CN110398502A - Microwave remote sensor based on double reentrant cavity and microflow control technique - Google Patents
Microwave remote sensor based on double reentrant cavity and microflow control technique Download PDFInfo
- Publication number
- CN110398502A CN110398502A CN201910688108.7A CN201910688108A CN110398502A CN 110398502 A CN110398502 A CN 110398502A CN 201910688108 A CN201910688108 A CN 201910688108A CN 110398502 A CN110398502 A CN 110398502A
- Authority
- CN
- China
- Prior art keywords
- layer
- cover plate
- micro
- upper layer
- fluidic chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
A kind of microwave remote sensor based on double reentrant cavity and microflow control technique, the micro-fluidic chip being placed in the resonant cavity comprising substrate integrated waveguide double reentrant cavity body and insertion；The resonant cavity is made of the cover plate of upper layer and lower layer's bottom plate overlapped, and the cover plate of upper layer and lower layer's bottom plate include top layer metallic layer, middle dielectric layer and bottom metal layer.The middle dielectric layer of cover plate of upper layer and lower layer's bottom plate includes several metal throuth holes, connects top layer and bottom metal layer.Lower layer's bottom plate has annular groove, and there are two symmetrical capacitive posts for arrangement in groove.Microchannel chip is embedded in substrate integrated waveguide double reentrant cavity by the present invention, tested liquid dielectric medium is precisely loaded in fluid channel, it induces electric field and dielectric medium to polarize interaction mechanism by force using three frequency ranges that resonant cavity excites, realizes a non-intrusion type, the reusable, high sensitivity that is easy to integrate with other planar circuits, multiband fluid media dielectric property sensor.
Description
Technical field
The invention belongs to sensor fields, and in particular to suitable for detecting the microwave remote sensor of fluid media.
Background technique
Disresonance transmission method and the resonance method currently are generally divided into the microwave sensing detection method of fluid media, compared to non-
Resonant transmission method, the resonance method have the remarkable advantages such as Q value is high, resonance frequency point is controllable, by being deviated and being dissipated using its resonance frequency point
The variation of parameter phase amplitude is penetrated, the precise determination to medium permittivity is able to achieve.Therefore, the detection based on microwave resonance mechanism
Technical solution becomes research hotspot, the extensive concern by domestic and foreign scholars.
However as the continuous development of modern detecting, microwave sensing testing system tend to miniaturization, it is integrated and right
The sensitivity of sensor and anti-interference have higher requirement.Traditional microwave sensor have volume is big, measurement sensitivity is low,
Vulnerable to such environmental effects, it will cause the disadvantages of pollution and waste of product to be tested, thus it is widely applied by very big limit
System.It is micro-fluidic and substrate integrated waveguide technology increasingly mature and universal, it can effectively solve traditional microwave harmonic technology scheme
The technical restriction of liquid dielectric medium measurement.
And microwave resonance technology based on harmonic technology difference be used for measure various chemical reagent method include single-frequency point and
Multifrequency point measurement method.For single-frequency point measurement method, due to the possible frequency displacement having the same of different mixtures, fixed frequency
Under measurement can only distinguish chemicals by frequency displacement, which has limited measurement identification reliability, i.e., due to different chemicals
Measurement in same frequency range may have identical frequency displacement, so only judging chemicals according to the offset of frequency point in a frequency range
Method it is less reliable.For multifrequency measurement method, the efficiency of measurement concentration can be effectively improved and according to different frequencies
Chemicals is distinguished in the frequency displacement of rate.
Summary of the invention
In view of the problems of the existing technology, a kind of double reentrant cavity and microflow control technique proposed by the present invention is micro-
Micro-fluidic chip is introduced into substrate collection in conjunction with substrate integrated waveguide double reentrant cavity and microflow control technique by wave sensor
At miniaturization and planarization, the measurement of three frequency ranges in waveguide double reentrant cavity, realizing sensor, chemical concentration is improved
The efficiency and accuracy of detection.
Technical scheme is as follows:
A kind of microwave remote sensor based on substrate integrated waveguide double reentrant cavity and microflow control technique, the microwave pass
Sensor includes substrate integrated waveguide double reentrant cavity body and the micro-fluidic chip that insertion is placed in the resonant cavity.
The resonant cavity is made of the cover plate of upper layer and lower layer's bottom plate overlapped, and the cover plate of upper layer and lower layer's bottom plate wrap
Containing top layer metallic layer, middle dielectric layer and bottom metal layer.
The central area of the cover plate of upper layer is up etched to part middle dielectric layer from bottom and forms cylinder shape groove, institute
It states and is embedded in micro-fluidic chip in cylinder shape groove.
Lower layer's bottom plate be etched to down from top layer part middle dielectric layer formed annular groove, annular groove outer diameter with
The cylinder shape groove outer diameter of cover plate of upper layer is aligned, and position is opposite, is superimposed with each other, and collectively forms resonant cavity with cylinder shape groove；Institute
Two centrosymmetric capacitive posts of formation in annular groove are stated, two capacitor columnar regions respectively include to be made of 13 metal throuth holes
Through-hole array.
Specifically, for the resonant cavity, a circle circle is made in the middle dielectric layer of cover plate of upper layer and lower layer's bottom plate
The metal throuth hole of shape distribution forms the cylindrical metal wall of resonant cavity to connect top layer and bottom metal layer.
There is the fluid channel of bidirectionally conductive on the micro-fluidic chip, micro-fluidic chip substrate uses PTFE polymer material.
For the resonant cavity, in the top of cover plate of upper layer, there are two tube sockets for assembly, to realize tested fluid media
Injection and extraction；Described two tube sockets are communicated with the inlet and outlet of the fluid channel of micro-fluidic chip respectively, realize fluid channel and outer
The connection of portion's flexible conduit.
There are two feed lines, two feed lines in the left and right sides of the top layer metallic layer of the cover plate of upper layer of the resonant cavity
Feed-in symmetrical about the longitudinal axis, for pumping signal.
Further, described two short circuit capacitance columnar region Bao Jun contain metal throuth hole, to connect the upper of short circuit capacitance column
Layer and lower metal, metal throuth hole radius are 0.7mm.
Further, the bidirectionally conductive fluid channel on the micro-fluidic chip is spiral shape, in order to increase test solution
The interaction area of state medium and induction electric field.The Origin And Destination region of fluid channel is equipped with one section of taper exchanging structure,
Purpose is leakage of the sample at beginning and end in order to prevent.
Microchannel chip is embedded in substrate integrated waveguide double reentrant cavity by the present invention, by tested liquid dielectric medium
It precisely loads in fluid channel, induces electric field and dielectric medium polarization interaction machine by force using three frequency ranges that resonant cavity excites
Reason, realize a non-intrusion type, it is reusable, be easy to other planar circuits integrate high sensitivity, multiband liquid matchmaker
Matter dielectric property sensor.Beneficial effect of the invention is specific as follows:
1. the measurement under fixed frequency can only be by frequency displacement come area due to the possible frequency displacement having the same of different mixtures
Divide chemicals, which has limited the reliabilities of identification.And sensor proposed by the invention, due to using double reentrant cavity knot
Structure, can excite three resonance frequency points, and the induction electric field that reentrant cavity excites under corresponding three resonance frequency points is and miniflow
The dielectric medium mutual polarization loaded in road, the frequency for causing three resonance frequency points different degrees of according to polarity effect power
Offset, therefore can realize that same dielectric medium in the sensing measurement of three frequency ranges, is improved according to these frequency offsets
The efficiency of measurement of concetration, and chemicals can be measured at different frequencies, permission is distinguished according to the frequency displacement of different frequency
Chemicals.
2. the present invention designs sensor as resonant element using substrate integrated waveguide double reentrant cavity, compared to biography
System waveguide resonant cavity, structure of the invention is more compact, and volume is more frivolous, it is easier to fabricate, utilization is highly developed
Standard printed circuit board process and photoetching process can be realized, effectively reduce manufacturing cost.In addition, substrate integrated waveguide is double
The planar structure of reentrant cavity also makes it easier for integrated with other planar circuit structures.
3. detected liquid introducing resonant cavity is induced by force electric field region using micro-fluidic chip by the present invention, it is only necessary to a small amount of liquid
Body and there will not be physical contact with sensor, solve the problems, such as that traditional sensors will cause the pollution and waste of fluid to be measured.
4. the microchannel structural design on micro-fluidic chip is dexterously helical structure by the present invention, and runner is connected using it
Fluid to be measured introducing resonant cavity is induced by force electric field region, significantly improves the sensitivity of detection.
5. the present invention uses material of the PTFE as micro-fluidic chip, effectively maintained using the characteristic of its low-loss tangent angle
The high quality factor of substrate integrated waveguide reentrant cavity, at the same the excellent chemical inertness of PTFE have greatly expanded it is designed
The application range of sensor.
Detailed description of the invention
Fig. 1 (a) is the overall structure diagram after the completion of microwave remote sensor encapsulation proposed by the present invention；
Fig. 1 (b) is the section signal of microwave remote sensor substrate integrated waveguide double reentrant cavity body proposed by the present invention
Figure；
Fig. 2 is the decomposition diagram of each component of microwave remote sensor proposed by the present invention；
Fig. 3 is that the cover plate of upper layer of microwave remote sensor substrate integrated waveguide double reentrant cavity body proposed by the present invention is whole
Structural schematic diagram；
Fig. 4 (a) is microwave remote sensor micro-fluidic chip overall structure diagram proposed by the present invention；
Fig. 4 (b) is microwave remote sensor micro-fluidic chip top view proposed by the present invention；
Fig. 5 is that lower layer's bottom plate of microwave remote sensor substrate integrated waveguide double reentrant cavity body proposed by the present invention is whole
Structural schematic diagram；
Fig. 6 is microwave remote sensor proposed by the present invention to the transmission performance curve with differing dielectric constant sample
Figure.
Specific embodiment
In order to more preferably illustrate design process and purpose, below with reference to examples and drawings, the present invention will be further described:
As shown in Figures 1 to 5, microwave remote sensor proposed by the present invention includes substrate integrated waveguide double reentrant cavity body
1 micro-fluidic chip 2 being placed in the resonant cavity with insertion.
The resonant cavity 1 is made of cover plate of upper layer 1-1 and lower layer bottom plate 1-2 overlapping.Cover plate of upper layer 1-1 and lower layer bottom
Plate 1-2 includes three-decker, respectively top layer metallic layer, middle dielectric layer and bottom metal layer.
The cover plate of upper layer 1-1 is identical with the intermediate medium layer material of lower layer bottom plate 1-2, in the present embodiment, the material
For F4B-2, relative dielectric constant 2.65, relative permeability 1, loss tangent angle is 0.0009.Wherein cover plate of upper layer and
The thickness of lower layer's bottom plate is 1.5mm.
The cover plate of upper layer 1-1 and lower layer pedestal 1-2 length L having the same and width W, preferably, its length L and
Width W is 70mm.
Two are carved with respectively at left and right sides of the top layer metallic layer of resonant cavity 1 about the symmetrical feed line 1-1-1 of the longitudinal axis,
Form signal feed-in access.The size of feed line 1-1-1 needs careful design to meet the needs of input port impedance matching.As
It is preferred that the width of feed line 1-1-1 is 3.23mm, the depth in feed-in resonant cavity is 14.5mm, feed line 1-1-1 and upper layer lid
Gap width between plate top layer coplanar metal is 1.78mm.
The metal throuth hole 1- of a circle circular arrangement is made in the middle dielectric layer of cover plate of upper layer 1-1 and lower layer pedestal 1-2
3, top layer metallic layer and bottom metal layer are connected, effect is the cylindrical metal wall to form resonant cavity 1.Preferably, golden
The radius for belonging to through-hole 1-3 is 0.4mm, and the distance of center circle between two adjacent metal throuth holes is 1mm.
Outside the region in cylindrical metal wall besieged city, the underlying metal of cover plate of upper layer 1-1 and the top layer gold of lower layer's bottom plate 1-2
Category area is identical, and the two is bonded together with conducting resinl, realizes the integrated assembly of sensor.Cover plate of upper layer and lower layer's bottom plate bond
When central axis should be aligned
In the region in cylindrical metal wall besieged city, from underlying metal toward up to part intermediate medium on cover plate of upper layer 1-1
Layer one piece of cylinder shape groove of etching, cylinder shape groove area is identical as micro-fluidic chip 2, depth of groove and micro-fluidic chip thickness
It is identical.One piece of annular groove, annular groove are etched from top-level metallic down to part middle dielectric layer on lower layer bottom plate 1-2
Two centrosymmetric short circuit capacitance column 1-2-1 of interior formation, annular groove outer diameter is identical as the groove size of cover plate of upper layer, position
Relatively, it is superimposed with each other, that is, forms resonant cavity.
Preferably, the depth of cylinder shape groove is 0.8mm.The outer diameter of annular groove is 24mm, depth of groove
For 0.8mm, the radius of short circuit capacitance column is 6.5mm, and the metal throuth hole 1-2-2 radius in short circuit capacitance column is 0.7mm, two
Distance of center circle between adjacent logical metal throuth hole is 2.5mm.
The micro-fluidic chip 2 is that face-up insertion is placed in the circular groove of resonant cavity 1, will using insulating cement
Microchannel chip front is connect with cover plate of upper layer groove top layer medium, seals fluid channel, prevents the leakage of tested medium.
Resonant cavity 1 cover plate of upper layer 1-1 top dress there are two cylindrical tube socket 3, be all connected with one on two tube sockets
Flexible conduit, to extract or be injected into the fluid channel of micro-fluidic chip 2 by fluid to be measured.
Micro-fluidic chip 2 has etched the spiral fluid channel 2-1 an of bidirectionally conductive from top to bottom.In the present embodiment,
The material of micro-fluidic chip is PTFE, can effectively maintain substrate integrated waveguide reentry type using the characteristic of its low-loss tangent angle
The high quality factor of resonant cavity, while the chemical inertness of PTFE is very big, keeps the application range of set flowmeter sensor wider.
Preferably, the Origin And Destination region of the spiral fluid channel 2-1 is equipped with one section of taper exchanging structure 2-
1-1 prevents leakage of the sample at beginning and end
Preferably, micro-fluidic chip 2 with a thickness of 0.8mm, the depth of fluid channel 2-1 is 0.45mm, and width is
2.5mm, spacing is 1.1mm between runner.
Fig. 6 is microwave remote sensor proposed by the present invention to the transfer curve figure with differing dielectric constant sample.Such as
Shown in Fig. 6, when being filled up completely air in fluid channel 2-1, double reentrant cavity is respectively in 3.4GHz, 4.8GHz and 7.1GHz
Inspire strong resonance.If fluid to be measured is uniformly injected into fluid channel 2-1, which induces by force electric field in resonant cavity
Effect is lower to generate polarity effect, to generate disturbance to the electromagnetic field in resonant cavity, eventually leads to three resonance frequency points of sensor
It changes with Insertion Loss, the accurate identification of fluid media may be implemented using the offset and insertion loss of each resonance frequency point.
Micro-fluidic chip is introduced into lining by present invention combination substrate integrated waveguide double reentrant cavity and microflow control technique
In the integrated waveguide double reentrant cavity of bottom, three frequency points, reentrant cavity internal excitation can be inspired using cavity resonator structure
The advantages of strong induction concentrates electric field and micro-fluidic chip that can be precisely controlled micro fluid obtains a non-intrusion type, repeatable makes
With, be easy to other planar circuits integrate chemical substance dielectric properties multiband sensing HIGH SENSITIVITY AND HIGH PRECISION sensor.
The invention is not limited to above embodiment, if various changes to invention or deformation do not depart from it is of the invention
Spirit and scope, it is if these changes and deformation belong within the scope of claim and equivalent technologies of the invention, then of the invention
Also these changes and deformation are intended to encompass.
Claims (8)
1. a kind of microwave remote sensor based on double reentrant cavity and microflow control technique, it is characterised in that: the microwave sensing
Device includes substrate integrated waveguide double reentrant cavity body (1) and the micro-fluidic chip (2) being embedded in the resonant cavity；
The resonant cavity (1) is made of the cover plate of upper layer (1-1) and lower layer's bottom plate (1-2) overlapped, the cover plate of upper layer (1-1)
It include top layer metallic layer, middle dielectric layer and bottom metal layer with lower layer's bottom plate (1-2)；
The central area of the cover plate of upper layer (1-1) is up etched to part middle dielectric layer from bottom and forms cylinder shape groove,
The micro-fluidic chip (2) are embedded in the cylinder shape groove；
Lower layer's bottom plate (1-2) is etched to part middle dielectric layer down from top layer and forms annular groove, annular groove outer diameter
It is aligned with the cylinder shape groove outer diameter of cover plate of upper layer, collectively forms resonant cavity with cylinder shape groove；It is formed in the annular groove
Two centrosymmetric capacitive posts (1-2-1), two capacitor columnar regions respectively include the through-hole battle array being made of metal throuth hole (1-2-2)
Column；
The middle dielectric layer of the cover plate of upper layer (1-1) and lower layer's pedestal (1-2) all has the metal throuth hole of a circle circular distribution
(1-3) connects top layer and bottom metal layer, forms the cylindrical metal wall of the resonant cavity；
The left and right region of the top layer metallic layer of the cover plate of upper layer (1-1) have two about the symmetrical feed line of the longitudinal axis (1-1-1),
From the two sides feed-in of resonant cavity (1)；
There is the fluid channel (2-1) of bidirectionally conductive on the micro-fluidic chip (2)；
The middle dielectric layer of the cover plate of upper layer (1-1) there are two perforation top layer metallic layer open through-hole (1-1-2), two
Injection and extraction of one tube socket (3) of corresponding assembly to realize tested liquid dielectric medium above through-hole；Described two pipes
Seat (3) is communicated with the inlet and outlet of the fluid channel (2-1) of micro-fluidic chip (2) respectively, realizes fluid channel and external flexible conduit
Connection.
2. microwave remote sensor according to claim 1, it is characterised in that: the fluid channel (2- on the micro-fluidic chip (2)
1) be helical form, micro-fluidic chip (2) with a thickness of 0.8mm, the depth of fluid channel (2-1) is 0.45mm, width 2.5mm,
Spacing is 1.1mm, and micro-fluidic chip substrate uses PTFE polymer material.
3. microwave remote sensor according to claim 1 or 2, it is characterised in that: the Origin And Destination of the fluid channel (2-1)
Region is equipped with one section of taper exchanging structure (2-1-1).
4. microwave remote sensor according to claim 1 or 2, it is characterised in that: the cover plate of upper layer (1-1) and lower layer's pedestal
The length L of (1-2) is identical with width W, but the thickness difference of dielectric layer among it.
5. microwave remote sensor according to claim 1 or 2, it is characterised in that: the cylinder on the cover plate of upper layer (1-1)
Groove area is identical as the area of micro-fluidic chip (2), and depth of groove and micro-fluidic chip thickness are also identical.
6. microwave remote sensor according to claim 1 or 2, it is characterised in that: feed line (1-1-1) width is
3.23mm, the feed-in depth in resonant cavity (1) two sides are 14.5mm, feed line (1-1-1) and the coplanar gold of cover plate of upper layer top layer
The gap of category is 1.78mm.
7. microwave remote sensor according to claim 1 or 2, it is characterised in that: the cover plate of upper layer (1-1) and lower layer's bottom plate
The intermediate medium layer material of (1-2) is F4B-2, and relative dielectric constant 2.65, relative permeability 1, loss tangent angle is
0.0009。
8. microwave remote sensor according to claim 1 or 2, it is characterised in that: two capacitors positioned at lower layer's pedestal
Metal throuth hole (1-2-2) radius of columnar region is 0.7mm, and the distance of center circle between two adjacent through-holes is 2.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910688108.7A CN110398502B (en) | 2019-07-29 | 2019-07-29 | Microwave sensor based on dual-in resonant cavity and microfluidic technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910688108.7A CN110398502B (en) | 2019-07-29 | 2019-07-29 | Microwave sensor based on dual-in resonant cavity and microfluidic technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110398502A true CN110398502A (en) | 2019-11-01 |
| CN110398502B CN110398502B (en) | 2022-02-11 |
Family
ID=68326356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910688108.7A Active CN110398502B (en) | 2019-07-29 | 2019-07-29 | Microwave sensor based on dual-in resonant cavity and microfluidic technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110398502B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157803A (en) * | 2020-01-15 | 2020-05-15 | 杭州电子科技大学 | Reconfigurable quarter-mode substrate integrated waveguide microwave microfluidic sensor |
| CN111481210A (en) * | 2020-04-28 | 2020-08-04 | 杭州电子科技大学 | Miniature sensor based on magnetic coupling does not have blood glucose concentration of noninvasive monitoring |
| CN111934073A (en) * | 2020-09-27 | 2020-11-13 | 成都频岢微电子有限公司 | Miniaturized wide stop band filter based on micro-strip and substrate integrated waveguide mixing |
| CN111987404A (en) * | 2020-08-13 | 2020-11-24 | 安徽蓝煜电子科技有限公司 | Substrate integrated waveguide antenna |
| CN112033979A (en) * | 2020-09-03 | 2020-12-04 | 中南大学 | Chemical liquid microwave sensor based on metamaterial and application thereof |
| CN112684259A (en) * | 2020-12-04 | 2021-04-20 | 西南大学 | Reentrant cavity sensor for measuring dielectric constant and magnetic conductivity of magnetic medium material |
| CN112798870A (en) * | 2020-12-09 | 2021-05-14 | 西南大学 | Microwave differential sensor based on substrate integrated waveguide reentry type resonant cavity and microfluidic technology |
| CN113218967A (en) * | 2021-05-26 | 2021-08-06 | 江南大学 | Uric acid microwave biosensor based on RFID concept and application thereof |
| CN113884542A (en) * | 2021-09-06 | 2022-01-04 | 中国科学院上海硅酸盐研究所 | Wireless micro-fluidic sensor based on multilayer ceramic technology |
| CN114643086A (en) * | 2020-12-21 | 2022-06-21 | 京东方科技集团股份有限公司 | Microfluidic chip, control method thereof and analysis device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150168314A1 (en) * | 2013-11-11 | 2015-06-18 | 3R Valo, société en commandite | Microwave resonator sensor and associated methods of sensing |
| CN108899262A (en) * | 2018-06-20 | 2018-11-27 | 电子科技大学 | A kind of klystron TESLA theory input cavity coupling terms processing method |
| CN109239465A (en) * | 2018-10-11 | 2019-01-18 | 西南大学 | Microwave remote sensor based on substrate integrated waveguide and microflow control technique |
| CN109781748A (en) * | 2019-01-18 | 2019-05-21 | 西南大学 | Microwave remote sensor based on differential type substrate integrated waveguide reentrant cavity and microflow control technique |
-
2019
- 2019-07-29 CN CN201910688108.7A patent/CN110398502B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150168314A1 (en) * | 2013-11-11 | 2015-06-18 | 3R Valo, société en commandite | Microwave resonator sensor and associated methods of sensing |
| CN108899262A (en) * | 2018-06-20 | 2018-11-27 | 电子科技大学 | A kind of klystron TESLA theory input cavity coupling terms processing method |
| CN109239465A (en) * | 2018-10-11 | 2019-01-18 | 西南大学 | Microwave remote sensor based on substrate integrated waveguide and microflow control technique |
| CN109781748A (en) * | 2019-01-18 | 2019-05-21 | 西南大学 | Microwave remote sensor based on differential type substrate integrated waveguide reentrant cavity and microflow control technique |
Non-Patent Citations (3)
| Title |
|---|
| MUHAMMAND USMAN MEMON 等: "Microwave Chemical Sensor Using Substrate-integrated waveguide cavity", 《SENSORS》 * |
| NIKOLINA JANKOVIC 等: "A Microwave Microfluidic Sensor Based on a Dual-Mode Resonator for Dual-Sensing Applications", 《SENSORS》 * |
| 李晓静 等: "一种用于金刚石膜沉积装置的重入式微波谐振腔", 《真空》 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157803A (en) * | 2020-01-15 | 2020-05-15 | 杭州电子科技大学 | Reconfigurable quarter-mode substrate integrated waveguide microwave microfluidic sensor |
| CN111481210A (en) * | 2020-04-28 | 2020-08-04 | 杭州电子科技大学 | Miniature sensor based on magnetic coupling does not have blood glucose concentration of noninvasive monitoring |
| CN111987404A (en) * | 2020-08-13 | 2020-11-24 | 安徽蓝煜电子科技有限公司 | Substrate integrated waveguide antenna |
| CN112033979B (en) * | 2020-09-03 | 2021-06-15 | 中南大学 | Chemical liquid microwave sensor based on metamaterial and application thereof |
| CN112033979A (en) * | 2020-09-03 | 2020-12-04 | 中南大学 | Chemical liquid microwave sensor based on metamaterial and application thereof |
| CN111934073A (en) * | 2020-09-27 | 2020-11-13 | 成都频岢微电子有限公司 | Miniaturized wide stop band filter based on micro-strip and substrate integrated waveguide mixing |
| CN112684259A (en) * | 2020-12-04 | 2021-04-20 | 西南大学 | Reentrant cavity sensor for measuring dielectric constant and magnetic conductivity of magnetic medium material |
| CN112798870A (en) * | 2020-12-09 | 2021-05-14 | 西南大学 | Microwave differential sensor based on substrate integrated waveguide reentry type resonant cavity and microfluidic technology |
| CN114643086A (en) * | 2020-12-21 | 2022-06-21 | 京东方科技集团股份有限公司 | Microfluidic chip, control method thereof and analysis device |
| CN114643086B (en) * | 2020-12-21 | 2024-03-26 | 京东方科技集团股份有限公司 | Microfluidic chip, control method thereof and analysis device |
| CN113218967A (en) * | 2021-05-26 | 2021-08-06 | 江南大学 | Uric acid microwave biosensor based on RFID concept and application thereof |
| CN113218967B (en) * | 2021-05-26 | 2022-04-22 | 江南大学 | Uric acid microwave biosensor based on RFID concept and application thereof |
| CN113884542A (en) * | 2021-09-06 | 2022-01-04 | 中国科学院上海硅酸盐研究所 | Wireless micro-fluidic sensor based on multilayer ceramic technology |
| CN113884542B (en) * | 2021-09-06 | 2024-02-06 | 中国科学院上海硅酸盐研究所 | Wireless micro-fluidic sensor based on multilayer ceramic technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110398502B (en) | 2022-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110398502A (en) | Microwave remote sensor based on double reentrant cavity and microflow control technique | |
| CN109239465A (en) | Microwave remote sensor based on substrate integrated waveguide and microflow control technique | |
| CN109781748A (en) | Microwave remote sensor based on differential type substrate integrated waveguide reentrant cavity and microflow control technique | |
| CN111257349B (en) | Microwave sensor based on substrate integrated waveguide and gap capacitance resonance technology | |
| Benkhaoua et al. | Miniaturized quasi-lumped resonator for dielectric characterization of liquid mixtures | |
| CN112798870B (en) | Microwave differential sensor based on substrate integrated waveguide reentry type resonant cavity and microfluidic technology | |
| CN111007322A (en) | Differential microwave microfluid sensor based on complementary open-loop resonator structure | |
| CN109030955A (en) | A kind of portable fluid dielectric constant measurement system based on SIW | |
| CN209745845U (en) | Liquid chemical detection sensor and detection device | |
| CN209460165U (en) | A kind of microwave remote sensor | |
| CN103308778A (en) | Dielectric constant measuring device | |
| CN113049882B (en) | Substrate integrated waveguide reentrant resonant cavity microwave sensor with annular gap | |
| Jiang et al. | Design of high sensitivity microfluidic sensor based on CSRR with interdigital structure | |
| CN110988487B (en) | Microwave microfluid sensor based on T-shaped feeder line excitation complementary open-loop resonator | |
| CN110308159B (en) | X-waveband metamaterial wave-absorbing sensor | |
| CN108279332A (en) | Fluid dielectric constant microwave measuring device based on microchannel | |
| Wu et al. | A differential THz/MW sensor for characterizing liquid samples based on CSRs | |
| Pinon et al. | Fabrication and characterization of a fully integrated biosensor associating microfluidic device and RF circuit | |
| Porwal et al. | Design of RF sensor for simultaneous detection of complex permeability and permittivity of unknown sample | |
| CN111077170B (en) | High-sensitivity microwave microfluidic sensor based on electromagnetic band gap structure | |
| US20140167783A1 (en) | Resonator and biosensor system including the same | |
| CN111307693B (en) | Passive wireless multi-stage droplet micro-fluidic detection device | |
| CN114354652A (en) | High-sensitivity microwave micro-fluidic sensor based on load opening resonant ring | |
| US20220042926A1 (en) | Microstrip-type microwave sensor | |
| CN113391044A (en) | Microfluid detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |