CN110187467A - A kind of reflecting mirror of drum structure - Google Patents

A kind of reflecting mirror of drum structure Download PDF

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Publication number
CN110187467A
CN110187467A CN201910629188.9A CN201910629188A CN110187467A CN 110187467 A CN110187467 A CN 110187467A CN 201910629188 A CN201910629188 A CN 201910629188A CN 110187467 A CN110187467 A CN 110187467A
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CN
China
Prior art keywords
mounting seat
support column
drum structure
reflector body
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910629188.9A
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Chinese (zh)
Inventor
胡玲玲
孟森
李丹
杨丹丹
李冯帆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Mengyi Industrial Co Ltd
Original Assignee
Shanghai Mengyi Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Mengyi Industrial Co Ltd filed Critical Shanghai Mengyi Industrial Co Ltd
Priority to CN201910629188.9A priority Critical patent/CN110187467A/en
Publication of CN110187467A publication Critical patent/CN110187467A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention discloses a kind of reflecting mirrors of drum structure, including reflector body, reinforcing rib, thin boss, fixed mounting hole, support column and mounting seat, the reflector body is arranged in parallel with mounting seat, and reflector body is vertical with support column with mounting seat, heavy caliber of the present invention based on fragile materials such as silicon carbide, lightweight, high surface precision, the drum structure reflecting mirror of good environmental adaptability, due to reflector body, support column, mounting seat is integrally machined for same material, therefore it can guarantee the surface precision of big temperature range, same material is integrally machined simplified installation steps, assembly difficulty simultaneously mitigates system weight, simultaneously, it is designed due to using drum structure, therefore, installation process, the course of work, stress caused by environmental change etc. will not be directly transferred on mirror mirror, reduce stress opposite type Coupling influence, to ensure that surface figure accuracy.

Description

A kind of reflecting mirror of drum structure
Technical field
The present invention relates to optical technical field, specially a kind of reflecting mirror of drum structure.
Background technique
For photo electric imaging system, the surface precision after reflecting mirror installation plays vital shadow to image quality Ring, be particularly applied in the imaging electro-optical system under the environment such as harsh military, space, still need to guarantee surface precision, volume, Weight, this proposes high requirement to mounting process, structure design;
Currently, common fused quartz reflecting mirror surface precision can be very good, but need to meet certain mirror thickness rate, i.e. mirror Face bore is bigger, and thickness is thicker just to can guarantee high-precision surface type, considerably increases weight, is not suitable for certain light-weighted applications;
The materials such as silicon carbide, devitrified glass are that current electro-optical system can commonly guarantee high-precision surface type while progress The material of light-weight design can compress mode using six degree of freedom positioning, briquetting and consolidate generally for the reflecting mirror of small size Fixed, such as Fig. 3, for heavy caliber, common reflecting mirror is realized backwards to the mode of side gluing, such as Fig. 4, this mounting means needs pair Thermal expansion system between the shrinking percentage of glue-line, bondline thickness, glue-line shape and glue and fixing piece and reflecting mirror carbofrax material Several etc. to be required to consider, the technique taken a long time is groped.Assembly cost is high.
Summary of the invention
The purpose of the present invention is to provide a kind of reflecting mirrors of drum structure, to solve mentioned above in the background art ask Topic.
In order to solve the above technical problem, the present invention provides following technical solutions: a kind of reflecting mirror of drum structure, including Reflector body, reinforcing rib, thin boss, fixed mounting hole, support column and mounting seat, the reflector body are parallel with mounting seat Setting, and reflector body is vertical with support column with mounting seat, the reflector body, support column and mounting seat are in drum knot Structure, and reflector body, support column and mounting seat are integrally machined.
Further, the reflector body the back side setting three but be not limited to three reinforcing ribs.
Further, the center line of the support column and the reflecting surface of reflector body are vertical, the center line of the support column Across the central point of mounting seat, the support column is vertical with mounting seat.
Further, the mounting seat is the bottom of light-weighted three or more a rotational symmetry distribution supporting leg Holder structure.
Further, the support column and mounting seat joint open up a lightening hole, and the lightening hole subtracts for circle Repeated hole, but it is not limited to circle.
Further, the supporting leg in the mounting seat has fixed mounting hole, and the center of all fixed mounting holes is arrived Support column center is equidistant.
Further, a thin boss is machined on the supporting leg of the mounting seat, the thin boss is circular ring shape, institute The internal diameter for stating thin boss is identical as fixed mounting hole.
Compared with prior art, the beneficial effects obtained by the present invention are as follows being: of the present invention based on brittleness such as silicon carbide The heavy caliber of material, lightweight, high surface precision, good environmental adaptability drum structure reflecting mirror, due to reflector body, support Column, mounting seat are integrally machined for same material, therefore can guarantee the surface precision of big temperature range, and same material integrally adds Work simplifies installation steps, assembly difficulty and mitigates system weight, designs simultaneously as using drum structure, therefore, installed Stress caused by journey, the course of work, environmental change etc. will not be directly transferred on mirror mirror, reduce stress opposite type Coupling influence, to ensure that surface figure accuracy.
Detailed description of the invention
Attached drawing is used to provide further understanding of the present invention, and constitutes part of specification, with reality of the invention It applies example to be used to explain the present invention together, not be construed as limiting the invention.In the accompanying drawings:
Fig. 1 is entirety perspective view of the invention;
Fig. 2 is whole side structure schematic view of the invention;
Fig. 3 is the mirror structure schematic diagram of electro-optical system in the prior art;
Fig. 4 is that the reflecting mirror of electro-optical system and connection structure assembly position schematic diagram in the prior art;
In figure: 1, reflector body;2, reinforcing rib;3, thin boss;4, fixed mounting hole;5, support column;6, mounting seat.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of technical solution referring to FIG. 1-2: a kind of reflecting mirror of drum structure, including reflector body 1, reinforcing rib 2, thin boss 3, fixed mounting hole 4, support column 5 and mounting seat 6, reflector body 1 is parallel with mounting seat 6 to be set It sets, and reflector body 1 is vertical with support column 5 with mounting seat 6, reflector body 1, support column 5 and mounting seat 6 are in drum knot Structure, and reflector body 1, support column 5 and mounting seat 6 are integrally machined, three of the back side setting of reflector body 1 but unlimited In three reinforcing ribs 2, guarantee that reflecting mirror is light-weighted simultaneously, for reinforcing mirror structure rigidity, intensity and optical surface type Precision, improves the eigenfrequency of reflecting mirror, while reducing dosage, save the cost, center line and the reflector body 1 of support column 5 Reflecting surface is vertical, and the center line of support column 5 passes through the central point of mounting seat 6, and support column 5 is vertical with peace pedestal 6, mounting seat 6 be the understructure of light-weighted three or more a rotational symmetry distribution supporting leg, is guaranteeing the rigidity of structure and intensity In the case where, lightweight is further realized, support column 5 and 6 joint of mounting seat open up a lightening hole, and lightening hole is circle Lightening hole, but it is not limited to circle, the support in mounting seat 6 has fixed mounting hole 4, and the center of all fixed mounting holes 4 is arrived 5 center of support column is equidistant, and one thin boss 3 is machined on the supporting leg of mounting seat 6, thin boss 3 is circular ring shape, thin The internal diameter of boss 3 is identical as fixed mounting hole 4, further decreases the influence of mount stress;Drum knot described in present example Structure reflecting mirror, the relative position of assembly the design phase by mounting seat 6, fixed mounting hole 4, fixed mounting hole 4 it is thin Realize that the relative accuracy of assembly realized by requirement on machining accuracy in the position of boss 3;
Installation is simple, during practical set, since reflector body 1, support column 5 and mounting seat 6 are same material one Body processing, therefore the installation steps of drum structure reflecting mirror and external system are simple, are easy adjustment, and no longer need the one of optical axis The debugging calibration of cause property;
Mount stress influence it is small, due to the decoupling function of reflecting mirror drum structure, in installation process due to flatness error, The stress that screw locking generates will not be directly transferred on mirror surface;
The stress generated in installation process will not be directly transferred on mirror surface, and attenuation ratio is up to 100 times, to protect Surface precision is demonstrate,proved;
Thermal adaptability is good, due to reflector body 1, support column 5 and mounting seat 6, is integrally machined for same material, because This, when environmental change, reflector body 1 is not present to be generated mirror surface and becomes because of mismatching with the thermal expansion coefficient of other materials Shape is suitble to space application;
Lightweight, for comparison is with the fused quartz reflecting mirror of size, drum structure reflecting mirror is in identical surface precision item Under part, thickness can be very thin, therefore has smaller rotary inertia and higher resonance frequency, is suitable for weight, impact The demanding situations of adaptability such as vibration;
Loss of weight compares table, and silicon carbide mirror is up to 2.7 times with respect to fused quartz reflecting mirror loss of weight.
Have a wide range of application, drum structure reflecting mirror and external system are connected and fixed using screw, therefore are avoided traditional Adhesive means the problems such as there are deflation rates, glue aging in space environment;
The course of work is stablized, and reflector body 1 will not generate mirror surface loosening in rotary course, move the stress of generation by In the decoupling function of drum structure, it will not be directly transferred on mirror surface, influence image quality;
It is easy to disassemble, it is that drum structure reflecting mirror demounting procedure is simple, tears open with the maximum difference of traditional gluing reflecting mirror The influence unloaded to reflecting mirror and external system is small, reusable.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention, Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features. All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention Within protection scope.

Claims (7)

1. a kind of reflecting mirror of drum structure, including reflector body (1), reinforcing rib (2), thin boss (3), fixed mounting hole (4), Support column (5) and mounting seat (6), it is characterised in that: the reflector body (1) is arranged in parallel with mounting seat (6), and reflects Mirror body (1) and mounting seat (6) are vertical with support column (5), the reflector body (1), support column (5) and mounting seat (6) In drum structure, and reflector body (1), support column (5) and mounting seat (6) are integrally machined.
2. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: the back of the reflector body (1) Face setting three but be not limited to three reinforcing ribs (2).
3. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: the center of the support column (5) Line is vertical with the reflecting surface of reflector body (1), and the center line of the support column (5) passes through the central point of mounting seat (6), described Support column (5) is vertical with mounting seat (6).
4. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: the mounting seat (6) is one The understructure of a light-weighted three or more rotational symmetry distribution supporting legs.
5. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: the support column (5) and installation Pedestal (6) joint opens up a lightening hole, and the lightening hole is round lightening hole, but is not limited to circle.
6. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: on the mounting seat (6) Supporting leg has fixed mounting hole (4), center being equidistant to support column (5) center of all fixed mounting holes (4).
7. a kind of reflecting mirror of drum structure according to claim 1, it is characterised in that: the branch of the mounting seat (6) One thin boss (3) is machined in support leg, the thin boss (3) is circular ring shape, the internal diameter of the thin boss (3) and fixed installation Hole (4) is identical.
CN201910629188.9A 2019-07-12 2019-07-12 A kind of reflecting mirror of drum structure Pending CN110187467A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112162380A (en) * 2020-10-22 2021-01-01 中国科学院长春光学精密机械与物理研究所 Flexible supporting structure of medium and small-diameter reflector
CN113447508A (en) * 2021-06-16 2021-09-28 四川欧瑞特光电科技有限公司 Manufacturing method of variable-cone curved crystal with high light collection and high resolution
CN115128718A (en) * 2022-07-29 2022-09-30 洛阳瑄宇光电科技有限公司 Non-modified high-precision light reflector and processing method thereof
WO2023016870A1 (en) * 2021-08-13 2023-02-16 Carl Zeiss Smt Gmbh Optical element, projection optical unit and projection exposure apparatus
WO2024068194A1 (en) * 2022-09-27 2024-04-04 Carl Zeiss Smt Gmbh Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical system

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Publication number Priority date Publication date Assignee Title
CN105242373A (en) * 2015-11-13 2016-01-13 长光卫星技术有限公司 Space camera reflecting mirror center support device
CN106371191A (en) * 2016-11-28 2017-02-01 长光卫星技术有限公司 Flexible support structure of light optical reflector
CN206741071U (en) * 2017-05-09 2017-12-12 长春理工大学 A kind of flexible SiC/Al speculums having compared with heat-flash stability
CN109633859A (en) * 2018-12-13 2019-04-16 中国科学院西安光学精密机械研究所 A kind of large-aperture optical reflecting mirror with back flexible support structure
CN109946813A (en) * 2019-03-29 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of support device of small mirrors
CN209895070U (en) * 2019-07-12 2020-01-03 上海乂义实业有限公司 Reflecting mirror with I-shaped structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105242373A (en) * 2015-11-13 2016-01-13 长光卫星技术有限公司 Space camera reflecting mirror center support device
CN106371191A (en) * 2016-11-28 2017-02-01 长光卫星技术有限公司 Flexible support structure of light optical reflector
CN206741071U (en) * 2017-05-09 2017-12-12 长春理工大学 A kind of flexible SiC/Al speculums having compared with heat-flash stability
CN109633859A (en) * 2018-12-13 2019-04-16 中国科学院西安光学精密机械研究所 A kind of large-aperture optical reflecting mirror with back flexible support structure
CN109946813A (en) * 2019-03-29 2019-06-28 中国科学院长春光学精密机械与物理研究所 A kind of support device of small mirrors
CN209895070U (en) * 2019-07-12 2020-01-03 上海乂义实业有限公司 Reflecting mirror with I-shaped structure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112162380A (en) * 2020-10-22 2021-01-01 中国科学院长春光学精密机械与物理研究所 Flexible supporting structure of medium and small-diameter reflector
CN113447508A (en) * 2021-06-16 2021-09-28 四川欧瑞特光电科技有限公司 Manufacturing method of variable-cone curved crystal with high light collection and high resolution
CN113447508B (en) * 2021-06-16 2022-11-22 四川欧瑞特光电科技有限公司 Manufacturing method of variable-cone curved crystal with high light collection and high resolution
WO2023016870A1 (en) * 2021-08-13 2023-02-16 Carl Zeiss Smt Gmbh Optical element, projection optical unit and projection exposure apparatus
CN115128718A (en) * 2022-07-29 2022-09-30 洛阳瑄宇光电科技有限公司 Non-modified high-precision light reflector and processing method thereof
CN115128718B (en) * 2022-07-29 2023-07-21 洛阳瑄宇光电科技有限公司 Processing method of non-modified high-precision light reflecting mirror
WO2024068194A1 (en) * 2022-09-27 2024-04-04 Carl Zeiss Smt Gmbh Optical element for a projection exposure system, optical system comprising same and projection exposure system comprising the optical element and/or the optical system

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