CN110170183A - A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system - Google Patents
A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system Download PDFInfo
- Publication number
- CN110170183A CN110170183A CN201910493174.9A CN201910493174A CN110170183A CN 110170183 A CN110170183 A CN 110170183A CN 201910493174 A CN201910493174 A CN 201910493174A CN 110170183 A CN110170183 A CN 110170183A
- Authority
- CN
- China
- Prior art keywords
- gas
- chromatography column
- bulk acoustic
- fluid channel
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/10—Selective adsorption, e.g. chromatography characterised by constructional or operational features
- B01D15/22—Selective adsorption, e.g. chromatography characterised by constructional or operational features relating to the construction of the column
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6052—Construction of the column body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/62—Detectors specially adapted therefor
- G01N30/76—Acoustical detectors
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Acoustics & Sound (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The present invention provides a kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system, the production method includes: A, using silicon materials production micro-compliant mechanism substrate；B, in the fluid channel of the bottom of glass plate production square spiral shape structure；C, production there is the bottom of the glass plate of the fluid channel of square spiral shape structure to be bonded with the upper surface of the substrate, to form miniature chromatography column.By upper, the above-mentioned production method of the application is the production method of pioneering chromatography column, is conducive to make small chromatography column, to be conducive to the micromation of gas detection analytical equipment, to be advantageously implemented the easily analysis detection to gas.
Description
Technical field
The present invention relates to gas detection analysis fields, and in particular to a kind of production method of miniature chromatography column,
Miniature chromatography column and minitype gas analysis system.
Background technique
Volatile organic compounds are detected, the detection of disease marker and environmental contaminants are such as directed to, to some
Major disease includes that the early detection of diabetes, kidney failure etc. and the supervision of environmental pollution and prevention and treatment have vital effect.
The detection method of traditional gas is mostly the large-sized analytic instrument based on laboratory, such as gas chromatograph-mass spectrometer, these instruments
Although the ingredient and content of mixed gas can be detected accurately, these method processes are complicated, and time-consuming, equipment instrument
It is huge to cannot achieve in-situ monitor.Since the volume of the detector portion of traditional gas chromatograph is excessive, entire gas is constrained
The miniaturization of body analysis system, in recent years, the micromation work for gas chromatograph detector portion are carrying out always.
But substantive progress is not obtained also at present.Therefore, urgent need to resolve or part solve above-mentioned technical problem at present.To be conducive to
It realizes easily to the analysis detection of gas.
Summary of the invention
In view of this, the application provides the production method of miniature chromatography column a kind of, miniature chromatography column and miniature
Gas analysis system is advantageously implemented micromation and easily carries out gas detection.
The application provides a kind of production method of miniature chromatography column characterized by comprising
A, micro-compliant mechanism substrate is made using silicon materials；
B, in the fluid channel of the bottom of glass plate production square spiral shape structure；
C, production is had to the bottom of the glass plate of the fluid channel of square spiral shape structure and the upper surface of the substrate
Bonding, to form miniature chromatography column.
By upper, the fluid channel chromatography column of the application manufactures squarely helicoidal structure, this structure can be utmostly
The separation efficiency for promoting chromatographic column is sealed glass plate (can be Pyrex glass plate) and bottom plate by way of bonding.
The above-mentioned production method of the application is the production method of pioneering chromatography column, is conducive to make small chromatography column,
To be conducive to the micromation of gas detection analytical equipment, to be advantageously implemented the easily analysis detection to gas.
Preferably, the step B, comprising:
B1, via photoetching and deep silicon etching technique, manufacture the fluid channel of squarely helicoidal structure；
B2, the modification for the fluid channel inner surface being fixed phase.
Preferably, the step B2, comprising:
B21, the fluid channel inner surface is activated by octamethylcy-clotetrasiloxane；
B22, dynamic coat by way of by 100% dimethyl silicone polymer modification the fluid channel interior table
Face；
B23, the stability being mutually crosslinked to guarantee stationary phase is fixed；
B24,4 hours of heat ageing.
By upper, be conducive to the separation that mixed gas is better achieved.
The application also provides a kind of miniature chromatography column based on the production of above-mentioned production method characterized by comprising
Substrate,
Glass plate, bottom are etched with the fluid channel of square spiral shape structure；
Wherein, the bottom of the glass plate is bonded with the upper surface of the substrate.
By upper, the fluid channel chromatography column of the application manufactures squarely helicoidal structure, this structure can be utmostly
The separation efficiency for promoting chromatographic column is sealed glass plate (can be Pyrex glass plate) and bottom plate by way of bonding,
To make small chromatography column.The above-mentioned production method of the application is the production method of pioneering chromatography column, favorably
In making small chromatography column, to be conducive to the micromation of gas detection analytical equipment.
Based on above-mentioned miniature chromatography column, the application also provides a kind of minitype gas analysis system, comprising:
Sample introduction subsystem, comprising: sample feeding mouth, sampling pump；Wherein, the sampling pump passes through with the sample feeding mouth
Gas circuit pipe connection, for providing power support to sample feeding；
Carrier gas subsystem, including pressure-control valve, pressure gauge and current meter, for accurately being controlled to gas flow
System, and connect with the outlet of the sample introduction subsystem, for sample to be loaded into miniature chromatography column；
Wherein, the miniature chromatography column is connected with sample introduction subsystem and carrier gas subsystem, for dividing sample
From；
Bulk acoustic wave resonator array is connect with the outlet of the micro-compliant mechanism, for carrying out recognition detection to gas.
By upper, the minitype gas analysis system of the application carries out gas separation by micro-compliant mechanism and passes through body sound
Wave resonator carries out the recognition detection of gas, easily to gas is detected with realizing.
Preferably, the bulk acoustic wave resonator array includes:
Support plate is provided with bulk acoustic wave resonator array region；
Glass micro-channel is set on the bulk acoustic wave resonator array region；Wherein, the both ends of the glass micro-channel
It is respectively arranged with air inlet and air outlet；Wherein, it is connected separately with quartz capillary on the air inlet and the gas outlet, used
In air circuit connection；
Wherein, the air inlet connects the outlet of the micro-compliant mechanism by the quartz capillary；The gas outlet
It is connect by the quartz capillary with a waste gas recovering device.
By upper, above-mentioned glass micro-channel is set, is conducive to the contact for increasing gas and the bulk acoustic wave resonator, is conducive to
Preferably carry out gas detection.The support plate is set, is conducive to for resonator being arranged in an array manner, the branch
It is provided with venthole on fagging, is conducive to passing through for gas.
Preferably, in the bulk acoustic wave resonator array, being modified on different bulk acoustic wave resonators has absorption different
The polymer of the tested gas of type.
By upper, by being modified with different polymer to different bulk acoustic wave resonators, be conducive to not dividing in chromatographic column
From mixed gas in different gases recognition detection.
Preferably, the carrier gas subsystem includes:
Successively nitrogen cylinder, pressure-control valve and the pressure gauge and current meter of gas connection.
By upper, the pressure of the carrier gas of the output of nitrogen cylinder 6 can control by setting pressure-control valve and pressure gauge, by setting
Setting current meter can control the flow velocity of carrier gas.
Preferably, the system also includes:
It is connect with the bulk acoustic wave resonator array for being scanned measurement in broadband to determine network parameter simultaneously
Show the Network Analyzer of signal.
Preferably, the system, further includes:
Temperature controlled temperature control and digital display are carried out to environment where micro-compliant mechanism.
By upper, the temperature control and digital display are set, temperature can be detected by control, preferably to realize to gas
Detection.
In conclusion the production method of miniature chromatography column provided by the present application, manufactures squarely for chromatography column
Helicoidal structure, this structure can utmostly promote the separation efficiency of chromatographic column, (can be with by glass plate by way of bonding
It is Pyrex glass plate) it is sealed with bottom plate.The above-mentioned production method of the application is the production method of pioneering chromatography column,
Be conducive to make small chromatography column, to be conducive to the micromation of gas detection analytical equipment.Analysis provided by the present application
System can easily realize separation and detection to mixed gas.Whole system has micromation, simplicity, recognition efficiency
It is high and and the features such as semiconductor technology compatibility.And the bulk acoustic resonance device of the application may be arranged as the bulk acoustic wave of array type
Resonator is modified with the polymer for having the function of adsorbing different types of tested gas on different bulk acoustic wave resonators,
So as to realize to the qualitative fixed of the binary mixture of traditional unrecognized peak position overlapping of single gas chromatographic column
Measure recognition detection.
Detailed description of the invention
Fig. 1 is the flow diagram of the production method of miniature chromatography column provided by the embodiments of the present application；
Fig. 2 is the structural schematic diagram of miniature chromatography column provided by the embodiments of the present application；
Fig. 3 is the flow chart of chromatographic column fixed phase modification provided by the embodiments of the present application；
Fig. 4 is the schematic illustration that bulk acoustic wave resonator provided by the embodiments of the present application carries out gas detection.
Fig. 5 is the structural schematic diagram of the glass micro-channel of bulk acoustic wave resonator provided by the embodiments of the present application and its top；
Fig. 6 is the structural schematic diagram of minitype gas analysis system provided by the embodiments of the present application.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art's every other embodiment obtained belong to what the present invention protected
Range.
Embodiment one
It is as shown in Figure 1 a kind of production method of miniature chromatography column provided by the present application, comprising:
S101, micro-compliant mechanism substrate is made using silicon materials；
S102, the fluid channel of square spiral shape structure is made in the bottom of a glass plate；
S103, the modification for the fluid channel inner surface being fixed phase.Include:
S1031, via photoetching and deep silicon etching technique, manufacture the fluid channel of squarely helicoidal structure；Further, it is
The separation of mixed gas can be better achieved, the micro-compliant mechanism being fabricated to needs to carry out the modification of stationary phase appropriate.Packet
Include step S1022~S1025.
S1032, the fluid channel inner surface is activated by octamethylcy-clotetrasiloxane；
S1033, dynamic coat by way of by 100% dimethyl silicone polymer modification the fluid channel interior table
Face；
S1034, the stability being mutually crosslinked to guarantee stationary phase is fixed；
S1035,4 hours of high temperature ageing, complete entire coating procedure.Be conducive to point that mixed gas is better achieved
From.
S103, the upper table that the bottom and the substrate that have the glass plate of fluid channel of square spiral shape structure will be made
Face bonding, to form fluid channel chromatography column.
The fluid channel chromatography column of the application manufactures squarely helicoidal structure, this structure can utmostly promote color
The separation efficiency for composing column is sealed glass plate (can be Pyrex glass plate) and bottom plate by way of bonding.The application
Above-mentioned production method be pioneering chromatography column production method, be conducive to make small chromatography column, with advantageous
In the micromation of gas detection analytical equipment.
Embodiment two
As shown in Fig. 2, being based on above-mentioned miniature chromatography column, the application also provides a kind of based on the production of above-mentioned production method
Miniature chromatography column, comprising:
Substrate 201,
Glass plate 203, bottom are etched with the fluid channel of square spiral shape structure；
Wherein, the bottom of the glass plate is bonded with the upper surface of the substrate.
Specifically, micro-compliant mechanism substrate 201 uses silicon materials, via photoetching and deep silicon etching technique, manufactures squarely
Helicoidal structure, this structure can utmostly promote the separation efficiency of chromatographic column, by Pai Reke by way of anode linkage
This glass plate 203 and bottom plate seal, while glass capillary 202 is inserted into the entrance of gas and exit, to the gas with front and back
Road connection.
The separation in order to which mixed gas is better achieved similar with embodiment one, the micro-compliant mechanism being fabricated to need into
The modification of row stationary phase appropriate.In the present embodiment, as shown in figure 3, S301, carries out it using octamethylcy-clotetrasiloxane
Surface active, S302, the mode of selection dynamic coating modify 100% dimethyl silicone polymer in the side of chromatographic column later
The stability being mutually crosslinked to guarantee stationary phase, last S304 is fixed in wall, subsequent S303, and 4 hours of high temperature ageing complete
Entire coating procedure.The fluid channel chromatography column of the application manufactures squarely helicoidal structure, this structure can be utmostly
The separation efficiency for promoting chromatographic column is sealed glass plate (can be Pyrex glass plate) and bottom plate by way of bonding,
To make small chromatography column.The above-mentioned production method of the application is the production method of pioneering chromatography column, favorably
In making small chromatography column, to be conducive to the micromation of gas detection analytical equipment.
Embodiment three
Based on above-mentioned miniature chromatography column, it is illustrated in figure 6 a kind of minitype gas analysis system provided by the present application, is used
In detection volatile organic compounds (for example, existing alkane in liquid form under room temperature；Aromatic series related with environmental pollution
Close object；The alcohols and aldehydes contained in characteristics of contaminated respiratory droplets gas；The fragrance that fruit, crops distribute in different stages of growth；It is some heavy
The gas marker of big disease；The analogies etc. of chemical warfare agent).It specifically includes:
Sample feeding mouth 104, the sampling pump 105 of gas connection are sequentially connected in series by pipeline.
Nitrogen cylinder 101, pressure-control valve and pressure gauge 102, the current meter 103 of gas connection are sequentially connected in series by pipeline.
Micro-compliant mechanism 107, bulk acoustic wave resonator array 109 for being separated under test gas and for body sound
Wave resonator array 109 carries out the Network Analyzer 110 of signal driving and display.The time switch 108 for control according to
The time of setting detects gas.
Temperature controlled temperature control and digital display 6 are carried out to 107 place environment of micro-compliant mechanism, by described micro-
The temperature of type chromatographic column 107 carries out control and is able to that the separation to gas is better achieved.It is provided with optimal at 100 DEG C of temperature.
To be illustrated more clearly that the application, describe in detail below to above-mentioned section components:
The nitrogen cylinder 101, pressure-control valve and pressure gauge 102 and current meter 103 constitute carrier gas subsystem.Nitrogen cylinder
There is high pressure nitrogen (can be stored in liquid form in nitrogen cylinder 101) in 101, the nitrogen of release is as carrier gas；Pass through
Pressure-control valve is set and pressure gauge 102 can control the pressure of output carrier gas, is preferably set as 15psi pressure；By setting
Setting current meter 103 can control the flow velocity of output carrier gas, preferably be set as 20ml/min flow velocity.
Gas further progress after the bulk acoustic wave resonator array 109 is used to separate micro-compliant mechanism 107 detects,
To obtain data detection signal.Wherein, in order to be conducive to reduce dead volume enhancing detection performance, be conducive to preferably carry out gas
Detection, as shown in figure 5,109 structure of bulk acoustic wave resonator array is as follows comprising:
Support plate 503 has glass micro-channel 505 with 503 front of support plate, and air inlet and air outlet are separately positioned on
The left and right ends of glass micro-channel 505；It is connected separately with quartz capillary 502 in air inlet and air outlet, is used for air circuit connection；
Wherein, glass micro-channel guarantees its accuracy of gauge using laser processing.In fact, can also be by the way of micro manufacturing
Directly micro-compliant mechanism and detector are produced on same substrate, but this mode cost is high, technology difficulty is larger, this reality
Apply selected in example laser processing mode make glass micro-channel go forward side by side line unit conjunction.
It is mixed gas sample that bulk acoustic wave resonator array 504,501 is provided in support plate 3.
Bulk acoustic wave resonator array 504 is provided in support plate 503 below glass micro-channel, wherein different bodies
The polymer for having the function of adsorbing different types of tested gas is modified on acoustic resonator, thus be advantageously implemented to point
The detection of isolated mixed gas is had not been able to from column.Also, the set of frequency of the bulk acoustic resonance device is examined when being 2.44GHz
It is best to survey effect.
Wherein, the case where modification in order to detect bulk acoustic wave resonator, also settable characterization device, comprising: fourier turns
Infrared spectrum analyzer is changed, for characterizing whether polymer is successfully modified on bulk acoustic wave resonator surface；And it is former
Sub- force microscope, for characterizing the form and film thickness of the thin polymer film of bulk acoustic wave resonator surface modification.
Wherein, the testing principle of bulk acoustic resonance device are as follows: as shown in figure 4, when after column chromatography separates to
The resonator sensitive zones surface that gas arrives at bulk acoustic resonance device through gas circuit is surveyed, the resonance frequency that will lead to device has centainly
The decline of degree, decline degree and gas concentration are positively correlated (quantitative judge), and the difference for the time that foundation gas flows through is to gas
Body is qualitatively identified, to realize the further detection to volatile organic compounds.
In order to better illustrate the technical solution of the application, now by the working principle explanation of the gas detecting system of the application
It is as follows:
Firstly, (will be the to be tested of liquid under room temperature for the gas separation and detection for realizing higher efficiency by sample to be tested
Each 5 microlitres of agent is successively mixed as sample to be tested) sample introduction is carried out, specifically, using head space micro-sampling pin that sample to be tested is even
Speed squeezes into sample feeding mouth 104, and sample to be tested is communicated to carrier gas subsystem and micro-compliant mechanism under the driving of sampling pump 105
Between 7 gas circuit.Under the driving of the carrier gas of carrier gas subsystem output, sample is sent into micro-compliant mechanism 107 and carries out gas
Separation.This section the time 2 minutes.
The under test gas exported by micro-compliant mechanism 107 continues to be loaded into bulk acoustic resonance device array 109 by carrier gas, by
Bulk acoustic wave resonator array 109 to its resonance frequency variation detects, and by Network Analyzer 110 carry out data analysis and
Display.
Wherein, for some mixed gas, (obtained peak position overlapping), the present invention when being difficult to chromatographic isolation by chromatographic column
Also it may be implemented further to detect.It is specifically described below:
The present invention by modifying different polymer on the different bulk acoustic wave resonators in bulk acoustic wave resonator array,
To realize to the not discretely identification of the different gases in mixed gas after micro-compliant mechanism.Specifically, for example, in order to
Gas 1,2 separate, different mixing proportion is difficult to chromatographic column and carries out qualitative and quantitative identification, the bulk acoustic wave in array is humorous
Vibration device modify polymer A and polymer B respectively, wherein the bulk acoustic wave resonator that polymer A is modified to the response of gas 1 more
Greatly, the bulk acoustic wave resonator of polymer B modification is bigger to the response of gas 2, based on this orthogonality, just can be realized
The differentiation of mixed gas.
In conclusion the production method of miniature chromatography column provided by the present application, manufactures squarely for chromatography column
Helicoidal structure, this structure can utmostly promote the separation efficiency of chromatographic column, (can be with by glass plate by way of bonding
It is Pyrex glass plate) it is sealed with bottom plate.The above-mentioned production method of the application is the production method of pioneering chromatography column,
Be conducive to make small chromatography column, to be conducive to the micromation of gas detection analytical equipment.Analysis provided by the present application
System can easily realize separation and detection to mixed gas.Whole system has micromation, simplicity, recognition efficiency
It is high and and the features such as semiconductor technology compatibility.And the bulk acoustic resonance device of the application may be arranged as the bulk acoustic wave of array type
Resonator is modified with the polymer for having the function of adsorbing different types of tested gas on different bulk acoustic wave resonators,
So as to realize to the qualitative fixed of the binary mixture of traditional unrecognized peak position overlapping of single gas chromatographic column
Measure recognition detection.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of production method of miniature chromatography column characterized by comprising
A, micro-compliant mechanism substrate is made using silicon materials；
B, in the fluid channel of the bottom of glass plate production square spiral shape structure；
C, production there is the bottom of the glass plate of the fluid channel of square spiral shape structure to be bonded with the upper surface of the substrate,
To form miniature chromatography column.
2. the method according to claim 1, wherein the step B, comprising:
B1, via photoetching and deep silicon etching technique, manufacture the fluid channel of squarely helicoidal structure；
B2, the modification for the fluid channel inner surface being fixed phase.
3. according to the method described in claim 2, it is characterized in that, the step B2, comprising:
B21, the fluid channel inner surface is activated by octamethylcy-clotetrasiloxane；
B22, dynamic coat by way of by 100% dimethyl silicone polymer modification the fluid channel inner surface；
B23, the stability being mutually crosslinked to guarantee stationary phase is fixed；
B24,4 hours of heat ageing.
4. a kind of miniature chromatography column of the production method production based on claim 1 characterized by comprising
Substrate,
Glass plate, bottom are etched with the fluid channel of square spiral shape structure；
Wherein, the bottom of the glass plate is bonded with the upper surface of the substrate.
5. a kind of minitype gas analysis system is based on miniature chromatography column as claimed in claim 4 characterized by comprising
Sample introduction subsystem, comprising: sample feeding mouth, sampling pump；Wherein, the sampling pump and the sample feeding mouth pass through gas circuit
Pipe connection, for providing power support to sample feeding；
Carrier gas subsystem, including pressure-control valve, pressure gauge and current meter, for accurately being controlled gas flow, and
It is connect with the outlet of the sample introduction subsystem, for sample to be loaded into miniature chromatography column；
Wherein, the miniature chromatography column is connected with sample introduction subsystem and carrier gas subsystem, for separating to sample；
Bulk acoustic wave resonator array is connect with the outlet of the micro-compliant mechanism, for carrying out recognition detection to gas.
6. system according to claim 5, which is characterized in that the bulk acoustic wave resonator array includes:
Support plate is provided with bulk acoustic wave resonator array region；
Glass micro-channel is set on the bulk acoustic wave resonator array region；Wherein, the both ends difference of the glass micro-channel
It is provided with air inlet and air outlet；Wherein, it is connected separately with quartz capillary on the air inlet and the gas outlet, is used for gas
Road connection；
Wherein, the air inlet connects the outlet of the micro-compliant mechanism by the quartz capillary；The gas outlet passes through
The quartz capillary is connect with a waste gas recovering device.
7. system according to claim 5, which is characterized in that in the bulk acoustic wave resonator array, different bulk acoustic waves
It is modified with different polymer on resonator, there is the effectiveness for adsorbing different types of tested gas.
8. system according to claim 5, which is characterized in that the carrier gas subsystem includes:
Successively nitrogen cylinder 1, pressure-control valve and the pressure gauge 2 and current meter 3 of carrier gas connection.
9. system according to claim 5, which is characterized in that further include:
It is connect with the bulk acoustic wave resonator array for being scanned measurement in broadband to determine network parameter and show
The Network Analyzer of signal.
10. system according to claim 5, which is characterized in that further include:
Temperature controlled temperature control and digital display are carried out to environment where micro-compliant mechanism.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910493174.9A CN110170183A (en) | 2019-06-06 | 2019-06-06 | A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system |
| PCT/CN2020/090911 WO2020244376A1 (en) | 2019-06-06 | 2020-05-18 | Method for manufacturing chromatographic separation micro-column, chromatographic separation micro-column, and gas analysis micro-system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910493174.9A CN110170183A (en) | 2019-06-06 | 2019-06-06 | A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110170183A true CN110170183A (en) | 2019-08-27 |
Family
ID=67697147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910493174.9A Pending CN110170183A (en) | 2019-06-06 | 2019-06-06 | A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110170183A (en) |
| WO (1) | WO2020244376A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020244376A1 (en) * | 2019-06-06 | 2020-12-10 | 天津大学 | Method for manufacturing chromatographic separation micro-column, chromatographic separation micro-column, and gas analysis micro-system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0527905B1 (en) * | 1990-05-10 | 1995-11-22 | Pharmacia Biotech AB | Microfluidic structure and process for its manufacture |
| EP1178309A1 (en) * | 2000-08-02 | 2002-02-06 | Symyx Technologies, Inc. | Parallel gas chromatograph with microdetector array |
| CN104084248A (en) * | 2014-07-09 | 2014-10-08 | 河北工业大学 | Filling type microfluidic chip for gas separation |
| CN105126387A (en) * | 2015-09-11 | 2015-12-09 | 电子科技大学 | Micro wavy gas chromatographic column and preparation method thereof |
| CN107561201A (en) * | 2016-06-30 | 2018-01-09 | 中国科学院上海微系统与信息技术研究所 | Micro- gas chromatographic column of silicon substrate of high separating efficiency and preparation method thereof |
| CN108490092A (en) * | 2018-03-27 | 2018-09-04 | 天津大学 | A kind of gas detecting system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101093217B (en) * | 2007-07-03 | 2011-05-04 | 浙江大学 | Electronic nose of using sensor of acoustic surface wave and partitioning column of gas chromatography jointly, and detection method |
| US8999245B2 (en) * | 2009-07-07 | 2015-04-07 | Tricorn Tech Corporation | Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same |
| CA2801541C (en) * | 2010-06-07 | 2018-05-15 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | System for analyzing a gas mixture including at least one chromatography column |
| CN102680609B (en) * | 2011-03-08 | 2014-02-12 | 中国科学院电子学研究所 | Miniature gas chromatographic column integrated chip with rapid separation function |
| CN110170183A (en) * | 2019-06-06 | 2019-08-27 | 天津大学 | A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system |
-
2019
- 2019-06-06 CN CN201910493174.9A patent/CN110170183A/en active Pending
-
2020
- 2020-05-18 WO PCT/CN2020/090911 patent/WO2020244376A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0527905B1 (en) * | 1990-05-10 | 1995-11-22 | Pharmacia Biotech AB | Microfluidic structure and process for its manufacture |
| EP1178309A1 (en) * | 2000-08-02 | 2002-02-06 | Symyx Technologies, Inc. | Parallel gas chromatograph with microdetector array |
| CN104084248A (en) * | 2014-07-09 | 2014-10-08 | 河北工业大学 | Filling type microfluidic chip for gas separation |
| CN105126387A (en) * | 2015-09-11 | 2015-12-09 | 电子科技大学 | Micro wavy gas chromatographic column and preparation method thereof |
| CN107561201A (en) * | 2016-06-30 | 2018-01-09 | 中国科学院上海微系统与信息技术研究所 | Micro- gas chromatographic column of silicon substrate of high separating efficiency and preparation method thereof |
| CN108490092A (en) * | 2018-03-27 | 2018-09-04 | 天津大学 | A kind of gas detecting system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020244376A1 (en) * | 2019-06-06 | 2020-12-10 | 天津大学 | Method for manufacturing chromatographic separation micro-column, chromatographic separation micro-column, and gas analysis micro-system |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020244376A1 (en) | 2020-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8721892B2 (en) | Integrated chromatography devices and systems for monitoring analytes in real time and methods for manufacturing the same | |
| CN100454019C (en) | Gas chromatograph | |
| Lazar et al. | Microfabricated devices: A new sample introduction approach to mass spectrometry | |
| Zampolli et al. | Real-time monitoring of sub-ppb concentrations of aromatic volatiles with a MEMS-enabled miniaturized gas-chromatograph | |
| Gao et al. | Recent advances in microfluidics combined with mass spectrometry: technologies and applications | |
| US6812458B2 (en) | Systems and methods for high-throughput microfluidic sample analysis | |
| US7214320B1 (en) | Systems and methods for high throughput sample analysis | |
| JP5648932B2 (en) | Method for forming a semiconductor device for detecting molecules and integrated circuit, chromatography device and semiconductor device for detecting molecules | |
| Medina et al. | Miniaturization of liquid chromatography coupled to mass spectrometry. 3. Achievements on chip-based LC–MS devices | |
| US20030201390A1 (en) | Separation media, multiple electrospray nozzle system and method | |
| Mao et al. | Multinozzle emitter arrays for nanoelectrospray mass spectrometry | |
| Zampolli et al. | Compact-GC platform: A flexible system integration strategy for a completely microsystems-based gas-chromatograph | |
| CN108490092A (en) | A kind of gas detecting system | |
| US20130042673A1 (en) | Methods and Apparatus for Analyzing Samples and Collecting Sample Fractions | |
| CN110170183A (en) | A kind of production method of miniature chromatography column, miniature chromatography column and minitype gas analysis system | |
| CN208505985U (en) | A kind of gas detecting system | |
| Reddy et al. | Integrated separation columns and Fabry-Pérot sensors for microgas chromatography systems | |
| Janfelt et al. | Portable electrospray ionization mass spectrometry (ESI-MS) for analysis of contaminants in the field | |
| EP1162464A1 (en) | Method and device for increasing efficiency of bioanalysis | |
| CN106855541A (en) | A kind of detection means based on micro-fluidic chip Yu Nanoliter electrospray ion mobility spectrometry | |
| Alonso Sobrado et al. | Characterization of Nano-Gravimetric-Detector Response and Application to Petroleum Fluids up to C34 | |
| Sanchez et al. | Development of a gas detection micro-device for hydrogen fluoride vapours | |
| US20060242832A1 (en) | Fabrication technique of micro spray nozzles | |
| Gauthier et al. | Miniaturization: chip-based liquid chromatography and proteomics | |
| DeWitt | Development of technology for low-power gas sensing: IARPA's MAEGLIN program |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190827 |