CN111381318B - Method for optimizing waveguide and cross waveguide cross device - Google Patents

Method for optimizing waveguide and cross waveguide cross device Download PDF

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CN111381318B
CN111381318B CN201811639879.9A CN201811639879A CN111381318B CN 111381318 B CN111381318 B CN 111381318B CN 201811639879 A CN201811639879 A CN 201811639879A CN 111381318 B CN111381318 B CN 111381318B
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adiabatic
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CN111381318A (en
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吴文扬
李蒙
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Zte Photoelectric Technology Co ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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Abstract

A method of optimizing a waveguide and a cross waveguide interleaver are disclosed. The method for optimizing the waveguide comprises the following steps: decomposing the quasi-adiabatic waveguide taper section with gradually changed width into N sections of straight waveguides, and setting a shape model of each section of straight waveguide; wherein the shape model of the ith straight waveguide section is Li＝f(Wi)，1≤i≤N，LiIs the length of the i-th straight waveguide in the direction of waveguide propagation, WiIs the width of the section of the i-th section of the straight waveguide, which is perpendicular to the propagation direction of the waveguide; determining a transmission matrix T of a quasi-adiabatic waveguide conical section with a target length according to the transmission matrix of each section of straight waveguide and a coupling transmission matrix between two adjacent sections of straight waveguides; optimizing parameters of a shape model of the quasi-adiabatic waveguide taper section according to an insertion loss index of the quasi-adiabatic waveguide taper section; and determining the shape of the quasi-adiabatic waveguide taper section according to the shape model and the optimized parameters. The technical scheme can reduce the waveguide size and reduce the insertion loss.

Description

Method for optimizing waveguide and cross waveguide cross device
Technical Field
The invention relates to the technical field of photoelectron, in particular to a method for optimizing a waveguide and a cross waveguide cross device.
Background
In recent years, silicon-based photonic integrated chips with high integration, fast speed, low cost, have been vigorously developed in technology and gradually become commercially available. Silicon-based photonic integrated chips have a wide range of applications, such as optical network switches. The optical network switch can complete the function of switching optical signals without converting into the digital field, and has a very promising application prospect, such as an all-optical network, a data center, optical interconnection and the like. The silicon photonic switch is composed of optical waveguides with different lengths, a plurality of optical switch units and a plurality of waveguide crossing structures. Lower insertion loss, lower crosstalk waveguide crossover structures are of paramount importance.
Common waveguide crossing structures include multilayer waveguide crossing structures and single layer waveguide crossing architectures. The multilayer waveguide cross structure has extremely low crosstalk and insertion loss, but the preparation process is complex. Single layer waveguide cross structures, consisting of waveguide crosses (cross) and waveguide tapers (Taper), tend to be wider in cross-structured waveguides than single mode waveguides to reduce insertion loss.
In a single-layer waveguide crossing structure, waveguide crossing optimized according to a Multimode Interference imaging principle (MMI) has the characteristics of low insertion loss and small size, but the process tolerance is small and certain wavelength correlation exists; in order to reduce the insertion loss of the waveguide cross, a waveguide cross region with a large width can be adopted, and in order to reduce the fundamental mode propagation insertion loss of a Taper segment (Taper) region, a waveguide Taper segment (Taper) with a long linear or exponential type is generally adopted, and the waveguide cross can achieve small insertion loss and large process tolerance, but has a large size.
Disclosure of Invention
The technical problem to be solved by the embodiments of the present invention is to provide a method for optimizing a waveguide and a cross waveguide interleaver, which can reduce the size of the waveguide and reduce the insertion loss.
The embodiment of the invention provides a method for optimizing a waveguide, which comprises the following steps:
decomposing the quasi-adiabatic waveguide taper section with gradually changed width into N sections of straight waveguides, and setting a shape model of each section of straight waveguide; wherein the shape model of the ith straight waveguide section is Li＝f(Wi)，1≤i≤N，LiIs the length of the i-th straight waveguide in the direction of waveguide propagation, WiIs the width of the section of the i-th section of the straight waveguide, which is perpendicular to the propagation direction of the waveguide;
determining a transmission matrix T of a quasi-adiabatic waveguide conical section with a target length according to the transmission matrix of each section of straight waveguide and a coupling transmission matrix between two adjacent sections of straight waveguides;
optimizing parameters of a shape model of the quasi-adiabatic waveguide taper section according to an insertion loss index of the quasi-adiabatic waveguide taper section;
and determining the shape of the quasi-adiabatic waveguide taper section according to the shape model and the optimized parameters.
The embodiment of the invention provides a cross waveguide cross device, which comprises:
the waveguide structure comprises a first waveguide and a second waveguide which are identical in structure, wherein the first waveguide and the second waveguide vertically intersect at the center;
the first waveguide comprises a first input quasi-adiabatic waveguide taper segment, a first cross-region waveguide segment and a first output quasi-adiabatic waveguide taper segment, the first input quasi-adiabatic waveguide taper segment comprises a narrow mouth and a wide mouth and is connected with a first end of the first cross-region waveguide segment through the wide mouth, the first output quasi-adiabatic waveguide taper segment comprises a narrow mouth and a wide mouth and is connected with a second end of the first cross-region waveguide segment through the wide mouth;
the second waveguide comprises a second input quasi-adiabatic waveguide taper segment, a second cross-region waveguide segment and a second output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a third end of the second cross-region waveguide segment through the wide port, the second output quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a fourth end of the second cross-region waveguide segment through the wide port;
the shapes of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are determined by the waveguide optimization method.
Compared with the related art, the method for optimizing the waveguide and the cross waveguide interleaver provided by the embodiment of the invention decompose the quasi-adiabatic waveguide taper section with gradually changing width into N sections of straight waveguides, set the shape model of each section of straight waveguide, determine the transmission matrix T of the quasi-adiabatic waveguide taper section with the target length according to the transmission matrix of each section of straight waveguide and the coupling transmission matrix between two adjacent sections of straight waveguides, optimize the parameters of the shape model of the quasi-adiabatic waveguide taper section according to the insertion loss index of the quasi-adiabatic waveguide taper section, and determine the shape of the quasi-adiabatic waveguide taper section according to the shape model and the optimized parameters. The size of the waveguide can be reduced by optimizing the shape of the quasi-adiabatic waveguide taper section, and insertion loss is reduced. The insertion loss of the quasi-adiabatic waveguide taper section with the optimized shape is obviously reduced after the quasi-adiabatic waveguide taper section has the same length and wide opening size; for the quasi-adiabatic waveguide taper section with a large wide opening size, the length of the quasi-adiabatic waveguide taper section with the optimized shape is obviously reduced.
Drawings
FIG. 1 is a flow chart of a method of optimizing a waveguide according to embodiment 1 of the present invention;
FIG. 2-a is a schematic diagram illustrating an exploded quasi-adiabatic waveguide taper segment according to an embodiment of the present invention;
FIG. 2-b is a schematic view of another exploded quasi-adiabatic waveguide taper segment in an embodiment of the present invention;
FIG. 3 is a schematic view of a cross waveguide interleaver of embodiment 2 of the present invention;
FIG. 4 is a graph of waveguide cross-region width versus insertion loss according to an embodiment of the present invention;
FIG. 5-a is a schematic view of a ridge waveguide in example 1 of the present invention;
FIG. 5-b is a graph showing a parametric (Parameters) relationship simulation of the width and length of an optimized quasi-adiabatic waveguide Taper segment (Taper) in example 1 of the present invention;
FIG. 5-c is a schematic diagram of a fundamental mode insertion loss simulation of an optimized quasi-adiabatic waveguide taper segment in example 1 of the present invention;
FIG. 5-d is a schematic diagram of a fundamental mode insertion loss simulation of a cross waveguide interleaver (WC 1) based on optimized quasi-adiabatic waveguide taper segments in example 1 of the present invention;
FIG. 6-a is a graph showing a parametric (Parameters) relationship simulation of the width and length of an optimized quasi-adiabatic waveguide Taper segment (Taper) in example 2 of the present invention;
FIG. 6-b is a schematic diagram of a fundamental mode insertion loss simulation of an optimized quasi-adiabatic waveguide taper segment in example 2 of the present invention;
FIG. 6-c is a schematic diagram of a fundamental mode insertion loss simulation of a cross waveguide interleaver (WC 1) based on optimized quasi-adiabatic waveguide taper segments in example 2 of the present invention;
FIG. 7-a is a graph showing a parametric (Parameters) relationship simulation of the width and length of an optimized quasi-adiabatic waveguide Taper segment (Taper) in example 3 of the present invention;
FIG. 7-b is a schematic diagram of a fundamental mode insertion loss simulation of an optimized quasi-adiabatic waveguide taper segment in example 3 of the present invention;
FIG. 7-c is a schematic diagram of a fundamental mode insertion loss simulation of a cross waveguide interleaver (WC 1) based on optimized quasi-adiabatic waveguide taper segments in example 3 of the present invention;
FIG. 8-a is a graph showing a parametric (Parameters) relationship simulation of the width and length of an optimized quasi-adiabatic waveguide Taper segment (Taper) in example 4 of the present invention;
FIG. 8-b is a schematic diagram of a fundamental mode insertion loss simulation of an optimized quasi-adiabatic waveguide taper segment in example 4 of the present invention;
fig. 8-c is a simulation of fundamental mode insertion loss for a cross waveguide interleaver (WC 1) based on optimized quasi-adiabatic waveguide taper segments in example 4 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
A quasi-adiabatic waveguide refers to a waveguide in which the structure changes slowly and no useless mode conversion occurs in the propagating mode. In the related art, the quasi-adiabatic waveguide often uses a long Taper section (Taper) to satisfy the quasi-adiabatic condition. The application realizes the quick adiabatic effect of the quasi-adiabatic waveguide, and changes the shape of the cone section by utilizing the mode conversion characteristic, so that useless mode conversion in mode propagation is reduced, and the quasi-adiabatic condition is met on the cone section with shorter length.
According to the method, the transmission matrix method is utilized, the shape optimization of the quasi-adiabatic waveguide taper section with multiple modes can be rapidly completed, the propagation of TE0 fundamental mode components is reserved to the maximum extent, and the insertion loss is reduced.
Example 1
As shown in fig. 1, an embodiment of the present invention provides a method for optimizing a waveguide, including:
step S110, decomposing the quasi-adiabatic waveguide taper section with gradually changed width into N sections of straight waveguides, and setting a shape model of each section of straight waveguide; wherein the shape model of the ith straight waveguide section is Li＝f(Wi)，1≤i≤N，LiIs the length of the i-th straight waveguide in the direction of waveguide propagation, WiIs the width of the section of the i-th section of the straight waveguide, which is perpendicular to the propagation direction of the waveguide;
step S120, determining a transmission matrix T of a quasi-adiabatic waveguide taper section with a target length according to the transmission matrix of each section of straight waveguide and a coupling transmission matrix between two adjacent sections of straight waveguides;
step S130, optimizing parameters of a shape model of the quasi-adiabatic waveguide taper section according to an insertion loss index of the quasi-adiabatic waveguide taper section;
and S140, determining the shape of the quasi-adiabatic waveguide taper section according to the shape model and the optimized parameters.
In one embodiment, the shape model comprises the following model 1 or model 2:
model 1:
Figure BDA0001930918100000051
model 2:
Figure BDA0001930918100000052
wherein A is1～A9Are parameters of model 1; a. the1～A15Are parameters of model 2;
there are two ways to break down the quasi-adiabatic waveguide taper segments, as shown in fig. 2-a and 2-b. In the exploded manner shown in fig. 2-a, the width of the 1 st segment of straight waveguide is equal to the width of the first port of the quasi-adiabatic tapered segment. In the exploded manner shown in fig. 2-b, the width of the last straight waveguide segment is equal to the width of the second port of the quasi-adiabatic tapered segment. Two ways of decomposing the quasi-adiabatic waveguide taper segment are possible.
In one embodiment, the determining the transmission matrix T of the quasi-adiabatic waveguide taper segment with the target length according to the transmission matrix of each segment of the straight waveguide and the coupling transmission matrix between two adjacent segments of the straight waveguide includes:
when the quasi-adiabatic waveguide taper section with the target length comprises continuous m sections of straight waveguides, determining a transmission matrix of the m sections of straight waveguides and a coupling transmission matrix between two adjacent sections of straight waveguides;
determining a transmission matrix T of a quasi-adiabatic waveguide taper segment of a target length by adopting the following modes:
Figure BDA0001930918100000061
wherein, PiIs a transmission matrix of the i-th straight waveguide, TiIs a coupling transmission matrix between the ith straight waveguide and the adjacent (i + 1) th straight waveguide.
Wherein, PiAnd TiAre all n x n dimensional matrices, n is the order of the modes existing in the waveguide, and the larger n, the more accurate the transmission matrix calculation is.
The spatial distribution of the electric field and the magnetic field of each order mode can be obtained by carrying out mode analysis calculation on the waveguides with different widths, and T is obtained by calculating the overlapping integral of the mode fields of the waveguides with adjacent widthsiThe square of each element value of the matrix is squared, and T is obtained according to a coupled mode theoryiThe values of the elements of the matrix.
PiIn the matrix, the off-diagonal elements are zero and the diagonal elements are respectively
Figure BDA0001930918100000062
kmIs the propagation constant, L, of the m-th order mode field in the waveguideiIs the length of the ith waveguide.
In one embodiment, the insertion loss indicator of the quasi-adiabatic waveguide taper segment comprises:
the fundamental mode insertion loss of the transmission matrix T of the integral quasi-adiabatic waveguide taper section is minimum; wherein the integral quasi-adiabatic waveguide taper segment includes all of the straight waveguides.
In one embodiment, the insertion loss indicator of the quasi-adiabatic waveguide taper segment comprises:
the fundamental mode insertion loss of the transmission matrix of all the partial conical sections of the quasi-adiabatic waveguide is smaller than an insertion loss threshold value, and the fundamental mode insertion loss of the transmission matrix of the integral quasi-adiabatic waveguide conical section is minimum;
wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
The embodiment of the invention adopts a transmission matrix method to calculate the conversion condition among all modes in the cone section (Taper). Practical studies have shown that this transformation is bidirectional, the magnitude of the higher-order mode components varying with the oscillation in the direction of propagation, and the amplitude of the oscillation being affected by the shape of the cone (Taper). Therefore, by optimizing the shape of the conical section, the fundamental mode component at the output end is maximized; meanwhile, in order to realize high tolerance, the shape of the conical section with small oscillation change amplitude of the mode component can be selected.
Example 2
As shown in fig. 3, an embodiment of the present invention provides a cross waveguide interleaver, including: the waveguide structure comprises a first waveguide 1 and a second waveguide 2 which are identical in structure, wherein the first waveguide 1 and the second waveguide 2 vertically intersect at the center;
the first waveguide 1 comprises a first input quasi-adiabatic waveguide taper section 11, a first cross-region waveguide section 12 and a first output quasi-adiabatic waveguide taper section 13, the first input quasi-adiabatic waveguide taper section comprises a narrow opening and a wide opening and is connected with a first end of the first cross-region waveguide section through the wide opening, the first output quasi-adiabatic waveguide taper section comprises a narrow opening and a wide opening and is connected with a second end of the first cross-region waveguide section through the wide opening;
the second waveguide 2 comprises a second input quasi-adiabatic waveguide taper segment 21, a second cross-region waveguide segment 22 and a second output quasi-adiabatic waveguide taper segment 23, the second input quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a third end of the second cross-region waveguide segment through the wide port, the second output quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a fourth end of the second cross-region waveguide segment through the wide port;
the shapes of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are determined by the waveguide optimization method;
the insertion loss of the cross waveguide interleaver comes from the Taper segment (Taper) and the waveguide cross region (Crossing), respectively. Fig. 4 shows the relationship between the width of the waveguide cross region (cross) and the fundamental mode insertion loss of the region, where the horizontal axis (x) is the width of the cross region in microns (um) and the vertical axis (TE0IL) is the fundamental mode insertion loss of the cross region in dB. The wider the waveguide cross region, the smaller the propagation loss of the fundamental mode, and the more gradual and gradual change, and when the variation is more than 4um, the insertion loss of the waveguide cross region is less than 0.1 dB. The use of a wider waveguide cross region can reduce the insertion loss of the waveguide cross, but a wider waveguide cross requires a longer waveguide taper section.
The fundamental mode insertion loss of the Taper section (Taper) mainly results from mode non-adiabatic propagation between the input and output single-mode waveguide and the wide waveguide in the waveguide cross region, so that the fundamental mode is converted into a high-order mode. The embodiment of the invention adopts the rapid adiabatic waveguide Taper section, thereby greatly reducing the mode conversion loss in the Taper section (Taper) and shortening the length of the Taper section.
In one embodiment, the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment, and the second output quasi-adiabatic waveguide taper segment have a width opening greater than or equal to 4 microns.
In one embodiment, the cross waveguide crossbar has rotational symmetry: and the cross waveguide cross device rotates by 90 degrees in a plane formed by the propagation direction of the first waveguide and the propagation direction of the second waveguide and then is coincided with the cross waveguide cross device before rotation.
In one embodiment, the optical field of the intersection region is unconstrained in a direction perpendicular to the propagation direction of the optical path within a plane formed by the propagation directions of the first waveguide and the second waveguide.
In one embodiment, the first and second waveguides are each: a ridge waveguide; or the first waveguide and the second waveguide are both: a strip-type waveguide.
The cross waveguide crossbar and the method of optimizing the waveguides of the present application are described below by way of example.
The cross waveguide crossers provided in examples 1 to 4 below include first and second waveguides having the same structure, and the first and second waveguides perpendicularly cross at the center. The first waveguide comprises a first input quasi-adiabatic waveguide taper segment, a first cross-region waveguide segment and a first output quasi-adiabatic waveguide taper segment, and the second waveguide comprises a second input quasi-adiabatic waveguide taper segment, a second cross-region waveguide segment and a second output quasi-adiabatic waveguide taper segment; the first input quasi-adiabatic waveguide taper segment tapers from a first width to a second width, the width of the first intersection region waveguide segment is the second width, and the first output quasi-adiabatic waveguide taper segment tapers from the second width to the first width; the second input quasi-adiabatic waveguide taper section is gradually changed from a first width to a second width, the width of the second intersection region waveguide section is the second width, and the second output quasi-adiabatic waveguide taper section is gradually changed from the second width to the first width. The cross waveguide cross meets the requirement of rotational symmetry: the cross waveguide cross device rotates 90 degrees in a plane formed by the propagation directions of the first waveguide and the second waveguide and then is overlapped with the first waveguide and the second waveguide before rotation.
Example 1
In this example, the width of the intersection region is 6 micrometers, the lengths of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are all 100 micrometers, the narrow opening width of each quasi-adiabatic waveguide taper segment is 0.5 micrometers, and the wide opening width is 6 micrometers.
As shown in fig. 5-a, the first waveguide and the second waveguide are both symmetrical, shallow etched silicon waveguides. 131 is a ridge waveguide area, 132 is a shallow etching waveguide area, two sides of the shallow etching area are symmetrical, the total width ratio of ridge waveguide width is 8um, two sides are respectively 4um, the height difference between the ridge waveguide height and the shallow etching area is etching depth, the etching depth is 70nm, the waveguide height is 220nm, the input and output waveguide width is 0.5 micron, the waveguide cross area width is 6 microns, and the upper and lower cladding layers are silicon oxide.
The shape model for each segment of the quasi-adiabatic waveguide taper segment in this example takes the function of model 1:
Figure BDA0001930918100000091
and optimizing the shape model parameters of the adiabatic waveguide taper segment by using the insertion loss index of the transmission matrix. Decomposing the quasi-adiabatic waveguide conical section into a combination of multiple sections of straight waveguides, wherein the width difference of two adjacent sections of straight waveguides is 0.05um, and determining the transmission matrix T of the whole quasi-adiabatic waveguide conical section according to the transmission matrix of each section of straight waveguide;
when minimum insertion loss of transmission matrix T of whole quasi-adiabatic waveguide taper segment is required and local taper segment of arbitrary quasi-adiabatic waveguideWhen the insertion loss is less than or equal to the first threshold value, the extremely low insertion loss of the fundamental mode and the large structural tolerance of the quasi-adiabatic waveguide taper segment can be ensured. Wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
By optimizing the parameters of the shape model, A can be obtained1～A9The values of (A) are shown in Table 1 below:
A1 A2 A3 A4 A5 A6 A7 A8 A9
-2.108 0.9334 10.18 52.79 2.640 3.529 0.9871 5.321 0.8861
TABLE 1
In fig. 5-b, after optimizing the shape of the quasi-adiabatic waveguide Taper (Taper), the parameter (Parameters) relationship between the Width and the length of the Taper (Taper) is shown in the figure, wherein the horizontal axis (x) is the length of the Taper (Taper) in micrometers (um) and the vertical axis (Width) is the Width of the Taper (Taper) in micrometers (um).
In fig. 5-c, after optimizing the shape of the quasi-adiabatic waveguide Taper (Taper), the simulation result of the fundamental mode Insertion Loss of the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) and is expressed in microns (um), and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the Taper (Taper). The insertion loss of the fundamental mode of the optimized quasi-adiabatic waveguide Taper segment (Taper) is less than 0.0045 dB.
In fig. 5-d, after optimizing the shape of the quasi-adiabatic waveguide Taper (tper), the simulation result of the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 1) based on the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) in microns (um) and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 1). The insertion loss of a fundamental mode of the cross waveguide cross (WC 1) based on the optimized quasi-adiabatic waveguide taper section is less than 0.067 dB.
Example 2
In this example, the width of the intersection region is 8 micrometers, the lengths of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are all 100 micrometers, the narrow opening width of each quasi-adiabatic waveguide taper segment is 0.5 micrometers, and the wide opening width is 8 micrometers.
The first waveguide and the second waveguide are symmetrical shallow etching silicon waveguides, the etching depth is 70nm, the waveguide height is 220nm, the input and output waveguide width is 0.5 micron, the waveguide cross region width is 6 microns, the total width of the shallow etching waveguide region is 8 microns wider than the ridge waveguide, and the upper and lower cladding layers are made of silicon oxide.
The shape model for each segment of the quasi-adiabatic waveguide taper segment in this example takes the function of model 2:
Figure BDA0001930918100000101
and optimizing the shape model parameters of the adiabatic waveguide taper segment by using the insertion loss index of the transmission matrix. Decomposing the quasi-adiabatic waveguide conical section into a combination of multiple sections of straight waveguides, wherein the width difference of two adjacent sections of straight waveguides is 0.05um, and determining the transmission matrix T of the whole quasi-adiabatic waveguide conical section according to the transmission matrix of each section of straight waveguide;
when the insertion loss of the transmission matrix T of the whole quasi-adiabatic waveguide taper segment is required to be minimum and the insertion loss of any quasi-adiabatic waveguide local taper segment is less than or equal to a first threshold value, the extremely low fundamental mode insertion loss and the large structural tolerance of the quasi-adiabatic waveguide taper segment can be ensured. Wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
By optimizing the parameters of the shape model, A can be obtained1～A15The values of (A) are shown in Table 2 below:
A1 A2 A3 A4 A5 A6
-4.887 0.0597 -0.01578 -0.1355 -1.778 0.1123
A7 A8 A9 A10 A11 A12
1.344E-04 -0.02869 5.735 1.539 3.241 0.2750
A13 A14 A15
0.2001 1.382 1.017
TABLE 2
In fig. 6-a, after optimizing the shape of the quasi-adiabatic waveguide Taper segment (Taper), the parameter (Parameters) relationship between the Width and the length of the Taper segment (Taper) is shown in the figure, wherein the horizontal axis (x) is the length of the Taper segment (Taper) in micrometers (um) and the vertical axis (Width) is the Width of the Taper segment (Taper) in micrometers (um).
In fig. 6-b, after optimizing the shape of the quasi-adiabatic waveguide Taper (Taper), the simulation result of the fundamental mode Insertion Loss of the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) and is expressed in microns (um), and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the Taper (Taper). The insertion loss of the fundamental mode of the optimized quasi-adiabatic waveguide Taper segment (Taper) is less than 0.007 dB.
In fig. 6-c, after optimizing the shape of the quasi-adiabatic waveguide Taper (tper), the simulation result of the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 2) based on the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) in microns (um) and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 2). The fundamental mode insertion loss of the cross waveguide interleaver (WC 2) based on the optimized quasi-adiabatic waveguide taper segment is less than 0.047 dB.
Example 3
In this example, the width of the intersection region is 6 micrometers, the lengths of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are all 150 micrometers, the narrow opening width of each quasi-adiabatic waveguide taper segment is 0.5 micrometers, and the wide opening width is 6 micrometers.
The first waveguide and the second waveguide are symmetrical shallow etching silicon waveguides, the etching depth is 70nm, the waveguide height is 220nm, the input and output waveguide width is 0.5 micron, the waveguide cross region width is 6 microns, the total width of the shallow etching waveguide region is 8 microns wider than the ridge waveguide, and the upper and lower cladding layers are made of silicon oxide.
The shape model for each segment of the quasi-adiabatic waveguide taper segment in this example takes the function of model 2:
Figure BDA0001930918100000121
and optimizing the shape model parameters of the adiabatic waveguide taper segment by using the insertion loss index of the transmission matrix. Decomposing the quasi-adiabatic waveguide conical section into a combination of multiple sections of straight waveguides, wherein the width difference of two adjacent sections of straight waveguides is 0.05um, and determining the transmission matrix T of the whole quasi-adiabatic waveguide conical section according to the transmission matrix of each section of straight waveguide;
when the insertion loss of the transmission matrix T of the whole quasi-adiabatic waveguide taper segment is required to be minimum and the insertion loss of any quasi-adiabatic waveguide local taper segment is less than or equal to a first threshold value, the extremely low fundamental mode insertion loss and the large structural tolerance of the quasi-adiabatic waveguide taper segment can be ensured. Wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
By optimizing the parameters of the shape model, A can be obtained1～A15The values of (A) are shown in Table 3 below:
A1 A2 A3 A4 A5 A6
-366.4 -0.08935 -0.02216 0.09714 0.9747 -0.03334
A7 A8 A9 A10 A11 A12
0.2563 7.957E-05 -1.594 1.380 3.617 -0.3801
A13 A14 A15
0.3329 -0.1849 -31.75
TABLE 3
In fig. 7-a, after optimizing the shape of the quasi-adiabatic waveguide Taper segment (Taper), the parameter (Parameters) relationship between the Width and the length of the Taper segment (Taper) is shown in the figure, wherein the horizontal axis (x) is the length of the Taper segment (Taper) in micrometers (um) and the vertical axis (Width) is the Width of the Taper segment (Taper) in micrometers (um).
In fig. 7-b, after optimizing the shape of the quasi-adiabatic waveguide Taper (Taper), the simulation result of the fundamental mode Insertion Loss of the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) and is expressed in microns (um), and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the Taper (Taper). The insertion loss of the fundamental mode of the optimized quasi-adiabatic waveguide Taper segment (Taper) is less than 0.002 dB.
In fig. 7-c, after optimizing the shape of the quasi-adiabatic waveguide Taper (tper), the simulation result of the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC3) based on the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) in microns (um) and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 3). The fundamental mode insertion loss of the cross waveguide interleaver (WC3) based on the optimized quasi-adiabatic waveguide taper segment is <0.06 dB.
Example 4
In this example, the width of the intersection region is 8 micrometers, the lengths of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are all 150 micrometers, the narrow opening width of each quasi-adiabatic waveguide taper segment is 0.5 micrometers, and the wide opening width is 8 micrometers.
The first waveguide and the second waveguide are symmetrical shallow etching silicon waveguides, the etching depth is 70nm, the waveguide height is 220nm, the input and output waveguide width is 0.5 micron, the waveguide cross region width is 8 micron, the width difference of two adjacent straight waveguides is 0.05 micron, and the upper and lower cladding layers are made of silicon oxide.
The shape model for each segment of the quasi-adiabatic waveguide taper segment in this example takes the function of model 2:
Figure BDA0001930918100000131
and optimizing the shape model parameters of the adiabatic waveguide taper segment by using the insertion loss index of the transmission matrix. Decomposing the quasi-adiabatic waveguide conical section into a combination of multiple sections of straight waveguides, wherein the width difference of two adjacent sections of straight waveguides is 0.05um, and determining the transmission matrix T of the whole quasi-adiabatic waveguide conical section according to the transmission matrix of each section of straight waveguide;
when the insertion loss of the transmission matrix T of the whole quasi-adiabatic waveguide taper segment is required to be minimum and the insertion loss of any quasi-adiabatic waveguide local taper segment is less than or equal to a first threshold value, the extremely low fundamental mode insertion loss and the large structural tolerance of the quasi-adiabatic waveguide taper segment can be ensured. Wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
By optimizing the parameters of the shape model, A can be obtained1～A15The values of (A) are shown in Table 4 below:
A1 A2 A3 A4 A5 A6
-1224.6 -0.082440 -0.43349E 0.24088 0.68336 0.12010
A7 A8 A9 A10 A11 A12
-0.31558 0.17353 -3.1440 -1.6827 -1.2815 0.16654
A13 A14 A15
-1.6067 2.3663 43.517
TABLE 4
In fig. 8-a, after optimizing the shape of the quasi-adiabatic waveguide Taper segment (Taper), the parameter (Parameters) relationship between the Width and the length of the Taper segment (Taper) is shown in the figure, wherein the horizontal axis (x) is the length of the Taper segment (Taper) in micrometers (um) and the vertical axis (Width) is the Width of the Taper segment (Taper) in micrometers (um).
In fig. 8-b, after optimizing the shape of the quasi-adiabatic waveguide Taper (Taper), the simulation result of the fundamental mode Insertion Loss of the optimized quasi-adiabatic waveguide Taper is shown in the figure, wherein the horizontal axis is the Wavelength (Wavelength) and is expressed in microns (um), and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the Taper (Taper). The insertion loss of the fundamental mode of the optimized quasi-adiabatic waveguide Taper segment (Taper) is less than 0.0018 dB.
In fig. 8-c, the results of the fundamental mode Insertion Loss simulation of the cross-waveguide interleaver (WC4) based on the optimized quasi-adiabatic waveguide Taper segment (tper) after optimizing the shape thereof are shown in the figure, wherein the horizontal axis is the Wavelength (wavelengh) in microns (um) and the vertical axis (Insertion Loss) is the fundamental mode Insertion Loss of the cross-waveguide interleaver (WC 4). The fundamental mode insertion loss of the cross waveguide interleaver (WC4) based on the optimized quasi-adiabatic waveguide taper segment is <0.047 dB.
It will be understood by those of ordinary skill in the art that all or some of the steps of the methods, systems, functional modules/units in the devices disclosed above may be implemented as software, firmware, hardware, and suitable combinations thereof. In a hardware implementation, the division between functional modules/units mentioned in the above description does not necessarily correspond to the division of physical components; for example, one physical component may have multiple functions, or one function or step may be performed by several physical components in cooperation. Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on computer readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media). The term computer storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data, as is well known to those of ordinary skill in the art. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, Digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can accessed by a computer. In addition, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media as known to those skilled in the art.
It should be noted that the present invention can be embodied in other specific forms, and various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims (10)

1. A method of optimizing a waveguide, comprising:
decomposing the quasi-adiabatic waveguide taper section with gradually changed width into N sections of straight waveguides, and setting a shape model of each section of straight waveguide; wherein the shape model of the ith straight waveguide section is Li＝f(Wi)，1≤i≤N，LiIs the length of the i-th straight waveguide in the direction of waveguide propagation, WiIs the width of the section of the i-th section of the straight waveguide, which is perpendicular to the propagation direction of the waveguide;
determining a transmission matrix T of a quasi-adiabatic waveguide conical section with a target length according to the transmission matrix of each section of straight waveguide and a coupling transmission matrix between two adjacent sections of straight waveguides;
optimizing parameters of a shape model of the quasi-adiabatic waveguide taper section according to an insertion loss index of the quasi-adiabatic waveguide taper section;
and determining the shape of the quasi-adiabatic waveguide taper section according to the shape model and the optimized parameters.
2. The method of claim 1, wherein:
the shape model includes the following model 1 or model 2:
model 1:
Figure FDA0001930918090000011
model 2:
Figure FDA0001930918090000012
wherein A is1～A9Are parameters of model 1; a. the1～A15Are parameters of model 2.
3. The method of claim 1, wherein:
the method for determining the transmission matrix T of the quasi-adiabatic waveguide conical section with the target length according to the transmission matrix of each section of straight waveguide and the coupling transmission matrix between two adjacent sections of straight waveguides comprises the following steps:
when the quasi-adiabatic waveguide taper section with the target length comprises continuous m sections of straight waveguides, determining a transmission matrix of the m sections of straight waveguides and a coupling transmission matrix between two adjacent sections of straight waveguides;
determining a transmission matrix T of a quasi-adiabatic waveguide taper segment of a target length by adopting the following modes:
Figure FDA0001930918090000021
wherein, PiIs a transmission matrix of the i-th straight waveguide, TiThe transmission matrix is a coupling transmission matrix between the ith straight waveguide and the adjacent (i + 1) th straight waveguide, and pi is a continuous multiplication symbol.
4. The method of claim 3, wherein:
the insertion loss indexes of the quasi-adiabatic waveguide taper section comprise:
the fundamental mode insertion loss of the transmission matrix T of the integral quasi-adiabatic waveguide taper section is minimum; wherein the integral quasi-adiabatic waveguide taper segment includes all of the straight waveguides.
5. The method of claim 3, wherein:
the insertion loss indexes of the quasi-adiabatic waveguide taper section comprise:
the fundamental mode insertion loss of the transmission matrix of all the partial conical sections of the quasi-adiabatic waveguide is smaller than an insertion loss threshold value, and the fundamental mode insertion loss of the transmission matrix of the integral quasi-adiabatic waveguide conical section is minimum;
wherein, the j-th quasi-adiabatic waveguide local taper section is as follows: starting from the 1 st segment of the straight waveguide to the mjA continuous j-segment straight waveguide where the segment straight waveguide ends.
6. A cross waveguide interleaver comprising:
the waveguide structure comprises a first waveguide and a second waveguide which are identical in structure, wherein the first waveguide and the second waveguide vertically intersect at the center;
the first waveguide comprises a first input quasi-adiabatic waveguide taper segment, a first cross-region waveguide segment and a first output quasi-adiabatic waveguide taper segment, the first input quasi-adiabatic waveguide taper segment comprises a narrow mouth and a wide mouth and is connected with a first end of the first cross-region waveguide segment through the wide mouth, the first output quasi-adiabatic waveguide taper segment comprises a narrow mouth and a wide mouth and is connected with a second end of the first cross-region waveguide segment through the wide mouth;
the second waveguide comprises a second input quasi-adiabatic waveguide taper segment, a second cross-region waveguide segment and a second output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a third end of the second cross-region waveguide segment through the wide port, the second output quasi-adiabatic waveguide taper segment comprises a narrow port and a wide port and is connected with a fourth end of the second cross-region waveguide segment through the wide port;
the shapes of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are determined by the method of optimizing a waveguide of any one of claims 1-5 above.
7. The cross waveguide interleaver of claim 6, wherein:
the wide openings of the first input quasi-adiabatic waveguide taper segment, the first output quasi-adiabatic waveguide taper segment, the second input quasi-adiabatic waveguide taper segment and the second output quasi-adiabatic waveguide taper segment are larger than or equal to 4 micrometers.
8. The cross waveguide interleaver of claim 6, wherein:
the cross waveguide interleaver has rotational symmetry: and the cross waveguide cross device rotates by 90 degrees in a plane formed by the propagation direction of the first waveguide and the propagation direction of the second waveguide and then is coincided with the cross waveguide cross device before rotation.
9. The cross waveguide interleaver of claim 6, wherein:
in a plane formed by the propagation directions of the first waveguide and the second waveguide, the optical field of the intersection region is not constrained in the direction perpendicular to the propagation direction of the optical path.
10. The cross waveguide interleaver of claim 6, wherein:
the first waveguide and the second waveguide are both: a ridge waveguide; or
The first waveguide and the second waveguide are both: a strip-type waveguide.
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