CN109950783A - A kind of full optical isolation control device of excimer laser charge power supply - Google Patents
A kind of full optical isolation control device of excimer laser charge power supply Download PDFInfo
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- CN109950783A CN109950783A CN201910333317.XA CN201910333317A CN109950783A CN 109950783 A CN109950783 A CN 109950783A CN 201910333317 A CN201910333317 A CN 201910333317A CN 109950783 A CN109950783 A CN 109950783A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 58
- 238000002955 isolation Methods 0.000 title claims abstract description 21
- 239000000835 fiber Substances 0.000 claims abstract description 37
- 230000008878 coupling Effects 0.000 claims abstract description 21
- 238000010168 coupling process Methods 0.000 claims abstract description 21
- 238000005859 coupling reaction Methods 0.000 claims abstract description 21
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 230000005611 electricity Effects 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 abstract description 5
- 230000005764 inhibitory process Effects 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Abstract
The invention discloses a kind of full optical isolation control devices of excimer laser charge power supply, it include master control borad, the first optic fiber transceiver module, the second optic fiber transceiver module, DAC module, linear optical coupler module and laser charge power supply, the two ways of optical signals output end of master control borad is connect with two input terminals of the first optic fiber transceiver module respectively, the other three road light signal output end of master control borad is connect with three input terminals of the second optic fiber transceiver module respectively, and two output ends of the first optic fiber transceiver module are separately connected two input terminals connection of laser charge power supply；The present invention passes through optical fiber transmitting switch formula control signal first, next is exported after control signal driving DAC generates analog voltage, then through linear optical coupling isolation, and the full optical isolation of whole system may be implemented, and inhibition electromagnetic interference realizes that high stable reliably controls；Secondly using linear optical coupling isolation, the power supply that high-accuracy high-resolution may be implemented control again after DAC output analog voltage.
Description
Technical field
The present invention relates to the control technology field of charge power supply more particularly to a kind of full light of excimer laser charge power supply
Control device is isolated.
Background technique
The excimer laser of ultraviolet band has that wavelength is short, high resolution, and photon energy is high, and fuel factor is less, high-power, big
The features such as energy exports, in the subjects scientific research field such as spectroscopy, Surface Science, material science and kinetics, ophthalmology, skin
The industrial circles extensive application such as the medical fields such as section, micro Process and material surface modifying.
Common excimer laser uses the working method of discharge pumped, and circuit structure is illustrated as shown in Figure 1, its work
Process is that capacitor charging power first charges to storage capacitor Cs under the driving of signal, when the charging voltage on Cs reaches
It stops working when setting value, then the voltage on storage capacitor Cs no longer rises and maintains；Subsequent control circuit generates thyratron K touching
It signals so that thyratron is connected, then the charge on Cs is shifted through loop inductance to discharge capacity Cd；When Cd both end voltage is more than
Between electrode when the breakdown voltage of gas, gas discharge forms excimer laser output.The electric discharge high pressure of Cs when thyratron K is connected
Commonly reach 15 ~ 30kV, maximum discharge current commonly reaches 10 ~ 20kA, and entire tens nanosecond of discharge time, therefore work
Ground wire crosstalk and spacing electromagnetic radiation interference equal strength are larger in the process, so that the control of system, especially capacitor charging power
Control it is extremely difficult.
The control of charge power supply usually passes through two kinds of signals and realizes, one kind is switching value, can pass through optocoupler or optical fiber
It realizes；Another kind is the analog signal of control capacitor charging voltage amplitude, can be realized by PWM or voltage-frequency frequency pressure conversion etc.,
But precision is lower, can produce high-precision analog signal by DAC chip, but the digit chip of DAC class is easily by electricity
Magnetic disturbance resets, to can not work normally.
Summary of the invention
The object of the invention is to remedy the disadvantages of known techniques, provides a kind of full light of excimer laser charge power supply
Control device is isolated.
The present invention is achieved by the following technical solutions:
A kind of full optical isolation control device of excimer laser charge power supply includes master control borad, the first optic fiber transceiver module,
Two optic fiber transceiver modules, DAC module, linear optical coupler module and laser charge power supply, the two ways of optical signals output end point of master control borad
Do not connect with two input terminals of the first optic fiber transceiver module, the other three road light signal output end of master control borad respectively with the second light
Three input terminals of fine receiving module connect, and two output ends of the first optic fiber transceiver module are separately connected laser charge power supply
Two input terminal connections, three input terminals of three output ends connection DAC module of the second optic fiber transceiver module, DAC module
Output end connects the input terminal of linear optical coupler module, an input of the output end connection laser charge power supply of linear optical coupler module
End；It is respectively FYNC, SCLK, SDI, ENABLE and INHIBIT that master control borad, which generates five road optical signals, wherein ENABLE and
INHIBIT two paths of signals is sent respectively to the first optic fiber transceiver module, and the first optic fiber transceiver module is by ENABLE and INHIBIT two
After road signal carries out photoelectric conversion respectively, it is transmitted directly to laser charge power supply, ENABLE and INHIBIT two paths of signals is controlled respectively
The power supply of laser charge power supply processed and working time；Tri- road signal of FYNC, SCLK and SDI is sent respectively to the second optical fiber and receives mould
Block is sent to DAC module after tri- road signal of FYNC, SCLK and SDI is carried out photoelectric conversion respectively by the second optic fiber transceiver module,
After digital-to-analogue conversion, the analog signal Vprogram_pre of output is sent to linear optical coupler module, linear light by DAC module
The Vprogram signal of output is sent to laser charge power supply to control the bottleneck electricity of charging high pressure after the isolation of coupling modular electrical
The high-voltage value that pressure, i.e. laser charge power supply output voltage do not exceed setting.
The master control borad uses PIC series exploitation plate, wherein the RC2 pin of master control borad, RC3/SCK pin, RC5/SDO
Pin, RD3 pin and RD4 pin generate five road signal of FYNC, SCLK, SDI, ENABLE and INHIBIT respectively.
The laser charge power supply uses TDK_Lambda series high voltage charge power supply, the output of the first optic fiber transceiver module
ENABLE and INHIBIT two paths of signals be sent respectively to the ENABLE/RESET pin of laser charge power supply and INHIBIT draws
The Vprogram signal of foot, linear optical coupler module output is sent to the VPROGRAM pin of laser charge power supply.
The DAC module uses AD5721R chip U1, and the linear optical coupler module includes the first operational amplifier
IC2, second operational amplifier IC3 and linear optical coupling IC1, the SDI pin of the model IL300 of linear optical coupling IC1, chip U1 ,+
SYNC pin and SCLK pin receive SDI, FYNC of the second optic fiber transceiver module transmission, SCLK signal respectively, chip U1's
VOUT pin connects the non-inverting input terminal of the first operational amplifier IC2, and the output end of the first operational amplifier IC2 connects linear light
The led+ pin of coupling IC1, the non-inverting input terminal of the pd2+ pin connection second operational amplifier IC3 of linear optical coupling IC1, second
The VPROGRAM pin of the output end connection laser charge power supply of operational amplifier IC3A.
The model MC1458 of the first operational amplifier IC2 and second operational amplifier IC3.
First master control borad generates 5 road optical signals and gives optical isolation power supply making sheet, the optical fiber of control panel headed by the course of work of the present invention
After receiving module receives optical signal, optical signal is converted by photoelectric conversion by electric signal.ENABLE and INHIBIT two-way
Signal is directly passed to laser charge power supply, and wherein ENABLE controls the power supply of laser charge power supply, and INHIBIT is used to control
The working time of laser charge power supply, i.e., the time charged to the storage capacitor Cs of laser.Tri- road SCLK, FYNC and SDI letter
Number DAC chip AD5721R is passed to, which has the input of 12 Bits Serials, with master control borad by SPI serial communication, has 8
A software programmable output area: 0V ~ 5V, 0V ~ 10V, 0V ~ 16V etc. can meet the simulation to different laser charge power supply demands
The control of signal Vprogram.The analog signal that DAC is generated passes to high-linearity analogy optocoupler IL300, after electrical isolation again
The bottleneck voltage that laser charge power supply is used to control charging high pressure is passed to, i.e., laser charge power supply output voltage, which does not exceed, sets
Fixed high-voltage value.
The invention has the advantages that the present invention passes through optical fiber transmitting switch formula control signal first, secondly driven in control signal
After dynamic DAC generates analog voltage, then by linear optical coupling isolation output, the full optical isolation of whole system may be implemented, inhibits electricity
Magnetic disturbance realizes that high stable reliably controls；Secondly using linear optical coupling isolation again after DAC output analog voltage, height may be implemented
The high-resolution power supply control of precision.
Detailed description of the invention
Fig. 1 is the circuit structure diagram of excimer laser discharge pumped.
Fig. 2 is the working principle of the invention block diagram.
Fig. 3 is DAC module circuit diagram.
Fig. 4 is linear optical coupler module circuit diagram.
Specific embodiment
As shown in Fig. 2, a kind of full optical isolation control device of excimer laser charge power supply, includes master control borad 1, first
Optic fiber transceiver module 2, the second optic fiber transceiver module 3, DAC module 4, linear optical coupler module 5 and laser charge power supply 6, master control borad 1
Two ways of optical signals output end connect respectively with two input terminals of the first optic fiber transceiver module 2, other three Lu Guang of master control borad 1
Signal output end is connect with three input terminals of the second optic fiber transceiver module 3 respectively, two outputs of the first optic fiber transceiver module 2
End is separately connected two input terminals connection of laser charge power supply 6, and three output ends of the second optic fiber transceiver module 3 connect DAC
Three input terminals of module 4, DAC module 4 output end connection linear optical coupler module 5 input terminal, linear optical coupler module 5 it is defeated
One input terminal of outlet connection laser charge power supply 6；Master control borad 1 generate five road optical signals be respectively FYNC, SCLK, SDI,
ENABLE and INHIBIT, wherein ENABLE and INHIBIT two paths of signals is sent respectively to the first optic fiber transceiver module 2, the first light
After ENABLE and INHIBIT two paths of signals is carried out photoelectric conversion respectively by fine receiving module 2, it is transmitted directly to laser charge power supply
6, ENABLE and INHIBIT two paths of signals controls power supply and the working time of laser charge power supply 6 respectively；FYNC, SCLK and SDI
Three road signals are sent respectively to the second optic fiber transceiver module 3, and the second optic fiber transceiver module 3 is respectively by tri- tunnel FYNC, SCLK and SDI
After signal carries out photoelectric conversion, it is sent to DAC module 4, after digital-to-analogue conversion, DAC module 4 is by the analog signal of output
Vprogram_pre is sent to linear optical coupler module 5, by the Vprogram signal of output after linear 5 electrical isolation of optical coupling module
Laser charge power supply 6 is sent to control the bottleneck voltage of charging high pressure, i.e., laser charge power supply output voltage, which does not exceed, sets
Fixed high-voltage value.
The master control borad 1 uses PIC series exploitation plate, wherein the RC2 pin of master control borad, RC3/SCK pin, RC5/
SDO pin, RD3 pin and RD4 pin generate five road signal of FYNC, SCLK, SDI, ENABLE and INHIBIT respectively.
The laser charge power supply 6 uses TDK_Lambda series high voltage charge power supply, and the first optic fiber transceiver module 2 is defeated
ENABLE and INHIBIT two paths of signals out is sent respectively to the ENABLE/RESET pin and INHIBIT of laser charge power supply 6
Pin, the Vprogram signal that linear optical coupler module 5 exports are sent to the VPROGRAM pin of laser charge power supply 6.
As shown in Figure 3,4, the DAC module 4 uses AD5721R chip U1, and the linear optical coupler module 5 includes
First operational amplifier IC2, second operational amplifier IC3 and linear optical coupling IC1, the model IL300 of linear optical coupling IC1, core
SDI pin ,+SYNC pin and the SCLK pin of piece U1 receives SDI, FYNC, SCLK of the second optic fiber transceiver module transmission respectively
Signal, the VOUT pin of chip U1 connect the non-inverting input terminal of the first operational amplifier IC2, and the first operational amplifier IC2's is defeated
Outlet connects the led+ pin of linear optical coupling IC1, and the pd2+ pin connection second operational amplifier IC3's of linear optical coupling IC1 is same
Phase input terminal, the VPROGRAM pin of the output end connection laser charge power supply of second operational amplifier IC3.
Two operational amplifier MC1458 play the role of impedance transformation, and it is load-carrying can to enhance analog signal Vprogram
Ability.Operational amplifier herein is used as voltage follower.
Claims (5)
1. a kind of full optical isolation control device of excimer laser charge power supply, it is characterised in that: include master control borad, the first light
Fine receiving module, the second optic fiber transceiver module, DAC module, linear optical coupler module and laser charge power supply, the two-way light of master control borad
Signal output end is connect with two input terminals of the first optic fiber transceiver module respectively, the other three road light signal output end of master control borad
It is connect respectively with three input terminals of the second optic fiber transceiver module, two output ends of the first optic fiber transceiver module are separately connected sharp
Two input terminals of light charge power supply connect, three inputs of three output ends connection DAC module of the second optic fiber transceiver module
End, the input terminal of the output end connection linear optical coupler module of DAC module, the output end connection laser charging electricity of linear optical coupler module
One input terminal in source；It is respectively FYNC, SCLK, SDI, ENABLE and INHIBIT that master control borad, which generates five road optical signals, wherein
ENABLE and INHIBIT two paths of signals is sent respectively to the first optic fiber transceiver module, the first optic fiber transceiver module by ENABLE and
After INHIBIT two paths of signals carries out photoelectric conversion respectively, it is transmitted directly to laser charge power supply, ENABLE and INHIBIT two-way
Signal controls power supply and the working time of laser charge power supply respectively；Tri- road signal of FYNC, SCLK and SDI is sent respectively to second
Optic fiber transceiver module after tri- road signal of FYNC, SCLK and SDI is carried out photoelectric conversion respectively by the second optic fiber transceiver module, is sent
To DAC module, after digital-to-analogue conversion, the analog signal Vprogram_pre of output is sent to linear optical coupling mould by DAC module
It is high to control charging to be sent to laser charge power supply after linear optical coupling module electrical isolation by block for the Vprogram signal of output
The high-voltage value that the bottleneck voltage of pressure, i.e. laser charge power supply output voltage do not exceed setting.
2. a kind of full optical isolation control device of excimer laser charge power supply according to claim 1, it is characterised in that:
The master control borad uses PIC series exploitation plate, wherein the RC2 pin of master control borad, RC3/SCK pin, RC5/SDO pin, RD3
Pin and RD4 pin generate five road signal of FYNC, SCLK, SDI, ENABLE and INHIBIT respectively.
3. a kind of full optical isolation control device of excimer laser charge power supply according to claim 1, it is characterised in that:
The laser charge power supply uses TDK_Lambda series high voltage charge power supply, the ENABLE of the first optic fiber transceiver module output
The ENABLE/RESET pin and INHIBIT pin of laser charge power supply, linear light are sent respectively to INHIBIT two paths of signals
The Vprogram signal of coupling module output is sent to the VPROGRAM pin of laser charge power supply.
4. a kind of full optical isolation control device of excimer laser charge power supply according to claim 3, it is characterised in that:
The DAC module uses AD5721R chip U1, and the linear optical coupler module includes the first operational amplifier IC2, second
SDI the pin ,+SYNC pin of the model IL300 of operational amplifier IC3 and linear optical coupling IC1, linear optical coupling IC1, chip U1
Receive SDI, FYNC, the SCLK signal of the transmission of the second optic fiber transceiver module respectively with SCLK pin, the VOUT pin of chip U1 connects
Meet the non-inverting input terminal of the first operational amplifier IC2, the led of the output end connection linear optical coupling IC1 of the first operational amplifier IC2
+ pin, the non-inverting input terminal of the pd2+ pin connection second operational amplifier IC3 of linear optical coupling IC1, second operational amplifier
The VPROGRAM pin of the output end connection laser charge power supply of IC3.
5. a kind of full optical isolation control device of excimer laser charge power supply according to claim 4, it is characterised in that:
The model MC1458 of the first operational amplifier IC2 and second operational amplifier IC3.
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| CN201910333317.XA CN109950783A (en) | 2019-04-24 | 2019-04-24 | A kind of full optical isolation control device of excimer laser charge power supply |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112769095A (en) * | 2019-11-01 | 2021-05-07 | 西安西电高压开关有限责任公司 | Protection circuit, control method, device and system for photoelectric conversion module |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4734841A (en) * | 1986-09-12 | 1988-03-29 | Spectra-Physics, Inc. | Laser power supply circuit |
| US5048033A (en) * | 1990-09-04 | 1991-09-10 | Coherent, Inc. | Method and apparatus for controlling the power supply of a laser operating in a pulse mode |
| US20040182838A1 (en) * | 2001-04-18 | 2004-09-23 | Das Palash P. | Very high energy, high stability gas discharge laser surface treatment system |
| CN101160698A (en) * | 2003-07-30 | 2008-04-09 | Tcz私人有限公司 | Very high energy, high stability gas discharge laser surface treatment system |
| CN101383525A (en) * | 2007-09-05 | 2009-03-11 | 武汉奇致激光技术有限公司 | Charging voltage control system and control method for laser beauty treating machine |
| CN102593704A (en) * | 2012-01-18 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Synchronous control system of double-cavity excimer laser |
| JP2012138421A (en) * | 2010-12-24 | 2012-07-19 | Furukawa Electric Co Ltd:The | Semiconductor laser driving circuit and optical fiber pulse laser device |
| CN102916335A (en) * | 2012-10-22 | 2013-02-06 | 西安理工大学 | Pound-Drever-Hall frequency stabilizing system of dual-cavity dual-frequency solid laser device |
| CN107112708A (en) * | 2015-01-30 | 2017-08-29 | 极光先进雷射株式会社 | Solid laser system |
| CN209766851U (en) * | 2019-04-24 | 2019-12-10 | 安徽中科艾克西玛光电科技有限公司 | Full-optical isolation control device of excimer laser charging power supply |
-
2019
- 2019-04-24 CN CN201910333317.XA patent/CN109950783A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4734841A (en) * | 1986-09-12 | 1988-03-29 | Spectra-Physics, Inc. | Laser power supply circuit |
| US5048033A (en) * | 1990-09-04 | 1991-09-10 | Coherent, Inc. | Method and apparatus for controlling the power supply of a laser operating in a pulse mode |
| US20040182838A1 (en) * | 2001-04-18 | 2004-09-23 | Das Palash P. | Very high energy, high stability gas discharge laser surface treatment system |
| CN101160698A (en) * | 2003-07-30 | 2008-04-09 | Tcz私人有限公司 | Very high energy, high stability gas discharge laser surface treatment system |
| CN101383525A (en) * | 2007-09-05 | 2009-03-11 | 武汉奇致激光技术有限公司 | Charging voltage control system and control method for laser beauty treating machine |
| JP2012138421A (en) * | 2010-12-24 | 2012-07-19 | Furukawa Electric Co Ltd:The | Semiconductor laser driving circuit and optical fiber pulse laser device |
| CN102593704A (en) * | 2012-01-18 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Synchronous control system of double-cavity excimer laser |
| CN102916335A (en) * | 2012-10-22 | 2013-02-06 | 西安理工大学 | Pound-Drever-Hall frequency stabilizing system of dual-cavity dual-frequency solid laser device |
| CN107112708A (en) * | 2015-01-30 | 2017-08-29 | 极光先进雷射株式会社 | Solid laser system |
| CN209766851U (en) * | 2019-04-24 | 2019-12-10 | 安徽中科艾克西玛光电科技有限公司 | Full-optical isolation control device of excimer laser charging power supply |
Non-Patent Citations (4)
| Title |
|---|
| "工业及医用准分子激光系统关键技术研究", pages 1 - 119 * |
| HOFFMAN, GJ 等: "RELAXATION DYNAMICS IN THE B(1/2) AND C(3/2) CHARGE-TRANSFER STATES OF XEF IN SOLID AR", 《JOURNAL OF CHEMICAL PHYSICS》, vol. 98, no. 12, pages 9233 - 9240 * |
| 游利兵; 梁勖; 黄德文; 余吟山: "高重复率小型准分子激光开关电源设计", 《激光杂志》, vol. 30, no. 3, pages 15 - 16 * |
| 潘冰冰: "紧凑型准分子激光高精度微加工系统设计", 《中国优秀硕士学位论文全文数据库 (基础科学辑)》, no. 1, pages 005 - 305 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112769095A (en) * | 2019-11-01 | 2021-05-07 | 西安西电高压开关有限责任公司 | Protection circuit, control method, device and system for photoelectric conversion module |
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