CN111221075B - Optical device for generating Kerr frequency comb - Google Patents
Optical device for generating Kerr frequency comb Download PDFInfo
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- CN111221075B CN111221075B CN201811417346.6A CN201811417346A CN111221075B CN 111221075 B CN111221075 B CN 111221075B CN 201811417346 A CN201811417346 A CN 201811417346A CN 111221075 B CN111221075 B CN 111221075B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/2934—Fibre ring resonators, e.g. fibre coils
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Abstract
The invention relates to the technical field of optics, in particular to an optical device for generating a Kerr optical frequency comb. The optical device for generating a Kerr-frequency comb comprises: a first straight waveguide; the micro-ring resonant cavity comprises a second straight waveguide, a third straight waveguide and a bent waveguide; the second straight waveguide extends in a direction parallel to the first straight waveguide, the third straight waveguide inclines at a preset angle relative to the second straight waveguide, the third straight waveguide and the curved waveguide jointly form a closed ring structure, and the second straight waveguide is coupled with the first straight waveguide. The invention reduces the transmission loss of optical signals and effectively avoids the limitation of the coupling distance between the first straight waveguide and the micro-ring resonant cavity on the coupling efficiency.
Description
Technical Field
The invention relates to the technical field of optics, in particular to an optical device for generating a Kerr optical frequency comb.
Background
The Kerr optical frequency comb is composed of a series of coherent light rays with frequency distributed at equal intervals, wherein the coherent light rays are generated after single-frequency pump light input into an optical resonant cavity is subjected to the Kerr effect. Due to the development of ultrafast and nonlinear technologies and the increasing demand for high precision measurement, optical frequency combs have received much attention. The optical frequency comb is superior to femtosecond in time measurement and nanometer in length-to-measurement accuracy. The method is expected to realize breakthrough application in the aspects of precision measurement, chemical detectors, super lasers, long-distance communication, laser radars and the like. The ultra-high Q (quality factor) micro-ring resonator is used for generating Kerr frequency comb, and the principle is that continuous wave pump light with known frequency interacts with the ultra-high Q micro-ring resonator. The micro-ring resonant cavity can be prepared by an integration process, and has the advantages of simple structure, small volume and easy integration.
The conventional micro-ring resonant cavity is generally a closed circular ring structure, and the coupling efficiency between the micro-ring resonant cavity and the straight waveguide depends on the distance (i.e. coupling distance) between the micro-ring resonant cavity and the straight waveguide. Generally, the smaller the coupling pitch, the higher the coupling efficiency between the micro-ring resonator and the straight waveguide. On the one hand, the reduction of the coupling pitch causes great inconvenience to the device design; on the other hand, due to the limitation of the process technology, the coupling distance has a critical value, so that the improvement of the coupling efficiency between the micro-ring resonant cavity and the straight waveguide is limited.
Therefore, how to improve the coupling efficiency between the straight waveguide and the micro-ring resonator and reduce the optical loss is a technical problem to be solved urgently at present.
Disclosure of Invention
The invention provides an optical device for generating a Kerr frequency comb, which is used for solving the problem of high optical loss of the conventional Kerr frequency comb generating device.
In order to solve the above problems, the present invention provides an optical apparatus for generating a kerr-frequency comb, comprising:
a first straight waveguide;
the micro-ring resonant cavity comprises a second straight waveguide, a third straight waveguide and a bent waveguide; the second straight waveguide extends in a direction parallel to the first straight waveguide, the third straight waveguide inclines at a preset angle relative to the second straight waveguide, the third straight waveguide and the curved waveguide jointly form a closed ring structure, and the second straight waveguide is coupled with the first straight waveguide.
Preferably, the preset angle is 90 degrees.
Preferably, the second straight waveguide and the third straight waveguide are both one or more, and the curved waveguide is an arc waveguide.
Preferably, the curved waveguide comprises a first circular arc waveguide and a second circular arc waveguide with the same curvature radius; the first arc-shaped waveguide is used for connecting the adjacent second straight waveguides, the second arc-shaped waveguide is used for connecting the second straight waveguide and the third straight waveguide, and the arc length of the first arc-shaped waveguide is larger than that of the second arc-shaped waveguide.
Preferably, the closed loop structure comprises:
a plurality of first rings extending in a direction parallel to the first straight waveguide, the plurality of first rings being arranged in a direction perpendicular to the first straight waveguide;
a second ring inclined at the predetermined angle with respect to the first ring and communicating with ends of the first rings.
Preferably, the closed ring structure is an E-shaped closed ring structure formed by three first rings and one second ring.
Preferably, the first straight waveguide comprises an input end and an output end which are distributed oppositely, and the second ring forming the E-shaped closed ring structure is communicated with the end part of the first ring close to the input end.
Preferably, the second straight waveguide, the third straight waveguide and the curved waveguide have the same cross-sectional size.
Preferably, the micro-ring resonator further includes a plurality of coupling structures for connecting the second straight waveguide, the third straight waveguide and the curved waveguide.
Preferably, the second straight waveguide, the third straight waveguide and the curved waveguide are made of silicon nitride.
The optical device for generating the Kerr optical frequency comb comprises a micro-ring resonant cavity and a micro-ring resonant cavity, wherein the micro-ring resonant cavity comprises a closed ring structure formed by a second straight waveguide, a third straight waveguide and a bent waveguide, and the coupling of the micro-ring resonant cavity and a first straight waveguide is realized by utilizing the second straight waveguide parallel to the first straight waveguide; on the other hand, the invention can change the coupling efficiency by adjusting the length of the second straight waveguide coupled with the first straight waveguide, thereby realizing critical coupling, achieving the highest extinction ratio and effectively avoiding the limitation of the coupling distance between the first straight waveguide and the micro-ring resonant cavity to the coupling efficiency. Meanwhile, the optical device for generating the Kerr optical frequency comb provided by the invention has the advantages of simple structure, convenience in processing and strong expansibility, thereby having wide application field.
Drawings
FIG. 1 is a schematic diagram of an optical device for generating a Kerr frequency comb in accordance with an embodiment of the present invention;
fig. 2 is a schematic diagram of another optical device for generating a kerr-frequency comb according to an embodiment of the present invention.
Detailed Description
The following describes in detail an embodiment of an optical apparatus for generating a kerr-frequency comb according to the present invention with reference to the accompanying drawings.
The present embodiment provides a schematic structural diagram of an optical device for generating a kerr-frequency comb, and fig. 1 is a schematic structural diagram of an optical device for generating a kerr-frequency comb according to an embodiment of the present invention.
As shown in fig. 1, the optical device for generating a kerr-frequency comb according to the present embodiment includes:
a first straight waveguide 10;
the micro-ring resonant cavity comprises a second straight waveguide 11, a third straight waveguide 12 and a bent waveguide; the second straight waveguide 11 extends in a direction parallel to the first straight waveguide 10, the third straight waveguide 12 is inclined at a preset angle with respect to the second straight waveguide 11, the third straight waveguide 12 and the curved waveguide together form a closed loop structure, and the second straight waveguide 11 is coupled with the first straight waveguide 10.
Specifically, the second straight waveguide 11, the third straight waveguide 12 and the curved waveguide form the closed ring structure in an end-to-end connection manner. The first straight waveguide 10 and the second straight waveguide 11 both extend along the X-axis direction in fig. 1, and a projection overlapping region of the first straight waveguide 10 and the second straight waveguide 11 in the Y-axis direction constitutes a coupling region 14. The first straight waveguide 10 includes an input end 101 and an output end 102 which are oppositely distributed, and the pumping light enters the first straight waveguide 11 through the input end 101. The optical signal enters the second straight waveguide 11 at the coupling region 14 by means of evanescent coupling. And the optical signal entering the micro-ring resonant cavity generates resonance in the closed ring structure to generate the Kerr optical frequency comb. The generated kerr optical frequency comb signal is output through the output terminal 102.
In the micro-ring resonator provided by the present embodiment, the closed ring structure is formed by the straight waveguide and the curved waveguide, so that the proportion of the straight waveguide in the closed ring structure is increased, and the propagation loss of the optical signal is reduced. Meanwhile, since the projection overlapping region of the second straight waveguide 11 and the first straight waveguide 10 in the direction perpendicular to the first straight waveguide 10 forms a coupling region, the coupling length is changed by adjusting the length of the second straight waveguide 11, so that the coupling efficiency is changed, and the change of the coupling length does not affect other structures, so that critical coupling can be realized, the highest extinction ratio is achieved, and the limitation of the coupling distance between the first straight waveguide 10 and the micro-ring resonant cavity on the coupling efficiency is effectively avoided. Meanwhile, the optical device for generating the kerr optical frequency comb has the advantages of being simple in structure, high in integration level, convenient to process and the like, and has a plurality of potential applications in the fields of metrology, ultrafast nonlinear optics, high-precision spectroscopy and the like.
The specific value of the preset angle can be set by those skilled in the art according to actual needs, for example, according to the comb tooth frequency of the kerr optical frequency comb, the wavelength of the pump optical signal, and the like. In order to simplify the manufacturing process, it is preferable that the predetermined angle is 90 degrees.
Preferably, the second straight waveguide 11 and the third straight waveguide 13 are one or more, and the curved waveguide is an arc waveguide. More preferably, the curved waveguide includes a first circular arc waveguide 131 and a second circular arc waveguide 132 having the same radius of curvature; the first circular arc-shaped waveguide 131 is used for connecting the adjacent second straight waveguides 11, the second circular arc-shaped waveguide 132 is used for connecting the second straight waveguides 11 and the third straight waveguides 13, and the arc length of the first circular arc-shaped waveguide 131 is greater than that of the second circular arc-shaped waveguide 132.
For example, as shown in fig. 1, the first straight waveguide 10 and the second straight waveguide 11 both extend along the X-axis direction, the third straight waveguide 12 extends along the Y-axis direction, a plurality of (6 in fig. 1) second straight waveguides 11 are sequentially arranged along the Y-axis direction, adjacent second straight waveguides 11 are connected by the first circular arc-shaped waveguide 131, and the second straight waveguides 11 and the third straight waveguides 12 are connected by the second circular arc-shaped waveguide 132. The lengths of the plurality of second straight waveguides 11 may be the same or different.
Preferably, the closed loop structure comprises:
a plurality of first rings 151, the first rings 151 extending in a direction parallel to the first straight waveguide 10, and the plurality of first rings 151 being arranged in a direction perpendicular to the first straight waveguide 10;
a second ring 152 inclined at the predetermined angle with respect to the first ring 151, the second ring 152 communicating with ends of the first rings 151.
The first rings 151 may be equally spaced in a direction perpendicular to the first straight waveguide 10, or may be unequally spaced. The present embodiment will be described by taking an example in which the closed ring structure is an E-shaped closed ring structure composed of three first rings 151 and one second ring 152. As shown in fig. 1, the first ring 151 extends in the X-axis direction, and the second ring 152 extends in the Y-axis direction perpendicular to the X-axis direction. The E-shaped closed ring comprises three first rings 151 sequentially arranged along the Y-axis direction, and the second ring 152 is simultaneously communicated with the three first rings 151. The lengths of the three first rings 151 along the X-axis direction may be the same or different, and those skilled in the art may set the lengths according to actual needs.
In an optical device for generating a Kerr optical frequency comb, in order to reduce the frequency interval of comb teeth of the generated optical frequency comb, the circumferential length of the closed ring structure needs to be a certain value. Compared with the annular micro-ring resonant cavity in the prior art, the implementation mode adopts the E-shaped closed ring structure, so that the area of the closed ring structure can be reduced on the premise of meeting the requirement of the perimeter, and the layout utilization rate is improved, thereby better realizing the miniaturization of devices and finally realizing the improvement of the chip integration level.
In other embodiments, the closed loop structure may also be composed of 2 or more than 4 first loops 151 and a second loop 152, forming a closed loop structure similar to a comb shape. In the comb-shaped closed ring structure, a plurality of first rings 151 are sequentially arranged along a direction perpendicular to the first straight waveguide 10 to form teeth of the comb-shaped closed ring structure; the second ring 152 is simultaneously communicated with all the first rings 151 to form a comb handle of the comb-shaped closed ring structure. Fig. 2 is a schematic diagram of another optical device for generating a kerr-frequency comb according to an embodiment of the present invention. The closed ring structure in fig. 2 is a "[" structure formed by two first rings 151 and one second ring 152.
Preferably, the first straight waveguide 10 includes an input end 101 and an output end 102 which are oppositely distributed, and the second ring 152 constituting the E-shaped closed ring structure is communicated with the end of the first ring 151 close to the input end 101, as shown in fig. 1.
For convenience of processing and simplification of the manufacturing process, it is preferable that the second straight waveguide 11, the third straight waveguide 12, and the curved waveguide have the same cross-sectional size.
In order to further reduce the propagation loss of the optical signal, it is preferable that the micro-ring resonator further includes a plurality of coupling structures for connecting the second straight waveguide 11, the third straight waveguide 12 and the curved waveguide. That is, the present embodiment connects the straight waveguide and the curved waveguide through the coupling structure. Specifically, the second straight waveguide 11 and the first circular arc waveguide 131, the second straight waveguide 11 and the second circular arc waveguide 132, and the third straight waveguide and the second circular arc waveguide 132 are connected by the coupling structure. The specific type of the coupling structure may be selected by a person skilled in the art according to actual needs, as long as the coupling of the optical signal between the straight waveguide and the curved waveguide can be achieved.
In this embodiment, the materials of the second straight waveguide 11, the third straight waveguide 12 and the curved waveguide can be selected by those skilled in the art according to actual needs, and the present embodiment does not limit this, and any material may be used as long as it can generate a kerr optical frequency comb, such as silicon nitride, aluminum nitride or silicon. Preferably, the second straight waveguide 11, the third straight waveguide 12 and the curved waveguide are made of silicon nitride. More preferably, the material of the first straight waveguide 10 is also silicon nitride.
This is because silicon nitride not only has the advantages of low price, low transmission loss, compatibility with CMOS process, etc., but also has a high kerr nonlinear coefficient, and when the pump light energy coupled into the micro-ring resonator exceeds a certain threshold, the silicon nitride generates a kerr optical frequency comb by using nonlinear phenomena such as modulation instability, degenerate four-wave mixing, non-degenerate four-wave mixing, etc.
The optical device for generating the kerr optical frequency comb provided by the embodiment can be prepared by the following steps:
step 1, providing a substrate. The substrate may be an SOI (Silicon On Insulator) substrate, and the SOI substrate includes a bottom layer Silicon, a buried oxide layer, and a top layer Silicon sequentially arranged in a direction perpendicular to the SOI substrate.
And 2, forming a lower cladding layer on the surface of the substrate. Specifically, the lower cladding layer may be formed by depositing a silicon dioxide material on the top silicon surface of the SOI substrate by a PECVD (Plasma Enhanced Chemical Vapor Deposition) process.
And 3, forming a waveguide layer on the surface of the lower cladding layer. Specifically, a LPCVD (Low Pressure Chemical Vapor Deposition) process may be used to deposit a silicon nitride material on the surface of the lower cladding layer, and a waveguide layer including the first straight waveguide 10 and the micro-ring cavity pattern is formed by photolithography and etching processes.
And 4, forming an upper cladding layer for cladding the waveguide layer on the surface of the lower cladding layer. Specifically, a PECVD process may be used to deposit a silicon dioxide material on the surface of the lower cladding layer to form an upper cladding layer that coats the waveguide layer.
In the optical device for generating the kerr optical frequency comb according to the present embodiment, the micro-ring resonator includes a closed ring structure formed by a second straight waveguide, a third straight waveguide, and a curved waveguide, and the coupling between the micro-ring resonator and the first straight waveguide is realized by using the second straight waveguide parallel to the first straight waveguide, which increases the ratio of the straight waveguide in the micro-ring resonator, improves the coupling efficiency between the first straight waveguide and the micro-ring resonator, and reduces the propagation loss of the optical signal; on the other hand, the invention can change the coupling efficiency by adjusting the length of the second straight waveguide coupled with the first straight waveguide, thereby realizing critical coupling, achieving the highest extinction ratio and effectively avoiding the limitation of the coupling distance between the first straight waveguide and the micro-ring resonant cavity to the coupling efficiency. Meanwhile, the optical device for generating the Kerr optical frequency comb provided by the invention has the advantages of simple structure, convenience in processing and strong expansibility, thereby having wide application field.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. An optical device for generating a kerr-frequency comb, comprising:
a first straight waveguide;
the micro-ring resonant cavity comprises a second straight waveguide, a third straight waveguide and a bent waveguide; the second straight waveguide extends along a direction parallel to the first straight waveguide, the third straight waveguide inclines for a preset angle relative to the second straight waveguide, the third straight waveguide and the curved waveguide jointly form a closed ring structure, and the second straight waveguide is coupled with the first straight waveguide; the closed loop structure includes:
a plurality of first rings extending in a direction parallel to the first straight waveguide, the plurality of first rings being arranged in a direction perpendicular to the first straight waveguide;
a second ring inclined at the predetermined angle with respect to the first ring and communicating with ends of the first rings.
2. An optical device for generating a kerr-frequency comb as claimed in claim 1, wherein said predetermined angle is 90 degrees.
3. The optical device for generating a kerr-frequency comb as claimed in claim 2, wherein the second straight waveguide and the third straight waveguide are one or more, and the curved waveguide is a circular arc waveguide.
4. The optical device for generating a kerr-frequency comb according to claim 3, wherein the curved waveguide comprises a first circular-arc waveguide and a second circular-arc waveguide having the same radius of curvature; the first arc-shaped waveguide is used for connecting the adjacent second straight waveguides, the second arc-shaped waveguide is used for connecting the second straight waveguide and the third straight waveguide, and the arc length of the first arc-shaped waveguide is larger than that of the second arc-shaped waveguide.
5. The optical apparatus as claimed in claim 1, wherein said closed-loop structure is an E-shaped closed-loop structure formed by three first loops and one second loop.
6. An optical device for generating a kerr-frequency comb as claimed in claim 5, wherein said first straight waveguide comprises an input end and an output end which are oppositely distributed, and said second loop constituting said E-shaped closed loop structure communicates with an end of said first loop near said input end.
7. An optical device for generating a kerr-frequency comb as claimed in claim 1, wherein the second straight waveguide, the third straight waveguide and the curved waveguide have the same cross-sectional dimensions.
8. The optical apparatus for generating a kerr-frequency comb as recited in claim 7, wherein said micro-ring resonator further comprises a plurality of coupling structures for connecting said second straight waveguide, said third straight waveguide and said curved waveguide.
9. The optical apparatus of claim 1, wherein the second straight waveguide, the third straight waveguide and the curved waveguide are made of silicon nitride.
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| CN104932171A (en) * | 2015-06-23 | 2015-09-23 | 华中科技大学 | Micro-annular waveguide optical device used for generating optical frequency comb |
| US9891500B1 (en) * | 2017-01-05 | 2018-02-13 | City University Of Hong Kong | Systems and methods for optical frequency comb generation using a microring resonator |
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| WO2015012915A2 (en) * | 2013-04-22 | 2015-01-29 | Cornell University | Parametric comb generation via nonlinear wave mixing in high-q optical resonator coupled to built-in laser resonator |
| CN103411925A (en) * | 2013-07-12 | 2013-11-27 | 电子科技大学 | Cascade type Mach-Zehnder interference type optical biochemical sensor with arch-shaped ring structure |
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