CN110501812A - A kind of MEMS scanning mirror - Google Patents
A kind of MEMS scanning mirror Download PDFInfo
- Publication number
- CN110501812A CN110501812A CN201910839155.7A CN201910839155A CN110501812A CN 110501812 A CN110501812 A CN 110501812A CN 201910839155 A CN201910839155 A CN 201910839155A CN 110501812 A CN110501812 A CN 110501812A
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- CN
- China
- Prior art keywords
- stress
- bent beam
- mems scanning
- scanning mirror
- movable comb
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
Abstract
The invention discloses a kind of MEMS scanning mirrors, comprising: mirror body；The two sides of the mirror body are respectively connected with flexible stress bent beam, and the stress bent beam through-thickness residual stress is reduced from top layer to bottom；Movable comb, the movable comb are mounted on the side of the stress bent beam；Fixed broach, described fixed broach one end fixed and arranged, the other end and the stress bent beam arranged for interval；Torsion beam, described torsion beam one end are connected with the stress bent beam other end, and the torsion beam other end is connected with fixing piece.It is mismatched using the residual stress bring stress in processing technology, makes the buckling deformation of stress bent beam and drive movable comb spontaneous and generate difference in height with fixed broach.Residual stress is difficult to avoid that always more or less exist in micro-nano technology technique, therefore, realizes that vertical comb teeth does not need additional manufacturing process based on residual stress, reduces costs, and have the advantages such as self assembly, autoregistration.
Description
Technical field
The present invention relates to the technical field of micro-opto-electromechanical system, in particular to a kind of MEMS scanning mirror.
Background technique
MEMS (Micro-Electro-Mechanical System) scanning mirror based on micro-opto-electromechanical system technology can be real
Now to the accurate control and positioning of (laser) beam direction, while also having many advantages, such as that small in size, speed is fast, at low cost, thus
It is had broad application prospects in all various aspects such as Projection Display, laser radar, laser processing, free space optical communication.
For scanning mode, MEMS scanning mirror can be divided into resonant mode scanning and Quasi-static scan.It is quasi-static compared to humorous
Vibration formula has the advantages such as frequency requirement is low, have a wide range of application, control algolithm is simple.
Wherein, MEMS vertical comb drive is a kind of mainstream driving method for realizing Quasi-static scan, and conventional comb teeth drives
The fixed broach and movable comb of dynamic device are located in the same plane, and the fixed broach of vertical comb drive and movable comb
Be not located in the same plane, there are a differences in height, thus make after power-up driving movable comb to fixed broach it is mobile or
Quasi-static scan is realized in inclination.
Existing vertical comb teeth structure, it is at high cost when obtaining comb teeth difference in height, it is unfavorable for producing in enormous quantities.
Therefore, how a kind of MEMS scanning mirror is provided, cost is reduced, is that those skilled in the art's technology urgently to be resolved is asked
Topic.
Summary of the invention
In view of this, reducing cost the purpose of the present invention is to provide a kind of MEMS scanning mirror.
To achieve the above object, the invention provides the following technical scheme:
A kind of MEMS scanning mirror comprising:
Mirror body；
The two sides of the mirror body are respectively connected with flexible stress bent beam, and the stress bent beam through-thickness is residual
Residue stress is reduced from top layer to bottom；
Movable comb, the movable comb are mounted on the side of the stress bent beam；
Fixed broach, described fixed broach one end fixed and arranged, the other end and the stress bent beam arranged for interval；
Torsion beam, described torsion beam one end are connected with the stress bent beam other end, the torsion beam other end and solid
Determine part to be connected.
Preferably, in above-mentioned MEMS scanning mirror, the stress bent beam is double-layer structure, and the remnants of primer are answered
Power is less than the residual stress of the quilting material, and the movable comb is connected with the top layer of the stress bent beam.
Preferably, in above-mentioned MEMS scanning mirror, the primer of the stress bent beam is monocrystalline silicon or polysilicon, institute
The quilting material for stating stress bent beam is silica.
Preferably, in above-mentioned MEMS scanning mirror, one end that the fixing piece is used to be connected with the torsion beam has narrow
Seam.
Preferably, in above-mentioned MEMS scanning mirror, the surface of the mirror body is round, ellipse or rectangle.
Preferably, in above-mentioned MEMS scanning mirror, the surface of the mirror body is deposited with for improving the thin of wave band reflectivity
Film.
Preferably, in above-mentioned MEMS scanning mirror, the stress bent beam and the torsion beam are corresponded, and about
The mirror body is arranged symmetrically.
Preferably, in above-mentioned MEMS scanning mirror, the movable comb is distributed in the two sides of the stress bent beam, and closes
It is arranged symmetrically in the stress bent beam.
As can be seen from the above technical solutions, a kind of MEMS scanning mirror disclosed in this invention, using in processing technology
Residual stress bring stress mismatches, and makes the buckling deformation of stress bent beam and drives movable comb spontaneous and generate with fixed broach
Difference in height.Residual stress is difficult to avoid that always more or less exist, therefore, answer based on remnants in micro-nano technology technique
Power realizes that vertical comb teeth does not need additional manufacturing process, reduces costs, and has the advantages such as self assembly, autoregistration.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below to embodiment or existing
Attached drawing needed in technical description is briefly described, it is clear that, the accompanying drawings in the following description is only this hair
Bright embodiment for those of ordinary skill in the art without creative efforts, can also be according to mentioning
The attached drawing of confession obtains other attached drawings.
Fig. 1 is the structural schematic diagram of MEMS scanning mirror disclosed in the embodiment of the present invention；
Fig. 2 is the comparison diagram of the bending of MEMS scanning mirror disclosed in embodiment of the present invention front and back；
Fig. 3 is the comparison diagram of the inclination of MEMS scanning mirror disclosed in embodiment of the present invention front and back.
Specific embodiment
In view of this, core of the invention is to provide a kind of MEMS scanning mirror, cost is reduced.
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description
The present invention is described in further detail.
As shown in Figure 1-Figure 3, the invention discloses a kind of MEMS scanning mirrors comprising: mirror body 1, stress bent beam 2, can
Dynamic comb teeth 5, fixed broach 6 and torsion beam 3.Wherein, stress bent beam 2 can be bent, and one end connection 1 other end of mirror body connects
Connect torsion beam 3, the 2 through-thickness residual stress of stress bent beam from top layer to bottom reduce, with realize stress bent beam 2 by
Warpage occurs when power；The two sides of mirror body 1 are provided with stress bent beam 2, and the side of stress bent beam 2 is equipped with movable comb
5, fixed broach 6 and 5 arranged for interval of movable comb, and 6 one end of fixed broach is fixed；Above-mentioned 3 one end of torsion beam with answer
Power bent beam 2 is connected, and the other end is connected with fixing piece 4.When work, not using the residual stress bring stress in processing technology
Matching makes 2 buckling deformation of stress bent beam and drives movable comb 5 spontaneous and generate difference in height with fixed broach 6.Residual stress exists
It is difficult to avoid that always more or less exist in micro-nano technology technique, therefore, realizes that vertical comb teeth is not required to based on residual stress
Additional manufacturing process is wanted, is reduced costs, and there are the advantages such as self assembly, autoregistration.
In further embodiment, above-mentioned stress bent beam 2 is double-layer structure, and the residual stress that primer is
Less than the residual stress of quilting material.Specifically, stress bent beam 2 can be by bottom zero stress material and top compression material
Expect the double-layer structure of composition, equally there is stress gradient, and meets the condition that top has bigger residual stress than bottom.For
The position change for realizing movable comb 5, movable comb 5 is connected with the top layer of stress bent beam 2.It in practice can also basis
Different needs to set multilayered structure for stress bent beam 2, as long as guaranteeing the residual stress along short transverse from top layer the bottom of to
Layer reduces.
In preferred embodiment, the primer of above-mentioned stress bent beam 2 is the monocrystalline silicon that vertical pulling method is prepared and is sliced
Or polysilicon, residual stress can be considered zero；And quilting material is the silica of deposition, has biggish residual stress.It is above-mentioned
Material may be implemented under the action of residual stress, be bent stress bent beam 2.Other materials can also be used in practice, as long as
Guarantee that the residual stress of primer is less than the residual stress of quilting material.
Specifically, after the above-mentioned MEMS scanning mirror of processing is completed and discharged, due to the remnants of 2 double layer material of stress bent beam
Stress is different, so that total is bent upwards, i.e., shown in Fig. 2, and the more long then bending amplitude of stress bent beam 2 is bigger, Gu
Determine to form vertical comb teeth structure between comb teeth 6 and movable comb 5.Change the length of stress bent beam 2, so that it may convenient to change vertically
The vertical drop of comb structure.
In further embodiment, there is slit 7 in one end that fixing piece 4 is used to be connected with torsion beam 3.Due to slit
7 presence, so that the constraint that torsion beam 3 is subject to is smaller, structure is easier to reverse, thus there are scanning angle when slit 7 is bigger.
Due to the presence of slit 7, the freely-supported approximate with 7 junction of slit of torsion beam 3, thus the upturned height of stress bent beam 2 is more
Greatly, so that vertical comb teeth difference in height is bigger.
In one embodiment, the surface of the mirror body 1 in the application is round, ellipse or rectangle.For 1 table of mirror body
The shape in face, the i.e. shape of mirror body 1 can be configured according to different needs, in practice can in order to guarantee 1 two sides of mirror body
Dynamic 5 vertical angle of comb teeth is always, it is preferred that sets whole left and right symmetrical structure for mirror body 1, and has been arranged symmetrically in two sides
Stress bent beam 2 and torsion beam 3, torsion beam 3 and stress bent beam 2 correspond arrangement, keep entirety symmetrical about mirror body 1, with
Guarantee to guarantee 1 surfacing of mirror body in 2 stress of the stress bent beam deformation of two sides.It is answered specifically, movable comb 5 is located at
The side of power bent beam 2 shares 4 groups, and fixed broach 6 is placed corresponding thereto, equally there is 4 groups.
In order to improve the working effect of the MEMS scanning mirror in the application, it is deposited on the surface of mirror body 1 for improving wave
The film of section reflectivity.The film for being correspondingly improved the wave band reflectivity can be deposited according to applied optical band.
When work, by applying potential difference between fixed broach 6 and movable comb 5, so that it may comb movable comb 5 to fixed
Tooth 6 tilts, and drives mirror body 1 to tilt to the direction, torsion beam 3 twists at this time.Different potential differences, which can be realized, different to incline
Rake angle.After removing potential difference, due to the elastic force of torsion beam 3, structure will be returned to the original state being not powered on, that is, scheme
3。
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (8)
1. a kind of MEMS scanning mirror characterized by comprising
Mirror body (1)；
The two sides of the mirror body (1) are respectively connected with flexible stress bent beam (2), and the stress bent beam (2) is along thickness
Direction residual stress is reduced from top layer to bottom；
Movable comb (5), the movable comb (5) are mounted on the side of the stress bent beam (2)；
Fixed broach (6), described fixed broach (6) one end fixed and arranged, the other end and the stress bent beam (2) are spaced cloth
It sets；
Torsion beam (3), described torsion beam (3) one end are connected with stress bent beam (2) other end, and the torsion beam (3) is another
One end is connected with fixing piece (4).
2. MEMS scanning mirror according to claim 1, which is characterized in that the stress bent beam (2) is double-layer structure, and
The residual stress of primer is less than the residual stress of the quilting material, the movable comb (5) and the stress bent beam
(2) top layer is connected.
3. MEMS scanning mirror according to claim 2, which is characterized in that the primer of the stress bent beam (2) is
Monocrystalline silicon or polysilicon, the quilting material of the stress bent beam (2) are silica.
4. MEMS scanning mirror according to claim 1, which is characterized in that the fixing piece (4) is used for and the torsion beam
(3) connected one end has slit (7).
5. MEMS scanning mirror according to claim 1, which is characterized in that the surface of the mirror body (1) is round, ellipse
Or rectangle.
6. MEMS scanning mirror according to claim 1, which is characterized in that the surface of the mirror body (1) is deposited with for mentioning
The film of high band reflectivity.
7. MEMS scanning mirror according to claim 1-6, which is characterized in that the stress bent beam (2) and institute
Torsion beam (3) one-to-one correspondence is stated, and is arranged symmetrically about the mirror body (1).
8. MEMS scanning mirror according to claim 1-6, which is characterized in that the movable comb (5) is distributed in
The two sides of the stress bent beam (2), and be arranged symmetrically about the stress bent beam (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910839155.7A CN110501812A (en) | 2019-09-05 | 2019-09-05 | A kind of MEMS scanning mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910839155.7A CN110501812A (en) | 2019-09-05 | 2019-09-05 | A kind of MEMS scanning mirror |
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| CN110501812A true CN110501812A (en) | 2019-11-26 |
Family
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| CN201910839155.7A Pending CN110501812A (en) | 2019-09-05 | 2019-09-05 | A kind of MEMS scanning mirror |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110879466A (en) * | 2019-12-04 | 2020-03-13 | 中国科学院光电技术研究所 | Device for realizing low-frequency large-angle MEMS scanning mirror |
| CN113135547A (en) * | 2021-03-10 | 2021-07-20 | 苏州深水渔半导体有限公司 | Optical chip and method for producing the same |
| CN113900250A (en) * | 2021-10-19 | 2022-01-07 | 中国科学院光电技术研究所 | Self-adaptive optical system deformable mirror and Hartmann wavefront sensor alignment method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110879466A (en) * | 2019-12-04 | 2020-03-13 | 中国科学院光电技术研究所 | Device for realizing low-frequency large-angle MEMS scanning mirror |
| CN113135547A (en) * | 2021-03-10 | 2021-07-20 | 苏州深水渔半导体有限公司 | Optical chip and method for producing the same |
| CN113135547B (en) * | 2021-03-10 | 2024-04-19 | 苏州深水渔半导体有限公司 | Method for producing optical chip |
| CN113900250A (en) * | 2021-10-19 | 2022-01-07 | 中国科学院光电技术研究所 | Self-adaptive optical system deformable mirror and Hartmann wavefront sensor alignment method |
| CN113900250B (en) * | 2021-10-19 | 2023-07-18 | 中国科学院光电技术研究所 | Alignment method of adaptive optical system deformable mirror and Hartmann wavefront sensor |
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