and imprint template 4 is difficult for breaking away from with slope grating 61, and still can cause the damage to slope grating 61 in the process of breaking away from), imprint template 4 of this implementation not only can reduce the degree of difficulty that imprint template 4 and slope grating 61 break away from, can guarantee moreover that slope grating 61 does not damage because of imprint template 4 in the process of breaking away from.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
While embodiments in accordance with the invention have been described above, these embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. The invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. A method for preparing a tilted grating, comprising:
forming a flexible material layer on a substrate;
forming a magnetic material layer on the surface of the flexible material layer far away from the substrate;
patterning the flexible material layer and the magnetic material layer, wherein the flexible material layer forms a plurality of columnar flexible structures distributed at intervals, the magnetic material layer forms a plurality of columnar magnetic structures distributed at intervals, the flexible structures correspond to the magnetic structures one to form an imprinting template, and when the position of the substrate is unchanged, the magnetic structures are subjected to position change under the action of magnetic force, so that the flexible structures can be driven to change positions;
and forming an inclined grating by using the imprinting template.
2. The method of claim 1, wherein forming the tilted grating using the imprint template comprises:
an imprint material is formed on a substrate.
3. The method of claim 2, wherein the forming the tilted grating using the imprint template comprises:
orienting the magnetic structures of the imprinting template to the imprinting material and imprinting the imprinting material so that the imprinting material fills the spaces between the flexible structures and the spaces between the magnetic structures;
applying magnetic force to the magnetic structure to enable the magnetic structure to generate position change, wherein the position change of the magnetic structure drives the flexible structure to generate position change relative to the substrate;
and carrying out curing treatment on the imprinting material to form the inclined grating.
4. The method for preparing an inclined grating according to claim 3, wherein the step of curing the imprint material to form the inclined grating further comprises:
detaching the imprint template from the tilted grating.
5. The method of claim 3, wherein the directing the magnetic structure of the imprint template toward the imprint material and imprinting the imprint material comprises:
under the action of a first magnetic field, the axis of each flexible structure is vertical to the substrate;
the applying of the magnetic force to the magnetic structure causes the magnetic structure to change in position, and the change in position of the magnetic structure drives the flexible structure to change in position relative to the substrate, including:
under the action of a second magnetic field, the direction of the magnetic force and the substrate form an acute angle, and the axis of the flexible structure after the position change and the substrate form an acute angle.
6. The method for manufacturing a tilted grating according to claim 1, wherein the patterning the flexible material layer and the magnetic material layer comprises:
the height of the magnetic structure is formed to be 0.1-0.3 times the height of the flexible structure.
7. The method of claim 1, wherein the forming a flexible material layer on a substrate comprises:
the flexible material layer is made of polyimide or polyethylene terephthalate.
8. The method for manufacturing a tilted grating according to claim 1, wherein the forming a magnetic material layer on the surface of the flexible material layer away from the substrate comprises:
the forming material of the magnetic material layer comprises one or more of iron, cobalt, nickel and organic materials doped with magnetic nanoparticles.
9. An imprint template for fabricating a tilted grating, based on the tilted grating fabrication method of any one of claims 1 to 8, the imprint template comprising:
a substrate;
the flexible structures are positioned on the substrate, are columnar and are distributed at intervals;
the magnetic structure is in a columnar shape, the flexible structures correspond to the magnetic structures one to one, and when the position of the substrate is unchanged, the magnetic structure is subjected to position change by magnetic force, so that the flexible structures can be driven to be opposite to the position change of the substrate.
10. An imprint template according to claim 9, wherein the height of the magnetic structure is 0.1-0.3 times the height of the flexible structure.
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