CN110699747A - Single crystal furnace - Google Patents
Single crystal furnace Download PDFInfo
- Publication number
- CN110699747A CN110699747A CN201911178653.8A CN201911178653A CN110699747A CN 110699747 A CN110699747 A CN 110699747A CN 201911178653 A CN201911178653 A CN 201911178653A CN 110699747 A CN110699747 A CN 110699747A
- Authority
- CN
- China
- Prior art keywords
- water inlet
- cooling
- single crystal
- water outlet
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a single crystal furnace, which is provided with a plurality of cooling pipes, a water inlet pipe, a water outlet pipe and a gate valve and used for cooling a furnace chamber of the single crystal furnace, wherein the temperature detection part, a regulating part and a valve plate are arranged, when the temperature detection part detects that the temperature in the furnace chamber rises, the regulating part is pushed, and the valve plate is pushed by the regulating part, so that the opening degree of the gate valve is increased, when the temperature in the furnace chamber is higher, the opening degree of the gate valve is increased, the flow of cooling liquid in the cooling pipes is increased, the furnace chamber is cooled more rapidly, when the temperature in the furnace chamber is lower, the opening degree of the gate valve is reduced, the flow of the cooling liquid in the cooling pipes is reduced, so that energy is saved, and the temperature in the furnace chamber is uniform through the matching adjustment of a plurality of cooling pipes, and the effect of automatically adjusting.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas environment and growing dislocation-free single crystals by using a Czochralski method, cooling treatment is required to be carried out on the single crystal furnace in the using process of the single crystal furnace, cooling water or cooling liquid is used in a common method, but the flow of the cooling liquid in the existing device cannot be automatically adjusted, so that uneven cooling can be caused, and the using effect of the single crystal furnace is influenced.
Disclosure of Invention
In view of the above, the present invention is directed to a single crystal furnace capable of automatically adjusting a flow rate during cooling.
Based on the above purpose, the present invention provides a single crystal furnace, which is characterized by comprising a single crystal furnace body and a cooling mechanism, wherein the single crystal furnace body comprises a furnace chamber, a furnace wall is surrounded around the furnace chamber, and the cooling mechanism comprises:
the cooling pipes are arranged in the furnace wall, and the bottom of the furnace wall of each cooling pipe is provided with a water inlet and a water outlet;
the water inlet pipe is connected with the water inlet of the cooling pipe and used for introducing cooling liquid into the cooling pipe;
the water outlet pipe is connected with the water outlet of the cooling pipe and used for leading out the cooling liquid in the cooling pipe;
the gate valve sets up and is close to water inlet department in the cooling tube, and the gate valve includes the valve plate, is connected with temperature regulation portion on the valve plate, and temperature regulation portion includes temperature detection spare and regulating part, and temperature detection spare sets up in the furnace chamber, and the regulating part is connected with the flashboard, and temperature detection spare is used for when the temperature risees, promotes the regulating part, and the regulating part promotes the valve plate, makes the aperture increase of gate valve.
Preferably, the temperature detection piece includes the closed cavity, and the closed cavity intussuseption is filled with the thermal expansion gas, and closed cavity one end is equipped with mobilizable push pedal, and the push pedal is connected with the regulating part.
Preferably, the regulating part is a spring, one end of the regulating part is connected to the temperature detection part, and the other end of the regulating part is connected with the valve plate.
Preferably, the cooling pipe is provided in a U shape, and the water inlet and the water outlet are provided at both ends of the U shape of the cooling pipe, respectively.
Preferably, the water inlet pipe is externally connected with a water inlet tank, a filter is arranged between the water inlet tank and the water inlet pipe, and the water outlet pipe is externally connected with a water outlet tank.
Preferably, the water inlet tank is arranged at the bottom of the water outlet tank, a communication valve is arranged between the water inlet tank and the water outlet tank, a temperature sensor is arranged in the water outlet tank, and the temperature sensor is electrically connected with the communication valve and can be used for opening or closing the communication valve.
From the above, it can be seen that the single crystal furnace provided by the invention is provided with the plurality of cooling pipes, the water inlet pipe, the water outlet pipe and the gate valve to cool the furnace chamber of the single crystal furnace, the temperature detection part, the adjusting part and the valve plate are arranged, when the temperature detection part detects that the temperature in the furnace chamber rises, the adjusting part is pushed, and the valve plate is pushed by the adjusting part, so that the opening degree of the gate valve is increased, therefore, when the temperature in the furnace chamber is higher, the opening degree of the gate valve is increased, the flow of cooling liquid in the cooling pipes is increased, the furnace chamber is cooled more rapidly, and when the temperature in the furnace chamber is lower, the opening degree of the gate valve is reduced, the flow of cooling liquid in the cooling pipes is reduced, so that energy is saved, and the temperature in the furnace chamber is uniform through the matching adjustment of the plurality of cooling pipes, and the effect.
Drawings
FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;
fig. 2 is a schematic view of the internal structure of the cooling tube according to the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it should be noted that "first" and "second" are merely for convenience of description and should not be construed as limitations of the embodiments of the present invention, and they are not described in any more detail in the following embodiments.
A single crystal furnace comprises a single crystal furnace body 1 and a cooling mechanism 2, the single crystal furnace body 1 comprises a furnace chamber 11, a furnace wall 12 is surrounded around the furnace chamber 11, the cooling mechanism 2 comprises a plurality of cooling pipes 21, a water inlet pipe 22 and a water outlet pipe 23, the cooling pipes 21 are installed in the furnace wall 12, the bottom of the furnace wall 12 is provided with a water inlet and a water outlet, the water inlet pipe 22 is connected with the water inlet of the cooling pipes 21 and is used for introducing cooling liquid into the cooling pipes 21, the water outlet pipe 23 is connected with the water outlet of the cooling pipes 21 and is used for leading out the cooling liquid in the cooling pipes 21, a gate valve is further arranged in the cooling pipes 21 and is close to the water inlet, the gate valve comprises a valve plate 27, a temperature adjusting part is connected onto the valve plate 27 and comprises a temperature detecting part and an adjusting part 26, the temperature detecting part is arranged in the furnace chamber 11, the adjusting part 26, the adjuster 26 pushes the valve plate 27 to increase the opening of the gate valve.
The invention is provided with a plurality of cooling pipes 21, a water inlet pipe 22, a water outlet pipe 23 and a gate valve for cooling the furnace chamber 11 of the single crystal furnace, and the temperature detection part, the adjusting part 26 and the valve plate 27 are arranged, when the temperature detection part detects the temperature rise in the furnace chamber 11, the adjusting part 26 is pushed, and the valve plate 27 is pushed by the adjusting part 26, so that the opening degree of the gate valve is increased, so that when the temperature in the furnace chamber 11 is higher, the opening degree of the gate valve is increased, the flow of cooling liquid in the cooling pipes 21 is increased, the furnace chamber 11 is cooled more rapidly, and when the temperature in the furnace chamber 11 is lower, the opening degree of the gate valve is reduced, so that the flow of cooling liquid in the cooling pipes 21 is reduced, thereby saving energy, and through the matching adjustment of a plurality of cooling pipes 21, the temperature in the furnace chamber 11 is uniform, and the effect of automatically adjusting the temperature.
As an implementation mode, the temperature detection part comprises a closed cavity 24, the closed cavity 24 is filled with thermal expansion gas, one end of the closed cavity 24 is provided with a movable push plate 25, and the push plate 25 is connected with the adjusting part 26.
Through setting up closed cavity 24 and filling the expend with heat and expand gaseously, when the temperature risees, the expend with heat and expand gaseously to promote mobilizable push pedal 25 and remove, and then promote regulating part 26, play the effect of adjusting the gate valve aperture, utilize the expend with heat and contract with cold characteristic of expend with heat gas itself, it is accurate reliable.
In one embodiment, the adjusting member 26 is a spring, one end of the adjusting member 26 is connected to the temperature detecting member, and the other end is connected to the valve plate 27, so that the adjusting member 26 is configured as a spring to rapidly assist the reset of the gate valve.
As an embodiment, the cooling pipe 21 is provided in a U shape, and the water inlet and the water outlet are respectively provided at two ends of the U shape of the cooling pipe 21, so that the cooling liquid can be better circulated, and the contact area can be increased.
As an implementation mode, the water inlet pipe 22 is externally connected with a water inlet tank, a filter is arranged between the water inlet tank and the water inlet pipe 22, the water outlet pipe 23 is externally connected with a water outlet tank, and the filter is arranged between the water inlet tank and the water inlet pipe 22, so that impurities in cooling liquid entering the cooling pipe 21 can be reduced, the cooling pipe 21 and the gate valve are protected, and the service life is prolonged.
As an implementation mode, the water outlet tank is arranged at the bottom of the water outlet tank, the communication valve is arranged between the water inlet tank and the water outlet tank, the temperature sensor is arranged in the water outlet tank and electrically connected with the communication valve and can be used for opening or closing the communication valve, and the communication valve and the temperature sensor are arranged at the bottom of the water inlet tank in the water outlet tank, so that the communication valve can be opened when the temperature of cooling liquid in the water outlet tank is low, the cooling liquid can be recycled, and energy is saved.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
In addition, well known power/ground connections to Integrated Circuit (IC) chips and other components may or may not be shown within the provided figures for simplicity of illustration and discussion, and so as not to obscure the invention. Furthermore, devices may be shown in block diagram form in order to avoid obscuring the invention, and also in view of the fact that specifics with respect to implementation of such block diagram devices are highly dependent upon the platform within which the present invention is to be implemented (i.e., specifics should be well within purview of one skilled in the art). Where specific details (e.g., circuits) are set forth in order to describe example embodiments of the invention, it should be apparent to one skilled in the art that the invention can be practiced without, or with variation of, these specific details. Accordingly, the description is to be regarded as illustrative instead of restrictive.
While the present invention has been described in conjunction with specific embodiments thereof, many alternatives, modifications, and variations of these embodiments will be apparent to those of ordinary skill in the art in light of the foregoing description. For example, other memory architectures (e.g., dynamic ram (dram)) may use the discussed embodiments.
The embodiments of the invention are intended to embrace all such alternatives, modifications and variances that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (6)
1. A single crystal furnace is characterized by comprising a single crystal furnace body and a cooling mechanism, wherein the single crystal furnace body comprises a furnace chamber, a furnace wall is surrounded around the furnace chamber, and the cooling mechanism comprises:
the cooling pipes are arranged in the furnace wall, and a water inlet and a water outlet are formed in the bottom of the furnace wall;
the water inlet pipe is connected with the water inlet of the cooling pipe and used for introducing cooling liquid into the cooling pipe;
the water outlet pipe is connected with the water outlet of the cooling pipe and used for leading out the cooling liquid in the cooling pipe;
the gate valve sets up be close to in the cooling tube water inlet department, the gate valve includes the valve plate, be connected with temperature regulation portion on the valve plate, temperature regulation portion includes temperature detection spare and regulating part, temperature detection spare sets up in the furnace chamber, the regulating part with the flashboard is connected, temperature detection spare is used for when the temperature risees, promotes the regulating part, the regulating part promotes the valve plate makes the aperture increase of gate valve.
2. The single crystal furnace according to claim 1, wherein the temperature detecting member comprises a closed cavity, the closed cavity is filled with thermal expansion gas, a movable push plate is arranged at one end of the closed cavity, and the push plate is connected with the adjusting member.
3. The single crystal furnace of claim 1, wherein the adjusting member is a spring, one end of the adjusting member is connected to the temperature detecting member, and the other end of the adjusting member is connected to the valve plate.
4. The single crystal furnace of claim 1, wherein the cooling pipe is provided in a U shape, and the water inlet and the water outlet are provided at both ends of the U shape of the cooling pipe, respectively.
5. The single crystal furnace of claim 1, wherein a water inlet tank is connected to the outside of the water inlet pipe, a filter is arranged between the water inlet tank and the water inlet pipe, and a water outlet tank is connected to the outside of the water outlet pipe.
6. The single crystal furnace according to claim 5, wherein the water inlet tank is arranged at the bottom of the water outlet tank, a communication valve is arranged between the water inlet tank and the water outlet tank, a temperature sensor is arranged in the water outlet tank, and the temperature sensor is electrically connected with the communication valve and can be used for opening or closing the communication valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911178653.8A CN110699747A (en) | 2019-11-27 | 2019-11-27 | Single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911178653.8A CN110699747A (en) | 2019-11-27 | 2019-11-27 | Single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110699747A true CN110699747A (en) | 2020-01-17 |
Family
ID=69207864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911178653.8A Pending CN110699747A (en) | 2019-11-27 | 2019-11-27 | Single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110699747A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779594A (en) * | 2021-01-29 | 2021-05-11 | 程国峰 | Single crystal furnace and use method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2773328Y (en) * | 2005-01-28 | 2006-04-19 | 王品强 | Temperature-controlled mixed gas adjusting screw for carburetor |
| CN101498941A (en) * | 2009-02-19 | 2009-08-05 | 辽宁科技学院 | Flow controller based on temperature gradient |
| CN102912420A (en) * | 2012-10-24 | 2013-02-06 | 浙江晶盛机电股份有限公司 | Closed cooling water circulation system for high-frequency power source of zone-melting single crystal furnace |
| DE102013204484A1 (en) * | 2013-03-14 | 2014-09-18 | SolarWorld Industries Thüringen GmbH | Arrangement and method for feeding a starting material into a melt for producing a monocrystalline material |
| CN207095301U (en) * | 2017-09-01 | 2018-03-13 | 河南中汇新材科技有限公司 | Silicon nitride reacting furnace furnace shell cooling water temperature control system |
| CN208346309U (en) * | 2018-06-11 | 2019-01-08 | 常州市乐萌压力容器有限公司 | Single crystal furnace body |
-
2019
- 2019-11-27 CN CN201911178653.8A patent/CN110699747A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2773328Y (en) * | 2005-01-28 | 2006-04-19 | 王品强 | Temperature-controlled mixed gas adjusting screw for carburetor |
| CN101498941A (en) * | 2009-02-19 | 2009-08-05 | 辽宁科技学院 | Flow controller based on temperature gradient |
| CN102912420A (en) * | 2012-10-24 | 2013-02-06 | 浙江晶盛机电股份有限公司 | Closed cooling water circulation system for high-frequency power source of zone-melting single crystal furnace |
| DE102013204484A1 (en) * | 2013-03-14 | 2014-09-18 | SolarWorld Industries Thüringen GmbH | Arrangement and method for feeding a starting material into a melt for producing a monocrystalline material |
| CN207095301U (en) * | 2017-09-01 | 2018-03-13 | 河南中汇新材科技有限公司 | Silicon nitride reacting furnace furnace shell cooling water temperature control system |
| CN208346309U (en) * | 2018-06-11 | 2019-01-08 | 常州市乐萌压力容器有限公司 | Single crystal furnace body |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779594A (en) * | 2021-01-29 | 2021-05-11 | 程国峰 | Single crystal furnace and use method thereof |
| CN112779594B (en) * | 2021-01-29 | 2022-05-03 | 内蒙古东立光伏电子有限公司 | Single crystal furnace and use method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110875208B (en) | Temperature control device and method for process chamber and process chamber | |
| CN110699747A (en) | Single crystal furnace | |
| CN107845843A (en) | Electrokinetic cell system and vehicle | |
| CN108474287A (en) | Cooling circuit for motor vehicles | |
| CN107846047A (en) | A kind of charging pile and cooling control method | |
| WO2006069019A3 (en) | Systems and methods of cooling blast furnaces | |
| CN105633484A (en) | Battery temperature managing system of electrombile | |
| JP2004014484A (en) | Cooling water circulation/feed system for fuel cell | |
| CN103489837B (en) | Igct | |
| CN110106547B (en) | Device for improving pulling speed of czochralski single crystal | |
| JP3846285B2 (en) | Crystal manufacturing apparatus and crystal manufacturing method | |
| CN109263432A (en) | A kind of Hydrogen Fuel-cell Vehicles heating system and control method of warming oneself | |
| KR100596462B1 (en) | Apparatus for maintaining constant temperature for quality of water measuring instrument | |
| JP2001257253A (en) | Wafer processing device and method of manufacturing wafer | |
| ES2382158T3 (en) | Procedure for temperature regulation in a fuel cell system and fuel cell system | |
| CN205944343U (en) | Water -cooled battery heat managing system based on semiconductor pyroelectric effect | |
| CN106884207A (en) | A kind of annealing process for improving polycrystal silicon ingot crystal forming rate | |
| CN104109901A (en) | Water-cooled rod and crystal growth furnace using the water-cooled rod | |
| CN106550589A (en) | circulating cooling system | |
| JP2012226927A (en) | Battery temperature control system and temperature control method | |
| KR101551034B1 (en) | Apparatus and Method for controlling open angle of control valve variably | |
| KR101795657B1 (en) | A Regulating Pressure Type of a Cooling Apparatus Having a Cooling Structure of a Thermoelement | |
| KR101701574B1 (en) | Heat storage device and temperature control method using same | |
| CN114959906B (en) | Solar cell diffusion furnace | |
| JP7027498B2 (en) | Flow furnace and its cooling method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |