CN111256808A - Optical fiber micro-opto-electro-mechanical system ultrasonic sensor with composite membrane structure and manufacturing method thereof - Google Patents
Optical fiber micro-opto-electro-mechanical system ultrasonic sensor with composite membrane structure and manufacturing method thereof Download PDFInfo
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- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The invention discloses an optical fiber micro-optical-electromechanical system ultrasonic sensor with a composite membrane structure and a manufacturing method thereof. The invention can adjust the optical path difference of incident light with different wavelengths, realizes the integral consistency of the optical path difference of each wavelength of broadband incident light, realizes stable optical interference and improves the linear range of signal demodulation. The invention adopts a composite film structure, improves the response frequency range and the sound pressure intensity bearing range of the sensitive membrane, and can be applied to the ultrasonic detection of wide bandwidth and large pressure intensity.
Description
Technical Field
The invention belongs to the field of sensors, and particularly relates to an optical fiber micro-opto-electro-mechanical system ultrasonic sensor with a composite membrane structure and a manufacturing method thereof.
Background
The optical fiber micro-optical electromechanical system sound wave sensing structure is the interdisciplinary field of the optical fiber sensing technology and the micro-optical electromechanical system technology, and the optical fiber ultrasonic technology has obviously received wide attention since the optical fiber ultrasonic technology has the advantages of anti-electromagnetic interference, suitability for long-distance transmission, high sensitivity and the like after being reported in the last 70 th century. For the sound wave measurement under the environment of small space, strong corrosivity, high voltage and strong electromagnetism, the traditional electronic ultrasonic device can not work normally, the optical fiber sound wave sensor can transmit ultrasonic information remotely and accurately under the detection environment, the high-sensitivity detection is realized through the all-optical structure, the optical fiber sound wave sensor can be used for sound wave detection in aviation and liquid, the detection distance is far higher than that of a common sound wave sensor, and the advantages fully show the great superiority of the optical fiber sound wave sensor. The development of the optical fiber sensing technology has also become one of the international hot spot technical fields over 40 years, and compared with the traditional electric sensor, the optical sensor adopts an all-fiber structure, has the advantages of being passive and anti-electromagnetic interference, and can detect sound wave signals in different environments. The optical fiber sensor based on the optical fiber F-P cavity structure is more compact and easier to produce than optical sensors such as Bragg grating and optical fiber axis winding. Recently, F-P interferometric sensors have been designed and applied in various medical and industrial research fields, such as temperature sensing, pressure sensing, humidity sensing and acoustic wave detection.
However, the prior art has the following disadvantages: 1. residual stress generally exists in the sensing film with a single structure in the manufacturing process, which greatly limits the response sensitivity; 2. the sensing film material with a single structure cannot adjust the refractive index of wide-bandwidth incident light, which causes the ultrasonic signal to be weakened, blanked or distorted, and is not beneficial to demodulation and analysis of the ultrasonic signal.
Disclosure of Invention
Aiming at the defects in the prior art, the optical fiber micro-opto-electro-mechanical system ultrasonic sensor with the composite film structure and the manufacturing method thereof provided by the invention solve the problems in the prior art.
In order to achieve the purpose of the invention, the invention adopts the technical scheme that: an optical fiber micro-opto-electromechanical system ultrasonic sensor with a composite membrane structure comprises a Fabry-Perot interference cavity, wherein the Fabry-Perot interference cavity comprises a cavity body and a composite type thin film aligned with one end face of the cavity body;
the cavity comprises an outer glass tube, a capillary glass tube and a single-mode optical fiber are arranged inside the outer glass tube, one end face of the capillary glass tube is aligned with the other end face of the cavity, one end of the single-mode optical fiber is arranged inside the outer glass tube through the capillary glass tube, and the single-mode optical fiber is aligned to the center of the composite film.
Furthermore, the composite film is composed of a lower silicon nitride film and an upper silicon oxide film, and is fixed on one end face of the cavity through a silicon substrate.
Furthermore, the thickness of the composite film is 400nm, the area of the composite film is 1.5mm, an annular corrugated structure which takes the center of the composite film as the center of a circle is arranged on the composite film, and the distance between the annular corrugated structure and the edge of the composite film ranges from 0.1mm to 0.2 mm.
Furthermore, the cavity length of the Fabry-Perot interference cavity is 109 +/-2 microns, the free spectrum acquisition range of the interference spectrum is 12nm, and the spectral contrast is 40 dB.
The invention has the beneficial effects that:
(1) the invention realizes the consistency of the reflection rate of the broadband incident light wave by adjusting the integral refractive index of the composite film, and is beneficial to the demodulation and analysis of the sound wave signal.
(2) The invention increases the frequency range of sound wave detection of the sensor by adding a layer of silicon oxide structure, is beneficial to ultrasonic detection, and meanwhile, the thick film can increase the bearing range and can be applied to ultrasonic detection of large pressure.
(3) The invention ensures that the spectral contrast is up to 40dB by designing the composite diaphragm, thereby remarkably improving the response sensitivity of the sensor, and the minimum detection sound pressure is as low as 4.55 mu PaHz-1/2。
(4) The invention has the advantages of small volume, high sensitivity, electromagnetic interference resistance and the like, and can meet the requirement of high-sensitivity sound wave signal detection in a complex environment.
A manufacturing method of an optical fiber micro-opto-electro-mechanical system ultrasonic sensor with a composite film structure is characterized by comprising the following steps:
s1, processing the photoetching mask plate with the annular structure by the photoetching technology of the micro-opto-electro-mechanical system to obtain a primarily processed photoetching mask plate;
s2, transferring the structural pattern on the primarily processed photoetching mask plate by using a silicon nitride film etching technology to obtain a silicon nitride film;
s3, taking the geometric center of the silicon nitride film as the center of a circle, and growing a silicon oxide layer on the edge of the silicon nitride film in a divergent mode;
s4, polishing the silicon oxide layer, and performing high-temperature annealing treatment on the silicon oxide layer in oxygen to form a compact silicon oxide seed layer on the surface of the silicon nitride film;
s5, based on the silicon oxide seed layer, a silicon oxide film layer grows from the silicon nitride film to the circle center in an aggregation manner to obtain a composite film, and the composite film is cut into square membranes;
s6, arranging a capillary glass tube (5) in the outer glass tube (4) to obtain a cavity;
s7, fixing the composite film on one end face of the outer glass tube (4) through a silicon substrate to obtain a sensing probe;
and S8, inserting the single-mode optical fiber (6) into the cavity through the capillary glass tube (5), aligning the single-mode optical fiber (6) with the center of the composite film, and enabling the end face of the single-mode optical fiber (6) and the composite film to form a Fabry-Perot interference cavity to obtain the optical fiber micro-optical-electro-mechanical system ultrasonic sensor.
Further, the thickness of the silicon nitride film in the step S2 is 800 nm.
Further, the thickness of the silicon oxide thin film layer in the step S5 is 200nm, and the size of the square diaphragm in the step S5 is 1.5mm × 1.5 mm.
Further, the inner diameter of the outer glass tube in the step S6 is 2.2mm, and the inner diameter of the capillary glass tube in the step S6 is 0.12mm and the outer diameter thereof is 2.1 mm.
The invention has the beneficial effects that:
(1) according to the invention, a layer of silicon oxide is grown on the silicon nitride sensitive film, so that the influence of residual stress on the silicon nitride in the growth process is reduced, and the sensitivity of the sensing structure is obviously improved.
(2) The optical fiber micro-opto-electro-mechanical system ultrasonic sensor is simple to manufacture and small in size.
Drawings
FIG. 1 is a schematic diagram of an optical fiber micro-opto-electro-mechanical system ultrasonic sensor with a composite film structure according to the present invention;
FIG. 2 is a schematic diagram of a signal demodulation system according to the present invention;
FIG. 3 is a flow chart of a method for manufacturing an ultrasonic sensor of an optical fiber micro-opto-electro-mechanical system according to the present invention;
FIG. 4 is a schematic diagram of compensation of optical path length for broadband light reflection;
FIG. 5 is a schematic diagram of distribution of residual stress;
wherein: 1-silicon base, 2-silicon nitride film, 3-silicon oxide film, 4-outer glass tube, 5-capillary glass tube, 6-single mode fiber, 7-light source, 8-circulator, 9-fiber micro-optical-electro-mechanical-system ultrasonic sensor, 10-wavelength division multiplexer, 11-photoelectric detector, 12-data acquisition card, 13-computer.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and it will be apparent to those skilled in the art that various changes may be made without departing from the spirit and scope of the invention as defined and defined in the appended claims, and all matters produced by the invention using the inventive concept are protected.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1, an optical fiber micro-optical-electromechanical system ultrasonic sensor with a composite film structure includes a fabry-perot interference cavity, where the fabry-perot interference cavity includes a cavity and a composite film aligned with an end face of the cavity;
the cavity includes outer glass tube 4, outer glass tube 4 is inside to be provided with capillary glass tube 5 and single mode fiber 6, another terminal surface of a terminal surface and the cavity of capillary glass tube 5 aligns, single mode fiber 6's one end passes through capillary glass tube 5 and sets up inside outer glass tube 4, and its center of aiming at compound film.
The composite film is composed of silicon nitride 2 at the lower layer and silicon oxide 3 at the upper layer, and is fixed on one end face of the cavity through a silicon substrate 1.
The composite film is 400nm thick, 1.5mm in area, an annular corrugated structure with the center of the composite film as the center of a circle is arranged on the composite film, and the distance between the annular corrugated structure and the edge of the composite film ranges from 0.1mm to 0.2 mm.
The cavity length of the Fabry-Perot interference cavity is 109 +/-2 mu m, the free spectrum acquisition range of the interference spectrum is 12nm, and the spectral contrast is 40 dB.
In this embodiment, a signal demodulation system is required to demodulate an optical signal;
as shown in fig. 2, the signal demodulation system includes a light source 7, a circulator 8, a wavelength division multiplexer 10, a photodetector 11, a data acquisition card 12, and a computer 13, which are connected in sequence, wherein the circulator 8 is further connected to an optical fiber MOEMS ultrasound sensor 9.
The working principle of the invention is as follows: an optical signal is generated by a light source 7, the optical signal enters an optical fiber MOEMS ultrasonic sensor 9 through a circulator 8, reflected light is generated by the optical fiber MOEMS ultrasonic sensor 9, the reflected light is transmitted to a wavelength division multiplexer 10 through the circulator 8 and filtered into optical signals with 3 wavelengths, the optical signals are converted into electric signals through a photoelectric detector 11, and the electric signals are collected through a data acquisition card 12 and sent to a computer 13 for demodulation.
As shown in fig. 3, a method for manufacturing an optical fiber micro-opto-electro-mechanical system ultrasonic sensor with a composite film structure includes the following steps:
s1, processing the photoetching mask plate with the annular structure by the photoetching technology of the micro-opto-electro-mechanical system to obtain a primarily processed photoetching mask plate;
s2, transferring the structural pattern on the primarily processed photoetching mask plate by using a silicon nitride film etching technology to obtain a silicon nitride film;
s3, taking the geometric center of the silicon nitride film as the center of a circle, and growing a silicon oxide layer on the edge of the silicon nitride film in a divergent mode;
s4, polishing the silicon oxide layer, and performing high-temperature annealing treatment on the silicon oxide layer in oxygen to form a compact silicon oxide seed layer on the surface of the silicon nitride film;
s5, based on the silicon oxide seed layer, a silicon oxide film layer grows from the silicon nitride film to the circle center in an aggregation manner to obtain a composite film, and the composite film is cut into square membranes;
s6, arranging a capillary glass tube 5 in the outer glass tube 4 to obtain a cavity;
s7, fixing the composite film on one end face of the outer glass tube 4 through a silicon substrate to obtain a sensing probe;
s8, inserting the single-mode optical fiber 6 into the cavity through the capillary glass tube 5, aligning the single-mode optical fiber 6 with the center of the composite film, and enabling the end face of the single-mode optical fiber 6 and the composite film to form a Fabry-Perot interference cavity to obtain the optical fiber micro-optical-electro-mechanical system ultrasonic sensor.
In the present embodiment, the capillary glass tube 5 is fixed in the outer glass tube 4 by a heat shrinkable tube.
The thickness of the silicon nitride film in the step S2 is 800nm, the thickness of the silicon oxide film layer in the step S5 is 200nm, the size of the square diaphragm in the step S5 is 1.5mm by 1.5mm, the inner diameter of the outer glass tube 4 in the step S6 is 2.2mm, and the inner diameter of the capillary glass tube 5 in the step S6 is 0.12mm and the outer diameter thereof is 2.1 mm.
The invention has the beneficial effects that: the invention realizes the consistency of the reflection rate of the broadband incident light wave by adjusting the integral refractive index of the composite film, and is beneficial to the demodulation and analysis of the sound wave signal. The invention increases the frequency range of sound wave detection of the sensor by adding the silicon oxide film 3, is beneficial to ultrasonic detection, and meanwhile, the thick film can increase the bearing range and can be applied to ultrasonic detection with large pressure. The invention ensures that the spectral contrast is up to 40dB by designing the composite diaphragm, thereby remarkably improving the response sensitivity of the sensor, and the minimum detection sound pressure is as low as 4.55 mu PaHz-1/2. The invention has the advantages of small volume, high sensitivity, electromagnetic interference resistance and the like, and can meet the requirement of high-sensitivity sound wave signal detection in a complex environment. The invention grows a layer of oxide on the silicon nitride film 2And the silicon film 3 reduces the influence of residual stress on the silicon nitride film 2 in the growth process, thereby obviously improving the sensitivity of the sensing structure. The optical fiber micro-opto-electro-mechanical system ultrasonic sensor is simple to manufacture and small in size.
As shown in fig. 4, the overall refractive index profile of the sensing diaphragm is adjusted by growing a silicon oxide film 3 on the surface of the silicon nitride film 2. When a wide bandwidth of incident light is reflected at different layered surfaces of the membrane, the same medium exhibits an increasing refractive index for different wavelengths of light as the wavelength increases. If λ1>λ2>λ3The thickness ratio of three media of the interference cavity, the silicon nitride film 2 and the silicon oxide film 3 is adjusted to ensure that the optical paths of the light with the three wavelengths are the same, so that the effects of realizing stable optical interference and improving the signal response intensity are achieved, wherein the thickness of the interference cavity is L, and the thickness of the silicon nitride film 2 is d1The thickness of the silicon oxide film 3 is d2。
As shown in fig. 5, a silicon oxide film 3 is grown on the surface of the silicon nitride film 2, and the residual stress of the sensing region is adjusted to the edge, so that the limitation of the residual stress on the sensitivity of the diaphragm is reduced, and the response sensitivity of the sensor is improved.
Claims (8)
1. The optical fiber micro-opto-electromechanical system ultrasonic sensor with the composite film structure is characterized by comprising a Fabry-Perot interference cavity, wherein the Fabry-Perot interference cavity comprises a cavity body and a composite film aligned with one end face of the cavity body;
the cavity includes outer glass pipe (4), outer glass pipe (4) inside is provided with capillary glass pipe (5) and single mode fiber (6), another terminal surface of another terminal surface with the cavity of capillary glass pipe (5) aligns, the one end of single mode fiber (6) is passed through capillary glass pipe (5) and is set up inside outer glass pipe (4), and its center of aiming at compound film.
2. The ultrasonic transducer of an optical fiber micro-optoelectromechanical system with a composite membrane structure as claimed in claim 1, wherein the composite membrane is composed of a lower silicon nitride membrane (2) and an upper silicon oxide membrane (3), and is fixed on one end face of the cavity through a silicon substrate (1).
3. The ultrasonic transducer of an optical fiber micro-opto-electro-mechanical system with a composite film structure according to claim 2, wherein the composite film has a thickness of 400nm and an area of 1.5mm x 1.5mm, the composite film is provided with an annular corrugated structure with the center of the composite film as the center of the circle, and the distance between the annular corrugated structure and the edge of the composite film is 0.1mm-0.2 mm.
4. The ultrasonic sensor of the optical fiber micro-optoelectromechanical system with the composite film structure as claimed in claim 1, wherein the cavity length of the Fabry-Perot interference cavity is 109 ± 2 μm, the free spectrum collection range of the interference spectrum is 12nm, and the spectral contrast is 40 dB.
5. A method for manufacturing an ultrasonic transducer of an optical fiber micro-optical-electromechanical system with a composite film structure as claimed in claim 1, comprising the steps of:
s1, processing the photoetching mask plate with the annular structure by the photoetching technology of the micro-opto-electro-mechanical system to obtain a primarily processed photoetching mask plate;
s2, transferring the structural pattern on the primarily processed photoetching mask plate by using a silicon nitride film etching technology to obtain a silicon nitride film;
s3, taking the geometric center of the silicon nitride film as the center of a circle, and growing a silicon oxide layer on the edge of the silicon nitride film in a divergent mode;
s4, polishing the silicon oxide layer, and performing high-temperature annealing treatment on the silicon oxide layer in oxygen to form a compact silicon oxide seed layer on the surface of the silicon nitride film;
s5, based on the silicon oxide seed layer, a silicon oxide film layer grows from the silicon nitride film to the circle center in an aggregation manner to obtain a composite film, and the composite film is cut into square membranes;
s6, arranging a capillary glass tube (5) in the outer glass tube (4) to obtain a cavity;
s7, fixing the composite film on one end face of the outer glass tube (4) through a silicon substrate to obtain a sensing probe;
and S8, inserting the single-mode optical fiber (6) into the cavity through the capillary glass tube (5), aligning the single-mode optical fiber (6) with the center of the composite film, and enabling the end face of the single-mode optical fiber (6) and the composite film to form a Fabry-Perot interference cavity to obtain the optical fiber micro-optical-electro-mechanical system ultrasonic sensor.
6. The method of claim 5, wherein the silicon nitride film in step S2 has a thickness of 800 nm.
7. The method of claim 5, wherein the thickness of the silicon oxide thin film layer in step S5 is 200nm, and the size of the square diaphragm in step S5 is 1.5mm by 1.5 mm.
8. The production method according to claim 5, wherein the inner diameter of the outer glass tube (4) in the step S6 is 2.2mm, and the inner diameter of the capillary glass tube (5) in the step S6 is 0.12mm and the outer diameter thereof is 2.1 mm.
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| CN111998932A (en) * | 2020-08-04 | 2020-11-27 | 北京航空航天大学 | Graphene corrugated film optical fiber F-P sound pressure sensor and manufacturing method thereof |
| CN112763052A (en) * | 2020-12-16 | 2021-05-07 | 华中科技大学 | Broadband acoustic wave sensor for anti-electronic monitoring |
| CN114152279A (en) * | 2021-11-08 | 2022-03-08 | 四川泛华航空仪表电器有限公司 | Detection method based on optical fiber low-light level liquid sensor detection system |
| CN114414031A (en) * | 2021-12-14 | 2022-04-29 | 西安理工大学 | Energy storage battery monitoring and early warning device and method |
| CN117968903A (en) * | 2024-03-28 | 2024-05-03 | 江苏光微半导体有限公司 | Assembled optical fiber F-P sound pressure sensing probe based on MEMS membrane |
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