CN111136001A - Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof - Google Patents
Mechanical groove enhanced differential piezoelectric ultrasonic transducer and working method thereof Download PDFInfo
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Abstract
The invention provides a mechanical groove enhanced differential piezoelectric ultrasonic transducer and a working method thereof. The ultrasonic transducer comprises an ultrasonic transducer body, wherein the ultrasonic transducer body comprises a basal layer, a stopping layer, an elastic layer, a bottom electrode and a piezoelectric layer, the basal layer is provided with a cavity at the bottom, the stopping layer is fixedly arranged on the basal layer, the elastic layer, the bottom electrode and the piezoelectric layer are sequentially arranged from the basal layer to the stopping layer, a top inner electrode is arranged on the piezoelectric layer, the periphery of the top inner electrode is provided with a top outer electrode in a surrounding mode, a mechanical cell group is arranged between the top inner electrode and the top outer electrode, and the opening of. The ultrasonic transducer has a simple structure, the design of the differential electrode of the top inner electrode and the top outer electrode enables the ultrasonic transducer to work in a differential electrode working mode, signals in an ideal state of the mode are doubly multiplied stronger than a single electrode working mode, and meanwhile, the design of the mechanical groove can also enhance output signals and sensitive signals of the ultrasonic transducer, so that the sensing sensitivity of the ultrasonic transducer is improved.
Description
Technical Field
The invention relates to the technical field of ultrasonic detection, in particular to a mechanical groove enhanced differential piezoelectric ultrasonic transducer applied to the fields of distance measurement, gesture recognition, liquid flow velocity, flow measurement and the like and a working method thereof.
Background
An ultrasonic detection (sensing) technique is a technique for detecting physical parameters such as distance, flow velocity, and flow rate by using characteristics such as good directivity, strong directivity, and small attenuation of ultrasonic waves, as one of acoustic sensing techniques. The piezoelectric ultrasonic transducer is used as a core component of a high-end ultrasonic detection instrument, and is an energy conversion device for performing sound-electricity and electricity-sound conversion by utilizing a positive piezoelectric effect and an inverse piezoelectric effect. When the piezoelectric ultrasonic transducer is used as a transmitting end, the ultrasonic waves emitted by the piezoelectric ultrasonic transducer propagate in a medium due to the change of the physical environment in the medium (such as the propagation distance in the air, the propagation distance in the solid, the flow velocity of the liquid medium, the flow rate of the liquid medium and the like). Therefore, the specific parameters of the external physical quantity to be measured can be deduced by measuring the change of the cheaply measured electrical quantity, so that the aim of measuring the external physical quantity is fulfilled.
At present, in the field of ultrasonic transducers, the problems of small output signal, weak sensitive signal, low sensitivity, poor manufacturability, incapability of large-scale array and the like exist. In the using process of the ultrasonic transducer, a sensitive signal is a very important performance index, the strength of the sensitive signal is directly related to the sensitivity of the ultrasonic detector, and the sensitivity is directly related to the detection level of the ultrasonic detector, so that the sensitive signal is a very important static index of a detection instrument. The output signal is small, the sensitive signal is weak, the sensitivity is small, the ultrasonic transducer chip can not be normally used and can not play a performance role, and large-scale popularization and application can not be carried out.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a mechanical slot enhanced differential piezoelectric ultrasonic transducer and a working method thereof.
In order to achieve the above object, the present invention provides a mechanical groove enhanced differential piezoelectric ultrasonic transducer, which includes an ultrasonic transducer body, wherein the ultrasonic transducer body includes a base layer having a cavity at the bottom, a stop layer fixed on the base layer, and an elastic layer, a bottom electrode, and a piezoelectric layer sequentially arranged from the base layer to the stop layer, a top inner electrode is arranged on the piezoelectric layer, a top outer electrode is arranged around the top inner electrode, a mechanical groove group is arranged between the top inner electrode and the top outer electrode, and an opening of the mechanical groove group faces the piezoelectric layer.
The ultrasonic transducer has a simple structure, the design of the differential electrode of the top inner electrode and the top outer electrode enables the ultrasonic transducer to work in a differential electrode working mode, signals in an ideal state of the mode are doubly multiplied stronger than a single electrode working mode, and meanwhile, the design of the mechanical groove can also enhance output signals and sensitive signals of the ultrasonic transducer, so that the sensing sensitivity of the ultrasonic transducer is improved.
The preferred scheme of the mechanical groove enhanced differential piezoelectric ultrasonic transducer is as follows: the mechanical groove group comprises a first mechanical groove group and a second mechanical groove group, and the width of the first mechanical groove group is not smaller than that of the second mechanical groove group.
The first mechanical groove group comprises four first mechanical groove bodies, and the first mechanical groove bodies are uniformly distributed and circularly surround the center of the ultrasonic transducer body;
the second mechanical groove group comprises four second mechanical groove bodies, and the second mechanical groove bodies are uniformly distributed and circularly surround the center of the ultrasonic transducer body;
the bottom of the first mechanical groove body is provided with the second mechanical groove body, and the first mechanical groove body and the second mechanical groove body are arranged in a one-to-one correspondence mode.
The four first mechanical groove bodies and the four second mechanical groove bodies can influence the vibration condition of the ultrasonic transducer, the output signal and the sensitive signal of the differential piezoelectric ultrasonic transducer can be increased, and the sensitivity of the differential piezoelectric ultrasonic transducer is further increased.
The invention also provides a working method of the mechanical groove enhanced differential piezoelectric ultrasonic transducer, and the working mode of the ultrasonic transducer comprises a transmitting mode and a receiving mode;
when the ultrasonic transducer works in a transmitting mode, the ultrasonic transducer transmits sound waves, electric signals are applied to the top inner electrode and the top outer electrode, the bottom electrode of the ultrasonic transducer is grounded, the piezoelectric layer is excited to bend and vibrate by the inverse piezoelectric effect of the piezoelectric layer, the free moving part of the whole ultrasonic transducer is driven to vibrate in the same direction, and ultrasonic sound wave signals are generated outwards through the vibration of the ultrasonic transducer;
when the ultrasonic transducer works in a receiving mode, the ultrasonic transducer is controlled to be switched from a signal transmitting state to a signal receiving state to receive ultrasonic sound waves, and the ultrasonic transducer converts received sound wave signals into electric signals through piezoelectric layer sensitive sound waves and through the piezoelectric effect of the piezoelectric layer.
The working method enables the ultrasonic transducer to work in a transmitting mode and a receiving mode, and can effectively increase the output sound pressure level when the ultrasonic transducer is in the transmitting mode; when the chip is in a receiving mode, the output charge/voltage can be effectively increased, and the sensitivity of the chip to sound waves is improved.
The ultrasonic transducer can carry out a differential electrode working mode in both a transmitting mode and a receiving mode;
when the ultrasonic transducer works in a differential electrode working mode in a transmitting mode, the ultrasonic transducer transmits sound waves, and sinusoidal signals with the same frequency and 180-degree phase difference are respectively applied to the top inner electrode and the top outer electrode. The ultrasonic signal output of this mode of operation will be twice as enhanced as the ultrasonic signal output in the single electrode mode of operation.
When the ultrasonic transducer works in a differential electrode working mode in a receiving mode, the ultrasonic transducer receives ultrasonic sound waves and converts the ultrasonic sound waves into electric signals, and the top inner electrode and the top outer electrode are simultaneously used as electric signal output ends. The electrical signal output of this mode of operation will be twice as much enhanced as the electrical signal output in the single electrode mode of operation.
When the ultrasonic transducer works in a differential electrode working mode in a transmitting mode or a receiving mode, the intensity of an output signal can be multiplied by 2, namely, the sensing sensitivity can be improved by 2 times.
The ultrasonic transducer further comprises a single electrode mode of operation, i.e., a top inner electrode only mode of operation or a top outer electrode only mode of operation;
when the ultrasonic transducer works only on the top outer electrode, only the top outer electrode is applied with an electric field when the ultrasonic transducer works in a transmitting mode, and only the top outer electrode is used as a signal output electrode when the ultrasonic transducer works in a receiving mode; the top inner electrode is not externally connected with any circuit or is completely grounded;
when the ultrasonic transducer only works on the top inner electrode, only the top inner electrode is applied with an electric field when the ultrasonic transducer works in a transmitting mode, and only the top inner electrode is used as a signal output electrode when the ultrasonic transducer works in a receiving mode; the top external electrode is not connected to any external circuit or is grounded completely.
The invention has the beneficial effects that: the invention adopts a design mode of mechanical groove output increasing, combines the uniform-interval circular symmetrical layout of large and small mechanical grooves (a first mechanical groove body and a second mechanical groove body), and the large and small mechanical grooves at corresponding positions are contacted with each other to form a trapezoid (or a non-trapezoid), thereby achieving the purposes of increasing output signals, enhancing sensitive signals and increasing sensitivity; meanwhile, the invention can adopt a novel micro-processing technology, so that the ultrasonic transducer can be produced and prepared in a product level, thereby achieving large-scale array, improving the application capability and the application range and finally achieving large-scale popularization and application.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic top view of the present mechanical tank enhanced differential piezoelectric ultrasonic transducer;
FIG. 2 is a first cross-sectional view taken along line A-A' of FIG. 1;
fig. 3 is a second cross-sectional view taken along line a-a' of fig. 1.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, unless otherwise specified and limited, it is to be noted that the terms "mounted," "connected," and "connected" are to be interpreted broadly, and may be, for example, a mechanical connection or an electrical connection, a communication between two elements, a direct connection, or an indirect connection via an intermediate medium, and specific meanings of the terms may be understood by those skilled in the art according to specific situations.
As shown in fig. 1 to 3, the present invention provides a mechanical groove enhanced differential piezoelectric ultrasonic transducer, which includes an ultrasonic transducer body, wherein the ultrasonic transducer body includes a substrate layer 16 having a cavity 3 at the bottom, a stop layer 17 fixed on the substrate layer 16, and an elastic layer 18, a bottom electrode 19, and a piezoelectric layer 20 sequentially arranged from the substrate layer 16 to the stop layer 17, and the bottom of the substrate layer 16 is disposed on a fixing plate 21. The piezoelectric layer 20 is provided with a top inner electrode 1, the periphery of the top inner electrode 1 is provided with a top outer electrode 2 in a surrounding manner, a mechanical groove group is arranged between the top inner electrode 1 and the top outer electrode 2, and an opening of the mechanical groove group faces the piezoelectric layer 20.
In this embodiment, the cavity 3 at the bottom of the substrate layer 16 penetrates through the substrate layer 16 or does not penetrate through the substrate layer 16, and the cavity 3 can be obtained by etching the substrate layer 16, specifically, when the cavity 3 penetrates through the substrate layer 16, as shown in fig. 3, the bottom of the substrate layer 16 is completely etched into a circular cavity 3, only the top inner electrode 1, the top outer electrode 2, the piezoelectric layer 20, the bottom electrode 19, the elastic layer 18, the stop layer 17 are retained, and the elastic layer 18 and the stop layer 17 constitute a support layer, so that the performances of the ultrasonic transducer, such as sensitivity and the like, can; when the cavity 3 does not penetrate through the substrate layer 16, as shown in fig. 2, a thin film auxiliary support is formed on the top of the substrate layer 16, and at this time, the thin film on the top of the substrate layer 16, the stop layer 17 and the elastic layer 18 constitute a support layer, which is beneficial to improving the yield, and also improves the tolerance of the device, and enhances the viability of the ultrasonic transducer under the action of external damage.
In this embodiment, the bottom of the mechanical groove set is located between the piezoelectric layer 20 and the cavity 3, i.e. the depth of the mechanical groove set is the shallowest to reach the piezoelectric layer 20 and the deepest to reach the cavity 3.
In a preferred embodiment of the present invention, the mechanical groove group includes a first mechanical groove group and a second mechanical groove group, and the width of the first mechanical groove group is not less than the width of the second mechanical groove group.
The first mechanical groove group comprises four first mechanical groove bodies 8, the four first mechanical groove bodies 8 are identical in structure, and the first mechanical groove bodies 8 are uniformly distributed and circularly surround the center of the ultrasonic transducer body; the second mechanical groove group comprises four second mechanical groove bodies 12, the four second mechanical groove bodies 12 are identical in structure, and the second mechanical groove bodies 12 are uniformly distributed and circularly surround the center of the ultrasonic transducer body; the bottom of the first mechanical groove body 8 is provided with the second mechanical groove body 12, and the two are arranged in one-to-one correspondence.
Specifically, as shown in fig. 1, on the XY plane, four first mechanical grooves 8 are located between the top inner electrode 1 and the top outer electrode 2, preferably in the middle, and circularly surround the center of the top inner electrode 1 at the same interval (one of the first mechanical grooves 8 is located at the upper right of the ultrasonic transducer body, the remaining 3 first mechanical grooves 8 circularly surround the center of the ultrasonic transducer body at the same interval, the intervals between every two adjacent first mechanical grooves 8 of the four first mechanical grooves 8 are the same, and every two adjacent first mechanical grooves 8 of the four first mechanical grooves 8 rotate by 90 degrees (clockwise and counterclockwise) and can be overlapped). The four second mechanical grooves 12 are located between the top inner electrode 1 and the top outer electrode 2, preferably at the middle position, and circularly surround the center of the top inner electrode 1 at the same interval (one of the second mechanical grooves 12 is located at the upper right of the ultrasonic transducer body, the other 3 second mechanical grooves 12 circularly surround the center of the ultrasonic transducer body at the same interval, the interval between every two adjacent ones of the four second mechanical grooves 12 is the same, and every two adjacent ones of the four second mechanical grooves 12 rotate by 90 degrees (clockwise and counterclockwise) and can be overlapped). The planar shapes of the four first mechanical groove bodies 8 are circular ring sections taking the center of the device as the center of a circle, the planar shapes of the four second mechanical groove bodies 12 are circular ring sections taking the center of the device as the center of a circle, and the width of the circular ring is not more than that of the first mechanical groove bodies 8; the first mechanical groove body 8 and the second mechanical groove body 12 are both circular ring section cavities. When the annular width of the second mechanical groove body 12 is smaller than that of the first mechanical groove body 8, a step section 22 is formed, as shown in fig. 2.
As is apparent from the above description, the center coordinates of the first mechanical groove body 8 and the second mechanical groove body 12 which correspond one to one are the same in the XY plane, and contact each other in the Z direction, and the coordinates may be different or the same in the Z direction, and a gradient as shown in fig. 2 or no gradient may be formed in the Z direction. When the center coordinates of the first mechanical groove body 8 and the second mechanical groove body 12 which are in one-to-one correspondence are the same in the Z direction and no gradient is formed, the first mechanical groove body 8 and the second mechanical groove body 12 are not distinguished any more and are the same mechanical groove.
It should be noted that the XY plane is the plane of the piezoelectric layer 20, and the Z direction is the direction from the base layer 16 to the piezoelectric layer 20.
Preferably, the first mechanical groove 8 and the second mechanical groove 12 are both obtained by etching, the bottom of the first mechanical groove 8 is located above the elastic layer 18, and the bottom of the second mechanical groove 12 is located above the stop layer 17. Specifically, the four first mechanical grooves 8 have the same structure, and are etched downwards from the piezoelectric layer 20, so that two layers including the piezoelectric layer 20 and the bottom electrode 19 are etched, and the etching is stopped when the elastic layer 18 is etched; the four second mechanical grooves 12 have the same structure, and are etched from the elastic layer 18 to form a layer including the elastic layer 18, and the etching is stopped when the etching reaches the stop layer 17.
The ultrasonic transducer is placed in a sound field to be detected (the sensitive surface of the ultrasonic transducer can sense sound pressure change, the sound wave propagation direction is not parallel to the ultrasonic transducer, when the ultrasonic transducer is placed, the front surface of the ultrasonic transducer is optimal relative to the sound wave propagation direction), the sound pressure change in the sound field causes the piezoelectric layer 20 to deform, the sound wave signal change is converted into an electric signal through the positive piezoelectric effect of the piezoelectric layer 20, the generated electric signal change is detected by the top inner electrode 1, the top outer electrode 2 and the bottom electrode 19, and electric signals detected by the top inner electrode 1 and the top outer electrode 2 are respectively led out to the outside through the top inner electrode lead-out wire 4, the top inner electrode lead-out interface 6, the top outer electrode lead-out wire 5 and the top outer electrode lead-out interface 7.
The ultrasonic transducer is placed in a detection space where ultrasonic waves are to be generated, alternating voltages with a certain rule are applied to the ultrasonic transducer from the outside of the ultrasonic transducer through the top inner electrode leading-out interface 6 and the top outer electrode leading-out interface 7 respectively, the ultrasonic transducer is deformed and vibrates under the action of the inverse piezoelectric effect of the piezoelectric layer 20, a designed sound field and output sound pressure are formed on the surface of the ultrasonic transducer, and meanwhile, due to the action of the first mechanical groove body 8 and the second mechanical groove body 12, the sound pressure output and the output sound pressure level of the ultrasonic transducer can be enhanced.
The invention also provides a working method of the mechanical groove enhanced differential piezoelectric ultrasonic transducer, and the ultrasonic transducer can work in a transmitting mode and a receiving mode.
When the ultrasonic transducer works in a transmitting mode, the ultrasonic transducer transmits sound waves, electric signals are respectively applied to the top inner electrode 1 and the top outer electrode 2, the bottom electrode 19 of the ultrasonic transducer is grounded, bending vibration of the piezoelectric layer 20 in the Z direction is excited by utilizing the inverse piezoelectric effect of the piezoelectric layer 20, the free moving part of the whole ultrasonic transducer is driven to vibrate in the same direction (Z direction), and ultrasonic sound wave signals with certain frequency are externally generated through the vibration of the ultrasonic transducer;
when the ultrasonic transducer works in a receiving mode, the ultrasonic transducer is controlled to be switched from a signal transmitting state to a signal receiving state so as to receive ultrasonic sound waves, and the ultrasonic transducer senses the sound waves through the piezoelectric layer 20 and converts the received sound wave signals into electric signals through the positive piezoelectric effect of the piezoelectric layer 20;
the ultrasonic transducer can carry out a differential electrode working mode in both a transmitting mode and a receiving mode. When the ultrasonic transducer works in a differential electrode working mode in a transmitting mode, the ultrasonic transducer transmits sound waves, and different alternating electric signals (namely sinusoidal signals with certain frequency and 180-degree phase difference) are respectively applied to the top inner electrode 1 and the top outer electrode 2. In one utilization embodiment of the mechanical groove enhanced differential piezoelectric ultrasonic transducer, a standard sinusoidal signal a with a certain frequency is applied to the top external electrode lead-out interface 7, and a standard sinusoidal signal b with a phase difference of 180 degrees with the standard sinusoidal signal a is applied to the top internal electrode lead-out interface 6, so that the ultrasonic transducer works in a differential electrode working mode, and the intensity of an output signal is increased.
When the ultrasonic transducer works in a differential electrode working mode in a receiving mode, the ultrasonic transducer receives ultrasonic sound waves, sound wave signals are converted into electric signals through the positive piezoelectric effect of the piezoelectric layer, and the top inner electrode and the top outer electrode are used as electric signal output ends at the same time.
Due to the design of the mechanical groove group, when the ultrasonic transducer is in a sound wave transmitting state, namely a transmitting mode, the output sound pressure level can be effectively increased; when the ultrasonic transducer is in an acoustic wave sensitive (receiving) state, namely a receiving mode, the output charge/voltage can be effectively increased, and the sensitivity of the ultrasonic transducer to acoustic waves is improved. Meanwhile, due to the design of the differential electrode, the ultrasonic transducer can work in a differential electrode working mode, and signals in an ideal state of the working mode can be doubly enhanced in a single electrode working mode, so that the mechanical groove enhanced differential piezoelectric ultrasonic transducer can improve the sensing sensitivity.
The ultrasound transducer can also be operated in a single electrode mode of operation, i.e. with only the top inner electrode 1 or only the top outer electrode 2.
When the ultrasound transducer is operated only on the top outer electrode 2: when the ultrasonic transducer works in a transmitting mode, only the top outer electrode 2 is applied with an electric field, and when the ultrasonic transducer works in a receiving mode, only the top outer electrode 2 is used as a signal output electrode, specifically, the top outer electrode 2 of the ultrasonic transducer is electrically connected with the outside of the ultrasonic transducer through a top outer electrode outgoing line 5 and a top outer electrode outgoing interface 7, and can be used as a receiving end for detecting sound pressure of sound waves and can also be used as a transmitting end for generating ultrasonic waves; the top inner electrode 1 of the ultrasonic transducer is not externally connected with any circuit or is completely grounded, and particularly, the top inner electrode 1 of the ultrasonic transducer can be grounded through a top inner electrode leading-out interface 6.
When the ultrasound transducer is operated only at the top inner electrode 1: when the ultrasonic transducer works in a transmitting mode, only the top inner electrode 1 is applied with an electric field, and when the ultrasonic transducer works in a receiving mode, only the top inner electrode 1 is used as a signal output electrode, specifically, the top inner electrode 1 of the ultrasonic transducer is electrically connected with the outside of the ultrasonic transducer through a top inner electrode outgoing line 4 and a top inner electrode outgoing interface 6 of the ultrasonic transducer, and can be used for detecting sound pressure of sound waves and generating ultrasonic waves; the top external electrode 2 of the ultrasonic transducer is not externally connected with any circuit or is completely grounded, and particularly, the top external electrode 2 can be grounded through a top external electrode leading-out interface 7.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (9)
1. The utility model provides a mechanical groove enhancement mode difference formula piezoelectricity ultrasonic transducer which characterized in that, includes the ultrasonic transducer body, the ultrasonic transducer body includes the stratum basale that the bottom was equipped with the cavity, sets firmly the stop layer on this stratum basale and from elastic layer, bottom electrode, the piezoelectric layer that the stratum basale set gradually toward the stop layer direction, be equipped with the top inner electrode on the piezoelectric layer, top inner electrode periphery is encircleed and is provided with the top outer electrode, be equipped with mechanical groove group between top inner electrode and the top outer electrode, the opening of this mechanical groove group is towards the piezoelectric layer direction.
2. The mechanical groove-enhanced differential piezoelectric ultrasonic transducer of claim 1, wherein the bottom of the mechanical groove group is located between the piezoelectric layer and the cavity.
3. The mechanical groove-enhanced differential piezoelectric ultrasonic transducer according to claim 1, wherein the mechanical groove set comprises a first mechanical groove set and a second mechanical groove set, and the first mechanical groove set width is not smaller than the second mechanical groove set width.
4. The mechanical groove enhanced differential piezoelectric ultrasonic transducer according to claim 3, wherein the first mechanical groove group comprises four first mechanical groove bodies, and the first mechanical groove bodies are uniformly distributed and circularly surround the center of the ultrasonic transducer body;
the second mechanical groove group comprises four second mechanical groove bodies, and the second mechanical groove bodies are uniformly distributed and circularly surround the center of the ultrasonic transducer body;
the bottom of the first mechanical groove body is provided with the second mechanical groove body, and the first mechanical groove body and the second mechanical groove body are arranged in a one-to-one correspondence mode.
5. The mechanical-tank-enhanced differential piezoelectric ultrasonic transducer according to claim 4, wherein the bottom of the first mechanical tank body is located above the elastic layer, and the bottom of the second mechanical tank body is located above the stop layer.
6. The mechanically channel-enhanced differential piezoelectric ultrasonic transducer of claim 1, wherein the cavity penetrates or does not penetrate the substrate layer.
7. The working method of the mechanical groove enhancement type differential piezoelectric ultrasonic transducer is characterized in that the working mode of the ultrasonic transducer comprises a transmitting mode and a receiving mode;
when the ultrasonic transducer works in a transmitting mode, the ultrasonic transducer transmits sound waves, electric signals are applied to the top inner electrode and the top outer electrode, the bottom electrode of the ultrasonic transducer is grounded, the piezoelectric layer is excited to bend and vibrate by the inverse piezoelectric effect of the piezoelectric layer, the free moving part of the whole ultrasonic transducer is driven to vibrate in the same direction, and ultrasonic sound wave signals are generated outwards through the vibration of the ultrasonic transducer;
when the ultrasonic transducer works in a receiving mode, the ultrasonic transducer is controlled to be switched from a signal transmitting state to a signal receiving state to receive ultrasonic sound waves, and the ultrasonic transducer converts received sound wave signals into electric signals through piezoelectric layer sensitive sound waves and through the piezoelectric effect of the piezoelectric layer.
8. The working method of the mechanical slot-enhanced differential piezoelectric ultrasonic transducer according to claim 7, wherein the differential electrode working mode can be performed in both the transmission mode and the reception mode;
when the ultrasonic transducer works in a differential electrode working mode in a transmitting mode, the ultrasonic transducer transmits sound waves, and sinusoidal signals with the same frequency and 180-degree phase difference are respectively applied to the top inner electrode and the top outer electrode;
when the ultrasonic transducer works in a differential electrode working mode in a receiving mode, the ultrasonic transducer receives ultrasonic sound waves and converts the ultrasonic sound waves into electric signals, and the top inner electrode and the top outer electrode are simultaneously used as electric signal output ends.
9. The operating method of the mechanical slot-enhanced differential piezoelectric ultrasonic transducer according to claim 7, wherein the ultrasonic transducer further comprises a single-electrode operating mode, i.e. a top-inner-electrode only operating mode or a top-outer-electrode only operating mode;
when the ultrasonic transducer works only on the top outer electrode, only the top outer electrode is applied with an electric field when the ultrasonic transducer works in a transmitting mode, and only the top outer electrode is used as a signal output electrode when the ultrasonic transducer works in a receiving mode; the top inner electrode is not externally connected with any circuit or is completely grounded;
when the ultrasonic transducer only works on the top inner electrode, only the top inner electrode is applied with an electric field when the ultrasonic transducer works in a transmitting mode, and only the top inner electrode is used as a signal output electrode when the ultrasonic transducer works in a receiving mode; the top external electrode is not connected to any external circuit or is grounded completely.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112076973A (en) * | 2020-09-18 | 2020-12-15 | 重庆大学 | Constraint release type differential piezoelectric ultrasonic transducer chip and working method thereof |
| CN112452695A (en) * | 2020-10-29 | 2021-03-09 | 北京京东方技术开发有限公司 | Acoustic wave transduction structure and preparation method thereof and acoustic wave transducer |
| CN112871614A (en) * | 2021-01-12 | 2021-06-01 | 武汉大学 | MEMS ultrasonic transducer with high emission performance |
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| CN112871614B (en) * | 2021-01-12 | 2022-03-15 | 武汉大学 | MEMS ultrasonic transducer with high emission performance |
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