CN111360415B - Method for preparing diamond vortex optical beam generator by using chemical treatment to assist laser processing and application of diamond vortex optical beam generator - Google Patents
Method for preparing diamond vortex optical beam generator by using chemical treatment to assist laser processing and application of diamond vortex optical beam generator Download PDFInfo
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
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Abstract
The invention discloses a method for preparing a diamond vortex optical beam generator by utilizing chemical treatment to assist laser processing and application thereof, belonging to the technical field of femtosecond laser processing. The main principle is that the graphitized substance generated in the action process of the hot mixed acid solution and the laser focus and the diamond surface is subjected to chemical reaction so as to be thoroughly removed, the adverse effect on the obtained structure morphology is avoided, and the vortex optical beam generator element with low roughness and excellent optical performance is obtained.
Description
Technical Field
The invention belongs to the technical field of femtosecond laser processing, and particularly relates to a diamond vortex optical beam generator structure which is used for obtaining high surface quality and excellent optical performance by chemically processing a diamond sample after laser processing and application thereof.
Background
Diamond materials have high hardness, high thermal and low thermal expansion coefficients, chemical inertness and biocompatibility, and are commonly used as ornaments, in the manufacture of cutting tools, drug carriers, and the like. Diamond materials are also widely used in the field of quantum informatics today because some point defect light sources inside diamond exhibit superior single photon characteristics. With the continuous expansion of the application field, the high-precision forming processing of the diamond material receives more and more attention. At present, laser cutting is used as a traditional method for processing diamond, and high-power laser is mainly focused on the surface of a material, the material is melted and ablated at local high temperature, and the cutting of the material is realized by matching with the relative motion of a workpiece. In addition to machining diamond materials by laser cutting, dry etching techniques, which utilize plasma to physically bombard or chemically react with the surface of the material, are also used to shape diamond materials. It can be seen that the prior art for processing and forming diamond has the defects of poor precision, high cost, complex preparation process and the like.
Disclosure of Invention
Aiming at the defects of the prior art, the technical problems to be solved by the invention are as follows: provides a method for realizing a vortex optical beam generator with high quality and excellent performance on the surface of diamond by using chemical treatment to assist femtosecond laser processing and application thereof. The designed spiral zone plate structure is directly written on the surface of the diamond sample through ultraviolet femtosecond laser, then the sample is subjected to ultrasonic cleaning and chemical treatment, and finally the vortex optical beam generator on the surface of the diamond is prepared. The main principle is that the graphitized substance generated in the action process of the hot mixed acid solution and the laser focus and the diamond surface is subjected to chemical reaction so as to be thoroughly removed, the adverse effect on the obtained structure morphology is avoided, and the vortex optical beam generator element with low roughness and excellent optical performance is obtained.
The invention is realized by the following technical scheme:
a method for preparing a diamond vortex optical beam generator by using chemical treatment to assist laser processing comprises the following specific steps:
(1) preparing a diamond sample;
the method comprises the following specific steps: firstly, sequentially putting high-temperature and high-pressure diamond particles to be subjected to laser processing into a centrifugal tube filled with acetone, ethanol and deionized water for ultrasonic cleaning for 15min respectively; then taking out the dried product by using tweezers and airing; finally, marking the upper surface of the sample and the area to be processed by using an oil pen, so that the subsequent observation of the experimental result is facilitated;
(2) femtosecond laser direct writing;
the method comprises the following specific steps: during processing, firstly fixing the diamond sample prepared in the step (1) on a piezoelectric platform below a processing objective lens; then finding the position of a laser focus on the surface of the sample by using a CCD camera, aligning the center of the range to be processed of the sample with the laser focus, and scanning the femtosecond laser point by point under the control of a computer according to a pre-designed processing program; finally, after the scanning is finished, taking down the sample, sequentially ultrasonically cleaning the sample by using acetone, ethanol and deionized water, and airing the sample;
(3) chemically treating the diamond sample after laser processing;
the method comprises the following specific steps: firstly, dripping concentrated sulfuric acid into concentrated nitric acid at room temperature and shaking to uniformly mix the concentrated sulfuric acid and the concentrated nitric acid to prepare a mixed acid solution; adding the mixed acid solution into a centrifugal tube, putting the diamond sample subjected to ultrasonic cleaning in the step (2) into the centrifugal tube, covering the centrifugal tube, and putting the centrifugal tube into a hydrothermal reaction oven for constant-temperature heating; and finally, taking out the diamond sample after reaction, washing with deionized water for three times, and then airing.
Further, the diameter of the high-temperature high-pressure diamond in the step (1) is 1mm, the thickness of the diamond is 800 μm, the upper surface and the lower surface of the diamond are polished, and the processing range marked by an oil pen is 50-120 μm.
Further, the laser path in step (2) is: firstly, the femtosecond laser passes through a half-wave plate and a Glan prism and then the laser power is adjusted; then changing the propagation direction through a reflector and a lens group and shaping light beams; then the laser sequentially passes through a field lens, a 4f system, a medium lens and an objective lens and then is focused to a sample to-be-processed area, wherein the field lens regulates and controls the movement of the laser on an X-Y plane, the objective lens focuses the laser, the sample is fixed on a piezoelectric platform, and the movement in the Z direction is realized under the drive of the piezoelectric platform; and finally, illuminating by using an optical fiber lamp under the sample, wherein the illuminating light enters the CCD camera through the medium mirror and the reflector after penetrating through the processing objective, and the CCD camera displays a real-time processing image on the control computer to realize the real-time monitoring of the whole processing process.
Furthermore, the femtosecond laser wavelength is 343nm, the femtosecond laser is ultraviolet femtosecond laser, the pulse frequency is 200kHz, the pulse width is 120fs, 20-100 times of objective lens is used for focusing in experiments, and the numerical aperture of the objective lens is 0.5-0.75; the laser power adopted by the experiment is 8-10mW, the scanning distance of the point line surface is 50-200nm, the single-point exposure time is 100-; and after the processing is finished, carrying out ultrasonic cleaning for 10-30min, and then airing the sample for 5-15 min.
Further, the volume ratio of the prepared concentrated sulfuric acid to the concentrated nitric acid mixed acid solution in the step (3) is 7: 1-9: 1, wherein the mass fraction of concentrated sulfuric acid is 70-98%, the mass fraction of concentrated nitric acid is 60-68%, the usage amount of mixed acid solution is 5-10ml, the heating temperature set by a hydrothermal reaction oven is 70-100 ℃, the heating time is 5-8h, the deionized water used for cleaning the diamond sample each time after chemical reaction is 10-30ml, the cleaning time is 5-15min, and the sample airing time is 5-15 min.
The invention also provides application of the diamond vortex optical beam generator prepared by chemical treatment assisted laser processing in the aspects of vortex beam generation, optical imaging and optical focusing, namely the diamond vortex optical beam generator prepared by chemical treatment assisted laser processing has high surface quality and better optical performance and can be used for vortex beam generation, optical imaging and optical focusing.
Compared with the prior art, the invention has the following advantages:
(1) the diamond vortex optical beam generator prepared by chemical treatment assisted laser processing has designability in device size, topological charge number, focal length and the like, the preparation process is simple and convenient, and the prepared vortex optical beam generator has better optical characteristics;
(2) the diamond vortex optical beam generator prepared by chemical treatment assisted laser processing can be used for generating vortex optical beams, and the generated vortex optical beams can be used for data encoding in the field of quantum information and manipulation, capture, imaging and the like of micro-nano particles in the field of biomedicine; the diamond vortex optical beam generator can be integrated with defects such as a color center and the like in the diamond after further design optimization to form a single photon source with orbital angular momentum, and is applied to the field of quantum information;
(3) the chemical treatment assisted laser processing for preparing the diamond vortex optical beam generator has the advantages of short time consumption of the preparation process, no mask and low cost, and the preparation method can be popularized to the laser processing process of other diamond surface optical elements and is suitable for industrial application.
Drawings
FIG. 1 is a schematic diagram of a laser processing optical path of a diamond vortex optical beam generator using chemical treatment to assist laser processing according to the present invention;
FIG. 2 is an atomic force microscope before and after chemical treatment for preparing a diamond vortex optical beam generator by chemical treatment assisted laser processing according to the present invention, wherein: a is before chemical treatment, b is after chemical treatment;
FIG. 3 is a cross-sectional profile of a laser processing region of a diamond vortex optical beam generator of the present invention prepared by chemical processing assisted laser processing before and after chemical processing, wherein: a is before chemical treatment, b is after chemical treatment;
FIG. 4 is a scanning electron microscope image of a diamond vortex optical beam generator using chemical treatment to assist laser processing according to the present invention, wherein: a is a spiral zone plate structure with topological charge equal to 1, b is a spiral zone plate structure with topological charge equal to 2, and c is a spiral zone plate structure with topological charge equal to 3;
FIG. 5 is a schematic diagram of a vortex beam phase information testing optical path of a diamond vortex beam generator using chemical treatment to assist laser processing according to the present invention;
fig. 6 shows the simulation and actual measurement results of the vortex beam phase information of a diamond vortex beam generator prepared by chemical processing assisted laser processing according to the present invention, wherein: a, b and c are respectively simulation results of vortex light beam phase information with topological charge equal to 1,2 and 3, and d, e and f are respectively actual measurement results of vortex light beam phase information with topological charge equal to 1,2 and 3;
FIG. 7 is a schematic diagram of an optical imaging test optical path of a diamond vortex optical beam generator using chemical treatment to assist laser processing according to the present invention;
FIG. 8 shows the results of optical imaging tests on a diamond vortex optical beam generator using chemical processing to assist laser processing according to the present invention, wherein: a is a spiral zone plate structure with topological charge equal to 1, b is a spiral zone plate structure with topological charge equal to 2, and c is a spiral zone plate structure with topological charge equal to 3;
FIG. 9 is a schematic diagram of an optical focusing test optical path of a diamond vortex optical beam generator using chemical treatment to assist laser processing according to the present invention;
FIG. 10 shows simulation and actual measurement results of optical focusing of a diamond vortex optical beam generator using chemical treatment to assist laser processing according to the present invention, wherein: a, b and c are simulation results of the optical focusing of the spiral zone plate structure with the topological charge equal to 1,2 and 3 respectively, and d, e and f are actual measurement results of the optical focusing of the spiral zone plate structure with the topological charge equal to 1,2 and 3 respectively.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
Example 1
And (3) preparing a diamond vortex optical beam generator by chemical treatment assisted laser processing.
After the designed spiral zone plate structure is directly written on the surface of the diamond by utilizing ultraviolet femtosecond laser, a diamond sample is put into a prepared mixed acid solution of concentrated sulfuric acid and concentrated nitric acid, the mixed acid solution is heated in a hydrothermal reaction oven, and the diamond sample is taken out and cleaned after the chemical treatment process is finished, so that the vortex optical beam generator on the surface of the diamond is finally obtained.
The method for preparing the diamond vortex optical beam generator by chemical treatment assisted laser processing comprises the following specific steps:
(1) preparation of diamond samples: purchasing the obtained high-temperature and high-pressure diamond sample with the diameter of about 1mm, the upper surface and the lower surface being polished, and the thickness being 800 mu m; firstly, sequentially putting diamond particles to be processed by laser into a centrifugal tube filled with acetone, ethanol and deionized water for ultrasonic cleaning for 15min respectively; then taking out the dried mixture by using tweezers and naturally drying the mixture; and finally, marking the upper surface of the sample and a processing area of 80 mu m by using an oil pen, so as to facilitate the subsequent observation of the experimental result.
(2) Femtosecond laser direct writing: firstly, fixing a diamond sample to be processed on a piezoelectric platform below a processing objective lens; after the ultraviolet femtosecond laser is emitted from a laser, the laser energy is adjusted by a half-wave plate matched with a Glan prism, the laser energy reaches a field lens after passing through a reflector and a lens group, the laser is adjusted to move in an X-Y plane through the field lens, then the laser is focused on the surface of a sample through a processing objective lens through a 4f system, the laser wavelength is 343nm, the repetition frequency is 200kHz, the pulse width is 120fs, the amplification factor of the processing objective lens is 20 times, the numerical aperture is 0.75, and the laser power is 9.5 mW; then observing and finding the position of a laser focus on the surface of a sample through a CCD camera, aligning the center of a range to be processed of the sample with the laser focus, scanning the sample point by the laser under the control of a computer according to a pre-designed spiral wave zone plate processing program with different topological loads, realizing the movement of the sample in the Z direction by controlling the movement of a piezoelectric platform through the computer, wherein the scanning interval of a point line surface is 100nm, the single-point exposure time is 100 mu s, and the whole scanning process takes about 2 min; and finally, taking down the sample after the processing is finished, ultrasonically cleaning the sample for 15min by using acetone, ethanol and deionized water in sequence, and airing the sample for 5min at room temperature.
(3) Chemically treating the laser-machined diamond sample: firstly, dropping concentrated sulfuric acid into concentrated nitric acid at room temperature while shaking the concentrated sulfuric acid and the concentrated nitric acid to fully mix the concentrated sulfuric acid and the concentrated nitric acid to prepare a mixed acid solution, wherein the volume ratio of the concentrated sulfuric acid to the concentrated nitric acid is 7: 1, the mass fraction of concentrated sulfuric acid is 98 percent, and the mass fraction of concentrated nitric acid is 68 percent; then adding 10ml of mixed acid solution into a centrifuge tube, putting the diamond sample with the surface provided with the laser processing structure after ultrasonic cleaning into the centrifuge tube, covering the centrifuge tube, putting the centrifuge tube into a hydrothermal reaction oven for constant temperature heating, wherein the temperature of the oven is set to 80 ℃, and the heating time is 8 hours; and finally, taking out the diamond sample after the chemical reaction from the acid solution, washing with deionized water for three times, 10ml each time, washing for 10min, and naturally airing the sample for 5 min.
As can be seen from FIG. 1, after the ultraviolet femtosecond laser is emitted, the power is adjusted by the combination of the half-wave plate and the Glan prism; then the field lens controls the laser to move in the horizontal direction; laser is focused on the surface of a sample to be processed by an objective lens, and the sample is fixed on a piezoelectric platform to realize vertical movement; the optical fiber lamp is used for illuminating and observing the transparent sample to be processed, the obtained image is collected by the CCD camera, and the real-time observation of the processing process can be realized in a control computer.
As can be seen from fig. 2 and 3, in the chemical auxiliary treatment process, graphitized substances attached to the surface of the structure in the laser processing process are completely removed, the surface roughness of the diamond sample processing region after chemical treatment is obviously reduced compared with that of the non-processing region before chemical treatment, and the cross-sectional undulation of the laser processing region after chemical treatment is obviously improved, which proves that the chemical treatment method after laser processing is very beneficial to improving the surface quality of the diamond surface device.
As can be seen from FIG. 4, the diamond vortex optical beam generator with different topological charges prepared by chemical treatment assisted laser processing has a better appearance, and the optical performance of the diamond vortex optical beam generator is guaranteed by regular edges and better surface quality.
Example 2
The diamond-based vortex optical beam generator is applied to vortex optical beam generation and optical imaging focusing.
The diamond vortex optical beam generator prepared by chemical treatment assisted laser processing has the characteristics of designability in device size, topological charge number, focal length and the like, is simple and convenient in preparation process, short in time consumption, free of mask and the like, and can be applied to vortex optical beam generation and optical imaging focusing. The designed spiral zone plate structure serving as the eddy optical beam generator can be regarded as formed by superposing and combining a common amplitude type Fresnel zone plate and a spiral phase plate, so that the amplitude and the phase of a Gaussian beam passing through the spiral zone plate structure are changed, the changed phase is in direct proportion to an azimuth angle and carries orbital angular momentum, the Gaussian beam becomes a vortex beam, and the spiral zone plate structure also keeps the imaging focusing function of the Fresnel zone plate similar to a convex lens. Therefore, the invention can be applied to generating vortex beams and focusing optical images by using the diamond material.
The method is characterized in that a diamond vortex optical beam generator is prepared by utilizing chemical treatment to assist laser processing and generates a vortex optical beam, so that the optical imaging focusing function is realized, and the method comprises the following specific steps:
the procedures (1), (2) and (3) are the same as those in example 1.
(4) Generation of vortex beam: the diamond particles with different topological charges on the upper surface of the spiral zone plate structure are obtained through the steps (1), (2) and (3), the upper surface of the sample is upwards and is flatly fixed on a glass slide by using universal glue, and then the sample is integrally placed in a self-built test light path for detecting vortex light beams. The upper surface of a diamond sample is found in a CCD image, then the spiral zone plate structure is adjusted to the center of the visual field of the CCD image, and the position of the diamond sample along the optical axis direction is continuously adjusted, so that the CCD camera displays an interference pattern obtained by the interference of laser used for testing and another path of vortex light beam to be tested on a computer screen. And storing and exporting images displayed by the CCD camera, and comparing and observing the images with a result simulated in advance. And respectively adjusting the spiral zone plate structures with different topological loads to the visual field center of the CCD image, and repeating the steps to obtain the test results of the spiral zone plates with different topological loads.
(5) And (3) realizing optical imaging: and (4) obtaining the diamond particles which are fixed on the glass slide and have the spiral zone plate structures with different topological charges on the upper surface, and integrally placing the diamond particles in the self-built optical element imaging effect test light path. Fixing an object to be imaged in front of a test laser light source, adjusting the spiral zone plate structure to the center of the visual field of a CCD image after finding the upper surface of a diamond sample in the CCD image, then adjusting the position of the diamond sample along the optical axis direction of laser used for testing, observing the imaging result of the spiral zone plate structure of the object to be imaged displayed on a computer screen by a CCD camera, adjusting the displayed image to be clearest, storing and exporting. And repeating the steps to obtain the imaging test result of the spiral zone plate with different topological charges.
(6) Realizing optical focusing: and (4) obtaining the diamond particles which are fixed on the glass slide and have the spiral zone plate structures with different topological charges on the upper surface, and integrally placing the diamond particles in a self-built optical element focusing effect test light path. The upper surface of a diamond sample is found in a CCD image, then the spiral zone plate structure is adjusted to the center of the visual field of the CCD image, the position of the diamond sample along the optical axis direction of laser used for testing is continuously adjusted, so that the CCD camera displays the focusing condition of the spiral zone plate structure on the laser on a computer screen, and the displayed image is adjusted to be the smallest and clearest in light spot and then is stored and exported. And repeating the steps to obtain the focusing test result of the spiral zone plate with different topological charges.
As can be seen from fig. 5 and 6, the helium neon laser beam having a wavelength of 633nm is divided into two beams, one beam is made into spherical waves by a lens, the other beam passes through the prepared spiral zone plate structure, the two beams interfere with each other when passing through the beam combiner, and the pattern obtained by the interference is recorded and derived by the CCD camera. Because the interference pattern of the vortex light beam after the interference of the vortex light beam and the spherical wave carries the phase information of the vortex light beam, the fact that the laser is the vortex light beam after passing through the spiral zone plate structure can be verified. The spiral zone plate structures with topological charges of 1,2 and 3 respectively are tested, the obtained interference patterns are well matched with simulation results, and the diamond spiral zone plate structure prepared by the method can be used as a vortex optical beam generator.
As can be seen from fig. 7 and 8, helium neon laser with a wavelength of 633nm is used to image an object to be imaged, "JLU", through a prepared spiral zone plate structure, and an imaging effect is collected by an objective lens and enters a CCD camera for recording and can be stored and exported. The spiral zone plates with topological charges of 1,2 and 3 are imaged clearly on JLU, and the structure can realize better optical imaging function.
As can be seen from FIGS. 9 and 10, the He-Ne laser with wavelength of 633nm becomes a parallel extended light source after being expanded by the lens assembly and the ground glass; and then the laser irradiates on the spiral zone plate structure through the first objective lens in the direction of the optical axis, and the focused light spot is collected through the second objective lens to enter the CCD camera and be presented on a computer. The actually measured focusing effect of the spiral zone plate with the topological charges of 1,2 and 3 is basically consistent with the simulation result, and the size of the focusing light spot is increased along with the increase of the topological charges, so that the spiral zone plate structure can realize a better optical focusing function, and the practicability and the effectiveness of the diamond surface optical element prepared by the method are proved.
The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications can be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (6)
1. A method for preparing a diamond vortex optical beam generator by using chemical treatment to assist laser processing comprises the following specific steps:
(1) preparing a diamond sample;
the method comprises the following specific steps: firstly, sequentially putting high-temperature and high-pressure diamond particles to be subjected to laser processing into a centrifugal tube filled with acetone, ethanol and deionized water for ultrasonic cleaning for 15min respectively; then taking out the dried product by using tweezers and airing; finally, marking the upper surface of the sample and the area to be processed by using an oil pen, so that the subsequent observation of the experimental result is facilitated;
(2) femtosecond laser direct writing;
the method comprises the following specific steps: during processing, firstly fixing the diamond sample prepared in the step (1) on a piezoelectric platform below a processing objective lens; then finding the position of a laser focus on the surface of the sample by using a CCD camera, aligning the center of the range to be processed of the sample with the laser focus, and scanning the femtosecond laser point by point under the control of a computer according to a pre-designed processing program; finally, after the scanning is finished, taking down the sample, sequentially ultrasonically cleaning the sample by using acetone, ethanol and deionized water, and airing the sample;
(3) chemically treating the diamond sample after laser processing;
the method comprises the following specific steps: firstly, dripping concentrated sulfuric acid into concentrated nitric acid at room temperature and shaking to uniformly mix the concentrated sulfuric acid and the concentrated nitric acid to prepare a mixed acid solution; adding the mixed acid solution into a centrifugal tube, putting the diamond sample subjected to ultrasonic cleaning in the step (2) into the centrifugal tube, covering the centrifugal tube, and putting the centrifugal tube into a hydrothermal reaction oven for constant-temperature heating; and finally, taking out the diamond sample after reaction, washing with deionized water for three times, and then airing.
2. The method for preparing a diamond vortex beam generator using chemical treatment-assisted laser machining according to claim 1, wherein the high temperature and high pressure diamond of step (1) has a diameter of 1mm and a thickness of 800 μm, and the upper and lower surfaces thereof are polished and marked with an oil pen to have a machining range of 50-120 μm.
3. The method for preparing a diamond vortex beam generator by chemical treatment assisted laser processing according to claim 1, wherein the laser path in the step (2) is as follows: firstly, the femtosecond laser passes through a half-wave plate and a Glan prism and then the laser power is adjusted; then changing the propagation direction through a reflector and a lens group and shaping light beams; then the laser sequentially passes through a field lens, a 4f system, a medium lens and an objective lens and then is focused to a sample to-be-processed area, wherein the field lens regulates and controls the movement of the laser on an X-Y plane, the objective lens focuses the laser, the sample is fixed on a piezoelectric platform, and the movement in the Z direction is realized under the drive of the piezoelectric platform; and finally, illuminating by using an optical fiber lamp under the sample, wherein the illuminating light enters the CCD camera through the medium mirror and the reflector after penetrating through the processing objective, and the CCD camera displays a real-time processing image on the control computer to realize the real-time monitoring of the whole processing process.
4. The method for preparing a diamond vortex beam generator using chemical treatment assisted laser processing according to claim 1, wherein the femtosecond laser wavelength in the step (2) is 343nm, is an ultraviolet femtosecond laser, has a pulse frequency of 200kHz and a pulse width of 120fs, is experimentally focused by using an objective lens of 20 to 100 times, and has a numerical aperture of 0.5 to 0.75; the laser power adopted by the experiment is 8-10mW, the scanning distance of the point line surface is 50-200nm, the single-point exposure time is 100-; and after the processing is finished, carrying out ultrasonic cleaning for 10-30min, and then airing the sample for 5-15 min.
5. The method for preparing a diamond vortex beam generator by using chemical treatment to assist laser processing according to claim 1, wherein the volume ratio of the prepared concentrated sulfuric acid to the concentrated nitric acid mixed acid solution in the step (3) is 7: 1-9: 1, wherein the mass fraction of concentrated sulfuric acid is 70-98%, the mass fraction of concentrated nitric acid is 60-68%, the usage amount of mixed acid solution is 5-10ml, the heating temperature set by a hydrothermal reaction oven is 70-100 ℃, the heating time is 5-8h, the deionized water used for cleaning the diamond sample each time after chemical reaction is 10-30ml, the cleaning time is 5-15min, and the sample airing time is 5-15 min.
6. The use of a diamond vortex optical beam generator prepared by the method of using chemical treatment to assist laser processing to prepare a diamond vortex optical beam generator according to claim 1 in vortex beam generation, optical imaging and optical focusing.
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