CN111141221B - Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application - Google Patents
Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application Download PDFInfo
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- CN111141221B CN111141221B CN201911293635.4A CN201911293635A CN111141221B CN 111141221 B CN111141221 B CN 111141221B CN 201911293635 A CN201911293635 A CN 201911293635A CN 111141221 B CN111141221 B CN 111141221B
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Abstract
The invention discloses a method for preparing an optical fiber probe for a micro-displacement sensor, the micro-displacement sensor and application thereof, wherein an optical fiber with a cut and flat end part is vertically immersed in a mixed material solution, then the immersed optical fiber is taken out to enable the end surface to be parallel to a horizontal plane, the other end of the optical fiber is connected with a light source through an optical fiber collimator, the light source is turned on to enable the output power of the optical fiber to be 0.1uw-5uw and the duration time to be 1s-16s, the optical fiber light source is utilized to weaken the diffusion from the inside and the outside and weaken the length direction at the same time to enable the end part of the optical fiber to form a cone structure, and finally, the optical fiber probe structure is obtained through corrosion The explosion-proof, simple structure, small, light in weight can be used for high pressure, electrical noise, high temperature, corruption, or other adverse circumstances, simple structure and with low costs.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensors, and particularly relates to a preparation method of an optical fiber probe for a micro-displacement sensor, the micro-displacement sensor and application.
Background
At present, with the continuous development of manufacturing technology, the application of high-precision equipment and the like is more and more extensive, and the detection means such as the micro-displacement of high-precision equipment also presents challenges, and especially under the environment such as strong electromagnetic interference, the influence of factors such as space and installation can be received, how to carry out high-efficient, accurate micro-displacement detection, and it is significant to realize the displacement data of real-time monitoring high-precision equipment. At present, the main methods of micro-displacement sensing measurement include piezoelectric ceramics, grating imaging and the like, but the problems of low detection precision, high cost and the like generally exist.
Disclosure of Invention
The invention aims to provide a preparation method of an optical fiber probe for a micro-displacement sensor, the micro-displacement sensor and application, so as to overcome the defects of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a preparation method of an optical fiber probe for a micro-displacement sensor comprises the following steps:
step 1), cutting the end part of the optical fiber flat and vertically immersing the end part of the optical fiber into the mixed material solution to enable the plane of the end part of the optical fiber to be parallel to a horizontal plane;
step 2), taking the soaked optical fiber out to enable the end face of the optical fiber to be parallel to a horizontal plane, connecting the other end of the optical fiber with a light source through an optical fiber collimator, turning on the light source to enable the output power of the optical fiber to be 0.1-5 uw, and enabling the duration to be 1-16 s to obtain the optical fiber with the end part in a cone structure;
step 3), then removing impurities from one end of the optical fiber cone structure;
and 4) corroding one end of the optical fiber cone structure subjected to impurity removal treatment to obtain the optical fiber probe structure.
Further, removing the coating layer on the surface of the optical fiber, cutting the optical fiber by using a cutting machine to enable the end face of the optical fiber to be flush, then cutting the end part of the optical fiber to be flat, removing dirt and cleaning one end of the optical fiber, and soaking the optical fiber which is cleaned by removing dirt in the mixed material solution.
Further, the mixed material solution comprises the following components in percentage by mass: eosin Y disodium salt: 0.5% -2%, N-methyldiethanolamine: 8.0% -16% and pentaerythritol triacrylate: 91.5 to 82 percent.
Further, in the step 3), one end of the cone structure of the optical fiber is soaked in the absolute ethyl alcohol b, other residual material impurities on the surface of the generated cone structure can be dissolved in the absolute ethyl alcohol, the optical fiber is kept stand after the impurities are removed until the absolute ethyl alcohol is completely volatilized, and the impurity removal of the end part of the optical fiber is completed.
Further, the etching solution used for etching is a hydrofluoric acid solution.
Furthermore, the concentration of the hydrofluoric acid solution is 15% -75%.
A double-optical-fiber-probe micro-displacement sensor with an optical-fiber probe structure comprises two optical-fiber probes prepared according to claim 1, wherein the two optical-fiber probes are respectively fixed on two devices to be tested, the tips of the two optical-fiber probes are oppositely arranged, the tips of the two optical-fiber probes are positioned on the same straight line, the other end of one optical-fiber probe is connected with a broadband light source, and the other end of the other optical-fiber probe is connected with a wide spectrometer.
Further, the distance between the tips of the two optical fiber probes is 0um-6 um.
A micro-displacement detection method of a micro-displacement sensor with a double optical fiber probe comprises the following steps: the two optical fiber probes are respectively fixed on two devices to be tested, the tips of the two optical fiber probes are oppositely arranged, the tips of the two optical fiber probes are on the same straight line, the other end of one optical fiber probe is connected with the broadband light source, the other end of the other optical fiber probe is connected with the wide spectrometer, the broadband light source is opened, the spectrum change diagram is recorded through the spectrometer, and micro-displacement detection of the two devices to be tested is completed.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention relates to a preparation method of an optical fiber probe for a micro-displacement sensor, which comprises the steps of vertically immersing an optical fiber with a flattened end part into a mixed material solution, taking the immersed optical fiber out to enable the end surface of the optical fiber to be parallel to a horizontal plane, connecting the other end of the optical fiber with a light source through an optical fiber collimator, turning on the light source to enable the output power of the optical fiber to be 0.1-5 uw, keeping the output power for 1-16 s, weakening the end surface of the optical fiber by utilizing the diffusion from the inside and the outside of the optical fiber light source and weakening the length direction at the same time to enable the end part of the optical fiber; the method is simple, the double-fiber probe micro-displacement sensor based on the prepared fiber probe structure can realize the accurate detection of micro-displacement by utilizing the spectral sensitivity of the fiber tip structure, and the fiber structure has the advantages of high sensitivity, strong anti-electromagnetic interference capability, corrosion resistance, explosion resistance, simple structure, small volume, light weight, simple structure and low cost, can be used for high voltage, electrical noise, high temperature, corrosion or other severe environments.
The invention relates to a micro-displacement detection method of a micro-displacement sensor with double optical fiber probes, which is characterized in that two optical fiber probes are respectively fixed on two devices to be detected, the tips of the two optical fiber probes are oppositely arranged and are positioned on the same straight line, the other end of one optical fiber probe is connected with a broadband light source, the other end of the other optical fiber probe is connected with a broadband spectrometer, the broadband light source is turned on, and a spectrum change diagram is recorded by the spectrometer.
Drawings
FIG. 1 is a diagram showing a variation of the structure of the optical fiber probe according to the present invention.
FIG. 2 is a flow chart of the preparation of the optical fiber probe.
Fig. 3 is a schematic view of a micro-displacement detection structure of the micro-displacement sensor of the dual-fiber probe of the present invention.
Wherein, A, the end part is the optical fiber with a cone structure; B. an optical fiber probe structure; a. mixing the material solution; b. absolute ethyl alcohol; c. xylene; d. a hydrofluoric acid solution; 1. an optical fiber; 2. a fiber collimator; 3. an optical power attenuation sheet; 4. a light source; 5. a spectrometer; 6. a broadband light source.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
a preparation method of an optical fiber probe for a micro-displacement sensor comprises the following steps:
step 1), cutting the end part of the optical fiber flat and vertically immersing the end part of the optical fiber into the mixed material solution a to enable the plane of the end part of the optical fiber to be parallel to a horizontal plane;
specifically, removing a coating layer on the surface of the optical fiber, cutting the optical fiber by using a cutting machine to enable the end face of the optical fiber to be flush, then cutting the end part of the optical fiber to be flat, removing dirt and cleaning one end of the optical fiber, and soaking the optical fiber which is cleaned by removing dirt in a mixed material solution;
the mixed material solution comprises the following components in percentage by mass: eosin Y disodium salt: 0.5% -2%, N-methyldiethanolamine: 8.0% -16% and pentaerythritol triacrylate: 91.5 to 82 percent.
Step 2), taking the soaked optical fiber out to enable the end face of the optical fiber to be parallel to a horizontal plane, connecting the other end of the optical fiber with a light source through an optical fiber collimator, turning on the light source to enable the output power of the optical fiber to be 0.1-5 uw, and enabling the duration to be 1-16 s to obtain an optical fiber A with a cone structure at the end part; curing the mixed material solution adhered to the end part of the optical fiber by using a light source to form a cone structure;
step 3), soaking one end of the cone structure of the optical fiber in absolute ethyl alcohol b, dissolving other residual material impurities on the surface of the generated cone structure in the absolute ethyl alcohol, removing the impurities, standing the optical fiber until the absolute ethyl alcohol is completely volatilized, and removing impurities at the end part of the optical fiber;
step 4), corroding one end of the optical fiber taper structure after impurity removal to obtain an optical fiber probe structure B; wherein the etching solution used for etching is hydrofluoric acid solution, and the concentration of the hydrofluoric acid solution is 15-75%; and moving and immersing one end of the optical fiber cone structure subjected to impurity removal into a corrosive solution by adopting a micro-displacement platform in a corrosion process. The specific preparation process is shown in fig. 1, and B in fig. 1 is a finally obtained optical fiber probe structure with a tip structure, and the fiber cores of the formed optical fiber probe optical fibers are coaxial.
In the corrosion process, the hydrofluoric acid solution d is mixed with the xylene c to obtain a corrosion mixed solution, and the xylene solution can be suspended on the surface of hydrofluoric acid due to low density, so that the hydrofluoric acid can be prevented from volatilizing, the concentration of the hydrofluoric acid can not be reduced due to volatilization in the corrosion process, and the purpose of controlling the cone tip corrosion effect can be achieved by controlling the corrosion time.
The double-optical-fiber-probe micro-displacement sensor based on the optical fiber probe structure prepared by the method comprises two optical fiber probes with one ends of tip structures, the tips of the two optical fiber probes are oppositely arranged, the tips of the two optical fiber probes are positioned on the same straight line, the other end of one optical fiber probe is connected with a broadband light source, and the other end of the other optical fiber probe is connected with a wide spectrometer.
The distance between the tips of the two optical fiber probes is 0um-6 um.
The specific working process is that a broadband light source is turned on, at the moment, light is output to another optical fiber probe connected with a spectrometer from the optical fiber probe connected with the light source, so that the light source which can be received by the optical fiber probe connected with the spectrometer is weak, when the horizontal distance between the two optical fiber probes is changed or the longitudinal displacement is changed, the changes of the two distances are small, the change of the transverse displacement is from 0um to 100um, the change range of the longitudinal displacement is from 0um to 6um, the changes of the two displacements can cause the strong and weak changes of optical signals received by the optical fiber probe connected with the spectrometer, and further can cause the display change on the spectrometer, so that the purpose of detecting the transverse micrometric displacement and the longitudinal micrometric displacement is achieved.
A micro-displacement detection method of a micro-displacement sensor based on a double-optical-fiber probe comprises the following steps:
the two optical fiber probes are respectively connected with the broadband light source and the spectrometer, and the two optical fiber probes are kept in horizontal alignment, so that the fiber cores are ensured to be horizontally aligned. The broadband light source is turned on, at the moment, light is output to the other optical fiber probe connected with the spectrometer from the optical fiber probe connected with the light source, so that the light source which can be received by the optical fiber probe connected with the spectrometer is weak, when the horizontal distance or the longitudinal displacement of the two optical fiber probes is changed, the changes of the two distances are small, the change of the transverse displacement is from 0um to 100um, the change range of the longitudinal displacement is from 0um to 6um, the changes of the two displacements can cause the strong and weak change of an optical signal received by the optical fiber probe connected with the spectrometer, and further the display change on the spectrometer can be caused, and the purpose of detecting the transverse micrometric displacement and the longitudinal micrometric displacement is achieved.
Fig. 2 is a flow chart of a preparation process of the optical fiber probe, the light source adopts a narrow-band light source, the optical fiber 1 is sequentially connected with the optical fiber collimator 2, the optical power attenuation sheet 3 and the light source 4, the optical fiber collimator 2, the optical power attenuation sheet 3 and the light source 4 are on the same horizontal line, wherein the optical fiber collimator is connected with the optical fiber, the light source is firstly turned on, the output power of the optical fiber connected with the optical fiber collimator is 0.1uw-5uw by adjusting the attenuation sheet, and then the light source is turned off. The preparation method comprises the following specific steps: removing a coating layer of an optical fiber, cutting the optical fiber by using a cutting machine to enable the end face of the optical fiber to be flush, and soaking the end face of the optical fiber in a mixed material solution; taking out the soaked optical fiber, attaching the optical fiber to a displacement platform, ensuring that the end face of the displacement platform is parallel to the horizontal plane, turning on a light source at the moment, and obtaining an optical fiber A with a cone-shaped end part for 1-16 s; soaking the end part of the cone structure of the optical fiber in absolute ethyl alcohol, dissolving impurities of other residual materials on the surface of the generated cone structure in the absolute ethyl alcohol, removing the impurities, and standing the optical fiber until the absolute ethyl alcohol is completely volatilized to obtain the needed coarse optical fiber probe structure; and a fourth part, as shown in fig. 2, the end of the optical fiber after removing impurities is etched by hydrofluoric acid to obtain an optical fiber probe with good tip performance, wherein the concentration of the hydrofluoric acid is from 15% to 75% because the tip length of the optical fiber probe is between 10um and 45 um. The etching solution used is composed of xylene and hydrofluoric acid of different solubilities. The xylene solution can suspend on the hydrofluoric acid surface because of density reason to can prevent that hydrofluoric acid from volatilizing, guarantee that the hydrofluoric acid concentration can not reduce because of volatilizing in the corrosion process, thereby can reach the purpose of control cone point corrosion effect through control corrosion time.
As shown in fig. 3, which is a schematic diagram of the operation of the dual fiber probe sensor, the micro-displacement detection process is very simple, two fiber probes are respectively connected to the broadband light source 6 and the spectrometer 5, and the two fiber probes are kept horizontally aligned, which ensures that the fiber cores are horizontally aligned. The specific working process is that a broadband light source is turned on, at the moment, light is output to another optical fiber probe connected with a spectrometer from the optical fiber probe connected with the light source, so that the light source which can be received by the optical fiber probe connected with the spectrometer is weak, when the horizontal distance between the two optical fiber probes is changed or the longitudinal displacement is changed, the changes of the two distances are small, the change of the transverse displacement is from 0um to 100um, the change range of the longitudinal displacement is from 0um to 6um, the changes of the two displacements can cause the strong and weak changes of optical signals received by the optical fiber probe connected with the spectrometer, and further can cause the display change on the spectrometer, so that the purpose of detecting the transverse micrometric displacement and the longitudinal micrometric displacement is achieved.
Claims (5)
1. A preparation method of an optical fiber probe for a micro-displacement sensor is characterized by comprising the following steps:
step 1), cutting the end part of the optical fiber flat and vertically immersing the end part of the optical fiber into the mixed material solution to enable the plane of the end part of the optical fiber to be parallel to a horizontal plane; specifically, the method comprises the following steps: removing a coating layer on the surface of the optical fiber, cutting the optical fiber by using a cutting machine to enable the end face of the optical fiber to be flush, then flattening one end of the end part of the optical fiber, removing dirt and cleaning, and then soaking the optical fiber which is cleaned by removing dirt in a mixed material solution; the mixed material solution comprises the following components in percentage by mass: eosin Y disodium salt: 0.5% -2%, N-methyldiethanolamine: 8.0% -16% and pentaerythritol triacrylate: 91.5% -82%;
step 2), taking the soaked optical fiber out to enable the end face of the optical fiber to be parallel to a horizontal plane, connecting the other end of the optical fiber with a light source through an optical fiber collimator, turning on the light source to enable the output power of the optical fiber to be 0.1-5 uw, and enabling the duration to be 1-16 s to obtain the optical fiber with the end part in a cone structure;
step 3), then, impurity removal treatment is carried out on one end of the optical fiber cone structure: soaking one end of the cone structure of the optical fiber in absolute ethyl alcohol for impurity removal, and standing the optical fiber after removing the impurities until the absolute ethyl alcohol is completely volatilized to finish the impurity removal of the end part of the optical fiber;
and 4) corroding one end of the optical fiber cone structure subjected to impurity removal treatment to obtain the optical fiber probe structure.
2. The method as claimed in claim 1, wherein the etching solution for etching is hydrofluoric acid solution.
3. The method for preparing an optical fiber probe for a micro-displacement sensor according to claim 1, wherein the concentration of the hydrofluoric acid solution is 15% -75%.
4. The double-optical-fiber-probe micro-displacement sensor with the optical-fiber-probe structure is characterized by comprising two optical-fiber probes prepared according to claim 1, wherein the two optical-fiber probes are respectively fixed on two devices to be tested, the tips of the two optical-fiber probes are oppositely arranged, the tips of the two optical-fiber probes are positioned on the same straight line, the other end of one optical-fiber probe is connected with a broadband light source, the other end of the other optical-fiber probe is connected with a wide spectrometer, and the tip distance of the two optical-fiber probes is 0-6 um.
5. A micro-displacement detection method of a micro-displacement sensor based on the dual-fiber probe of claim 4, which comprises the following steps: the two optical fiber probes are respectively fixed on two devices to be tested, the tips of the two optical fiber probes are oppositely arranged, the tips of the two optical fiber probes are on the same straight line, the other end of one optical fiber probe is connected with the broadband light source, the other end of the other optical fiber probe is connected with the wide spectrometer, the broadband light source is opened, the spectrum change diagram is recorded through the spectrometer, and micro-displacement detection of the two devices to be tested is completed.
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| CN102645168A (en) * | 2012-05-16 | 2012-08-22 | 中国工程物理研究院流体物理研究所 | System for measuring nanometer micrometric displacement based on full-fiber frequency domain interference |
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| CN108180840B (en) * | 2018-01-06 | 2018-10-19 | 张彪 | A kind of optical fiber micro-displacement sensing and means for correcting and method |
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