CN109960186B

CN109960186B - Control flow processing method and device, electronic equipment and storage medium

Info

Publication number: CN109960186B
Application number: CN201711420470.3A
Authority: CN
Inventors: 马会军; 韩盼; 赵昂
Original assignee: Zishi Energy Co ltd
Current assignee: Zishi Energy Co.,Ltd.
Priority date: 2017-12-25
Filing date: 2017-12-25
Publication date: 2022-01-07
Anticipated expiration: 2037-12-25
Also published as: WO2019128150A1; JP2019114233A; CN109960186A

Abstract

The embodiment of the invention provides a control flow processing method and device, electronic equipment and a storage medium. The method comprises matching a binary tree: determining a binary tree corresponding to the control flow according to a one-to-one correspondence relationship between the pre-established control flow and the binary tree; the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, and the logic entity stores the judgment condition; the leaf nodes are control entities, each control entity stores a control sub-process, and the control sub-processes are obtained by dividing the control processes; and (3) outputting: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting the control sub-flow corresponding to the control entity if the operation data is judged to meet the conditions. The method realizes the processing of the control flow by searching the pre-constructed binary tree, and the pre-constructed binary tree realizes the separation of the logic entity and the control entity, thereby realizing the high-efficiency control of the electrical system.

Description

Control flow processing method and device, electronic equipment and storage medium

Technical Field

The embodiment of the invention relates to the technical field of communication, in particular to a control flow processing method and device, electronic equipment and a storage medium.

Background

An electrical system is a system composed of power supply components. Such as generators, step-up and step-down transformers, transmission lines and power consumer equipment.

The electrical system utilizes three control logics (sequential structure, selection structure, cycle structure) to realize the control flow of the equipment.

The control logic is used to instruct the execution unit how to perform the action, including what conditions are met to begin and for how long.

In the prior art, a control command is generally directly sent to an execution unit, so that the execution unit executes the control command, which is similar to flat management. The control logic and the to-be-done events (equipment control flow) are mixed, and the management and control of the electrical system are relatively disordered, so that the overall efficiency of the system is low.

At present, the prior art has no corresponding method for solving the problems.

Disclosure of Invention

In order to overcome the defects in the prior art, embodiments of the present invention provide a method and an apparatus for processing a control flow, an electronic device, and a storage medium.

In one aspect, an embodiment of the present invention provides a method for processing a control flow, where the method includes:

matching a binary tree: determining a binary tree corresponding to a control flow according to a one-to-one correspondence relationship between the control flow and the binary tree which is established in advance;

the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, and the logic entity stores judgment conditions; the leaf nodes are control entities, each control entity stores a control sub-process, and the control sub-processes are obtained by dividing the control processes;

and (3) outputting: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting the control sub-flow corresponding to the control entity if the operation data is judged to meet the conditions.

On the other hand, an embodiment of the present invention provides a processing apparatus for controlling a flow, where the apparatus includes:

a matching module for matching the binary tree: determining a binary tree corresponding to a control flow according to a one-to-one correspondence relationship between the control flow and the binary tree which is established in advance;

and the output module is used for inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting the control sub-flow corresponding to the control entity if the operation data is judged to meet the conditions.

In another aspect, an embodiment of the present invention further provides an electronic device, which includes a memory, a processor, a bus, and a computer program stored in the memory and executable on the processor, where the processor implements the steps of the above method when executing the program.

In another aspect, an embodiment of the present invention further provides a storage medium, on which a computer program is stored, where the computer program is executed by a processor to implement the steps of the above method.

It can be seen from the foregoing technical solutions that, in the method, the processing of the control flow is implemented by searching a pre-constructed binary tree, and the pre-constructed binary tree of the present invention implements separation of a logic entity and a control entity, thereby implementing efficient control of an electrical system.

Drawings

Fig. 1 is a schematic flow chart of a processing method of a control flow according to an embodiment of the present invention;

fig. 2 is a schematic binary tree diagram of a processing method of a control flow according to an embodiment of the present invention;

fig. 3 is a schematic binary tree diagram of a processing method of a control flow according to another embodiment of the present invention;

fig. 4 is a schematic binary tree diagram of a processing method of a control flow according to another embodiment of the present invention;

fig. 5 is a schematic binary tree diagram of a processing method of a control flow according to another embodiment of the present invention;

fig. 6 is a schematic binary tree diagram of a processing method of a control flow according to another embodiment of the present invention;

fig. 7 is a schematic binary tree diagram of an Action of a control flow processing method according to yet another embodiment of the present invention;

fig. 8 is a schematic diagram of an Operation binary tree of a processing method of a control flow according to another embodiment of the present invention;

fig. 9 is a binary tree diagram of Flow of a processing method of a control Flow according to another embodiment of the present invention;

fig. 10 is a schematic structural diagram of a processing apparatus for controlling a flow according to another embodiment of the present invention;

fig. 11 is a schematic structural diagram of an electronic device according to yet another embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention.

The terminology of the embodiments of the present invention is explained:

the control flow is a series of flows of the operation of the electrical system, the control flow is composed of a plurality of actions, the actions comprise an execution unit and actions, and the execution unit executes corresponding actions according to the instruction of the control logic, so that the system operates in order.

The method is applied to a control flow of a semiconductor device, for example, the semiconductor device includes a MOCVD (Metal-organic Chemical Vapor Deposition) device, a PVD (Physical Vapor Deposition) device, an ELO (Epitaxial Lift Off) device, a polishing (Polisher) device, an inkjet printing device, a cleaning device, or the like.

The embodiment of the present invention is described by taking an example in which the electrical system is an MOCVD (Metal-organic Chemical Vapor Deposition) apparatus.

In the production of the MOCVD equipment, a series of control flows such as loading/unloading of a substrate, selection of a substrate loading tool, conveyance of the substrate or the substrate loading tool, pressure control, temperature control, heating, cooling, gas control, valve control and the like are involved.

Example 1

Fig. 1 is a flowchart illustrating a processing method of a control flow according to an embodiment of the present invention.

Fig. 2 is a binary tree diagram illustrating a processing method of a control flow according to an embodiment of the present invention.

As shown in fig. 1 and fig. 2, the method provided by the embodiment of the present invention specifically includes the following steps:

step 11, matching the binary tree: determining a binary tree corresponding to a control flow according to a one-to-one correspondence relationship between the control flow and the binary tree which is established in advance;

optionally, a plurality of binary trees are pre-established, and each binary tree corresponds to one control flow.

Optionally, the logical node is a logical entity newly configured in the present invention for storing the determined condition.

Optionally, the logic entity is used to represent control logic in the electrical system, and no matter how complex the control is, the control logic can be constructed by sequentially, selectively and circularly 3 basic control structures. The sequential structure is sequentially executed, for example if, the storage condition is satisfied, the sub-nodes are executed; selecting the structure to execute one or the other, e.g., else if, else and case, executing one sub-node if the stored condition is met, executing another sub-node if the stored condition is met; the loop structure is executed repeatedly, or is finished when a condition for storing is satisfied, for example, loop or while.

Optionally, the leaf node is an end point without a child node, and is configured to output a query result of the binary tree.

Optionally, the leaf node is a control entity configured in the present invention, and is configured to store a control sub-process, and the control entity is a control object.

Optionally, the control flow is divided according to a preset rule to obtain one or more control sub-flows.

Optionally, matching the binary tree, and determining a binary tree corresponding to the control flow.

And step 12, outputting: inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting a control sub-flow corresponding to the control entity if the operation data is judged to meet the condition;

optionally, the operation data includes a pressure parameter, a temperature parameter, a gas parameter, a speed, a flow rate, a control signal (such as a valve switch), and the like, corresponding to the control flow.

Optionally, the acquired operation data corresponding to the control flow is input to the binary tree for searching.

Optionally, the query path of the binary tree is logical node → leaf node, that is, after the operation data is input, the logical entity is read first, and according to the condition of the logical entity, if it is determined that the operation data meets the condition, the child node corresponding to the logical entity, that is, the control child process corresponding to the control entity is read.

In the method for processing the control flow provided in this embodiment, the processing of the control flow is realized by searching the pre-constructed binary tree, and the separation of the logic entity and the control entity is realized by the pre-constructed binary tree, so that the efficient control of the electrical system can be realized.

Example 2

Fig. 3 is a binary tree diagram of a processing method of a control flow according to another embodiment of the present invention.

As shown in fig. 3, on the basis of the above embodiment, the processing method of the control flow according to another embodiment of the present invention,

the binary tree further comprises a routing node, wherein the routing node is used for connecting the logic entity and the control entity; the control entity is connected with the logic node or the routing node.

Optionally, the routing node is a newly added node of the present invention, as shown in fig. 3, the routing node may connect the logic entity and the control entity.

Other steps of this embodiment are similar to those of the previous embodiment, and are not described again in this embodiment.

The processing method for controlling the flow provided by this embodiment can search the binary tree more smoothly by setting the routing node.

Example 3

Fig. 4 is a binary tree diagram of a processing method of a control flow according to another embodiment of the present invention.

As shown in fig. 4, based on the above embodiment, a method for processing a control flow according to another embodiment of the present invention divides the control flow into two control sub-flows, where the one control sub-flow includes one or more two control sub-flows, and accordingly,

outputting a control sub-process corresponding to the control entity, specifically:

and matching a binary tree corresponding to one or more primary control sub-processes, wherein the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores the judgment condition, and the leaf node is a secondary control sub-process.

And if the operation data is judged and acquired to meet the conditions of the logic entities of the binary tree corresponding to the primary control sub-process, outputting one or more secondary control sub-processes.

Optionally, in the embodiment of the present invention, the control flow may be divided into two-level control sub-flows according to a preset division standard, where the one-level control sub-flow includes one or more two-level control sub-flows.

Optionally, the control flow includes one or more primary control sub-flows, and each primary control sub-flow includes one or more secondary control sub-flows.

Optionally, pre-establishing one or more binary trees corresponding to the primary control sub-processes, and outputting the control sub-process corresponding to the control entity after the operation data meets the condition of the logical entity of the control process specifically includes: matching one or more binary trees corresponding to the primary control subprocess to obtain one or more corresponding binary trees;

if a binary tree corresponding to the primary control subprocess is obtained through matching, one or more secondary control subprocesses can be output through the judgment of the logic entity of the binary tree.

If a plurality of binary trees corresponding to the primary control subprocesses are obtained through matching, one or more secondary control subprocesses can be output aiming at each binary tree.

Optionally, the operation data includes pressure parameters, temperature parameters, gas parameters, speed, flow rate, or control signals (such as valve switches), etc., corresponding to the control flow, and further includes operation data related to each level of control sub-flow.

In the method for processing a control flow provided in this embodiment, the control flow is divided into two stages, and after the operation data meets the condition of the logical entity of the control flow, a binary tree corresponding to the primary control sub-flow is also searched for, so as to obtain the secondary control sub-flow.

Example 4

Fig. 5 is a binary tree diagram of a processing method of a control flow according to another embodiment of the present invention.

As shown in fig. 5, on the basis of the above embodiment, the method for processing a control flow according to another embodiment of the present invention divides the control flow into three-level control sub-flows, each of which includes one or more three-level control sub-flows, and the three-level control sub-flows are minimum control flows, and accordingly,

outputting one or more secondary control sub-processes, specifically:

matching a binary tree corresponding to one or more secondary control subprocesses, wherein the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is a tertiary control subprocess;

and if the operation data is judged and acquired to meet the conditions of the logic entities of the binary tree corresponding to the secondary control sub-process, outputting one or more tertiary control sub-processes.

Optionally, in the embodiment of the present invention, the control flow may be divided into a three-level control sub-flow, a first-level control sub-flow, a second-level control sub-flow, and a third-level control sub-flow according to a preset division standard.

Optionally, pre-establishing a binary tree corresponding to one or more of the secondary control sub-flows, and outputting one or more of the secondary control sub-flows after the operation data meets the condition of the logical entity of the primary control sub-flow specifically includes: matching one or more binary trees corresponding to the secondary control sub-processes to obtain one or more corresponding binary trees;

and outputting one or more third-level control sub-processes if the operation data meets the conditions of the logic entities of each second-level control sub-process through the judgment of the logic entities of the binary tree corresponding to each second-level control sub-process.

It should be noted that the three-level control sub-process is a minimum control process.

If a binary tree corresponding to the secondary control subprocess is obtained through matching, one or more tertiary control subprocesses can be output through the judgment of the logic entity of the binary tree.

If a binary tree corresponding to a plurality of secondary control subprocesses is obtained through matching, one or more tertiary control subprocesses can be output for each binary tree.

In the method for processing a control flow provided in this embodiment, the control flow is divided into three stages, and after the operation data meets the condition of the logical entity of the primary control sub-flow, a binary tree corresponding to the secondary control sub-flow is also searched to obtain one or more minimum control flows, that is, the three-stage control sub-flows.

Example 5

On the basis of the foregoing embodiment, in the processing method of the control flow provided by another embodiment of the present invention, the three-level control sub-flow relates to one or more of discrete data, cluster data, alarm, and message;

correspondingly, the step of outputting one or more of the three-level control sub-processes specifically includes:

matching binary trees corresponding to one or more tertiary control subprocesses; the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is the discrete data, the cluster data, the alarm or the message;

and if the operation data is judged and obtained to meet the conditions of the logic entity of the binary tree corresponding to the three-level control subprocess, outputting one or more of the discrete data, the cluster data, the alarm and the message. Optionally, in this embodiment of the present invention, the three-level control sub-process specifically relates to one or more of discrete data, cluster data, alarm, and message.

Optionally, pre-establishing one or more binary trees corresponding to the three-level control sub-processes, and outputting one or more three-level control sub-processes after the operation data meets the condition of the logic entity of the two-level control sub-processes specifically includes: matching one or more binary trees corresponding to the tertiary control subprocesses to obtain one or more corresponding binary trees;

and outputting leaf nodes corresponding to the logic entity if the operation data meets the conditions of the logic entity of each three-level control subprocess through the judgment of the logic entity of the binary tree corresponding to each three-level control subprocess, so that the three-level control subprocess executes the corresponding leaf nodes (the discrete data, the cluster data, the alarm or the message).

Alternatively, the discrete data represents the control commands sent relatively simply. For example, the control entity is a motor power-on operation, the motor power-on operation is to send a binary 1 to the motor, and the motor performs a power-on action to realize the motor power-on operation.

Alternatively, the cluster data indicates that the control commands sent are relatively complex. The cluster data is a large string of control characters, and for some complex control commands which cannot be represented by 0/1, such as motor rotation, parameters such as steering and rotating speed, which need to be indicated, the control commands including the cluster data are sent to the motor.

Alternatively, an alarm is a special message body that indicates that an indicator of the operational data of the system exceeds a threshold or that the device is malfunctioning.

Optionally, the message is a regular message.

If a binary tree corresponding to the three-level control subprocess is obtained through matching, one or more of the discrete data, the cluster data, the alarm and the message can be output through the judgment of the logic entity of the binary tree.

If a plurality of binary trees corresponding to the three-level control subprocesses are obtained through matching, one or more of the discrete data, the cluster data, the alarm and the message can be output aiming at each binary tree.

In the processing method of the control flow provided in this embodiment, the corresponding leaf node (the discrete data, the cluster data, the alarm or the message) is executed through the three-level control sub-flow, so as to implement the fine operation.

Example 6

On the basis of the foregoing embodiments 1 to 5, in a method for processing a control flow provided by another embodiment of the present invention, the control entity is one or more of discrete data, cluster data, an alarm, and a message, and accordingly, the step of outputting includes: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting one or more of discrete data, cluster data, alarm and message corresponding to the control entity if the operation data is judged to meet the conditions of another one or more logic nodes.

Optionally, the binary tree includes a plurality of control entities, where the control entities may store a control sub-process, and may also store one or more of discrete data, cluster data, alarms, and messages.

It can be understood that, if it is determined that the operation data satisfies the condition of the logical node of the control sub-process, the control sub-process corresponding to the control entity is output.

Similarly, if the operating data is judged and known to meet the condition of another one or more logic nodes (namely logic nodes of discrete data, cluster data, alarm and message), one or more of the discrete data, the cluster data, the alarm and the message corresponding to the control entity are output.

Optionally, the message is a regular message.

The processing method for the control flow provided by this embodiment implements a fine job by dividing the control entity into discrete data, cluster data, alarm, and message.

Example 7

Fig. 6 is a binary tree diagram of a processing method of a control flow according to yet another embodiment of the present invention.

As shown in fig. 6, on the basis of the foregoing embodiments 1 to 6, in a method for processing a control flow according to another embodiment of the present invention, the logic entity stores a condition for determining concurrency of a sub-control flow, where the control sub-flow is obtained by dividing the control flow according to the concurrency;

if the control sub-process is judged and known to be a synchronous control process, outputting the synchronous control process; and if the control sub-process is judged to be the asynchronous control process, outputting the asynchronous control process.

Optionally, the synchronous control flow and the asynchronous control flow are obtained by dividing each sub-flow or action of the control flow in the electrical system according to concurrency in advance.

Optionally, the concurrency indicates whether two or more sub-flows and/or actions are synchronous or asynchronous, a synchronous control flow indicates that an execution unit must wait for a certain control sub-flow or action to be executed, and then can start to execute another sub-flow or action, which is called synchronous, and an asynchronous control flow indicates that an execution unit can do other things without waiting for a certain control sub-flow or action to be executed, which is called asynchronous.

For example, for a control flow of opening and closing a valve, after the first valve is opened, the second valve can be opened, and the opening flows of the first valve and the second valve are called synchronization; the opening time of the second valve is not matched with that of the first valve, the second valve can be opened according to the self requirement, and the opening processes of the first valve and the second valve are asynchronous.

In the prior art, synchronous and asynchronous control flows are not distinguished, and synchronous and asynchronous control is disordered, but the synchronous and asynchronous control flows are well distinguished in the embodiment of the invention, so that high-efficiency searching is realized.

Other steps of this embodiment are similar to those of the previous embodiment, and are not described again in this embodiment. In the method for processing a control flow provided in this embodiment, by determining whether the control sub-flow is a synchronous control flow or an asynchronous control flow, the synchronous and asynchronous control flows can be well distinguished.

Example 8

On the basis of the foregoing embodiment, according to a processing method of a control flow provided by another embodiment of the present invention, the synchronous control flow includes a first control sub-flow and a second control sub-flow, the first control sub-flow and the second control sub-flow are obtained by dividing according to the synchronous control flow, the first control sub-flow includes an end time of the first control sub-flow, the second control sub-flow includes a start time of the second control sub-flow, and the start time of the second control sub-flow is equal to or later than the end time of the first control sub-flow.

Optionally, the synchronized control flow includes two control flows, and the time when the latter control flow starts is the time when the execution of the former control flow is completed or is later than the time when the execution of the former control flow is completed, the synchronized control flow may be divided into the former control flow: the first control sub-process and the latter control process: a second control sub-process.

Optionally, the logical entity stores a judgment condition as a time difference between a time when a previous control flow ends and a time when the previous control flow ends, and directly outputs the first control sub-flow and the second control sub-flow if the time difference in the synchronous control flow meets the judgment condition.

In the method for processing a control flow provided in this embodiment, by considering the complexity of the synchronous control flow in the control flow, the synchronous control flow can be further divided, and the first control sub-flow and the second control sub-flow are output, thereby ensuring the synchronization of the control flow.

Example 9

On the basis of the foregoing embodiment, in the method for processing a control flow according to another embodiment of the present invention, the synchronous control flow is a primary control sub-flow, the first control sub-flow and the second control sub-flow are secondary control sub-flows, and the secondary control sub-flows are control sub-flows obtained by dividing according to the primary control sub-flow;

alternatively, the first and second electrodes may be,

the synchronous control flow is a secondary control sub-flow, the first control sub-flow and the second control sub-flow are tertiary control sub-flows, and the tertiary control sub-flow is a minimum control flow obtained by dividing according to the secondary control sub-flow.

In one embodiment, the synchronized control flow is a primary control sub-flow, including two secondary control sub-flows, a first control sub-flow and a second control sub-flow, and accordingly,

and matching two binary trees corresponding to the primary control sub-processes, wherein each binary tree comprises at least one logic node and at least one leaf node, the logic nodes are logic entities, the logic entities store judgment conditions, and the leaf nodes are the secondary control sub-processes.

And if the operation data is judged to meet the condition of the logic entity of the binary tree corresponding to the primary control subprocess, outputting one secondary control subprocess first and then outputting the other secondary control subprocess.

In another embodiment, the synchronized control flow is a two-level control sub-flow, including two three-level control sub-flows, a first control sub-flow and a second control sub-flow, the three-level control sub-flow being a minimum control flow, and, accordingly,

and matching a binary tree corresponding to the two secondary control sub-processes, wherein the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores the judgment condition, and the leaf node is a three-level control sub-process.

And if the operation data is judged to meet the condition of the logic entity of the binary tree corresponding to the secondary control subprocess, outputting one tertiary control subprocess first and then outputting the other tertiary control subprocess.

According to the processing method of the control flow provided by the embodiment, the complexity of the synchronous control flow in the control flow is considered, the synchronous control flow can be further divided, and the corresponding control sub-flow is output, so that the fine control is realized.

Example 10

On the basis of the foregoing embodiment, in a processing method of a control flow provided in another embodiment of the present invention, the asynchronous control flow includes a plurality of third control sub-flows, and the third control sub-flows are obtained by dividing according to the asynchronous control flow.

Optionally, the asynchronous control flow means that the plurality of control flows are asynchronous, and the asynchronous control flow is divided into smaller control sub-flows: a third control sub-process.

Optionally, there are multiple ways of dividing the asynchronous control flow, and two of them are taken as examples for the embodiment of the present invention.

The asynchronous control flow is a primary control sub-flow, and the third control sub-flow is a secondary control sub-flow;

alternatively, the first and second electrodes may be,

the asynchronous control flow is a secondary control sub-flow, the third control sub-flow is a tertiary control sub-flow, and the tertiary control sub-flow is a minimum control flow.

In one embodiment, the asynchronous control flow is a primary control sub-flow, comprising a plurality of third control sub-flows, said third control sub-flows being secondary control sub-flows, and, accordingly,

and matching a binary tree corresponding to a plurality of primary control sub-processes, wherein the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores the judgment condition, and the leaf node is a secondary control sub-process.

And if the operation data is judged and obtained to meet the conditions of the logic entities of the binary tree corresponding to the primary control sub-process, outputting a plurality of secondary control sub-processes.

In another embodiment, the asynchronous control flow is a two-level control sub-flow, comprising a plurality of third control sub-flows, the third control sub-flow being a three-level control sub-flow, the three-level control sub-flow being a minimum control flow, and accordingly,

and matching a binary tree corresponding to a plurality of secondary control sub-processes, wherein the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores the judgment condition, and the leaf node is a tertiary control sub-process.

And if the operation data is judged to meet the conditions of the logic entities of the binary tree corresponding to the secondary control sub-process, outputting a plurality of tertiary control sub-processes.

In the method for processing a control flow provided in this embodiment, by considering the complexity of the asynchronous control flow in the control flow, the asynchronous control flow may be further divided, and a third control sub-flow is output.

Example 11

On the basis of the above embodiment, a further embodiment of the present invention provides a processing method for a control flow, where the three-level control sub-flow involves one or more of discrete data, cluster data, alarms, and messages.

Optionally, the three-level control sub-process is obtained by dividing the synchronous control process, and the three-level control sub-process executes one discrete data, cluster data, alarm or message first and then executes another discrete data, cluster data, alarm or message.

Likewise, the three-level control sub-processes, which are partitioned by the asynchronous control process, may execute one or more discrete data, cluster data, alarms, messages.

Discrete data represents a relatively simple control command to send. For example, the first sub-control entity is a motor power-on operation, the motor power-on operation is to send a binary 1 to the motor, and the motor performs a power-on action once to realize the motor power-on operation.

Optionally, the message is a regular message.

Example 12

On the basis of the above embodiment, the logical entity stores the conditions of judgment related to the concurrency of the control entity;

if the two control entities are judged and known to be synchronous, outputting the synchronous control entities; and if the control entities are judged to be asynchronous, outputting the asynchronous control entities.

The control entity stores control sub-processes or discrete data, cluster data, alarms, messages.

The control entity stores a control sub-process of a certain level of a primary control sub-process, a secondary control sub-process or a tertiary control sub-process, discrete data, cluster data, alarm and message.

In an embodiment, some two control entities in a pre-established binary tree are synchronized, and accordingly, the output is specifically:

the method comprises the steps of firstly outputting a control sub-process (a control sub-process of a certain level of a first-level control sub-process, a second-level control sub-process or a third-level control sub-process) of a logic node, and then outputting a control entity which is synchronous with the control sub-process of the logic node or another logic node, wherein the control entity can be another control sub-process (a control sub-process of a certain level of a first-level control sub-process, a second-level control sub-process or a third-level control sub-process), and can also be discrete data, cluster data, alarm or message.

In another embodiment, the output is specifically:

the method comprises the steps of firstly outputting discrete data, cluster data, alarm or information of a logic node, and then outputting a control entity of the logic node or another logic node, wherein the control entity is synchronous with the discrete data, cluster data, alarm or information, can be another control sub-process (a control sub-process of a certain level of a first-level control sub-process, a second-level control sub-process or a third-level control sub-process), and can also be discrete data, cluster data, alarm or information.

In another embodiment, a plurality of control entities in a pre-established binary tree are asynchronous, and accordingly, the output is specifically: while outputting one or more control sub-processes, discrete data, cluster data, alarms, or messages.

The method for processing a control flow provided in this embodiment provides a traversal rule for a pre-constructed binary tree, where the traversal rule considers the synchronous and asynchronous relationships among the control flow, discrete data, cluster data, alarm, and message, thereby facilitating query and achieving efficient control.

In order to more fully understand the technical content of the present invention, the processing method of the control flow provided in the present application is explained in detail on the basis of the above embodiments.

In the equipment control of MOCVD in the prior art, three control logics (a sequence structure, a selection structure and a circulation structure) are utilized to realize the control of the equipment. Aiming at the problem, the invention takes three basic control logics and equipment control flows (to-be-done events and control entities) as nodes of a binary tree, organizes the three basic control logics and the equipment control flows into the binary tree through a certain rule, leads the equipment control flows to be stored as leaf nodes of the binary tree, and leads the control logics to be stored as intermediate nodes; one or more device control flow (to-do, control entity) executions are obtained from the binary tree each time through a certain traversal rule. Therefore, the separation of logic control and equipment control flow (things to do and control entities) is realized, and the efficient control of the equipment can be realized.

In the photovoltaic semiconductor production process, the device control flow can be divided into two types, namely a control flow executed synchronously (namely, one control flow must be executed after the execution of the control flow to start other things), and a control flow executed asynchronously (namely, the other things can be done without waiting for the execution of the control flow to finish). How to efficiently search and execute the device control flows is the problem to be solved by the invention.

The technical scheme of the embodiment of the invention is as follows:

1. and constructing corresponding logic entities including control logics such as if, elseif, else, case, loop, while and the like by using the three control logics (sequence structure, selection structure and cycle structure) in an object-oriented manner.

2. The method comprises the steps of extracting commonalities of the MOCVD equipment control Flow according to a certain rule, extracting a control entity, and storing Flow, Operation, Action, Discrete Data, Cluster Data, Message and Alarm by the control entity.

The Action is the minimum control flow, which is equivalent to the three-level control sub-flow in the above embodiment.

Actions relate to one or more of discrete data, clustered data, alerts, messages.

Operation is a complex Action completed by a plurality of actions together, and is equivalent to the secondary control sub-process in the above embodiment.

The Flow is composed of multiple operations, and a more complex device control Flow is completed, which is equivalent to the primary control sub-Flow in the above embodiment.

3. Setting and constructing a binary tree rule:

(1) in order to connect the logic entity and the control entity, the construction of the tree is convenient, and routing nodes are added;

(2) the control entity must act as a leaf node of the binary tree;

(3) the logic entity must be used as an intermediate node of the binary tree for searching the control entity on the leaf;

(4) the control entity is connected with the routing node or the logic node;

(5) the Flow, the Operation and the Action all have own binary tree, and the leaves of the binary tree of the Action cannot be provided with control entities of the Action, the Operation and the Flow; the leaf of the binary tree of the Operation cannot be provided with the control entity of the Operation and the Flow; there cannot be a control entity for the Flow on the binary tree leaf of the Flow.

In the embodiments of the present invention, there are various binary tree structures and search manners, and several of them are taken as examples for the embodiments of the present invention.

If the binary tree corresponding to the control Flow is determined to be a Flow binary tree according to a one-to-one correspondence relationship between the pre-established control Flow and the binary tree, the Flow binary tree includes logic nodes and leaf nodes, the leaf nodes may include Operation, discrete data, cluster data, alarms and messages, and each leaf node is directly connected with the logic node or connected with the logic node through a routing node.

And inputting the acquired Operation data corresponding to the control Flow into the matched binary tree of the Flow, and outputting one or more of Operation, discrete data, cluster data, alarm or message corresponding to the control entity if the Operation data is judged to meet the judgment condition stored by the logic node of the Flow.

When one or more operations are output, the step of outputting one or more operations specifically comprises matching a binary tree corresponding to one or more operations; the binary tree of Operation includes logical nodes and leaf nodes, the leaf nodes may include actions, discrete data, cluster data, alarms and messages, and each leaf node is connected to a logical node either directly or through a routing node.

And if the Operation data is judged and known to meet the judgment condition of the logic node storage of the binary tree corresponding to the Operation, outputting one or more of Action, discrete data, cluster data, alarm or message.

When one or more actions are output, the step of outputting one or more actions is specifically to match a binary tree corresponding to one or more actions; the binary tree of Action includes logical nodes and leaf nodes, which may include discrete data, cluster data, alarms and messages, each connected directly to a logical node or connected to a logical node through a routing node.

And if the operation data is judged and known to meet the judgment condition stored by the logic node of the binary tree corresponding to the Action, outputting one or more of corresponding discrete data, cluster data, alarm or message.

4. Example construction of the tree:

fig. 7 is a binary tree diagram of an Action of a control flow processing method according to yet another embodiment of the present invention.

As shown in FIG. 7, an example of a binary tree of actions:

only three types of nodes are arranged in the binary tree, and leaf nodes store control entities; routing nodes (routes) are used only for connecting nodes; logical nodes (e.g., if) store logical entities; because of the binary tree of actions, there is no Action, Operation, Flow control entity on the leaf node, and the leaf node stores Discrete Data, Cluster Data, Message, or Alarm.

Fig. 8 is a schematic diagram of an Operation binary tree of a processing method of a control flow according to another embodiment of the present invention.

An example of an Operation binary tree is shown in fig. 8. The binary tree of the Operation has no Operation and Flow control entity on the leaf node, and the leaf node stores the Operation, Discrete Data, Cluster Data, Message or Alarm.

Fig. 9 is a binary tree diagram of Flow according to a processing method of a control Flow according to yet another embodiment of the present invention.

As shown in fig. 9, for example, the binary tree of the Flow has no Flow control entity on the leaf node of the binary tree of the Flow, and the leaf node stores, Discrete Data, Cluster Data, Message, or Alarm.

For the traversal of the logic tree, a rule of the logic tree can be defined, and the traversal rule defined by the embodiment of the invention is as follows: if the control entities are synchronous, returning immediately, and only one synchronous control entity is obtained through one-time traversal; if the control entities are asynchronous, continuing to find down along the logic tree until the control entities which are synchronous return, and returning one or more asynchronous control entities in one traversal; if a null is returned, the logical tree is fully traversed.

In one embodiment, the logic entity of the binary tree corresponding to the Flow stores the condition of judgment related to concurrency of the Operation, the synchronous control Flow, comprises the Operation1 and the Operation2, the Operation1 comprises the ending time of the Operation1, the Operation2 comprises the starting time of the Operation2, the starting time of the Operation2 is equal to or later than the ending time of the Operation1, correspondingly,

the binary trees corresponding to the Operation1 and the Operation2 are matched respectively, the binary trees corresponding to the Operation1 and the Operation2 respectively comprise at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is an Action.

And if the Operation data is judged and known to meet the condition of the logic entity of the binary tree corresponding to the Flow, outputting the Operation1 first and then outputting the Operation 2.

In another embodiment, the logic entity of the binary tree corresponding to the Flow stores the condition of judgment related to concurrency of Operation, the asynchronous control Flow comprises a plurality of operations, and accordingly,

and matching binary trees corresponding to a plurality of operations, wherein the binary trees corresponding to the plurality of operations respectively comprise at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is an Action.

And if the Operation data is judged and known to meet the conditions of the logic entities of the binary tree corresponding to the Flow, outputting a plurality of operations.

The embodiment of the invention divides the control flow into synchronous and asynchronous control flows, and adopts a tree-shaped storage and organization mode of a logic entity and a control entity, so that the sight line can efficiently search and execute the equipment control flows.

Fig. 10 is a schematic structural diagram of a processing apparatus for controlling a flow according to another embodiment of the present invention.

Referring to fig. 10, on the basis of the above embodiment, the present embodiment provides a processing apparatus of a control flow, the apparatus includes an input module 101 and an output module 102, where:

the matching module 101 is used to match a binary tree: determining a binary tree corresponding to a control flow according to a one-to-one correspondence relationship between the control flow and the binary tree which is established in advance; the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, and the logic entity stores judgment conditions; the leaf nodes are control entities, each control entity stores a control sub-process, and the control sub-processes are obtained by dividing the control processes;

the output module 102 is configured to input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data meets the condition, output a control sub-flow corresponding to the control entity.

The processing apparatus for controlling a flow provided in this embodiment may be configured to execute the method in the foregoing method embodiment, and details of this implementation are not described again.

The processing apparatus for a control flow provided in this embodiment implements processing of a control flow by searching a pre-constructed binary tree, and the pre-constructed binary tree of the present invention implements separation of a logic entity and a control entity, thereby implementing efficient control of an electrical system.

Referring to fig. 11, an electronic device provided by the embodiment of the present invention includes a memory (memory)111, a processor (processor)112, a bus 113, and a computer program stored in the memory 111 and running on the processor. The memory 111 and the processor 112 complete communication with each other through the bus 113.

The processor 112 is used for calling the program instructions in the memory 111 to implement the method of fig. 1 when executing the program.

In another embodiment, the processor, when executing the program, implements the method of:

In another embodiment, the processor, when executing the program, implements the method of: dividing the control flow into two-stage control sub-flows, wherein the one-stage control sub-flow comprises one or more two-stage control sub-flows, and correspondingly, outputting the control sub-flow corresponding to the control entity, specifically:

matching one or more binary trees corresponding to the primary control subprocesses; the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is a secondary control sub-process;

In another embodiment, the processor, when executing the program, implements the method of: dividing the control flow into three-level control sub-flows, wherein the two-level control sub-flows comprise one or more three-level control sub-flows, and the three-level control sub-flows are minimum control flows; correspondingly, the step of outputting one or more secondary control sub-processes specifically comprises:

matching binary trees corresponding to one or more secondary control subprocesses; the binary tree comprises at least one logic node and at least one leaf node, the logic node is a logic entity, the logic entity stores judgment conditions, and the leaf node is a three-level control subprocess;

the three-level control sub-process relates to one or more of discrete data, cluster data, alarm and message;

and if the operation data is judged and obtained to meet the conditions of the logic entity of the binary tree corresponding to the three-level control subprocess, outputting one or more of the discrete data, the cluster data, the alarm and the message.

the control entity further comprises one or more of discrete data, cluster data, alarm and message, and correspondingly, the step of outputting comprises: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting one or more of discrete data, cluster data, alarm and message corresponding to the control entity if the operation data is judged to meet the conditions of another one or more logic nodes.

the logic entity stores judgment conditions related to concurrency of control sub-processes, and the control sub-processes are obtained by dividing the control processes according to the concurrency;

the synchronous control flow comprises a first control sub-flow and a second control sub-flow, the first control sub-flow and the second control sub-flow are obtained by dividing according to the synchronous control flow, the first control sub-flow comprises the ending time of the first control sub-flow, the second control sub-flow comprises the starting time of the second control sub-flow, and the starting time of the second control sub-flow is equal to or later than the ending time of the first control sub-flow.

the synchronous control flow is a primary control sub-flow, the first control sub-flow and the second control sub-flow are secondary control sub-flows, and the secondary control sub-flows are control sub-flows obtained by dividing according to the primary control sub-flows;

alternatively, the first and second electrodes may be,

the asynchronous control flow comprises a plurality of third control sub-flows, and the third control sub-flows are obtained by dividing according to the asynchronous control flow.

alternatively, the first and second electrodes may be,

the three-level control sub-process relates to one or more of discrete data, cluster data, alarms and messages.

the logical entity storing a condition of judgment related to concurrency of the control entity;

the method is applied to a control flow of a semiconductor device.

The electronic device provided in this embodiment may be configured to execute the program corresponding to the method in the foregoing method embodiment, and this implementation is not described again.

The electronic device provided by the embodiment at least has the following technical effects:

the pre-constructed binary tree realizes the separation of the logic entity and the control entity, thereby realizing the high-efficiency control of the electric system.

A further embodiment of the invention provides a storage medium having a computer program stored thereon, which when executed by a processor performs the steps of fig. 1.

In another embodiment, the program when executed by a processor implements a method comprising:

In another embodiment, the program when executed by a processor implements a method comprising: dividing the control flow into two-stage control sub-flows, wherein the one-stage control sub-flow comprises one or more two-stage control sub-flows, and correspondingly, outputting the control sub-flow corresponding to the control entity, specifically:

In another embodiment, the program when executed by a processor implements a method comprising: dividing the control flow into three-level control sub-flows, wherein the two-level control sub-flows comprise one or more three-level control sub-flows, and the three-level control sub-flows are minimum control flows; correspondingly, the step of outputting one or more secondary control sub-processes specifically comprises:

In another embodiment, the program when executed by a processor implements a method comprising: the three-level control sub-process relates to one or more of discrete data, cluster data, alarm and message;

In another embodiment, the program when executed by a processor implements a method comprising: the control entity further comprises one or more of discrete data, cluster data, alarm and message, and correspondingly, the step of outputting comprises: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting one or more of discrete data, cluster data, alarm and message corresponding to the control entity if the operation data is judged to meet the conditions of another one or more logic nodes.

In another embodiment, the program when executed by a processor implements a method comprising: the logic entity stores judgment conditions related to concurrency of control sub-processes, and the control sub-processes are obtained by dividing the control processes according to the concurrency;

In another embodiment, the program when executed by a processor implements a method comprising: the synchronous control flow comprises a first control sub-flow and a second control sub-flow, the first control sub-flow and the second control sub-flow are obtained by dividing according to the synchronous control flow, the first control sub-flow comprises the ending time of the first control sub-flow, the second control sub-flow comprises the starting time of the second control sub-flow, and the starting time of the second control sub-flow is equal to or later than the ending time of the first control sub-flow.

In another embodiment, the program when executed by a processor implements a method comprising: the synchronous control flow is a primary control sub-flow, the first control sub-flow and the second control sub-flow are secondary control sub-flows, and the secondary control sub-flows are control sub-flows obtained by dividing according to the primary control sub-flows;

alternatively, the first and second electrodes may be,

In another embodiment, the program when executed by a processor implements a method comprising: the asynchronous control flow comprises a plurality of third control sub-flows, and the third control sub-flows are obtained by dividing according to the asynchronous control flow.

In another embodiment, the program when executed by a processor implements a method comprising: the asynchronous control flow is a primary control sub-flow, and the third control sub-flow is a secondary control sub-flow;

alternatively, the first and second electrodes may be,

In another embodiment, the program when executed by a processor implements a method comprising: the three-level control sub-process relates to one or more of discrete data, cluster data, alarms and messages.

In another embodiment, the program when executed by a processor implements a method comprising: the logical entity storing a condition of judgment related to concurrency of the control entity;

In another embodiment, the program when executed by a processor implements a method comprising: the method is applied to a control flow of a semiconductor device.

In the storage medium provided in this embodiment, when the program is executed by the processor, the method in the foregoing method embodiment is implemented, and details of this implementation are not described again.

The storage medium provided by this embodiment realizes the processing of the control flow by searching the pre-constructed binary tree, and the pre-constructed binary tree of the present invention realizes the separation of the logic entity and the control entity, thereby realizing the efficient control of the electrical system.

Yet another embodiment of the present invention discloses a computer program product comprising a computer program stored on a non-transitory computer-readable storage medium, the computer program comprising program instructions which, when executed by a computer, enable the computer to perform the methods provided by the above-mentioned method embodiments, for example, comprising:

determining a binary tree corresponding to the control flow according to a one-to-one correspondence relationship between the pre-established control flow and the binary tree;

For example, on the basis of the above embodiment, the logic entity stores a condition for judging the concurrency of the control sub-flows, and the control sub-flows are obtained by dividing the control flows according to the concurrency;

Those skilled in the art will appreciate that although some embodiments described herein include some features included in other embodiments instead of others, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments.

Those skilled in the art will appreciate that the steps of the embodiments may be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art will appreciate that a microprocessor or Digital Signal Processor (DSP) may be used in practice to implement some or all of the functionality of some or all of the components according to embodiments of the present invention. The present invention may also be embodied as apparatus or device programs (e.g., computer programs and computer program products) for performing a portion or all of the methods described herein.

Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A method for processing a control flow, the method comprising:

matching a binary tree: determining a binary tree corresponding to the control flow according to a one-to-one correspondence relationship between the pre-established control flow and the binary tree;

and (3) outputting: inputting the acquired operation data corresponding to the control flow into the binary tree, if the operation data is judged to meet the conditions, outputting the control sub-flow corresponding to the control entity,

the operation data is parameters corresponding to each component in the electrical system, at least comprising one or more of pressure parameters, temperature parameters, gas parameters, speed, flow or control signals,

the logic entity is used for representing control logic in the electrical system, the control logic in the electrical system comprises a sequential control structure, a selection control structure and a circulation control structure, and the logic entity stores the judged condition as the condition that the sequential control structure, the selection control structure or the circulation control structure executes the leaf node.

2. The method of claim 1, wherein the binary tree further comprises a routing node for connecting the logical entity and the control entity; the control entity is connected with the logic node or the routing node.

3. The method according to claim 1 or 2, wherein the control process is divided into two-level control sub-processes, the one-level control sub-process includes one or more two-level control sub-processes, and accordingly, the step of outputting the control sub-process corresponding to the control entity specifically includes:

4. The method of claim 3, wherein the control flow is divided into three levels of control sub-flows, a second level of control sub-flow comprising one or more three levels of control sub-flows, the three levels of control sub-flows being a minimum control flow; correspondingly, the step of outputting one or more secondary control sub-processes specifically comprises:

5. The method of claim 4, wherein the three-level control sub-process involves one or more of discrete data, clustered data, alarms, messages;

6. The method according to claim 1, wherein the control entity further comprises one or more of discrete data, cluster data, alarms, and messages, and accordingly, the step of outputting is specifically: and inputting the acquired operation data corresponding to the control flow into the binary tree, and outputting one or more of discrete data, cluster data, alarm and message corresponding to the control entity if the operation data is judged to meet the conditions of another one or more logic nodes.

7. The method of claim 1, wherein: the logic entity stores judgment conditions related to concurrency of control sub-processes, and the control sub-processes are obtained by dividing the control processes according to the concurrency;

8. The method of claim 7, wherein: the synchronous control flow comprises a first control sub-flow and a second control sub-flow, the first control sub-flow and the second control sub-flow are obtained by dividing according to the synchronous control flow, the first control sub-flow comprises the ending time of the first control sub-flow, the second control sub-flow comprises the starting time of the second control sub-flow, and the starting time of the second control sub-flow is equal to or later than the ending time of the first control sub-flow.

9. The method of claim 8, wherein: the synchronous control flow is a primary control sub-flow, the first control sub-flow and the second control sub-flow are secondary control sub-flows, and the secondary control sub-flows are control sub-flows obtained by dividing according to the primary control sub-flows;

alternatively, the first and second electrodes may be,

10. The method of claim 7, wherein: the asynchronous control flow comprises a plurality of third control sub-flows, and the third control sub-flows are obtained by dividing according to the asynchronous control flow.

11. The method of claim 10, wherein: the asynchronous control flow is a primary control sub-flow, and the third control sub-flow is a secondary control sub-flow;

alternatively, the first and second electrodes may be,

12. The method according to claim 9 or 11, characterized in that: the three-level control sub-process relates to one or more of discrete data, cluster data, alarms and messages.

13. The method of claim 6, wherein: the logical entity storing a condition of judgment related to concurrency of the control entity;

14. The method of claim 1, wherein: the method is applied to a control flow of a semiconductor device.

15. A processing apparatus that controls a flow, the apparatus comprising:

an output module, configured to input the acquired operation data corresponding to the control process to the binary tree, and if it is determined that the operation data meets the condition, output a control sub-process corresponding to the control entity, where the operation data is a parameter corresponding to each component in an electrical system, and at least includes one or more of a pressure parameter, a temperature parameter, a gas parameter, a speed, a flow rate, or a control signal,

16. An electronic device comprising a memory, a processor, a bus, and a computer program stored on the memory and executable on the processor, wherein the processor when executing the program implements the steps of any of claims 1-14.

17. A storage medium having a computer program stored thereon, characterized in that: the program when executed by a processor implementing the steps of any of claims 1-14.