CN110202729A - A kind of equipment for the processing of flexible micro-nano device structure - Google Patents
A kind of equipment for the processing of flexible micro-nano device structure Download PDFInfo
- Publication number
- CN110202729A CN110202729A CN201910499077.0A CN201910499077A CN110202729A CN 110202729 A CN110202729 A CN 110202729A CN 201910499077 A CN201910499077 A CN 201910499077A CN 110202729 A CN110202729 A CN 110202729A
- Authority
- CN
- China
- Prior art keywords
- lower layer
- ontology
- molding
- upper layer
- flexible material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000465 moulding Methods 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000007493 shaping process Methods 0.000 claims abstract description 20
- 238000005119 centrifugation Methods 0.000 claims abstract description 17
- 238000002347 injection Methods 0.000 claims abstract description 9
- 239000007924 injection Substances 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 4
- 239000002086 nanomaterial Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000747 cardiac effect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/20—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. moulding inserts or for coating articles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Abstract
The invention discloses a kind of equipment for the processing of flexible micro-nano device structure.The present invention includes molding cavity device and centrifugal device.Molding cavity device includes the lower layer's molding structure being fixedly connected and upper shaping structure, and material is hard glass plate.The body plane center of lower layer's molding structure is provided with circular groove, is provided with through slot in the body plane of upper shaping structure.The circular groove and upper layer ontology bottom surface of lower layer's molding structure, form flexible material filled cavity；The through slot and lower layer's body top surface of upper shaping structure cooperate, and form flexible material injection channel；Flexible material filled cavity is communicated by flexible material injection channel with the molding cavity device external space.Centrifugal device includes centrifugal box and centrifugation motor, and centrifugal box is the closed case of temperature-controllable.The features such as present invention has preparation speed fast, and machining accuracy is high, and processing cost is low, and use scope is wide.
Description
Technical field
The invention belongs to the flexible micro-nano structures of high-precision to fabricate field, and in particular to a kind of general for flexible micro-
The equipment of nano parts structure processing.
Background technique
With micro-nano structure device, the development of especially flexible micro-nano device technology needs the manufacture of flexible micro-nano structure
Ask increasing.Have currently for the main method of micro-nano structure device fabrication, traditional photoetching technique, electron beam (EBL) at
The forming techniques such as shape and ion beam (FIB) etching.These methods primarily directed to conventional solid-state micro-nano device processing and manufacturing, but
Be to flexible micro-nano device processing support have certain limitation, conventional lithographic techniques require structure material, electron beam
And although ion beam forming method machining accuracy is high, applied widely, processing cost is costly.At present for flexible micro-
The process equipment of micro-nano structure device is researched and developed, and has some trials both at home and abroad, but due to holding in the process of flexible micro-nano device
Bubble generation is tended to have, causes sample quality to be difficult to ensure, and there are precision to be difficult to ensure in preparation process, preparation time is long etc.
Problem.
Summary of the invention
It is an object of the invention to provide a kind of equipment for the processing of flexible micro-nano device structure.
The present invention includes molding cavity device and centrifugal device.
The molding cavity device includes lower layer's molding structure and upper shaping structure；Lower layer's molding structure and upper layer at
Type structure is hard glass plate.
Lower layer's molding structure includes lower layer's ontology, and the planar central position of lower layer's ontology is provided with circular groove, under
Each corner of layer body plane is nearby uniformly provided with lower layer's screw hole.
The upper shaping structure includes upper layer ontology, is provided with through slot in the plane of upper layer ontology；One end position of through slot
In the side of upper layer ontology, open end is formed, the other end is located in the body plane of upper layer, is closed end；Upper layer ontology is flat
Each corner in face is nearby uniformly provided with upper layer screw hole.
Lower layer's ontology is identical with projected area with the flat shape of upper layer ontology；Lower layer's screw hole and upper layer screw hole number
Identical, position is measured to correspond to.
Lower layer's molding structure is fixedly connected with upper shaping structure by screw；The circle of lower layer's molding structure is recessed
The bottom surface of slot and upper layer ontology forms flexible material filled cavity；The through slot of upper shaping structure and the top surface of lower layer's ontology
Cooperation forms flexible material injection channel；Flexible material filled cavity passes through outside flexible material injection channel and molding cavity device
Space communicates；Flexible material filled cavity side wall is provided with sealing ring.
The centrifugal device includes centrifugal box and centrifugation motor, and centrifugal box is the closed case of temperature-controllable, centrifugation electricity
Machine be arranged in centrifugal box, be centrifuged bracket center and centrifugation motor power output axis connection, molding cavity device be placed on from
In the supporter of cardiac skeleton.
Further, the bottom surface of lower layer's ontology and the top surface of upper layer ontology are rectangle, square or regular polygon.
Further, the diameter of the circular groove is 100mm~300mm, and depth is 2~3mm.
Further, the centrifugation motor speed is 500rpm~5000rpm.
Closed mold is used in this equipment, realizes the method that temperature control is processed simultaneously in conjunction with centrifuge.Pass through sealed mold
Method can guarantee the machining accuracy of micro-nano device, by the way of centrifugation processing, it is ensured that the flexible micro-nano device processed
For bubbles to improve device quality, the quick of flexible micro-nano structure device is not may be implemented in the means of combination temperature control to part
Processing.
Compared with prior art, the present invention has following effect:
The present invention can guarantee the formation precision of flexible micro-nano structure by sealing fixed micro-structure template.By control from
Cavity temperature during the molding of heart speed and flexible micro-nano structure, it is ensured that the quality of flexible micro-nano structure simultaneously shortens manufacture
Time.This mode, which can be expanded, has wider application range for various flexible materials.
Compared to traditional flexible micro-nano structure processing technology, equipment proposed by the invention only needs certain structure mould
Plate can form required micro-nano structure in conjunction with a variety of flexible materials, have the characteristics that manufacturing cost is low.In conjunction with centrifugation and temperature control
Technology can guarantee the accuracy of manufacture and finished product speed of flexible micro-nano structure.
The features such as present invention has preparation speed fast, and machining accuracy is high, and processing cost is low, and use scope is wide.
Detailed description of the invention
Fig. 1-1 is the floor map of molding cavity device of the invention；
Fig. 1-2 is the A-A cross-sectional view of Fig. 1-1；
Fig. 2-1 is the floor map of lower layer's molding structure in molding cavity device；
Fig. 2-2 is the B-B cross-sectional view of Fig. 2-1；
Fig. 3-1 is the floor map of molding cavity device molding structure at the middle and upper levels；
Fig. 3-2 is the C-C cross-sectional view of Fig. 3-1；
Fig. 4 is overall schematic of the invention.
Specific embodiment
Below in conjunction with drawings and examples, the present invention is described further.
As shown in figure 4, a kind of equipment for the processing of flexible micro-nano device structure, including molding cavity device and centrifugation dress
It sets.
As shown in Fig. 1-1 and 1-2, molding cavity device includes lower layer's molding structure 1 and upper shaping structure 2.Lower layer at
Type structure 1 and upper shaping structure 2 are hard glass plate.
As shown in Fig. 2-1 and 2-2, lower layer's molding structure 1 includes lower layer's ontology 1-1, and the bottom surface of lower layer ontology 1-1 is rectangle
Or regular polygon (the present embodiment is square).The planar central position of lower layer ontology 1-1 is provided with circular groove 1-2, round recessed
The diameter of slot 1-2 is 100mm~300mm, and depth is 2~3mm.Each corner of lower layer's ontology 1-1 plane is nearby uniformly provided with
Lower layer screw hole 1-3.
As shown in Fig. 3-1 and 3-2, upper shaping structure 2 includes upper layer ontology 2-1, and the top surface of upper layer ontology 2-1 is rectangle
Or regular polygon (the present embodiment is square).Through slot 2-2 is provided in the plane of upper layer ontology 2-1.One end of through slot 2-2 is located at
The side of upper layer ontology 2-1 forms open end, and the other end is located in upper layer ontology 2-1 plane, is closed end.Upper layer sheet
Each corner of body 2-1 plane is nearby uniformly provided with upper layer screw hole 2-3.
As shown in Fig. 1-1 and 1-2, the flat shape of lower layer ontology 1-1 and upper layer ontology 2-1 is identical with projected area；Under
Layer screw hole 1-3 is identical with upper layer screw hole 2-3 quantity (lower layer's screw hole 1-3 and upper layer screw hole 2-3 is four in the present embodiment), position
Set corresponding (being located on four angles).
Lower layer's molding structure 1 is fixedly connected with upper shaping structure 2 by screw；The circular groove of lower layer's molding structure 1
The bottom surface of 1-2 and upper shaping structure 2 form flexible material filled cavity 3；The through slot 2-2 of upper shaping structure 2 and lower layer
The top surface of molding structure 1 cooperates, and forms flexible material injection channel 4；Filled cavity 3 passes through injection channel 4 and molding cavity device
The external space communicates.3 side wall of flexible material filled cavity is provided with sealing ring 5.
As shown in figure 4, centrifugal device includes centrifugal box 7 and centrifugation motor 8, centrifugal box 7 is the closed case of temperature-controllable,
It is centrifuged motor 8 to be arranged in centrifugal box 7, centrifugation 8 revolving speed of motor is centrifuged center and the centrifugation of bracket 9 in 500rpm~5000rpm
The power output axis connection of motor 8, molding cavity device are placed in the supporter 10 of centrifugation bracket 9.
The flexibility micro-nano device structure process equipment is mainly achieved by following steps:
Step 1. chooses the wafer 6 (conventional wafer size is 4 cun~12 cun) of suitable size, passes through conventional etching shape
At graphics template, the bottom circular groove 1-2 is then placed it in；
Corresponding sealing ring 5 is placed on above template wafer by step 2., and upper shaping structure 2 is covered, solid with screw
It is shaped as complete molding cavity device；
Step 3. chooses flexible material solution and is injected into flexibility by the filler of 4 open end of flexible material injection channel
In material filled cavity 3；
Molding cavity device is put into supporter 10 by step 4., closes 8 turns of motor of centrifugal box 7, setting temperature and centrifugation
Speed forms fixed flexible structure after centrifugation；
Step 5. removes screw, separates lower layer's molding structure 1 and upper shaping structure 2, and flexibility needed for final acquisition is micro-
Micro-nano structure.
Claims (4)
1. a kind of equipment for the processing of flexible micro-nano device structure, it is characterised in that:
Including molding cavity device and centrifugal device；
The molding cavity device includes lower layer's molding structure (1) and upper shaping structure (2)；Lower layer's molding structure (1) and
Upper shaping structure (2) is hard glass plate；
Lower layer's molding structure (1) includes lower layer's ontology (1-1), and the planar central position of lower layer's ontology (1-1) is provided with circle
Each corner of connected in star (1-2), lower layer's ontology (1-1) plane is nearby uniformly provided with lower layer's screw hole (1-3)；
The upper shaping structure (2) includes upper layer ontology (2-1), is provided with through slot (2- in the plane of upper layer ontology (2-1)
2)；One end of through slot (2-2) is located at the side of upper layer ontology (2-1), forms open end, and the other end is located at upper layer ontology
It is closed end in (2-1) plane；Each corner of upper layer ontology (2-1) plane is nearby uniformly provided with upper layer screw hole (2-3)；
Lower layer's ontology (1-1) is identical with projected area with the flat shape of upper layer ontology (2-1)；Lower layer's screw hole (1-3)
It is identical with upper layer screw hole (2-3) quantity, position is corresponding；
Lower layer's molding structure (1) is fixedly connected with upper shaping structure (2) by screw；Lower layer's molding structure (1)
The bottom surface of circular groove (1-2) and upper layer ontology (2-1) is formed flexible material filled cavity (3)；Upper shaping structure (2)
Through slot (2-2) and lower layer's ontology (1-1) top surface cooperate, formed flexible material injection channel (4)；Flexible material filled cavity
(3) it is communicated by flexible material injection channel (4) with the molding cavity device external space；Along flexible material filled cavity (3), side wall is set
It is equipped with sealing ring (5)；
The centrifugal device includes centrifugal box (7) and centrifugation motor (8), and centrifugal box (7) is the closed case of temperature-controllable, from
Electrocardiograph (8) setting is centrifuged the center of bracket (9) and the power output axis connection of centrifugation motor (8) in centrifugal box (7), at
Cavity device is placed in the supporter (10) of centrifugation bracket (9).
2. a kind of equipment for the processing of flexible micro-nano device structure as described in claim 1, it is characterised in that: under described
The bottom surface of layer ontology (1-1) and the top surface of upper layer ontology (2-1) are rectangle, square or regular polygon.
3. a kind of equipment for the processing of flexible micro-nano device structure as described in claim 1, it is characterised in that: the circle
The diameter of connected in star (1-2) is 100mm~300mm, and depth is 2~3mm.
4. a kind of equipment for the processing of flexible micro-nano device structure as described in claim 1, it is characterised in that: it is described from
Electrocardiograph (8) revolving speed is 500rpm~5000rpm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910499077.0A CN110202729A (en) | 2019-06-11 | 2019-06-11 | A kind of equipment for the processing of flexible micro-nano device structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910499077.0A CN110202729A (en) | 2019-06-11 | 2019-06-11 | A kind of equipment for the processing of flexible micro-nano device structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110202729A true CN110202729A (en) | 2019-09-06 |
Family
ID=67791753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910499077.0A Pending CN110202729A (en) | 2019-06-11 | 2019-06-11 | A kind of equipment for the processing of flexible micro-nano device structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110202729A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1477054A (en) * | 2002-05-15 | 2004-02-25 | Microstructure manufacture and microsystem integration | |
| US20100156004A1 (en) * | 2008-12-19 | 2010-06-24 | Andreas Hettich Gmbh & Co. Kg | Device and method for producing a moulded body having microstructures |
| CN101905500A (en) * | 2010-08-11 | 2010-12-08 | 祁锦明 | Conical rod vertical centrifugal molding machine |
| CN202011102U (en) * | 2011-04-28 | 2011-10-19 | 侯相合 | Centrifuge of nylon pouring |
| CN208164137U (en) * | 2017-12-27 | 2018-11-30 | 青岛双星橡塑机械有限公司 | Centrifugal casting attemperator |
| CN109834238A (en) * | 2017-11-26 | 2019-06-04 | 成都兴宇精密铸造有限公司 | A kind of fusible pattern type centrifugal casting casting device |
| CN210453426U (en) * | 2019-06-11 | 2020-05-05 | 浙江工业大学 | Equipment for processing flexible micro-nano device structure |
-
2019
- 2019-06-11 CN CN201910499077.0A patent/CN110202729A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1477054A (en) * | 2002-05-15 | 2004-02-25 | Microstructure manufacture and microsystem integration | |
| US20100156004A1 (en) * | 2008-12-19 | 2010-06-24 | Andreas Hettich Gmbh & Co. Kg | Device and method for producing a moulded body having microstructures |
| CN101905500A (en) * | 2010-08-11 | 2010-12-08 | 祁锦明 | Conical rod vertical centrifugal molding machine |
| CN202011102U (en) * | 2011-04-28 | 2011-10-19 | 侯相合 | Centrifuge of nylon pouring |
| CN109834238A (en) * | 2017-11-26 | 2019-06-04 | 成都兴宇精密铸造有限公司 | A kind of fusible pattern type centrifugal casting casting device |
| CN208164137U (en) * | 2017-12-27 | 2018-11-30 | 青岛双星橡塑机械有限公司 | Centrifugal casting attemperator |
| CN210453426U (en) * | 2019-06-11 | 2020-05-05 | 浙江工业大学 | Equipment for processing flexible micro-nano device structure |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190906 |
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| RJ01 | Rejection of invention patent application after publication |