CN109737237B - Photo-thermal control membrane type micro-valve device and using method - Google Patents
Photo-thermal control membrane type micro-valve device and using method Download PDFInfo
- Publication number
- CN109737237B CN109737237B CN201910084530.1A CN201910084530A CN109737237B CN 109737237 B CN109737237 B CN 109737237B CN 201910084530 A CN201910084530 A CN 201910084530A CN 109737237 B CN109737237 B CN 109737237B
- Authority
- CN
- China
- Prior art keywords
- distilled water
- membrane
- channel
- strain
- transport fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Micromachines (AREA)
Abstract
The invention discloses a photo-thermal control membrane type micro-valve device and a using method thereof; light and heat manipulation membrane type microvalve device, including PDMS microchannel, its characterized in that: a transport fluid channel and a distilled water channel which are parallel to each other are arranged in the PDMS microchannel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for circulating distilled water so as to provide a steam pressure source; a partition board is arranged between the transport fluid channel and the distilled water channel, a through hole is arranged in the middle of the partition board, a strain film and a hydrophobic breathable film are respectively arranged on two end faces of the through hole, and the strain film, the hydrophobic breathable film and the through hole form a steam generation chamber; the strain membrane is positioned on one side of the transport fluid channel and is stressed to deform to form a micro valve; the hydrophobic breathable film is positioned on one side of the distilled water channel; an infrared laser is arranged outside the distilled water channel; the invention can be widely applied to the fields of fluid transportation, chemical analysis, medical detection and the like.
Description
Technical Field
The invention relates to the field of microfluidics, in particular to a photo-thermal control membrane type micro-valve device and a using method thereof.
Background
The micro-flow technology relates to fluid process treatment and device processing and manufacturing in a micron-scale space. It is a micro-scale structure with miniaturized fluid processing and detection system to study the micro-fluid various effects and behaviors. Due to ITs high throughput of microchannels and flow networks, efficient fluid processing and detection mechanisms, and potentially low cost of application, IT has been widely used in the pharmaceutical industry, biotechnology and biological analysis, medicine, chemical analysis, machinery, IT industry and even defense, and aerospace fields.
The micro-valve is one of the main elements of the micro-fluid system, and has the functions of runoff regulation, on/off conversion, biological molecule sealing, micro-nano particle sealing, chemical reagent sealing and the like, and the properties of the micro-valve comprise no leakage, small dead volume, low power consumption, large pressure resistance, insensitivity to particle contamination, quick response, capability of linear operation and the like. Depending on the driving source, the microvalves may be further classified into piezoelectric, magnetic, electric, thermal, phase-change, bistable active microvalves, including hot air, bimetal and shape memory alloy microvalves, and active microvalves driven by an external auxiliary system such as gas, and phase-change microvalves including hydrogel, sol-gel, paraffin microvalves, etc. In recent years, many studies have been made based on microfluidic chips. M.Duch et al propose a kind of upper V-type cantilever beam and inferior part silicon diaphragm make up, V-type cantilever beam is plated with the magnetic microvalve of low-power consumption, easy to use of a layer of Co-Ni alloy; T.H asegaw a et al propose an air-driven micro-dispensing system in which the main component is a 10-outlet multi-directional electrostatically actuated microvalve with direction switching by a micro solenoid driver; jerm an develops a bimetallic drive micro-valve consisting of a silicon film and an aluminum layer with the thicknesses of 8 microns and 5 microns respectively, and can well realize a proportional control micro-valve; m.e. piccini et al developed a silicone tubular normally closed microvalve using a 75 μm diameter nitinol wire, and implemented on-off control of the microvalve by applying a pulsed voltage. The current level of commercialization of microvalves is still not high and there are still many problems to be solved. The conventional micro valve device is generally processed by using materials such as glass, silicon wafers and the like as substrates and utilizing silicon micro-processing technologies (such as photoetching, etching and the like), and has high requirements on processing equipment and raw materials and higher processing cost; at present, the structure of the micro valve is complex, generally the micro valve is a non-planar multi-layer three-dimensional structure, and the micro valve is processed by adopting a multi-layer silicon bonding process, so that the process is complex and complicated, and the processing period is long. More importantly, the non-planar micro-valve structure is not easy to integrate in a micro-fluidic system, and the integration difficulty of the micro-fluidic system is increased. Therefore, the research on the novel micro valve is developed, the structure and the manufacturing process of the micro valve are simplified, the cost and the integration difficulty are reduced, and the method has important significance on the development of the micro-fluidic chip.
Disclosure of Invention
The invention aims to provide a photo-thermal control membrane type micro-valve device and a using method thereof, so as to improve the response speed and the accuracy of the micro-valve.
In order to solve the technical problems, the technical scheme of the invention is as follows:
the utility model provides a membrane type microvalve device is controlled to light and heat, includes little flow channel of PDMS, its characterized in that: a transport fluid channel and a distilled water channel which are parallel to each other are arranged in the PDMS micro-flow channel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for flowing distilled water so as to provide a steam pressure source; a partition board is arranged between the transport fluid channel and the distilled water channel, a through hole is arranged in the middle of the partition board, a strain film and a hydrophobic breathable film are respectively arranged on two end faces of the through hole, and the strain film, the hydrophobic breathable film and the through hole form a steam generation chamber; the strain membrane is positioned on one side of the transport fluid channel and is stressed to deform to form a micro valve; the hydrophobic breathable film is positioned on one side of the distilled water channel; and an infrared laser is arranged outside the distilled water channel.
The working principle of the invention is as follows: the infrared laser heats distilled water in the distilled water channel, the distilled water is heated and evaporated to produce water vapor, the water vapor penetrates through the hydrophobic breathable film and is accumulated in the vapor generation chamber to form vapor pressure, the vapor pressure acts on the strain membrane to enable the strain membrane to deform, and the strain membrane blocks the transportation of the main fluid in the transportation fluid channel.
According to a preferred embodiment of the photothermal manipulation membrane type microvalve device of the present invention, the strain membrane is made of polydimethylsiloxane, rubber, or a resin-based elastic material.
According to a preferable embodiment of the photothermal manipulation membrane type microvalve device of the present invention, the hydrophobic gas permeable membrane is made of polytetrafluoroethylene or polyvinylidene fluoride, and is permeable to water vapor and impermeable to liquid water.
The second technical scheme of the invention is as follows:
a method for using a photothermal manipulation membrane type micro-valve device, which comprises a PDMS micro-flow channel, is characterized in that:
a transport fluid channel and a distilled water channel which are parallel to each other are arranged in the PDMS micro-flow channel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for flowing distilled water so as to provide a steam pressure source; a partition board is arranged between the transport fluid channel and the distilled water channel, a through hole is arranged in the middle of the partition board, a strain film and a hydrophobic breathable film are respectively arranged on two end faces of the through hole, and the strain film, the hydrophobic breathable film and the through hole form a steam generation chamber; the strain membrane is positioned on one side of the transport fluid channel and is stressed to deform to form a micro valve; the hydrophobic breathable film is positioned on one side of the distilled water channel; and an infrared laser is arranged outside the distilled water channel.
Adding a main fluid into the transport fluid channel, adding distilled water into the distilled water channel, heating the distilled water in the distilled water channel by using the infrared laser, heating and evaporating the distilled water to produce water vapor, accumulating the water vapor in the vapor generation chamber through the hydrophobic breathable film to form vapor pressure, acting the vapor pressure on the strain film to deform the strain film, and blocking the transport of the main fluid in the transport fluid channel by the strain film.
According to a preferred embodiment of the method for using the photothermal manipulation membrane type microvalve device of the present invention, the strain membrane is made of polydimethylsiloxane, rubber, or a resin-based elastic material.
According to a preferred embodiment of the method for using the photothermal manipulation membrane type microvalve device of the present invention, the hydrophobic gas permeable membrane is made of polytetrafluoroethylene or polyvinylidene fluoride, and is permeable to water vapor and impermeable to liquid water.
The photo-thermal control membrane type micro-valve device and the using method thereof have the beneficial effects that: the micro-valve realizes the control of microfluid by utilizing the characteristic that the strain film deforms under stress to form the micro-valve, has the function of accurately and quickly opening/closing the fluid in the micro-channel, has simple structure, simplified manufacturing process, low control cost and convenient integration, and can be widely applied to the fields of fluid transportation, chemical analysis, medical detection and the like.
Drawings
Fig. 1 is a schematic structural view of a photothermal manipulation film type microvalve device according to the present invention.
Fig. 2 is a schematic view illustrating the operation of the photothermal manipulation film type microvalve device of the present invention.
Detailed Description
The present invention will be described in further detail with reference to test examples and specific embodiments. It should be understood that the scope of the above-described subject matter is not limited to the following examples, and any techniques implemented based on the disclosure of the present invention are within the scope of the present invention.
Referring to fig. 1 and 2, example 1: a photothermal manipulation membrane type micro-valve device comprises a PDMS micro-flow channel, wherein a transport fluid channel 2 and a distilled water channel 3 which are parallel to each other are arranged in the PDMS micro-flow channel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for flowing distilled water so as to provide a steam pressure source; a partition plate 4 is arranged between the transport fluid channel and the distilled water channel, a through hole 5 is arranged in the middle of the partition plate 4, a strain membrane 6 and a hydrophobic breathable membrane 7 are respectively arranged on two end faces of the through hole 5, and the strain membrane 6 and the hydrophobic breathable membrane 7 form a steam generation chamber; the strain membrane 6 is positioned on one side of the transport fluid channel 2, and the strain membrane 6 is deformed under stress to form a micro valve; the hydrophobic breathable film 7 is positioned on one side of the distilled water channel 3; and an infrared laser 8 is arranged outside the distilled water channel 3.
In a specific embodiment, the strain film 6 is made of polydimethylsiloxane PDMS, rubber or resin elastic material, and has a thickness of several tens of micrometers to one hundred micrometers.
The hydrophobic breathable film 7 is made of polytetrafluoroethylene or polyvinylidene fluoride, can permeate water vapor but cannot permeate liquid water, and is dozens of micrometers to one hundred micrometers thick.
Referring to fig. 1 and 2, example 2. a method of using a photothermal manipulation membrane type microvalve device comprising a PDMS micro flow channel 1 in which a transport fluid channel 2 for transporting a main fluid and a distilled water channel 3 for flowing distilled water are disposed in parallel to each other to provide a vapor pressure source; a partition plate 4 is arranged between the transport fluid channel and the distilled water channel, a through hole 5 is arranged in the middle of the partition plate 4, a strain membrane 6 and a hydrophobic breathable membrane 7 are respectively arranged on two end faces of the through hole 5, and the strain membrane 6 and the hydrophobic breathable membrane 7 form a steam generation chamber; the strain membrane 6 is positioned on one side of the transport fluid channel 2, and the strain membrane 6 is deformed under stress to form a micro valve; the hydrophobic breathable film 7 is positioned on one side of the distilled water channel 3; and an infrared laser 8 is arranged outside the distilled water channel 3.
Adding a main fluid into the transportation fluid channel 2, wherein the main fluid can be water, solution, chemical reagent, medical drug or gas and other fluids which cannot penetrate through the strain membrane 6; adding distilled water into the distilled water channel, and heating the distilled water in the distilled water channel by using the infrared laser, wherein the infrared laser can adopt a 1550nm infrared laser; the distilled water is heated and evaporated to produce water vapor, the water vapor passes through the hydrophobic breathable film 7 and is accumulated in the steam generating chamber to form vapor pressure, the vapor pressure acts on the strain membrane 6 to deform the strain membrane, and the strain membrane 6 blocks the transportation of the main fluid in the transportation fluid channel. When the main fluid circulation is needed, the distilled water is stopped heating.
In a specific embodiment, the strain film 6 is made of polydimethylsiloxane, rubber or resin-based elastic material. The thickness is tens of microns to a hundred microns.
The hydrophobic breathable film 7 is made of polytetrafluoroethylene or polyvinylidene fluoride, and can permeate water vapor but cannot permeate liquid water. The thickness is tens of microns to a hundred microns.
Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art may still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some technical features. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A photothermal manipulation membrane type micro-valve device comprises a PDMS micro-channel (1), and is characterized in that: a transport fluid channel (2) and a distilled water channel (3) which are parallel to each other are arranged in the PDMS microchannel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for circulating distilled water so as to provide a steam pressure source; a partition plate (4) is arranged between the transport fluid channel and the distilled water channel, a through hole (5) is formed in the middle of the partition plate (4), a strain membrane (6) and a hydrophobic breathable membrane (7) are respectively arranged on two end faces of the through hole (5), and the strain membrane (6), the hydrophobic breathable membrane (7) and the through hole (5) form a steam generation chamber; the strain membrane (6) is positioned on one side of the transport fluid channel (2), and the strain membrane (6) deforms under stress to form a micro valve; the hydrophobic breathable film (7) is positioned on one side of the distilled water channel (3); and an infrared laser is arranged on the outer side of the distilled water channel (3), and the setting position of the infrared laser is right opposite to the through hole (5).
2. The photothermal manipulation membrane microvalve device of claim 1, wherein: the strain film (6) is made of polydimethylsiloxane, rubber or resin elastic materials.
3. The photothermal manipulation membrane microvalve device of claim 1, wherein: the hydrophobic breathable film (7) is made of polytetrafluoroethylene or polyvinylidene fluoride, and can permeate water vapor but cannot permeate liquid water.
4. A method of using a photothermal manipulation membrane type microvalve device comprising a PDMS microchannel (1), characterized in that:
a transport fluid channel (2) and a distilled water channel (3) which are parallel to each other are arranged in the PDMS microchannel, the transport fluid channel is used for transporting a main fluid, and the distilled water channel is used for circulating distilled water so as to provide a steam pressure source; a partition plate (4) is arranged between the transport fluid channel and the distilled water channel, a through hole (5) is formed in the middle of the partition plate (4), a strain membrane (6) and a hydrophobic breathable membrane (7) are respectively arranged on two end faces of the through hole (5), and the strain membrane (6), the hydrophobic breathable membrane (7) and the through hole (5) form a steam generation chamber; the strain membrane (6) is positioned on one side of the transport fluid channel (2), and the strain membrane (6) deforms under stress to form a micro valve; the hydrophobic breathable film (7) is positioned on one side of the distilled water channel (3); an infrared laser is arranged on the outer side of the distilled water channel (3);
adding a main fluid into the transport fluid channel (2), adding distilled water into the distilled water channel, heating the distilled water in the distilled water channel by using the infrared laser, heating and evaporating the distilled water to produce water vapor, accumulating the water vapor in the vapor generation chamber through the hydrophobic breathable film (7) to form vapor pressure, acting the vapor pressure on the strain film (6) to deform the strain film, and blocking the transport of the main fluid in the transport fluid channel by the strain film (6).
5. The method of using a photothermal manipulation membrane microvalve device according to claim 4, characterized in that:
the strain film (6) is made of polydimethylsiloxane, rubber or resin elastic materials.
6. The method of using a photothermal manipulation membrane microvalve device according to claim 4, characterized in that:
the hydrophobic breathable film (7) is made of polytetrafluoroethylene or polyvinylidene fluoride, and can permeate water vapor but cannot permeate liquid water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910084530.1A CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109737237A CN109737237A (en) | 2019-05-10 |
| CN109737237B true CN109737237B (en) | 2020-05-12 |
Family
ID=66366568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910084530.1A Active CN109737237B (en) | 2019-01-29 | 2019-01-29 | Photo-thermal control membrane type micro-valve device and using method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109737237B (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4821997A (en) * | 1986-09-24 | 1989-04-18 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator |
| JP3314142B2 (en) * | 1997-02-03 | 2002-08-12 | 日立化成工業株式会社 | Semiconductor package manufacturing method |
| US20040011977A1 (en) * | 2001-08-31 | 2004-01-22 | Hower Robert W | Micro-fluidic valves |
| KR20060063122A (en) * | 2004-12-07 | 2006-06-12 | 삼성전자주식회사 | Micro valve |
| US20070209433A1 (en) * | 2006-03-10 | 2007-09-13 | Honeywell International Inc. | Thermal mass gas flow sensor and method of forming same |
| DE102010061909A1 (en) * | 2010-11-24 | 2012-05-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidic actuator with deformable closure arrangement and long shelf life |
| US10367210B2 (en) * | 2013-11-14 | 2019-07-30 | Honeywell International Inc. | Power generator having integrated membrane valve |
| CN104225964B (en) * | 2014-09-17 | 2016-09-28 | 清华大学 | Microfluid removal of bubbles device and preparation method thereof and microfluidic device |
-
2019
- 2019-01-29 CN CN201910084530.1A patent/CN109737237B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109737237A (en) | 2019-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Qian et al. | Actuation mechanism of microvalves: A review | |
| Beebe et al. | Physics and applications of microfluidics in biology | |
| Au et al. | Microvalves and micropumps for BioMEMS | |
| Au et al. | 3D-printed microfluidic automation | |
| Oh et al. | A review of microvalves | |
| Zhang et al. | Micropumps, microvalves, and micromixers within PCR microfluidic chips: Advances and trends | |
| Tan et al. | A reliable method for bonding polydimethylsiloxane (PDMS) to polymethylmethacrylate (PMMA) and its application in micropumps | |
| Frey et al. | Autonomous microfluidic multi-channel chip for real-time PCR with integrated liquid handling | |
| US20040013536A1 (en) | Micro-fluidic pump | |
| Cai et al. | Membrane-based valves and inward-pumping system for centrifugal microfluidic platforms | |
| Gholizadeh et al. | Magnetically actuated microfluidic transistors: Miniaturized micro-valves using magnetorheological fluids integrated with elastomeric membranes | |
| Addae-Mensah et al. | Actuation of elastomeric microvalves in point-of-care settings using handheld, battery-powered instrumentation | |
| Attia et al. | Integration of functionality into polymer-based microfluidic devices produced by high-volume micro-moulding techniques | |
| Sano et al. | Implementation of a nanochannel open/close valve into a glass nanofluidic device | |
| CN103100451A (en) | Temperature response micro-pump based on micro-fluidic chip and preparation method thereof | |
| US20100059120A1 (en) | Microfluidic device and methods for droplet generation and manipulation | |
| CN109737237B (en) | Photo-thermal control membrane type micro-valve device and using method | |
| Matsubara et al. | A Microfabricated Pistonless Syringe Pump Driven by Electro‐Conjugate Fluid with Leakless On/Off Microvalves | |
| CN103062497A (en) | Intelligent micro valve based on micro-fluidic chip and production method thereof | |
| CN1313355C (en) | Single piece of pneumatic gelatious tiny valve | |
| CN103062479A (en) | Magnetic responsive micro valve based on micro-fluidic chip and production method thereof | |
| CN111692400B (en) | Micro valve for controlling flow velocity of micro-fluidic chip based on piezoelectric film feedback | |
| Silverio et al. | Lab-on-a-chip: Systems integration at the microscale | |
| Neumann et al. | Fluidic Platforms and Components of Lab-on-a-Chip devices | |
| Huang et al. | Application of microvalve based on computer control in biological chemical and medical |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |