CN109671658A - Substrate Load System and its substrate stowage - Google Patents
Substrate Load System and its substrate stowage Download PDFInfo
- Publication number
- CN109671658A CN109671658A CN201811439222.8A CN201811439222A CN109671658A CN 109671658 A CN109671658 A CN 109671658A CN 201811439222 A CN201811439222 A CN 201811439222A CN 109671658 A CN109671658 A CN 109671658A
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- China
- Prior art keywords
- substrate
- storage box
- cover board
- hoisting mechanism
- cabinet
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of substrate Load System and its stowages, and the system comprises loading attachments, and an at least substrate storage card box, and substrate storage card box is movable to be placed in the loading attachment；Loading attachment includes an at least cabinet, and the hoisting mechanism with the mating setting of cabinet, hoisting mechanism include driving assembly and lifting assembly；Substrate storage card box includes storage box and substrate placing modules, and substrate placing modules match with the hoisting mechanism, and hoisting mechanism drives the substrate placing modules to be placed in the storage box or extract out from the storage box by the lifting assembly.The beneficial effects of the present invention are embodied in: substrate cleaning is separated with vapor deposition production line, and clean substrate is stored into dry nitrogen environment, the pollution of substrate surface is prevented；This programme in the production line when only need two independent cabinets and multiple small-sized substrate storage cavitys；Cabinet is loaded by two individual substrates, work is exchanged, reaches OLED device flow requirement.
Description
Technical field
The invention belongs to substrate evaporation coating technique field more particularly to a kind of substrate Load System and its substrate stowages.
Background technique
The field that organic thin film electroluminescent display device (OLED) has a extensive future as one, obtains in recent years
It rapidly develops, there is the very big market demand every year, mainly in the form of assembly line, production line can be with for the production of oled panel now
Yield is improved, supply requirement is met；
The process flow of oled panel is that multilayer organic material is deposited on clean ITO substrate, finally plates one layer of metal electricity again
Pole.Before organic material is deposited, it is necessary to assure clean ITO substrate is generally put into vacuum or dry nitrogen by the cleaning of ITO substrate
In environment, the surface ITO is protected not to be contaminated；Large-scale evaporated device now cleans substrate, dries that be integrated into entire OLED raw
In producing line, result in that the entire production line size is excessively huge, the ITO substrate after cleaning, which will be placed to an inside and have, to be passed
In the vacuum cavity of dynamic device, multiple vacuum cavities side by side, form the vacuum gradient environment of a vacuum degree from low to high；Substrate
After entering certain cavity, prime valve is closed, and big pumping speed pump is opened, and vacuum up opens junior's valve, into next chamber
Body.But this scheme requires to want multiple cavities, and the size of each cavity is larger, and the pumping speed of selection is larger, it is desirable that vacuum degree from
1bar to 1.0*10-5The transition of Pa causes the OLED device cost of such scheme excessively high.
And for small test evaporated device, generally there is an ITO substrate to load cavity, places ITO after opening every time
Substrate, then vacuumize, it be easy to cause in ITO substrate surface exposure air and is polluted seriously in this way, to the property of oled panel
Can have a significant impact.
Summary of the invention
In order to solve the deficiencies in the prior art, the present invention provides a kind of substrate Load System and its substrate stowages.
The purpose of the present invention is achieved through the following technical solutions:
Substrate Load System, including loading attachment, and an at least substrate storage card box, the movable accommodating of substrate storage card box
In in the loading attachment；
The loading attachment includes an at least cabinet, and the hoisting mechanism with the mating setting of cabinet, and the hoisting mechanism includes driving
Dynamic component and lifting assembly；
The substrate storage card box includes storage box and substrate placing modules, the substrate placing modules and the hoisting mechanism
Match, the hoisting mechanism drives the substrate placing modules to be placed in the storage box or from described by the lifting assembly
Storage box extraction.
Preferably, the storage box is equipped with opening, and the substrate placing modules are placed in or are detached by the opening described
Storage box；
The substrate placing modules include cassette cover board, and are set to the substrate frame below the cassette cover board, the substrate frame
On be provided with substrate holder for being horizontally arranged substrate, the cassette cover board is connected together with storage box sealing, institute
The both sides of the edge for stating cassette cover board, which extend outwardly, protrudes the storage box case mouth width degree, forms the wing with hoisting mechanism cooperation
Shape portion.
Preferably, the seal assembly to match with the storage box opening, the cassette are provided on the cassette cover board
The positioning component convenient for connecting with the storage box is provided on cover board.
Preferably, be provided on the storage box or cassette cover board the valve for charging and discharging gas and with inside storage box
Unilaterally connected check valve, the communication direction of the check valve are that gas can be flow to outside storage box inside storage box.
Preferably, the hoisting mechanism includes promoting cover board and being set to the lifting parts composition promoted on cover board, described to mention
Ascending part includes lifting rod, and the bottom of the lifting rod is perpendicular to be provided with lifting cross bar, and the upper end of the lifting rod extends through
It is promoted and is connect outside cover board with driving mechanism out, the lifting cross bar bottom is provided with the cleaner connecting with the snap-in structure.
Preferably, the hoisting mechanism further includes being set to the position-limited rack for promoting cover board two sides, in the position-limited rack
It is provided with guide rod, the both ends of the guide rod, which are respectively perpendicular, to be set on the promotion cover board bottom and position-limited rack, described to mention
The both ends of cross bar are drawn to be sheathed on the guide rod respectively, the lifting rod movement drives the lifting cross bar in the guiding
It is moved on bar.
Preferably, the limit for limiting the substrate storage card box direction of motion and movement position is provided in the cabinet
Position mechanism.
Preferably, the bottom of the cabinet is provided with guide rail, and the bottom of the storage box is provided with and the guide rail phase
The idler wheel matched.
Preferably, it is offered on the cabinet and takes mouth.
Preferably, the substrate stowage of substrate Load System described in any of the above, it is characterised in that: including walking as follows
It is rapid:
S1, substrate is placed in the substrate placing modules of cassette；
S2, it combines substrate placing modules with storage box, and negative-pressure sealing；
S3, substrate storage card box is put into cabinet, and is arranged to predetermined position；
S4, the vacuum degree for being evacuated to operation requirement is carried out to cabinet；
S5, hoisting mechanism drive substrate placing modules to operating position, and the hoisting mechanism needs to control promotion institute according to taking piece
The height of substrate placing modules is stated, to facilitate acquisition substrate.
The beneficial effects of the present invention are embodied in: substrate is cleared up and is separated with vapor deposition production line by the present invention, by clean substrate
It stores in protective gas, prevents the pollution of substrate surface；Substrate storage card box in the present invention can be avoided with forvacuum
Conversion between multiple devices in the prior art, not can guarantee so as to cause vacuum degree.Meanwhile this programme in the production line when only
Need two independent cabinets and multiple small-sized substrate storage card boxes；Cabinet is loaded by individual substrate, work is exchanged, reaches
To OLED device flow requirement.
Detailed description of the invention
Fig. 1: external structure of the invention disassembles status diagram, at this point, hoisting mechanism is in outside shell.
Fig. 2: schematic perspective view of the invention.
Fig. 3: substrate storage card box structural schematic diagram of the invention.
Fig. 4: the structural schematic diagram of hoisting mechanism of the invention when promoting substrate.
Fig. 5: structural schematic diagram of the substrate storage card box of the present invention when promoting loading attachment.
Fig. 6: substrate storage card box of the present invention promotes the structural schematic diagram after loading attachment.
Specific embodiment
It is specifically described technical solution of the present invention with reference to embodiments, present invention discloses a kind of substrate Load System,
In conjunction with shown in Fig. 1-Fig. 4, including loading attachment and at least one substrate storage card box, the substrate storage card box is mobilizable to be set
It is placed in the loading attachment.Following embodiment is described with a substrate storage card box.
The loading attachment includes cabinet 2, the hoisting mechanism for being set to 2 top of cabinet.The cabinet 2 offers on one side
Convenient for unpacking operation port.The another side of the cabinet 2, which is provided with, takes mouth into next vacuum chamber for taking out substrate
22.The mouth 22 of taking is set on the opposite face of the cabinet 2 with the operation port.The operation port can also use other
Form, such as operating handle etc., it acts as convenient for unpacking.The hoisting mechanism by driving assembly in the cabinet 2 into
Row moves up and down；The substrate storage card box includes storage box 4, is set in storage box 4 substrate placing modules.The promotion
Mechanism drives the substrate placing modules to move up and down in the cabinet 2 by lifting assembly.In order to guarantee substrate storage card
Casket is horizontally stable in the cabinet 2, and the bottom in the cabinet 2 is provided with for limiting the substrate storage card box water
The position-limit mechanism 44 to movement is put down, the position-limit mechanism 44 is set to the two sides of the cabinet, also sets on the side wall of the cabinet 2
It is equipped with the limited post for limiting the storage cavity lengthwise position.Position-limit mechanism is a limited block, the limit in the present invention
Strip groove is offered on block, by the distance between adjustable both ends limited block of strip groove, to adapt to different size of deposit
Storage tank 4.
Specifically, the hoisting mechanism includes promoting cover board 1 and being set to the lifting parts composition promoted on cover board 1, it is described
Lifting parts include lifting rod 14, and the bottom of the lifting rod 14 is perpendicular to be provided with lifting cross bar 13, the lifting rod 14
Upper end, which extends to be pierced by be promoted, to be connect outside cover board 1 with driving assembly, and 13 bottom of lifting cross bar is provided with and the snap-in structure
The cleaner 15 of connection.In order to preferably carry out lifting positioning, it is provided with positioning mechanism on the cleaner 15, in the present embodiment, institute
Stating positioning mechanism is positioning pin 16, for being cooperated with the location hole on wing 38.
For the stability of lifting, there are two the settings of lifting rod 14, correspondingly, there are two guide rod settings,
Certainly, quantity is not intended as absoluteness limitation of the invention, specifically can according to need and is set.
The hoisting mechanism further includes being set to the position-limited rack 11 for promoting 1 two sides of cover board, steady in order to guarantee to be promoted
Qualitative and verticality, is provided with guide rod 12 in the position-limited rack, the both ends of the guide rod 12 be respectively perpendicular be set to it is described
It is promoted on cover board bottom and position-limited rack 11, the both ends of the lifting cross bar 13 are sheathed on respectively on the guide rod 12, described to mention
Pull rod movement, drives the lifting cross bar 12 to move on the guide rod 12.
The substrate storage card box is detachably arranged in the cabinet 2, specifically, the bottom of the cabinet 2 is arranged
There is guide rail 21, the bottom of the substrate storage card box is provided with idler wheel 43, can easily move the substrate by idler wheel and store
Cassette, convenient for transfer；The idler wheel matches with guide rail, can easily be pushed substrate storage card box in institute by idler wheel 43
It states in cabinet 2.
The storage box 4 is the cavity that top offers an opening, and the substrate placing modules are placed in described by opening
In storage box 4, i.e., the described substrate placing modules can carry out pull in the storage box 4 by being open.The substrate is placed
Component includes substrate frame 34, the cassette cover board 3 for being connected to 34 top of substrate frame, and the substrate frame 34 is successively equal from top to bottom
It is furnished with the substrate holder 41 for being horizontally arranged substrate.The both sides of the edge of the cassette cover board 3 extend outwardly deposits described in protrusion
Storage tank case mouth width degree forms the wing 38 connecting with the hoisting mechanism.On the wing 38 can by being provided with location hole,
Cooperate with the positioning pin 16 on the cleaner, faster to position, is conducive to preferably be promoted.It is set on the wing 38
Limited block form can also be used in the location hole set, and is set to the bottom of wing 38, cooperates with the positioning mechanism on the cleaner,
Faster to position, be conducive to preferably be promoted, hair when the substrate placing modules of substrate storage card box being avoided to be raised
The sliding of raw horizontal direction, causes the disengaging hoisting mechanism of substrate placing modules and falls.
The seal assembly for sealing with the storage box 4 is provided on the cassette cover board 3, the seal assembly is placed in
3 bottom of cassette cover board, in the present embodiment, the seal assembly uses sealing ring form.In order to preferably carry out cassette
The connection of cover board 3 and storage box is provided with the positioning component convenient for connecting with the storage box on the cassette cover board 3, described
Positioning component is mutually matched second positioning pin 33 and second location hole 32.
Specifically, the storage box is laterally extended to form engaging portion 37 in the side wall of opening, second positioning pin 33
It is arranged on the engaging portion 37, the second location hole 32 is arranged on the wing 38；Further, the engaging portion
Engaging slot 35 is concaved on 37, the corresponding engaging slot 35 of the wing 38 is convexly equipped with clamping block 36, the clamping block
36 match with the engaging slot 35, and clamping block 36 and the cooperation of engaging slot 35 are so that cassette cover board 3 and the opening align more
Fast and stable is located by connecting.Various components in the present invention can be dismantled, and it is convenient to substitute, and mechanical realization principle is reliable, real
With property height.
The valve 45 for charging and discharging gas is provided on the side wall of the storage box 4, in order to preferably adjust in storage box
Vacuum degree, 3 center of cassette cover board offers check valve 31.Certainly, the valve 45 can also be carried out with check valve 31
Transposition is provided with check valve, the valve charged and discharged gas is provided on cassette cover board 3 on the side wall of storage box 4.It is optional
Ground, the valve 45 and check valve 31 are all arranged on the side wall of storage box 4, during charging and discharging gas, valve 45 and list
It is parallel with the substrate to the airflow direction at valve 31, air-flow vertical impact substrate is prevented, causes to deviate.
Present invention further teaches the installation method of above-described vapor deposition production line vapor deposition front end substrate loading device, packets
Include following steps:
S1, substrate is placed in the substrate placing modules of cassette；
S2, it combines substrate placing modules with storage box, and negative-pressure sealing；
S3, substrate storage card box is put into cabinet, and is arranged to predetermined position；
S4, the vacuum degree for being evacuated to operation requirement is carried out to cabinet；
S5, hoisting mechanism drive substrate placing modules to operating position, and the hoisting mechanism needs to control promotion institute according to taking piece
The height of substrate placing modules is stated, to facilitate acquisition substrate.
In another embodiment, the installation method of the vapor deposition production line vapor deposition front end substrate loading device, in conjunction with
Fig. 5-Fig. 6, includes the following steps:
S1, clean substrate 42 is placed in the substrate holder 41 of substrate placing modules；Upper and lower adjacent substrates clamper 41
The distance between can according to need and be configured.
S2, substrate placing modules are placed in storage box 4 by positioning component, and pass through the close of substrate placing modules
Sealing assembly keeps the sealing with storage box；Seal assembly in the present invention uses sealing ring form.
S3, storage box inside is vacuumized by the valve 45 of 4 side wall of storage box, while protection is filled with to storage box
The protection of gas progress substrate；The protective gas can be nitrogen, argon gas, helium, be not limited in the present invention.The vacuum
The control of degree can individually be controlled by control system, more accurately to reach necessary requirement.
S4, loading attachment is opened, by storage box 4 by idler wheel 43, the guide rail 21 along the bottom of box is promoted in cabinet 2, and
It is placed into position by the position-limit mechanism in cabinet 2, shuts loading attachment.
S5, again to being vacuumized in cabinet 2, and the storage is carried out by the check valve 31 on cassette lid 3
The adjusting of vacuum degree in case；Specifically, due to the effect of pressure, the check valve 31 will be certainly when vacuum degree is excessively high in cabinet 2
It is dynamic to open, so as to adjust in cabinet 2 and the vacuum degree of substrate storage card box.
S6, after reaching predetermined vacuum threshold with vacuum degree in storage box 4 in cabinet 2, driving assembly passes through control module
The instruction of sending is opened, and hoisting mechanism is driven to move；The protection weight that program is not belonging to the application is specifically controlled in the present invention
Details are not described herein for point event.
S7, the hoisting mechanism drive cassette cover board 3 to be detached from storage box 4 and move upwards, to obtain the base of high-cleanness, high
Piece.Since the loading attachment in the present invention takes piece chamber to be connected with vapor deposition production line, after substrate frame is elevated, take piece intracavitary
Manipulator is taken out substrate by taking mouth 22 from substrate frame.
The present invention in actual use, to meet the needs of OLED device flow, can be used multiple substrate storage card boxes into
Row replacement in turn, it is of course also possible to be provided with the substrate storage card box of multiple groups in loading attachment, to substrate storage card box into
The substrate of taking gone in turn, or constantly recycled using independent loading attachment and substrate storage card box, to improve
Take efficiency.
Certainly still there are many specific embodiments by the present invention, are just not listed one by one herein.It is all using equivalent replacement or
Equivalent transformation and all technical solutions formed, all fall within the scope of protection of present invention.
Claims (10)
1. substrate Load System, it is characterised in that: including loading attachment, and an at least substrate storage card box, the substrate storage
Cassette is movable to be placed in the loading attachment；
The loading attachment includes an at least cabinet, and the hoisting mechanism with the mating setting of cabinet, and the hoisting mechanism includes driving
Dynamic component and lifting assembly；
The substrate storage card box includes storage box and substrate placing modules, the substrate placing modules and the hoisting mechanism
Match, the hoisting mechanism drives the substrate placing modules to be placed in the storage box or from described by the lifting assembly
Storage box extraction.
2. substrate Load System as described in claim 1, it is characterised in that: the storage box is equipped with opening, and the substrate is put
It sets component and is placed in or detaches the storage box by the opening；
The substrate placing modules include cassette cover board, and are set to the substrate frame below the cassette cover board, the substrate frame
On be provided with substrate holder for being horizontally arranged substrate, the cassette cover board is connected together with storage box sealing, institute
The both sides of the edge for stating cassette cover board, which extend outwardly, protrudes the storage box case mouth width degree, forms the wing with hoisting mechanism cooperation
Shape portion.
3. substrate Load System as claimed in claim 2, it is characterised in that: be provided on the cassette cover board and the storage
The seal assembly that box opening matches is provided with the positioning component convenient for connecting with the storage box on the cassette cover board.
4. substrate Load System as claimed in claim 2, it is characterised in that: be arranged in the storage box or cassette cover board useful
In the valve charged and discharged gas and with unilaterally connected check valve inside storage box, the communication direction of the check valve is gas energy
It is enough to be flow to outside storage box inside storage box.
5. substrate Load System as claimed in claim 2, it is characterised in that: the hoisting mechanism includes promoting cover board and setting
In promoting the lifting parts composition on cover board, the lifting parts include lifting rod, and the bottom of the lifting rod is perpendicular to be provided with
Cross bar is lifted, the upper end of the lifting rod, which extends to be pierced by be promoted, to be connect outside cover board with driving mechanism, and the lifting cross bar bottom is set
It is equipped with the cleaner connecting with the snap-in structure.
6. substrate Load System as claimed in claim 5, it is characterised in that: the hoisting mechanism further includes being set to described mention
The position-limited rack of cover board two sides is risen, is provided with guide rod in the position-limited rack, the both ends of the guide rod, which are respectively perpendicular, is set to institute
It states and is promoted on cover board bottom and position-limited rack, the both ends of the lifting cross bar are sheathed on respectively on the guide rod, the lifting rod
Movement drives the lifting cross bar to move on the guide rod.
7. substrate Load System as described in claim 1, it is characterised in that: be provided in the cabinet for limiting the base
The position-limit mechanism of the piece storage card box direction of motion and movement position.
8. substrate Load System as described in claim 1, it is characterised in that: the bottom of the cabinet is provided with guide rail, described
The bottom of storage box is provided with the idler wheel to match with the guide rail.
9. substrate Load System as described in claim 1, it is characterised in that: offered on the cabinet and take mouth.
10. the substrate stowage of the substrate Load System as described in claim 1-9 is any, it is characterised in that: including as follows
Step:
S1, substrate is placed in the substrate placing modules of cassette；
S2, it combines substrate placing modules with storage box, and negative-pressure sealing；
S3, substrate storage card box is put into cabinet, and is arranged to predetermined position；
S4, the vacuum degree for being evacuated to operation requirement is carried out to cabinet；
S5, hoisting mechanism drive substrate placing modules to operating position, and the hoisting mechanism needs to control promotion institute according to taking piece
The height of substrate placing modules is stated, to facilitate acquisition substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439222.8A CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439222.8A CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109671658A true CN109671658A (en) | 2019-04-23 |
| CN109671658B CN109671658B (en) | 2021-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811439222.8A Active CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326667A (en) * | 1992-05-21 | 1993-12-10 | Shinko Electric Co Ltd | Gas purging unit for portable sealed container |
| US5697749A (en) * | 1992-07-17 | 1997-12-16 | Tokyo Electron Kabushiki Kaisha | Wafer processing apparatus |
| US6152669A (en) * | 1995-11-13 | 2000-11-28 | Shinko Electric Co., Ltd. | Mechanical interface apparatus |
| US20070107598A1 (en) * | 2005-11-14 | 2007-05-17 | Jin-Goo Lee | Load-lock and semiconductor device manufacturing equipment comprising the same |
| CN101542713A (en) * | 2007-03-30 | 2009-09-23 | 东京毅力科创株式会社 | Substrate processing apparatus, substrate processing method and computer readable storage medium |
| KR101215962B1 (en) * | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Buffer storage box for equipment front end module |
-
2018
- 2018-11-29 CN CN201811439222.8A patent/CN109671658B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05326667A (en) * | 1992-05-21 | 1993-12-10 | Shinko Electric Co Ltd | Gas purging unit for portable sealed container |
| US5697749A (en) * | 1992-07-17 | 1997-12-16 | Tokyo Electron Kabushiki Kaisha | Wafer processing apparatus |
| US6152669A (en) * | 1995-11-13 | 2000-11-28 | Shinko Electric Co., Ltd. | Mechanical interface apparatus |
| US20070107598A1 (en) * | 2005-11-14 | 2007-05-17 | Jin-Goo Lee | Load-lock and semiconductor device manufacturing equipment comprising the same |
| CN101542713A (en) * | 2007-03-30 | 2009-09-23 | 东京毅力科创株式会社 | Substrate processing apparatus, substrate processing method and computer readable storage medium |
| KR101215962B1 (en) * | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Buffer storage box for equipment front end module |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109671658B (en) | 2021-02-09 |
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