CN110411373A - Apparatus control method and controller and detection device - Google Patents

Apparatus control method and controller and detection device Download PDF

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Publication number
CN110411373A
CN110411373A CN201910757853.2A CN201910757853A CN110411373A CN 110411373 A CN110411373 A CN 110411373A CN 201910757853 A CN201910757853 A CN 201910757853A CN 110411373 A CN110411373 A CN 110411373A
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China
Prior art keywords
coordinate
measurand
anticollision
coordinate system
point
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CN201910757853.2A
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Chinese (zh)
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CN110411373B (en
Inventor
陈鲁
李青格乐
吴远法
蒋路翔
邓旺财
张嵩
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Institute of Microelectronics of CAS
Skyverse Ltd
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Institute of Microelectronics of CAS
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Priority to CN201910757853.2A priority Critical patent/CN110411373B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Abstract

The disclosure proposes a kind of apparatus control method and controller and detection device, is related to detection technique field.The disclosure is according to the relative position information of measurand and anticollision element, and the priori knowledges such as shape for combining measurand and anticollision element, the minimum spacing between measurand anticollision area surface each point and anticollision element anticollision area surface each point can be calculated, and when minimum spacing is unsatisfactory for safety work requirement, it controls anticollision element or measurand stop motion or backwards to moving, prevents the generation of collision.

Description

Apparatus control method and controller and detection device
Technical field
This disclosure relates to detection technique field, in particular to a kind of apparatus control method and controller and detection device.
Background technique
With the development of modern industry, product generally requires to carry out pattern Distortion Detect, to meet the requirement of machining accuracy.
Some high-precision optical component operation strokes are short, and only 4mm, optical module is likely occurred with measurand and touches It hits, damages optical module or measurand.
Summary of the invention
The disclosure proposes a kind of anticollision solution of suitable high-precision detection.
Some embodiments of the present disclosure propose a kind of apparatus control method, and the equipment includes anticollision element, the method It include: in the anticollision element and measurand relative movement, repetition obtains measurand the first anticollision area surface The second position coordinate of the first position coordinate of each point and anticollision element the second anticollision area surface each point, described first Position coordinates and the second position coordinate are under the same coordinate system;It is sat according to the first position coordinate and the second position Mark, obtains the minimum spacing between the measurand and the anticollision element;When the minimum spacing is less than or equal to setting Distance threshold when, the articles holding table for controlling the anticollision element or/and the carrying measurand changes movement.
In some embodiments, the detection device has the first coordinate system and the second coordinate system, first coordinate system And second have transformational relation between coordinate system;The step of obtaining the first position coordinate and second position coordinate includes: to obtain Take the third place coordinate of current location measurand the first anticollision area surface each point under the second coordinate system;Obtain current location Fourth position coordinates of anticollision element the second anticollision area surface each point under the first coordinate system;It will according to the transformational relation The third place coordinate and the 4th position coordinates are unified under the same coordinate system, respectively obtaining the first position coordinate and the Two position coordinates.
In some embodiments, current location measurand the first anticollision area surface each point is obtained under the second coordinate system The step of the third place coordinate includes: to obtain when the measurand is in reference position the first anticollision area surface each point second Initial coordinate under coordinate;According to the initial coordinate and measurand from the evolution of the reference position to current location Relationship obtains the third place coordinate.
In some embodiments, the measurand includes at least one reference point, tested pair described in reference position The reference point of elephant has initial reference coordinates under the second coordinate system;It is anti-to obtain when the measurand is in reference position first Hitting initial coordinate of the area surface each point under the second coordinate includes: to be obtained according to the initial reference coordinates and measurand shape Initial coordinate of the first anticollision area surface each point under the second coordinate.
In some embodiments, at least one described reference point includes the central point of measurand.
In some embodiments, the number of the reference point is more than or equal to 3.
In some embodiments, the detection device further includes positioning device;Before obtaining the third place coordinate, also Include: to be positioned by the positioning device to the measurand, the reference point is made to be in the initial of the second coordinate system At coordinate.
In some embodiments, carrying out positioning to the measurand by the positioning device includes: to make described be tested Object is in predetermined position, is in measurand each point at the preset coordinate of the second coordinate system.
In some embodiments, the positioning device includes fixture or camera.
In some embodiments, the measurand has intrinsic coordinate system, and measurand surface each point is described It is respectively provided with intrinsic coordinate in intrinsic coordinate system, when object to be measured is in reference position, the intrinsic coordinate system and second is sat There is the second transformational relation between mark system;The first anticollision area surface each point is obtained when the measurand is in reference position Initial coordinate under two coordinates includes: according to second transformational relation by measurand the first anticollision area surface each point Intrinsic coordinate is converted to second coordinate system, and the initial coordinate of measurand the first anticollision area surface each point is obtained.
In some embodiments, the measurand have orthogonal first while and when second and central point;Institute Intrinsic coordinate system is stated using the central point as origin, and including be respectively parallel to first while and reference axis when second.
In some embodiments, the evolution relationship includes: measurand along the flat of each reference axis of the second coordinate system Vector and measurand are moved around the combination of one or more of the rotation angle vector of each reference axis of the second coordinate system.
In some embodiments, first coordinate system is identical as the second coordinate system.
In some embodiments, the detection device further include one of the first motion platform and the second motion platform or Two kinds of combinations, in which: first motion platform is configured as driving anticollision element to translate along first direction and around being parallel to the One or both of the axis rotation in one direction combination;First coordinate system includes the reference axis for being parallel to first direction;Institute The second motion platform is stated, is configured as driving measurand to translate in a second direction and in the axis rotation for being parallel to second direction One of or both combination;Second coordinate system includes the reference axis for being parallel to the second direction.
In some embodiments, the anticollision element includes eyeglass and the shell for installing the eyeglass, the detection device It further include the range sensor for being set to anticollision element, for anticollision element is opposite with the measurand for being carried on articles holding table Location information is converted into control signal, and the range sensor exposes the eyeglass, and the range sensor includes diaphragm type The combination of one or more of pressure cell, photoelectric sensor and capacitance sensor, the diaphragm type pressure cell are wrapped in The outer surface of outer cover, the photoelectric sensor are located at end of the shell towards articles holding table, and the capacitance sensor is located at The side wall of outer shell;It controls the anticollision element or/and includes: the step of carrying the articles holding table change movement of the measurand Using the control signal received and the minimum spacing as reference items, if having any one reference items to meet changes movement Trigger condition, if the high reference items of priority meet the trigger condition for changing movement, control anticollision element or/and carrying The articles holding table of measurand changes movement.
Some embodiments of the present disclosure propose a kind of controller, comprising:
Memory;And
It is coupled to the processor of the memory, the processor is configured to the finger based on storage in the memory It enables, executes the control method of any one embodiment.
Some embodiments of the present disclosure propose a kind of detection device, comprising: the control of anticollision element and any one embodiment Device.
Some embodiments of the present disclosure propose a kind of non-transient computer readable storage medium, are stored thereon with computer Program, the program realize the control method of any one embodiment when being executed by processor.
Detailed description of the invention
Attached drawing needed in embodiment or description of Related Art will be briefly described below.According to following ginseng According to the detailed description of attached drawing, the disclosure can be more clearly understood,
It should be evident that the accompanying drawings in the following description is only some embodiments of the present disclosure, skill common for this field For art personnel, without any creative labor, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram of some embodiments of disclosure detection device 10.
Fig. 2 and Fig. 3 is the schematic diagram of some embodiments of disclosure detection device 11.
Fig. 4 is the circuit diagram of some embodiments of disclosure detection device 11.
Fig. 5 is the flow diagram of some embodiments of control method of disclosure detection device 10.
Fig. 6 is the flow diagram of some embodiments of control method of disclosure detection device 10.
Fig. 7 is the second coordinate system schematic diagram of disclosure building.
Fig. 8 is the intrinsic coordinate system schematic diagram of disclosure building.
Fig. 9 is the flow diagram of some embodiments of control method of disclosure detection device 10.
Figure 10 is the schematic diagram of some embodiments of disclosure controller 117.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present disclosure, the technical solution in the embodiment of the present disclosure is carried out clear, complete Site preparation description.
Aiming at the problem that anticollision element and measurand of high-precision inspection horological device are easy to happen collision, the disclosure is proposed Corresponding hardware solution and software solution.It will be understood by those skilled in the art that the equipment can be disposed individually firmly Part solution or software solution can also dispose hardware solution and software solution simultaneously, play dual The effect of protection.The equipment is contactless device, such as non-contact detection equipment or noncontact procession equipment.It is non-to connect Touch process equipment is, for example, laser process equipment.
The hardware solution of anticollision element Yu measurand anticollision is described below with reference to FIG. 1 to FIG. 5.Wherein, in Fig. 1 In the embodiment of~Fig. 5, hardware solution is described so that the equipment is detection device 10 as an example, however, those skilled in the art Member is it is appreciated that hardware solution is equally applicable to noncontact procession equipment.
Fig. 1 is the schematic diagram of some embodiments of disclosure detection device 10.As shown in Figure 1, the detection device of the embodiment 10 include: detection device 11 and motion platform 12 etc..The some parts 121~123 of motion platform 12 are shown in Fig. 1, not Clearly mark 12.
Detection device 11 is used to carry out optical detection to measurand.Detection device 11 can be for example image documentation equipment, show Micro mirror, dispersion are total to focus set, interference detection device or light spectrum detecting apparatus etc., and detection device 11 includes anticollision element.
In the present embodiment, the anticollision element is the detector lens of detection device, and the anticollision element is tested for collecting The signal light that object returns.In other embodiments, the anticollision element can also cannot collide for other in detection device 11 Element.
Motion platform 12 further include the first motion platform, the second motion platform, third motion platform, in the 4th motion platform One of or two kinds combination.
First motion platform is configured as that anticollision element is driven to translate along first direction and around being parallel to first direction Axis rotation one or both of combination.The first direction is towards the measurand.Specifically, the first direction is flat Row is in the optical axis of the detector lens.
Specifically, first motion platform is configured as that anticollision element is driven to translate along first direction in the present embodiment.
Second motion platform is configured as that measurand is driven to translate in a second direction and around being parallel to second direction Axis rotation one or both of combination.Optical axis of the second direction perpendicular to the detector lens.
Specifically, second motion platform is configured as that measurand is driven to translate in a second direction in the present embodiment And it is rotated around the axis for being parallel to second direction.
Second motion platform includes: the first translation stage 122, and first translation stage 122 is for driving measurand It moves in a second direction;Turntable 123, for driving measurand to rotate around the axis for being parallel to second direction;Articles holding table 121 is used To place measurand.
In the present embodiment, the detection device further includes third motion platform, and the third motion platform is configured as band Dynamic measurand translates along third direction and around one or both of the axis rotation for being parallel to third direction combination.The third Direction is perpendicular to the optical axis of the detector lens, and the third direction and second direction be not identical.Specifically, the third party To perpendicular to the second direction.Third motion platform includes: the second translation stage (not marking in figure), and second translation stage is used It is moved in drive determinand along third direction.In equipment shown in Fig. 1, the vertical second direction of the first direction, and described One direction is perpendicular to third direction.
In other embodiments, the detection device can also include the 4th motion platform, the 4th motion platform quilt It is configured to that anticollision element is driven to translate along fourth direction and combine around one or both of the axis rotation for being parallel to fourth direction, The fourth direction and first direction be not identical.
The detection device further includes portal frame 13, is used to support detection device 11.
Fig. 2 and Fig. 3 is the schematic diagram of some embodiments of disclosure detection device 11.Fig. 4 is disclosure detection device 11 1 The circuit diagram of a little embodiments.
As shown in figs. 2 to 4, the detection device 11 of the embodiment generally includes the anticollision element for observing measurand 111 and the component 112 for being analyzed detection information and being handled.Anticollision element 111 includes eyeglass 111a and installation eyeglass The shell 111b of 111a.Component 112 such as can be imaged, be amplified, interference analysis, optical detection spectrum analysis are handled.
Various range sensors can be set on anticollision element 111, for example, pressure sensor 113, photoelectric sensor 115, capacitance sensor 116 etc..Anticollision element 111 and its various range sensors are referred to as bumper assembly.
As shown in figure 4, detection device 11 further includes controller 117.These sensors 113,115,116 and motion platform 12 It is electrically connected with controller 117.Controller 117 controls anticollision based on the detection signal that these sensors 113,115,116 transmit Element or articles holding table stop motion move backwards, to prevent the generation of collision or reduce collision loss.
Pressure sensor 113 includes diaphragm type pressure cell 113a and signal transducer 113b.In some embodiments, thin Membrane type pressure cell 113a is wrapped in the outer surface of the shell 111b of anticollision element 111, such as the direction of package shell 111b is set The end face of object platform 121 and the partial sidewall surface of neighbouring articles holding table 121.When diaphragm type pressure cell 113a and measurand are sent out When life is touched, the pressure-sensitive original part 113a of diaphragm type is under pressure, and resistance value changes, and anticollision element is immediately controlled at this time or sets The stop motion of object platform moves backwards, reduces the damage for anticollision element and measurand, reduces collision loss.
Thickness < 0.25mm of diaphragm type pressure cell influences the size of anticollision element very small.Diaphragm type pressure cell Response time about 1ms, can be responded rapidly to while anticollision element is collided, control anticollision element or measurand in time Stop motion moves backwards.The stress about 20g that anticollision element and measurand generate when colliding, stress are very small.Diaphragm type Pressure cell can be used 1,000,000 times or more, relatively durable.Diaphragm type pressure cell can use such as carbon, silicon, graphite, selenium Or a combination thereof the semiconductor materials such as compound realize.
In some embodiments, signal transducer 113b believes the simulation of the resistance change of diaphragm type pressure cell 113a Number digital signal is converted to, is then then forwarded to controller 117, anticollision is immediately controlled after receiving digital signal in controller 117 Element or articles holding table stop motion move backwards, reduce the damage for anticollision element and measurand, reduce collision loss. Under some applicable cases, anticollision element or articles holding table are immediately controlled after controller 117 receives digital signal backwards to movement.
In some embodiments, the outer surface of diaphragm type pressure cell 113a is also wrapped on cushioned material layer 114, such as silica gel On the one hand layer etc. protects anticollision element 111, reduce collsion damage, on the other hand allow the diaphragm type pressure cell 113a being wrapped by Effective stress, uniform force avoid malfunction or without reflection.Cushioned material layer with a thickness of mm rank, for example, 0.5mm~ 2.2mm, such as 1mm, 1.2mm etc..
In some embodiments, photoelectric sensor 115 can be located at the shell 111b of anticollision element 111 towards articles holding table Contactless anticollision pre-identification may be implemented in end, for protecting the detection end face of anticollision element 111.
Photoelectric sensor 115 is, for example, correlation photoelectric sensor, as shown in Figure 3 comprising be arranged in pairs in shell court To the transmitter and receiver of the end of articles holding table, the surface of emission of transmitter and the receiving plane of receiver are oppositely arranged, transmitter The signal of transmitting is propagated between anticollision element 111 and articles holding table 121, thus the shape before the detection end face of anticollision element 111 At a detection faces, when there is object to enter this detection faces, photoelectric sensor will test signal intensity and feed back to control Device 117.Specifically, when object to be measured does not enter detection faces, receiver can receive the signal of transmitter transmitting;When to be measured The distance between object and anticollision element very hour, object to be measured enter detection faces, and the signal of transmitter transmitting is to be measured Object blocks, and receiver is caused not receive signal, at this point, photoelectric sensor will collide warning letter to the transmitting of controller 117 Number, after controller 117 receives alarm signal, articles holding table and the stop motion of anticollision element is immediately controlled or backwards to moving, prevents The generation of collision.
Photoelectric sensor 115 is, for example, reflective photoelectric sensor, and reflective photoelectric sensor includes being set to shell court To transmitter and the receiver (the two can integrate together with) at the same position of the end of articles holding table, the surface of emission of transmitter It is identical as the direction of the receiving plane of receiver.The optical axis of the signal propagation direction vertical anti-collision element 111 of transmitter transmitting, transmitting The signal of device transmitting is propagated between anticollision element 111 and articles holding table 121.When the distance between object to be measured and anticollision element are non- Often small, when object to be measured enters the detection faces of photoelectric sensor, when the light of transmitter transmitting gets to measurand, light is anti- It is emitted back towards receiver, then photoelectric sensor senses measurand, at this point, photoelectric sensor will be touched to the transmitting of controller 117 Alarm signal is hit, after controller 117 receives alarm signal, articles holding table and the stop motion of anticollision element is immediately controlled or backwards to fortune It is dynamic, prevent the generation of collision.
In some embodiments, the side wall of outer shell of anticollision element 111 is additionally provided with one or several capacitance sensors 116. For example, two capacitance sensors are separately positioned on the opposite two side walls of shell.When there is object proximity capacitance sensor 116, The capacitance of capacitance sensor 116 can change, and the variation is unrelated with the material of measurand and reflectance, therefore can be right The measurand of a variety of materials is detected.It therefore, i.e., will be with anticollision element 111 when measurand is close to capacitance sensor 116 When side wall collides, capacitance sensor 116 will collide alarm signal to the transmission of controller 117, and controller 117 receives police After showing signal, measurand and the stop motion of anticollision element is immediately controlled or backwards to moving, prevents the generation of collision.
Fig. 5 is the flow diagram of some embodiments of control method of disclosure detection device 10.The control method is for example It can be executed by controller 117.
As shown in figure 5, the control method of the embodiment includes:
Step S51, controller receive the detection signal (or control signal) that range sensor issues, range sensor packet Include the combination of one or more of diaphragm type pressure cell, photoelectric sensor and capacitance sensor.
Step S52, controller is based on detection signal control anticollision element or/and articles holding table changes movement, such as stops fortune Dynamic or movement backwards.
For example, after controller receives the expression collision from any one sensor or the detection signal that will be collided, If current kinetic is anticollision element, controls the stop motion of anticollision element or move backwards, if current kinetic is to set Object platform, then control articles holding table stop motion or backwards to moving, if current kinetic is anticollision element and articles holding table, control is anti- It hits element and articles holding table is simultaneously stopped movement, or at least one movement backwards of control anticollision element and articles holding table.
As previously mentioned, the motion control based on pressure sensor, can reduce the damage for anticollision element and measurand Wound reduces collision loss.Motion control based on photoelectric sensor and capacitance sensor can prevent the generation of collision.
In some embodiments, when the loading end of articles holding table and anticollision element optical axis have angle, diaphragm type pressure is opened Quick element closes photoelectric sensor and capacitance sensor, at this point, photoelectric sensor and capacitance sensor may loading end with Alarm signal just is issued to controller when anticollision element does not contact actually, so that controller changes anticollision element or/and loading end Movement, influence normal detection process;When the loading end of articles holding table is vertical with anticollision element optical axis, it is pressure-sensitive to open diaphragm type Element, photoelectric sensor and capacitance sensor.To be collided to anticollision element in the case where not influencing detection process Protection.
The anticollision element of equipment and the software solution of measurand anticollision are described below with reference to Fig. 6~Fig. 7.
Fig. 6 is the flow diagram of some embodiments of control method of disclosure detection device 10.
As shown in fig. 6, the method for the embodiment includes:
In step S61, in the anticollision element and measurand relative movement of equipment, repeat to obtain measurand the The first position coordinate of one anticollision area surface each point and the second position coordinate of anticollision element the second anticollision area surface each point, First position coordinate and second position coordinate are under the same coordinate system.
Wherein, border region and upper surface of measurand the first anticollision area surface for example including measurand.Anticollision element Second anticollision area surface such as anticollision element shell end face and part or all of side wall.
It is obtained between measurand and anticollision element in step S62 according to first position coordinate and second position coordinate Minimum spacing.
Anticollision element or/and carrying are controlled when minimum spacing is less than or equal to the distance threshold of setting in step S63 The articles holding table of measurand changes movement.
Detection device has the first coordinate system and the second coordinate system, has conversion between the first coordinate system and the second coordinate system Relationship.First coordinate system can be similar and different with the second coordinate system.When first coordinate system is identical as the second coordinate system, described turn Changing relationship is transition matrix E, namely does not need to do coordinate transform, so that calculating simpler.
In the present embodiment, first coordinate system includes the reference axis for being parallel to first direction;The second coordinate system packet Include the reference axis for being respectively parallel to the second direction and third direction.First coordinate system and the second coordinate system are right angle Coordinate system.So that the calculating of first position coordinate and second position coordinate is simpler.
The step of obtaining first position coordinate and second position coordinate includes: to obtain the first anticollision of current location measurand The third place coordinate of the area surface each point under the second coordinate system;Obtain current location anticollision element the second anticollision area surface each point The 4th position coordinates under the first coordinate system;It is according to transformational relation that the third place coordinate and the 4th position coordinates is unified to same Under one coordinate system, first position coordinate and second position coordinate are respectively obtained.The same coordinate system can be the first coordinate system or Second coordinate system so that calculating is simpler, certainly, the same coordinate system be also possible to the first coordinate system and the second coordinate system it Other outer coordinate systems.
Obtain the third place coordinate of current location measurand the first anticollision area surface each point under the second coordinate system Step includes: to obtain initial coordinate of the first anticollision area surface each point under the second coordinate when measurand is in reference position; According to initial coordinate and the evolution relationship of measurand self-reference position to current location, the third place coordinate is obtained.Its In, evolution relationship is for example including measurand along each translation of axes vector of the second coordinate system and measurand around The combination of one or more of the rotation angle vector of each reference axis of two coordinate systems.
In the present embodiment, the reference position is the initial position of detection.
Measurand includes at least one reference point, is had under the second coordinate system in the reference point of reference position measurand There are initial reference coordinates.It is initial under the second coordinate to obtain the first anticollision area surface each point when measurand is in reference position Coordinate includes: first under the second coordinate according to initial reference coordinates and measurand shape the first anticollision area surface each point of acquisition Beginning coordinate.Wherein, it is based on measurand shape, the surface each point of measurand and the relative positional relationship of its reference point can be true It is fixed.
Central point of at least one reference point for example including measurand.
The number of reference point can be one or more, when the number of reference point is more than or equal to 3, can be adapted for any The measurand of shape may be generally applicable to regular polygon or sphere etc. when the number of reference point is less than 3.
For example, as shown in fig. 7, the second coordinate system of building includes x-axis, y-axis and is formed by perpendicular to x-axis and y-axis The z-axis (not shown) of plane.In reference position, measurand is mobile phone shell, and the central point for choosing mobile phone shell is reference point.Joining Examine position, in the coordinate origin of the second coordinate system, the long side of mobile phone shell is parallel to x for the initial reference coordinates of the central point of mobile phone shell The short side of axis, mobile phone shell is parallel to y-axis.It is obtained according to initial reference coordinates and mobile phone shell shape on reference position mobile phone shell surface Initial coordinate of each point under the second coordinate.Assuming that mobile phone shell translates in x-axis and y-axis direction, then according to mobile phone shell table Initial coordinate of the face each point under the second coordinate, in conjunction with translation of the mobile phone shell self-reference position to current location in x-axis and y-axis Vector can calculate position coordinates (the i.e. the third place seat in current location mobile phone shell surface each point under the second coordinate Mark).
In the present embodiment, detection device 10 further includes positioning device (not shown).Obtaining the third place coordinate Before, further includes: measurand is positioned by positioning device, reference point is made to be in the initial coordinate of the second coordinate system Place, for example, measurand is made to be in predetermined position, is in measurand each point at the preset coordinate of the second coordinate system.
Positioning device includes fixture or camera.The image information shot by camera, determines whether measurand is in pre- If in coordinate, if be not in preset coordinate, moving object to be measured and being in preset coordinate.It can be marked using fixture Specific position is made, measurand is placed into and calibrates the specific location.
In some embodiments, measurand also has intrinsic coordinate system, and measurand surface each point is in intrinsic coordinate system In be respectively provided with intrinsic coordinate, when object to be measured is in reference position, have the between intrinsic coordinate system and the second coordinate system Two transformational relations.Obtain initial coordinate of the first anticollision area surface each point under the second coordinate when measurand is in reference position It include: to be converted the intrinsic coordinate of measurand the first anticollision area surface each point to the second coordinate system according to the second transformational relation Under, obtain the initial coordinate of measurand the first anticollision area surface each point.
Measurand have orthogonal first while and when second and central point.Intrinsic coordinate system is for example with center Point is origin, and including be respectively parallel to first while and reference axis when second.
For example, as shown in figure 8, mobile phone shell has orthogonal long side and short side and central point, correspondingly, building Intrinsic coordinate system is using central point as origin, and being parallel to long side is x-axis, and being parallel to short side is y-axis.Based on mobile phone shell shape, Intrinsic coordinate of the mobile phone shell surface each point in intrinsic coordinate system can determine.It is inherently sat when being in reference position according to mobile phone shell The second transformational relation between mark system and the second coordinate system, the intrinsic coordinate of mobile phone shell surface each point is converted to the second coordinate system Under, obtain initial coordinate of the reference position mobile phone shell surface each point under the second coordinate system.Assuming that mobile phone shell is in x-axis and y-axis It is translated on direction, intrinsic coordinate system is shifted along, the second conversion between current intrinsic coordinate system and the second coordinate system Relationship also corresponding change, the then initial coordinate according to mobile phone shell surface each point under the second coordinate, in conjunction with mobile phone shell self-reference position The translation vector to current location in x-axis and y-axis is set, can calculate and be sat in current location mobile phone shell surface each point second Position coordinates (i.e. the third place coordinate) under mark.
It should be noted that the detection device has positioning device in the present embodiment, the positioning device can be passed through Measurand is set to be in predetermined position, the predetermined position is the reference position of object to be measured.In some embodiments, the inspection Measurement equipment can not have positioning device.The step of then obtaining initial position includes: to detect to the measurand, is obtained The measurement coordinate of reference point;The initial coordinate of measurand anticollision area each point is obtained according to the measurement coordinate of the reference point.
Above-described embodiment according to the relative position information of measurand and anticollision element, and combines measurand and anticollision The priori knowledges such as the shape of element, can calculate measurand anticollision area surface each point and anticollision element anticollision area surface each point it Between minimum spacing control anticollision element or measurand stop motion and when minimum spacing is unsatisfactory for safety work requirement Or backwards to moving, prevent the generation of collision.
Fig. 9 is the flow diagram of some embodiments of control method of disclosure detection device 10.The control method is for example It can be executed by controller 117.
As shown in figure 9, the control method of the embodiment includes:
Step S91, controller receive the control signal that any distance sensor issues.
Step S92, controller calculate the minimum spacing between measurand and anticollision element.
Step S93, controller is using the control signal received and the minimum spacing of calculating as reference items, if having any one A reference items meet the trigger condition for changing movement, if the high reference items of priority meet the trigger condition for changing movement, Control anticollision element or/and the articles holding table for carrying measurand change movement, such as stop motion or movement backwards.
In some embodiments, controller according to sensor control signal and calculating measurand and anticollision element it Between minimum spacing, if having any one reference items meet change movement trigger condition, control anticollision element or articles holding table Change movement.To realize the double shield of safety detection.
In some embodiments, it is also possible to be arranged sensor control signal and calculating measurand and anticollision element it Between the priority of minimum spacing can specify that the excellent of the control signal of sensor for example, for the measurand of complex contour First grade is relatively high, at this point, when the reference items of high priority do not meet the trigger condition for changing movement, even if the ginseng of low priority It examines item and meets the trigger condition for changing movement, anticollision element can not be controlled or articles holding table changes movement, when the ginseng of high priority When examining the trigger condition of item satisfaction change movement, anticollision element is immediately controlled or articles holding table changes movement.To ensure safety While detection, Interference Detection does not work as much as possible.
Figure 10 is the schematic diagram of some embodiments of disclosure controller 117.
As shown in Figure 10, the controller 117 of the embodiment includes:
Memory 117a;And
It is coupled to the processor 117b of memory, processor is configured as executing based on instruction stored in memory The control method of the detection device 10 of any one aforementioned embodiment.
Wherein, memory 117a for example may include system storage, fixed non-volatile memory medium etc..System storage Device is for example stored with operating system, application program, Boot loader (Boot Loader) and other programs etc..
Those skilled in the art should be understood that embodiment of the disclosure can provide as method, system or computer journey Sequence product.Therefore, complete hardware embodiment, complete software embodiment or combining software and hardware aspects can be used in the disclosure The form of embodiment.Moreover, it wherein includes the calculating of computer usable program code that the disclosure, which can be used in one or more, Machine can use the meter implemented in non-transient storage medium (including but not limited to magnetic disk storage, CD-ROM, optical memory etc.) The form of calculation machine program product.
The foregoing is merely the preferred embodiments of the disclosure, not to limit the disclosure, all spirit in the disclosure and Within principle, any modification, equivalent replacement, improvement and so on be should be included within the protection scope of the disclosure.

Claims (18)

1. a kind of apparatus control method, the equipment includes anticollision element, which is characterized in that the described method includes:
In the anticollision element and measurand relative movement, it is each that repetition obtains measurand the first anticollision area surface The first position coordinate of point and the second position coordinate of anticollision element the second anticollision area surface each point, described first Coordinate and the second position coordinate are set under the same coordinate system;
According to the first position coordinate and the second position coordinate, obtain between the measurand and the anticollision element Minimum spacing;
When the minimum spacing is less than or equal to the distance threshold of setting, the anticollision element or/and the carrying quilt are controlled The articles holding table for surveying object changes movement.
2. the method as described in claim 1, which is characterized in that the detection device has the first coordinate system and the second coordinate System has transformational relation between first coordinate system and the second coordinate system;
The step of obtaining the first position coordinate and second position coordinate includes: to obtain the first anticollision of current location measurand The third place coordinate of the area surface each point under the second coordinate system;Obtain anticollision element the second anticollision area surface described in current location Fourth position coordinates of each point under the first coordinate system;According to the transformational relation by the third place coordinate and the 4th position Under coordinate unification to the same coordinate system, the first position coordinate and second position coordinate are respectively obtained.
3. method according to claim 2, which is characterized in that obtain current location measurand the first anticollision area surface each point The step of the third place coordinate under the second coordinate system includes:
Obtain initial coordinate of the first anticollision area surface each point under the second coordinate when the measurand is in reference position;Root According to the initial coordinate and measurand from the evolution relationship of the reference position to current location, the third position is obtained Set coordinate.
4. method as claimed in claim 3, which is characterized in that the measurand includes at least one reference point, is being referred to The reference point of the measurand has initial reference coordinates under the second coordinate system at position;
Obtain initial coordinate packet of the first anticollision area surface each point under the second coordinate when the measurand is in reference position Include: it is initial under the second coordinate to obtain the first anticollision area surface each point according to the initial reference coordinates and measurand shape Coordinate.
5. method as claimed in claim 4, which is characterized in that at least one described reference point includes the center of measurand Point.
6. method as claimed in claim 4, which is characterized in that the number of the reference point is more than or equal to 3.
7. method as claimed in claim 4, which is characterized in that the detection device further includes positioning device;
Before obtaining the third place coordinate, further includes: positioned, made to the measurand by the positioning device The reference point is at the initial coordinate of the second coordinate system.
8. the method for claim 7, which is characterized in that positioned by the positioning device to the measurand Include: that the measurand is made to be in predetermined position, is in measurand each point at the preset coordinate of the second coordinate system.
9. the method for claim 7, which is characterized in that the positioning device includes fixture or camera.
10. method as claimed in claim 3, which is characterized in that the measurand has an intrinsic coordinate system, and described tested pair It is described solid when object to be measured is in reference position as surface each point is respectively provided with intrinsic coordinate in the intrinsic coordinate system Having has the second transformational relation between coordinate system and the second coordinate system;
Obtain initial coordinate packet of the first anticollision area surface each point under the second coordinate when the measurand is in reference position It includes: being converted the intrinsic coordinate of measurand the first anticollision area surface each point to described according to second transformational relation Under two coordinate systems, the initial coordinate of measurand the first anticollision area surface each point is obtained.
11. method as claimed in claim 10, which is characterized in that the measurand has orthogonal first side and the Two sides and central point;
The intrinsic coordinate system using the central point as origin, and including be respectively parallel to first while and reference axis when second.
12. such as the described in any item methods of claim 3 or 10, which is characterized in that the evolution relationship includes: tested pair As along each translation of axes vector of the second coordinate system and measurand in the rotation angle vector of each reference axis of the second coordinate system One of or more persons combination.
13. method according to claim 2, which is characterized in that first coordinate system is identical as the second coordinate system.
14. method according to claim 2, which is characterized in that the detection device further includes the first motion platform and second One of motion platform or two kinds of combinations, in which:
First motion platform is configured as that anticollision element is driven to translate along first direction and around the axis for being parallel to first direction One or both of rotation combination;First coordinate system includes the reference axis for being parallel to first direction;
Second motion platform is configured as that measurand is driven to translate in a second direction and around the axis for being parallel to second direction One or both of rotation combination;Second coordinate system includes the reference axis for being parallel to the second direction.
15. the method as described in claim 1, which is characterized in that
The anticollision element includes eyeglass and the shell for installing the eyeglass, and the detection device further includes being set to anticollision element Range sensor, for converting control letter for the relative position information of anticollision element and the measurand for being carried on articles holding table Number, the range sensor exposes the eyeglass, the range sensor include diaphragm type pressure cell, photoelectric sensor and The combination of one or more of capacitance sensor, the diaphragm type pressure cell are wrapped in the outer surface of outer cover, the light Electric transducer is located at end of the shell towards articles holding table, and the capacitance sensor is located at the side wall of outer shell;
Wherein, the step of controlling the anticollision element or/and carrying the articles holding table change movement of the measurand includes: that will connect The control signal received and the minimum spacing are as reference items, if there is any one reference items to meet the touching for changing movement Clockwork spring part, if the high reference items of priority meet the trigger condition for changing movement, control anticollision element or/and carrying be tested The articles holding table of object changes movement.
16. a kind of controller, comprising:
Memory;And
It is coupled to the processor of the memory, the processor is configured to the instruction based on storage in the memory, Perform claim requires the described in any item control methods of 1-15.
17. a kind of detection device, comprising: controller described in anticollision element and claim 16.
18. a kind of non-transient computer readable storage medium, is stored thereon with computer program, which is executed by processor The described in any item control methods of Shi Shixian claim 1-15.
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