CN111304637B - Coating production equipment - Google Patents
Coating production equipment Download PDFInfo
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- CN111304637B CN111304637B CN202010188797.8A CN202010188797A CN111304637B CN 111304637 B CN111304637 B CN 111304637B CN 202010188797 A CN202010188797 A CN 202010188797A CN 111304637 B CN111304637 B CN 111304637B
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- heating
- cavity
- conveying
- vacuum heating
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 91
- 238000000576 coating method Methods 0.000 title abstract description 48
- 239000011248 coating agent Substances 0.000 title abstract description 47
- 238000010438 heat treatment Methods 0.000 claims abstract description 244
- 238000007599 discharging Methods 0.000 claims abstract description 20
- 238000012546 transfer Methods 0.000 claims description 53
- 238000007747 plating Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 14
- 238000012545 processing Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 12
- 238000010276 construction Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a coating production device, which comprises: the loading cavity is provided with a first vacuum pump; the feeding end of the heating component is connected with the loading box, and the heating component comprises at least two vacuum heating devices; the discharging cavity is connected with the discharging end of the heating component, and a second vacuum pump is arranged on the discharging cavity; the conveying component is connected with the loading cavity, the heating component and the unloading cavity; wherein the conveying assembly is configured and adapted to convey at least two workpieces in the load chamber to at least two vacuum heating devices respectively for heating, and convey at least two workpieces which are heated to the load chamber from the vacuum heating devices. The coating production equipment can heat a plurality of workpieces simultaneously in a single vacuumizing-backfilling atmosphere cycle, so that the processing efficiency is greatly improved. And further, the structure of the coating production equipment is optimized, the production efficiency of the coating production equipment is improved, and the technical effect of reducing the production cost of products is achieved.
Description
Technical Field
The invention relates to the technical field of coating production, in particular to coating production equipment.
Background
In the production process of solar cells, the cost of the cells is directly affected by the productivity of PECVD (Plasma Enhanced Chemical Vapor Deposition ) film plating equipment, and the traditional PECVD equipment has the defects that each time each carrier plate enters and exits the vacuum cavity, vacuumizing and backfilling atmosphere are needed, meanwhile, in order to ensure that the temperature of the silicon wafer is uniform during process reaction, a plurality of cavities are needed to be provided with heaters, and much time is spent for radiation heating of the silicon wafer, so that the equipment cost is greatly increased, and the productivity per unit time is greatly restricted.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art or related art.
Therefore, the invention provides coating production equipment.
In view of the above, the present invention provides a plating film production apparatus, comprising: the loading cavity is provided with a first vacuum pump; the feeding end of the heating component is connected with the loading box, and the heating component comprises at least two vacuum heating devices; the discharging cavity is connected with the discharging end of the heating component, and a second vacuum pump is arranged on the discharging cavity; the conveying component is connected with the loading cavity, the heating component and the unloading cavity; wherein the conveying assembly is configured and adapted to convey at least two workpieces in the load chamber to at least two vacuum heating devices respectively for heating, and convey at least two workpieces which are heated to the load chamber from the vacuum heating devices.
In this technical scheme, coating film production facility includes into carrying chamber, heating element, goes out and carries chamber and conveying assembly. The loading cavity is connected with the feeding end of the heating component and is used for conveying the workpiece to be processed to the heating component, and the heating component is used for heating the workpiece so as to meet the technological requirements of users. The discharging cavity is connected with the discharging end of the heating component and is used for receiving the heated workpieces and intensively conveying the heated workpieces out of the coating production equipment. According to the technological requirements of the workpiece, a first vacuum pump is arranged on the loading cavity, at least two vacuum heating devices are arranged in the heating assembly, and a second vacuum pump is arranged on the unloading cavity, so that the loading cavity can synchronously press with the vacuum heating devices, then the workpiece is loaded into the vacuum heating devices, the unloading cavity can synchronously press with the vacuum heating devices, then the vacuum heating devices receive the processed workpiece, and therefore the vacuum environment of the vacuum heating devices is not damaged, and the quality of the processed workpiece is ensured to be stable and reliable. The conveying component is connected with the loading cavity, the heating component and the unloading cavity, and can simultaneously convey at least two workpieces into at least two vacuum heating devices in the heating device for heating from the loading cavity, and can simultaneously convey the workpieces in the at least two vacuum heating devices into the unloading cavity from the heating component.
Through setting up two at least vacuum heating device on coating film production facility to and set up the transport subassembly that can carry and export the work piece to two at least vacuum heating device simultaneously, when making coating film production facility can carry out once evacuation circulation, accomplish the heating technology of a plurality of work pieces simultaneously, thereby avoid every work piece to carry out once evacuation and backfill the step of atmosphere when business turn over carries into chamber, heating subassembly and play and carry the chamber, make coating film production facility can heat a plurality of work pieces simultaneously in single evacuation-backfill atmosphere circulation, in order to promote machining efficiency by a wide margin. And further, the structure of the coating production equipment is optimized, the production efficiency of the coating production equipment is improved, and the technical effect of reducing the production cost of products is achieved.
In addition, the plating film production equipment provided by the invention can also have the following additional technical characteristics:
in the technical scheme, at least two vacuum heating devices are connected in series.
In this technical scheme, a specific limitation is made on the manner in which the vacuum heating device is disposed. At least two vacuum heating devices are connected in series, and the conveying assembly is connected with the vacuum heating devices connected in series in sequence. By connecting at least two vacuum heating devices in series, the number of branches of the conveying assembly can be reduced, and the single conveying assembly can sequentially finish workpiece loading and workpiece unloading of the at least two vacuum heating devices in one vacuumizing-backfilling atmosphere cycle. Therefore, the technical effects of optimizing the heating component structure, simplifying the conveying component structure, improving the productivity of coating production equipment and reducing the cost of the coating production equipment are achieved.
In any of the above solutions, the conveying assembly includes: the conveying wheelset, conveying wheelset includes: the conveying wheels are respectively arranged in the loading cavity, the unloading cavity and the vacuum heating device; the carrier plate is arranged on the conveying wheel set, the conveying wheel rotates to drive the carrier plate to move on the conveying wheel set, and the carrier plate is configured to be suitable for bearing workpieces.
In this technical solution, the structure of the transfer assembly is specifically defined. The conveying assembly comprises a conveying wheel set and a carrier plate, the conveying wheel set is a conveying structure of the conveying assembly and consists of a plurality of conveying wheels, and the conveying wheels are respectively arranged in the loading cavity, the vacuum heating device and the unloading cavity. The carrier plate is a positioning bearing structure of the conveying assembly, is placed on the conveying wheel set and moves on the conveying wheel set under the driving of the conveying wheel set, and the workpiece is positioned on the carrier plate to move along with the carrier plate. In the working process, the carrier plate with the workpieces is placed in the loading cavity and moves into the vacuum heating device under the drive of the conveying wheel set, and after the vacuum heating device completes heating of the workpieces on the carrier plate, the conveying wheel set conveys the carrier plate into the unloading cavity so that the heated workpieces can enter the next processing link. The conveying wheel set and the carrier plate are of split type structures, a user can directly place the carrier plate which is loaded on the conveying wheel set to enter a heating link as soon as possible, and when the workpiece is discharged, the user can directly detach the carrier plate which carries the heated workpiece from the conveying wheel set and quickly enter the next heating cycle, so that the loading and unloading speed of the workpiece on the conveying assembly is greatly improved, the conveying assembly structure is optimized, the working efficiency of the conveying assembly is improved, and the technical effect of productivity of coating production equipment is improved.
In any of the above technical solutions, the number of the transmission wheel sets is the same as that of the vacuum heating devices, and different transmission wheel sets are positioned on different planes; the number of the carrier plates is the same as that of the vacuum heating devices, and each conveying wheel set is provided with one carrier plate.
In this solution, a further limitation is made to the structure of the transfer wheel set. The number of the conveying wheel sets is the same as that of the vacuum heating devices, the conveying wheel sets are in one-to-one correspondence with the vacuum heating devices, and different conveying wheel sets are distributed on different planes so as to avoid interference. The number of the carrier plates is the same as that of the vacuum heating devices, and the plurality of carrier plates are in one-to-one correspondence with the plurality of vacuum heating devices and the plurality of conveying wheel sets, so that workpieces can be conveyed and output for the plurality of vacuum heating devices simultaneously through the plurality of carrier plates under the driving of the plurality of conveying wheel sets. In the working process, different carrier plates respectively move on different planes, when the carrier plates move to the corresponding vacuum heating devices, the movement is stopped, the heating process is executed, and after the heating is completed, the carrier plates move to the discharging cavity together and are output by the discharging cavity. By arranging the conveying wheel sets and the carrier plates, which correspond to the number of the vacuum heating devices, the conveying assembly can simultaneously convey and output workpieces for a plurality of the vacuum heating devices, so that the coating production equipment can heat as many workpieces as possible in a cycle of one-time vacuumizing-atmosphere backfilling. And further, the structure of the conveying assembly is optimized, the production efficiency of coating production equipment is improved, the productivity is greatly improved, and the technical effect of production cost is reduced.
In any of the above technical solutions, the vacuum heating device includes: a heating box; the heater is arranged in the heating box; the lifting device is arranged on the heating box and connected with the heater, and the lifting device lifts or lowers the heater.
In this technical scheme, the vacuum heating device includes heating cabinet, heater and elevating gear. The heating box encloses and defines a heating chamber. The heater is disposed within the heating cabinet to provide heat to heat the workpiece by a user. The lifting device is arranged at the bottom of the heating box and connected with the heater, and can drive the heater to rise or fall so that the heater can be close to the workpiece when the workpiece needs to be heated, and the workpiece is separated after the heating is completed. Through setting up the heater that is connected with elevating gear, make heating device can closely heat the work piece, promoted heating efficiency by a wide margin on the one hand, on the other hand avoids appearing the uneven phenomenon of work piece heating through closely contact heating, and then realized optimizing heating device structure, promote heating device reliability, promote the technological effect of coating film production facility's production precision.
In any of the above technical solutions, the conveying wheel set further includes: the telescopic device is arranged on the loading cavity, the unloading cavity and the vacuum heating device and is connected with the conveying wheel.
In the technical scheme, the conveying wheel set is further provided with a telescopic device, the telescopic device and the conveying wheel are correspondingly arranged in the loading cavity, the vacuum heating device and the unloading cavity, and the telescopic end of the telescopic device is connected with the conveying wheel so as to drive the conveying wheel to extend or retract. In the working process, the carrier plate carrying the workpiece to be heated stops moving after moving into the target heating box, then the conveying wheels on the conveying wheel set which are not responsible for moving the vacuum heating device retract under the drive of the telescopic device, and then the lifting device drives the heater to lift so that the workpiece on the carrier plate can be attached to the heater, the heater can be ensured to contact with the heated workpiece, the lifting device drives the heater to reset after heating is finished, and the telescopic device drives the retracted conveying wheels to stretch out. The telescopic device can avoid interference of the plurality of conveying wheel sets arranged in the vacuum heating device to the lifting device, and ensures that the heater in each vacuum heating device can be contacted with the corresponding workpiece on the carrier plate. And further, the technical effects of optimizing the structure of the conveying wheel set and improving the practicability and reliability of the coating production equipment are achieved.
In any of the above technical solutions, a grid is arranged on the carrier plate, and the workpiece is embedded on the grid; the heater is provided with grooves corresponding to the grids, and the grids fall into the grooves after the raised heater is contacted with the workpiece.
In the technical scheme, a grid matched with the appearance of the workpiece is arranged on the carrier plate, and the workpiece is embedded on the grid so as to be positioned through the grid. Meanwhile, the heater is provided with a groove corresponding to the shape of the grille, so that the lifting device drives the heater to ascend, the carrier plate can fall into the groove, the workpiece can be separated from the carrier plate and contacted with the heater, and after heating is completed, the lifting device drives the heater to descend, and the workpiece falls onto the grille of the carrier plate again. Through setting up grid and the slot that corresponds on carrier plate and heater, make the work piece break away from the carrier plate and contact with the heater in heating process to guarantee the heating efficiency and the heating effect of work piece, avoid appearing heating uneven, the incomplete technical problem of heating, and then promote the reliability and the stability of coating film production facility.
In any of the above technical solutions, the plating film production device further includes: one end of the first vacuum gate valve is connected with the loading cavity, and the other end of the first vacuum gate valve is connected with the feeding end; one end of the second vacuum gate valve is connected with the discharging cavity, and the other end of the second vacuum gate valve is connected with the discharging end; and the two ends of the third vacuum gate valve are respectively connected with different vacuum heating devices.
In the technical scheme, the coating production equipment is also provided with a first vacuum gate valve, a second vacuum gate valve and a third vacuum gate valve. The first vacuum door valve is communicated with the loading cavity and the vacuum heating device, when the loading cavity needs to convey a workpiece to the heating assembly, the first vacuum door valve is opened, then the first vacuum door valve is closed and heats the workpiece, on one hand, the pressure stability in the vacuum heating assembly can be ensured through the arrangement of the first vacuum door valve, and on the other hand, heat dissipation can be avoided. The second vacuum gate valve is communicated with the vacuum heating device and the load-out cavity, after the heating of the workpiece is completed, the second vacuum gate valve is opened, after all the carrier plates enter the load-out cavity, the second vacuum gate valve is closed, and the second vacuum gate valve is matched with the first vacuum gate valve so as to ensure that the air pressure in the vacuum heating device is stable, thereby avoiding the step of frequently extracting the air in the vacuum heating device, further improving the production efficiency and reducing the production cost. The third vacuum gate valve is communicated with two adjacent different vacuum heating devices, and is opened when a workpiece is loaded and unloaded, and each vacuum heating device can independently heat the workpiece by arranging the third vacuum gate valve, so that the application range of the coating production equipment is improved, and the practicability of the product is improved.
In any of the above technical solutions, the plating film production device further includes: and the third vacuum pump is connected with the vacuum heating device and is configured to pump gas in the vacuum heating device.
In the technical scheme, the third vacuum pump is further arranged on the coating production equipment and connected with the vacuum heating device and used for pumping gas in the vacuum heating device, so that a heating process in a vacuum state is met, and a workpiece meeting the requirements is obtained.
In any of the above technical solutions, the plating film production device further includes: the first large valve is arranged on the loading cavity and opens or closes a feed inlet on the loading cavity; the second big valve is arranged on the discharging cavity and opens or closes a discharging hole on the discharging cavity.
In the technical scheme, the coating production equipment is further provided with a first large valve and a second large valve, the first large valve is arranged on the loading cavity and used for switching on and off a feed inlet of the loading cavity, and the second large valve is arranged on the unloading cavity and used for switching on and off a discharge outlet of the unloading cavity. In the working process, after the workpiece is fully placed in the loading cavity, the first big valve is closed, and the first vacuum pump pumps the gas in the loading cavity so as to balance the air pressure of the loading cavity and the vacuum heating device. After the heated workpiece completely enters the unloading cavity, the second large valve is opened to convey the workpiece out of the coating production equipment.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 shows a schematic structure of a plating film production apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view showing another construction of a plating film production apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view showing the construction of a plating film production apparatus according to another embodiment of the present invention;
FIG. 4 is a schematic view showing the construction of a plating film production apparatus according to still another embodiment of the present invention;
FIG. 5 is a schematic view showing the construction of a plating film production apparatus according to still another embodiment of the present invention;
fig. 6 is a schematic view showing a structure of a plating film production apparatus according to still another embodiment of the present invention.
Wherein, the correspondence between the reference numerals and the component names in fig. 1 to 6 is:
1 coating production equipment, 10 loading chambers, 102 a first vacuum pump, 104 a first large valve, 20 a vacuum heating device, 202 a heating box, 204 a heater, 206 grooves, 208 lifting devices, 210 a third vacuum pump, 30 out of the load chamber, 302 second vacuum pump, 304 second large valve, 40 transfer assembly, 402 transfer wheel, 404 carrier plate, 406 grid, 50 first vacuum valve, 60 second vacuum valve, 70 third vacuum valve.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description. It should be noted that, in the case of no conflict, the embodiments of the present application and the features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
A plating film production apparatus 1 according to some embodiments of the present invention is described below with reference to fig. 1 to 6.
As shown in fig. 1 and 2, in an embodiment of the first aspect of the present invention, there is provided a plating film production apparatus 1, the plating film production apparatus 1 comprising: the loading cavity 10, the loading cavity 10 is provided with a first vacuum pump 102; the feeding end of the heating assembly is connected with the loading box, and the heating assembly comprises at least two vacuum heating devices 20; the load-out cavity 30 is connected with the discharge end of the heating component, and a second vacuum pump 302 is arranged on the load-out cavity 30; a transfer assembly 40 connected to the load chamber 10, the heating assembly, and the load chamber 30; wherein the transfer assembly 40 is configured and adapted to transfer at least two workpieces in the load lock 10 to the at least two vacuum heating apparatuses 20 for heating, respectively, and transfer at least two heated workpieces from the vacuum heating apparatuses 20 to the unload lock 30.
In this embodiment, the plating film production apparatus 1 includes an in-carrying chamber 10, a heating assembly, an out-carrying chamber 30, and a conveying assembly 40. The loading cavity 10 is connected with a feeding end of a heating assembly, and is used for conveying a workpiece to be processed to the heating assembly, and the heating assembly is used for heating the workpiece so as to meet the process requirements of users. The load-out cavity 30 is connected with the discharge end of the heating assembly and is used for receiving the heated workpieces and intensively conveying the heated workpieces out of the coating production equipment 1. According to the process requirements of the workpieces, the first vacuum pump 102 is arranged on the loading cavity 10, at least two vacuum heating devices 20 are arranged in the heating assembly, and the second vacuum pump 302 is arranged on the unloading cavity 30, so that the loading cavity 10 can synchronously press with the vacuum heating devices 20 and then load the workpieces into the vacuum heating devices 20, and correspondingly, the unloading cavity 30 can synchronously press with the vacuum heating devices 20 and then receive the processed workpieces by the vacuum heating devices 20, thereby ensuring that the vacuum environment of the vacuum heating devices 20 is not damaged and ensuring the quality of the processed workpieces to be stable and reliable. The conveying assembly 40 is connected with the load chamber 10, the heating assembly and the load chamber 30, the conveying assembly 40 can simultaneously convey at least two workpieces from the load chamber 10 to at least two vacuum heating devices 20 in the heating devices for heating, and the conveying assembly 40 can also simultaneously convey the workpieces in the at least two vacuum heating devices 20 from the heating assembly into the load chamber 30.
By arranging at least two vacuum heating devices 20 on the coating production equipment 1 and arranging a conveying assembly 40 capable of conveying and outputting workpieces to the at least two vacuum heating devices 20 at the same time, the heating process of a plurality of workpieces is completed at the same time when the coating production equipment 1 can execute one vacuumizing cycle, so that the steps of executing one vacuumizing and backfilling atmosphere when each workpiece enters and exits the loading cavity 10, the heating assembly and the unloading cavity 30 are avoided, and the coating production equipment 1 can heat the plurality of workpieces at the same time in a single vacuumizing-backfilling atmosphere cycle, thereby greatly improving the processing efficiency. And further, the structure of the coating production equipment 1 is optimized, the production efficiency of the coating production equipment 1 is improved, and the technical effect of reducing the production cost of products is achieved.
In one embodiment of the present invention, further, as shown in FIG. 2, at least two vacuum heating apparatuses 20 are connected in series.
In this embodiment, the manner in which the vacuum heating apparatus 20 is arranged is specifically limited. At least two vacuum heating apparatuses 20 are connected in series, and a transfer assembly 40 is sequentially connected with the vacuum heating apparatuses 20 connected in series. By concatenating at least two vacuum heating apparatuses 20 together, the number of branches of the transfer assembly 40 may be reduced, allowing a single transfer assembly 40 to sequentially complete workpiece loading and workpiece unloading of at least two vacuum heating apparatuses 20 in one vacuuming-backfilling atmosphere cycle. Thereby realizing the technical effects of optimizing the heating component structure, simplifying the conveying component 40 structure, improving the productivity of the coating production equipment 1 and reducing the cost of the coating production equipment 1.
In one embodiment of the present invention, further, as shown in FIG. 2, the transfer assembly 40 includes: a transfer wheel 402 set, the transfer wheel 402 set comprising: a plurality of transfer wheels 402, the transfer wheels 402 being disposed in the load chamber 10, the load chamber 30, and the vacuum heating apparatus 20, respectively; the carrier 404 is disposed on the set of transfer wheels 402, the transfer wheels 402 rotate to drive the carrier 404 to travel on the set of transfer wheels 402, and the carrier 404 is configured to carry a workpiece.
In this embodiment, the structure of the transfer assembly 40 is specifically defined. The transfer assembly 40 includes a transfer wheel 402 set and a carrier plate 404, wherein the transfer wheel 402 set is a conveying structure of the transfer assembly 40, and is composed of a plurality of transfer wheels 402, and the plurality of transfer wheels 402 are respectively disposed in the loading chamber 10, the vacuum heating device 20 and the unloading chamber 30. The carrier 404 is a positioning and bearing structure of the transfer assembly 40, and the carrier 404 is placed on the set of transfer wheels 402 and moves on the set of transfer wheels 402 under the driving of the set of transfer wheels 402, wherein the workpiece is positioned on the carrier 404 and moves along with the carrier 404. In the working process, the carrier plate 404 with the workpiece is placed in the loading cavity 10 and moves into the vacuum heating device 20 under the drive of the conveying wheel 402 set, and after the vacuum heating device 20 completes heating the workpiece on the carrier plate 404, the conveying wheel 402 set conveys the carrier plate 404 into the unloading cavity 30 so that the heated workpiece can enter the next processing link. The conveying wheel 402 set and the carrier plate 404 are of split type structures, a user can directly place the carrier plate 404 which is loaded on the conveying wheel 402 set to enter a heating link as soon as possible, and similarly, when the workpiece is loaded, the user can directly detach the carrier plate 404 which carries the heated workpiece from the conveying wheel 402 set and quickly enter the next heating cycle, so that the loading and unloading speed of the workpiece on the conveying assembly 40 is greatly improved, the structure of the conveying assembly 40 is optimized, the working efficiency of the conveying assembly 40 is improved, and the technical effect of the production capacity of the coating film production equipment 1 is improved.
In one embodiment of the present invention, further, as shown in FIG. 2, the number of sets of transfer wheels 402 is the same as the number of vacuum heating apparatus 20, with different sets of transfer wheels being located in different planes; the number of carrier plates 404 is the same as the number of vacuum heating apparatuses 20, and each carrier plate 404 is provided on each set of transfer wheels 402.
In this embodiment, the structure of the transfer wheel 402 set is further defined. The number of the conveying wheels 402 is the same as the number of the vacuum heating apparatuses 20, the plurality of conveying wheels 402 are in one-to-one correspondence with the plurality of vacuum heating apparatuses 20, and the different conveying wheels 402 are distributed on different planes to avoid interference. The number of the carrier plates 404 is the same as the number of the vacuum heating devices 20, and the plurality of carrier plates 404 are in one-to-one correspondence with the plurality of vacuum heating devices 20 and the plurality of transfer wheel 402 sets, so that workpieces can be simultaneously transported and output for the plurality of vacuum heating devices 20 through the plurality of carrier plates 404 under the driving of the plurality of transfer wheel 402 sets. In the working process, different carrier plates 404 respectively move on different planes, when the carrier plates 404 move to the corresponding vacuum heating devices, the movement is stopped, the heating process is executed, and after the heating is completed, the plurality of carrier plates 404 move to the carrier outlet cavity 30 together and are output by the carrier outlet cavity 30. By providing the group of transfer wheels 402 and the carrier plate 404 corresponding to the number of the vacuum heating apparatuses 20, the transfer assembly 40 can simultaneously transfer and output workpieces for a plurality of the vacuum heating apparatuses 20, so that the coating film producing apparatus 1 can heat as many workpieces as possible in one cycle of vacuumizing-atmosphere backfilling. And further, the structure of the conveying assembly 40 is optimized, the production efficiency of the coating production equipment 1 is improved, the productivity is greatly improved, and the production cost is reduced.
In one embodiment of the present invention, further, as shown in fig. 1, the vacuum heating apparatus 20 includes: a heating box 202; a heater 204 disposed in the heating tank 202; and a lifting device 208, which is disposed on the heating box 202 and connected to the heater 204, wherein the lifting device 208 lifts or lowers the heater 204.
In this embodiment, the vacuum heating apparatus 20 includes a heating box 202, a heater 204, and a lifting device 208. The heating tank 202 encloses a heating chamber. A heater 204 is disposed within the heating tank 202 to provide heat to heat a workpiece by a user. The lifting device 208 is disposed at the bottom of the heating box 202 and connected to the heater 204, and the lifting device 208 can drive the heater 204 to rise or fall, so that the heater 204 can approach the workpiece when the workpiece needs to be heated, and is separated from the workpiece after heating is completed. Through setting up the heater 204 that is connected with elevating gear 208, make heating device can closely heat the work piece, promoted heating efficiency by a wide margin on the one hand, on the other hand avoids appearing the uneven phenomenon of work piece heating through closely contact heating, and then realized optimizing heating device structure, promote heating device reliability, promote the technological effect of the production precision of coating film production facility 1.
In one embodiment of the present invention, further, as shown in fig. 1, the transfer wheel 402 set further includes: the telescopic device is arranged on the loading cavity 10, the unloading cavity 30 and the vacuum heating device 20 and is connected with the conveying wheel 402.
In this embodiment, the conveying wheel 402 is further provided with a telescopic device, and the telescopic device and the conveying wheel 402 are correspondingly arranged in the loading cavity 10, the vacuum heating device 20 and the unloading cavity 30, wherein a telescopic end of the telescopic device is connected with the conveying wheel 402 to drive the conveying wheel 402 to extend or retract. In the working process, the carrier 404 carrying the workpiece to be heated moves into the target heating box 202 and then stops moving, then the transfer wheels 402 on the transfer wheel 402 set which is not responsible for moving the vacuum heating device 20 retract under the drive of the telescopic device, then the lifting device 208 drives the heater 204 to lift, so that the workpiece on the carrier 404 can be attached to the heater 204, the heater 204 can be ensured to be contacted with the heated workpiece, after heating is completed, the lifting device 208 drives the heater 204 to reset, and the telescopic device drives the retracted transfer wheels 402 to extend. By providing a telescoping device, interference with the lifting device 208 from the plurality of sets of transfer wheels 402 disposed in the vacuum heating devices 20 is avoided, ensuring that the heater 204 in each vacuum heating device 20 is in contact with the workpiece on the corresponding carrier plate 404. And further, the technical effects of optimizing the structure of the conveying wheel 402 group and improving the practicability and reliability of the coating production equipment 1 are achieved.
In one embodiment of the present invention, further, as shown in fig. 1, a grid 406 is disposed on the carrier 404, and the workpiece is embedded on the grid 406; the heater 204 is provided with grooves 206 corresponding to the grating 406, and the grating 406 falls into the grooves 206 after the raised heater 204 contacts the workpiece.
In this embodiment, the carrier plate 404 is provided with a grid 406 that is adapted to the shape of the workpiece, and the workpiece is embedded on the grid 406 to position the workpiece through the grid 406. Meanwhile, the heater 204 is provided with the grooves 206 corresponding to the shape of the grating 406, so that the lifting device 208 drives the heater 204 to lift, and then the carrier 404 can drop into the grooves 206, so that the workpiece can be separated from the carrier 404 and contacted with the heater 204, and after heating is completed, the lifting device 208 drives the heater 204 to descend, and the workpiece falls onto the grating 406 of the carrier 404 again. Through setting up corresponding grid 406 and slot 206 on carrier plate 404 and heater 204, make the work piece break away from carrier plate 404 and contact with heater 204 in the heating process to guarantee the heating efficiency and the heating effect of work piece, avoid appearing heating uneven, heat incomplete technical problem, and then promote the reliability and the stability of coating film production facility 1.
In one embodiment of the present invention, further, as shown in fig. 2, the plating film production apparatus 1 further includes: the first vacuum gate valve 50, one end of the first vacuum gate valve 50 is connected with the load cavity 10, and the other end of the first vacuum gate valve 50 is connected with the feed end; the second vacuum gate valve 60, one end of the second vacuum gate valve 60 is connected with the unloading cavity 30, and the other end of the second vacuum gate valve 60 is connected with the unloading end; and a third vacuum gate valve 70, both ends of the third vacuum gate valve 70 are respectively connected with different vacuum heating apparatuses 20.
In this embodiment, the plating film production apparatus 1 is further provided with a first vacuum gate valve 50, a second vacuum gate valve 60, and a third vacuum gate valve 70. The first vacuum gate valve 50 is communicated with the load cavity 10 and the vacuum heating device 20, when the load cavity 10 needs to convey a workpiece to the heating assembly, the first vacuum gate valve 50 is opened, then the first vacuum gate valve 50 is closed and the workpiece is heated, and by arranging the first vacuum gate valve 50, the air pressure in the vacuum heating assembly can be ensured to be stable, and heat dissipation can be avoided. The second vacuum gate valve 60 is communicated with the vacuum heating device 20 and the load-out cavity 30, after the heating of the workpiece is completed, the second vacuum gate valve 60 is opened, after all the carrier plates 404 enter the load-out cavity 30, the second vacuum gate valve 60 is closed, the second vacuum gate valve 60 is matched with the first vacuum gate valve 50, so that the air pressure in the vacuum heating device 20 is ensured to be stable, the step of frequently extracting the air in the vacuum heating device 20 is omitted, the production efficiency is further improved, and the production cost is reduced. The third vacuum gate valve 70 is communicated with two adjacent different vacuum heating devices 20, and when a workpiece is loaded and unloaded, the third vacuum gate valve 70 is opened, and each vacuum heating device 20 can independently heat the workpiece by arranging the third vacuum gate valve 70, so that the application range of the coating production equipment 1 is improved, and the practicability of the product is improved.
In one embodiment of the present invention, further, as shown in fig. 1, the plating film production apparatus 1 further includes: and a third vacuum pump 210 connected to the vacuum heating apparatus 20, the third vacuum pump 210 being configured to pump the gas in the vacuum heating apparatus 20.
In this embodiment, the coating production apparatus 1 is further provided with a third vacuum pump 210, and the third vacuum pump 210 is connected to the vacuum heating device 20, and is used for extracting the gas in the vacuum heating device 20, so as to satisfy the heating process in the vacuum state, so as to obtain the workpiece meeting the requirement.
In one embodiment of the present invention, further, as shown in fig. 2, the plating film production apparatus 1 further includes: the first large valve 104 is arranged on the loading cavity 10, and the first large valve 104 opens or closes a feed inlet on the loading cavity 10; the second large valve 304 is disposed on the unloading chamber 30, and the second large valve 304 opens or closes a discharge port on the unloading chamber 30.
In this embodiment, the coating production apparatus 1 is further provided with a first large valve 104 and a second large valve 304, where the first large valve 104 is disposed on the loading chamber 10 for opening and closing a feed port of the loading chamber 10, and the second large valve 304 is disposed on the unloading chamber 30 for opening and closing a discharge port of the unloading chamber 30. In the working process, after the workpieces are all placed in the load chamber 10, the first large valve 104 is closed, and the first vacuum pump 102 pumps the gas in the load chamber 10 so as to balance the air pressure of the load chamber 10 and the vacuum heating device 20. After the heated work pieces all enter the unloading chamber 30, the second large valve 304 is opened to transport the work pieces out of the plating film production apparatus 1.
In one embodiment of the invention:
the invention designs the heater 204 with the aluminum boss, and the lifting action in the process cavity (the vacuum heating device 20) ensures that the silicon wafer (workpiece) can be automatically separated from the carrier plate 404 and directly contacted with the boss surface with uniform high temperature to form a high-efficiency heat conduction heating mode for process reaction; at the end of the process, the silicon wafer automatically falls on the carrier 404 due to the lifting action in the process chamber, and is separated from the heater 204, so that the subsequent carrier 404 is continuously conveyed.
The double-layer conveying wheels 402 are arranged in the load-in cavity 10 and the load-out cavity 30, two carrier plates 404 can enter and exit the load-in cavity 10 and the load-out cavity 30 simultaneously, vacuumizing and atmosphere backfilling are performed simultaneously, then each carrier plate 404 enters a process reaction station in one process cavity to perform a silicon wafer coating process simultaneously, the productivity of equipment is greatly improved, and the energy consumption problem caused by frequent vacuumizing and atmosphere backfilling is solved.
The carrier plate 404 is a hollow carrier plate 404, and is made of carbon fiber materials to resist high temperature; the heater 204 has a plurality of bosses with grooves (grooves 206) therebetween into which solid portions of the carrier 404 can fall.
In another embodiment of the invention:
as shown in fig. 2, two carrier plates 404 enter the carrier chamber 10 through the upper and lower rows of transfer wheels 402, then the first large valve 104 is closed, vacuum pumping is started, the required vacuum pressure is reached, and the pressure in the vacuum heating device 20 is kept consistent; at this time, the heater 204 in the vacuum heating apparatus 20 has been heated for a long period of time, and the upper surface of the boss on the heater 204 has reached a desired uniform high temperature.
As shown in fig. 3, the first vacuum gate valve 50 and the third vacuum gate valve 70 are opened, and the two carrier plates 404 are transferred to the two vacuum heating apparatuses 20 through the transfer wheel 402 group, respectively.
As shown in fig. 4, the lifting devices 208 in the vacuum heating device 20 respectively lift, the silicon wafers (workpieces) on the carrier plates 404 respectively fall on the bosses of the heater 204, and meanwhile, the carrier plates 404 fall into the grooves (grooves 206) between the bosses, and continue to lift to separate the carrier plates 404 from the conveying wheel 402, so that the silicon wafers are rapidly heated in a heat conduction mode; the lifting device 208 lifts the carrier 404 and the wafer to a desired position for a process reaction.
As shown in fig. 5, after the process is finished, the lifting device 208 in the vacuum heating device 20 descends respectively, the two carrier plates 404 fall onto the two conveying wheel 402 sets respectively, the lifting device 208 descends continuously, so that each silicon wafer on the boss of the heater 204 falls onto the corresponding silicon wafer area (the grid 406) on the carrier plate 404, and meanwhile, the silicon wafer is separated from the boss surface on the heater 204.
As shown in fig. 6, the vacuum second vacuum gate valve 60 is opened, the carrier plate 404 carries the silicon wafer and is transferred to the output chamber 30 through the set of transfer wheels 402, the second vacuum gate valve 60 is closed, the backfilling atmosphere is performed, the second large valve 304 is opened, and the carrier plate 404 is transferred to the output chamber 30 through the set of transfer wheels 402.
The contact between the silicon chip, the carrier 404 and the heater 204 is conductive to heat and separate to transfer, so that the method is simple and efficient, compared with the traditional mode, the time spent by the whole beat is greatly reduced, meanwhile, the heating uniformity of the silicon chip is well ensured, the productivity is greatly improved, and the cost and the energy consumption are well controlled.
In the description of the present invention, the term "plurality" means two or more, unless explicitly defined otherwise, the orientation or positional relationship indicated by the terms "upper", "lower", etc. are orientation or positional relationship based on the drawings, merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention; the terms "coupled," "mounted," "secured," and the like are to be construed broadly, and may be fixedly coupled, detachably coupled, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present invention, the terms "one embodiment," "some embodiments," "particular embodiments," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In the present invention, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A plating film production apparatus, characterized by comprising:
the loading cavity is provided with a first vacuum pump;
the feeding end of the heating component is connected with the loading cavity, and the heating component comprises at least two vacuum heating devices;
the discharging cavity is connected with the discharging end of the heating component, and a second vacuum pump is arranged on the discharging cavity;
the conveying assembly is connected with the loading cavity, and the heating assembly is connected with the unloading cavity;
wherein the conveying assembly is configured and adapted to convey at least two workpieces in the loading cavity to at least two vacuum heating devices respectively for heating, and convey the at least two heated workpieces from the vacuum heating devices to the unloading cavity;
at least two vacuum heating devices are connected in series;
the transfer assembly includes:
a transfer wheelset, the transfer wheelset comprising:
the conveying wheels are respectively arranged in the loading cavity, the unloading cavity and the vacuum heating device;
the carrier plate is arranged on the conveying wheel set, the conveying wheel rotates to drive the carrier plate to move on the conveying wheel set, and the carrier plate is configured to be suitable for carrying the workpiece;
the number of the transmission wheel sets is the same as that of the vacuum heating devices, and different transmission wheel sets are positioned on different planes;
the number of the carrier plates is the same as that of the vacuum heating devices, and each conveying wheel set is provided with one carrier plate.
2. The plating film production apparatus according to claim 1, wherein the vacuum heating device comprises:
a heating box;
the heater is arranged in the heating box;
the lifting device is arranged on the heating box and connected with the heater, and the lifting device lifts or lowers the heater.
3. The plating film production apparatus according to claim 1, wherein the transfer wheel group further comprises:
the telescopic device is arranged in the loading cavity, the unloading cavity and the vacuum heating device are connected with the conveying wheel.
4. The plating film production apparatus according to claim 2, wherein a grid is provided on the carrier plate, the work piece being embedded on the grid;
the heater is provided with grooves corresponding to the grids, and after the heater in the lifting process is contacted with the workpiece, the grids fall into the grooves.
5. The plating film production apparatus according to any one of claims 1 to 4, further comprising:
one end of the first vacuum gate valve is connected with the loading cavity, and the other end of the first vacuum gate valve is connected with the feeding end;
one end of the second vacuum gate valve is connected with the discharging cavity, and the other end of the second vacuum gate valve is connected with the discharging end;
and two ends of the third vacuum gate valve are respectively connected with different vacuum heating devices.
6. The plating film production apparatus according to any one of claims 1 to 4, further comprising:
and a third vacuum pump connected to the vacuum heating apparatus, the third vacuum pump configured to pump gas from the vacuum heating apparatus.
7. The plating film production apparatus according to any one of claims 1 to 4, further comprising:
the first large valve is arranged on the loading cavity and opens or closes a feed inlet on the loading cavity;
the second large valve is arranged on the load-out cavity and opens or closes a discharge hole on the load-out cavity.
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| CN112226745A (en) * | 2020-10-29 | 2021-01-15 | 常州捷佳创精密机械有限公司 | Silicon wafer processing equipment |
| CN112626485A (en) * | 2020-12-31 | 2021-04-09 | 广东谛思纳为新材料科技有限公司 | PVD (physical vapor deposition) continuous coating equipment and coating method |
| CN114774890A (en) * | 2022-04-13 | 2022-07-22 | 江苏微导纳米科技股份有限公司 | Thin film deposition device and supporting mechanism thereof |
| CN115852335A (en) * | 2022-10-17 | 2023-03-28 | 江苏微导纳米科技股份有限公司 | Film coating equipment and film coating method |
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