CN111307749A - Double-frequency comb generating device and gas detection system with same - Google Patents
Double-frequency comb generating device and gas detection system with same Download PDFInfo
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- CN111307749A CN111307749A CN202010180427.XA CN202010180427A CN111307749A CN 111307749 A CN111307749 A CN 111307749A CN 202010180427 A CN202010180427 A CN 202010180427A CN 111307749 A CN111307749 A CN 111307749A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
Abstract
The invention relates to the technical field of spectral analysis and detection, in particular to a double-frequency comb generating device and a gas detection system with the same. A dual-frequency comb generating device comprising: a light source module; the optical splitter divides the light source provided by the light source module into two beams, and the two beams are respectively input into the first waveguide and the second waveguide; the first resonance ring and the second resonance ring are respectively arranged close to the input ends of the first waveguide and the second waveguide and are used for respectively receiving two light sources output by the optical splitter; a heating structure disposed proximate to the first resonant ring for heating a light source coupled into the first resonant ring; and the output end of the first waveguide and the output end of the second waveguide are used for respectively outputting the first optical frequency comb heated in the first resonant ring and the second optical frequency comb heated in the second resonant ring. The invention provides a double-frequency comb generating device with adjustable beat frequency and wide application range and a gas detection system with the double-frequency comb generating device.
Description
Technical Field
The invention relates to the technical field of spectral analysis and detection, in particular to a double-frequency comb generating device and a gas detection system with the same.
Background
Spectroscopy is an important subject technology and has been widely used in the important national fields such as agriculture, chemical industry and military industry. Due to the interaction between photons and substances, atoms or molecules in the ground state absorb light with a certain specific wavelength and transit to an excited state to form an absorption spectrum, and the absorption spectrum contains specific information carried by the substances, so that the detection of the types of the substances can be realized by analyzing the information. In addition, the molecular fingerprint region has strong absorption peak characteristic in the infrared spectrum range and is sensitive to some molecular structure change, and the fingerprint region falls in the middle infrared band range, such as H2O、HCN、CH4、SO2、HCl、CH2O、HBr、CO2、N2O、H2O, NO, etc. has strong absorption peak in the mid-infrared band of 3-5 μm, so the mid-infrared spectrum analysis technique has important application value in the aspect of researching and analyzing some specific gas components.
However, the conventional mid-infrared spectrometer has a large volume, low precision and slow reaction, and with the continuous development of science and technology, particularly the strong requirements on dangerous trace gas detection and the like, the conventional mid-infrared spectrometer and mid-infrared spectroscopy analysis technology need to be improved. The optical frequency comb is an optical pulse with equidistant time intervals, and due to the characteristic, the optical frequency comb becomes a powerful tool in the field of spectral analysis, while the domestic technology for performing spectral measurement by using the optical frequency comb is not many, and no related specific method exists at present for how to realize wider-range spectral measurement on the same equipment.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the defects that the beat frequency generated by the double-optical-frequency comb in the prior art is not adjustable and the application range is limited, so that the double-optical-frequency comb generating device with adjustable beat frequency and wide application range and the gas detection system with the double-optical-frequency comb generating device are provided.
In order to solve the above technical problem, the present invention provides a dual-band comb generating apparatus, comprising:
a light source module;
the optical splitter divides the light source provided by the light source module into two beams, and the two beams are respectively input into the first waveguide and the second waveguide;
the first resonance ring and the second resonance ring are respectively arranged close to the input ends of the first waveguide and the second waveguide and are used for respectively receiving two light sources output by the optical splitter;
a heating structure disposed proximate to the first resonant ring for heating a light source coupled into the first resonant ring;
and the output end of the first waveguide and the output end of the second waveguide are used for respectively outputting the first optical frequency comb heated in the first resonant ring and the second optical frequency comb heated in the second resonant ring.
The double-frequency comb generating device is characterized in that the heating structure is a ring heater arranged above or below the first resonant ring.
The double-frequency comb generating device also comprises a voltage wire connected with the ring heater.
In the double-frequency comb generating device, the input voltage of the voltage line is 0-30V.
The double-frequency comb generating device is integrated on a silicon-based chip.
Also provided is a dual-frequency comb generating method, comprising the steps of:
the light sources are split into beams and respectively enter a first resonant ring and a second resonant ring to resonate, wherein part of the light sources entering the first resonant ring are heated and then output, and the other part of the light sources entering the second resonant ring are directly output.
The gas detection system comprises the double-frequency comb generation device, an external light source and a beat frequency generation device which are connected with the double-frequency comb generation device, a gas sampling module and a detection signal photoelectric detector which are connected with the beat frequency generation device, and a signal processing module which is simultaneously connected with the gas sampling module and the detection signal photoelectric detector.
The gas detection system, gas sampling module includes gas chamber, branch locates the entrance point of gas chamber and two sets of level crossing of exit end with locate the sample photoelectric detector of the exit end of gas chamber, it is two sets of the level crossing is parallel to each other and the slope sets up.
In the gas detection system, two surfaces of the plane mirror are respectively plated with a high-transmittance film and a semi-reflection film.
The beat frequency generating device comprises two groups of beam expanding lenses and collimating lenses which are arranged in parallel, a first reflector and an optical beam splitter which are respectively connected with the two groups of collimating lenses, and a second reflector which is arranged at the output end of the optical beam splitter, wherein the second optical frequency comb passes through one group of beam expanding lenses and collimating lenses, then enters the optical beam splitter through the first reflector, and is subjected to frequency combination with the first optical frequency comb which passes through the other group of beam expanding lenses and collimating lenses in the optical beam splitter, and then is respectively transmitted to the gas sampling module and the detection signal photoelectric detector.
The technical scheme of the invention has the following advantages:
1. according to the double-frequency comb generating device provided by the invention, the light source coupled into the first resonant ring is heated to obtain the first optical frequency comb with a certain frequency change, and the frequency of the first optical frequency comb is combined with the frequency of the second optical frequency comb output by the same light source, so that the frequency of the first optical frequency comb can be adjusted by adjusting the heating temperature, different beat frequencies are generated after the frequency combination, and a wider spectrum measuring range is realized.
2. According to the double-frequency comb generating device provided by the invention, the annular heater enables the heating to be more uniform, and the light source output to be more stable.
3. According to the double-frequency comb generating device provided by the invention, the input voltage of the voltage line is 0-30V, so that the beat frequency generated by the double-frequency comb is tuned from an optical waveband to a microwave waveband, and the double-frequency comb generating device is suitable for mid-infrared spectrum analysis.
4. The double-frequency comb generating device provided by the invention is integrated on a silicon-based chip, is easy to produce in large scale in actual manufacturing, and has the advantages of small volume and high flexibility.
5. According to the gas detection system provided by the invention, due to the fact that the optical frequency combs generated by the two resonance rings under the thermo-optical effect have a micro frequency difference, the micro frequency difference enables beat frequencies generated by the two optical frequency combs to be tuned to a microwave band from an optical band, so that the gas detection system is widely applied to mid-infrared spectrum measurement and analysis of trace gas detection, and is wide in application range.
6. According to the gas detection system provided by the invention, the two groups of plane mirrors are parallel to each other and are obliquely arranged, so that a detection light signal can be fully contacted with sample gas after entering the gas chamber, and the accuracy of a detection result is ensured.
7. According to the gas detection system provided by the invention, the two surfaces of the plane mirror are respectively plated with the high-transmittance film and the semi-reflection film, so that a detection light signal is continuously reflected in the gas cavity and fully contacted with gas, the emergent light intensity containing gas information is enhanced, and the detection precision and sensitivity are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram of a dual-frequency comb generating device provided by the present invention;
FIG. 2 is a schematic diagram of a gas detection system provided by the present invention.
Description of reference numerals:
1. a silicon-based chip; 2. a light source module; 3. an optical splitter; 4. a first resonant ring; 5. a second resonant ring; 6. a first waveguide; 7. a second waveguide; 8. a heating structure; 9. a first optical frequency comb; 10. a second optical frequency comb; 11. a voltage line; 12. a detection signal photodetector; 13. a signal processing module; 14. a beam expanding lens; 15. a collimating lens; 16. a first reflector; 17. an optical beam splitter; 18. a second reflector; 19. a gas chamber; 20. a plane mirror; 21. a sample photodetector; 22. a high-permeability membrane; 23. semi-reflective film; 24. sample gas molecules; 25. connecting an external light source; 26. and a voltage controller.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the dual-frequency comb generating device is integrated on a silicon-based chip 1, and includes a light source module 2, an optical splitter 3, two waveguides, and a first resonant ring 4 and a second resonant ring 5 respectively disposed at input ends of the two waveguides, which are sequentially disposed along a light source transmission direction.
The light source module 2 is an on-chip light source arranged at one end of the silicon-based chip 1 and comprises a laser light source input module, the laser light source input module couples a sweep frequency narrow linewidth light source input by an external light source 25 into the chip through the laser light source input module to generate a chip input light source, the working wavelength range of the sweep frequency narrow linewidth light source is 0.3-3 mu m, and the light source with narrow linewidth and wide spectral range can be realized. The optical splitter 3 splits the light source provided by the light source module transmitted thereto into two beams, which are input into the first waveguide 6 and the second waveguide 7, respectively. The light source in the first waveguide 6 is coupled into the first resonant ring 4 and outputs a first optical frequency comb 9 from the output end of the first waveguide 6 after being heated by a heating structure 8 arranged close to the first resonant ring 4. The light source in the second waveguide 7 is coupled into the second resonant ring 5, outputting a second optical frequency comb 10 from the output of the second waveguide 7. In operation, due to the thermo-optic effect of the on-chip optics, the optical properties of the heated first resonant ring 4 change, causing the first optical-frequency comb 9 generated by the ring to have a certain slight frequency difference with the second optical-frequency comb 10 generated by the unheated second resonant ring 5.
Specifically, the heating structure 8 is a ring heater disposed above the first resonant ring 4, one side of the ring heater is connected to a voltage line 11, the voltage line 11 is connected to a voltage controller 26, and the voltage controller 26 controls the input voltage of the voltage line 11 to be 0-30V.
The silicon-based chip 1 may use silicon, silicon dioxide, silicon nitride, lithium niobate thin film, or the like.
The coupling mode of the external light source 25 and the silicon-based chip 1 includes, but is not limited to, coupling with a grating coupler or an end-face coupler by using an optical fiber.
Alternatively, the ring heater may be disposed below the first resonance ring 4.
A specific embodiment of the gas detection system shown in fig. 2 can be used for detecting trace gas, and includes the dual-frequency comb generating device, an external light source 25 and a beat frequency generating device connected to the dual-frequency comb generating device, a gas sampling module and a detection signal photodetector 12 connected to the beat frequency generating device, and a signal processing module 13 connected to the gas sampling module and the detection signal photodetector 12 at the same time. The beat frequency generating device is used for combining the frequency of the first optical frequency comb 9 and the frequency of the second optical frequency comb 10 to generate beat frequency, the gas sampling module is used for collecting a gas sample to be detected, the sample photoelectric detector 21 is used for collecting optical signals of beat frequency signals passing through the sample to be detected, and the signal processing module 13 is used for analyzing and processing signals output by the detection signal photoelectric detector 12 and the sample photoelectric detector 21.
The beat frequency generating device comprises two groups of beam expanding lenses 14 and collimating lenses 15 which are arranged in parallel, a first reflecting mirror 16 and an optical beam splitter 17 which are respectively connected with the two groups of collimating lenses 15, and a second reflecting mirror 18 which is arranged at the output end of the optical beam splitter 17. The first mirror 16 is connected to an optical beam splitter 17, and the optical beam splitter 17 is also connected to the detection signal photodetector 12.
The gas sampling module comprises a gas chamber 19, two groups of plane mirrors 20 which are respectively arranged at the inlet end and the outlet end of the gas chamber 19, and a sample photoelectric detector 21 which is arranged at the outlet end of the gas chamber, wherein the plane mirrors 20 are parallel to each other and are arranged in an inclined manner, and the two surfaces of the plane mirror 20 are respectively plated with a high-transparency film 22 and a semi-reflective film 23.
The high-transparency film 22 uses any one of magnesium fluoride, titanium dioxide, zinc sulfide and zinc selenide as a dielectric layer of a high-transparency film device, selects a suitable dielectric film thickness according to the working wavelength of the frequency comb and the wavelength generating beat frequency, and uniformly deposits the high-transparency film on the surface of the optical lens by using a physical vapor deposition method (vacuum evaporation) or a chemical vapor deposition method.
The semi-reflective film 23 uses an aluminum film as a dielectric layer of the semi-reflective film optical component, selects an appropriate dielectric film thickness according to the working wavelength of the frequency comb and the wavelength of generating beat frequency, and uniformly deposits the semi-reflective film on the surface of the optical lens by using a physical vapor deposition method (vacuum evaporation) or a chemical vapor deposition method.
The specific method for detecting the gas comprises the following steps:
the sweep frequency narrow linewidth light source input by the external light source 25 is coupled to the light source module 2 in the silicon-based chip 1 to generate a chip input light source, the chip input light source is divided into two beams by the optical splitter 3 and then respectively transmitted to the first waveguide 6 and the second waveguide 7, the light sources in the first waveguide 6 and the second waveguide 7 respectively enter the first resonant ring 4 and the second resonant ring 5 by coupling, and the input voltage of the annular heater above the first resonant ring 4 is adjusted, so that the frequency of the first optical frequency comb 9 output from the first waveguide 6 and the frequency of the second optical frequency comb 10 output from the second waveguide 7 have a certain difference. The first optical frequency comb 9 and the second optical frequency comb 10 respectively sequentially pass through a corresponding beam expanding lens 14 and a corresponding collimating lens 15, the second optical frequency comb 10 passes through one group of beam expanding lens 14 and one group of collimating lens 15, then enters the optical beam splitter 17 through the first reflector 16, and is subjected to frequency combination in the optical beam splitter 17 with the first optical frequency comb 9 passing through the other group of beam expanding lens 14 and the other group of collimating lens 15, beat frequency detection signals generated by the frequency combination are acted by the optical beam splitter 17, one of the beat frequency detection signals is transmitted to the detection signal photoelectric detector 12, and the other of the beat frequency detection signals is transmitted to the gas chamber 19 through the second reflector 18. The optical signal transmitted to the gas chamber 19 is continuously reflected at a slightly inclined angle by two sets of plane mirrors 20 coated with a high-transmittance film 22 and a semi-reflection film 23, and is output to a sample photodetector 21 after being fully contacted with sample gas molecules 24. The detection signals of the sample photoelectric detector 21 and the detection signal photoelectric detector 12 are transmitted to the signal processing module 13 for fourier transform, so as to obtain the frequency domain spectrum corresponding to the sample, obtain information about the type, molar concentration and the like of the sample gas, and realize the spectrum detection of the gas.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A dual-frequency comb generating apparatus, comprising:
a light source module (2);
the optical splitter (3) splits the light source provided by the light source module transmitted to the optical splitter into two beams, and the two beams are respectively input into the first waveguide (6) and the second waveguide (7);
the first resonant ring (4) and the second resonant ring (5) are respectively arranged close to the input ends of the first waveguide (6) and the second waveguide (7) and are used for respectively receiving the two light sources output by the optical splitter (3);
a heating structure (8) arranged close to the first resonance ring (4) for heating a light source coupled into the first resonance ring (4);
an output end of the first waveguide (6) and an output end of the second waveguide (7) for outputting a first optical frequency comb (9) heated in the first resonant ring (4) and a second optical frequency comb (10) in the second resonant ring (5), respectively.
2. The dual-frequency comb generating device according to claim 1, wherein the heating structure (8) is a ring heater disposed above or below the first resonant ring (4).
3. The dual-frequency comb generating device according to claim 2, further comprising a voltage line (11) connected to the ring heater.
4. A dual-frequency comb generating device according to claim 3, wherein the input voltage of the voltage line (11) is 0-30V.
5. The dual-frequency comb generating device according to any one of claims 1 to 4, wherein the dual-frequency comb generating device is integrated on a silicon-based chip (1).
6. A method for generating a dual-frequency comb, comprising the steps of:
the light source is split into beams and respectively enters a first resonant ring (4) and a second resonant ring (5) to resonate, wherein part of the light source entering the first resonant ring (4) is heated and then output, and the other part of the light source entering the second resonant ring (5) is directly output.
7. A gas detection system, comprising the dual-frequency comb generating device of any one of claims 1 to 5, further comprising an external light source and a beat frequency generating device connected to the dual-frequency comb generating device, a gas sampling module and a detection signal photodetector (12) connected to the beat frequency generating device, and a signal processing module (13) connected to both the gas sampling module and the detection signal photodetector (12).
8. The gas detection system according to claim 7, wherein the gas sampling module comprises a gas chamber (19), two sets of plane mirrors (20) arranged at the inlet end and the outlet end of the gas chamber (19), and a sample photodetector (21) arranged at the outlet end of the gas chamber (19), wherein the two sets of plane mirrors (20) are parallel to each other and are arranged obliquely.
9. The gas detection system according to claim 8, wherein both sides of the plane mirror (20) are coated with a high-transmittance film (22) and a semi-reflection film (23), respectively.
10. The gas detection system according to any one of claims 7 to 9, the beat frequency generating device comprises two groups of beam expanding lenses (14) and collimating lenses (15) which are arranged in parallel, a first reflecting mirror (16) and an optical beam splitter (17) which are respectively connected with the two groups of collimating lenses (15), and a second reflecting mirror (18) arranged at the output end of the optical beam splitter (17), the second optical frequency comb (10) passes through a group of beam expanding lenses (14) and collimating lenses (15) and then enters the optical beam splitter (17) through the first reflector (16), and the first optical frequency comb (9) which passes through another group of beam expanding lenses (14) and collimating lenses (15) is subjected to frequency combination in the optical beam splitter (17) and then respectively transmitted to the gas sampling module and the detection signal photoelectric detector (12).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010180427.XA CN111307749A (en) | 2020-03-13 | 2020-03-13 | Double-frequency comb generating device and gas detection system with same |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010180427.XA CN111307749A (en) | 2020-03-13 | 2020-03-13 | Double-frequency comb generating device and gas detection system with same |
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| CN111307749A true CN111307749A (en) | 2020-06-19 |
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| CN202010180427.XA Pending CN111307749A (en) | 2020-03-13 | 2020-03-13 | Double-frequency comb generating device and gas detection system with same |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112751251A (en) * | 2020-12-29 | 2021-05-04 | 南京南辉智能光学感控研究院有限公司 | Double-optical frequency comb generation system and generation method |
| CN113567379A (en) * | 2021-09-27 | 2021-10-29 | 深圳大学 | Gas molecule fingerprint identification system |
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2020
- 2020-03-13 CN CN202010180427.XA patent/CN111307749A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112751251A (en) * | 2020-12-29 | 2021-05-04 | 南京南辉智能光学感控研究院有限公司 | Double-optical frequency comb generation system and generation method |
| CN112751251B (en) * | 2020-12-29 | 2022-07-29 | 南京南辉智能光学感控研究院有限公司 | Double-optical frequency comb generation system and generation method |
| CN113567379A (en) * | 2021-09-27 | 2021-10-29 | 深圳大学 | Gas molecule fingerprint identification system |
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