CN109494563A - The laser light source of DOE optics coherence tomography based on annular chamber active light feedback - Google Patents
The laser light source of DOE optics coherence tomography based on annular chamber active light feedback Download PDFInfo
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- CN109494563A CN109494563A CN201811530084.4A CN201811530084A CN109494563A CN 109494563 A CN109494563 A CN 109494563A CN 201811530084 A CN201811530084 A CN 201811530084A CN 109494563 A CN109494563 A CN 109494563A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/1305—Feedback control systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4266—Diffraction theory; Mathematical models
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/083—Ring lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
- H01S3/10015—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by monitoring or controlling, e.g. attenuating, the input signal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
- H01S3/10023—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by functional association of additional optical elements, e.g. filters, gratings, reflectors
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Abstract
A kind of laser light source of the diffraction optical element optics coherence tomography based on annular chamber active light feedback mainly includes the passive annular chamber of the full light feedback twin-stage active control optical circuit different with tuning range.It is characterized in that the optical fiber laser of multichannel narrow linewidth being combined into a branch of superlaser space output in such a way that full light feeds back aperture optics coherence tomography altogether, the feedback loop that active control is added can ensure that initial main oscillations seed wavelength is consistent with the feedback central wavelength of cavity mold, further narrow the output linewidth of synthetic laser, reduce phase noise, interference of the external environment to annular chamber is reduced, the stabilization of locking phase effect is maintained.The present invention overcomes traditional passive optics coherence tomography system synthesis low efficiency, phase noises by force, the feature of locking phase effect difference, the stability and safety of synthesis system can be maintained, facilitate the scale of array extending again, the brightness for improving narrow linewidth output laser is the effective technical way realizing optical fiber laser and extending to the more preferable beam quality of higher power.
Description
Technical field
The present invention relates to laser light source, especially a kind of diffraction optical element (DOE) based on annular chamber active light feedback
The laser light source of optics coherence tomography.
Background technique
Optical fiber laser is with simple and compact for structure, heat management is convenient, energy conversion efficiency is high, stable and reliable for performance and light
The good advantage of beam quality is widely applied in high power laser light technical field.The output work of single mode fiber laser at present
Rate has broken through myriawatt grade.However, by fuel factor, nonlinear effect, mode be unstable and the limit of the factors such as facet damage
System, there are theoretical limits for the output power of simple optical fiber laser.
In order to improve narrow linewidth low phase noise fiber laser light source output power, coherent beam synthesis be suggested and
Further investigation becomes one of current most important technological means.The technology passes through the low phase noise by multichannel based on MOPA structure
Optical-fiber laser carry out conjunction beam, and the phase of each sub- road combined laser is controlled, is obtained relevant with reaching PGC demodulation
Superposition, not only guarantee to export in this way laser have with optical characteristics similar in single laser, but also relevant conjunction can be effectively improved
Laser output power after.It is one of above-mentioned synthetic method that full light, which feeds back passive optics coherence tomography technology, such method without
Complicated phase lock condition is needed, fast response time, it is the hot spot of recent research that structure is simple and number scalability is strong.It should
Technology uses the ring-like cavity configuration of full light feedback, carries out Pattern Filter by single-mould fibre-optical wave filter, keeps same phase optical signal intracavitary
Loss is minimum, obtains the PGC demodulation of each road optical fiber laser by the Selecting phasing mode of such self-organizing, so that closing Shu Ji
The brightness of light is increased dramatically.
First technology " the full light of optical-fiber laser based on Darman raster feeds back passive coherently combined system CN103441419A "
In need that main oscillations is assisted to provide seed for amplifier, initial feedback light is provided, guarantees surprisingly to be blocked in feedback loop
Afterwards, amplifier is not by self-oscillatory harm.After beamlet array realizes PGC demodulation, wavelength locking is damaged minimum in annular chamber
Mode, the cavity mold of general PGC demodulation is different from seed wavelength, at this time assist main oscillations needs be turned off manually, to ensure annular
The wavelength for only having PGC demodulation in chamber exists, and improves the brightness and stability of far field output laser.But close auxiliary main oscillations
Fiber amplifier array is likely to cause there are security risk, i.e. feedback loop amplifier when by unexpected block loses kind
Son causes serious self-oscillation and damages amplifier.Therefore, the passive optics coherence tomography system output of full light feedback ring cavity is improved
The brightness of laser and the system safety of guard amplifier are at a pair of implacable contradiction.In addition, existing full light feedback ring
The chamber output bandwidth of laser, phase noise are high, locking phase effect is difficult to keep stable, seriously hinder high power and be total to aperture and are concerned with
The prospect of synthesized source subsequent expansion application.
Summary of the invention
The present invention proposes a kind of based on annular for the deficiency in the above-mentioned complete passive coherence synthesizing device of light feedback ring cavity
The laser light source of the diffraction optical element optics coherence tomography of chamber active light feedback.The passive annular chamber that the laser light source is fed back in full light
In joined the electro-optical feedback control means of active, by the collective effect of active control and passive light feedback system, coordinate and
Optimize the various performance parameters of double loop, to obtain stable locking phase effect, narrows the output linewidth of synthetic laser, reduce phase
Noise improves the brightness and stability of far field synthesis light.
Technical solution of the invention is as follows:
A kind of laser light source of the diffraction optical element optics coherence tomography based on annular chamber active light feedback, it is characterized in that,
Passive annular chamber and active photoelectric feedback loop including full light feedback,
The passive annular chamber of the full light feedback includes sequentially connected 1 × N fiber optic splitter, 1 × N fiber beam splitting
Incident light is divided into the road N by device, is converged to through the road N fiber amplifier, corresponding output end cap array, the first collimation fourier lense
DOE element, then it is divided into the first transmitted light and the first reflected light through the first plane beam splitter, it is that power is visited in the first reflection light direction
Device is surveyed, is successively the second imaging fourier lense, the second plane beam splitter, the second plane beam splitter in the first transmission light direction
Input light is divided into the second transmitted light and the second reflected light, is CCD camera in the second transmission light direction, in second reflection
Light direction is successively through single mode feedback optical fiber, feedback light optical fiber prime amplifier, fiber coupler, seed light optical fiber prime amplifier and institute
The input terminal for the 1 × N fiber optic splitter stated is connected, and the output end cap array level height needs are consistent, optical axis phase
Mutually parallel, the direction angle of deviation in far field will be controlled in differential of the arc measurement level, and vertical direction meets following item away from the interval D of central optical axis
Part:
D=ftan θ
In formula, f is the focal length of the first collimation fourier lense, θ be the end cap correspond to the order of diffraction and 0 grade of center diffraction light it
Between angle, the described first collimation effective clear aperture of fourier lense must be considerably larger than output end cap array diverging hot spot face
Profile, and export the front and back focal point that end cap array and DOE element are respectively placed in the fourier lense, together constitute 2f's
Imaging system；
The active photoelectric feedback loop includes the seed source of tunable wave length, the seed source of the tunable wave length it is defeated
Outlet is connected with the input terminal of the fiber coupler, and the second output terminal of the fiber coupler meets photoelectric probe PD,
The output end of photoelectric probe PD is connected with PID control system, the PID control system wide scope through respective bandwidth, low respectively
The thermal tuning of bandwidth and close limit, high bandwidth electric current tuning and the seed source of the tunable wave length control terminal phase
Even.
The DOE element is one-dimensional diffraction element or two-dimensional diffraction element.
The seed source of the tunable wave length, tuning range is up to nanometer scale.
The road the N fiber amplifier can be single-stage amplification, be also possible to multi-stage cascade amplification.
The described single mode feedback optical fiber is single mode passive fiber, for the coupling efficiency for ensuring feedback light, needs to be placed on the
The focal point of two imaging fourier lenses.
Pass through the thermal tuning of the wide scope, low bandwidth of the respective bandwidth and the electric current tuning of close limit, high bandwidth
The optical maser wavelength of real-time online feedback tuning seed source realizes the main oscillations seed wavelength and full light feedback ring cavity initially protected
In resonance cavity mold central wavelength it is consistent.
The positional relationship of above-mentioned component is as follows: 1 × N fiber optic splitter divides incident seed laser equal proportion
The road N fiber amplifier array is injected after cutting.The end cap array and DOE element of output are respectively placed in first collimation fourier lense
Front and back focal point, together constitute the imaging system of 2f, the fourier lense is to the laser beamlets of all incidences reality simultaneously
Existing auto-collimation and the function of adjusting optical path, the road Shi Ge laser focus on the same position of DOE element surface with corresponding angle of diffraction
It sets.Transmissive parallel light through DOE synthin is divided by the first plate plane beam splitter, and the main energy of reflection direction is used to
Power detection is carried out, and the directional light of transmission direction is distinguished by second imaging fourier lense and the second plate plane beam splitter
Carry out the on-line monitoring of Single-Mode Fiber Coupling and beam quality.The signal light for being coupled into single mode feedback optical fiber is put using predispersed fiber
Big device carries out power ascension, with initial seed light by fiber coupler together be injected into followed by sequentially connected optical fiber
In prime amplifier, as common initial signal light.
The photoelectric feedback loop of active is first by the central wavelength coarse tuning of tunable wave length seed source to feedback ring cavity
It damages at the smallest mode, then leads the beat signal of loop cavity oscillation mould and seed laser from the vacant end of fiber coupler
Out, PID control system is entered after photoelectric probe PD reception, feedback signal is used as after amplification filtering, for driving seed source to swash
The speed tuner module of light device, finally by the wavelength real-time lock of seed source in the central wavelength for feeding back cavity mold.
The seed source of the tunable wave length, tuning range can carry out wide scope, low strap up to nanometer scale simultaneously
The electric current tuning of wide thermal tuning and close limit, high bandwidth.
The beneficial effects of the present invention are:
The present invention combines the phase-lock mode of passive full light feedback with the mode that active frequency controls, and utilizes ring-like chamber
Light feeds back biggish dynamic range and quickly response, and the phase noise of synthetic laser is inhibited in advance, is then used again
The high-precision control of Active phase, further suppresses laser phase noise, to obtain more stable laser phase-locked effect
Fruit.
By the optics coherence tomography mode of this novel annular chamber active light feedback, main oscillations seed source be not turned off manually
In the case where, it can reasonably guarantee the stable operation of annular chamber, and the output performance of optics coherence tomography laser is unaffected,
Efficiently solve the luminance raising of the passive optics coherence tomography system output laser of full light feedback ring cavity and the system of guard amplifier
Contradiction between safety.
Optics coherence tomography based on DOE element can effectively solve occur multistage secondary lobe in point aperture optics coherence tomography, synthesis effect
The low problem of rate finally obtains the single beam output of nearly diffraction limit in far field.The diffraction efficiency of DOE element be up to 95% with
On, and the more DOE element of beamlet can be synthesized, diffraction efficiency is higher, convenient for further promoting combined coefficient and total output work
Rate.
Detailed description of the invention
Fig. 1 is the schematic diagram for the DOE optics coherence tomography technical solution fed back the present invention is based on annular chamber active light
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawing, but protection model of the invention should not be limited with this
It encloses.
Fig. 1 is the schematic diagram of the DOE optics coherence tomography light source fed back the present invention is based on annular chamber active light.As seen from the figure, originally
The laser light source for the diffraction optical element optics coherence tomography that invention is fed back based on annular chamber active light, including full light feedback by rotating ring
Shape chamber 1 and active photoelectric feedback loop 2,
The passive annular chamber 1 of the full light feedback includes sequentially connected 1 × N fiber optic splitter 101,1 × N optical fiber
Incident light is divided into the road N by beam splitter 101, collimates Fu through the road N fiber amplifier 102, corresponding output end cap array 103, first
In leaf lens 104 converge to DOE element 105, then divide through the first plane beam splitter 106 for the first transmitted light and the first reflected light,
First reflection light direction be power detector 107, first transmission light direction be successively the second imaging fourier lense 108,
Input light is divided into the second transmitted light and the second reflected light by the second plane beam splitter 109, the second plane beam splitter 109,
Two transmission light directions are CCD cameras 110, successively feed back optical fiber 111, feedback light light through single mode in the second reflection light direction
Fine prime amplifier 112, fiber coupler 113, seed light optical fiber prime amplifier 114 and 1 × N fiber optic splitter 101
Input terminal is connected, and 103 level height of the output end cap array needs are consistent, and optical axis is parallel to each other, the direction in far field
The angle of deviation will be controlled in differential of the arc measurement level, and vertical direction meets following condition away from the interval D of central optical axis:
D=ftan θ
In formula, f is the focal length of the first collimation fourier lense 104, and θ is that the end cap corresponds to the order of diffraction and 0 grade of center diffraction
Angle between light, the first collimation effective clear aperture of fourier lense 104 must be considerably larger than output end cap array 103
The profile in hot spot face is dissipated, and output end cap array 103 and DOE element 105 are respectively placed in the front and back focus of the fourier lense
Place, together constitutes the imaging system of 2f；
The active photoelectric feedback loop 2 includes the seed source 201 of tunable wave length, the seed source of the tunable wave length
201 output end is connected with the input terminal of the fiber coupler 113, the second output terminal of the fiber coupler 113
Photoelectric probe PD205 is met, the output end of photoelectric probe PD205 is connected with PID control system 204, the PID control system 204
Respectively the wide scope through respective bandwidth, the thermal tuning 202 of low bandwidth and close limit, high bandwidth electric current tuning 203 with it is described
Tunable wave length seed source 201 control terminal be connected.
The positional relationship of above-mentioned component is as follows: 1 × N fiber optic splitter 101 compares incident seed laser etc.
The road N fiber amplifier array 102 is injected after example segmentation.The end cap array 103 and DOE element 105 of output are respectively placed in the first standard
The front and back focal point of straight fourier lense 104, together constitutes the imaging system of 2f, the fourier lense 104 is to all incidences
Laser beamlets realize auto-collimation simultaneously and adjust the function of optical path, the road Shi Ge laser focuses on corresponding angle of diffraction
The same position on 105 surface of DOE element.Through DOE element 105 synthesize transmissive parallel light by the first plane beam splitter 106 into
Row light splitting, the main energy of reflection direction is used to carry out power detector 107, and the directional light of transmission direction is by second imaging Fu
In leaf lens 108 and the second plane beam splitter 109 carry out the on-line monitoring of Single-Mode Fiber Coupling and beam quality respectively.It is coupled into
The signal light for entering single mode feedback optical fiber 111 carries out power ascension using optical fiber prime amplifier 112, passes through light with initial seed light
Fine coupler 113 is injected into together in followed by sequentially connected optical fiber prime amplifier 114, as common initial signal
Light.
The photoelectric feedback loop 2 of active is first by the central wavelength coarse tuning of the seed source of tunable wave length 201 to feedback
Annular chamber damages at the smallest mode, then by the beat signal of loop cavity oscillation mould and seed laser from fiber coupler 113
Vacant end export enters PID control system 204 after photoelectric probe PD205 reception, is used as feedback signal after amplification filtering, uses
In the different tuner module of driving seed source laser, mainly include wide scope, the thermal tuning 202 of low bandwidth and close limit,
The electric current tuning 203 of high bandwidth, finally by the wavelength real-time lock of seed source in the central wavelength for feeding back cavity mold.
It is surveyed in the laser output power combination CCD camera 110 that the reflector port 107 of the first plane beam splitter 106 monitors
The beam quality measured derives the brightness that synthetic laser is calculated, and output laser is bright before and after comparative analysis active control
Degree variation.
The level height needs of the output end cap array 103 are consistent, and optical axis is parallel to each other, and the direction in far field is inclined
Declinate will be controlled in differential of the arc measurement level, and vertical direction meets following condition away from the interval D of central optical axis:
D=ftan θ
In formula, f is the focal length of first collimation fourier lense 104, and θ corresponds to the order of diffraction for the end cap and spreads out for 0 grade with center
Penetrate the angle between light.
The feedback optical fiber 111 is 9 μm of fibre core, 125 μm of inner cladding diameter of double clad single mode passive fiber, to ensure
The coupling efficiency of feedback light needs to be placed on the focal point of second imaging fourier lense.
The seed source 201 of the tunable wave length can carry out respectively temperature tune slowly 202 and electric current tune 203 fastly, and
Convenient for being directly connected with the input terminal of fiber coupler 113.
The first plane beam splitter 106 and 109 front surface of the second plane beam splitter is coated with to laser reflectivity 99%
High reflectance film layer, rear surface is coated with antireflective coating, places with 45 ° of optical axis included angle.
Experiment shows that the optical fiber laser of multichannel narrow linewidth is fed back the side of aperture optics coherence tomography altogether by the present invention by full light
Formula is combined into a branch of superlaser space output, and the feedback loop that active control is added may insure initial main oscillations seed wavelength
It is consistent with the feedback central wavelength of cavity mold, the output linewidth of synthetic laser is further narrowed, phase noise is reduced, is reduced extraneous
Interference of the environment to annular chamber maintains the stabilization of locking phase effect.The present invention overcomes traditional passive optics coherence tomography system synthesis to imitate
Rate is low, phase noise is strong, the feature of locking phase effect difference, can maintain synthesis system stability and safety and
The scale of array extending improves the brightness of narrow linewidth output laser, is to realize optical fiber laser to the more preferable light beam matter of higher power
Measure the effective technical way of extension.
Claims (6)
1. a kind of laser light source of the diffraction optical element optics coherence tomography based on annular chamber active light feedback, which is characterized in that packet
The passive annular chamber (1) and active photoelectric feedback loop (2) of full light feedback are included,
The passive annular chamber (1) of the full light feedback includes sequentially connected 1 × N fiber optic splitter (101), 1 × N optical fiber
Incident light is divided into the road N by beam splitter (101), through the road N fiber amplifier (102), corresponding output end cap array (103), first
Collimation fourier lense (104) converge to DOE element (105), then through the first plane beam splitter (106) be divided into the first transmitted light and
First reflected light is power detector (107) in the first reflection light direction, is successively second imaging Fu in the first transmission light direction
In leaf lens (108), the second plane beam splitter (109), which is divided into the second transmitted light for input light
It is CCD camera (110) in the second transmission light direction with the second reflected light, in the second reflection light direction successively through single mode
Feed back optical fiber (111), feedback light optical fiber prime amplifier (112), fiber coupler (113), seed light optical fiber prime amplifier (114)
It is connected with the input terminal of 1 × N fiber optic splitter (101), described output end cap array (103) level height needs to protect
It holds unanimously, optical axis is parallel to each other, and the direction angle of deviation in far field will be controlled in differential of the arc measurement level, and vertical direction is away between central optical axis
Meet following condition every D:
D=ftan θ
In formula, f is the focal length of the first collimation fourier lense (104), and θ is that the end cap corresponds to the order of diffraction and 0 grade of center diffraction light
Between angle, described first collimation fourier lense (104) effectively clear aperture must be considerably larger than output end cap array
(103) profile in hot spot face is dissipated, and output end cap array (103) and DOE element (105) are respectively placed in the fourier lense
Front and back focal point together constitutes the imaging system of 2f；
The active photoelectric feedback loop (2) includes the seed source (201) of tunable wave length, the seed source of the tunable wave length
(201) output end is connected with the input terminal of the fiber coupler (113), and the second of the fiber coupler (113)
Output termination photoelectric probe PD (205), the output end of photoelectric probe PD (205) are connected with PID control system (204), the PID
The electricity of control system (204) thermal tuning (202) and close limit, high bandwidth of the wide scope through respective bandwidth, low bandwidth respectively
Stream tuning (203) is connected with the control terminal of the seed source (201) of the tunable wave length.
2. laser light source according to claim 1, which is characterized in that the DOE element (105) is one-dimensional diffraction member
Part or two-dimensional diffraction element.
3. laser light source according to claim 1, which is characterized in that the seed source (201) of the tunable wave length is adjusted
Humorous range is up to nanometer scale.
4. laser light source according to claim 1, which is characterized in that described single mode feedback optical fiber (111) be single mode without
Source optical fiber, one end are placed in the focal point of second imaging fourier lense (108).
5. laser light source according to claim 1, which is characterized in that the road the N fiber amplifier is single-stage amplification, or
Multi-stage cascade amplification.
6. laser light source according to claim 1 according to any one of claims 1 to 5, which is characterized in that pass through
The electric current tuning (203) of the thermal tuning (202) of the wide scope, low bandwidth of the respective bandwidth and close limit, high bandwidth is real
When online feedback tuning seed (201) optical maser wavelength, realize the main oscillations seed wavelength initially protected and full light feedback ring
The central wavelength of resonance cavity mold in chamber is consistent.
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| CN111694162B (en) * | 2020-06-22 | 2022-09-13 | 中国科学院西安光学精密机械研究所 | Spectrum synthesis method and device |
| CN113823996A (en) * | 2021-07-28 | 2021-12-21 | 中国工程物理研究院应用电子学研究所 | Method and system for realizing high-power near-diffraction limit semiconductor laser |
| CN113823996B (en) * | 2021-07-28 | 2023-01-03 | 中国工程物理研究院应用电子学研究所 | Method and system for realizing high-power near-diffraction limit semiconductor laser |
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