CN110044541A - A kind of fiber bragg grating pressure sensor based on rectangular diaphragm - Google Patents

A kind of fiber bragg grating pressure sensor based on rectangular diaphragm Download PDF

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Publication number
CN110044541A
CN110044541A CN201910445797.9A CN201910445797A CN110044541A CN 110044541 A CN110044541 A CN 110044541A CN 201910445797 A CN201910445797 A CN 201910445797A CN 110044541 A CN110044541 A CN 110044541A
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CN
China
Prior art keywords
pressure
pressure sensor
fiber
bragg grating
sensor based
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Pending
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CN201910445797.9A
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Chinese (zh)
Inventor
贾振安
樊庆赓
冯德全
禹大宽
樊伟
高宏
赵显锋
杨凯庆
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Xian Shiyou University
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Xian Shiyou University
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Priority to CN201910445797.9A priority Critical patent/CN110044541A/en
Publication of CN110044541A publication Critical patent/CN110044541A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G01L11/025Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A kind of fiber bragg grating pressure sensor based on rectangular diaphragm, comprising: protection cap is provided with the fairlead of optical fiber pigtail, intermediate member at top center, and top surface has the square pressure-bearing diaphragm of direct feeling external world oil-air pressure signal;It is installed on the stress transfer bar of square pressure-bearing center;It is installed on the pedestal of disc surfaces;It is installed on the triangle equi intensity cantilever of Chuck top, there are two threaded holes for equi intensity cantilever bottom end and Chuck top setting, and equi intensity cantilever top is in contact but is not fixed with stress transfer bar top;It is installed on the fiber grating of equi intensity cantilever upper and lower surface symmetric position.Pressure port is provided with pressure conduction channel inside center;It is set to two clamp grooves of pressure port bottom.The present invention has the features such as linearity is high, and structure is simple, and size is small and cheap.

Description

A kind of fiber bragg grating pressure sensor based on rectangular diaphragm
Technical field
The present invention relates to optical fiber grating sensing detection technique field, in particular to a kind of fiber grating based on rectangular diaphragm Pressure sensor.
Background technique
Conditional electronic class pressure transmitter, such as condenser type, pressure resistance type, inductance type, piezoelectric resonator pressure transmitter are existing Stage major part oil and gas pipeline pressure detecting master sensor to be used.Electrical type pressure transmitter can experience load cell To the physical pressures parameter such as gas, liquid be transformed into the electric signal of standard, electric signal will appear due to the impedance of transmission line Relaxation phenomenon, and under the environment such as high temperature, high pressure, electromagnetic radiation, transmitter is vulnerable to interference.Electrical type pressure transmitter is non-linear Degree, hysteresis error are higher, influence measurement accuracy, will lead to its different degrees of damage with corrosivity or overheat media contact, Also have the shortcomings that production technology is complicated, the service life is short, stability is poor.
At present with the pressure sensor of fiber grating detection strain mostly using circular film as pressure restraining element.Environmental liquids, Gas pressure acts on circular film, its generation deformation of diaphragm pressure at both sides official post.The shortcomings that circular film is that the linearity is poor, I.e. extraneous pressure with its caused by membrane deflection curve departure degree it is larger.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of optical fiber based on rectangular diaphragm Grating pressure sensor has the characteristics that the linearity is high, size is small and temperature self-compensation.
To achieve the goals above, the technical solution adopted by the present invention is that:
A kind of fiber bragg grating pressure sensor based on rectangular diaphragm, including from top to bottom sequentially connected protection top cover 1, Intermediate member 2 and pressure port 3 are protected and are provided with optical fiber pigtail fairlead 6 at the top of top cover 1, and optical fiber pigtail fairlead 6 draws the One fiber grating 7 and the second fiber grating 10,2 top surface of intermediate member are provided with the pressure-bearing for experiencing extraneous oil-air pressure Diaphragm 11, the pressure containing disk 11 are square structure, and the pressure containing disk 11 is provided centrally with stress transfer bar 5, are protected Disk 4 is provided between top cover 1 and intermediate member 2, pedestal 9 is arranged in 4 surface of disk;The equal strength that is equipped on 9 top of pedestal is hanged Arm beam 8,8 top of cantilever beam are located at 5 center of stress transfer bar, and the first optical fiber light is arranged in 8 upper and lower surface symmetric position of cantilever beam Grid 7 and the second fiber grating 10, pressure port 3 are internally provided with pressure conduction channel 12.
The protection top cover 1 is pie tubular construction, and intermediate member 2 is column tubular construction, and pressure port 3 is ' T ' Shape structure.
The pressure conduction channel 12 is arranged at 3 inside center of pressure port, the pressure of 12 two sides of pressure conduction channel There are two clamp grooves 13 for setting on power port 3.
5 cross section of stress transfer bar is square structure.
The equi intensity cantilever 8 is equilateral triangle structure;8 top of equi intensity cantilever and stress transfer Bar 5 is contacted but is not fixed;There are two threaded hole 16, the bottom ends of cantilever beam 8 for 8 bottom end of cantilever beam and the setting of 9 top of pedestal The top of pedestal 9 is fixed on by two screws.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion Structure.
First fiber grating 7 and the second fiber grating 10 is in same temperature field.
The protection cap 1 is connected through a screw thread with intermediate member 2.
The intermediate member 2 and pressure port 3 is by being welded to connect, to guarantee leakproofness.
Beneficial effects of the present invention:
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm is mentioned by using square pressure-bearing diaphragm The high linearity of ambient pressure and the pressure containing disk amount of deflection caused by it.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, under a certain pressure, same material, Rectangular center amount of deflection under size is higher than circular film center amount of deflection, improves the sensitivity of pressure sensor.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, can be by changing pressure containing disk and waiting The size of intensity cantilever beam adjusts sensitivity and the range of fiber bragg grating pressure sensor, is wanted with adapting to the monitoring of different occasions It asks.
Fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, is designed using double grating, and in same In one temperature field, the influence of ambient temperature can be eliminated, realizes temperature self-compensation.
Detailed description of the invention
Fig. 1 is the fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm along equi intensity cantilever center line Cross-sectional view.
Fig. 2 is the top view of the fiber bragg grating pressure sensor intermediate member provided by the invention based on rectangular diaphragm.
Fig. 3 is the top view of the fiber bragg grating pressure sensor pressure port provided by the invention based on rectangular diaphragm.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, the fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm, comprising: protection Lid 1 is pie tubular construction, is provided at top center for drawing the first fiber grating 7 and 10 tail of the second fiber grating Fine fairlead 6.Intermediate member 2, is column tubular construction, and top surface has rectangular the holding of direct feeling external world oil-air pressure Pressuring film plate 11;It is installed on the stress transfer bar 5 at 11 center of square pressure-bearing diaphragm;It is installed on the pedestal 9 on 4 surface of disk;It is installed on There are two threaded holes for the triangle equi intensity cantilever 8 on 9 top of pedestal, 8 bottom end of equi intensity cantilever and the setting of 9 top of pedestal 16,8 top of equi intensity cantilever is in contact but is not fixed with 5 top of stress transfer bar;It is installed on following table on equi intensity cantilever 8 The first fiber grating 7 and the second fiber grating 10 of face symmetric position.Pressure port 3 is ' T ' shape structure, is set inside center It is equipped with pressure conduction channel 12 (as shown in Figure 3);It is set to two clamp grooves 13 of 3 bottom of pressure port.
The pressure containing disk 11 is square structure, improves the line of ambient pressure and the pressure containing disk amount of deflection caused by it Property degree.
5 cross section of stress transfer bar is square structure.
The equi intensity cantilever 8 is equilateral triangle structure.8 top of equi intensity cantilever and stress transfer It 5 tip contact of bar but is not fixed.The bottom end of the equi intensity cantilever 8 is fixed on the top of pedestal 9 by two screws.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion Structure.Pressure containing disk 11 is since ambient pressure generates lateral displacement and passes to equi intensity cantilever 8 by stress transfer bar (5).
It is symmetrical that first fiber grating 7 and the second fiber grating 10 are fixed on 8 upper and lower surface centerline of equi intensity cantilever Position.First fiber grating 7 and the second fiber grating 10 can be regarded as being in same temperature since paste position is closer In.
The fiber bragg grating pressure sensor is adjusted by changing the size of pressure containing disk 11 and equi intensity cantilever 8 The sensitivity of fiber bragg grating pressure sensor and range.
The fiber bragg grating pressure sensor is designed using double grating, and the first fiber grating 7 and the second fiber grating 10 in same temperature field, can eliminate the influence of ambient temperature, realizes temperature self-compensation.
Pressure containing disk 11, stress transfer bar 5 and the equi intensity cantilever 8 constitutes a transverse direction-axial displacement conversion Structure.When extraneous oil-air pressure acts on pressure containing disk 11, the lateral displacement that pressure containing disk 11 generates simultaneously will by stress transfer bar 5 It passes to equi intensity cantilever 8, is fixed on the first fiber grating 7 impression of 8 upper surface position of center line of equi intensity cantilever To contracting power and axial strain is generated, is fixed on the second fiber grating 10 prison of equi intensity cantilever lower surface center line same position It measures tension and generates axial strain, two strains are equal in magnitude, contrary.
Working principle of the present invention is:
The working principle of fiber bragg grating pressure sensor provided by the invention based on rectangular diaphragm is, when extraneous oil gas pressure Power acts on square pressure-bearing diaphragm 11 by pressure conduction channel 12, and the transverse center displacement generated passes through stress transfer bar 5 Equi intensity cantilever 8 is passed to, the first fiber grating 7 for being fixed on 8 upper surface position of center line of equi intensity cantilever is experienced Contracting power simultaneously generates axial strain, is fixed on the second fiber grating 10 inspection of 8 lower surface center line same position of equi intensity cantilever It measuring tension and generates axial strain, two strains are equal in magnitude, and it is contrary, cause its output wavelength to change, passes through The variation of demodulated equipment Detection wavelength is to demodulate extraneous oil-air pressure signal.First fiber grating 7 and the second fiber grating 10 In same temperature field, operating temperature is identical, to realize sensor temperature self compensation.

Claims (9)

1. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm, which is characterized in that including from top to bottom sequentially connected Top cover (1), intermediate member (2) and pressure port (3) are protected, is provided with optical fiber pigtail fairlead (6) at the top of protection top cover (1), Optical fiber pigtail fairlead (6) draws the first fiber grating (7) and the second fiber grating (10), intermediate member (2) top surface are set It is equipped with the pressure containing disk (11) for experiencing extraneous oil-air pressure, pressure containing disk (11) is square structure, the pressure containing disk (11) it is provided centrally with stress transfer bar (5), protects and be provided with disk (4) between top cover (1) and intermediate member (2), disk (4) Pedestal (9) are arranged in surface, and pedestal (9) top is equipped with equi intensity cantilever (8), and cantilever beam (8) top is located at stress transfer At bar (5) center, the first fiber grating (7) and the second fiber grating (10), pressure is arranged in cantilever beam (8) upper and lower surface symmetric position Power port (3) is internally provided with pressure conduction channel (12).
2. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Protection top cover (1) be pie tubular construction, intermediate member (2) be column tubular construction, pressure port (3) be ' T ' shape structure.
3. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Pressure conduction channel (12) be arranged at pressure port (3) inside center, the pressure port of pressure conduction channel (12) two sides (3) there are two clamp groove (13) for setting on.
4. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Stress transfer bar (5) cross section be square structure.
5. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Equi intensity cantilever (8) be equilateral triangle structure;Equi intensity cantilever (8) top connects with stress transfer bar (5) It touches but is not fixed;There are two threaded hole (16), the bottoms of cantilever beam (8) for cantilever beam (8) bottom end and the setting of pedestal (9) top End is fixed on the top of pedestal (9) by two screws.
6. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Pressure containing disk (11), stress transfer bar (5) and equi intensity cantilever (8) constitute a transverse direction-axial displacement transferring structure.
7. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described The first fiber grating (7) and the second fiber grating (10) be in same temperature field.
8. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Protection cap (1) be connected through a screw thread with intermediate member (2).
9. a kind of fiber bragg grating pressure sensor based on rectangular diaphragm according to claim 1, which is characterized in that described Intermediate member (2) and pressure port (3) pass through welded connecting.
CN201910445797.9A 2019-05-27 2019-05-27 A kind of fiber bragg grating pressure sensor based on rectangular diaphragm Pending CN110044541A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110702280A (en) * 2019-10-18 2020-01-17 西安石油大学 High-sensitivity fiber grating pressure sensor based on square diaphragm
CN114354037A (en) * 2022-03-21 2022-04-15 江苏浦丹光电技术有限公司 Pressure testing machine and method for integrated optical waveguide modulator
CN117889998A (en) * 2024-03-13 2024-04-16 成都凯天电子股份有限公司 Sensor chip with stress amplifying structure and preparation method

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Publication number Priority date Publication date Assignee Title
CN110702280A (en) * 2019-10-18 2020-01-17 西安石油大学 High-sensitivity fiber grating pressure sensor based on square diaphragm
CN114354037A (en) * 2022-03-21 2022-04-15 江苏浦丹光电技术有限公司 Pressure testing machine and method for integrated optical waveguide modulator
CN114354037B (en) * 2022-03-21 2022-06-07 江苏浦丹光电技术有限公司 Pressure testing machine and method for integrated optical waveguide modulator
CN117889998A (en) * 2024-03-13 2024-04-16 成都凯天电子股份有限公司 Sensor chip with stress amplifying structure and preparation method

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Application publication date: 20190723