CN109521655A - A kind of stripe lock fixed pattern holographic interference lithography system and fringe locking method - Google Patents
A kind of stripe lock fixed pattern holographic interference lithography system and fringe locking method Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
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Abstract
The invention belongs to information optical technical fields, it is related to a kind of holographic interference lithography system, to solve the problems, such as that interference fringe holographic grating contrast declines, reference grating surface Moire fringe light intensity signal is acquired with the first high-speed photodetector, and by light intensity signal simultaneous transmission to single-chip microcontroller and PID controller；Second high-speed photodetector passes through the light intensity signal of beam sampling grating monitoring laser, which is transferred to single-chip microcontroller, and the signal output end of PID controller is transferred to the frequency modulation(PFM) input terminal of the first supersonic generator；When PID controller judges the light intensity signal variation of the first high-speed photodetector real-time detection, PID controller exports feedback signal to the first supersonic generator, first supersonic generator frequency changes accordingly, the phase of -1 grade of diffraction light of first sound-optic modulator changes, to lock the phase of Moire fringe, the locking to interference fringe phase is realized.
Description
Technical field
The invention belongs to information optical technical fields, are related to a kind of holographic interference lithography system.
Background technique
When shooting large-sized holographic grating, since shooting light intensity is weaker, need to expose for a long time.But extraneous
Vibration, the flowing of air, the factors such as fluctuation of temperature all can make the relative phase of object light and reference light change, they are formed
Interference fringe random drift can occur, so that the contrast of recorded fringe be made to decline.Current Holographical photoetching system can not
Solve the problems, such as interference fringe in a long time, therefore for prolonged exposure status, it is also necessary to vibration isolation of taking the initiative
Method controls the drift of interference fringe.Current existing fringe locking method: the invention of Patent No. 2006100399676 is special
Benefit discloses line array CCD fitting fringe locking method, and this method refers to Moire fringe using line array CCD acquisition, looked for by fitting process
The trough of striped locks the phase of striped, locking bandwidth is only 2 ~ 3Hz by controlling piezoelectric ceramics；Patent No.
2013106933281 patent of invention discloses heterodyne method fringe locking method, exports two beamlets using light splitting piece, uses respectively
Phase receiver receives signal, passes through human-computer interaction interface, the frequency of software control frequency conversion acousto-optic modulator, real-time lock interference
Striped, this method response speed are improved than line array CCD method, but software is needed to calculate stripe information, and real-time is limited to software
With the matching of hardware.Especially when shooting low noise holographic grating, low speed moving exposure is needed to record version in shooting process,
In moving process, the shake that the vibration of guide rail will cause interference fringe quickly changes, and above-mentioned method can not trembling in high frequency
Rotating ring works under border, needs quickly fringe locking system in real time.
Summary of the invention
The technology that interference fringe random drift causes recorded fringe contrast to decline when to solve long-time moving exposure is asked
Topic, the present invention propose that a kind of stripe lock fixed pattern holographic interference lithography system, including laser, beam sampling grating, half-wave plate divide
Beam prism, the first plane mirror, second plane mirror, third plane mirror, first sound-optic modulator, the first ultrasonic wave
Generator, second sound-optic modulator, the second supersonic generator, the first spatial filter, second space filter, the first collimation
Lens, the second collimation lens, grating substrate to be exposed, reference grating, the first high-speed photodetector, the second high-speed light electrical resistivity survey
Survey device, PID controller, single-chip microcontroller；The reference grating is arranged on grating substrate to be exposed, and reference grating surface with
Grating substrate surface to be exposed is in the same plane；The light that laser issues passes through beam sampling grating, 0 grade of transmission diffraction
Light enters beam splitter prism and is divided into transmitted light beam and the reflected beams, and wherein transmitted light beam passes through half-wave plate, then through the first plane reflection
Mirror, second plane mirror, into first sound-optic modulator, -1 grade of diffraction light of first sound-optic modulator is filtered into the first space
Then wave device passes through the first collimation lens, expands into directional light, finally project grating substrate and reference grating to be exposed
On；The reflected beams pass through third plane mirror, into second sound-optic modulator, -1 grade of diffraction light of second sound-optic modulator into
Enter second space filter, then passes through the second collimation lens, expand into directional light, finally project grating substrate to be exposed
In reference grating；Transmitted light beam and the reflected beams are interfered on grating substrate surface to be exposed, while transmitted light beam and anti-
The interference optical field of irradiating light beam forms a width Fictitious data base, the grid line direction difference of the Fictitious data base and reference grating in reference grating
One small angle forms Moire fringe；First input end, the second input terminal are provided on the single-chip microcontroller, with reference to defeated
Enter end, output end；Revise signal input terminal, input terminal, PID signal output end are provided in the PID controller；The first surpass
Frequency modulation(PFM) input, output end is provided on sonic generator；Output end is provided on second supersonic generator；First sound
Input terminal is provided on optical modulator and second sound-optic modulator；Above-mentioned Moire fringe projects the detection of the first high speed optoelectronic
On device, the first input end of light intensity signal simultaneous transmission to single-chip microcontroller and the sensor signal input terminal of PID controller；Laser
The light that device issues passes through beam sampling grating, and 1 grade of reflection diffracting light enters the second high-speed photodetector, and light intensity signal passes
Defeated the second input terminal to single-chip microcontroller, the signal output end of PID controller are transmitted to the frequency modulation(PFM) of the first supersonic generator
Input terminal；The output end of first supersonic generator is connect with first sound-optic modulator input terminal, the second supersonic generator
Output end is connect with second sound-optic modulator input terminal, when being sent to what the first high-speed photodetector in PID controller detected
When light intensity signal changes, PID controller exports feedback signal to the first supersonic generator, the first supersonic generator frequency phase
The phase of the change answered, -1 grade of diffraction light of first sound-optic modulator changes, to lock the phase of Moire fringe.Monolithic
The target light intensity of the Moire fringe of reference input input acquisition on machine, the output end of single-chip microcontroller and the amendment of PID controller
Signal input part connection；When being sent to the light intensity signal variation that the first high-speed photodetector detects in PID controller, PID
Controller exports feedback signal to the first supersonic generator, so that the first supersonic generator frequency is changed, so that More
Striped moves round about, to lock the phase of Moire fringe, that is, locks holographic interference fringes phase invariant.
A kind of working principle of above-mentioned stripe lock fixed pattern holographic interference lithography system: in the same light field, Moire fringe
Phase information reacted the phase information of real-time interference fringe, the locking to above-mentioned Moire fringe phase, i.e. lockable are dry
Relate to the phase of striped.If in above-mentioned apparatus the frequency of the second supersonic generator be f2, i.e., second sound-optic modulator input frequency
Rate is fixed value f2, and the frequency f1 of the first supersonic generator is adjustable, and is in external signal frequency modulation working condition, i.e. the first sound
The input frequency f1 of optical modulator changes with the variation of external signal, by changing the frequency of the first supersonic generator,
Moire fringe can be made to move, i.e., consecutive variations occur for the phase of interference fringe.Above-mentioned Moire fringe projects first
On high-speed photodetector, the first input end of light intensity signal simultaneous transmission to single-chip microcontroller and the sensor letter of PID controller
Number input terminal, by finely tuning the frequency f1 of the first supersonic generator, so that Moire fringe moves, single-chip microcontroller acquisition first
The variation range V of the light intensity signal of high-speed photodetectorRmin~VRmax, take the 1/2 (V of median of the light intensity signalRmin+VRmax)
As the reference signal of PID controller, PID controller high speed comparison reference signal and the first high-speed photodetector real-time detection
Light intensity signal, if the two is not identical, PID controller export feedback signal to the first supersonic generator change output frequency
Rate, thus change the phase of Moire fringe, so that the position of the Moire fringe of the first high-speed photodetector detection changes,
The light intensity signal detected changes, which is input in PID controller again, and PID controller high speed is compared in repetition
The light intensity signal of comparison reference signal and the first high-speed photodetector real-time detection, PID exports feedback quantity, until reference signal
Consistent with the light intensity signal of the first high-speed photodetector real-time detection, Moire fringe locks at this time, i.e. locking of interference fringe.
A kind of stripe lock fixed pattern holographic interference lithography system fringe locking method, comprises the steps of,
Step 1 makes reference grating: after regulating holographic interference lithography system exposure light path, putting in the position of reference grating
Reference grating substrate to be prepared is set, the frequency of the first supersonic generator of setting is f1(105MHz ~ 115MHz), setting second
The frequency of supersonic generator is f2(105MHz ~ 115MHz), guarantee f1=f2, to reference light grid base to be prepared in the short time
Plate is exposed, development, the reference grating after development is placed in original position, recalls Moire fringe, be divided between fringe period 1cm ~
2cm projects the Moire fringe in the first high-speed photodetector, adjusts the position of the first high-speed photodetector, so that
Its photosurface is located at the middle position of Moire fringe dark fringe and bright fringes；
Step 2, initial reference signal are set: setting the first supersonic generator frequency as f1(105MHz ~ 115MHz),
The frequency that the second supersonic generator is arranged is f2(105MHz ~ 115MHz), guarantee f1-f2=± 10Hz, Moire fringe is with 10Hz
Frequency translation, the light intensity signal of the first high-speed photodetector is transferred to the first input end of single-chip microcontroller, and single-chip microcontroller records phase
The signal excursion V answeredRmin~VRmax, while the signal of the second high-speed photodetector is transferred to the second input of single-chip microcontroller
End, single-chip microcontroller record corresponding signal VS0, the second high-speed photodetector passes through 1 grade of reflection diffracting light to beam sampling grating
The monitoring to the Output optical power of laser is realized in the monitoring of energy；Because the energy of the part light and 0 grade of transmission diffraction light
The ratio between energy is determined by the diffraction efficiency of 1 grade of reflection diffracting light of beam sampling grating, as long as beam sampling grating is constant, then
The signal energy real time reaction of second high-speed photodetector goes out the Output optical power of laser, the revise signal of PID controller
The initial reference signal of input terminal is set as VR0=(VRmin+VRmax)/2, VS0The optical power change amount for monitoring laser in real time,
The optical power change amount of laser can be ignored in 1s, then VR0/ VS0It is a constant；
Step 3, PID controller control locking of interference fringe: the centre frequency of the first supersonic generator of setting is f1
(105MHz ~ 115MHz), the frequency of the second supersonic generator of setting are f2(105MHz ~ 115MHz)；First ultrasonic wave is sent out
Raw device operating mode is arranged to external signal hopping pattern, modulating frequency 5KHz, input range -5V ~ 5V of external signal, accordingly
The frequency of ultrasonic signal becomes f1-5KHz ~ f1+5KHz；By the light intensity signal V of the first high-speed photodetectorSIt is transferred to PID
The sensor signal end of controller keeps the signal of the second high-speed photodetector to be transferred to the second input terminal of single-chip microcontroller, if
The initial reference input terminal for setting single-chip microcontroller is VR0；Single-chip microcontroller executes division and multiplying, calculates modified reference signal value
VR: VR=(VR0/VS0) * VS, by VRSignal is transferred to the reference signal input terminal of PID controller；PID controller compares V in real timeSWith
The value of VR, the output signal of PID controller are transferred to the frequency modulation(PFM) input terminal of the first supersonic generator, change ultrasonic wave frequency
Rate, the corresponding frequency of first sound-optic modulator change, the phase of real-time control holographic interference fringes.
Prolonged exposure, the Output optical power of laser can fluctuate, if the reference signal of PID controller is repaired not in time
Just, PID controller can accidentally issue signal, drive acousto-optic modulator, will affect the stability of fringe locking in this way.Due to this technology
The use of scheme realizes locking of interference fringe, reduces to ring damping by correcting the reference signal of PID controller in real time
Condition, the rigors of apparatus structure damping condition, improves fringe quality.
Detailed description of the invention
Fig. 1 is stripe lock fixed pattern holographic interference lithography system schematic diagram；
Fig. 2 is that PID controller controls locking of interference fringe flow chart；
Fig. 3 is open loop closed-loop error voltage；
Fig. 4 is the power spectral density of open loop closed-loop error voltage
Wherein: 1- laser, 2- beam sampling grating, 3- half-wave plate, 4- beam splitter prism, the first plane mirror of 5-, 6-
Two plane mirrors, 7- third plane mirror, 8- first sound-optic modulator, 9- second sound-optic modulator, 10- first are empty
Between filter, 11- second space filter, the first collimation lens of 12-, the second collimation lens of 13-, light 14- to be exposed
Gate substrate, 15- reference grating, 16- Moire fringe, the first high-speed photodetector of 17-, the detection of the second high speed optoelectronic of 18-
Device, 19- single-chip microcontroller, 20- PID controller, the first supersonic generator of 21-, the second supersonic generator of 22-.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings:
Embodiment one:
A kind of stripe lock fixed pattern holographic interference lithography system, as shown in Figure 1, including laser 1, beam sampling grating 2, half-wave plate
3, beam splitter prism 4, the first plane mirror 5, second plane mirror 6, third plane mirror 7, first sound-optic modulator 8,
First supersonic generator 21, second sound-optic modulator 9, the second supersonic generator 22, the first spatial filter 10, second are empty
Between filter 11, the first collimation lens 12, the second collimation lens 13, grating substrate 14 to be exposed, reference grating 15, first are high
Fast photodetector 17, the second high-speed photodetector 18, PID controller 20, single-chip microcontroller 19；The reference grating setting exists
On grating substrate to be exposed, and reference grating surface and grating substrate surface to be exposed are in the same plane；Laser hair
Light out passes through beam sampling grating, and 0 grade of transmission diffraction light enters beam splitter prism and is divided into transmitted light beam and the reflected beams, wherein
Transmitted light beam passes through half-wave plate, then through the first plane mirror, second plane mirror, into first sound-optic modulator, first
- 1 grade of diffraction light of acousto-optic modulator enters the first spatial filter, then passes through the first collimation lens, expands into directional light, most
It is projected on grating substrate and reference grating to be exposed afterwards；The reflected beams pass through third plane mirror, into the second acousto-optic
- 1 grade of diffraction light of modulator, second sound-optic modulator enters second space filter, then passes through the second collimation lens, expands
At directional light, finally project on grating substrate and reference grating to be exposed；Transmitted light beam and the reflected beams are to be exposed
Interfere on grating substrate surface, while transmitted light beam and the interference optical field of the reflected beams form a width virtual optical in reference grating
Grid, the Fictitious data base and reference grating form Moire fringe 16；Above-mentioned Moire fringe projects the first high-speed photodetector
On, the first input end of light intensity signal simultaneous transmission to single-chip microcontroller and the sensor signal input terminal of PID controller；Laser
The light of sending passes through beam sampling grating, and 1 grade of reflection diffracting light enters the second high-speed photodetector, light intensity signal transmission
To the second input terminal of single-chip microcontroller, the frequency modulation(PFM) that the signal output end of PID controller is transmitted to the first supersonic generator is defeated
Enter end；The output end of first supersonic generator is connect with first sound-optic modulator input terminal, the second supersonic generator it is defeated
Outlet is connect with second sound-optic modulator input terminal, when the light for being sent to the first high-speed photodetector detection in PID controller
When strong signal changes, PID controller exports feedback signal to the first supersonic generator, and the first supersonic generator frequency is corresponding
Change, the phase of -1 grade of diffraction light of first sound-optic modulator changes, to lock the phase of Moire fringe, that is, locks
Holographic interference fringes phase invariant.
Embodiment two:
A kind of stripe lock fixed pattern holographic interference lithography system fringe locking method, comprises the steps of,
Step 1, make reference grating: after regulating holographic interference lithography system optical path, reference grating position place to
The reference grating substrate of preparation, the frequency of the first supersonic generator of setting are f1(105MHz ~ 115MHz), the second ultrasound of setting
The frequency of wave producer is f2(105MHz ~ 115MHz), guarantee f1=f2, reference grating substrate to be prepared is exposed, shows
Reference grating after development is placed in original position by shadow, is recalled Moire fringe, is divided into 1cm ~ 2cm between fringe period, by the Moire fringe
It projects in the first high-speed photodetector, the position of the first high-speed photodetector is adjusted, so that its photosurface is located at More
The middle position of striped dark fringe and bright fringes.
Step 2, initial reference signal are set: setting the first supersonic generator frequency f1 as 105MHz ~
115MHz, setting the second supersonic generator frequency f2 be 105MHz ~ 115MHz, f1-f2=± 10Hz, Moire fringe with
The frequency translation of 10Hz, the light intensity signal of the first high-speed photodetector are transferred to the first input end of single-chip microcontroller, single-chip microcontroller note
Record corresponding signal excursion VRmin~VRmax, while the signal of the second high-speed photodetector is transferred to the second defeated of single-chip microcontroller
Enter end, single-chip microcontroller records corresponding signal VS0, the initial reference signal of PID controller is set as VR0= (VRmin+VRmax)/2.The
Two high-speed photodetectors realize the output to laser by the monitoring of 1 grade of reflection diffraction light energy to beam sampling grating
The monitoring of optical power；Because the ratio between energy of the energy of the part light and 0 grade of transmission diffraction light is anti-by 1 grade of beam sampling grating
The diffraction efficiency for penetrating diffraction light determines, as long as beam sampling grating is constant, then the signal energy of the second high-speed photodetector
Real time reaction goes out the Output optical power of laser, VS0Monitor the optical power change amount of laser, the light of laser in 1s in real time
Power variation can be ignored, then VR0/ VS0It is a constant.
Step 3, PID controller control locking of interference fringe: workflow is as shown in Fig. 2, the first ultrasonic wave of setting occurs
The centre frequency f1 of device is 105MHz ~ 115MHz, and the frequency f2 of the second supersonic generator of setting is 105MHz ~ 115MHz；It will
First supersonic generator operating mode is arranged to external signal hopping pattern, modulating frequency 5KHz, the input range-of external signal
The frequency of 5V ~ 5V, corresponding ultrasonic signal become f1-5KHz ~ f1+5KHz；The light intensity of first high-speed photodetector is believed
Number VSIt is transferred to the sensor signal end of PID controller, the signal of the second high-speed photodetector is kept to be transferred to single-chip microcontroller
Second input terminal, the initial reference signal end that single-chip microcontroller is arranged is VR0；Single-chip microcontroller executes division and multiplying, calculates amendment
Reference signal value VR: VR=(VR0/VS0) * VS, by VRSignal is transferred to the reference signal input terminal of PID controller；PID control
Device compares V in real timeSWith the value of VR, the output signal of PID controller is transferred to the frequency modulation(PFM) input of the first supersonic generator
End changes ultrasonic frequency, and the corresponding frequency of first sound-optic modulator changes, the phase of real-time control holographic interference fringes
Position.When the first high-speed photodetector detection light intensity signal variation when, PID controller by comparing real-time light intensity signal with
With reference to light intensity signal, the mobile direction of Moire fringe is judged, export one feedback signal at this time to the first supersonic generator,
Its frequency is set to change, so that Moire fringe moves round about, it is so continuous to compare and export feedback signal, so that
The light intensity signal of first high-speed photodetector detection remains unchanged, and realizes closed-loop control.
When open loop and closed loop lock when the error voltage situation of the first high-speed photodetector output voltage and reference signal
Domain and frequency domain are as shown in figures 3 and 4.In moving exposure, when open loop interference fringe random drift and vibrate it is very serious, at this
Under mobile exposure environment, interference fringe is all bigger in the vibration of each frequency, and in closed loop locking, interference fringe is steady
Quietly lock.
The invention proposes the frequency signal based on PID control acousto-optic modulator, adaptive real time fringe locking means.
Using high-speed photodetector detection with reference to the light intensity signal of the intermediate point of Moire fringe, another high-speed photodetector is examined in real time
The fluctuating that laser issues light is surveyed, the reference signal of PID is corrected in real time, is not necessarily to depended software, locking system whole process is by hardware package
Card, fast response time, locking precision are high.
Claims (3)
1. a kind of stripe lock fixed pattern holographic interference lithography system, characterized by comprising: laser (1), beam sampling grating
(2), half-wave plate (3), beam splitter prism (4), the first plane mirror (5), second plane mirror (6), third plane mirror
(7), first sound-optic modulator (8), the first supersonic generator (21), second sound-optic modulator (9), the second supersonic generator
(22), the first spatial filter (10), second space filter (11), the first collimation lens (12), the second collimation lens (13),
Grating substrate (14) to be exposed, reference grating (15), the first high-speed photodetector (17), the second high-speed photodetector
(18), PID controller (20), single-chip microcontroller (19)；
The reference grating is arranged on grating substrate to be exposed, and reference grating surface and grating substrate table to be exposed
Face is in the same plane；The light that laser issues passes through beam sampling grating, and 0 grade of transmission diffraction light enters beam splitter prism and is divided into
Transmitted light beam and the reflected beams, wherein transmitted light beam passes through half-wave plate, then through the first plane mirror, second plane mirror,
Into first sound-optic modulator, -1 grade of diffraction light of first sound-optic modulator enters the first spatial filter, then passes through first
Collimation lens, expands into directional light, finally projects on grating substrate and reference grating to be exposed；
The reflected beams pass through third plane mirror, into second sound-optic modulator, -1 grade of diffraction light of second sound-optic modulator
Into second space filter, then passes through the second collimation lens, expand into directional light, finally project grating base to be exposed
On plate and reference grating；Transmitted light beam and the reflected beams are interfered on grating substrate surface to be exposed, at the same transmitted light beam and
The interference optical field of the reflected beams forms a width Fictitious data base in reference grating, and the Fictitious data base and reference grating form More's item
Line (16)；
First input end, the second input terminal, reference input, output end are provided on the single-chip microcontroller；The PID control
Revise signal input terminal, input terminal, PID signal output end are provided on device；Frequency tune is provided on first supersonic generator
Input, output end processed；Output end is provided on second supersonic generator；First sound-optic modulator and second sound-optic modulator
On be provided with input terminal；
The first high-speed photodetector alignment Moire fringe, the light intensity signal simultaneous transmission of acquisition to the first of single-chip microcontroller
The input terminal of input terminal and PID controller；The light that laser issues passes through beam sampling grating, and 1 grade of reflection diffracting light enters
Second high-speed photodetector, light intensity signal are transferred to the second input terminal of single-chip microcontroller, and the signal output end of PID controller connects
Connect the frequency modulation(PFM) input terminal of the first supersonic generator；The output end of first supersonic generator and first sound-optic modulator are defeated
Enter end connection, the output end of the second supersonic generator is connect with second sound-optic modulator input terminal；Reference on single-chip microcontroller is defeated
Enter the target light intensity of the Moire fringe of end input acquisition, the output end of single-chip microcontroller and the revise signal input terminal of PID controller connect
It connects；
When being sent to the light intensity signal variation that the first high-speed photodetector detects in PID controller, PID controller output is anti-
Feedback signal gives the first supersonic generator, and the first supersonic generator frequency is made to change, so that Moire fringe is to Xiang Fanfang
To movement, to lock the phase of Moire fringe, that is, holographic interference fringes phase invariant is locked.
2. a kind of stripe lock fixed pattern holographic interference lithography system according to claim 1, characterized by comprising: ultrasonic wave
It is 105MHz~115MHz that the centre frequency of generator, which is f1, the frequency f2 of the second supersonic generator be 105MHz~
115MHz；First supersonic generator operating mode is external signal hopping pattern, modulating frequency 5KHz, the input model of external signal
- 5V~5V is enclosed, the frequency of corresponding ultrasonic signal is f1-5KHz~f1+5KHz.
3. a kind of stripe lock fixed pattern holographic interference lithography system fringe locking method, it is characterised in that comprise the steps of:
Step 1 makes reference grating using stripe lock fixed pattern holographic interference lithography system described in claim 1: in reference light
Reference grating substrate to be prepared is placed in the position of grid, the frequency f1 of the first supersonic generator of setting be 105MHz~
115MHz, the frequency f2 of the second supersonic generator of setting are 105MHz~115MHz, guarantee f1=f2, to reference to be prepared
Grating substrate is exposed, develops, and the reference grating after development is placed in original position, recalls Moire fringe, is divided between fringe period
1cm~2cm projects the Moire fringe in the first high-speed photodetector, adjusts the position of the first high-speed photodetector,
So that the middle position of its photosurface alignment Moire fringe dark fringe and bright fringes；
Step 2, initial reference signal are set: the frequency f1 of the first supersonic generator is set as 105MHz~115MHz, if
The frequency f2 for setting the second supersonic generator is 105MHz~115MHz, and f1-f2=± 10Hz, Moire fringe is with the frequency of 10Hz
Translation, the light intensity signal of the first high-speed photodetector are transferred to the first input end of single-chip microcontroller, the corresponding letter of single-chip microcontroller record
Number variation range VRmin~VRmax, while the signal of the second high-speed photodetector is transferred to the second input terminal of single-chip microcontroller, monolithic
Machine records corresponding signal VS0, the revise signal input terminal initial reference signal of PID controller is set as VR0=(VRmin+
VRmax)/2；Second high-speed photodetector is realized by the monitoring of 1 grade of reflection diffraction light energy to beam sampling grating to sharp
The monitoring of the Output optical power of light device；
Step 3, PID controller control locking of interference fringe: the centre frequency f1 of the first supersonic generator of setting is 105MHz
~115MHz, the frequency f2 of the second supersonic generator of setting are 105MHz~115MHz；First supersonic generator is worked
Mode setting is at external signal hopping pattern, modulating frequency 5KHz, input range -5V~5V of external signal, corresponding ultrasonic wave
The frequency of signal becomes f1-5KHz~f1+5KHz；By the light intensity signal V of the first high-speed photodetectorSIt is transferred to PID control
The input terminal of device keeps the signal of the second high-speed photodetector to be transferred to the second input terminal of single-chip microcontroller, single-chip microcontroller is arranged
Reference input is VR0；Single-chip microcontroller executes division and multiplying, calculates modified reference signal value VR: VR=(VR0/
VS0)*VS, by VRSignal is transferred to the revise signal input terminal of PID controller；PID controller compares V in real timeSWith the value of VR, PID
The output signal of controller is transferred to the frequency modulation(PFM) input terminal of the first supersonic generator, changes ultrasonic frequency, the first sound
The corresponding frequency of optical modulator changes, the phase of real-time control holographic interference fringes.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN113514913A (en) * | 2021-07-12 | 2021-10-19 | 清华大学深圳国际研究生院 | Preparation method of large-area grating |
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| CN111381460A (en) * | 2020-04-29 | 2020-07-07 | 中国科学院光电技术研究所 | Measurement system and measurement method for focusing, leveling and precise alignment |
| CN113514913A (en) * | 2021-07-12 | 2021-10-19 | 清华大学深圳国际研究生院 | Preparation method of large-area grating |
| CN113514913B (en) * | 2021-07-12 | 2023-09-22 | 清华大学深圳国际研究生院 | Preparation method of large-area grating |
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|---|---|
| CN109521655B (en) | 2020-10-09 |
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