CN109765759B - Air exhaust device of spin coater - Google Patents
Air exhaust device of spin coater Download PDFInfo
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- CN109765759B CN109765759B CN201711094407.5A CN201711094407A CN109765759B CN 109765759 B CN109765759 B CN 109765759B CN 201711094407 A CN201711094407 A CN 201711094407A CN 109765759 B CN109765759 B CN 109765759B
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Abstract
The invention relates to the field of a spin coater, in particular to an air exhaust device of a spin coater, which comprises an air inlet box, a valve box, a connecting cylinder, an air cylinder, a piston and an air exhaust flange, wherein the air inlet box, the valve box and the air exhaust flange are sequentially communicated to form an air exhaust channel, the connecting cylinder is arranged on any side of the valve box, the piston is driven by the air cylinder to move in the valve box and the connecting cylinder, and a solvent groove is arranged on the inner wall of an opening at the end, connected with the air inlet box, of the valve box. The invention drives the piston to move by controlling the reciprocating motion of the cylinder, thereby realizing the purpose of automatically controlling the air exhaust switch, and in addition, the upper part of the valve box is provided with a solvent tank, the solvent in the solvent tank can evaporate to keep the interior of the device moist, reduce the condensation of photoresist on the inner wall of the device, keep the stable air exhaust amount, and simultaneously facilitate the interior maintenance of the device.
Description
Technical Field
The invention relates to the field of spin coaters, in particular to an air exhaust device of a spin coater.
Background
The photoresist homogenizer in the prior art adopts a vacuum mode to exhaust air, but the air exhaust device of the photoresist homogenizer is manually controlled, and the function of automatically controlling an air exhaust switch cannot be realized. In addition, the internal space of the air exhaust device of the spin coater in the prior art is narrow, the photoresist is very easy to condense on the inner wall of the device, and the internal maintenance is also very inconvenient.
Disclosure of Invention
The invention aims to provide an air exhaust device of a spin coater, which can drive a piston to move by controlling the reciprocating motion of an air cylinder so as to realize the aim of automatically controlling an air exhaust switch.
The purpose of the invention is realized by the following technical scheme:
the utility model provides an even machine of gluing exhaust device, includes air inlet box, valve box, connecting cylinder, piston and the flange of airing exhaust, wherein air inlet box, valve box, the flange of airing exhaust inside communicate with each other in proper order and form the passageway of airing exhaust, the connecting cylinder set up in valve box arbitrary side, just the piston passes through the cylinder drive is in remove in valve box and the connecting cylinder valve box with be equipped with the solvent groove on the opening inner wall of the continuous one end of air inlet box.
When the piston moves into the connecting cylinder, the air exhaust channel exhausts air normally, and when the piston moves into the valve box, the air exhaust channel is blocked.
The cylinder is installed outside the connecting cylinder.
The air inlet box comprises a lower barrel, a middle box body and two air inlets, one end of the lower barrel is fixedly connected with the valve box, the other end of the lower barrel is fixedly connected with the middle box body, and the two air inlets are formed in the middle box body.
The inner diameter of one end of the middle box body connected with the lower barrel body is gradually narrowed.
An air outlet is arranged in the air exhaust flange.
The invention has the advantages and positive effects that:
1. the invention drives the piston to move by controlling the reciprocating motion of the cylinder, thereby realizing the purpose of automatically controlling the air exhaust switch.
2. The upper part of the valve box is provided with the solvent tank, the solvent in the solvent tank can evaporate to keep the interior of the device moist, the condensation of photoresist on the inner wall of the device is reduced, the stable air exhaust amount is kept, and meanwhile, the interior maintenance of the device is easy.
Drawings
Figure 1 is a perspective view of the present invention,
figure 2 is a front view of the invention of figure 1,
figure 3 is a cross-sectional view of the invention of figure 1,
fig. 4 is an enlarged view of a portion a in fig. 3.
Wherein, 1 is the box that admits air, 11 is the air intake, 12 is middle box body, 13 is the barrel down, 2 is the valve box, 3 is the connecting cylinder, 4 is the cylinder, 5 is the flange of airing exhaust, 6 is the piston, 7 is the solvent groove.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 4, the present invention includes an air intake box 1, a valve box 2, a connecting cylinder 3, an air cylinder 4, a piston 6 and an exhaust flange 5, wherein the air intake box 1 is disposed at the upper end of the valve box 2, the exhaust flange 5 is disposed at the lower end of the valve box 2, an air intake 11 is disposed on the air intake box 1, an air exhaust port is disposed in the exhaust flange 5, and the interiors of the air intake box 1, the valve box 2 and the exhaust flange 5 are communicated to form an exhaust passage, the connecting cylinder 3 is disposed at either of the left and right sides of the valve box 2, and the interior of the connecting cylinder 3 is communicated with the interior of the valve box 2 to form a moving passage, the air cylinder 4 is mounted at the outer side of the connecting cylinder 3, the piston 6 is disposed in the moving passage and is driven to move by the air cylinder 4, and when the piston 6 moves into the connecting cylinder 3, the exhaust passage normally exhausts air, when the piston 6 moves into the valve box 2, the air intake box 1 and the air exhaust flange 5 are separated, and the air exhaust channel is blocked.
As shown in fig. 3-4, a solvent tank 7 is arranged on the inner wall of the opening at the end where the valve box 2 is connected with the air inlet box 1, and because the gas discharged by the spin coater contains photoresist, the photoresist is easy to be adhered to the inner wall after being condensed in the device, and the solvent tank 7 contains volatile solvent which is condensed on the inner wall of the device after being volatilized, so that the interior of the device can be kept moist, the amount of the photoresist adhered to the inner wall is reduced, and the inner wall can be cleaned more easily when being cleaned. In this embodiment, the solvent in the solvent tank 7 may be acetone or OK 73.
As shown in fig. 1-2, the air inlet box 1 includes a lower cylinder 13, a middle box 12 and two air inlets 11, one end of the lower cylinder 13 is fixedly connected with the valve box 2, the other end of the lower cylinder is fixedly connected with the middle box 12, the inner diameter of the end of the middle box 12 connected with the lower cylinder 13 is gradually narrowed, and the two air inlets 11 are arranged on the middle box 12.
The working principle of the invention is as follows:
when the air cylinder 4 is started and located at the maximum stroke, the piston 6 is driven into the valve box 2 through the air cylinder 4 and props against the side wall of the valve box 2 to separate the air inlet box 1 from the air exhaust flange 5, so that an air exhaust channel is blocked.
Claims (2)
1. The utility model provides a spin coater exhaust device which characterized in that: the air exhaust device comprises an air inlet box (1), a valve box (2), a connecting cylinder (3), an air cylinder (4), a piston (6) and an air exhaust flange (5), wherein the air inlet box (1), the valve box (2) and the air exhaust flange (5) are sequentially communicated to form an air exhaust channel, the connecting cylinder (3) is arranged on any side of the valve box (2), the piston (6) is driven to move in the valve box (2) and the connecting cylinder (3) through the air cylinder (4), and a solvent groove (7) is formed in the inner wall of an opening at one end, connected with the air inlet box (1), of the valve box (2);
when the piston (6) moves into the connecting cylinder (3), the air exhaust channel is normally exhausted, and when the piston (6) moves into the valve box (2), the air exhaust channel is blocked;
the cylinder (4) is arranged on the outer side of the connecting cylinder (3);
the air inlet box (1) comprises a lower cylinder body (13), a middle box body (12) and two air inlets (11), one end of the lower cylinder body (13) is fixedly connected with the valve box (2), the other end of the lower cylinder body is fixedly connected with the middle box body (12), and the two air inlets (11) are arranged on the middle box body (12);
the inner diameter of one end of the middle box body (12) connected with the lower cylinder body (13) is gradually narrowed.
2. The air exhaust device of the homogenizing machine according to claim 1, characterized in that: an air outlet is arranged in the air exhaust flange (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711094407.5A CN109765759B (en) | 2017-11-09 | 2017-11-09 | Air exhaust device of spin coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711094407.5A CN109765759B (en) | 2017-11-09 | 2017-11-09 | Air exhaust device of spin coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109765759A CN109765759A (en) | 2019-05-17 |
| CN109765759B true CN109765759B (en) | 2022-03-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711094407.5A Active CN109765759B (en) | 2017-11-09 | 2017-11-09 | Air exhaust device of spin coater |
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| Country | Link |
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| CN (1) | CN109765759B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117189454A (en) * | 2023-10-26 | 2023-12-08 | 中能建数字科技集团有限公司 | Tidal power generation system and tidal power generation method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009120394A2 (en) * | 2008-01-04 | 2009-10-01 | Massachusetts Institute Of Technology | Method and apparatus for forming structures of polymer nanobeads |
| CN102601084B (en) * | 2012-03-09 | 2016-09-28 | 上海华虹宏力半导体制造有限公司 | Discharge duct automatic cleaning apparatus and gelatinizing developer |
| CN105736354B (en) * | 2014-12-12 | 2019-07-09 | 博世包装技术（杭州）有限公司 | Piston pump with rotary valve and liquid medicine bottle placer |
| CN204746769U (en) * | 2015-06-10 | 2015-11-11 | 湖南普照信息材料有限公司 | Even quick -witted exhaust device of glue and even machine of gluing |
| CN106870775A (en) * | 2017-04-07 | 2017-06-20 | 中国铁道科学研究院 | Piston control valve |
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2017
- 2017-11-09 CN CN201711094407.5A patent/CN109765759B/en active Active
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| CN109765759A (en) | 2019-05-17 |
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