CN110940708A - Humidity sensor, preparation method thereof, wearable humidity sensing system and application - Google Patents

Humidity sensor, preparation method thereof, wearable humidity sensing system and application Download PDF

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CN110940708A
CN110940708A CN201911299692.3A CN201911299692A CN110940708A CN 110940708 A CN110940708 A CN 110940708A CN 201911299692 A CN201911299692 A CN 201911299692A CN 110940708 A CN110940708 A CN 110940708A
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humidity
humidity sensor
electrode
substrate
wearable
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沈国震
史瑞龙
杨珏晗
娄正
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Institute of Semiconductors of CAS
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    • G01—MEASURING; TESTING
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    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6802—Sensor mounted on worn items
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles

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Abstract

A humidity sensor and a preparation method thereof, a wearable humidity sensing system and application are provided, wherein the humidity sensor comprises a substrate; an electrode disposed on the substrate; and a humidity sensitive material forming a nanoprobe array on the electrodes. Preparation of MoO adopted by the invention3The method for preparing the nano-sheet has the advantages of high yield, simple operation and extremely low cost; the wearable system formed by the high-performance humidity sensor and the detection circuit can realize real-time monitoring of the environment humidity and non-invasive human body respiration monitoring, and compared with the traditional humidity and respiration monitoring method, the system is simpler, lower in cost and more suitable for daily and household monitoring.

Description

Humidity sensor, preparation method thereof, wearable humidity sensing system and application
Technical Field
The invention belongs to the technical field of preparation of flexible electronic devices, and particularly relates to a humidity sensor and a preparation method thereof, a wearable humidity sensing system and application.
Background
Wearable electronics has received a great deal of attention due to its important applications in the internet of things (IoT), such as human-computer interaction and telemedicine monitoring. For wearable electronic systems, smart sensors play a key role because they can effectively "translate" various signals from the human body into information that can be recognized by a machine. Therefore, it is important to develop various smart sensors having high sensitivity and fast response. Conventional sensors typically detect signals in direct contact, such as pressure sensors, strain sensors, and the like. However, direct contact sensing not only brings unavoidable mechanical wear, but also limits its application in a wider range, for example in toxic or hazardous environments. To overcome these disadvantages to meet the diverse application requirements, flexible non-contact humidity sensors have become an important complement to existing sensors.
Many scientific researchers have started to research and made certain progress on humidity sensors based on different humidity-sensitive materials, but have some limitations in terms of material stability and sensing performance, such as susceptibility of the materials to environmental influences, complex preparation processes, higher use conditions, and the like; in addition, their use in wearable electronics is currently under little investigation. Therefore, further research into low-cost, high-performance, long-term stable humidity sensors and their practical applications in health-related humidity monitoring and wearable electronics is urgent.
Disclosure of Invention
In view of the above, it is a primary object of the present invention to provide a humidity sensor, a method for manufacturing the same, a wearable humidity sensing system and an application thereof, which are intended to at least partially solve at least one of the above technical problems.
In order to achieve the above object, as one aspect of the present invention, there is provided a humidity sensor including:
a substrate;
an electrode disposed on the substrate; and
moisture sensitive material forming a nanoprobe array on the electrodes.
As another aspect of the present invention, there is also provided a method of manufacturing a humidity sensor, including:
preparing an electrode on a substrate;
and preparing a humidity sensitive material on the substrate with the prepared electrode to obtain the humidity sensor.
As yet another aspect of the present invention, there is also provided a wearable humidity sensing system, including:
the humidity sensor as described above or the humidity sensor obtained by the manufacturing method as described above, for detecting a change in relative humidity;
the signal processing device is connected with the electrodes at the two ends of the humidity sensor and is used for detecting a current signal output by the sensor and sending a final signal to the wireless receiving terminal in real time to obtain humidity information; and
and the wireless terminal is used for receiving and displaying the processed humidity information.
As a further aspect of the present invention, there is also provided an application of the wearable humidity sensing system as described above in real-time monitoring of ambient humidity and non-invasive human respiration monitoring.
Based on the technical scheme, compared with the prior art, the humidity sensor and the preparation method thereof, the wearable humidity sensing system and the application thereof have at least one of the following advantages:
(1) preparation of MoO adopted by the invention3The method for preparing the nano-sheet has the advantages of high yield, simple operation and extremely low cost;
(2) the sensitivity and the response speed of the humidity sensor are superior to those of most literature reports and the current advanced commercial humidity sensor, and MoO3The performance is stable, and the humidity response performance of the device is not obviously changed after the device is exposed in the air for more than 1 month;
(3) most of the conventional commercial humidity sensors are rigid and are rarely used in wearable electronics, and the flexible wearable humidity sensing system provided by the invention widens the application potential and application range of the humidity sensor;
(4) the wearable system formed by the high-performance humidity sensor and the detection circuit can realize real-time monitoring of the environment humidity and non-invasive human body respiration monitoring, and compared with the traditional humidity and respiration monitoring method, the system is simpler, lower in cost and more suitable for daily and household monitoring.
Drawings
FIG. 1 is a schematic diagram of a humidity sensor in an embodiment of the present invention;
FIG. 2 is a graph illustrating the response of a humidity sensor in an embodiment of the present invention in different relative humidity environments;
FIG. 3 is a graph illustrating the response of a humidity sensor in an embodiment of the present invention in different breathing states;
FIG. 4 is a diagram of real-time monitoring of ambient humidity for the flexible wearable humidity sensing system in an embodiment of the present invention;
fig. 5 is a schematic diagram of real-time respiration monitoring implemented by the flexible wearable humidity sensing system according to the embodiment of the present invention.
Description of reference numerals:
1-a substrate; 2-an electrode; 3-moisture sensitive material.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
In order to overcome some of the disadvantages of the prior art and devices, the present invention proposes a wearable sensing system to enable the application of high performance humidity sensors in health related humidity change monitoring and wearable electronics.
The invention discloses a humidity sensor, comprising:
a substrate;
an electrode disposed on the substrate; and
moisture sensitive material forming a nanoprobe array on the electrodes.
In some embodiments of the present invention, the electrode is a double-ended electrode structure, and two ends of the electrode are arranged in a tooth-like alternating manner;
in some embodiments of the invention, the substrate is a flexible substrate.
In some embodiments of the invention, the humidity sensor has a response time of less than 0.3 seconds, a recovery time of less than 0.5 seconds;
in some embodiments of the present invention, the substrate is made of a material including any one of polyethylene terephthalate, polyethylene naphthalate, and polyimide;
in some embodiments of the present invention, the electrode is made of a material including any one of gold, silver, copper, and indium tin oxide;
in some embodiments of the invention, the electrode has a thickness of 50 to 60 nanometers;
in some embodiments of the invention, the moisture sensitive material comprises molybdenum trioxide nanoplates.
The invention also discloses a preparation method of the humidity sensor, which comprises the following steps:
preparing an electrode on a substrate;
and preparing a humidity sensitive material on the substrate with the prepared electrode to obtain the humidity sensor.
In some embodiments of the invention, the moisture sensitive material comprises molybdenum trioxide nanoplates.
In some embodiments of the present invention, the method for preparing molybdenum trioxide nanoplates comprises:
dissolving ammonium heptamolybdate tetrahydrate in deionized water, then adding a nitric acid solution to carry out hydrothermal reaction, and obtaining white powder which is the molybdenum trioxide nanosheets after the hydrothermal reaction is finished.
In some embodiments of the invention, the concentration of ammonium heptamolybdate tetrahydrate is from 0.7 to 1.1g/mL, e.g., 0.7g/mL, 0.8g/mL, 0.9g/mL, 1.0g/mL, 1.1 g/mL;
in some embodiments of the invention, the nitric acid solution has a concentration of 4.0 to 5.0 mol/L;
in some embodiments of the invention, the reaction temperature of the hydrothermal reaction is 60 to 70 ℃;
in some embodiments of the invention, the reaction time of the hydrothermal reaction is 180 to 210 minutes.
The invention also discloses a wearable humidity sensing system, comprising:
the humidity sensor as described above or the humidity sensor obtained by the manufacturing method as described above, for detecting a change in relative humidity;
the signal processing device is connected with the electrodes at the two ends of the humidity sensor and is used for detecting a current signal output by the sensor and sending a final signal to the wireless receiving terminal in real time to obtain humidity information; and
and the wireless terminal is used for receiving and displaying the processed humidity information.
In some embodiments of the present invention, the wearable humidity sensing system comprises a microprocessor unit, a signal conversion circuit, a bluetooth module, and a battery.
The invention also discloses application of the wearable humidity sensing system in real-time monitoring of environmental humidity and non-invasive human body respiration monitoring.
In one exemplary embodiment, the flexible wearable humidity sensing system of the present invention comprises:
the humidity sensor comprises a humidity sensitive material, an electrode and a flexible substrate, wherein the electrode forms a double-end electrode structure on the flexible substrate, two ends of the electrode are arranged in a tooth-shaped alternative manner, and the humidity sensitive material forms a nano detection array on the electrode;
the signal processing circuit (namely a signal processing device) is connected with electrodes at two ends of the humidity sensor by leads and is used for detecting current signals output by the sensor and sending final signals to the wireless receiving terminal in real time to obtain humidity information;
the humidity-sensitive material is prepared based on a water bath method, so that low-cost and simple preparation of the material can be realized, and the humidity sensor is prepared based on a semiconductor micromachining technology, so that miniaturization and batch manufacturing of devices can be realized; the flexible humidity sensor has ultrahigh sensitivity to the environment humidity, and a formed wearable humidity sensing system can realize real-time monitoring of the environment humidity and non-invasive human body respiration monitoring.
In another exemplary embodiment, the flexible wearable humidity sensing system of the invention is composed of a humidity sensor, a signal processing circuit and a wireless terminal; the high-performance humidity sensor is composed of a molybdenum trioxide nanosheet humidity-sensitive material, a metal electrode and a flexible substrate; and the signal processing circuit is connected with electrodes at two ends of the humidity sensor through leads and is used for detecting current signals output by the sensor and sending final signals to the wireless receiving terminal in real time to obtain humidity information.
Wherein the flexible substrate of the humidity sensor is selected from one of polyethylene terephthalate (PET), polyethylene naphthalate (PEN) and Polyimide (PI);
the electrodes are made of metals such as gold, silver, copper, ITO (indium tin oxide) and the like, a double-end electrode structure is formed on the flexible substrate by the electrodes, two ends of the electrodes are arranged in a tooth-shaped alternative mode, and the humidity sensitive materials form a nano detection array on the electrodes.
The signal processing circuit consists of a microprocessor unit, a signal conversion circuit, a Bluetooth module and a battery, the humidity sensor is connected with the circuit board in series to form a humidity sensing system, the processed signal is transmitted to a mobile application program passing through the Bluetooth module, and the relative humidity of the environment and a real-time value dynamic curve of time variation are displayed in a mobile software interface in a visual mode.
The preparation method of the humidity sensing device comprises the following steps:
(1) preparation of moisture sensitive material: MoO3The nano-sheet is synthesized by a water bath method, firstly, ammonium heptamolybdate tetrahydrate is fully dissolved in deionized water, then, a proper amount of nitric acid solution with certain concentration is dropwise added into the solution, then, the mixed solution is subjected to water bath in an ultrasonic machine, and after the reaction is finished, generated white powder is collected, washed and dried;
(2) preparing a humidity sensor: forming an electrode pattern on a flexible substrate through photoetching and film coating, wherein the electrode is of a double-end electrode structure, two ends of the electrode are arranged in a tooth-shaped alternative manner, and then carrying out MoO treatment on the MoO obtained in the step (1)3Uniformly dispersing the nano-sheets in a volatile solvent, such as ethanol, spin-coating the solution on an electrode, and finally drying the device;
wherein the concentration of the reaction precursor ammonium heptamolybdate tetrahydrate in the step (1) is 0.7-1.1 g/mL, and MoO is prepared3Of waterThe concentration of the nitric acid solution used by the method is 4.0-5.0mol/L, and MoO is prepared3The volume of the nitric acid solution dripped in the water bath process is 0.4-0.6mL, and MoO is prepared3The heating temperature used in the hydrothermal method is 60-70 ℃, and the ultrasonic time is 180-210 minutes.
Wherein, the thickness of the metal electrode in the step (2) is 50-60nm, and MoO3The concentration of the solution is 0.03-0.05g/mL, the drying temperature is 60 ℃, and the time is 1-2 minutes.
A wearable humidity sensing system comprising a wearable system formed by a humidity sensor as described above. The wearable system comprises a humidity sensor and an external signal processing circuit, the circuit board is integrated with a Bluetooth module, and current signals of the sensor can be wirelessly sent to the mobile terminal;
the wearable humidity sensing system is applied to real-time monitoring of environment humidity and non-invasive human body respiration monitoring.
The technical solution of the present invention is further illustrated by the following specific embodiments in conjunction with the accompanying drawings. It should be noted that the following specific examples are given by way of illustration only and the scope of the present invention is not limited thereto.
The chemicals and raw materials used in the following examples were either commercially available or self-prepared by a known preparation method.
The flexible humidity sensing system comprises a humidity sensor and a signal processing circuit; wherein the humidity sensor includes: MoO3The nano-sheet is used as a humidity sensitive material 3, polyimide, PET or PEN or the like is used as a substrate 1, and conductive metal is used as a double-end electrode 2. The prepared humidity sensor showed excellent sensitivity to external Relative Humidity (RH), which changes by 5 orders of magnitude in current when RH was changed from 0% to 100%. Furthermore the sensor has a fast response (< 0.3s) and recovery time (< 0.5s), exhibits long-term stability (> 1 month), and has good mechanical flexibility.
The signal processing circuit is composed of a microprocessor unit, a signal conversion circuit, a Bluetooth module and a battery, and the humidity sensor is connected with the circuit board in series to form a humidity sensing system. Changes in the ambient Relative Humidity (RH) can cause changes in the current of the sensor. Then, the signal processing circuit converts the current value into a voltage signal through I/V conversion, and then transmits the signal to a microprocessor, and the microprocessor is responsible for real-time data collection and processing; the RH value is calculated by the relationship between RH and current (as shown in fig. 2), and finally, the processed signal is transmitted to the mobile Application (APP) through the bluetooth module. The dynamic curve of the relative humidity of the environment and the real-time value of the time variation is displayed in a mobile software interface in a visual mode, and therefore a foundation is laid for personalized humidity monitoring.
The invention integrates the humidity sensing system in the wearable device, and realizes the application of the humidity sensor in health-related humidity change monitoring and wearable electronics.
Example 1
(1) Dissolving 0.9g of ammonium heptamolybdate tetrahydrate in 11mL of deionized water, and magnetically stirring until complete dissolution;
(2) dropwise adding 0.5mL of 4.5mol/L nitric acid solution into the aqueous solution by using a pipette gun, and fully stirring;
(3) sealing the beaker filled with the mixed solution by using a preservative film, putting the beaker into an ultrasonic machine, and keeping the heating temperature at 65 ℃ for 180 minutes;
(4) centrifuging the solution, drying, collecting the white powder, and collecting the obtained MoO3The nano-sheet is ultrasonically dispersed in ethanol at room temperature, and the concentration of the dispersion liquid is 0.03g mL-1；
(5) Forming an electrode pattern on a flexible PET substrate by photoetching and film coating, wherein the electrode is of a double-end electrode structure, two ends of the electrode are arranged in a tooth-shaped alternative manner, and MoO is coated on the flexible PET substrate3The dispersion was spin coated on the above PET substrate engraved with electrodes at 500 rpm. The above devices were placed on a hot plate to MoO3The sensor is completely dried, the flexible humidity sensor is manufactured, and the structure of the sensor on the flexible PET substrate is shown in figure 1.
(6) The device is placed in different relative humidity environments for testing, the response conditions of the device in different Relative Humidity (RH) environments are shown in FIG. 2, and the results show that the device increases with the relative humidityThe current increases significantly and, in logarithmic scale, the current response of the device changes almost linearly at different relative humidities. When the relative humidity increases from 0% to 100%, the current of the sensor changes by more than 105The sensitivity of the humidity sensor is very good under the environment of high humidity and low humidity; the response of the humidity sensor under different breathing states is shown in fig. 3, which illustrates that the humidity sensor of the present invention can rapidly and accurately detect the breathing speed and depth.
Example 2
(1) Dissolving 0.8g of ammonium heptamolybdate tetrahydrate in 9mL of deionized water, and magnetically stirring until complete dissolution;
(2) dropwise adding 0.5mL of 5mol/L nitric acid solution into the aqueous solution by using a pipette gun, and fully stirring;
(3) sealing the beaker filled with the mixed solution by using a preservative film, putting the beaker into an ultrasonic machine, and keeping the heating temperature at 70 ℃ for 200 minutes;
(4) centrifuging the solution, drying, collecting the white powder, and collecting the obtained MoO3The nano-sheet is ultrasonically dispersed in ethanol at room temperature, and the concentration of the dispersion liquid is 0.03g mL-1；
(5) Forming an electrode pattern on a flexible PEN substrate by photoetching and film coating, wherein the electrode is in a double-end electrode structure, two ends of the electrode are arranged in a tooth-shaped alternative manner, and MoO is coated on the electrode pattern3The dispersion was spin coated onto the above-described PEN substrate engraved with electrodes at 500 rpm. The above devices were placed on a hot plate to MoO3The sensor was completely dry and the flexible PEN substrate was completed and the structure of the sensor was as shown in fig. 1.
(6) And connecting the electrode of the flexible sensor with an external signal processing circuit, and connecting the external signal processing circuit with an intelligent terminal through a wireless system to form a flexible humidity integrated system. The integrated system can quickly monitor the ambient relative humidity and send alerts based on a designed threshold relative humidity. When the relative humidity is lower than 30%, the humidity is in a low state, if the relative humidity is higher than 75%, the humidity is in a high state, and the relative humidity is in a range of 30-75%, the relative humidity is in a comfortable state. Humidity monitoring example as shown in fig. 4, three colors indicate that the humidity is in three different states.
Example 3
(1) Dissolving 0.86g of ammonium heptamolybdate tetrahydrate in 10mL of deionized water, and magnetically stirring until complete dissolution;
(2) dropwise adding 0.5mL of nitric acid solution with the concentration of 4mol/L into the aqueous solution by using a pipette gun, and fully stirring;
(3) sealing the beaker filled with the mixed solution by using a preservative film, putting the beaker into an ultrasonic machine, and keeping the heating temperature at 60 ℃ for 210 minutes;
(4) centrifuging the solution, drying, collecting the white powder, and collecting the obtained MoO3The nano-sheet is ultrasonically dispersed in ethanol at room temperature, and the concentration of the dispersion liquid is 0.03g mL-1；
(5) Forming an electrode pattern on a flexible PET substrate by photoetching and film coating, wherein the electrode is of a double-end electrode structure, two ends of the electrode are arranged in a tooth-shaped alternative manner, and MoO is coated on the flexible PET substrate3The dispersion was spin coated on the above PET substrate engraved with electrodes at 500 rpm. The above devices were placed on a hot plate to MoO3The sensor is completely dried, the flexible humidity sensor is manufactured, and the structure of the sensor on the flexible PET substrate is shown in figure 1.
(6) And connecting the electrode of the flexible sensor with an external signal processing circuit, and connecting the external signal processing circuit with an intelligent terminal through a wireless system to form a flexible humidity integrated system. The flexible humidity integrated system can be applied to wearable respiration monitoring. Wearable respiration monitoring system as shown in fig. 5, it can be seen from the dynamic curve of mobile APP that the wearable humidity sensing system provided by the present invention can provide fast and accurate respiration rate and depth monitoring.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A humidity sensor comprising:
a substrate;
an electrode disposed on the substrate; and
moisture sensitive material forming a nanoprobe array on the electrodes.
2. Humidity sensor according to claim 1,
the electrode is of a double-end electrode structure, and two ends of the electrode are arranged in a tooth-shaped alternative manner;
the substrate is a flexible substrate.
3. Humidity sensor according to claim 1,
the response time of the humidity sensor is less than 0.3 second, and the recovery time is less than 0.5 second;
the substrate is made of any one of polyethylene terephthalate, polyethylene naphthalate and polyimide;
the electrode is made of any one of gold, silver, copper and indium tin oxide;
the thickness of the electrode is 50 to 60 nanometers;
the humidity-sensitive material comprises molybdenum trioxide nanosheets.
4. A method of making a humidity sensor comprising:
preparing an electrode on a substrate;
and preparing a humidity sensitive material on the substrate with the prepared electrode to obtain the humidity sensor.
5. The production method according to claim 4,
the humidity-sensitive material comprises molybdenum trioxide nanosheets.
6. The production method according to claim 5,
the preparation method of the molybdenum trioxide nanosheet comprises the following steps:
dissolving ammonium heptamolybdate tetrahydrate in deionized water, then adding a nitric acid solution to carry out hydrothermal reaction, and obtaining white powder which is the molybdenum trioxide nanosheets after the hydrothermal reaction is finished.
7. The production method according to claim 6,
the concentration of the ammonium heptamolybdate tetrahydrate is 0.7 to 1.1 g/mL;
the concentration of the nitric acid solution is 4.0 to 5.0 mol/L;
the reaction temperature of the hydrothermal reaction is 60 to 70 ℃;
the reaction time of the hydrothermal reaction is 180 to 210 minutes.
8. A wearable humidity sensing system, comprising:
a humidity sensor according to any one of claims 1 to 3 or obtained by the production method according to any one of claims 4 to 7, for detecting a change in relative humidity;
the signal processing device is connected with the electrodes at the two ends of the humidity sensor and is used for detecting a current signal output by the sensor and sending a final signal to the wireless receiving terminal in real time to obtain humidity information; and
and the wireless terminal is used for receiving and displaying the processed humidity information.
9. The wearable wetness sensing system of claim 8,
the wearable humidity sensing system comprises a microprocessor unit, a signal conversion circuit, a Bluetooth module and a battery.
10. Use of the wearable humidity sensing system of claim 8 or 9 for real-time monitoring of ambient humidity and non-invasive human respiration monitoring.
CN201911299692.3A 2019-12-16 2019-12-16 Humidity sensor, preparation method thereof, wearable humidity sensing system and application Pending CN110940708A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113063826A (en) * 2021-03-18 2021-07-02 江南大学 Wearable perspiration rate sensor and assembling method thereof
KR20220078918A (en) * 2020-12-04 2022-06-13 광운대학교 산학협력단 Humidity Sensor Based on Belt-shaped Nanomaterial and Preparing method thereof
CN114689164A (en) * 2022-04-01 2022-07-01 中国科学院半导体研究所 Composite film sound sensor and preparation method and application thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104914138A (en) * 2015-07-03 2015-09-16 深圳市共进电子股份有限公司 Humidity sensor, humidity sensor array and preparation method thereof
CN205037917U (en) * 2015-08-12 2016-02-17 深圳市冠旭电子有限公司 Wearable device of many sensings
CN105565382A (en) * 2016-03-03 2016-05-11 广东工业大学 Preparation method for molybdenum trioxide nano-sheets and gas-sensitive detector manufactured from molybdenum trioxide nano-sheets
CN110006549A (en) * 2019-03-27 2019-07-12 电子科技大学 A kind of flexible Temperature Humidity Sensor of integral structure and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104914138A (en) * 2015-07-03 2015-09-16 深圳市共进电子股份有限公司 Humidity sensor, humidity sensor array and preparation method thereof
CN205037917U (en) * 2015-08-12 2016-02-17 深圳市冠旭电子有限公司 Wearable device of many sensings
CN105565382A (en) * 2016-03-03 2016-05-11 广东工业大学 Preparation method for molybdenum trioxide nano-sheets and gas-sensitive detector manufactured from molybdenum trioxide nano-sheets
CN110006549A (en) * 2019-03-27 2019-07-12 电子科技大学 A kind of flexible Temperature Humidity Sensor of integral structure and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JUEHAN YANG 等: ""Flexible Smart Noncontact Control Systems with Ultrasensitive Humidity Sensors"", 《SMALL》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220078918A (en) * 2020-12-04 2022-06-13 광운대학교 산학협력단 Humidity Sensor Based on Belt-shaped Nanomaterial and Preparing method thereof
KR102540675B1 (en) * 2020-12-04 2023-06-07 광운대학교 산학협력단 Humidity Sensor Based on Belt-shaped Nanomaterial and Preparing method thereof
CN113063826A (en) * 2021-03-18 2021-07-02 江南大学 Wearable perspiration rate sensor and assembling method thereof
CN114689164A (en) * 2022-04-01 2022-07-01 中国科学院半导体研究所 Composite film sound sensor and preparation method and application thereof
CN114689164B (en) * 2022-04-01 2023-04-28 中国科学院半导体研究所 Composite film sound sensor and preparation method and application thereof

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