CN110275282B - Novel laser cutting lens - Google Patents

Novel laser cutting lens Download PDF

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Publication number
CN110275282B
CN110275282B CN201910631084.1A CN201910631084A CN110275282B CN 110275282 B CN110275282 B CN 110275282B CN 201910631084 A CN201910631084 A CN 201910631084A CN 110275282 B CN110275282 B CN 110275282B
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China
Prior art keywords
lens
curved surface
center
axicon
laser cutting
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CN201910631084.1A
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Chinese (zh)
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CN110275282A (en
Inventor
王静
王坚
赵科鹏
王国力
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Nanjing Wavelength Optoelectronics Technology Co Ltd
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Nanjing Wavelength Optoelectronics Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)

Abstract

The invention discloses a novel laser cutting lens which comprises an axicon, a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged along the incidence direction of light rays, wherein the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all positive lenses. The novel laser cutting lens disclosed by the invention is based on the propagation principle of Bessel beams, realizes simultaneous satisfaction of small focusing light spots and longer focal depth, can realize precise cutting of brittle materials such as glass, ceramics, sapphires and the like, and can remove printing ink, PVD (physical vapor deposition) and the like on the surfaces of the materials.

Description

Novel laser cutting lens
Technical Field
The invention relates to a novel laser cutting lens, and belongs to the field of cutting lenses.
Background
Laser cutting and drilling are processes in which a workpiece is heated by a high energy density laser beam to rapidly increase the temperature to the boiling point of the material in a very short period of time, the material begins to vaporize, forming vapors, which are ejected at a very high rate, and simultaneously with the ejection of the vapors, a slit is formed in the material. The laser cutting is non-contact cutting, and has the advantages of good cutting quality, high cutting efficiency, high cutting speed, good adaptability, low post-treatment cost and the like, so that the laser cutting and the drilling play an increasingly important role in industrial production and processing.
Along with the development of society, higher demands are put forward on the precision and high efficiency of material processing. A major difficulty in laser processing technology exists: the system cannot be satisfied with both a smaller focused spot and a longer depth of focus. The best effect of the current cutting lens focusing light spot range is about 10 μm, and the focal depth is about 0.5mm.
Disclosure of Invention
In order to solve the defect that the existing lens cannot have small focusing light spots and longer focal depth in laser processing, the invention provides a novel laser cutting lens.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
the utility model provides a novel laser cutting lens, includes axicon, first lens, second lens, third lens, fourth lens and fifth lens that sets gradually along light incident direction, and wherein, first lens, second lens, third lens, fourth lens and fifth lens are positive lens.
The novel laser processing lens based on the Bessel theory solves the defect that the existing lens cannot have small focusing light spots and longer focal depth at the same time. The novel laser cutting lens is used for a YAG laser or an ultraviolet 355nm laser, the diameter of a laser incident light spot is smaller than 10mm, the focal depth of the novel laser cutting lens is 1.5mm, the size of a laser focusing light spot is about 1 mu m, and the precise cutting of materials such as glass and ceramics can be realized.
In order to meet the requirement of high-power laser cutting, the axicon, the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all made of fused quartz materials.
In order to realize the precise cutting of the small focusing light spots, the vertex angle range of the axicon is 170-178 degrees, the combined focal length range of the first lens and the second lens is 100-150 mm, and the combined focal length range of the third lens, the fourth lens and the fifth lens is 10-25 mm.
In order to realize the precise cutting of the small focusing light spot, the center thickness of the conical mirror is further preferably 6+/-0.2 mm; the center thickness of the first lens is 4+/-0.2 mm; the center thickness of the second lens is 4+/-0.2 mm; the center thickness of the third lens is 1.7+/-0.2 mm; the center thickness of the fourth lens is 1.7+/-0.2 mm; the center thickness of the fifth lens is 1.5.+ -. 0.2mm.
In order to meet the requirement of high-power laser cutting, it is further preferable that the center-to-center distance between the conical lens and the first lens is 126.7+ -1 mm, the center-to-center distance between the first lens and the second lens is 56.1+ -1 mm, the center-to-center distance between the second lens and the third lens is 70.9+ -1 mm, the center-to-center distance between the third lens and the fourth lens is 9.8+ -0.5 mm, and the center-to-center distance between the fourth lens and the fifth lens is 0.3+ -0.01 mm.
In order to further consider the small focusing light spot and the longer focal depth, preferably, along the light incident direction, two surfaces of the first lens are a first curved surface and a second curved surface in sequence; the two surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, the two surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, the two surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, and the two surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence; the curvature radius of the first curved surface is 157.49 plus or minus 0.5mm, and the curvature radius of the second curved surface is-157.49 plus or minus 0.5mm; the curvature radius of the third curved surface is 72.518 +/-0.5 mm, and the curvature radius of the fourth curved surface is infinity; the curvature radius of the fifth curved surface is-122.58 plus or minus 0.5mm, and the curvature radius of the sixth curved surface is-18.23 plus or minus 0.5mm; the curvature radius of the seventh curved surface is 17.65 plus or minus 0.5mm, and the curvature radius of the eighth curved surface is-1250 plus or minus 0.5mm; the radius of curvature of the ninth curved surface is 9.6 plus or minus 0.5mm, and the radius of curvature of the tenth curved surface is 24.156 plus or minus 0.5mm.
In order to ensure the cutting precision, the axicon, the first lens, the second lens, the third lens, the fourth lens and the fifth lens are preferably arranged in a lens barrel, the lens barrel is made of aluminum, the shape of the lens barrel is a long straight barrel, and the center of the lens barrel is smaller than 1'.
Further preferably, the lens barrel comprises a first lens barrel, a second lens barrel, a connecting barrel and a third lens barrel which are sequentially connected along the axial direction, the axicon is positioned in the first lens barrel, the first lens and the second lens are respectively positioned at the end parts of the two ends in the second lens barrel, and the third lens, the fourth lens and the fifth lens are all positioned in the third lens barrel.
In order to further improve the precision and stability of the lens, the axicon is fixed through a first pressing ring; the first lens is fixed through a second pressing ring; the second lens is fixed through a third pressing ring; the inner periphery of the third lens barrel is provided with a first inner lens seat and a second inner lens seat, the third lens is arranged in the first inner lens seat, and the fourth lens and the fifth lens are arranged in the second inner lens seat; the third lens is fixed through a fourth pressing ring, and the first endoscope seat is fixed through a five-pressing ring; an adjusting space ring is arranged between the first endoscope seat and the second endoscope seat; the second endoscope seat is fixed by nylon head adjusting screws; the fifth lens is fixed through a sixth pressing ring; and a space ring is arranged between the fourth lens and the fifth lens. The lens cone is formed by assembling four sections of cylinders in a grouping way, and an adjustable screw and an adjustable spacer ring are designed in the structure and used for fine adjustment of lenses, so that the precision of the lenses is improved.
In order to reduce damage, an elastic washer is arranged between the first pressing ring and the axicon.
The technology not mentioned in the present invention refers to the prior art.
The novel laser cutting lens disclosed by the invention is based on the propagation principle of Bessel beams, realizes simultaneous satisfaction of small focusing light spots and longer focal depth, can realize precise cutting of brittle materials such as glass, ceramics, sapphires and the like, and can remove printing ink, PVD (physical vapor deposition) and the like on the surfaces of the materials.
Drawings
FIG. 1 is a light path diagram of a novel laser cutting lens in an embodiment of the invention;
FIG. 2 is a graph showing an energy distribution diagram of a novel laser cutting lens within 1.5mm of an operating band in an embodiment of the present invention;
FIG. 3 is an energy distribution diagram of a novel laser cutting lens at a 1.5mm focal depth in an embodiment of the present invention;
FIG. 4 is an internal structure diagram of a novel laser cutting lens according to an embodiment of the present invention;
wherein 1 is a conical lens, 2 is a first lens, 3 is a second lens, 4 is a third lens, 5 is a fourth lens, 6 is a fifth lens, 7 is a first pressing ring, 8 is an elastic washer, 9 is a first lens barrel, 10 is a second pressing ring, 11 is a second lens barrel, 12 is a third pressing ring, 13 is a connecting cylinder, 14 is a fourth pressing ring, 15 is a fifth pressing ring, 16 is a first inner lens seat, 17 is an adjusting spacer ring, 18 is a nylon head adjusting screw, 19 is a third lens barrel, 20 is a second inner lens seat, 21 is a spacer ring, and 22 is a sixth pressing ring.
Detailed Description
For a better understanding of the present invention, the following examples are further illustrated, but are not limited to the following examples.
Example 1
As shown in fig. 1: the utility model provides a novel laser cutting camera lens, includes taper mirror, first lens, second lens, third lens, fourth lens and the fifth lens that sets gradually along light incident direction, and aforementioned five lenses are positive lens, and taper mirror and all lenses all adopt fused quartz material preparation.
The thickness of the cone mirror is 6mm, and the vertex angle of the cone mirror is 170 degrees. Along the incident direction of light rays, the two surfaces of the first lens are sequentially provided with a first curved surface and a second curved surface; the two surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, the two surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, the two surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, and the two surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence; the radius of curvature of the first curved surface is 157.49mm, the radius of curvature of the second curved surface is-157.49 mm, and the center thickness of the first lens is 4mm. The radius of curvature of the third curved surface is 72.518mm, the radius of curvature of the fourth curved surface is Infinity, and the center thickness of the second lens is 4mm. The curvature radius of the fifth curved surface is-122.58 mm, the curvature radius of the sixth curved surface is-18.23 mm, and the center thickness of the third lens is 1.7mm. The radius of curvature of the seventh curved surface is 17.65mm, the radius of curvature of the eighth curved surface is-1250 mm, and the center thickness of the fourth lens is 1.7mm. The radius of curvature of the ninth curved surface is 9.6mm, the radius of curvature of the tenth curved surface is 24.156mm, and the center thickness of the fifth lens is 1.5mm.
The center-to-center distance between the conical lens and the first lens is 126.7mm, the center-to-center distance between the first lens and the second lens is 56.1mm, the center-to-center distance between the second lens and the third lens is 70.9mm, the center-to-center distance between the third lens and the fourth lens is 9.8mm, and the center-to-center distance between the fourth lens and the fifth lens is 0.3mm.
The combined focal length of the first lens and the second lens is 101.4mm, and the combined focal length of the third lens, the fourth lens and the fifth lens is 15.6mm.
The lens barrel is made of aluminum, the shape of the lens barrel is a long straight barrel, and the center of the lens barrel is smaller than 1'; as shown in fig. 4, the lens barrel includes a first lens barrel, a second lens barrel, a connecting barrel and a third lens barrel which are sequentially connected along an axial direction, the axicon is located in the first lens barrel, the first lens and the second lens are respectively located at the end parts of two ends in the second lens barrel, and the third lens, the fourth lens and the fifth lens are all located in the third lens barrel. The axicon is fixed through a first pressing ring, and an elastic washer is arranged between the first pressing ring and the axicon; the first lens is fixed through a second pressing ring; the second lens is fixed through a third pressing ring; the inner periphery of the third lens barrel is provided with a first inner lens seat and a second inner lens seat, an adjusting spacer ring is arranged between the first inner lens seat and the second inner lens seat, the third lens is arranged in the first inner lens seat, and the fourth lens and the fifth lens are arranged in the second inner lens seat; the third lens is fixed through a fourth pressing ring, and the first endoscope seat is fixed through a five-pressing ring; the second endoscope seat is fixed by nylon head adjusting screws; the fifth lens is fixed through a sixth pressing ring; and a space ring is arranged between the fourth lens and the fifth lens.
The diameter of a light spot of light emitted by the YAG laser after passing through the beam expander is 10mm, the light enters the laser cutting lens, glass with the thickness of 1.5mm is placed in the focal depth of 1.5mm of the lens, and fig. 2 is a cross-section energy distribution diagram when the light passes through the glass, so that the energy of the light when passing through the glass material is gradually reduced along with the distance, but the energy can be kept higher within the distance of 1.5 mm; fig. 3 is an energy distribution diagram at a depth of focus of 0.5mm, which is seen to satisfy the bessel function distribution, and which is seen to be about 1 μm in the most concentrated energy region, indicating that the focused spot of the system is about 1 μm smaller.

Claims (6)

1. Novel laser cutting lens, its characterized in that: the optical lens comprises an axicon, a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged along the incidence direction of light rays, wherein the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all positive lenses;
the axicon, the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all made of fused quartz materials;
the vertex angle range of the axicon is 170-178 degrees;
the thickness of the center of the axicon is 6+/-0.2 mm; the center thickness of the first lens is 4+/-0.2 mm; the center thickness of the second lens is 4+/-0.2 mm; the center thickness of the third lens is 1.7+/-0.2 mm; the center thickness of the fourth lens is 1.7+/-0.2 mm; the center thickness of the fifth lens is 1.5+/-0.2 mm;
the center-to-center distance between the axicon and the first lens is 126.7+/-1 mm, the center-to-center distance between the first lens and the second lens is 56.1+/-1 mm, the center-to-center distance between the second lens and the third lens is 70.9+/-1 mm, the center-to-center distance between the third lens and the fourth lens is 9.8+/-0.5 mm, and the center-to-center distance between the fourth lens and the fifth lens is 0.3+/-0.01 mm;
along the incident direction of light rays, the two surfaces of the first lens are sequentially provided with a first curved surface and a second curved surface; the two surfaces of the second lens are a third curved surface and a fourth curved surface in sequence, the two surfaces of the third lens are a fifth curved surface and a sixth curved surface in sequence, the two surfaces of the fourth lens are a seventh curved surface and an eighth curved surface in sequence, and the two surfaces of the fifth lens are a ninth curved surface and a tenth curved surface in sequence; the curvature radius of the first curved surface is 157.49 plus or minus 0.5mm, and the curvature radius of the second curved surface is-157.49 plus or minus 0.5mm; the curvature radius of the third curved surface is 72.518 +/-0.5 mm, and the curvature radius of the fourth curved surface is infinity; the curvature radius of the fifth curved surface is-122.58 plus or minus 0.5mm, and the curvature radius of the sixth curved surface is-18.23 plus or minus 0.5mm; the curvature radius of the seventh curved surface is 17.65 plus or minus 0.5mm, and the curvature radius of the eighth curved surface is-1250 plus or minus 0.5mm; the radius of curvature of the ninth curved surface is 9.6 plus or minus 0.5mm, and the radius of curvature of the tenth curved surface is 24.156 plus or minus 0.5mm.
2. The novel laser cutting lens of claim 1, wherein: and the combined focal length range of the first lens and the second lens is 100 mm-150 mm, and the combined focal length range of the third lens, the fourth lens and the fifth lens is 10 mm-25 mm.
3. The novel laser cutting lens as claimed in claim 1 or 2, wherein: the axicon, the first lens, the second lens, the third lens, the fourth lens and the fifth lens are all arranged in the lens barrel, the lens barrel is made of aluminum, the appearance of the lens barrel is a long straight barrel, and the center of the lens barrel is smaller than 1'.
4. A novel laser cutting lens as claimed in claim 3, wherein: the lens cone comprises a first lens cone, a second lens cone, a connecting cylinder and a third lens cone which are sequentially connected along the axial direction, the axicon is positioned in the first lens cone, the first lens and the second lens are respectively positioned at the end parts of the two ends in the second lens cone, and the third lens, the fourth lens and the fifth lens are all positioned in the third lens cone.
5. The novel laser cutting lens of claim 4, wherein: the axicon is fixed through a first pressing ring; the first lens is fixed through a second pressing ring; the second lens is fixed through a third pressing ring; the inner periphery of the third lens barrel is provided with a first inner lens seat and a second inner lens seat, an adjusting spacer ring is arranged between the first inner lens seat and the second inner lens seat, the third lens is arranged in the first inner lens seat, and the fourth lens and the fifth lens are arranged in the second inner lens seat; the third lens is fixed through a fourth pressing ring, and the first endoscope seat is fixed through a fifth pressing ring; the second endoscope seat is fixed by nylon head adjusting screws; the fifth lens is fixed through a sixth pressing ring; and a space ring is arranged between the fourth lens and the fifth lens.
6. The novel laser cutting lens of claim 5, wherein: an elastic washer is arranged between the first pressing ring and the axicon.
CN201910631084.1A 2019-07-12 2019-07-12 Novel laser cutting lens Active CN110275282B (en)

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CN110275282B true CN110275282B (en) 2024-02-09

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160061763A (en) * 2014-11-24 2016-06-01 주식회사 필옵틱스 Optical apparus using bessel beam and cutting apparatus thereof
CN106029588A (en) * 2013-12-17 2016-10-12 康宁股份有限公司 Laser cutting of ion-exchangeable glass substrates
CN109031682A (en) * 2018-07-10 2018-12-18 北京润和微光科技有限公司 The generation system and method for Diode laser, small spot based on diffraction optical element
CN109803786A (en) * 2016-09-30 2019-05-24 康宁股份有限公司 The device and method that transparent workpiece is laser machined using non-axis symmetry beam spot
CN210243948U (en) * 2019-07-12 2020-04-03 南京波长光电科技股份有限公司 Novel laser cutting camera lens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106029588A (en) * 2013-12-17 2016-10-12 康宁股份有限公司 Laser cutting of ion-exchangeable glass substrates
KR20160061763A (en) * 2014-11-24 2016-06-01 주식회사 필옵틱스 Optical apparus using bessel beam and cutting apparatus thereof
CN109803786A (en) * 2016-09-30 2019-05-24 康宁股份有限公司 The device and method that transparent workpiece is laser machined using non-axis symmetry beam spot
CN109031682A (en) * 2018-07-10 2018-12-18 北京润和微光科技有限公司 The generation system and method for Diode laser, small spot based on diffraction optical element
CN210243948U (en) * 2019-07-12 2020-04-03 南京波长光电科技股份有限公司 Novel laser cutting camera lens

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