CN110132322B - Ultraviolet radiation enhanced optical fiber sensor and preparation method thereof - Google Patents

Ultraviolet radiation enhanced optical fiber sensor and preparation method thereof Download PDF

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CN110132322B
CN110132322B CN201910274594.8A CN201910274594A CN110132322B CN 110132322 B CN110132322 B CN 110132322B CN 201910274594 A CN201910274594 A CN 201910274594A CN 110132322 B CN110132322 B CN 110132322B
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optical fiber
layer
metal particle
ultraviolet
sensitive
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CN110132322A (en
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张耿
王红成
黄晓园
郑华
张绍强
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Dongguan University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1725—Modulation of properties by light, e.g. photoreflectance

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  • General Health & Medical Sciences (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract

The invention discloses an ultraviolet radiation enhanced optical fiber sensor and a preparation method thereof, wherein the sensor comprises: the optical fiber comprises a microstructure optical fiber with an exposed fiber core and an ultraviolet light source (4) irradiated on a bare area of the microstructure optical fiber, wherein a metal particle layer (1), an ultraviolet absorption layer (2) and a sensitive layer (3) are sequentially deposited on the surface of the bare area of the microstructure optical fiber; the metal particle layer (1) is used for absorbing and amplifying an evanescent wave, wherein the evanescent wave is generated at the microstructure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer (3) is used for detecting a signal to be detected. The sensor provided by the invention has the characteristic of high sensitivity.

Description

Ultraviolet radiation enhanced optical fiber sensor and preparation method thereof
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to an ultraviolet radiation enhanced optical fiber sensor and a preparation method thereof.
Background
With the gradual maturity of the optical fiber processing technology, the application of the optical fiber in the sensing field is more and more extensive, and the microstructure optical fiber of the surface local polished optical fiber or the optical fiber structure formed by adopting the tapering provides a new means and method for the research and manufacture of a novel optical fiber sensing device. The optical fiber sensor has the characteristics of unique optical characteristics, low cost, capability of being made into an all-optical fiber device and the like, and is more and more concerned by researchers, so that the function sensitive material and the optical fiber are organically fused on a physical layer, the advantages of the optical fiber sensor in the aspects of structure integration, material integration and the like are fully exerted, and the development of novel optical fiber sensing devices and systems is expected.
In the conventional surface functional optical fiber sensing technology, a functional sensitive material is usually directly manufactured on the surface of an optical fiber to realize the response of the optical fiber to a detection target, and the simple structure is often easily influenced by the interference of environmental factors, and has the problems of weak response signal, difficulty in improving the sensitivity and the like.
Semiconductor materials are often used as sensitive functional materials, but semiconductor gas sensors are usually thermally driven against high reactive activation energies to achieve high sensitivity and fast response recovery characteristics. The heating makes the sensor work under higher temperature, leads to device life to reduce, also detonates the combustible gas that awaits measuring easily, causes the potential safety hazard, disposes the heater in the sensor simultaneously, has both increased the device consumption, does not also do benefit to the integration and the miniaturization of sensor yet.
Disclosure of Invention
Aiming at the defects of the technology, the invention aims to provide an ultraviolet radiation enhanced optical fiber sensor and a preparation method thereof, wherein the sensor has the characteristic of high sensitivity.
In order to achieve the purpose, the invention provides the following scheme:
an ultraviolet radiation enhanced fiber optic sensor comprising: the ultraviolet light source is irradiated on a bare area of the microstructure optical fiber, and a metal particle layer, an ultraviolet absorption layer and a sensitive layer are sequentially deposited on the surface of the bare area of the microstructure optical fiber;
the metal particle layer is used for absorbing and amplifying an evanescent wave, and the evanescent wave is generated at the microstructure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer is used for detecting a signal to be detected.
Optionally, the microstructured optical fiber is an optical fiber with a cladding layer partially stripped and exposed to a core.
Optionally, the sensitive layer material is a gas sensitive material, a pressure sensitive material, a biological sensing material or an ultraviolet detection material.
Optionally, the material of the metal particle layer is at least one of Au, Pt, Ag, and Cu.
Optionally, the material of the ultraviolet absorption layer is a nitride, an oxide or a two-dimensional material.
Optionally, the deposition is chemical vapor deposition, physical vapor deposition or solution deposition.
A preparation method of an ultraviolet radiation enhanced optical fiber sensor comprises the following steps;
depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 10-100 nm;
depositing a layer of photosensitive material on the metal particle layer, wherein the thickness of the ultraviolet absorption layer is 10-300 nm;
and depositing a layer of sensitive material on the photosensitive material, wherein the thickness of the sensitive material is 10-150 nm, and the sensitive material is used for detecting a signal to be detected.
Optionally, before depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, and before the thickness of the metal particle layer is 10-100 nm, stripping a partial cladding layer of the optical fiber by using a physical or chemical method to expose a fiber core, so as to obtain the microstructure optical fiber with the exposed fiber core.
Optionally, annealing is performed after the metal particle layer is deposited, the photosensitive material is deposited, and the sensitive material is deposited.
Optionally, the annealing temperature is 150-500 ℃, and the annealing time is 1-120 min.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the optical fiber sensor provided by the invention adopts the ultraviolet light source to irradiate the bare area of the micro-structural optical fiber, the concentration of carriers in the ultraviolet absorption layer has obvious change under the irradiation of the ultraviolet light, meanwhile, the electromagnetic wave transmitted in the micro-structural optical fiber forms Surface Plasmon Resonance (SPR) at the interface of the metal particles and the fiber core, the evanescent wave of the surface of the optical fiber is improved, and thus, the sensitivity of the optical fiber sensor to the response of a signal to be measured is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of an ultraviolet radiation enhanced optical fiber sensor according to an embodiment of the present invention;
fig. 2 is a flowchart of a method for manufacturing an ultraviolet radiation enhanced optical fiber sensor according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an ultraviolet radiation enhanced optical fiber sensor and a preparation method thereof.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Fig. 1 is a schematic structural diagram of an ultraviolet radiation enhanced optical fiber sensor according to an embodiment of the present invention, and as shown in fig. 1, an ultraviolet radiation enhanced optical fiber sensor includes: the optical fiber detection device comprises a micro-structure optical fiber with an exposed fiber core and an ultraviolet light source 4 irradiated in a micro-structure optical fiber exposed area, wherein a metal particle layer 1, an ultraviolet absorption layer 2 and a sensitive layer 3 are sequentially deposited on the surface of the micro-structure optical fiber exposed area, the metal particle layer 1 is used for absorbing and amplifying evanescent waves, the evanescent waves are generated at the micro-structure optical fiber by electromagnetic waves transmitted in the optical fiber, and the sensitive layer 3 is used for detecting signals to be detected.
Specifically, the optical fiber is a single mode optical fiber or a multimode optical fiber.
Preferably, the microstructure optical fiber is an optical fiber with a cladding layer 6 partially stripped and exposed to a core 5. Specifically, the microstructure of the microstructure fiber is a D-shaped groove, a U-shaped groove or a conical tip.
Preferably, the material of the sensitive layer 3 is a gas sensitive material, a pressure sensitive material, a biosensing material or an ultraviolet detecting material, but is not limited to these materials, and is applied to various application occasions such as biosensing, pressure sensing, ultraviolet detecting, pollutant detecting, microspur measuring and the like.
If the sensitive layer 3 is made of gas-sensitive material, gas can be detected; if the sensitive layer 3 is made of a pressure-sensitive material, the pressure can be detected; if the sensitive layer 3 is made of a biosensing material, the living beings can be detected; if the sensitive layer 3 is made of an ultraviolet detection material, ultraviolet light can be detected.
Specifically, the gas sensitive material is a metal oxide (such as one of tin oxide, zinc oxide, tungsten oxide, iron oxide, titanium oxide, and the like, or an oxide of a plurality of metal alloys thereof), graphene and a derivative thereof, and a two-dimensional material (such as stibene, black phosphorus, molybdenum disulfide, and the like). The pressure sensitive material is silicon, germanium, metal oxide, or the like. The biosensing material is a material modified by substances related to organisms such as enzyme, microorganism, antigen or cell. The ultraviolet detecting material is silicon carbide, nitride, oxide, etc. Contaminant detection material: toxic and harmful gases in life can be used as target detection objects. Macro measurement material: magnetic materials containing iron, cobalt, nickel, etc.
Preferably, the material of the metal particle layer 1 is at least one of Au, Pt, Ag and Cu, and specifically, the material of the metal particle layer 1 is one of simple metals of Au, Pt, Ag and Cu or an alloy of a plurality of metals.
Preferably, the material of the ultraviolet absorption layer 2 is nitride, oxide or two-dimensional material.
Specifically, the nitride is gallium nitride, boron nitride or aluminum nitride, the multi-element metal nitride oxide can be zinc oxide or silicon oxide, the multi-element metal oxide can be adopted, the two-dimensional material can be graphene, stibene, black phosphorus or molybdenum disulfide, and the materials can be adopted but are not limited to the above materials.
Preferably, the deposition is chemical vapor deposition, physical vapor deposition or solution deposition.
The invention also provides a preparation method of the ultraviolet radiation enhanced optical fiber sensor, as shown in figure 2, the preparation method comprises the following steps;
step S1: and stripping off the partial cladding of the optical fiber by using a physical or chemical method to expose the fiber core, thereby obtaining the microstructure optical fiber with the exposed fiber core.
Specifically, the physical or chemical method is one or a combination of a plurality of methods of mechanical polishing, ion etching and chemical corrosion.
Step S2: and depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 10-100 nm.
Step S3: and depositing a layer of photosensitive material on the metal particle layer, wherein the thickness of the ultraviolet absorption layer is 10-300 nm. The photosensitive material is used for improving the sensitivity of the optical fiber sensor by utilizing the change of the carrier concentration under the irradiation of an ultraviolet light source.
Step S4: and depositing a layer of sensitive material on the photosensitive material, wherein the thickness of the sensitive material is 10-150 nm, and the sensitive material is used for detecting a signal to be detected.
Preferably, the annealing is performed after the deposition of the metal particle layer, the deposition of the photosensitive material and the deposition of the sensitive material.
Preferably, the annealing temperature is 150-500 ℃, and the annealing time is 1-120 min
The working principle is as follows:
the signal to be detected is detected according to the intensity changes of the incident electromagnetic wave and the emergent electromagnetic wave, the electromagnetic wave enters from the optical fiber inlet 7, and then exits from the optical fiber outlet 8 through the micro-structural optical fiber, when the electromagnetic wave passes through the optical fiber core, evanescent waves are generated in the bare area of the micro-structural optical fiber and absorbed and amplified by the metal particle layer, the carrier concentration of the ultraviolet absorption layer is greatly modulated under the irradiation of ultraviolet light, when the sensitive layer contacts the signal to be detected, the carrier state of the surface of the ultraviolet absorption layer is changed after the signal is absorbed, at the moment, the ultraviolet absorption layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the.
The U-shaped microstructure optical fiber obtained by the polishing technology In the embodiment of the invention adopts a radio frequency magnetron sputtering method to deposit an Au particle layer and an SPR enhancement structure with Kreschmann structure characteristics, then adopts a medium frequency magnetron sputtering method to deposit an IGZO (In-Ga-Zn-O) multi-element metal oxide film layer (the oxide film can realize the functions of an ultraviolet absorption layer and a sensitive layer, so that the deposition is only carried out once), and carries out sensing detection on alcohol gas under the ultraviolet illumination of 360 nm. When the IGZO multi-element metal oxide film layer contacts target gas to be detected, the carrier state of the surface of the IGZO multi-element metal oxide film layer is changed after gas molecules are adsorbed. At this time, the IGZO multi-element metal oxide film layer can function to increase the carrier concentration of the gas sensitive material layer, thereby increasing the sensitivity of the optical fiber sensor, i.e., improving the sensitivity to low-concentration gas. The embodiment of the invention combines a photosensitive material with enhanced response characteristic to ultraviolet light and a sensitive material preparation technology with a gas detection function, realizes a novel high-performance optical fiber sensing application technology, and realizes integration and fusion of optical fiber sensor materials and structures on a physical layer.
The optical fiber sensor in the embodiment of the invention has a structure for double enhancement of response signals, wherein the carrier concentration in the photosensitive layer has obvious change under the irradiation of ultraviolet light. Meanwhile, through the optimized metal particle layer, Surface Plasmon Resonance (SPR) is formed on the electromagnetic wave propagated in the microstructure optical fiber at the interface of the metal particles and the fiber core, so that evanescent waves on the surface of the optical fiber are greatly improved, and the response sensitivity of the optical fiber sensor to a signal to be measured is improved.
Surface Plasmon Resonance (SPR) is an electromagnetic wave resonance phenomenon generated by longitudinal charge density fluctuations in free electron gas at the interface of a metal medium. The development of the optical fiber SPR sensing technology starts in the early part of the last century, and compared with an optical prism SPR system, the optical fiber SPR sensing technology has the advantages of small size, low price, high sensitivity, good anti-interference performance, flexible size processing, a miniature sensing system, capability of carrying out remote real-time monitoring and the like besides the intrinsic characteristics of the SPR technology. In recent years, with the progress of semiconductor technology, material science, photoelectron and sensor technology, SPR sensing technology is continuously developing towards high sensitivity, high selectivity, miniaturization and intellectualization, and fiber SPR sensors based on different fiber materials or fiber microstructures and having excellent sensing performance are continuously appearing in combination with the research of various current micro-nano structures, nano materials, micromachining and other technologies.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims (10)

1. An ultraviolet radiation enhanced optical fiber sensor, comprising: the optical fiber comprises a microstructure optical fiber with an exposed fiber core and an ultraviolet light source (4) irradiated on a bare area of the microstructure optical fiber, wherein a metal particle layer (1), an ultraviolet absorption layer (2) and a sensitive layer (3) are sequentially deposited on the surface of the bare area of the microstructure optical fiber;
the metal particle layer (1) is used for absorbing and amplifying an evanescent wave, wherein the evanescent wave is generated at the microstructure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer (3) is used for detecting a signal to be detected;
the method comprises the steps that a signal to be detected is detected according to the intensity changes of incident electromagnetic waves and emergent electromagnetic waves, the electromagnetic waves are injected from an optical fiber inlet (7), pass through a micro-structure optical fiber and then are injected from an optical fiber outlet (8), when the electromagnetic waves pass through an optical fiber core, evanescent waves are generated in a bare area of the micro-structure optical fiber and are absorbed and amplified by a metal particle layer, the carrier concentration of an ultraviolet absorption layer is greatly modulated under the irradiation of ultraviolet light, when a sensitive layer contacts the signal to be detected, the carrier state of the surface of the ultraviolet absorption layer can change after the signal is absorbed, and at the moment, the ultraviolet absorption layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of optical fiber spectrum signals is increased, and the sensitivity of an optical fiber sensor is increased.
2. The uv-enhanced fiber optic sensor of claim 1, wherein the microstructured optical fiber is an optical fiber with a partially stripped cladding layer and an exposed core.
3. The ultraviolet radiation enhanced optical fiber sensor as recited in claim 1, wherein the sensitive layer (3) is made of a gas sensitive material, a pressure sensitive material, a biosensing material or an ultraviolet detecting material.
4. The ultraviolet radiation enhanced optical fiber sensor as recited in claim 1, wherein the material of the metal particle layer (1) is at least one of Au, Pt, Ag and Cu.
5. The uv-radiation-enhanced fiber sensor according to claim 1, wherein the uv-absorbing layer (2) material is a nitride, an oxide or a two-dimensional material.
6. The ultraviolet radiation enhanced fiber optic sensor of claim 1, wherein the deposition is chemical vapor deposition, physical vapor deposition, or solution deposition.
7. A preparation method of an ultraviolet radiation enhanced optical fiber sensor is characterized by comprising the following steps of;
depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 10-100 nm;
depositing a layer of photosensitive material on the metal particle layer, wherein the thickness of the ultraviolet absorption layer is 10-300 nm;
depositing a layer of sensitive material on the photosensitive material, wherein the thickness of the sensitive material is 10-150 nm, and the sensitive material is used for detecting a signal to be detected;
the method comprises the steps that a signal to be detected is detected according to the intensity changes of incident electromagnetic waves and emergent electromagnetic waves, the electromagnetic waves are injected from an optical fiber inlet (7), and are injected from an optical fiber outlet (8) through a micro-structure optical fiber, when the electromagnetic waves pass through an optical fiber core, evanescent waves are generated in a bare area of the micro-structure optical fiber and are absorbed and amplified by a metal particle layer, the carrier concentration of an ultraviolet absorption layer is greatly modulated under the irradiation of ultraviolet light, when a sensitive layer contacts the signal to be detected, the carrier state of the surface of the ultraviolet absorption layer can change after the signal is absorbed, and at the moment, the ultraviolet absorption layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of optical fiber spectrum signals is increased, and the sensitivity of an optical fiber sensor is increased.
8. The preparation method of the ultraviolet radiation enhanced optical fiber sensor according to claim 7, wherein before a metal particle layer is deposited on the surface of the bare area of the microstructure optical fiber, and the thickness of the metal particle layer is 10-100 nm, the method further comprises the step of stripping a part of a coating layer of the optical fiber to expose a fiber core by using a physical or chemical method to obtain the microstructure optical fiber with the exposed fiber core.
9. The method for manufacturing an ultraviolet radiation enhanced optical fiber sensor according to claim 7, wherein the metal particle layer, the photosensitive material and the sensitive material are annealed after being deposited.
10. The preparation method of the ultraviolet radiation enhanced optical fiber sensor according to claim 9, wherein the annealing temperature is 150-500 ℃, and the annealing time is 1-120 min.
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CN110763659B (en) * 2019-12-02 2024-04-09 东北大学 Optical fiber SPR biosensor and preparation method thereof
CN110907075B (en) * 2019-12-06 2021-06-29 云南师范大学 Shearing force detection device based on optical fiber
CN112432923B (en) * 2020-11-19 2024-03-15 哈尔滨理工大学 D-type photonic crystal fiber refractive index sensor device with triangular air holes and method
CN112433179B (en) * 2020-11-19 2024-04-02 哈尔滨理工大学 Gas-sensitive optical fiber sensor and method for judging fault degree of transformer
CN112432925B (en) * 2020-11-19 2024-03-15 哈尔滨理工大学 SPR-based D-type photonic crystal fiber refractive index sensor device and method
CN112433183A (en) * 2020-11-19 2021-03-02 哈尔滨理工大学 SPR-based D-type photonic crystal fiber magnetic field sensitive sensing device and method

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