CN110108381A - LC passive wireless sensor that is a kind of while detecting temperature, humidity - Google Patents
LC passive wireless sensor that is a kind of while detecting temperature, humidity Download PDFInfo
- Publication number
- CN110108381A CN110108381A CN201910344137.1A CN201910344137A CN110108381A CN 110108381 A CN110108381 A CN 110108381A CN 201910344137 A CN201910344137 A CN 201910344137A CN 110108381 A CN110108381 A CN 110108381A
- Authority
- CN
- China
- Prior art keywords
- interdigital
- negative electrode
- humidity
- layer
- inductance coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
- G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
Landscapes
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses a kind of LC passive wireless sensors for detecting temperature, humidity simultaneously, including substrate, it is provided with interdigital positive electrode, interdigital negative electrode, inductance coil above substrate, substrate and interdigital positive electrode, interdigital negative electrode, there are a cavitys between inductance coil；Interdigital negative electrode surface is covered with one layer of sensitive media, and interdigital positive electrode and interdigital negative electrode form interdigital structure, there is air layer between interdigital positive electrode and interdigital negative electrode, constitutes detection capacitor；Inductance coil is located at the periphery of interdigital positive electrode and interdigital negative electrode, and the tail portion of inductance coil is connect by lead with interdigital negative electrode, and inductance coil and detection capacitor constitute LC sensor resonant circuit units；The surrounding of the cavity is provided with oxide layer from bottom to top, bottom passivation layer, top layer passivation layer, and oxide layer is located on substrate.Detection while to temperature and humidity may be implemented in the present invention, has high sensitivity, and response is fast, the advantage that structure is simple, small in size, at low cost, the service life is long.
Description
Technical field
The present invention relates to one kind based on microelectromechanical systems (Micro-Electro-Mechanical-System,
MEMS) inductor-capacitor resonant tank formula (Inductor-Capacitor, LC) passive wireless sensor of technology processing, especially
It is a kind of passive wireless sensor for capableing of two parameters of telethermograph and humidity simultaneously.
Background technique
Internet of Things (Internet of Things, IOT) is a kind of network that object object is connected.It is generation information skill
The highly integrated and integrated use of art has new round industry transformation and economic society green, intelligence, sustainable development important
Meaning is referred to as after computer, internet, the third wave of world information industry.Sensor is Internet of Things perception
The most important component part of layer, is the acquisition entrance of data.Sensor performance will directly affect subsequent control system and information system
The accuracy of data in system, decide entire Internet of things system characteristic and whole performance indicator, and sensor performance mentions
It is high and type to increase, also play a part of technology traction to the application intelligently equipped and scene upgrades.Passive wireless sensor
Research belongs to the sensor research frontier of internet of things oriented application.LC passive wireless sensor, i.e. sensor resonant circuit
It is made of passive element, structure is simple, and cheap, theoretically operating temperature is unrestricted, and sensor structure design spirit
Living, rapidoprint can be diversified, and the spectrum information of collected sensor signal is abundant, makes it in Functional Design and multi-parameter
Design studies etc. have very big potentiality.Temperature, humidity are two physics the most closely related with people's daily life
Amount, while being also the important physical amount for needing to measure and control in scientific experiment and production activity.In particular with industry, agriculture
The continuous improvement of demand of the industries such as industry to intelligent level and the development of technology of Internet of things, the demand of ambient temperature and humidity detection
Amount sharply increases, and in conjunction with emerging technology, independently creative is developed with independent intellectual property rights including Temperature Humidity Sensor
Passive wireless sensor is extremely urgent.
Summary of the invention
The object of the present invention is to provide a kind of LC passive wireless sensors for detecting temperature, humidity simultaneously, to realize to temperature
It is detected while degree and humidity.
To achieve the above object, the technical solution adopted by the present invention are as follows:
LC passive wireless sensor that is a kind of while detecting temperature, humidity, including substrate, be provided with above substrate it is interdigital just
Electrode, interdigital negative electrode, inductance coil, substrate and interdigital positive electrode, interdigital negative electrode, there are a skies between inductance coil
Chamber；The interdigital negative electrode surface is covered with one layer of sensitive media, and interdigital positive electrode and interdigital negative electrode form interdigital structure, interdigital
There is air layer between positive electrode and interdigital negative electrode, constitutes detection capacitor；The inductance coil is located at interdigital positive electrode and interdigital
The tail portion of the periphery of negative electrode, inductance coil is connect by lead with interdigital negative electrode, and inductance coil and detection capacitor constitute LC
Sensor resonant circuit units；The surrounding of the cavity is provided with oxide layer from bottom to top, bottom passivation layer, top layer passivation
Layer, oxide layer are located on substrate.
One end of the lead is located in top layer passivation layer, and connects anchoring area by metal layer and fix.
The lead is polysilicon layer or electrode metal layer.
The material of the substrate is silicon.
The material of the bottom passivation layer and top layer passivation layer is silicon nitride.
The material of the sensitive media is graphene oxide, and graphene oxide is obtained by the mode of selective growth, such as logical
CVD growth is crossed to form.
The material of the interdigital positive electrode, interdigital negative electrode and inductance coil is nickel.
The interdigital positive electrode, interdigital negative electrode, inductance coil are processed to obtain by electroplating technology.
The inductance coil is planar spiral winding.
The principle of the present invention is: LC passive wireless sensor of the invention includes detection capacitor and inductance coil, wherein inspection
Surveying capacitor is the sensitization capacitance that interdigital structure shape is made of positive and negative electrode, sensitive media and air layer, when temperature and humidity are sent out
Changing can cause the mixing dielectric constant of capacitor to change, and temperature change can cause the Q value in entire LC resonance circuit
Variation, that is, the temperature and humidity changed can cause the resonance frequency in LC resonance circuit and impedance maximum value to change, and detect LC resonance
The resonance frequency and impedance maximum value in circuit can realize the detection for environment temperature and humidity.
The utility model has the advantages that detection while to temperature and humidity may be implemented in LC passive wireless sensor of the invention, have
High sensitivity, response is fast, the advantage that structure is simple, small in size, at low cost, the service life is long.Sensitization capacitance and inductance in LC structure
Coil is the MEMS structure with high-aspect-ratio processed by electroplating technology.The processing cost of its comprehensive material, manufacture craft
For the size of implementation and sensitization capacitance, MEMS processing technology processing sensor have at low cost, manufacture craft at
Advantage ripe, device size is small.Sensitization capacitance and inductance coil are the processing of same electroplating technology, so that the processing of LC sensor
Repeatability and consistency are improved.It is used to realize closing for inductance coil circuit using polysilicon layer (or electrode metal layer)
The step of closing, the processing of LC sensor mems can be simplified.The material of substrate is silicon, sensitization capacitance and inductance coil and silicon substrate it
Between have air chamber, air chamber may be implemented to be electrically isolated and be thermally isolated, reduce parasitic capacitance, reduce test process in electromagnetic consumable
's.
Detailed description of the invention
Fig. 1 is the section of the inductor-capacitor resonant tank formula Temperature Humidity Sensor provided by the invention based on MEMS technology
Figure；
Fig. 2 is the section of the inductor-capacitor resonant tank formula Temperature Humidity Sensor provided by the invention based on MEMS technology
Figure；
Fig. 3 is the structural schematic diagram of LC passive and wireless Temperature and Humidity Sensor System provided by the invention；
In figure, 1- substrate, 2- oxide layer, 3- bottom passivation layer, 4- top layer passivation layer, 5- metal layer connects anchoring area, and 6- draws
Line, 7- inductance coil, the interdigital positive electrode of 8-1-, the interdigital negative electrode of 8-2-, 9- sensitive media, 10- cavity, 11- air layer.
Specific embodiment
Further explanation is done to the present invention with reference to the accompanying drawing.
Such as Fig. 1 and Fig. 2, a kind of LC passive wireless sensor detecting temperature, humidity simultaneously of the invention, including substrate 1,
Substrate 1 is located at the bottom of sensor, plays pedestal；Be provided with above substrate 1 interdigital positive electrode 8-1, interdigital negative electrode 8-2,
Inductance coil 7, substrate 1 and interdigital positive electrode 8-1, interdigital negative electrode 8-2, there are a cavitys 10 between inductance coil 7；It is interdigital
The surface negative electrode 8-2 is covered with one layer of sensitive media 9, and interdigital positive electrode 8-1 and interdigital negative electrode 8-2 form interdigital structure, interdigital
There is air layer 11 between positive electrode 8-1 and interdigital negative electrode 8-2, constitutes detection capacitor；Inductance coil 7 is planar spiral winding,
Inductance coil 7 is located at the periphery of interdigital positive electrode 8-1 and interdigital negative electrode 8-2, and the tail portion of inductance coil 7 passes through lead 6 and fork
Refer to negative electrode 8-2 connection, inductance coil 7 and detection capacitor constitute LC sensor resonant circuit units；The surrounding of the cavity 10
It is provided with oxide layer 2 from bottom to top, bottom passivation layer 3, top layer passivation layer 4, oxide layer 2 is located on substrate 1.
Wherein, one end of lead 6 is located in top layer passivation layer 4, and connects anchoring area 5 by metal layer and fix.Lead 6 is more
Crystal silicon layer or electrode metal layer.
The material of substrate 1 is silicon.
The material of bottom passivation layer 3 and top layer passivation layer 4 is silicon nitride.
The material of sensitive media 9 is graphene oxide.Graphene oxide is the best sensitivity for realizing wider temperature and humidity sensing
Dielectric material.Surface of graphene oxide and edge possess a large amount of oxygen-containing groups, so that graphene oxide is had extremely strong hydrophily, make
It is with sensitive humidity sensing characteristic；Oxygen-containing functional group makes graphene oxide lose original conductive capability simultaneously, so that its
Characteristic with semiconductor or insulator；Temperature change influences the structure of oxygen-containing functional group and the power of hydrogen bond, and then influences
Temperature-sensing property.
The material of interdigital positive electrode 8-1, interdigital negative electrode 8-2 and inductance coil 7 are nickel.
LC passive wireless sensor of the invention makes by the following method to be obtained: firstly, passive and wireless Temperature Humidity Sensor
Detection capacitor and inductance coil structure be all (such as MetalMumps processing technology or to be set certainly by MEMS on piece metal working process
Processing technology on the sheet metal of meter) in structured metal layer be process；Graphene oxide layer on interdigital negative electrode it is controllable
Preparation can using on interdigital negative electrode by selective growth by the way of obtain graphene oxide film, such as CVD growth
At.
In the present invention, positive and negative electrode, sensitive media layer and air layer constitute the detection capacitor of interdigital structure shape, the inspection
It surveys capacitor to connect to form LC resonance circuit with inductance coil, equivalent circuit diagram is as shown in the right side Fig. 3.When temperature and humidity becomes
When change, the impedance capacitive reactance in LC resonance circuit can be caused to change, and then cause the frequency spectrum impedance (left side in such as Fig. 3) of test side
Amplitude Re (Z) and resonance frequency f0Point changes, to realize passive and wireless sensing while temperature and humidity.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of LC passive wireless sensor for detecting temperature, humidity simultaneously, it is characterised in that: including substrate (1), substrate (1)
Top is provided with interdigital positive electrode (8-1), interdigital negative electrode (8-2), inductance coil (7), substrate (1) and interdigital positive electrode (8-
1), there are a cavitys (10) between interdigital negative electrode (8-2), inductance coil (7)；It covers on interdigital negative electrode (8-2) surface
There is one layer of sensitive media (9), interdigital positive electrode (8-1) and interdigital negative electrode (8-2) form interdigital structure, interdigital positive electrode (8-
1) have between interdigital negative electrode (8-2) air layer (11), constitute detection capacitor；The inductance coil (7) is located at interdigital positive electricity
The tail portion of the periphery of pole (8-1) and interdigital negative electrode (8-2), inductance coil (7) passes through lead (6) and interdigital negative electrode (8-2)
Connection, inductance coil (7) and detection capacitor constitute LC sensor resonant circuit units；The surrounding of the cavity (10) is provided with certainly
Oxide layer (2), bottom passivation layer (3), top layer passivation layer (4) on down, oxide layer (2) are located on substrate (1).
2. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
One end of lead (6) is located in top layer passivation layer (4), and fixed by metal layer connection anchoring area (5).
3. LC passive wireless sensor that is according to claim 1 or 2 while detecting temperature, humidity, it is characterised in that: institute
Stating lead (6) is polysilicon layer or electrode metal layer.
4. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
The material of substrate (1) is silicon.
5. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
The material of bottom passivation layer (3) and top layer passivation layer (4) is silicon nitride.
6. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
The material of sensitive media (9) is graphene oxide.
7. LC passive wireless sensor that is according to claim 6 while detecting temperature, humidity, it is characterised in that: described
Graphene oxide is obtained by the mode of selective growth.
8. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
The material of interdigital positive electrode (8-1), interdigital negative electrode (8-2) and inductance coil (7) is nickel.
9. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
Interdigital positive electrode (8-1), interdigital negative electrode (8-2), inductance coil (7) are processed to obtain by electroplating technology.
10. LC passive wireless sensor that is according to claim 1 while detecting temperature, humidity, it is characterised in that: described
Inductance coil (7) is planar spiral winding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910344137.1A CN110108381A (en) | 2019-04-26 | 2019-04-26 | LC passive wireless sensor that is a kind of while detecting temperature, humidity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910344137.1A CN110108381A (en) | 2019-04-26 | 2019-04-26 | LC passive wireless sensor that is a kind of while detecting temperature, humidity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110108381A true CN110108381A (en) | 2019-08-09 |
Family
ID=67486925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910344137.1A Pending CN110108381A (en) | 2019-04-26 | 2019-04-26 | LC passive wireless sensor that is a kind of while detecting temperature, humidity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110108381A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111238544A (en) * | 2020-03-12 | 2020-06-05 | 江苏林洋能源股份有限公司 | Microwave sensor based on LC type resonator and applied to temperature/humidity environment detection |
| CN111468198A (en) * | 2020-04-16 | 2020-07-31 | 京东方科技集团股份有限公司 | Detection chip |
| CN112378424A (en) * | 2020-11-13 | 2021-02-19 | 中北大学 | Wireless passive strain and temperature dual-parameter sensor and preparation method thereof |
| CN112393818A (en) * | 2020-11-13 | 2021-02-23 | 湖南大学 | Power module, temperature measurement system and method of power module |
| CN112798651A (en) * | 2019-11-13 | 2021-05-14 | 中国科学院化学研究所 | Passive humidity detection system based on electromagnetic induction |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN115128702A (en) * | 2022-06-07 | 2022-09-30 | 江南大学 | Composite microwave sensor and detection method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |
| CN106197537A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | The passive wireless sensor that a kind of humiture is integrated |
| WO2019052037A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市国华光电科技有限公司 | Capacitive sensor and preparation method therefor |
| CN209605973U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | A kind of LC formula Temperature Humidity Sensor |
-
2019
- 2019-04-26 CN CN201910344137.1A patent/CN110108381A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |
| CN106197537A (en) * | 2016-06-29 | 2016-12-07 | 东南大学 | The passive wireless sensor that a kind of humiture is integrated |
| WO2019052037A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市国华光电科技有限公司 | Capacitive sensor and preparation method therefor |
| CN209605973U (en) * | 2019-04-26 | 2019-11-08 | 南京邮电大学 | A kind of LC formula Temperature Humidity Sensor |
Non-Patent Citations (1)
| Title |
|---|
| 任青颖: "无源无线温湿度传感器研究", 《中国博士学位论文全文数据库 信息科技辑》, no. 9, pages 37 - 63 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112798651A (en) * | 2019-11-13 | 2021-05-14 | 中国科学院化学研究所 | Passive humidity detection system based on electromagnetic induction |
| CN111238544A (en) * | 2020-03-12 | 2020-06-05 | 江苏林洋能源股份有限公司 | Microwave sensor based on LC type resonator and applied to temperature/humidity environment detection |
| CN111468198A (en) * | 2020-04-16 | 2020-07-31 | 京东方科技集团股份有限公司 | Detection chip |
| CN111468198B (en) * | 2020-04-16 | 2022-06-07 | 京东方科技集团股份有限公司 | Detection chip |
| CN112378424A (en) * | 2020-11-13 | 2021-02-19 | 中北大学 | Wireless passive strain and temperature dual-parameter sensor and preparation method thereof |
| CN112393818A (en) * | 2020-11-13 | 2021-02-23 | 湖南大学 | Power module, temperature measurement system and method of power module |
| CN112378424B (en) * | 2020-11-13 | 2022-06-14 | 中北大学 | Wireless passive strain and temperature dual-parameter sensor and preparation method thereof |
| CN113418969A (en) * | 2021-06-07 | 2021-09-21 | 武汉大学 | High-sensitivity millimeter wave dielectric resonance sensor for biomedical detection |
| CN115128702A (en) * | 2022-06-07 | 2022-09-30 | 江南大学 | Composite microwave sensor and detection method |
| CN115128702B (en) * | 2022-06-07 | 2023-07-04 | 江南大学 | Composite microwave sensor and detection method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110108381A (en) | LC passive wireless sensor that is a kind of while detecting temperature, humidity | |
| CN102944325B (en) | Passive wireless temperature and humidity integrated sensor | |
| CN209605973U (en) | A kind of LC formula Temperature Humidity Sensor | |
| CN101620197B (en) | Rapid response CMOS relative humidity sensor | |
| CN103344377B (en) | Capacitive barometric sensor of micro electro mechanical system | |
| CN103213942B (en) | A kind of preparation method of passive and wireless electric capacity formula humidity sensor | |
| CN108896623B (en) | digital frequency type humidity sensor for measuring relative humidity of gas | |
| CN105043581B (en) | A kind of wireless and passive MEMS temperature sensor and preparation method thereof | |
| CN102967409A (en) | Wireless inactive capacitive gas pressure sensor | |
| CN106569155B (en) | A kind of cantilever beam interdigital capacitor magnetic field sensing probe based on giant magnetostrictive thin film | |
| CN103434999B (en) | The integrated manufacturing method of a kind of temperature, humidity, air pressure and acceleration transducer | |
| CN103557970B (en) | Electrostatic excitation/piezoresistance detection miniature silicon resonant pressure sensor and manufacturing method thereof | |
| CN104535228A (en) | LC (inductance-capacitance) wireless and passive pressure sensor without up-down interconnected electrodes | |
| CN103274351B (en) | Electrochemistry geophone electrode sensitive core based on MEMS and manufacturing method thereof | |
| CN103543175A (en) | LC (Inductance-Capacitance) passive wireless micro humidity sensor applied to terminal of Internet of Things | |
| CN103487474A (en) | MEMS (micro-electromechanical systems) capacitive humidity sensor with high sensitivity and fast response | |
| CN103424208B (en) | High-sensitivity capacitance type micro-machinery temperature sensor | |
| CN105203251B (en) | Pressure sensing chip and its processing method | |
| CN103017823B (en) | Passive wireless temperature air pressure integrated sensor | |
| CN104986719B (en) | A kind of wireless and passive MEMS humiture integrated sensor and preparation method thereof | |
| Zhang et al. | A novel temperature and pressure measuring scheme based on LC sensor for ultra-high temperature environment | |
| CN107962579B (en) | A kind of robot delicate and material detection identifying system | |
| CN104833710B (en) | A kind of wireless and passive MEMS humidity sensors and preparation method thereof | |
| CN107991632A (en) | A kind of new magnetic fluid-piezoelectric thin-film structure device and its manufacture method | |
| CN103364636B (en) | Micro-machinery cantilever capacitance type power sensor-based phase detector and manufacturing method of phase detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |