CN110044848A - A kind of weak coherence tomography system and method based on Fizeau principle of interference - Google Patents

A kind of weak coherence tomography system and method based on Fizeau principle of interference Download PDF

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CN110044848A
CN110044848A CN201910364275.6A CN201910364275A CN110044848A CN 110044848 A CN110044848 A CN 110044848A CN 201910364275 A CN201910364275 A CN 201910364275A CN 110044848 A CN110044848 A CN 110044848A
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interference
sample
weak
arm
specimen
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CN110044848B (en
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王金玉
汪岳峰
尹韶云
杜凯
李刚
熊亮
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Weigao Holding Co ltd
Chongqing Institute of Green and Intelligent Technology of CAS
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Weigao Holding Co ltd
Chongqing Institute of Green and Intelligent Technology of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

Abstract

The present invention relates to a kind of weak coherence tomography systems and method based on Fizeau principle of interference, belong to biomedical imaging and technical field of optical detection.The system includes illumination arm, sample arm, feeler arm and information process unit;Illumination arm is used for weak coherent light collimated illumination sample;Sample arm is used to for illuminating bundle being relayed to sample surfaces and inside, and protecting window is contained in front end, and the reference beam that protection window returns interferes the specimen beam returned with image planes in detector surface;Feeler arm receives weak phase interference signal and is handled, and extracts sample message, and detector surface forms interference figure;The interference figure that reference beam and specimen beam are formed is carried out the optical properties information that analysis calculates sample by information process unit.Vibration, which can be isolated, in the present invention influences, and reduces environmental constraint, overcomes the problems, such as that existing coherent tomographic system due to micron order vibration failur, realizes that the lossless turbid media that penetrates is imaged and detects under common application scene.

Description

A kind of weak coherence tomography system and method based on Fizeau principle of interference
Technical field
The invention belongs to biomedical imaging and technical field of optical detection, it is related to a kind of based on Fizeau principle of interference Weak coherence tomography system and method.
Background technique
In biology and pathological research, biopsy cell's detection is to judge pathogen drug response and early stage disease The most reliable method become.Current cell detection uses paraffin or freezing mode, and tissue freezing (40 minutes) or paraffin are fixed Thick about a few micrometers of slice is made after (24 hours) manually to be sentenced through dyeing micro- sem observation surface layer according to cellular prion protein It reads.The disadvantage is that: primitive environment is destroyed, and lesion and cell effect original appearance cannot be reacted;Since slice position is inaccurate, by cell Priori knowledge interpretation of morphological feature etc., subjectivity is strong, causes mistaken diagnosis.
In order to quickly carry out cell detection without processing, it is desirable that imaging device penetrates imaging of tissue ability with lossless.Shadow As equipment includes scanning confocal microscope (U.S. Marvin, 1957,1 μm of resolution ratio), bis- (more) photon microscope (Germany Denk, 1990,1 μm of resolution ratio) and optical chromatography (OCT) microscope (U.S. Fujimoto, 1991,5-40 μm of resolution ratio).But Scanning confocal microscope, bis- (more) photon microscope penetration depths are limited (some tens of pm), and Optical sectioned microscope resolution ratio is low (15 μm) are unable to discernable cell, and they all use Mapping, and the non-concurrent quarter acquisition of each pixel of image, frame per second is low, Limit their application.
Parallel optical coherence tomography 1998 by Beaurepaire E and Boccara A C et al. in article " Full- Field optical coherence microscopy ", Optics Letters, 1998,23 (4): proposes in 244-246. In addition, Nanjing of China science and engineering (2013), Tsing-Hua University (2011), Zhejiang University (2009) also have been reported that.It is a kind of non-intruding, it is non-contact, Undamaged optical image technology is obtained scattering using highly sensitive heterodyne detection technology and is situated between with illumination of incoherent light full filed Matter internal image, is not required to scan and obtains full field image inside biological sample in real time, can quick subcellular definition carry out cell Detection.
Parallel optical coherent tomographic system no-raster can disposably obtain two dimensional image, sweep relative to traditional optical chromatography point Imaging mode is retouched, especially only needs a width to hang down the industrial detection demand of axis (face-to-face) image, image taking speed and resolution ratio have The raising of the order of magnitude.Main advantage includes: that (1) extraction speed image is fast.Weak coherent light is taken to illuminate full filed, primary acquisition is more Channel two dimensional image inhibits lateral cross talk using the airspace incoherence of light source;(2) axial resolution and lateral resolution decoupling It closes.Its lateral resolution is decided by the numerical aperture of image-forming objective lens, and longitudinal resolution is decided by source character, i.e. spectral width Degree, spectrum is wider, and axial resolution is higher, and the illumination of white light tungsten halogen lamp is taken to basically reach 1 micron or less axial resolution.Parallel Optical coherence tomography is mainly used for high-resolution biologic applications field, such as to skin, brain tissue, stomach wall, mammary tumor, tissue The imaging such as incubation.System has Non-contact nondestructive detectability, and living tissue X-Y scheme can be disposably extracted with no-raster Picture.
Parallel optical coherent tomographic system is used for living body bodily tissue internal imaging, important indicator first is that its cross To resolution ratio (δxy),
Wherein λcFor the central wavelength (under the center of corresponding spectral width or the uneven situation of spatial distribution of light source The wavelength of corresponding optical power peak position), NA is the numerical aperture of optical system.According to biometric object and characteristic, laterally The requirement of resolution ratio can be varied, and be generally less than 10 μm preferably for fingerprint recognition.
Parallel optical coherent tomographic system is horizontal and vertical resolution ratio decoupling different from the characteristics of conventional optical systems It closes, axial resolution is unrelated with optical system parameter, is only determined by light source characteristic, axial resolution δzHave,
Wherein LcFor the coherence length of laser, n ' is the refractive index of tissue.The coherence length of light source is
Wherein λcFor the central wavelength of light source, Δ λ is the spectral width of light source.When tungsten halogen lamp being taken to illuminate, λc=750nm, δzBut if can achieve 0.8 μm reaches stage resolution ratio hereinafter, ambient vibration causes reference arm and sample arm to be displaced, then system is lost Go efficiency.
Parallel optical coherence tomography excludes environment light, stray light and penetrates the energy that turbid media extracts sample message Power, but it is very sensitive to ambient vibration, and reference arm and sampling arm generate micron order displacement and then lead to thrashing.
The present invention proposes a kind of weak coherent tomographic based on Fizeau principle of interference that can enter turbid media tomography Imaging system and method couple conventional optical image system with Fizeau interferometer and Michelson's interferometer, so that coming from The photon of focus sends self-interference, excludes the stray light outside focus, extracts trajectory photon, and has system and enter media interior The ability of imaging.The system couples conventional optical image system with Michelson's interferometer, and sample arm no longer becomes interferometer A part, can overcome in traditional weak phase interference chromatographic imaging system to vibration sensing, reference arm and sample arm color difference not Consistent the problems such as reducing system penetration depth.For optics survey, imaging in biological tissues, medical image, biology and medicine biopsy etc..
Summary of the invention
In view of this, the dry based on Fizeau of turbid media tomography can be entered the purpose of the present invention is to provide a kind of The weak coherence tomography system and method for principle are related to, it is high to overcome existing parallel coherence tomography system to require vibration, The deficiency of not applicable common application scene.
In order to achieve the above objectives, the invention provides the following technical scheme:
A kind of weak coherence tomography system based on Fizeau principle of interference, including illumination arm (100), sample arm (600) and feeler arm (700);Contain Fizeau interference cavity in illumination arm or sample arm, interferes in feeler arm containing Michelson Structure;
The illumination arm (100) is used for weak coherent light collimated illumination sample;
The sample arm (600), for illuminating bundle to be relayed to sample surfaces and inside, protection window is contained in front end Mouthful, the reference beam that protection window returns interferes the specimen beam returned with image planes in detector surface;And specimen beam Through overprotection window reflection (perhaps transmit) and reference beam the reflection (or transmission) of sample image planes will be by as bias light Subduction;
The feeler arm (700), receives weak phase interference signal, and handled, and extracts sample message, detector surface Form interference figure.
Further, the imaging system further includes information process unit (800), and reference beam and specimen beam are formed Interference figure carries out the optical properties information that analysis calculates sample;
The processing method of information process unit (800) are as follows: detector exports image to computer, by obtaining after the computer stage Sample intensity profile, height and azimuth, the information such as movement velocity, while by computer it is as needed under send instructions into same Control panel is walked, then detector trigger signal and oscillation control signal are distributed by synchronously control plate, at the appointed time obtain special Determine the interference image of optical path difference.
Further, the illumination arm (100) includes light source assembly (200) and Fabry-Perot interference chamber beam splitter/combiner (300);The light source assembly (200) includes time domain weak coherent light source (201), collimating mirror (202) and expands microscope group (203), is used Collimator and extender is carried out in the light beam issued to time domain weak coherent light source.
Further, a kind of structure of the Fabry-Perot interference chamber beam splitter/combiner (300) is by FP chamber (310) and machine Tool oscillating element (380) composition, the FP chamber (310) are made of half-reflecting half mirror (311) and half-reflecting half mirror (312);
The half-reflecting half mirror (311) and half-reflecting half mirror (312) is strictly parallel and middle ware is weak away from the time domain is less than The coherence length of coherent source (201), mechanical oscillation element (380) are connected with half-reflecting half mirror (311);Light beam is through more than half anti-half The transmission for the first time of lens (311) and half-reflecting half mirror (312) generates specimen beam (301), by half-reflecting half mirror (311) head Secondary transmission and half-reflecting half mirror (312) secondary transmission generate reference beam (302), mechanical oscillation element (380) driving half anti-half Lens (311) make specimen beam (301) and reference beam (302) generate specific optical path difference.
Further, which is characterized in that another structure of the Fabry-Perot interference chamber beam splitter/combiner (300) by Amici prism (331,332), spectroscope (333,334) and mechanical oscillation element (380) composition;
The piezoelectric ceramics (320) and the Amici prism (331) connect together, and are driven by mechanical oscillation element (380) Amici prism (331) changes the optical path difference of specimen beam (301) and reference beam (302);Light beam passes through Amici prism (331) After be divided into specimen beam (301) and reference beam (302), be transmitted into Amici prism (332) and the light beam that transmits be sampling Light beam (301), by Amici prism (332) after Amici prism (331) is reflected into spectroscope (333) and spectroscope (334) The light beam of reflection is reference beam (302).
Further, the third structure of the Fabry-Perot interference chamber beam splitter/combiner (300) is by two fiber couplings Device (340,350) composition, light beam input enter fiber coupler (340) by coupler input (341), are decomposed into two beams Light enters the space length between two couplers of coupling by coupled end (342) wherein a branch of is reference beam (302), and It is vibrated using mechanical oscillation element (380) driving fiber coupler (350), generates modulation optical path difference;Another Shu Zuowei sampled light Beam (301) is directly over coupled end (343) into fiber coupler (350), and two-beam closes Shu Jing by coupler (350) again Coupled end (351) output irradiation system.
Further, the feeler arm (700) is by imaging len (701), detector (710) and Michelson interference structure group At;
By the specimen beam and reference beam of sample interior imaging surface (612), into spectroscope (720), mirror surface (730) The Michelson interference structure constituted with mirror surface (740) obtains two beam reference beams and two beam specimen beams, with spectroscope (720) after closing beam again, wherein a branch of specimen beam (301) and a branch of reference beam (302) are in the coherence length of laser precision (micron order) aplanatism interferes, form interference image by imaging len (701) on detector (710) surface.
Further, sample arm (600) is by three-D displacement objective table (602), sample (610), sample interior imaging surface (612) It is constituted with microcobjective (601);The sample interior imaging surface (612) is located at the focal plane of the microcobjective (601).
Further, the detector (710) is unit, four-quadrant, double four quadrant photoelectric, linear array or planar array detector.
Further, time domain weak coherent light source (201) are continuous or pulse laser, LED etc..
The beneficial effects of the present invention are: the present invention takes a point Fizeau interference structure, and illuminating bundle is decomposed into sampling Light beam and reference beam form optical path difference, and close beam and be total to optic path.After sample and Michelson's interferometer, sampled light Beam from sample transmission or the light beam of reflection, with reference beam reflection or transmitted light beam in detector surface form interference pattern Case can get the media interior optical properties image of designated depth through settling accounts.Vibration, which can be isolated, in the present invention influences, and reduces environment about Beam condition overcomes existing coherent tomographic system due to the problem of micron order vibration failur, realizes nothing under common application scene Damage penetrates turbid media imaging and detection.
Other advantages, target and feature of the invention will be illustrated in the following description to a certain extent, and And to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, Huo Zheke To be instructed from the practice of the present invention.Target of the invention and other advantages can be realized by following specification and It obtains.
Detailed description of the invention
To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention is made below in conjunction with attached drawing excellent The detailed description of choosing, in which:
Fig. 1 is the first structure chart of weak coherence tomography system in the embodiment of the present invention;
Fig. 2 is second of structure chart of weak coherence tomography system in the embodiment of the present invention;
Fig. 3 is a kind of weak coherent light source collimator and extender index path in illumination arm in the embodiment of the present invention;
Fig. 4 is feeler arm structure chart in the embodiment of the present invention;
Fig. 5 is in the embodiment of the present invention using Fabry-Perot interference chamber as the structure chart of beam splitter/combiner;
Fig. 6 is in the embodiment of the present invention using beam splitter/combiner structure chart that prism is as Fizeau interference cavity;
It with fiber coupler is the beam splitter/combiner structure for being grouped as Fizeau interference cavity that Fig. 7, which is in the embodiment of the present invention, Figure;
Fig. 8 is a kind of feeler arm structure chart containing Michelson's interferometer in the embodiment of the present invention;
Fig. 9 is a kind of schematic diagram of information process unit in the embodiment of the present invention.
Appended drawing reference: 100- illumination arm;200- light source assembly;201- time domain weak coherent light source;202- collimating mirror;203- expands Beam microscope group;300- Fabry-Perot interference chamber beam splitter/combiner;301- specimen beam;302- reference beam;380- mechanical oscillation Element;390- focusing displacement platform;310-FP chamber;311,312- half-reflecting half mirror;320- piezoelectric ceramics;330,331- is divided rib Mirror;333,334- spectroscope;340,350- fiber coupler;341- coupler input;342,343,351- coupled end;500- Beam splitter;510- plane mirror;600- sample arm;601- microcobjective;602- three-D displacement objective table;610- sample; 612- sample interior imaging surface;700- feeler arm;701- imaging len;710- detector;720- spectroscope;730,740- mirror Face;800- signal processing unit;703- relay objective.
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from Various modifications or alterations are carried out under spirit of the invention.It should be noted that diagram provided in following embodiment is only to show Meaning mode illustrates basic conception of the invention, and in the absence of conflict, the feature in following embodiment and embodiment can phase Mutually combination.
Wherein, the drawings are for illustrative purposes only and are merely schematic diagrams, rather than pictorial diagram, should not be understood as to this The limitation of invention;Embodiment in order to better illustrate the present invention, the certain components of attached drawing have omission, zoom in or out, not Represent the size of actual product;It will be understood by those skilled in the art that certain known features and its explanation may be omitted and be in attached drawing It is understood that.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention;It is retouched in of the invention In stating, it is to be understood that if there is the orientation or positional relationship of the instructions such as term " on ", "lower", "left", "right", "front", "rear" To be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description of the present invention and simplification of the description, rather than indicate or It implies that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore is described in attached drawing The term of positional relationship only for illustration, is not considered as limiting the invention, for the ordinary skill of this field For personnel, the concrete meaning of above-mentioned term can be understood as the case may be.
" direct picture " refers to parallel or inclined being imaged in the plane of tissue surface.It should be further appreciated that Being is the transformation of time, the change being equivalent between frequency and space for optical information from frequency conversion as used herein It changes.
As by it will be understood by those skilled in the art that, parallel optical coherent tomographic system can exclude high order strong scattering photon And background stray light, the lossless muddy imaging biological media opaque into light transmission.But what reference arm and sample arm both arms separated In the case of, ambient vibration causes both arms displacement to reach micron order then thrashing.It is provided by the present invention based on space it is incoherent, Time weak coherent light source (such as tungsten halogen lamp, LED etc.) illumination, with unit or detector array transmission of the acquisition from sample or The reflected beams are inserted into Fizeau interference cavity in illumination arm or sample arm, cancel reference arm, Michelson interference is used in feeler arm Instrument realizes coherent tomographic detection, can overcome the problems, such as that ambient vibration influences system stability.
Weak coherence tomography system of the present invention based on Fizeau principle of interference, comprising:
The interference figure that reference beam and specimen beam are formed is carried out the light that analysis calculates sample by information process unit Learn attribute information.
Illumination arm, containing weak coherent light source, in the micron-scale, its function is by weak coherent light collimated illumination to interference length Sample;
Sample arm, for illuminating bundle to be relayed to sample surfaces and inside, protecting window is contained in front end, and protection window returns The reference beam returned interferes the specimen beam returned with image planes in detector surface.And specimen beam is anti-through overprotection window It penetrates and (perhaps transmits) and reference beam will be reduced in the reflection (or transmission) of sample image planes as bias light.
Feeler arm receives weak phase interference signal, and is handled, and extracts sample message, and detector surface is formed dry Relating to pattern can get the optical properties information of sample designated depth image planes by resolving.
At least contain a Fizeau interference structure in illumination arm or feeler arm, illuminating bundle is decomposed into and is at least contained The multi-beam of reference beam and specimen beam is total to optic path in conjunction with for light beam.It is reached by sample and receives system unit Optical path difference between the reference beam and specimen beam of middle detector surface makes detector surface form interference figure.
Fizeau interference cavity may be arranged at illumination arm or sample arm.Feeler arm includes: unit, four-quadrant, double four quadrant photoelectric, line Battle array or planar array detector.Fizeau interference cavity includes: an interferoetalons or a plate beamsplitter mirror or a rib Mirror beam splitter or a fiber coupler or a fiber optic circulator.Illuminating bundle is decomposed into and at least contains reference light The multi-beam of beam and specimen beam is total to optic path in conjunction with for light beam, reaches in reception system unit and detects by sample Optical path difference between the reference beam and specimen beam on device surface interferes detector surface.
Fabry-Perot interference chamber contains two blocks of plate glass or quartz plate;Two boards inward faces are coated with optical reflection Film;Fabry-Perot interference chamber is containing interior for air, vacuum or any transparent material medium.
Mechanical oscillation element (380) uses piezoelectric ceramics in the embodiment of the present invention, synchronous with detector for modulated signal.
In the case where system principle is constant, the position of appropriate adjustment cellular construction does not influence the practical function of system.
As shown in Figure 1, feeler arm 700 obtains sample reflection signal lossless and enters inside turbid media in present example 1 The structure of imaging.Weak coherent light source (such as LED or tungsten halogen lamp) collimator and extender that light source assembly 200 is realized in illumination arm 100, warp It crosses Fabry-Perot interference chamber beam splitter/combiner 300 and isolates specimen beam 301 and reference beam 302, with 500 turns of beam splitter It folds into sample arm 600.Contain microcobjective 601, three-D displacement objective table 602 in sample arm.Through sample interior imaging surface 612 Reflection will obtain a branch of reference beam and a branch of specimen beam, into the Michael being made of spectroscope 720, mirror surface 730 and 740 Inferior interference structure obtains two beam reference beams and two beam specimen beams, after closing beam again with spectroscope 720, wherein a branch of sampling Light beam 301 and a branch of reference beam 302 (micron order) aplanatism in the coherence length of laser precision, by imaging len 701, 710 surface of detector interferes.Output signal calculates the imaging of sample interior designated depth by signal processing unit 800 The optical properties image in face.Enter the incoherent specimen beam of feeler arm, reference beam, the reflection other than image planes in the above process Light echo, strong scattering light echo and other environmental disturbances light more than two times in turbid media, will be reduced, system tool as bias light There is high signal-to-noise ratio.
As shown in Fig. 2, feeler arm 700 obtains sample transmission signal lossless and enters inside turbid media in present example 2 The structure of imaging.Weak coherent light source (such as LED or tungsten halogen lamp) collimator and extender that light source assembly 200 is realized in illumination arm 100, warp It crosses Fabry-Perot interference chamber beam splitter/combiner 300 and isolates specimen beam 301 and reference beam 302, with plane mirror 510 turnovers enter sample arm 600.Contain microcobjective 601 and three-D displacement objective table 602 in sample arm.Through sample interior at The transmission of image planes 612 will obtain a branch of reference beam and a branch of specimen beam, become directional light with the collimation of relay objective 703, enter The Michelson's interferometer being made of spectroscope 720, mirror surface 730 and 740 obtains two beam reference beams and two beam specimen beams, After closing beam again with spectroscope 720, wherein a branch of specimen beam 301 and a branch of reference beam 302 are in the coherence length of laser precision Interior (micron order) aplanatism is interfered by imaging len 701 on 710 surface of detector.Output signal passes through signal processing Unit 800 calculates the optical properties image of the imaging surface of sample interior designated depth.Into the non-of feeler arm in the above process Correlation sampling light beam, reference beam, the reflected light other than image planes, in turbid media more than two times strong scattering light echo and other Environmental disturbances light will be reduced as bias light, and system has high signal-to-noise ratio.
As shown in figure 3, light source assembly 200 is by time domain weak coherent light source (LED or tungsten halogen lamp) in some examples of the present invention 201, collimating mirror 202 expands the composition of microscope group 203, and weak coherent light source 201 is usually area source, and issuing light beam has a definite divergence Angle forms collimated light beam after collimator and extender, and bore is slightly larger than system pupil.
As shown in figure 4, in some examples of the present invention, sample arm 600 is by sample 610, sample interior imaging surface 612 and micro- Object lens 601 are constituted.Imaging surface 612 is located at the focal plane of microcobjective 601.
As shown in figure 5, Fabry-Perot interference chamber beam splitter/combiner 300 is by 310 He of FP chamber in some examples of the present invention Piezoelectric ceramics 320 forms, and FP chamber 310 is made of half-reflecting half mirror 311 and half-reflecting half mirror 312, and half-reflecting half mirror 311 and half is instead Pellicle mirror 312 is strictly parallel and middle ware is away from the coherence length for being less than light source 200, piezoelectric ceramics 320 and 311 phase of half-reflecting half mirror Even.
Light beam passes through the transmission for the first time of two pieces of half-reflecting half mirrors 311 and half-reflecting half mirror 312 in beam splitter/combiner 300, Specimen beam 301 is generated, is transmitted for the first time by half-reflecting half mirror 311 and 312 2 transmissions of half-reflecting half mirror generates reference beam 302, piezoelectric ceramics 320 drives half-reflecting half mirror 311 that specimen beam 301 and reference beam 302 is made to generate specific optical path difference.
As shown in fig. 6, Fabry-Perot interference chamber beam splitter/combiner 300 is by Amici prism in some examples of the present invention 331, Amici prism 332, spectroscope 333, spectroscope 334 and piezoelectric ceramics 320 form, wherein piezoelectric ceramics 320 and light splitting rib Mirror 331 connects together, and drives Amici prism 331 by piezoelectric ceramics 320 to change the light of specimen beam 301 and reference beam 302 Path difference.
Light beam is divided into specimen beam after the Amici prism 331 in Fabry-Perot interference chamber beam splitter/combiner 300 301 and reference beam 302, it is transmitted into Amici prism 332 and the light beam transmitted is specimen beam 301, by Amici prism 331 to be reflected into after spectroscope 333 and spectroscope 334 by the light beam that Amici prism 332 reflects be reference beam 302.
As shown in fig. 7, Fabry-Perot interference chamber beam splitter/combiner 300 is by being divided to two optical fiber in some examples of the present invention Coupler 340 and 350 forms, and light beam input enters coupler 340 by coupler input 341, is decomposed into two-beam, wherein It is a branch of to have space length between two couplers of coupling by coupled end 342 for reference beam 302, using piezoelectric ceramics The oscillation of 320 drive couplers, generates modulation optical path difference, and another Shu Zuowei specimen beam 301 is directly over coupled end 343 into coupling Clutch 350, two-beam close the coupled 351 output irradiation system of end of beam by coupler 350 again.
As shown in figure 8, in some examples of the present invention, feeler arm 700 by imaging len 701, detector 710 forms and mikey You form inferior interference structure.By the specimen beam and reference beam of imaging surface 612 in sample, into spectroscope 720, mirror surface 730 and 740 Michelson's interferometers constituted, are obtained two beam reference beams and two beam specimen beams, are closed again with spectroscope 720 Shu Hou, wherein a branch of specimen beam 301 and a branch of reference beam 302 (micron order) aplanatism in the coherence length of laser precision, By imaging len 701, interfered on 710 surface of detector.Specimen beam 301 and reference beam 302 pass through imaging len Interference image is formed on detector 710 after 701.The Fizeau interference structure that the present invention uses, one of component is by week The modulation of phase property mechanical oscillation reaches the light path hair that detector is undergone after making one of reference beam or specimen beam irradiating sample Raw cyclically-varying.
As shown in figure 9, the logical relation of information processing system unit 800 are as follows: detector exports image to computer, by counting It can get the information such as sample intensity profile, height and azimuth, movement velocity after the calculation machine stage, while as needed by computer Under send instructions into synchronously control plate, then detector trigger signal and oscillation control signal are distributed by synchronously control plate, thus Specified time obtains the interference image of specific optical path difference.Sample signal is resolved using phase shift algorithm by interference figure.
Finally, it is stated that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although referring to compared with Good embodiment describes the invention in detail, those skilled in the art should understand that, it can be to skill of the invention Art scheme is modified or replaced equivalently, and without departing from the objective and range of the technical program, should all be covered in the present invention Scope of the claims in.

Claims (10)

1. a kind of weak coherence tomography system based on Fizeau principle of interference, it is characterised in that: the system includes illumination arm (100), sample arm (600) and feeler arm (700);
The illumination arm (100) is used for weak coherent light collimated illumination sample;
The sample arm (600), for illuminating bundle to be relayed to sample surfaces and inside, protecting window is contained in front end, protects The reference beam that shield window returns interferes the specimen beam returned with image planes in detector surface;
The feeler arm (700), receives weak phase interference signal, and handled, and extracts sample message, and detector surface is formed Interference figure.
2. the weak coherence tomography system according to claim 1 based on Fizeau principle of interference, which is characterized in that institute Stating imaging system further includes information process unit (800), and the interference figure that reference beam and specimen beam are formed is analyzed Calculate the optical properties information of sample;Sample signal is resolved using phase shift algorithm by interference figure;
The processing method of information process unit (800) are as follows: detector exports image to computer, by obtaining sample after the computer stage Product intensity profile, height and azimuth, movement velocity, at the same by computer it is as needed under send instructions into synchronously control plate, Detector trigger signal and oscillation control signal are distributed by synchronously control plate again, at the appointed time obtain specific optical path difference Interference image.
3. the weak coherence tomography system according to claim 1 based on Fizeau principle of interference, which is characterized in that institute Stating illumination arm (100) includes light source assembly (200) and Fabry-Perot interference chamber beam splitter/combiner (300);The light source assembly (200) include time domain weak coherent light source (201), collimating mirror (202) and expand microscope group (203), for time domain weak coherent light source The light beam of sending carries out collimator and extender.
4. the weak coherence tomography system according to claim 3 based on Fizeau principle of interference, which is characterized in that institute A kind of structure of Fabry-Perot interference chamber beam splitter/combiner (300) is stated by FP chamber (310) and mechanical oscillation element (380) group At the FP chamber (310) is made of half-reflecting half mirror (311) and half-reflecting half mirror (312);
The half-reflecting half mirror (311) and half-reflecting half mirror (312) is strictly parallel and middle ware is weak relevant away from the time domain is less than The coherence length of light source (201), mechanical oscillation element (380) are connected with half-reflecting half mirror (311);Light beam passes through half-reflecting half mirror (311) and the transmission for the first time of half-reflecting half mirror (312), generation specimen beam (301) are saturating for the first time by half-reflecting half mirror (311) It penetrates and generates reference beam (302) with the secondary transmission of half-reflecting half mirror (312), mechanical oscillation element (380) drives half-reflecting half mirror (311) specimen beam (301) and reference beam (302) is made to generate specific optical path difference.
5. the weak coherence tomography system according to claim 3 based on Fizeau principle of interference, which is characterized in that institute State another structure of Fabry-Perot interference chamber beam splitter/combiner (300) by Amici prism (331,332), spectroscope (333, 334) it is formed with mechanical oscillation element (380);
The piezoelectric ceramics (320) and the Amici prism (331) connect together, and are driven and are divided by mechanical oscillation element (380) Prism (331) changes the optical path difference of specimen beam (301) and reference beam (302);Light beam divides after Amici prism (331) At specimen beam (301) and reference beam (302), it is transmitted into Amici prism (332) and the light beam transmitted is specimen beam (301), it is reflected after Amici prism (331) is reflected into spectroscope (333) and spectroscope (334) by Amici prism (332) Light beam be reference beam (302).
6. the weak coherence tomography system according to claim 3 based on Fizeau principle of interference, which is characterized in that institute The third structure for stating Fabry-Perot interference chamber beam splitter/combiner (300) is made of two fiber couplers (340,350), Light beam input enters fiber coupler (340) by coupler input (341), is decomposed into two-beam, wherein a branch of for reference Light beam (302) enters the space length between two couplers of coupling by coupled end (342), and utilizes mechanical oscillation element (380) driving fiber coupler (350) oscillation generates modulation optical path difference;Another Shu Zuowei specimen beam (301) is directly over coupling It closes end (343) and enters fiber coupler (350), two-beam closes the coupled end of beam (351) output by coupler (350) again and shines Penetrate system.
7. the weak coherence tomography system according to claim 1 based on Fizeau principle of interference, which is characterized in that institute Feeler arm (700) is stated by imaging len (701), detector (710) and Michelson interference structure composition;
By the specimen beam and reference beam of sample interior imaging surface (612), into spectroscope (720), mirror surface (730) and mirror The Michelson interference structure that face (740) is constituted obtains two beam reference beams and two beam specimen beams, again with spectroscope (720) After secondary conjunction beam, wherein a branch of specimen beam (301) and a branch of reference beam (302) aplanatism in the coherence length of laser precision, By imaging len (701), interfered on detector (710) surface, form interference image.
8. the weak coherence tomography system according to claim 1 based on Fizeau principle of interference, which is characterized in that sample Product arm (600) is by three-D displacement objective table (602), sample (610), sample interior imaging surface (612) and microcobjective (601) structure At;The sample interior imaging surface (612) is located at the focal plane of the microcobjective (601).
9. the weak coherence tomography system according to claim 1 or claim 7 based on Fizeau principle of interference, feature exist In the detector (710) is unit, four-quadrant, double four quadrant photoelectric, linear array or planar array detector.
10. the weak coherence tomography system according to claim 1 or 3 based on Fizeau principle of interference, feature exist In time domain weak coherent light source (201) is continuous or pulse laser, LED.
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