CN109975241A - A kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas detection device and method - Google Patents
A kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas detection device and method Download PDFInfo
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- CN109975241A CN109975241A CN201910144040.6A CN201910144040A CN109975241A CN 109975241 A CN109975241 A CN 109975241A CN 201910144040 A CN201910144040 A CN 201910144040A CN 109975241 A CN109975241 A CN 109975241A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Abstract
The invention relates to a kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas detection device and method, described device includes: semiconductor laser (1), laser collimation system (2), right-angle prism a (3), tuning-fork type quartz crystal oscillator (4), right-angle prism b (5), impedance amplifier (6), control and data collection system (7) and the computer (8) set gradually along direction of beam propagation；The resonance frequency range of the tuning-fork type quartz crystal oscillator is 20kHz-70kHz, and quality factor is more than or equal to 1000；The right-angle prism a, right-angle prism b are respectively placed in the tuning-fork type quartz crystal oscillator close to the semiconductor laser side and far from the semiconductor laser side；The size of the right-angle prism a is less than the right-angle prism b；The material of the right-angle prism a and the right-angle prism b are that lower BK7 glass is lost near infrared band.The application improves gasmetry sensitivity.
Description
Technical field
This application involves laser detection fields, and in particular to a kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas detection dress
It sets and method.
Background technique
Optoacoustic spectroscopy is a kind of indirect absorption spectroscopy techniques, in recent years because high sensitivity, selectivity it is good, can examine online
The advantages that survey, is widely used in Trace gas detection.In addition, the detection performance of photoacoustic spectrum sensor and the function of laser
Rate is related, i.e. the harmonic signal amplitude that detects of sensing system is directly proportional to the laser power of excited gas molecule.Therefore light
Acousto-optic spectrum sensor can obtain benefit from the continuous development of high power light source or from enhanced laser power.
Quartz enhanced photoacoustic spectroscopy formula Trace gas detection technology is a kind of sensitive trace gas detection method, by tuning fork
Formula quartz crystal oscillator is placed in the gas chamber full of object gas, and tunable laser passes through tuning fork at prong and excites object gas point
Son, gas molecules sorb energy simultaneously produce faint sound wave promotion tuning-fork type quartz crystal oscillator generation piezoelectric effect, that is, produce electricity
Signal is flowed, gas concentration can be finally inversed by by demodulating to this electric signal.
It, can since system signal value is directly proportional to laser power in traditional quartz enhanced photoacoustic spectroscopy technology
To enhance the piezoelectric signal of tuning-fork type quartz crystal oscillator generation by improving laser power, and then improve the detection pole of sensor
Limit, but in quartz enhanced photoacoustic spectroscopy common near-infrared continuously adjustable distributed feedback type semiconductor laser output work
Rate only 10 milliwatts or so, and laser is once-through quartz tuning-fork prong, i.e., merely with primary, utilization ratio of laser energy is not
Height, therefore limit the detection performance of sensor.
Summary of the invention
The embodiment of the present application provides a kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas detection device and method, with solution
The limited technical problem of certainly existing transducer sensitivity.
A kind of corner reflection provided by the embodiments of the present application enhances optoacoustic spectroscopy formula trace gas detection device, described device packet
It includes:
Semiconductor laser 1, laser collimation system 2, the right-angle prism a3, tuning-fork type set gradually along direction of beam propagation
Quartz crystal oscillator 4, right-angle prism b5, impedance amplifier 6, control and data collection system 7 and computer 8；
The resonance frequency range of the tuning-fork type quartz crystal oscillator 4 is 20kHz-70kHz, and quality factor is more than or equal to 1000；
The right-angle prism a3, right-angle prism b5 are respectively placed in the tuning-fork type quartz crystal oscillator 4 and swash close to the semiconductor
1 side of light device and separate 1 side of semiconductor laser；The size of the right-angle prism a3 is less than the right-angle prism b5；
The material of the right-angle prism a3 and the right-angle prism b5 are that lower BK7 glass is lost near infrared band；
Wherein, the semiconductor laser 1 exports laser and is transmitted through the tuning-fork type after the laser collimation system 2
The prong of quartz crystal oscillator 4 generates sound wave after the energy of gas molecules sorb laser and the tuning-fork type quartz crystal oscillator 4 is pushed to be put
It is dynamic, realize that the first time of laser absorbs；Laser passes through the prong of the tuning-fork type quartz crystal oscillator 4, reaches the right-angle prism b5
Afterwards, optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning-fork type quartz crystal oscillator 4, real
Second of absorption of existing laser；Laser passes through the tuning-fork type quartz crystal oscillator 4, and after reaching the right-angle prism a3, optical path is again
Realize 180 ° of reversion, i.e. second of corner reflection；Laser circulates through in the tuning-fork type quartz crystal oscillator 4, until power damages
Consumption is until 0.1mW；By the piezoelectric signal generated after acoustic wave excitation be transmitted to the impedance amplifier 6 and by it is described control with
Data collection system 7 and the computer 8 carry out signal demodulation and post-processing.
Optionally, the right-angle side a length of 2 of the right-angle side a length of 1~3mm, the right-angle prism b5 of the right-angle prism a3~
5mm。
Optionally, the resonant frequency of the tuning-fork type quartz crystal oscillator 4 is 32.768kHz.
In addition, the application provides a kind of method using as above any described device progress trace gas detection, including such as
Lower step:
Step S102: semiconductor laser current source controls the semiconductor laser output wavelength and output power, institute
Control and data collection system is stated to be scanned the resonant frequency of the tuning-fork type quartz crystal oscillator, and with the sawtooth wave of low frequency and
Signal common modulation laser after the sine-wave superimposed of high frequency；
Step S104: the laser of the semiconductor laser output becomes a branch of parallel standard after first passing around collimation lens
Then collimated optical beam is transmitted through two prong gaps of the tuning-fork type quartz crystal oscillator；
Step S106: the laser passes through the tuning-fork type quartz crystal oscillator, completes the first time excitation of gas molecule, reaches
After the right-angle prism b, optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning fork
Formula quartz crystal oscillator realizes second of excitation of gas molecule；After laser reaches the right-angle prism a, optical path realizes 180 ° again
Reversion, i.e. second of corner reflection；Laser circulates through in the tuning-fork type quartz crystal oscillator, up to power loss to 0.1mW
Until；In the process, due to laser beam multipass quartz tuning-fork, equivalent be equivalent to increases laser power；
Step S108: the low current signal for the Naan magnitude that piezoelectric effect generates is enlarged into electricity by the impedance amplifier
Press signal；The voltage signal that the control will be detected with the lock-in amplifier in data collection system is demodulated into harmonic signal；
Step S110: the harmonic signal is transmitted to the computer by RS232 serial ports, is calculated by LabVIEW program
Processing, further calculates data, obtains the concentration of target acquisition gas.
The application provide a kind of corner reflection enhancing optoacoustic spectroscopy formula trace-gas sensors detection device at least have it is as follows
Beneficial effect is that the lower technology of laser utilization in current quartz enhanced photoacoustic spectroscopy sensing device that solves is asked in the application
Topic realizes the multiple reflections of light beam using two pieces of right-angle prisms, proposes a kind of novel corner reflection enhancing optoacoustic spectroscopy trace gas
The method and apparatus of body sensor detection performance.The application detection device has simple structure, high sensitivity, at low cost etc. excellent
Point.
Detailed description of the invention
In order to more clearly explain the technical solutions in the embodiments of the present application, make required in being described below to embodiment
Attached drawing is briefly introduced, it should be apparent that, the drawings in the following description are only some examples of the present application, for this
For the those of ordinary skill in field, without any creative labor, it can also be obtained according to these attached drawings
His attached drawing.
Fig. 1 is the structural schematic diagram of sensor device described in the embodiment of the present application.
Fig. 2 a is the structural schematic diagram of two pieces of right-angle prisms and tuning fork of the embodiment of the present application.
Fig. 2 b is the structural schematic diagram that the embodiment of the present application laser is reflected in right-angle prism.
Specific embodiment
In order to keep the purposes, technical schemes and advantages of the application clearer, below in conjunction with attached drawing to the application make into
It is described in detail to one step, it is clear that described embodiments are only a part of embodiments of the present application, rather than whole implementation
Example.Based on the embodiment in the application, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, shall fall in the protection scope of this application.
The term used in the embodiment of the present application is only to be not intended to be limiting merely for for the purpose of describing particular embodiments
The application.In the embodiment of the present application and the "an" of singular used in the attached claims, " described " and "the"
It is also intended to including most forms, unless the context clearly indicates other meaning, " a variety of " generally comprise at least two.
It should be appreciated that term "and/or" used herein is only a kind of incidence relation for describing affiliated partner, indicate
There may be three kinds of relationships, for example, A and/or B, can indicate: individualism A, exist simultaneously A and B, individualism B these three
Situation.In addition, character "/" herein, typicallys represent the relationship that forward-backward correlation object is a kind of "or".
It will be appreciated that though may be described in the embodiment of the present application using term first, second, third, etc..,
But these ... it should not necessarily be limited by these terms.These terms be only used to by ... distinguish.For example, implementing not departing from the application
In the case where example range, first ... can also be referred to as second ..., and similarly, second ... can also be referred to as the
One ....
Depending on context, word as used in this " if ", " if " can be construed to " ... when " or
" when ... " or " in response to determination " or " in response to detection ".Similarly, context is depended on, phrase " if it is determined that " or " such as
Fruit detection (condition or event of statement) " can be construed to " when determining " or " in response to determination " or " when detection (statement
Condition or event) when " or " in response to detection (condition or event of statement) ".
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability
Include, so that commodity or device including a series of elements not only include those elements, but also including not clear
The other element listed, or further include for this commodity or the intrinsic element of device.In the feelings not limited more
Under condition, the element that is limited by sentence "including a ...", it is not excluded that in the commodity or device for including the element also
There are other identical elements.
Preferred embodiment of the present application is described in detail with reference to the accompanying drawing.
It is described as shown in Figure 1, Figure 2, a kind of corner reflection enhancing optoacoustic spectroscopy formula trace gas sensing provided by the embodiments of the present application
Device detection device, described device include:
Semiconductor laser 1, laser collimation system 2, the right-angle prism a3, tuning-fork type set gradually along direction of beam propagation
Quartz crystal oscillator 4, right-angle prism b5, impedance amplifier 6, control and data collection system 7 and computer 8；
The resonance frequency range of the tuning-fork type quartz crystal oscillator 4 is 20kHz-70kHz, and quality factor is more than or equal to 1000；
Optionally, the resonant frequency of the tuning-fork type quartz crystal oscillator 4 is 32.768kHz.
As shown in Fig. 2 a, Fig. 2 b, the right-angle prism a3, right-angle prism b5 are respectively placed in the tuning-fork type quartz crystal oscillator 4
Close to 1 side of semiconductor laser and far from 1 side of semiconductor laser；The size of the right-angle prism a3 is less than
The right-angle prism b5；The material of the right-angle prism a3 and the right-angle prism b5 are that lower BK7 is lost near infrared band
Glass；The loss of the BK7 glass is less than 4%.The right-angle prism a3, right-angle prism b5 parallel opposed, can with upper end or
Lower end alignment is placed.
Wherein, the semiconductor laser 1 exports laser and is transmitted through the tuning-fork type after the laser collimation system 2
The prong of quartz crystal oscillator 4 generates sound wave after the energy of gas molecules sorb laser and the tuning-fork type quartz crystal oscillator 4 is pushed to be put
It is dynamic, realize that the first time of laser absorbs；Laser passes through the prong of the tuning-fork type quartz crystal oscillator 4, reaches the right-angle prism b5
Afterwards, optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning-fork type quartz crystal oscillator 4, real
Second of absorption of existing laser；Laser passes through the tuning-fork type quartz crystal oscillator 4, and after reaching the right-angle prism a3, optical path is again
Realize 180 ° of reversion, i.e. second of corner reflection；Laser circulates through in the tuning-fork type quartz crystal oscillator 4, until power damages
Consumption is until 0.1mW；By the piezoelectric signal generated after acoustic wave excitation be transmitted to the impedance amplifier 6 and by it is described control with
Data collection system 7 and the computer 8 carry out signal demodulation and post-processing.
Optionally, the right-angle side a length of 2 of the right-angle side a length of 1~3mm, the right-angle prism b5 of the right-angle prism a3~
5mm。
In addition, the application provides a kind of method using as above any described device progress trace gas detection, including such as
Lower step:
Step S102: semiconductor laser current source controls the semiconductor laser output wavelength and output power, institute
Control and data collection system is stated to be scanned the resonant frequency of the tuning-fork type quartz crystal oscillator, and with the sawtooth wave of low frequency and
Signal common modulation laser after the sine-wave superimposed of high frequency；
Step S104: the laser of the semiconductor laser output becomes a branch of parallel standard after first passing around collimation lens
Then collimated optical beam is transmitted through two prong gaps of the tuning-fork type quartz crystal oscillator；
Step S106: the laser passes through the tuning-fork type quartz crystal oscillator, completes the first time excitation of gas molecule, reaches
After the right-angle prism b, optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning fork
Formula quartz crystal oscillator realizes second of excitation of gas molecule；After laser reaches the right-angle prism a, optical path realizes 180 ° again
Reversion, i.e. second of corner reflection；Laser circulates through in the tuning-fork type quartz crystal oscillator, up to power loss to 0.1mW
Until；In the process, due to laser beam multipass quartz tuning-fork, equivalent be equivalent to increases laser power；
Step S108: the low current signal for the Naan magnitude that piezoelectric effect generates is enlarged into electricity by the impedance amplifier
Press signal；The voltage signal that the control will be detected with the lock-in amplifier in data collection system is demodulated into harmonic signal；
Step S110: the harmonic signal is transmitted to the computer by RS232 serial ports, is calculated by LabVIEW program
Processing, further calculates data, obtains the concentration of target acquisition gas.
The optical power of common near-infrared single longitudinal mode distributed feedback type semiconductor laser is 10 milliwatts or so.In quartz
Enhance in optoacoustic spectroscopy, laser single passes through the prong of tuning-fork type quartz crystal oscillator, leaves sensing system later, laser is only
Using primary, the utilization rate of laser energy is low.Based on the above fact, the application devises a kind of corner reflection enhancing optoacoustic spectroscopy trace
Measure the method and device of gas sensor performance.Right-angle prism is that one kind may be implemented incident light and efficiently be totally reflected inside element
Optical element.One piece of big right-angle prism is placed far from the side of light source in tuning-fork type quartz crystal oscillator, for realizing the surprise of laser
Secondary reflection；One piece of small right-angle prism is placed by the side of close to sources in tuning-fork type quartz crystal oscillator, the even for realizing laser is anti-
It penetrates.Adjusting right-angle prism position ensures that the inclined-plane of right-angle prism is vertical with laser transmission direction, and right-angle surface is equal with prong plane
Row.By taking the output power 10mW of laser source as an example, the interface loss rate of right-angle prism is 4%, and direction of laser propagation reversion is primary
The interface that air and glass need to be passed through twice needs incident and outgoing right-angle prism.Laser power will not when being lost to 0.1mW
It is detected again by tuning-fork type quartz crystal oscillator, the calculation shows that 10* ((1-0.04)2)56≈ 0.1mW, i.e. laser direction are inverted 56 times, are worn
To the detection limit of tuning-fork type quartz crystal oscillator, pass through the equivalent power of tuning fork at this time is about power loss after crossing prong 57 times
126.3mW is 12.63 times of initial power.It is to solve laser in current quartz enhanced photoacoustic spectroscopy sensing device in the application
The lower technical problem of utilization rate realizes the multiple reflections of light beam using two pieces of right-angle prisms, proposes a kind of novel corner reflection
Enhance the method and apparatus of optoacoustic spectroscopy trace-gas sensors detection performance.The application detection device has structure simple, clever
The advantages that sensitivity is high, at low cost.
In the application, near-infrared semiconductor laser can be replaced the tunable laser of its all band；It is used straight
Angle prism can completely or partially replace with other optical elements with total reflection function；The corner reflection of used BK7 material
Right-angle prism can be replaced other low-loss materials such as fused quartz, calcirm-fluoride；In the application, followed to further increase laser beam
Ring number can plate anti-reflection film on right-angle prism to reduce reflection loss.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be.Some or all of the modules therein can be selected according to the actual needs
It achieves the purpose of the solution of this embodiment.
Through the above description of the embodiments, those skilled in the art can be understood that each embodiment can
It realizes by means of software and necessary general hardware platform, naturally it is also possible to pass through hardware.Based on this understanding, on
Stating technical solution, substantially the part that contributes to existing technology can be embodied in the form of software products in other words, should
Computer software product may be stored in a computer readable storage medium, such as ROM/RAM, magnetic disk, CD, including several fingers
It enables and using so that a computer equipment (can be personal computer, server or the network equipment etc.) executes each implementation
Method described in certain parts of example or embodiment.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the application, rather than its limitations；Although
The application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (4)
1. a kind of corner reflection enhances optoacoustic spectroscopy formula trace gas detection device, which is characterized in that described device includes:
Semiconductor laser (1), laser collimation system (2), the right-angle prism a (3), tuning fork set gradually along direction of beam propagation
Formula quartz crystal oscillator (4), right-angle prism b (5), impedance amplifier (6), control and data collection system (7) and computer (8)；
The resonance frequency range of the tuning-fork type quartz crystal oscillator (4) is 20kHz-70kHz, and quality factor is more than or equal to 1000；
The right-angle prism a (3), right-angle prism b (5) are respectively placed in the tuning-fork type quartz crystal oscillator (4) close to the semiconductor
Laser (1) side and the separate semiconductor laser (1) side；The size of the right-angle prism a (3) is less than the right angle
Prism b (5)；The material of the right-angle prism a (3) and the right-angle prism b (5) are that lower BK7 glass is lost near infrared band
Glass；
Wherein, semiconductor laser (1) the output laser is transmitted through the tuning-fork type after the laser collimation system (2)
The prong of quartz crystal oscillator (4), generate after the energy of gas molecules sorb laser sound wave push the tuning-fork type quartz crystal oscillator (4) into
Row is swung, and realizes that the first time of laser absorbs；Laser passes through the prong of the tuning-fork type quartz crystal oscillator (4), reaches the right angle
After prism b (5), optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning-fork type quartz
Crystal oscillator (4) realizes second of absorption of laser；Laser passes through the tuning-fork type quartz crystal oscillator (4), reaches the right-angle prism a
(3) after, optical path realizes 180 ° of reversion, i.e. second of corner reflection again；Laser circulation in the tuning-fork type quartz crystal oscillator (4)
It passes through, until power loss to 0.1mW；The impedance amplifier is transmitted to by the piezoelectric signal generated after acoustic wave excitation
(6) and by the control and data collection system (7) and the computer (8) signal demodulation and post-processing are carried out.
2. the apparatus according to claim 1, it is characterised in that: a length of 1~3mm of right-angle side of the right-angle prism a (3),
A length of 2~the 5mm of right-angle side of the right-angle prism b (5).
3. device according to claim 1 or 2, it is characterised in that: the resonant frequency of the tuning-fork type quartz crystal oscillator (4) is
32.768kHz。
4. a kind of method for carrying out trace gas detection using any described device of claim 1-3, it is characterised in that including such as
Lower step:
Step S102: semiconductor laser current source controls the semiconductor laser output wavelength and output power, the control
System and data collection system are scanned the resonant frequency of the tuning-fork type quartz crystal oscillator, and with the sawtooth wave and high frequency of low frequency
Sine-wave superimposed after signal common modulation laser；
Step S104: the laser of the semiconductor laser output becomes a branch of parallel collimated light after first passing around collimation lens
Then beam is transmitted through two prong gaps of the tuning-fork type quartz crystal oscillator；
Step S106: the laser passes through the tuning-fork type quartz crystal oscillator, and the first time for completing gas molecule excites, described in arrival
After right-angle prism b, optical path realizes 180 ° of reversion, i.e. first time corner reflection；The laser of reflection again passes through the tuning-fork type stone
English crystal oscillator realizes second of excitation of gas molecule；After laser reaches the right-angle prism a, optical path realizes 180 ° anti-again
Turn, i.e. second of corner reflection；Laser circulates through in the tuning-fork type quartz crystal oscillator, until power loss to 0.1mW；
In the process, due to laser beam multipass quartz tuning-fork, equivalent be equivalent to increases laser power；
Step S108: the low current signal for the Naan magnitude that piezoelectric effect generates is enlarged into voltage by the impedance amplifier to be believed
Number；The voltage signal that the control will be detected with the lock-in amplifier in data collection system is demodulated into harmonic signal；
Step S110: the harmonic signal is transmitted to the computer by RS232 serial ports, by LabVIEW program calculation processing,
Data are further calculated, obtain the concentration of target acquisition gas.
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| CN110927066A (en) * | 2019-12-12 | 2020-03-27 | 哈尔滨工业大学 | Device and method for improving performance of photoacoustic spectrum sensor based on H-shaped resonance tube |
| CN112285027A (en) * | 2020-10-28 | 2021-01-29 | 哈尔滨工业大学 | Photoacoustic photothermal dual-spectrum gas sensing device and method based on single-tone fork detection |
| CN113189013A (en) * | 2021-04-07 | 2021-07-30 | 山西大学 | Photoacoustic sensing device and method |
| CN113607650A (en) * | 2021-06-22 | 2021-11-05 | 南方电网科学研究院有限责任公司 | Gas detection device |
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