CN110702610B - Device giving consideration to balance of focusing power and spectral density of rod-shaped light source and photoacoustic spectrometer - Google Patents
Device giving consideration to balance of focusing power and spectral density of rod-shaped light source and photoacoustic spectrometer Download PDFInfo
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- CN110702610B CN110702610B CN201911003586.6A CN201911003586A CN110702610B CN 110702610 B CN110702610 B CN 110702610B CN 201911003586 A CN201911003586 A CN 201911003586A CN 110702610 B CN110702610 B CN 110702610B
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Abstract
A device and photoacoustic spectrometer for balancing focusing power and spectral density of a rod-shaped light source are provided, the device comprises: the rod-shaped light source is a rod-shaped illuminant radiating like a blackbody; the collecting unit comprises a collecting mirror, one concave side of the collecting mirror is a collecting acting surface in a high-order aspheric surface shape, the collecting acting surface cover is arranged outside the rod-shaped light source, and a high-reflection metal film is arranged on the collecting acting surface and used for reflecting and focusing light emitted by the rod-shaped light source; and the shaping unit comprises a shaping mirror, the shaping mirror is arranged on one side opposite to the collection action surface, a shaping action surface in a high-order aspheric surface shape is convexly arranged on the shaping mirror, and an optical reflecting film is arranged on the shaping action surface and is used for selectively partially transmitting the light reflected by the collection action surface and realizing spectral density balance through spectral cutting. The invention simultaneously realizes the balanced output of the optical power spectral density and provides guarantee for the improvement of the subsequent detection sensitivity of the photoacoustic spectrum.
Description
Technical Field
The invention relates to the technical field of photoacoustic spectrometers, in particular to a device giving consideration to balance of focusing power and spectral density of a rod-shaped light source and a photoacoustic spectrometer.
Background
With the rapid development of electric power, petrifaction, nuclear energy, scientific research and the like and the continuous enhancement of environmental protection work, the demand of China on gas chemical component monitoring and detecting instruments is increasingly greater and higher. The high-precision photoacoustic spectrum detector is a high-end universal instrument for on-line monitoring and off-line detection of multi-component gas, has the advantages of high detection precision, simultaneous measurement of multiple components, no need of carrier gas, high stability, easiness in maintenance and the like, and gradually replaces the traditional optical gas detection method. The infrared light source is an excitation source of the whole photoacoustic spectrum detection system, and the influence of the quality of the infrared light source on the sensitivity of the system is very important.
The incoherent light source is suitable for the photoacoustic spectrometer with compact structure due to low manufacturing cost, small volume and stable performance. However, the incoherent light source has the problems of low optical power density, poor light beam quality, difficulty in shaping and focusing light beams and the like due to serious divergence; meanwhile, the spectral power of the commercial infrared light source is mainly short wave below 6 μm, and the spectral power of a long wave band (after 10 μm) is very low, so that the problem of power spectral density imbalance exists. On one hand, the total optical power collection efficiency of the system needs to be improved to ensure the long-wave band spectral power value; on the other hand, the high collection efficiency also causes the problem of too high short-waveband spectral power, thereby affecting the improvement of the sensitivity of the photoacoustic system.
Disclosure of Invention
It is therefore an object of the present invention to provide a device and a photoacoustic spectrometer that can balance the focusing power and spectral density of a rod-shaped light source, so as to at least partially solve at least one of the above-mentioned problems.
As an aspect of the present invention, there is provided an apparatus for balancing focusing power and spectral density of a rod-shaped light source, including:
the rod-shaped light source is a rod-shaped luminous body similar to black body radiation;
the collecting unit comprises a collecting mirror, one concave side of the collecting mirror is a collecting acting surface in a high-order aspheric surface shape, the collecting acting surface cover is arranged outside the rod-shaped light source, and a high-reflection metal film is arranged on the collecting acting surface and used for reflecting and focusing light emitted by the rod-shaped light source;
and the shaping unit comprises a shaping mirror, the shaping mirror is arranged on one side opposite to the collection action surface, the shaping action surface in a high-order aspheric surface shape is convexly arranged on the shaping mirror, an optical reflection film is arranged on the shaping action surface and used for selectively transmitting part of the light reflected by the collection action surface, and spectrum density balance is realized through spectrum cutting.
As another aspect of the present invention, there is also provided a photoacoustic spectrometer, comprising:
the device for balancing the focusing power and the spectral density of the rod-shaped light source is used for outputting light with balanced focusing and spectral density;
a chopper which is arranged behind the device for balancing the focusing power and the spectral density of the rod-shaped light source and is used for forming light which is interrupted along with time on the light modulation which is subjected to focusing and the spectral density balancing;
and the photoacoustic cell is arranged at the focal plane of the shaping unit and is used for containing a sample and receiving the light modulated by the chopper.
Compared with the prior art, the device and the photoacoustic spectrometer which have the advantages of balancing the focusing power and the spectral density of the rod-shaped light source have at least one or part of the following advantages:
the collecting mirror of the traditional commercial infrared light source is mostly a standard paraboloid or an ellipsoid, and is suitable for collecting point light source energy and the like; for a rod-shaped infrared light source, because the rod-shaped infrared light source is a non-standard point light source, a standard paraboloid or ellipsoid cannot realize the optimal collection effect; therefore, the high-order aspheric collecting mirror model is optimally designed aiming at the characteristics of the rod-shaped infrared light source and is used for improving the focusing total power of the rod-shaped infrared light source at the inlet of the photoacoustic cell; in addition, the spectrum power of the commercial infrared light source is mainly short wave below 6 μm, the spectrum power of the long wave band is very low, the problem of unbalanced power spectrum density exists, and the improvement of the detection sensitivity of the photoacoustic spectrometer is not facilitated; according to the invention, by optimally designing the optical path structure and the optical element, the balanced output of the optical power spectral density can be realized at the same time, the effect of small size and light weight can be achieved, and the improvement of the detection sensitivity of a subsequent photoacoustic spectrometer is guaranteed;
the device has the advantages of compact structure, convenience, rapidness, convenient operation and high reliability.
Drawings
FIG. 1 is a schematic diagram of an optical path structure according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an equalizing device for balancing the focusing power and the spectral density of a rod-shaped infrared light source according to an embodiment of the present invention;
fig. 3 is a spectral power distribution diagram.
In the above figures, the reference numerals have the following meanings:
020-collecting unit; 030-a shaping unit; 110-an infrared light source; 111-lamp tube fixing area part; 112-a lamp tube transition region portion; 113-lamp tube heating area part; 120-aspheric collecting mirror; 121-mounting through holes; 122-a transition via; 123-the reflective surface of an aspheric collector mirror; 124-fixing threaded holes; 130-aspheric shaping mirror; 140-a small aperture diaphragm; 150-power detector.
Detailed Description
The invention provides a device and a photoacoustic spectrometer which simultaneously give consideration to focusing power and spectral density balance aiming at the characteristics of divergence and power spectral density unevenness of a rod-shaped incoherent infrared light source. The device can improve the effective optical power entering the photoacoustic cell, simultaneously realizes the flattening of the output spectrum power density, and is favorable for improving the photoacoustic detection sensitivity of a subsequent photoacoustic spectrometer.
In one aspect of the present invention, an apparatus for balancing the focusing power and the spectral density of a rod-shaped light source is provided, comprising:
the rod-shaped light source is a rod-shaped illuminant radiating like a blackbody;
the collecting unit comprises a collecting mirror, one concave side of the collecting mirror is a collecting acting surface in a high-order aspheric surface shape, the collecting acting surface cover is arranged outside the rod-shaped light source, and the collecting acting surface is provided with a high-reflection metal film for reflecting and focusing light emitted by the rod-shaped light source;
and the shaping unit comprises a shaping mirror, the shaping mirror is arranged on one side opposite to the collection action surface, the shaping action surface in a high-order aspheric surface shape is convexly arranged on the shaping mirror, an optical reflection film is arranged on the shaping action surface and used for selectively partially transmitting the light reflected by the collection action surface, and spectrum density balance is realized through spectrum cutting.
In solving the optical design problems of light energy collection and the like, a non-imaging optical system is superior to an imaging optical system, and the design mainly takes the light energy utilization rate as a design index from the light emitting characteristics of a light source and the light intensity distribution angle required by a target plane, and the matching problem in the energy transmission process is emphatically considered. In the collecting unit, the most important is a collecting mirror, and the design aim of the invention is to increase the collecting angle and improve the reflection efficiency. Since the infrared radiation light source is not a standard point light source, a high-order aspheric model is introduced in the optimization design process. The aspherical optical element is an optical element whose surface type is determined by a polynomial high-order equation and whose radii of points are different from each other.
In this embodiment, based on the fundamental principle of light energy conservation in the transmission process, the present invention combines the light-emitting characteristics of the conventional infrared light source and the illumination requirement on the target plane, considers the parameters such as the size and the position of the chopper and other elements, and utilizes Zemax software to perform the shaping focusing optimization design of the light beam of the light source on the aspheric surface collecting mirror and the aspheric surface optical shaping mirror, so as to obtain a collecting acting surface with a concave high-order aspheric surface and a shaping acting surface with a convex high-order aspheric surface. Effectively eliminating spherical aberration, astigmatism, coma aberration, field curvature and the like, reducing the loss of light energy, improving the focusing and collimating precision, and simultaneously lightening and miniaturizing the system.
In this embodiment, the present invention not only designs the surface types of the shaping action surface and the collecting action surface, but also coats the aspheric optical shaping mirror and the collecting mirror to achieve power spectral density equalization and optical power focusing. The collecting action surface is provided with a high-reflection metal film which can be but is not limited to plating a corresponding high-reflection metal film on the surface; the shaping action surface is provided with an optical reflection film, which can be but is not limited to plating a corresponding optical reflection film on the surface of the shaping action surface, so that the shaping action surface has the functions of shaping focusing and spectral power cutting at the same time, and the effects of small size and light weight are achieved.
In this embodiment, the apparatus for balancing the focusing power and the spectral density of the rod-shaped light source further includes an aperture stop;
and the aperture diaphragm is arranged on one side of the shaping unit, which is far away from the collecting unit, and is used for limiting the beam aperture of the light transmitted by the shaping unit so that the light beam passing through the aperture diaphragm can be matched with the chopper.
The power detector can be arranged at the focal plane of the shaping unit and used for collecting and detecting the energy of the light beam passing through the aperture diaphragm so as to check the power of the focal plane of the light beam output by the device giving consideration to the balance between the focusing power of the rod-shaped light source and the spectral density.
In this embodiment, the surface of the collecting action surface is a second even aspheric paraboloid; the collecting mirror can be, but is not limited to, a brass substrate material.
In this embodiment, two opposite sides of the shaping mirror are respectively provided with a shaping action surface in a high-order aspheric surface shape in a convex manner; preferably, the surface type of the shaping action surface is a second even aspheric surface; preferably, the shaping mirror is made of ZnSe substrate material.
The surface type of the collecting action surface and the surface type of the shaping action surface are obtained through optimization of Zemax optical simulation software, parameter setting is carried out in a Zemax nonsequential mode, a cylindrical light source is selected for the light source according to actual light source characteristics, and the power of the power detector at a focal plane is maximized by the aid of a target, so that energy collecting efficiency is improved.
Aiming at light sources with different intensities, the shaping action surfaces in a high-order aspheric surface shape can be convexly arranged on two opposite sides of the shaping mirror respectively but not limited to enhance the selective transmission effect of the shaping mirror, and the spectral density balance is better realized.
In the embodiment, the optical reflecting film on the shaping action surface partially transmits the light beam with the spectral component of 2-6 μm, and the transmittance is 20-40%; the optical reflection film on the shaping action surface partially transmits light beams with spectral components of 6-10 mu m, and the transmittance is 50-70%; the optical reflection film on the shaping action surface performs high-transmittance transmission on the light beam with the spectral component of 10-14 mu m, and the transmittance is 80-99%.
In the present embodiment, a fixing manner of the bar-shaped light source and the collecting unit is designed, but not limited thereto.
Wherein, the clavate light source deviates from and collects the active surface one end connection fixed area: and the fixed area is used for being fixedly connected with the collecting mirror.
The collecting unit also comprises a mounting part which is connected with one side of the collecting action surface of the collecting mirror back to back; the mounting hole is arranged on the mounting part and penetrates through the collecting mirror, and the fixing area is arranged in the mounting hole and is fixedly connected with the mounting part;
preferably, a fixing threaded hole is formed in the mounting part and is vertically communicated with the mounting hole; the fixing threaded hole is internally screwed with a fixing part with external threads for fixing the fixing area.
In the embodiment, a transition area is arranged between the rod-shaped light source and the fixed area, and the diameter of the transition area is smaller than that of the fixed area; the mounting hole comprises a reducing mounting through hole and a transition through hole, and the mounting through hole and the transition through hole are respectively matched with the mounting of the fixed area and the transition area.
The diameter of the transition area is smaller than that of the fixed area, so that the reflecting area of the collecting action surface is enlarged as much as possible, and the power collecting efficiency is improved.
As another aspect of the present invention, there is also provided a photoacoustic spectrometer comprising: the device for balancing the focusing power and the spectral density of the rod-shaped light source is used for outputting light with balanced focusing and spectral density; a chopper arranged behind the device which gives consideration to both the focusing power and the spectral density balance of the rod-shaped light source and used for forming light which is interrupted along with time on the light modulation which is subjected to focusing and the spectral density balance; and the photoacoustic cell is arranged at the focal plane of the shaping unit and used for containing a sample and receiving the light modulated by the chopper.
In this embodiment, the size of the aperture stop is the same as the maximum clear aperture of the chopper.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The invention aims to provide a device for balancing focusing power and power spectral density of a rod-shaped infrared light source.
As shown in fig. 1, wherein fig. 1 is a schematic diagram of an optical path structure according to the present invention. The infrared detector consists of an infrared light source 110, a collecting unit 020, a shaping unit 030, an aperture stop 140 (namely an aperture stop) and a power detector 150. Light beams emitted by the infrared light source 110 are shaped and focused by the collecting unit 020 and the shaping unit 030, pass through the small-hole diaphragm 140 and finally enter the power detector 150;
the infrared light source 110 is a rod-shaped light-emitting structure similar to black body radiation;
the surface type of the reflecting surface of the collecting unit 020 and the surface type of the shaping unit 030 are obtained by optimizing Zemax optical simulation software in a non-sequential mode, a high-order aspheric model structure is adopted, the power of the power detector 150 is maximized, and the energy collecting efficiency is improved;
the reflecting surface of the collecting unit 020 is plated with a high-reflection metal film;
the surface of the shaping unit 030 is plated with a corresponding optical reflection film, and simultaneously has the functions of shaping and focusing and spectral power cutting so as to achieve the effects of small size and light weight;
the optical reflection film of the shaping unit 030 partially transmits high-power spectral components (such as 2-6 μm), the transmittance is 20-40%, and further the transmission power of the corresponding part is reduced; the high transmittance of low-power spectral components (such as 6-14 mu m) is 80-99%, so that the spectral cutting effect is realized, and the balanced output of power is finally realized;
the aperture diaphragm 140 is used for limiting the aperture of the light beam, and the aperture size is equivalent to the maximum aperture of the selected chopper;
the power detector 150 is located at the focal plane of the shaping unit 030, and the effective area of the power detector is smaller than or equal to the central cross-sectional area of the subsequent photoacoustic cell.
The balancing device for both focusing power and spectral density of the rod-shaped infrared light source is shown in figure 2. Comprises the following steps: an infrared light source 110, an aspheric collecting mirror 120, an aspheric shaping mirror 130, an aperture stop 140, and a power detector 150. The infrared light source 110 is composed of a lamp fixing region portion 111 (i.e., a fixing region), a lamp transition region portion 112 (i.e., a transition region), and a lamp heating region portion 113 (i.e., a rod-shaped light source). The aspheric surface collecting mirror 120 is made of brass substrate material, and is processed on a cylinder (namely a mounting part) with the cross section diameter of 55mm to obtain a mounting through hole 121, a transition through hole 122, a reflecting surface 123 (namely a collecting acting surface) of the aspheric surface collecting mirror and a fixing threaded hole 124. The mounting through hole 121 is matched with the size of the lamp tube fixing area part 111, and the relative positions of the mounting through hole and the lamp tube fixing area part are fixed through the fixing threaded hole 124; the transition through-hole 122 is sized to match the tube transition region portion 112.
The heating region 113 of the lamp tube is a rod-shaped light source with similar blackbody radiation and size
Total radiated optical power 56W, dominant radiation wavelength of 2-14 μm, radiation spectrum being a typical infrared source spectral power distribution shown in the curve (a) of FIG. 3;
the aspherical collector mirror 120 is provided with two through holes, and the size of the installation through hole 121 is
The transition via 122 has a size of
The purpose is in order to maximize the reflection area of aspheric surface collecting mirror's plane of reflection 123, increase the collection area promptly, promote power collection efficiency.
The surface of the reflecting surface 123 of the aspheric collecting mirror is plated with a high-reflection metal film.
The surface shape of the reflecting surface 123 of the aspheric collecting mirror and the surface shape of the aspheric shaping mirror 130 are obtained by optimization of Zemax optical simulation software, so that the power of the power detector 150 at the focal plane is maximized, and the energy collecting efficiency is improved. And setting parameters in a Zemax nonsequential mode, and selecting a cylindrical light source for the light source according to the actual light source characteristics. By repeatedly optimizing the comparison and considering the practical processing feasibility, the reflecting surface 123 of the aspheric collecting mirror adopts a second even aspheric paraboloid, and the aspheric shaping mirror 130 adopts a second even aspheric surface to collect the radiation energy of the incoherent infrared light source. After optimization, the total power on the power detector 150 at the focusing point is 5.4W, which is improved by about 10 times compared with that before optimization, and the high-efficiency utilization and power improvement of the energy of the infrared light source are realized.
The surface of the aspheric surface shaping mirror 130 is plated with a corresponding optical reflecting film, and has the functions of shaping and focusing and spectral power cutting so as to achieve the effects of small size and light weight;
the surface optical reflection film of the aspheric surface shaping mirror 130 partially transmits high-power spectral components (2-6 μm), the transmittance is 30% +/-10%, and further the transmission power of the corresponding part is reduced; the transmittance of the low-power spectral components (6-14 mu m) is high and is 80-99%, so that the spectral cutting effect is realized, the power balanced output is finally realized, and the output spectral power distribution is shown as a curve (b) in fig. 3;
the distance between the rear surface of the film-coated aspheric shaping mirror 130 and the power detector 150 is as compact as possible, and the distance is 47mm in the embodiment because the position of the buffer area required by the subsequent photoacoustic cell is reserved;
the film-coated aspheric shaping mirror 130 is made of ZnSe substrate material;
the aperture diaphragm 140 is used for limiting the aperture of the light beam which is equivalent to the maximum aperture of the selected chopper, and is 32mm in the embodiment;
the power detector 150 is located at the focal plane of the shaping unit 130 and has an effective area equal to the central cross-sectional area of the subsequent photoacoustic cell, 8 x 8mm in this embodiment 2 。
The above embodiments are provided to further explain the objects, technical solutions and advantages of the present invention in detail, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A photoacoustic spectrometer, comprising:
the device gives consideration to the balance of focusing power and spectral density of the rod-shaped light source and is used for outputting light with the balance of focusing and spectral density;
a chopper arranged behind the device which gives consideration to both the focusing power and the spectral density balance of the rod-shaped light source and used for forming light which is interrupted along with time on the light modulation which is subjected to focusing and the spectral density balance;
the photoacoustic cell is arranged at the focal plane of the shaping unit and is used for containing a sample and receiving the light modulated by the chopper;
the device for balancing the focusing power and the spectral density of the rod-shaped light source comprises:
the rod-shaped light source is a rod-shaped luminous body similar to black body radiation;
the collecting unit comprises a collecting mirror, one concave side of the collecting mirror is a collecting acting surface in a high-order aspheric surface shape, the collecting acting surface cover is arranged outside the rod-shaped light source, and a high-reflection metal film is arranged on the collecting acting surface and used for reflecting and focusing light emitted by the rod-shaped light source, wherein one end of the rod-shaped light source, which is deviated from the collecting acting surface, is connected with a fixing area, and the fixing area is used for being fixedly connected with the collecting mirror;
the shaping unit comprises a shaping mirror made of ZnSe substrate materials, the shaping mirror is arranged on the side opposite to the collecting action surface, a shaping action surface in a high-order aspheric surface shape is convexly arranged on the shaping mirror, an optical reflecting film is arranged on the shaping action surface, the optical reflecting film on the shaping action surface partially transmits light beams with spectral components of 2-6 mu m, and the transmittance is 20-40%; the optical reflection film on the shaping action surface partially transmits light beams with spectral components of 6-10 mu m, and the transmittance is 50-70%; the optical reflection film on the shaping action surface performs high-transmittance transmission on light beams with spectral components of 10-14 mu m, the transmittance is 80-99%, the optical reflection film is used for performing selective partial transmission on light reflected by the collecting action surface, and spectral density balance is realized through spectral cutting;
the aperture diaphragm is arranged on one side of the shaping unit, which is far away from the collecting unit, and is used for limiting the beam aperture of the light transmitted by the shaping unit so that the light beam passing through the aperture diaphragm can be matched with the chopper;
wherein the collecting unit further comprises:
the mounting part is connected with one side of the collection action surface of the collection mirror, which is back to back;
the mounting hole set up in just run through on the installation department the collection mirror, the fixed area is arranged in the mounting hole and with installation department fixed connection.
2. The photoacoustic spectrometer of claim 1 wherein the photoacoustic spectrometer,
the size of the aperture diaphragm is the same as the maximum clear aperture of the chopper.
3. The photoacoustic spectrometer of claim 1 wherein the collection active surface has a surface shape that is a second even aspheric paraboloid;
wherein, the collecting mirror adopts brass substrate material.
4. The photoacoustic spectrometer of claim 1 wherein the shaping mirror has shaping facets in the form of high order aspheric surfaces protruding from opposite sides of the shaping mirror;
wherein, the surface type of the shaping action surface is a second even order aspheric surface.
5. The photoacoustic spectrometer of claim 1,
a fixing threaded hole is formed in the mounting part and is vertically communicated with the mounting hole; the fixing threaded hole is internally screwed with a fixing piece with external threads and used for fixing the fixing area.
6. The photoacoustic spectrometer of claim 5 wherein a transition region is disposed between the rod-shaped light source and the fixation region, said transition region having a diameter less than the diameter of the fixation region;
the mounting hole comprises a variable-diameter mounting through hole and a transition through hole, and the mounting through hole and the transition through hole are respectively matched with the mounting of the fixed area and the transition area.
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| CN201911003586.6A CN110702610B (en) | 2019-10-18 | 2019-10-18 | Device giving consideration to balance of focusing power and spectral density of rod-shaped light source and photoacoustic spectrometer |
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| CN201911003586.6A CN110702610B (en) | 2019-10-18 | 2019-10-18 | Device giving consideration to balance of focusing power and spectral density of rod-shaped light source and photoacoustic spectrometer |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4818882A (en) * | 1986-05-27 | 1989-04-04 | Aktieselskabet Bruel & Kjaer | Photoacoustic gas analyzer |
| JPH1196815A (en) * | 1997-09-18 | 1999-04-09 | Tokyo Electron Ltd | Light source device |
| CN202502046U (en) * | 2012-03-06 | 2012-10-24 | 昆明斯派特光谱科技有限责任公司 | Light spectrum transmitting terminal for spectroscopy gas analyzer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06201576A (en) * | 1993-01-11 | 1994-07-19 | Tokyo Gas Co Ltd | Irradiating/condensing apparatus |
| US5584557A (en) * | 1994-04-06 | 1996-12-17 | Janos Technology Inc. | High efficiency compact illumination system |
| US6120166A (en) * | 1998-03-09 | 2000-09-19 | Janos Technology Inc. | Light source apparatus for a spectral analyzer |
| JP3736409B2 (en) * | 2001-09-26 | 2006-01-18 | ウシオ電機株式会社 | Light source for sugar content measurement |
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2019
- 2019-10-18 CN CN201911003586.6A patent/CN110702610B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4818882A (en) * | 1986-05-27 | 1989-04-04 | Aktieselskabet Bruel & Kjaer | Photoacoustic gas analyzer |
| JPH1196815A (en) * | 1997-09-18 | 1999-04-09 | Tokyo Electron Ltd | Light source device |
| CN202502046U (en) * | 2012-03-06 | 2012-10-24 | 昆明斯派特光谱科技有限责任公司 | Light spectrum transmitting terminal for spectroscopy gas analyzer |
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