CN109856071A - A kind of spectrum on line diagnostic method and device - Google Patents
A kind of spectrum on line diagnostic method and device Download PDFInfo
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- CN109856071A CN109856071A CN201910181079.5A CN201910181079A CN109856071A CN 109856071 A CN109856071 A CN 109856071A CN 201910181079 A CN201910181079 A CN 201910181079A CN 109856071 A CN109856071 A CN 109856071A
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Abstract
The present invention proposes a kind of spectrum on line diagnostic method and device, it is intended to which solving the problems, such as existing excitation spectrum on-line measurement system, application effect is bad at high operating temperatures.Method includes the following steps: 1) establish conjugation reflecting surface, sample and probe assembly are respectively placed at the focus A and focus B of conjugation reflecting surface；2) sample is heated, realizes high temperature/high rate of temperature rise condition；3) detection light is incident to specimen surface generation reflection or Raman scattering, reflection or Raman diffused light are incident to focus B after conjugation reflective surface convergence, into probe assembly, reception detection carried out to spectral signal, and calculate provide alternating temperature during specimen surface reflection or scattering spectrum curve.The present invention has the characteristics that real-time online, measuring accuracy height, antipollution, structure are simple.
Description
Technical field
The invention belongs to optical technology and application field, it is related to a kind of spectrum on line diagnostic method and device.
Background technique
Material spectrum reflection, analysis of scattering are the primary hands that research obtains material composition and its microstructure information
Section.The variation of material microstructure etc. be its physics, chemical property change basis, research material damage or modifying process in
Spectral reflectance, scattering properties variation, are of great significance to micromechanism of damage research, preparation process amelioration etc..Usual way be into
The offline spectrum test analysis of row, such as Raman spectrum, infrared spectroscopy, fluorescence spectrum, off-line analysis can not detect under alternating temperature state
Material composition and microstructure.
Existing spectral reflection characteristic on-line analysis mainly cooperates Reflection type fiber-optic probe to realize by fiber spectrometer, i.e., sharp
Standard sources is divided with monochromator, different wave length monochromatic light is incident on sample, by reflection type optical fiber after sample reflects
Probe receives, and carries out signal detection processing etc. into spectrometer.By between fiber cores diameter, numerical aperture, sample and fibre-optical probe
The limitation of distance etc., measuring signal intensity is low, signal-to-noise ratio is small, need to be by improving sensitivity of spectrograph, increasing dynamic range, increase
The modes such as optical fiber core diameter solve the above problems.In addition, fibre-optical probe may be polluted if ablation occurs for sample to be tested,
Further decrease measurement accuracy.Existing excitation spectrum on-line measurement system, such as FT-Raman and confocal Raman instrument, optical system away from
Close from sample to be tested, even if introducing rotation semielliptical reflecting surface in partial devices, perifocus (object) is located at reflecting surface and remote coke
Between point (test macro), these limit its application at high operating temperatures.
Summary of the invention
In order to solve the problems, such as existing excitation spectrum on-line measurement system, application effect is bad at high operating temperatures, the present invention
It is proposed a kind of new spectrum on line diagnostic method and device.
Basic principle of the invention is: characteristic is converged using non-rotating semielliptical reflecting surface (being not limited to semielliptical) conjugation,
I.e. from a focus issue light converged in another focus after inner wall reflects, focus far from reflecting surface and with ellipsoid section
Equidistantly；The online of material spectrum reflectivity or laser Raman spectroscopy etc. is realized in conjunction with fiber spectrometer or laser Raman spectrometer etc.
Measurement, has the characteristics that real-time online, measuring accuracy height, antipollution, structure are simple.
Technical solution of the invention are as follows:
A kind of spectrum on line diagnostic method, comprising the following steps:
1) conjugation reflecting surface is established, sample and probe assembly are respectively placed in the focus A and focus B of conjugation reflecting surface
Place；
2) sample is heated, realizes high temperature/high rate of temperature rise condition；
3) detection light is incident to specimen surface generation reflection or Raman scattering, and reflection or Raman diffused light are anti-through the conjugation
It is incident to focus B after penetrating face reflection convergence, into probe assembly, reception detection is carried out to spectral signal, and calculate and provide alternating temperature
The reflection of specimen surface or scattering spectrum curve in the process.
Further, in step 2), as needed, whole system is placed in vacuum or is filled with gas with various, is realized not
Same atmosphere.
Correspondingly, a kind of device for realizing above-mentioned spectrum on line diagnostic method, including non-rotating ellipsoid conjugation reflection device,
Probe assembly, heating mechanism and probe source；The heating mechanism is used to heat sample, realizes high temperature/high rate of temperature rise condition；
The non-rotating ellipsoid conjugate imaging device is for providing conjugation reflecting surface；Sample and the probe assembly are respectively placed in conjugation
At the focus A and focus B of reflecting surface；The probe source is located at the outside of conjugation reflecting surface, opens on the conjugation reflecting surface
Equipped with the optical window for corresponding to probe source, reflection or Raman scattering occur to specimen surface for detection light transmission optical window, reflection or
Raman diffused light is incident to focus B after conjugation reflective surface convergence, measures into probe assembly；Wherein, institute
Stating probe assembly includes integrating sphere and spectral signal detector；The focus B corresponds to integrating sphere entrance；Spectral signal detection
Device is bent for carrying out reception detection to spectral signal, and calculating the reflection of specimen surface or scattering spectrum during providing alternating temperature
Line.
Further, the heating mechanism can there are many forms, such as:
A, for heating mechanism by the way of laser heating, the light source of heating laser is located at the outside of conjugation reflecting surface；Institute
State the optical window being also provided on conjugation reflecting surface corresponding to the light source；It is provided with optical filter before spectral signal detector, is used for
Filtering and heating laser, to eliminate the influence to detectable signal；The probe assembly further includes laser signal detector, is used for laser
The synchronization on-line measurement of reflectivity.
What needs to be explained here is that: heating laser is very strong for detecting light, if not filtering, spectral detector signal
It can be saturated in heating wavelength；However, needing individually for the integrality for guaranteeing spectral signal wavelength to heating laser reflectivity
Synchronize on-line measurement.
B, heating mechanism be set to the heater at the sample back side (specifically can be using electric furnace, resistance-type, induction heating etc.
Mode).
Further, spectrophotometer, monochromator or Fourier Transform Infrared Spectrometer can be used in spectral signal detector.
Further, detection light can be monochromatic light or raman excitation light.
The invention has the following advantages:
1, the present invention converges principle using the conjugation of non-rotating semielliptical (being not limited to semielliptical), realizes the space of optical signal
Transfer, focus is far from reflecting surface and equidistant with ellipsoid section, realizes the real-time online measuring under the conditions of high temperature/high temperature rise rate,
Signal-to-noise ratio is improved simultaneously.
2, the present invention converges principle using the conjugation of non-rotating semielliptical (being not limited to semielliptical), and probe assembly etc. is far from warm
Source, without doing protective treatment, structure is simple.
3, back side heating side can be used for high temperature/high rate of temperature rise acquisition modes in addition to the heating of laser front in the present invention
Formula: such as electric furnace, resistance-type, induction heating mode.
4, present invention measurement temperature range is wide, and test environment is adjustable (such as normality, vacuum, flow conditions).
5, the principle of the invention, which can be expanded, is applied in the instrument and equipments such as spectrophotometer, Fluorescence Spectrometer, Raman spectrometer.
Detailed description of the invention
Fig. 1 is the schematic illustration of the embodiment of the present invention one.
Fig. 2 is the schematic illustration of the embodiment of the present invention two.
Drawing reference numeral explanation:
Wherein, 1- sample, 2- detect light, 3- reflected light or Raman diffused light, 4- heating laser, and 5- is conjugated reflecting surface, 6-
Integrating sphere, 7- focus A, 8- focus B, 9- integrating sphere baffle, 10- optical filter, 11- spectral signal detector, 12- heater, 13-
Laser signal detector, 14,15- optical window.
Specific embodiment
Below in conjunction with attached drawing, the present invention will be described, it should be understood that process described herein is merely to illustrate reconciliation
The present invention is released, is not intended to limit the present invention.
Embodiment one
Referring to Fig. 1, tested sample 1 and the integrating sphere 6 for receiving optical signal are respectively placed in the coke of conjugation reflecting surface
At point A and focus B.Heating laser 4 is transmitted through optical window 15, is heated to sample 1, and sample is made to reach a high temperature/high rate of temperature rise shape
State；Meanwhile whole system can be placed in in vacuum or be filled with gas with various, realize different atmospheres.In temperature-rise period,
Using the monochromatic light after monochromator is divided or using raman excitation light as detection light 2, sample is incident to through optical window 14.
Light is detected to be incident to after conjugation reflecting surface 5 converges by sample surface reflection or Raman scattering, reflected light or Raman diffused light 3
Focus B.At focus B, light beam is collected using integrating sphere 6, integrating sphere baffle, which plays, prevents primary reflecting light or scattering light direct
Into the effect of detector.Two detection mouths of integrating sphere respectively detect spectral signal, laser signal；Wherein, spectrum is believed
It needs to install additional optical filter 10 before number detector 11 for filtering out heating laser, eliminates influence of the heating laser to detectable signal；Laser
Signal sensor 13 directly measures laser signal.
The signal inspection of such as spectrophotometer, monochromator, Fourier Transform Infrared Spectrometer can be used in spectral signal detection
Examining system carries out reception detection to spectral signal, and calculate provide alternating temperature during specimen surface reflection or scattering spectrum it is bent
Line；Laser signal detector is used for the synchronization on-line measurement of laser reflectivity.In this way, can be realized material surface reflectance spectrum or
The transfer (focus A → focus B) of scattering spectrum and laser reflection signal spatially, realize high temperature/high temperature rise rate under the conditions of
Material spectrum inline diagnosis.
Embodiment two
Referring to fig. 2, embodiment two and the principle and system structure of embodiment one are essentially identical, and difference essentially consists in: not adopting
It is heated with laser, and is changed to the mode heated to the sample back side, i.e., heater 12 is set at the sample back side, specific principle of heating can
To be in a manner of electric furnace, resistance-type, induction heating etc..Correspondingly, no setting is required optical window 15, without before spectral signal detector
Install optical filter 10 additional.
Claims (7)
1. a kind of spectrum on line diagnostic method, which comprises the following steps:
1) conjugation reflecting surface is established, sample and probe assembly are respectively placed at the focus A and focus B of conjugation reflecting surface；
2) sample is heated, realizes high temperature/high rate of temperature rise condition；
3) detection light is incident to specimen surface generation reflection or Raman scattering, and reflection or Raman diffused light are through the conjugation reflecting surface
It is incident to focus B after reflection convergence, into probe assembly, reception detection is carried out to spectral signal, and calculate and provide alternating temperature process
The reflection of middle specimen surface or scattering spectrum curve.
2. spectrum on line diagnostic method according to claim 1, it is characterised in that:, as needed, will be entire in step 2)
System is placed in vacuum or is filled with gas with various, realizes different atmospheres.
3. a kind of spectrum on line diagnostic device, it is characterised in that: including non-rotating ellipsoid conjugation reflection device, probe assembly, add
Heat engine structure and probe source；
The heating mechanism is used to heat sample, realizes high temperature/high rate of temperature rise condition；
The non-rotating ellipsoid conjugate imaging device is for providing conjugation reflecting surface；
Sample and the probe assembly are respectively placed at the focus A and focus B of conjugation reflecting surface；
The probe source is located at the outside of conjugation reflecting surface, offers on the conjugation reflecting surface corresponding to probe source
Reflection or Raman scattering occur for optical window, detection light transmission optical window to specimen surface, and reflection or Raman diffused light are through the conjugation
It is incident to focus B after reflective surface convergence, is measured into probe assembly；Wherein, the probe assembly includes integrating sphere
With spectral signal detector；The focus B corresponds to integrating sphere entrance；Spectral signal detector is used to carry out spectral signal
Detection is received, and calculates and provides the reflection of specimen surface or scattering spectrum curve during alternating temperature.
4. spectrum on line diagnostic device according to claim 3, it is characterised in that: the heating mechanism is heated using laser
Mode, the light source of heating laser is located at the outside of conjugation reflecting surface；It is also provided with to correspond on the conjugation reflecting surface and be somebody's turn to do
The optical window of light source；It is provided with optical filter before spectral signal detector, is used for filtering and heating laser, to eliminate to detectable signal
It influences；The probe assembly further includes laser signal detector, the synchronization on-line measurement for laser reflectivity.
5. spectrum on line diagnostic device according to claim 3, it is characterised in that: the heating mechanism is to be set to sample
The heater at the back side.
6. spectrum on line diagnostic device according to claim 3, it is characterised in that: the spectral signal detector, which uses, to be divided
Light photometer, monochromator or Fourier Transform Infrared Spectrometer.
7. spectrum on line diagnostic device according to claim 3, it is characterised in that: the detection light is monochromatic light or Raman
Exciting light.
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| CN201910181079.5A CN109856071A (en) | 2019-03-11 | 2019-03-11 | A kind of spectrum on line diagnostic method and device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111551524A (en) * | 2020-05-21 | 2020-08-18 | 中科院南京天文仪器有限公司 | Device and method for measuring high-temperature optical parameters of material |
| CN112649388A (en) * | 2020-12-07 | 2021-04-13 | 珠海格力电器股份有限公司 | Gas concentration detection system and air conditioner |
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| CN112649388A (en) * | 2020-12-07 | 2021-04-13 | 珠海格力电器股份有限公司 | Gas concentration detection system and air conditioner |
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Application publication date: 20190607 |