CN109814243B - Optical microscopic imaging method and device for on-line monitoring in high-temperature state - Google Patents
Optical microscopic imaging method and device for on-line monitoring in high-temperature state Download PDFInfo
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Abstract
The invention provides an optical microscopic imaging method and device for on-line monitoring in a high-temperature state, and aims to solve the problems that an existing high-resolution dynamic optical microscopic imaging scheme is complex in system, a microscope is close to a heat source, and the like. The method comprises the following steps: 1) respectively placing a sample and an optical microscope at a focus A and a focus B of a conjugate imaging surface; 2) heating the sample and maintaining a high-temperature state; 3) illuminating the surface of the sample by using illumination light to generate diffuse reflection, reflecting the diffuse reflection by the conjugate imaging surface, receiving a conjugate image by an optical microscope, and amplifying to obtain a microscopic image; 4) and if different areas of the surface of the sample need to be observed, moving the sample, ensuring that the center of the area to be observed is always positioned on the focus A, and acquiring a microscopic image according to the step 3).
Description
Technical Field
The invention belongs to the field of optical microscopic analysis, and relates to an on-line optical microscopic imaging method and device.
Background
Microscopes have been widely used in many fields such as life medicine, bioscience, and materials science as one of the greatest inventions in human history. By using a microscope and a microscopic imaging technology, cells, tissue structures and forms, and microscopic shapes of the surfaces of materials/devices can be observed conveniently, and changes in the cells can be monitored in real time. Microscopes are largely classified into two major categories, optical microscopes and electron microscopes. The electron microscope has a high resolution which is incomparable with the optical microscope, but has high requirements for the working environment and is difficult to observe without damage. In contrast, the optical microscope is inexpensive and simple to operate, and has a disadvantage that the resolution is limited by the diffraction limit.
In recent years, with the rapid development of computer technology, photoelectric technology, laser technology and the like, a series of high-resolution or super-resolution dynamic microscopic imaging technologies such as confocal images, fluorescent images, harmonic waves, coherent anti-stokes raman and the like are mature, and the technologies not only realize the breakthrough of diffraction limit on resolution, but also realize real-time dynamic capture on multi-dimension. In order to improve the resolution of the system, the skilled person has made certain improvements on the optical system of the above-mentioned microscopic imaging system. For example, chinese patent applications 201210244377, 201210244825, and 201210244838 disclose a confocal measurement device based on ellipsoid reflection illumination, a fluorescence reflector conjugate dual-pass illumination confocal microscopy device, and a phase conjugate reflection dual-pass illumination confocal microscopy device, respectively, in which a rotating ellipsoid reflector is disposed in a detection light path, and the conjugate characteristics of the far and near foci of the ellipsoid are utilized to improve the resolution of the system.
However, in general, the existing high-resolution dynamic optical microscopic imaging method has a complex imaging system and a short imaging working distance, even if a rotating ellipsoidal reflector is introduced as a conjugate imaging device, a near focus (object) of the rotating ellipsoidal reflector is located between an imaging surface and a far focus (detection system), and an optical path is extremely complex and is not suitable for on-line microscopic imaging of the surface of a material in a high-temperature state.
Disclosure of Invention
The invention provides a novel optical microscopic imaging method and device for on-line monitoring in a high-temperature state, aiming at solving the problems of complex system, short distance between a microscope and a heat source and the like of the conventional high-resolution dynamic optical microscopic imaging scheme.
The basic principle of the invention is as follows: the conjugate imaging characteristic of the non-rotating semi-ellipsoid reflecting surface is utilized to realize the space transfer of the object plane, and the online microscopic imaging (shooting) of the surface appearance of the material in a high-temperature state is realized by combining an optical microscope.
The technical solution of the invention is as follows:
an optical microscopic imaging method for on-line monitoring in a high-temperature state comprises the following steps:
1) respectively placing a sample and an optical microscope at a focus A and a focus B of a conjugate imaging surface;
2) heating the sample and maintaining a high-temperature state;
3) illuminating the surface of the sample by using illumination light to generate diffuse reflection, reflecting the diffuse reflection by the conjugate imaging surface, receiving a conjugate image by an optical microscope, and amplifying to obtain a microscopic image;
4) and if different areas of the surface of the sample need to be observed, moving the sample, ensuring that the center of the area to be observed is always positioned on the focus A, and acquiring a microscopic image according to the step 3).
Correspondingly, the device for realizing the optical microscopic imaging method comprises a non-rotating ellipsoid conjugate imaging device, an optical microscope, a position adjusting mechanism, a heating mechanism and an illumination light source; the heating mechanism is used for heating the sample and maintaining a high-temperature state; the non-rotating ellipsoid conjugate imaging device is used for providing a conjugate imaging surface; the optical microscope is placed at a focus B of the conjugate imaging surface; the position adjusting mechanism is used for placing a sample and can realize three-dimensional direction position adjustment, so that the center of a measured area on the surface of the sample is always positioned at a focus A of the conjugate imaging surface; the illumination light source is positioned outside the conjugate imaging surface, an optical window for incidence of illumination light is arranged on the conjugate imaging surface, the illumination light source transmits the optical window to the surface of the sample to generate diffuse reflection, and the diffuse reflection is reflected to the optical microscope through the conjugate imaging surface.
Further, the heating means may take various forms, such as:
a. the heating device adopts a laser heating mode, and the laser light source is positioned outside the conjugate imaging surface; an optical window for laser incidence is further formed on the conjugate imaging surface; an optical filter is additionally arranged in front of the optical microscope and used for filtering laser signals to eliminate interference on imaging.
b. The heating device is a heater (which may be an electric furnace, a resistance type, an induction heating, or the like) provided on the back surface of the sample. Further, an insulating assembly is preferably provided between the heater and the position adjustment mechanism.
Furthermore, the position adjusting mechanism can adopt a high-precision electric control displacement table to realize the position adjustment in the three-dimensional direction.
Compared with the prior art, the invention has the characteristics of real-time online nondestructive monitoring, large imaging working distance, wide temperature measurement range, adjustable test environment, pollution resistance, simple structure and the like; the method comprises the following specific steps:
1. the invention realizes the space transfer of the object image by using the conjugate imaging principle of the non-rotating semi-ellipsoid, has unlimited imaging distance and is particularly suitable for high-magnification amplification.
2. The invention utilizes the non-rotating semi-ellipsoid conjugate imaging principle, the focus is far away from the conjugate imaging surface and is equidistant to the ellipsoid cross section, and real-time online nondestructive imaging can be carried out under the high-temperature condition.
3. The optical test system is far away from a heat source, does not need protection treatment and has a simple structure.
4. The invention can adopt a back surface heating mode besides the laser front heating mode for obtaining the high temperature/high temperature rise rate: electric furnace, resistance type, induction heating, etc.
5. The invention has wide temperature measuring range and adjustable testing environment (such as normal state, vacuum and airflow conditions).
6. The principle of the invention can be applied to optical microscopic equipment such as a laser confocal microscope.
Drawings
Fig. 1 is a schematic diagram of a first embodiment of the present invention.
Fig. 2 is a schematic diagram of a second embodiment of the present invention.
The reference numbers illustrate:
1-sample, 2-conjugate imaging surface, 3-focus A, 4-focus B, 5-illumination light, 6-heating laser, 7-optical microscope, 8-optical filter, 9-position adjusting mechanism, 10-heater, 11-heat insulation component, 12, 13-optical window.
Detailed Description
The invention is further described in detail below with reference to the figures and examples. It should be understood that the embodiments described below are not limiting to the present invention.
Example one
Referring to fig. 1, a sample 1 is placed at a focal point a of a conjugate imaging plane 2, and an optical microscope 7 is placed at a focal point B; the sample is mounted on the position adjusting mechanism 9, so that the position of the sample in the three-dimensional direction can be adjusted, and the center of the measured area is always kept at the focus A. Heating the sample 1 by using the laser 6 to realize a high-temperature state; the laser light source is positioned outside the conjugate imaging plane, and the heating laser 6 enters through the optical window 13 to heat the sample 1. The illumination light 5 irradiates the surface of the sample 1 through the light window 12, and forms an image at the focal point B. An optical filter 8 is additionally arranged in front of the optical microscope and used for filtering laser signals to eliminate interference on imaging. And amplifying the conjugate image by using an optical microscope to obtain a microscopic image.
Example two
Referring to fig. 1, a sample 1 is placed at a focal point a of a conjugate imaging plane 2, and an optical microscope 7 is placed at a focal point B; the sample is mounted on the position adjusting mechanism 9, so that the position of the sample in the three-dimensional direction can be adjusted, and the center of the measured area is always kept at the focus A. The back of the sample is provided with a heater 10 to realize a high-temperature state; an insulating assembly 11 is arranged between the heater 10 and the position adjusting mechanism 9. The illumination light 5 irradiates the surface of the sample 1 through the light window 12, and forms an image at the focal point B. And amplifying the conjugate image by using an optical microscope to obtain a microscopic image.
Claims (5)
1. An optical microscopic imaging method for on-line monitoring in a high-temperature state is characterized by comprising the following steps of:
1) respectively placing a sample and an optical microscope at a focus A and a focus B of a conjugate imaging surface;
2) heating the sample by a heating mechanism and maintaining a high-temperature state; the heating mechanism adopts a laser heating mode, and a laser light source is positioned outside the conjugate imaging surface; an optical window for laser incidence is further formed on the conjugate imaging surface; an optical filter is additionally arranged in front of the optical microscope and used for filtering laser signals to eliminate interference on imaging;
3) illuminating the surface of the sample by using illumination light to generate diffuse reflection, reflecting the diffuse reflection by the conjugate imaging surface, receiving the conjugate image by an optical microscope, and amplifying to obtain a microscopic image of the surface morphology of the material;
4) and if different areas of the surface of the sample need to be observed, moving the sample, ensuring that the center of the area to be observed is always positioned on the focus A, and acquiring a microscopic image of the surface topography of the material according to the step 3).
2. An optical microscopic imaging device for on-line monitoring in a high-temperature state is characterized in that: the imaging device comprises a non-rotating ellipsoid conjugate imaging device, an optical microscope, a position adjusting mechanism, a heating mechanism and an illuminating light source;
the heating mechanism is used for heating the sample and maintaining a high-temperature state;
the non-rotating ellipsoid conjugate imaging device is used for providing a conjugate imaging surface;
the optical microscope is placed at a focus B of the conjugate imaging surface;
the position adjusting mechanism is used for placing a sample and can realize three-dimensional direction position adjustment, so that the center of a measured area on the surface of the sample is always positioned at a focus A of the conjugate imaging surface;
the illumination light source is positioned outside the conjugate imaging surface, an optical window for incidence of illumination light is arranged on the conjugate imaging surface, the illumination light source transmits the optical window to the surface of the sample to generate diffuse reflection, the diffuse reflection is reflected to the optical microscope through the conjugate imaging surface, the conjugate image is received by the optical microscope to be amplified, and a microscopic image of the surface morphology of the material is obtained.
3. The optical microscopy imaging device for on-line monitoring at high temperature state according to claim 2, characterized in that: the heating mechanism is a heater arranged on the back of the sample.
4. The optical microscopy imaging device for on-line monitoring at high temperature state according to claim 3, characterized in that: and a heat insulation assembly is arranged between the heater and the position adjusting mechanism.
5. The optical microscopy imaging device for on-line monitoring at high temperature state according to claim 2, characterized in that: the position adjusting mechanism is a high-precision electric control displacement table.
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