Background technique
Optical parametric oscillator (Optical Parametric Oscillator, OPO) is an oscillation in optical frequency
Parametric oscillator, the frequency of input is by itLaser (that is, pump light), interacted by second nonlinear optic, turn
Change two lower output lights of frequency, signal light intoAnd ideler frequency light, the sum of two output light frequencies, which are equal to, inputs optical frequency
Rate:+=。
One important feature of optical parametric oscillator is to can produce relevant and have very wide spectral range (output light, frequency
The moveable range of the central value at rate peak) laser, that is, the laser of output has coherence, also, the frequency of the laser exported
The central value mobile range at rate peak is larger.When pumping light intensity is significantly higher than threshold value, two output light waves are very close to
Coherent state, the line width of signal light and ideler frequency light is very narrow, usually only several kHz.Now, the optical parametric oscillator of narrow linewidth
It is widely used in spectroscopy.
Traditional optical parametric oscillator includes the parts such as pump light source, OPO resonant cavity, wherein OPO resonant cavity (non-grating
Structure) can control laser output linewidth, the OPO resonant cavity includes waveguide and is set to the waveguide length direction
The hysteroscope at both ends, wherein pump light transmits in the waveguide, is filtered by the light wave that waveguide generates by the hysteroscope, finally
Obtain the relatively narrow output laser of line width.
Fig. 1 a to Fig. 1 d shows the chamber shape and light path schematic diagram of several tradition OPO resonant cavities, wherein Fig. 1 a shows two mirror lines
Property straight chamber, Fig. 1 b shows V-arrangement folding chamber, and Fig. 1 c shows the straight chamber of X-shaped, and Fig. 1 d shows four mirror annular chambers.By Fig. 1 a to Fig. 1 d it is found that passing
System OPO chamber needs constantly to extend optical path using multiple reflective mirrors, since each reflective mirror is required to occupy certain volume, moreover,
The working efficiency of OPO chamber depend on lumen type building and optical path collimation, so hysteroscope and nonlinear crystal must use it is special
Dedicated fixed structure, since hysteroscope is high to the requirement for adjusting freedom degree and heat dissipation, so being used for the mirror holder of fixing len
Usual volume is larger, and for different OPO performances, optical path is different in size, these all cause the volume of OPO chamber that can not reduce.Cause
This, traditional OPO resonant cavity is very long, such as length is currently known the optical parametric oscillation using tradition OPO resonant cavity up to 1.5m
Device, the minimum length of OPO resonant cavity will also reach 10cm, moreover, the reflex reflector lens that optical path passes through are more, energy loss is bigger.
Also big just because of volume, thermal losses is big, traditional optical parametric oscillator can not be integrated on chip.
Optical parametric oscillator has the optional characteristic of output wavelength, can be used for small range electrodeless adjustment output wave
Long, especially miniaturization or even chip-shaped optical parametric oscillator, is the core component of optic communication, quantum calculation, sensing etc..
Since OPO needs to be pumped with laser, in particular for spectrum is narrow, laser of good beam quality is pumped
Pu, to guarantee the transfer efficiency of OPO.Currently, generally by semiconductor laser pumping laser crystal, for example, using Nd:YVO3
(Nd-doped yttrium vanadate crystal), Nd:YAG(neodymium doped yttrium aluminium garnet laser) etc. pumped laser crvstals generation wavelength be 1064nm or
The pumping laser of person's frequency multiplication 532nm.The OPO for directlying adopt semiconductor laser pumping also has been reported that at present, but is used to directly produce
The semiconductor of raw laser needs to make of special process, and the linewidth narrowing of output laser can be made to 1nm or less.It is above-mentioned many
Factor causes current OPO, and structure is complicated, and volume is big, and output power is lower, poor reliability.
Specific embodiment
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistented with the present invention.On the contrary, they be only with it is such as appended
The example of device and method being described in detail in claims, some aspects of the invention are consistent.
Below by specific embodiment to the structure of on piece distributed feed-back optical parametric oscillator provided by the present application and
Working principle is described in detail.
The present invention using on lithium niobate ridge waveguide make refractive-index grating method, realization be automatically aligned to, narrow linewidth,
Stablize the on piece optical parametric oscillator of output.It can be used on piece integrated chip, photon chip light source, detector light source etc..In
The detection that can be used for clinically cancer cell in medicine can be used for the detection of air pollution in environmental science.
In the embodiment of the present application, term " on piece " used refers on small-sized or microchip, and described " distribution is anti-
Feedback ", which refers to run through on the entire path of optical path, is fed back, that is, pump light shakes from the on piece distributed feed-back optical parameter is injected
The period polarized waveguide for swinging device starts constantly to carry out oscillatory feedback, until going out to export from the period polarized waveguide.
Fig. 2 shows the embodiment of the present application preferably a kind of on piece distributed feed-back optical parametric oscillator front view structure signal
Figure, Fig. 3 show the left view of the optical parametric oscillator of on piece distributed feed-back shown in Fig. 2.
In conjunction with Fig. 2 and Fig. 3, on piece distributed feed-back optical parametric oscillator provided by the present application includes: substrate 1, is laminated to institute
It states the period polarized waveguide 2 on 1 top of substrate and is laminated to the refractive-index grating 3 on 2 top of period polarized waveguide.
It in the art, at least may include buried waveguide and two kinds of ridge waveguide for the waveguide of optical parametric oscillator
Configuration.Wherein, the structure of ridge waveguide can know that Fig. 4 shows the light that light is propagated in ridge waveguide with reference to Fig. 2 and Fig. 3
X-axis direction in Fig. 4 in the present embodiment, is known as the length direction of ridge waveguide, y-axis direction is known as by road for convenience of stating
Z-axis direction is known as the short transverse of ridge waveguide by the width direction of ridge waveguide.
In the present embodiment, the period polarized waveguide 2 is ridge waveguide, applicants contemplate that ridge waveguide is in width side
The upward left and right sides can be regarded as air substrate, or perhaps air waveguide, and further, the refractive index of air is lower than ridge
The refractive index of type waveguide, light are totally reflected in the interface self-assembling formation of ridge waveguide and air, and therefore, the present embodiment selects ridge
Basis of the waveguide as on piece distributed feed-back optical parametric oscillator.
In the present embodiment, the ridge waveguide can be obtained by the method for cutting cuboid matrix.Specifically, may be used
It to set the top surface of ridge waveguide first, then is cut to bottom surface from the top surface of ridge waveguide, cuts off ridge waveguide width side
The part of two sides to the left and right, depth of cut are the height of ridge waveguide, to obtain as shown in Figures 2 and 3 with substrate
Ridge waveguide.
In the present embodiment, the period polarized waveguide 2 is doped lithium columbate waveguide, and the doped lithium columbate waveguide includes
Fe2O3 doping lithium niobate waveguides and/or zinc doping lithium niobate waveguides can also can be used in the on piece distributed feed-back including other
The doped lithium columbate waveguide of optical parametric oscillator.
Since lithium niobate is a kind of nonlinear crystal, meanwhile, lithium niobate is also that electro-optic crystal, acousto-optic crsytal and Preset grating are brilliant
Body.Photorefractive crystal refers to that the spatial distribution under thermal effect through photo-generated carrier makes the changed crystalline substance of refractive index
Body.By the way that by light direct beam light refraction material, crystal will generate electric charge carrier (electronics or hole) in material, due to spreading, floating
The effects such as shifting, photogenic voltage are individually or comprehensive function, carrier will migrate in crystal lattice, new until being trapped in by trap
Position, since the space charge of generation causes electric-field intensity distribution in crystal, which makes crystal by electrooptic effect
Corresponding change occurs for refractive index.
Since doped lithium columbate, the especially refractive index of Fe2O3 doping lithium niobate and zinc doping lithium niobate are higher than undoped niobium
The refractive index of sour lithium, therefore, the waveguide material of the present embodiment use doped lithium columbate, while substrate material uses undoped niobic acid
Lithium forms pump light at the interface of waveguide and substrate and is totally reflected, so that pump light is propagated in the period polarized waveguide 2.
Further, the preparation work of doped lithium columbate waveguide can be passed through for herein described doped lithium columbate waveguide
Skill, for example, prepared by the methods of ion implanting or titanium diffusion.
Specifically, period polarized waveguide 2 described in the present embodiment can be prepared by the following method: from the period pole
Change the top of waveguide 2 to being doped inside it, the targets doped chemical such as ferro element or Zn-ef ficiency, in lithium niobate in matrix
Form Preset grating layer, that is, the thickness of doped lithium columbate layer, the doped lithium columbate layer is uniform;The doped lithium columbate is cut again
The then extra part of left and right two in the direction of the width, depth of cut is doping depth, thus formed using lithium niobate as substrate material,
Using doped lithium columbate as the period polarized waveguide of the ridge of waveguide material.
In the present embodiment, the period polarized waveguide 2 is periodic polarized perpendicular to the substrate 1, that is, the period pole
It is periodic polarized along its length to change waveguide.Since pump light is propagated along its length in the period polarized waveguide 2,
Therefore, the period polarized waveguide 2 is periodic polarized along its length, to realize quasi-phase matched.
In the present embodiment, correspondingly with the period polarized waveguide 2, the substrate 1 is lithium niobate substrate.
In the present embodiment, as shown in figure 3, the refractive-index grating 3 includes high refractive index layer 31 and low-index layer 32,
The high refractive index layer 31 and low-index layer 32 are alternately distributed perpendicular to the substrate 1, that is, the high refractive index layer 31 and institute
The length direction that low-index layer 32 is stated along the period polarized waveguide 2 is alternately distributed, and passes through two-beam interference or mask side
Method carries out ultraviolet lighting, forms refractive-index grating.
In the present embodiment, the refractive-index grating 3 has refractive index of the centre, that is, high refractive index layer 31 and low-refraction
The refractive index of layer 32 is symmetrically distributed in refractive index of the centre two sides, for example, refractive index of the centre is set as 2.2, high refractive index layer 31
Refractive index can be 2.201, the refractive index of low-index layer can be 2.199.
In the present embodiment, the refractive index of the centre can export the wavelength of laser according to target and set, high refractive index
The refractive index of layer 31 and low-index layer 32 can also export the wavelength of laser according to target and set.
Further, the thickness of the thickness of the high refractive index layer 31 and the low-index layer 32 is oscillation wavelength
1/4 so that pump light carries out Distributed filtering by refractive-index grating in communication process in the period polarized waveguide 2.
Further, the refractive index of the low-index layer 32 is less than the refractive index of the period polarized waveguide 2, so that
The light of oscillation wavelength can be totally reflected in period polarized waveguide, to reduce the loss of target output laser.
In the present embodiment, in the refractive-index grating 3 high refractive index layer 31 and low-index layer 32 distribution period with
Corresponding relationship is not present in lower abbreviation " refraction period " and the polarization cycle of the period polarized waveguide, that is, the refraction period can be big
In, be equal to or less than polarization cycle.
The present embodiment can be such that pump light is filtered naturally in waveguide communication process by the way that specific refractive index grating is arranged
Wave provides basis further, it is possible to form pumping light generation in minimum waveguide length to reduce the volume of optical parametric oscillator.
In another achievable mode, the on piece distributed feed-back optical parametric oscillator further includes metal electrode 4, institute
Stating metal electrode 4 is two pieces, one of to be set to 1 bottom of substrate, and another piece is set to the refractive-index grating 3 and pushes up
End.
In the present embodiment, the metal electrode 4 is plate type electrode, altogether includes two pieces, laminating in the refractive index
The bottom of the top layer of grating 3 and the substrate 1, the shape and size of two blocks of metal electrodes 4 distinguish component adjacent thereto
Shape and size matching.
The metal electrode 4 is used to apply voltage to the μ refractive-index grating 3, adjusts height by adjusting voltage strength
The refractive index of index layer 31 and the low-index layer 32 realizes reality output to control the wavelength of target output laser
The alignment of laser center characteristic wavelength and default output laser center characteristic wavelength.
Illustrate the working principle and effect of optical parametric oscillator provided by the present application with one embodiment below:
The optical parametric oscillator substrate with a thickness of 2 μm, period polarized waveguide with a thickness of 6 μm, 8 μm of width, refraction
Rate grating with a thickness of 2 μm, the refractive index of the centre of the refractive-index grating is 2.2, and refraction index changing amount is about 0.001, that is, high
The refractive index of index layer is 2.201, and the refractive index of low-index layer is 2.199, and result is as shown in FIG. 2 and 3.
Theoretical according to the transfer matrix of refractive-index grating, the transfer matrix M of refractive-index grating (1) can be counted according to the following formula
It calculates:
Formula (1)
Wherein,
K indicates wave vector, and L indicates the thickness of dielectric layer;
Further, the wave vector k (2) can be calculated according to the following formula:
Formula (2)
Wherein, n indicates refractive index;λ indicates spectral wavelength.
Further, the transfer matrix of multilayer dielectricity layerM s It (3) can calculate according to the following formula:
Formula (3)
Wherein, N indicates the quantity of dielectric layer.
Further, reflectivity r (4) can be calculated according to the following formula:
Formula (4)
Wherein, M21Indicate the second row first row in Ms matrix;
M22Indicate the second row secondary series in Ms matrix;
I is imaginary unit;
It is the wave vector of refractive-index grating leftmost side index layer;
It is the wave vector of refractive-index grating rightmost side index layer.
Wherein,k L It (5) can calculate according to the following formula:
Formula (5)
Correspondingly,k R It (6) can calculate according to the following formula:
Formula (6)
1/4 wavelength according to above-mentioned formula and high anti-multilayer film is theoretical, sets following parameter:
The oscillation wavelength wavelength of laser (target output) is that its spectrum of 1600nm(is as shown in Figure 5), it is high in refractive-index grating
Refractive index n1=2.199 of index layer, refractive index n2=2.201 of low-index layer, the center refraction of the refractive-index grating
Rate is 2.200, is arranged alternately totally 5000 layers two layers, then, and the total length single layer lateral length L of the refractive-index grating layer=
1600nm/2.200/4 in the present embodiment, the single layer lateral length of the refractive-index grating layer refer to high refractive index layer or
The length of low-index layer single layer along the x-axis direction, so that the total length for calculating the optical parametric oscillator is about 1600nm/
2.200/4 × 5000, about 0.91mm, compared with traditional optical parametric oscillator, the total length of optical parametric oscillator is foreshortened to
1mm or so is embedded on chip for it and provides basis.
Moreover, optical parametric oscillator provided by the above embodiment is and traditional optical parameter to pump light optical parametric oscillator
Oscillator minimum dimension also will be in 10cm or more.
Further, two-dimensional matrix is converted into the case where there is symmetry in three-dimensional matrice, that is, the electricity of lithium columbate crystal
Backscatter extinction logarithmic ratio () (7) can calculate according to the following formula:
=Formula (7)
Wherein, i indicates the line number after converting in two matrixes where member
J indicates the columns after converting in two matrixes where member;
Indicate i=2 in two-dimensional matrix, the electro-optic coefficient of the member of j=2, meaning of remaining electro-optic coefficient and so on.
Wherein, the specific value of electro-optic coefficient are as follows:
When applying 100v electric field to the refractive-index grating, shown in index ellipsoid equation such as following formula (8):
Formula (8)
Wherein,n e Indicate e optical index;
Indicate the direction z electric field strength;
n 0 Indicate o optical index;
X, Y and Z respectively indicates the reference axis in three directions in coordinate system, and the coordinate system is as shown in Figure 4.
Further, after applying voltage to the refractive-index grating layer, high refractive index layer in the refractive-index grating layer
It can change with the refractive index of low-index layer, also, the variations in refractive index of the high refractive index layer and low-index layer
It is worth identical, specifically, the variations in refractive index value can be calculated according to the formula as shown in following formula (9):
Formula (9)
According to above formula (9) calculate it is found that。
Bring above-mentioned variations in refractive index value into transfer matrix formula again -- formula (3), because light path occurs in refractive-index grating layer
Change, thus can calculate the mobile about 0.9nm of reflection kernel wavelength.Its output spectrum is as shown in Figure 6.
By Fig. 5 and Fig. 6, it is found that target exports laser, only peak position shifts, and remaining parameter does not almost change
Becoming, optical parametric oscillator provided by the present application can guarantee the stability of output spectrum well, and, reality output laser light
The alignment of the central feature wavelength of spectrum and default output laser spectrum central feature wavelength.
By the explanation above to optical parametric oscillator provided by the present application it is found that optical parametric oscillator energy provided by the present application
Enough that the length of optical parametric oscillator is foreshortened to a millimeter rank by least 10cm or more, thickness is only micron level, to make institute
Stating optical parametric oscillator can be applied on microchip, and the central wavelength that can export laser for different targets is counter to be pushed away
Electric field strength needed for it realizes that output wavelength has adjustability, so that optical parametric oscillator provided by the present application is narrow in realization
When line width and the technical indicator of Wavelength tunable, the accurate right of reality output laser spectrum and default laser output spectrum may be implemented
It is quasi-.
Combine detailed description and exemplary example that the application is described in detail above, but these explanations are simultaneously
It should not be understood as the limitation to the application.It will be appreciated by those skilled in the art that without departing from the application spirit and scope,
A variety of equivalent substitution, modification or improvements can be carried out to technical scheme and embodiments thereof, these each fall within the application
In the range of.The protection scope of the application is determined by the appended claims.