CN109426067A - Optics closes on modified modeling method and the figure Weight generation method for it - Google Patents
Optics closes on modified modeling method and the figure Weight generation method for it Download PDFInfo
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- CN109426067A CN109426067A CN201710757094.0A CN201710757094A CN109426067A CN 109426067 A CN109426067 A CN 109426067A CN 201710757094 A CN201710757094 A CN 201710757094A CN 109426067 A CN109426067 A CN 109426067A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of optics and closes on modified modeling method and the figure Weight generation method for it.It includes: based on the respective multiple measured values building measurement matrixes of various amounts mapping shape in measurement file that the optics, which closes on modified modeling method,；Feature decomposition is carried out to obtain characteristic value to the measurement matrix；And it is generated based on the characteristic value and is directed to the respective weight of various amounts mapping shape.The figure Weight generation method provided by the present invention for closing on amendment modeling for optics is arranged by quantitative mode measures the various weights for measuring figure in file, compared with the mode of traditional qualitative setting weight, it can be closer to optimal weight, it is substantially reduced so that closing on the number of iterations needed for modified modeling process based on its optics, so as to shorten the modeling time, the accuracy of modeling efficiency and model is improved.
Description
Technical field
The present invention relates to optics to close on amendment (Optical Proximity Correction, OPC) technical field, specifically
For be related to a kind of optics and close on modified modeling method and the figure Weight generation method for it.
Background technique
As the complexity of integrated circuit is higher and higher, characteristic size also becomes smaller and smaller, this to model OPC
The specification requirement of accuracy be also increasingly stringenter.A crucial step is the measurement text using Weight in OPC modeling
Part (gauge file) optimizes OPC model.
In traditional process, in the measurement file of Weight it is various measure figures weights be based on qualitative method come
It is arranged, that is to say and based on engineer the classification of figure and the degree of understanding and engineering experience are arranged.In order to realize compared with
Excellent weight setting needs the process to " model optimization-verifying-weight adjustment " to carry out the iteration of a large amount of numbers, this is very
It is time-consuming and inefficient.
Summary of the invention
In view of the above-mentioned problems, on the one hand, the present invention provides a kind of figure weight generation for closing on amendment modeling for optics
Method, which comprises construct measurement matrix based on the respective multiple measured values of various amounts mapping shape in file are measured；To institute
It states measurement matrix and carries out feature decomposition to obtain characteristic value；And it is generated based on the characteristic value and is directed to the various amounts mapping shape
Respective weight.
In one embodiment of the invention, described based on the respective multiple measured values of various amounts mapping shape in measurement file
Building measurement matrix includes: the selection n kind figure from the measurement file, and wherein n is the natural number greater than 1；For the n kind
Every kind of figure in figure selects n measured value；And it is based on selected n2A measured value constructs square matrix using as the amount
Survey matrix.
In one embodiment of the invention, described to be based on selected n2A measured value constructs square matrix using as the amount
Surveying matrix includes: to be filled into n measured value of every kind of figure in matrix in rows.
In one embodiment of the invention, described to be generated for the various amounts mapping shape respectively based on the characteristic value
If weight include: characteristic value generated be real number, directly using the characteristic value as the weight；If generated
Characteristic value be plural number, then take the real or to the plural modulus using as the weight.
In one embodiment of the invention, the method also includes: qualitative fine tuning is carried out to the weight as needed,
To generate with realizing fixed guantity combining with fixed quality for the respective optimal weights of various amounts mapping shape.
In one embodiment of the invention, the qualitative fine tuning includes: based on the type for measuring figure, design rule
Then and in engineering experience this three at least one of carry out weight fine tuning.
In one embodiment of the invention, the various amounts mapping shape includes various sizes of same category of measurement figure
Shape and/or different classes of measurement figure.
In one embodiment of the invention, the figure that measures is to test the figure designed on light shield, every kind of measurement figure
The corresponding measured value of shape is the measured value on this kind measurement graph exposure to wafer.
In one embodiment of the invention, the measurement figure includes across pitch figure and/or X-Y scheme.
On the other hand, the present invention provides a kind of optics and closes on modified modeling method, which comprises is based on Weight
Measurement file optimization optics close on correction model, until the model meets specification, wherein the measurement file of the Weight
To measure the measurement file comprising the various respective weights for measuring figure in file, the various respective weights for measuring figure are
It is generated based on the figure Weight generation method described in any of the above embodiments for closing on amendment modeling for optics.
The figure Weight generation method provided by the present invention for closing on amendment modeling for optics is set by quantitative mode
It sets and measures the various weights for measuring figure in file, it, can be closer optimal compared with the mode of traditional qualitative setting weight
Weight substantially reduced so that closing on the number of iterations needed for modified modeling process based on its optics, to contract
The short modeling time improves the accuracy of modeling efficiency and model.
Detailed description of the invention
Following drawings of the invention is incorporated herein as part of the present invention for the purpose of understanding the present invention.Shown in the drawings of this hair
Bright embodiment and its description, principle used to explain the present invention.
In attached drawing:
Fig. 1 shows the signal of the figure Weight generation method according to an embodiment of the present invention that amendment modeling is closed on for optics
Property flow chart；
Fig. 2A-Fig. 2 E is shown to be generated based on the figure weight according to an embodiment of the present invention for closing on amendment modeling for optics
The comparison of method and the error of fitting based on qualitative weight setting method；And
Fig. 3 shows the schematic flow chart that optics according to an embodiment of the present invention closes on modified modeling method.
Specific embodiment
In the following description, a large amount of concrete details are given so as to provide a more thorough understanding of the present invention.So
And it is obvious to the skilled person that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid confusion with the present invention, for some technical characteristics well known in the art not into
Row description.
It should be understood that the present invention can be implemented in different forms, and should not be construed as being limited to propose here
Embodiment.On the contrary, provide these embodiments will make it is open thoroughly and completely, and will fully convey the scope of the invention to
Those skilled in the art.
The purpose of term as used herein is only that description specific embodiment and not as limitation of the invention.Make herein
Used time, " one " of singular, "one" and " described/should " be also intended to include plural form, unless the context clearly indicates separately
Outer mode.It is also to be understood that term " composition " and/or " comprising ", when being used in this specification, determines the feature, whole
The presence of number, step, operations, elements, and/or components, but be not excluded for one or more other features, integer, step, operation,
The presence or addition of component, assembly unit and/or group.Herein in use, term "and/or" includes any of related listed item and institute
There is combination.
In order to thoroughly understand the present invention, detailed step and detailed structure will be proposed in following description, so as to
Illustrate technical solution proposed by the present invention.Presently preferred embodiments of the present invention is described in detail as follows, however in addition to these detailed descriptions
Outside, the present invention can also have other embodiments.
As previously mentioned, characteristic size it is continuous reduce so that for OPC modeling accuracy specification requirement also increasingly
Strictly.For example, having for 14 nanometers (nm) and semiconductor fabrication process below for the OPC accuracy modeled very strict
Specification requirement.Therefore, for OPC modeling, more stringent requirements are proposed.
A crucial step is to optimize OPC model using the measurement file of Weight in OPC modeling.Wherein, cum rights
The measurement file of weight is to measure the various measurement files for measuring figure and being provided with corresponding weight in file.Why to be arranged
The various weights for measuring figure, be because the objective function of OPC modeling is: (wherein CDm indicates to measure delt (CDm-CDs) -> 0
Wafer size, CDs indicates the size of simulation fitting), and generally, due to some factors, measure thousands of amounts in file
The degree of convergence of measuring point is inconsistent, and certain figures also have model certain priority.Therefore, the purpose of weight is set
The specific gravity of the high figure of priority in a model is mainly improved, convergence rate is optimized.And it is various to use qualitative method to be arranged
The iteration that the weight of figure needs the process to " model optimization-verifying-weight adjusts " to carry out a large amount of numbers is measured, it is very time-consuming
With it is inefficient.
Therefore, the figure Weight generation method that amendment models is closed on for optics the present invention provides a kind of, below with reference to
Attached drawing is described in detail method provided by the present invention referring to specific embodiment.
Fig. 1 shows the signal of the figure Weight generation method according to an embodiment of the present invention that amendment modeling is closed on for optics
Property flow chart.As shown in Figure 1, the figure Weight generation method 100 for optics to close on amendment modeling includes the following steps:
In step S110, measurement matrix is constructed based on the respective multiple measured values of various amounts mapping shape in file are measured.
In an embodiment of the present invention, measuring file can be the relevant information comprising a series of measuring points (gauge)
File.Wherein, measuring point can be understood as a vector, to indicate the position measured.For example, one line width of amount, this vector
Beginning and end need across this line width.In OPC modeling process, software is by reading each measuring point, so that it may right
Figure is positioned and is simulated.
In measuring file, each measuring point may include the set of one group of measurement figure, and measure figure with the group
The set of corresponding measured value.The relevant information for measuring and including in file is understood below with reference to table 1.
Table 1
| Gauge ID | Gauge title | Measured value | Weight |
| 1 | {G1} | {M1} | W1 |
| 2 | {G2} | {M2} | W2 |
| 3 | {G3} | {M3} | W3 |
| 4 | {G4} | {M4} | W4 |
| 5 | {G5} | {M5} | W5 |
| 6 | {G6} | {M6} | W6 |
| 7 | {G7} | {M7} | W7 |
| 8 | {G8} | {M8} | W8 |
| … | … | … | … |
| … | … | … | … |
| n | {Gn} | {Mn} | Wn |
As shown in Table 1, each measuring point may include the set { Gn } of one group of measurement figure, and measures and scheme with the group
The set { Mn } of the corresponding measured value of shape { Gn }, wherein n is the natural number greater than 1.{ Gn } can indicate one group of given figure
Shape type, across pitch (through pitch), X-Y scheme etc..Correspondingly, { Mn } can indicate survey corresponding with { Gn }
The combination of magnitude.Here, the pitch in through pitch can be understood as pitch=line+space (wherein line be
Line width, space are the distance between line width), the width that through pitch can be understood as line (or space) is fixed, and
The array that space (or line) successively changes.
In an embodiment of the present invention, measuring figure can be various sizes of same category of measurement figure.For example,
{ G1 } can indicate the set of the through pitch having a size of 20nm line, and { G2 } can be indicated having a size of 80nm
The set of the through pitch of line.In addition, measuring figure may be different classes of measurement figure.
In an embodiment of the present invention, measuring figure can be the figure designed on test light cover, every kind of measurement figure pair
The measured value answered is the measured value on this kind measurement graph exposure to wafer.
With continued reference to table 1, for every kind of measurement figure { Gn }, table 1 also shows its corresponding weight Wn, these weighted values
What the figure Weight generation method 100 as according to an embodiment of the present invention for closing on amendment modeling for optics to be generated, slightly
After will be described.
It now continues with reference to Fig. 1, in an embodiment of the present invention, step S110 is described a variety of in file based on measuring
Measuring the step of respective multiple measured values of figure construct measurement matrix may further include: n kind is selected in file from measuring
Figure, wherein n is the natural number greater than 1；For every kind of figure in the n kind figure, n measured value is selected；And it is based on
Selected n2A measured value constructs square matrix using as the measurement matrix.For example, constructed measurement matrix M can be such as following formula
(1) shown in:
Wherein, M1~Mn indicates that the type of gauge, such as M1 can indicate a throughpitch.M11~M1n table
Show n measured value in this through pitch of M1.It is the n measured value by every kind of figure with capable shape in formula (1)
Formula is filled into matrix, this is merely exemplary.In other examples, n measured value of every kind of figure can also be arranged
Form is filled into matrix.
In step S120, feature decomposition is carried out to obtain characteristic value to the measurement matrix.
With continued reference to above example, feature decomposition can be carried out to measurement matrix M constructed in step s 110, such as
Represented by following formula (2) and formula (3):
Mx=λ x (2)
λ=diag (λ1,λ2,...,λn) (3)
Wherein, x indicates feature vector, and λ indicates characteristic value.Formula (3) indicates the symmetrical matrix that characteristic value indicates.Formula (2) can
To be interpreted as the linear transformation that M acts on feature vector x, the matrix for being equivalent to formula (3) expression acts on the linear transformation of x.Often
One λ value is considered as corresponding to the action intensity of vector in M.
In step S130, is generated based on the characteristic value and be directed to the respective weight of various amounts mapping shape.
It in an embodiment of the present invention, can be directly by characteristic value generated if characteristic value generated is real number
As the respective weight of various amounts mapping shape.If characteristic value generated is plural number, the real can be taken
Or to the plural modulus using as the respective weight of various amounts mapping shape.
In an embodiment of the present invention, since typical figure (i.e. various measurement figures) is placed on a linear sky jointly
Between (i.e. measurement matrix) is inner measures, make to seem incoherent data so originally and generate some degrees of association, and the characteristic quantity decomposed
The gross feature in modeling data Linear Transformation is represented to a certain degree, therefore can be with reference to the quantization number of initial weight the most
Value, because decomposing the vibration (real part) and rotation (imaginary part) of the obtained linear transformation of the list of feature values.Therefore, this hair
Measurement can be arranged by quantitative mode in the figure Weight generation method 100 for closing on amendment modeling for optics provided by bright
The various weights for measuring figure in file.
In addition, in a further embodiment, the figure Weight generation method 100 for closing on amendment modeling for optics may be used also
To include the following steps (not shown in FIG. 1): qualitative fine tuning is carried out to the weight as needed, with realize it is quantitative with it is qualitative
It generates in combination and is directed to the respective optimal weights of various amounts mapping shape.Illustratively, qualitative fine tuning may include: to be based on
At least one in this three of type, design rule and the engineering experience of the measurement figure carries out weight fine tuning.
Based on the aforementioned weight quantitatively generated, in conjunction with qualitative fine tuning, the weighted value obtained in this way can be than only with qualitative
Method closer to " optimal " weight be arranged.This is because the process usually modeled is needed by a series of iterative cycles
More satisfactory model result can just be obtained.Each iterative cycles mainly need to finely tune weight, the model finally optimized corresponding one
The gauge file of a Weight close to optimization.In practice, iterative cycles often up to hundreds of time, it is few then also need to count
Ten times.If weight is arranged only with qualitative method, it is associated with since every group of data in gauge file are seemed without what,
Therefore mainly engineer according to the classification of figure and the degree of understanding (for example can simply be divided into one-dimensional, X-Y scheme etc.) and
Engineering experience setting initial value starts operation, has certain deviation with the weighted value of " optimal ", for example one-dimensional or two-dimensional figure is also
It needs further to break up, needs iteration convergence.And the figure weight for closing on amendment modeling provided by the present invention for optics generates
Quantization method is added in initial weight setting in method, closer to optimal setting, it is possible to reduce iterative cycles number shortens modeling
Time.
The figure power that amendment modeling is closed on provided by the present invention for optics is illustrated by way of example referring to Fig. 2A-Fig. 2 E
Re-generate the benefit of method.
It is to be with 14 nanometers FIN layers (including the light shield of fin field effect pipe) in the example shown in Fig. 2A-Fig. 2 E
Example, it is assumed that 5 groups of selection typically measures figure (respectively G1, G2, G3, G4 and G5) and constructs 5 × 5 matrixes, is based on feature decomposition
Obtained characteristic value, setting are respectively (1,1,0.7,0.2,0.1) for the initial weight value of (G1, G2, G3, G4, G5).It is passing through
After crossing 1 iteration, the respective error of fitting of G1, G2, G3, G4 and G5 is shown respectively in Fig. 2A, 2B, 2C, 2D and 2E
In the schematic diagram formed with small diamond shape.And the schematic diagram formed with small square in Fig. 2A, 2B, 2C, 2D and 2E indicates only
It is set the initial weight value of (G1, G2, G3, G4, G5) to after (1,1,1,0.5,0.5) by 50 iteration using qualitative method
The result of the respective error of fitting of G1, G2, G3, G4 and G5 afterwards.
It can be seen that from Fig. 2A-Fig. 2 E using the figure according to an embodiment of the present invention for closing on amendment modeling for optics
Initial power is arranged with only with qualitative method in the error of fitting after 1 iteration in the initial weight that Weight generation method generates
The error of fitting focused on after 50 iteration is very close.It is obvious that obtain ideal model, use is real according to the present invention
The figure Weight generation method for closing on amendment modeling for optics for applying example can substantially reduce the number of iteration.
Based on above description, the figure Weight generation method provided by the present invention for closing on amendment modeling for optics is logical
It crosses quantitative mode and the weights for measuring various measurement figures in file is set, compared with the mode of traditional qualitative setting weight,
It can be closer to optimal weight, so that it is aobvious to close on the number of iterations needed for modified modeling process based on its optics
It writes and reduces, so as to shorten the modeling time, improve the accuracy of modeling efficiency and model.
According to another aspect of the present invention, it provides a kind of optics and closes on modified modeling method, which comprises base
Correction model is closed in the measurement file optimization optics of Weight, until the model meets specification, wherein the Weight
Measure file be measure file in comprising it is various measure figures respective weights measurement file, it is described it is various measurement figures it is each
It from weight is generated based on the figure Weight generation method recited above for closing on amendment modeling for optics.Below with reference to Fig. 3
It further describes optics according to an embodiment of the present invention and closes on modified modeling method.
Fig. 3 shows the schematic flow chart that optics according to an embodiment of the present invention closes on modified modeling method 300.Such as
Shown in Fig. 3, optics closes on modified modeling method 300 and includes the following steps:
In step S310, optimize optical model.
In step S320, OPC model is optimized using the method for fixed guantity combining with fixed quality.
In step S330, verify whether model meets specification, if it is, continuing to step S340；If it is not, then
Return to step S320.
In step S340, output model.
Wherein, step S310, step S330 and step S340 is step familiar to those skilled in the art in OPC modeling
Suddenly, details are not described herein again.Quantitative approach in step S320 is described above according to an embodiment of the present invention for light
The figure Weight generation method for closing on amendment modeling is learned, qualitative method is mentioned-above qualitative method (certainly, such as preceding institute
It states, the figure Weight generation method according to an embodiment of the present invention for closing on amendment modeling for optics also may include quantitative and fixed
Property the step of combining), those of ordinary skill in the art are referred to describe above in conjunction with Fig. 1 according to an embodiment of the present invention
The figure Weight generation method of amendment modeling is closed on for optics to understand the operation of step S320, for sake of simplicity, herein no longer
It repeats.In addition, step S320 can also optimize OPC model only with quantitative method.
Based on above description, optics according to an embodiment of the present invention close on modified modeling method by it is quantitative (or
Fixed guantity combining with fixed quality) mode be arranged measure file in it is various measure figures weights, with traditional qualitative setting weight
Mode compare, can closer to optimal weight, so that the number of iterations needed for modeling process substantially reduces, thus
Shorten the modeling time, improves the accuracy of modeling efficiency and model.
Although describing above example embodiment by reference to attached drawing, it should be understood that above example embodiment are only example
Property, and be not intended to limit the scope of the invention to this.Those of ordinary skill in the art can carry out various change wherein
Become and modify, is made without departing from the scope of the present invention and spiritual.All such changes and modifications are intended to be included in appended right and want
It asks within required the scope of the present invention.
Those of ordinary skill in the art may be aware that list described in conjunction with the examples disclosed in the embodiments of the present disclosure
Member and algorithm steps can be realized with the combination of electronic hardware or computer software and electronic hardware.These functions are actually
It is implemented in hardware or software, the specific application and design constraint depending on technical solution.Professional technician
Each specific application can be used different methods to achieve the described function, but this realization is it is not considered that exceed
The scope of the present invention.
In the instructions provided here, numerous specific details are set forth.It is to be appreciated, however, that implementation of the invention
Example can be practiced without these specific details.In some instances, well known method, structure is not been shown in detail
And technology, so as not to obscure the understanding of this specification.
Similarly, it should be understood that in order to simplify the present invention and help to understand one or more of the various inventive aspects,
To in the description of exemplary embodiment of the present invention, each feature of the invention be grouped together into sometimes single embodiment, figure,
Or in descriptions thereof.However, the method for the invention should not be construed to reflect an intention that i.e. claimed
The present invention claims features more more than feature expressly recited in each claim.More precisely, such as corresponding power
As sharp claim reflects, inventive point is that the spy of all features less than some disclosed single embodiment can be used
Sign is to solve corresponding technical problem.Therefore, it then follows thus claims of specific embodiment are expressly incorporated in this specific
Embodiment, wherein each, the claims themselves are regarded as separate embodiments of the invention.
It will be understood to those skilled in the art that any combination pair can be used other than mutually exclusive between feature
All features disclosed in this specification (including adjoint claim, abstract and attached drawing) and so disclosed any method
Or all process or units of equipment are combined.Unless expressly stated otherwise, this specification (is wanted including adjoint right
Ask, make a summary and attached drawing) disclosed in each feature can be replaced with an alternative feature that provides the same, equivalent, or similar purpose.
In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other embodiments
In included certain features rather than other feature, but the combination of the feature of different embodiments mean it is of the invention
Within the scope of and form different embodiments.For example, in detail in the claims, embodiment claimed it is one of any
Can in any combination mode come using.
The above description is merely a specific embodiment or to the explanation of specific embodiment, protection of the invention
Range is not limited thereto, and anyone skilled in the art in the technical scope disclosed by the present invention, can be easily
Expect change or replacement, should be covered by the protection scope of the present invention.Protection scope of the present invention should be with claim
Subject to protection scope.
Claims (10)
1. a kind of figure Weight generation method for closing on amendment modeling for optics, which is characterized in that the described method includes:
Measurement matrix is constructed based on the respective multiple measured values of various amounts mapping shape in file are measured；
Feature decomposition is carried out to obtain characteristic value to the measurement matrix；And
It is generated based on the characteristic value and is directed to the respective weight of various amounts mapping shape.
2. the method according to claim 1, wherein described respective based on various amounts mapping shape in file is measured
Multiple measured values construct measurement matrixes
N kind figure is selected from the measurement file, wherein n is the natural number greater than 1；
For every kind of figure in the n kind figure, n measured value is selected；And
Based on selected n2A measured value constructs square matrix using as the measurement matrix.
3. according to the method described in claim 2, it is characterized in that, described be based on selected n2A measured value building square matrix with
Include: as the measurement matrix
N measured value of every kind of figure is filled into matrix in rows.
4. the method according to claim 1, wherein described generated based on the characteristic value is directed to the various amounts
The respective weight of mapping shape includes:
If characteristic value generated is real number, directly using the characteristic value as the weight；
If characteristic value generated is plural number, the real is taken or to the plural modulus using as the power
Weight.
5. the method according to claim 1, wherein the method also includes:
Qualitative fine tuning is carried out to the weight as needed, to generate with realizing fixed guantity combining with fixed quality for the various amounts
The respective optimal weights of mapping shape.
6. according to the method described in claim 5, it is characterized in that, the qualitative fine tuning includes: based on the measurement figure
At least one in this three of type, design rule and engineering experience carries out weight fine tuning.
7. the method according to claim 1, wherein the various amounts mapping shape includes various sizes of same class
Other measurement figure and/or different classes of measurement figure.
8. the method according to claim 1, wherein the figure that measures be the figure that designs on test light shield,
It is the measured value on this kind measurement graph exposure to wafer that every kind, which measures the corresponding measured value of figure,.
9. the method according to claim 1, wherein the measurement figure includes across pitch figure and/or two dimension
Figure.
10. a kind of optics closes on modified modeling method, which is characterized in that the described method includes:
Measurement file optimization optics based on Weight closes on correction model, until the model meets specification, wherein the band
The measurement file of weight is the measurement file measured comprising the various respective weights for measuring figure in file, the various measurement figures
The respective weight of shape is based on the figure weight life for closing on amendment modeling described in any one of claim 1-9 for optics
It is generated at method.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0895607A (en) * | 1994-09-21 | 1996-04-12 | Kobe Steel Ltd | Example base modeling method/device |
| US20090249261A1 (en) * | 2008-03-25 | 2009-10-01 | Hung-Eil Kim | Method and apparatus for optimizing an optical proximity correction model |
| US20100299379A1 (en) * | 2009-05-20 | 2010-11-25 | Mithun Das Gupta | Non-Negative Matrix Factorization as a Feature Selection Tool for Maximum Margin Classifiers |
| CN101996157A (en) * | 2010-10-23 | 2011-03-30 | 山东科技大学 | Multisource information fusion method in evidence high-conflict environment |
| CN102902154A (en) * | 2011-07-29 | 2013-01-30 | 上海华虹Nec电子有限公司 | Modeling method for optical proximity correction process model |
-
2017
- 2017-08-29 CN CN201710757094.0A patent/CN109426067B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0895607A (en) * | 1994-09-21 | 1996-04-12 | Kobe Steel Ltd | Example base modeling method/device |
| US20090249261A1 (en) * | 2008-03-25 | 2009-10-01 | Hung-Eil Kim | Method and apparatus for optimizing an optical proximity correction model |
| US20100299379A1 (en) * | 2009-05-20 | 2010-11-25 | Mithun Das Gupta | Non-Negative Matrix Factorization as a Feature Selection Tool for Maximum Margin Classifiers |
| CN101996157A (en) * | 2010-10-23 | 2011-03-30 | 山东科技大学 | Multisource information fusion method in evidence high-conflict environment |
| CN102902154A (en) * | 2011-07-29 | 2013-01-30 | 上海华虹Nec电子有限公司 | Modeling method for optical proximity correction process model |
Non-Patent Citations (1)
| Title |
|---|
| 李舰 肖凯 著: "《数据科学中的R语言》", 31 July 2015, 西安交通大学出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112633178A (en) * | 2020-12-24 | 2021-04-09 | 深圳集智数字科技有限公司 | Image identification method and device, storage medium and electronic equipment |
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| CN109426067B (en) | 2022-06-28 |
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