CN109409166B

CN109409166B - Sensor and manufacturing method thereof

Info

Publication number: CN109409166B
Application number: CN201710701245.0A
Authority: CN
Inventors: 张护继
Original assignee: Yili Technology Cayman Co Ltd
Current assignee: Yili Technology Cayman Co ltd
Priority date: 2017-08-16
Filing date: 2017-08-16
Publication date: 2021-05-04
Anticipated expiration: 2037-08-16
Also published as: CN109409166A

Abstract

The invention provides a sensor and a manufacturing method thereof. First, a detecting structure is provided, which includes a plurality of electrode groups, a plurality of first connecting line segments and a plurality of second connecting line segments. Each electrode group comprises two electrode groups, and each electrode group comprises a plurality of electrode strips. The electrode strips of one electrode group in each electrode group are electrically connected in series through at least one second connecting line segment to form a first electrode string, and the electrode strips of the other electrode group in each electrode group are electrically connected in series through at least one first connecting line segment to form a second electrode string. Then, a detection step is performed to determine whether each first electrode string and each second electrode string are open-circuited or whether a short circuit occurs between each first electrode string and the corresponding second electrode string.

Description

Sensor and manufacturing method thereof

Technical Field

The present invention relates to a sensor and a method for manufacturing the same, and more particularly, to a sensor with short circuit and open circuit detection and a method for manufacturing the same.

Background

With the technology changing day by day, portable electronic devices, such as: smart phones (smart phones), tablet PCs (tablet PCs), notebook PCs (laptop PCs), etc., have become essential tools in people's lives. With the increasing diversity of functions, personal data such as phone books, photos, and personal information are usually stored therein with a certain confidentiality. Although the existing password protection mode is used for preventing the electronic device from being used by others, the password is easy to leak or be cracked, and the security is low. In addition, the user needs to remember the password to use the electronic device, which brings inconvenience to the user. Therefore, a method for identifying a personal fingerprint is also developed to achieve the purpose of identity authentication.

The conventional capacitive fingerprint sensor detects peaks and valleys of a fingerprint through a lattice structure formed by a plurality of driving electrodes and a plurality of sensing electrodes, thereby identifying a pattern of the fingerprint. However, in order to identify the peaks and valleys of the fingerprints, the distance between the centers of two adjacent driving electrodes and the distance between the centers of two adjacent sensing electrodes need to be at least smaller than the distance between the peaks and valleys of two adjacent fingerprints, so that the problem of breaking or short circuit is easily caused when the driving electrodes and the sensing electrodes are formed. In view of the above, it is an object of the present invention to provide a fingerprint sensor capable of detecting a broken line or a short circuit and a detection method thereof.

In a specific case, the structure and the manufacturing method of the fingerprint sensor are also applicable to the touch panel, and the difference between the fingerprint sensor and the touch panel is mainly the distance between any two adjacent sensing electrode strips.

Disclosure of Invention

An objective of the present invention is to provide a sensor and a method for manufacturing the same, so as to perform a detection step on the sensor before a step of disposing a chip in a chip area, thereby avoiding waste of the chip and saving the manufacturing cost.

To achieve the above objective, the present invention provides a sensor, which includes a substrate, at least one first electrode group, a plurality of first floating line segments, an insulating layer, a plurality of second electrode groups, and a plurality of second floating line segments. The first electrode group is arranged on the substrate and comprises a first electrode group and a second electrode group, and the first electrode group and the second electrode group respectively comprise a plurality of first electrode strips. The first floating line segment and the first electrode group are formed by the same first conductive layer, and the first floating line segment is insulated and separated from the first electrode group. The insulating layer is arranged on the first conducting layer. The second electrode groups are arranged on the insulating layer in sequence along a second direction and are staggered with the first electrode groups, each second electrode group comprises a third electrode group and a fourth electrode group, and the third electrode group and the fourth electrode group respectively comprise a plurality of second electrode strips. The second floating line segments and the second electrode groups are formed by the same second conducting layer, and the second floating line segments and the second electrode groups are insulated and separated, wherein two end points of each second floating line segment respectively correspond to the end points of two adjacent second electrode strips in each third electrode group, and two end points of each first floating line segment respectively correspond to the end points of two adjacent second electrode strips in each fourth electrode group.

To achieve the above object, the present invention further provides a method for manufacturing a sensor, comprising the following steps. First, a detecting structure is provided, wherein the detecting structure includes at least one first electrode group, a plurality of first connecting segments, an insulating layer, a plurality of second electrode groups, and a plurality of second connecting segments. The first electrode group comprises a first electrode group and a second electrode group, wherein the first electrode group and the second electrode group respectively comprise a plurality of first electrode strips. The first connecting line section and the at least one first electrode group are formed by the same first conductive layer, and the first connecting line section is insulated and separated from the first electrode group. The insulating layer is arranged on the first conducting layer. The second electrode groups are arranged on the insulating layer in sequence along a second direction and are in insulation staggered with the first electrode groups, wherein each second electrode group comprises a third electrode group and a fourth electrode group, and the third electrode group and the fourth electrode group respectively comprise a plurality of second electrode strips. The second connecting line segment and the second electrode groups are formed by the same second conducting layer, the second electrode strips of the third electrode group in each second electrode group are electrically connected in series through the second connecting line segment to form a first electrode string, and the second electrode strips of the fourth electrode group in each second electrode group are electrically connected in series through the first connecting line segment to form a second electrode string. Then, a detection step is performed to provide a first voltage signal at one end of each first electrode string and one end of each second electrode string, and measure a corresponding second voltage signal from the other end of each first electrode string and the other end of each second electrode string, so as to determine whether each first electrode string and each second electrode string are open-circuited or whether a short circuit occurs between each first electrode string and a corresponding second electrode string.

To achieve the above objective, the present invention further provides a sensor, which includes a substrate, a plurality of first electrode strips, a plurality of first line segments, a plurality of second electrode strips, and a guard ring. The first electrode strips are arranged on the substrate and are sequentially arranged along a first direction. The first line segments are respectively and electrically connected with a corresponding first electrode strip. The second electrode strips are arranged in sequence along a second direction, insulated from the first electrode strips and staggered with the first electrode strips. The guard ring is arranged at the outer sides of the first electrode strips and the second electrode strips and insulated from the first electrode strips and the second electrode strips, wherein each first line segment is overlapped with the guard ring in the overlooking direction of the substrate.

Through the manufacturing method of the sensor, whether the chip is broken or short-circuited can be detected before the chip is adhered to the connecting pad of the chip area, so that the waste of the chip caused by the defect of the sensor can be avoided, and the manufacturing cost is further saved.

Drawings

FIG. 1 illustrates various regions defined in a substrate according to a first embodiment of the invention.

Fig. 2 is a schematic top view illustrating a detection structure according to a first embodiment of the invention.

Fig. 3 is a schematic top view illustrating a second electrode group, a corresponding conductive wire and a connecting line segment according to a first embodiment of the invention.

Fig. 4 is a schematic top view illustrating a first electrode group, a corresponding conductive wire and a connecting line segment according to a first embodiment of the invention.

Fig. 5 is a schematic top view illustrating a fingerprint sensing area and a detection structure in a partial periphery area according to a first embodiment of the invention.

Fig. 6 is a schematic sectional view taken along the line a-a' of fig. 5.

Fig. 7 is a schematic top view illustrating a detection structure in a chip region and a partial periphery region according to a first embodiment of the invention.

FIGS. 8 and 9 are schematic cross-sectional views taken along the cross-sectional lines B-B 'and C-C' of FIG. 7, respectively.

Fig. 10 is a schematic top view of a fingerprint sensor according to a first embodiment of the invention.

Fig. 11 is a schematic top view of a fingerprint sensor according to another variation of the first embodiment of the present invention.

Fig. 12 and 13 are schematic diagrams illustrating a method for manufacturing a fingerprint sensor according to a second embodiment of the invention.

Fig. 14 is a schematic top view of a fingerprint sensor according to a third embodiment of the invention.

FIGS. 15 and 16 are schematic cross-sectional views taken along the cross-sectional lines D-D 'and E-E' of FIG. 14, respectively.

Description of the symbols

100. 200 detection structure 102 overlay

104. 216, 302

first conductor

106, 218, 304 second conductor

108 first bridge 110 second bridge

112. 214

third conductor

114, 114', 232, 300 fingerprint sensor

202 odd test line segment 204 even test line segment

210 first sense line 212 second sense line

220 first detection line segment 222 and second detection line segment

224 third detected line segment 226, SE1 first line segment

228. Second line segment 230 of SE2 and third line segment of SE3

UC unit area of Sub substrate

DR element area IR detection area

FR fingerprint sensing area CR chip area

PR periphery region G1 first electrode group

G2 second electrode group SI1 first signal input terminal

SO1 first signal output terminal SI2 second signal input terminal

SO2 second signal output terminal D1 first direction

D2 second direction D3 planar direction

S1 first electrode set S2 second electrode set

S3 third electrode set S4 fourth electrode set

E1, E11, E12, E13 and E14 first electrode strips

E2, E21, E22, E23, E24, E25, E26, E27 and E28 second electrode strips

CS1 first connection segment

CS2 second line segment CS3 third line segment

CS4 fourth connecting line segment CS5 fifth connecting line segment

CS6 sixth connecting line segment CS7 seventh connecting line segment

CS8 eighth connecting line segment ES1 first electrode string

ES2 second electrode series ES3 third electrode series

ES4 fourth electrode series P1, P2 pad

CL1 first conductive layer CL2 second conductive layer

IN1 first insulating layer IN2 second insulating layer

BL1 first bridge line BL2 second bridge line

BL3 third bridge line BL4 fourth bridge line

BL5 fifth bridge line BL6 sixth bridge line

The seventh bridge line BL8 the eighth bridge line BL7

GR guard ring TH1 first aperture

TH2 second through hole TH3 third through hole

First floating line segment of TC transparent pad FS1

FS2 second Floating line segment FS3 third Floating line segment

FS4 fourth floating line segment SE4 fourth line segment

SE5 fifth line segment SE6 sixth line segment

SE7 seventh line segment SE8 eighth line segment

SE9 ninth line segment SE10 tenth line segment

Odd electrode strip of CU cutting line OE

EE even electrode bar E2a first sub-electrode bar

E2b second sub-electrode stripes TH4, TH5, TH6 perforation

SN1 first Signal terminal SN2 second Signal terminal

SI3 third signal input terminal SO3 third signal output terminal

PB probe

Detailed Description

Fig. 1 to 10 are schematic diagrams illustrating a method for manufacturing a fingerprint sensor according to a first embodiment of the invention, wherein fig. 1 illustrates regions defined in a substrate according to the first embodiment of the invention. As shown in fig. 1, a substrate Sub is provided, on which a plurality of unit areas UC are defined. Each unit area UC may include a device area DR and at least one detection area IR. A fingerprint sensor can be arranged in each element area DR, and the corresponding detection area IR can be used for arranging a signal transmission and receiving end of the detection fingerprint sensor. The device region DR may further include a fingerprint sensing region FR, a chip region CR, and a peripheral region PR, wherein the fingerprint sensing region FR may be used for disposing a sensing device for identifying a fingerprint, the chip region CR is used for disposing a control chip for driving the sensing device, and the peripheral region PR is used for disposing a peripheral circuit. The substrate Sub may be a transparent substrate. For example, the transparent substrate may be a glass substrate, a strengthened glass substrate, a quartz substrate, a sapphire substrate, a plastic substrate, or a Printed Circuit Board (PCB), but is not limited thereto.

Referring to fig. 2, a schematic top view of a detection structure according to a first embodiment of the invention is shown. For clarity, the structure in each device region DR is shown in fig. 2 and the following drawings, which only show the detecting structure 100 in a single device region DR, but the invention is not limited thereto. As shown in fig. 2, a detecting structure 100 is formed on the substrate Sub, and includes at least one first electrode group G1 and a plurality of second electrode groups G2. The first electrode group G1 and the second electrode group G2 may be disposed in the fingerprint sensing region FR. The first electrode group G1 can be electrically connected to the first signal input terminals SI1 and the first signal output terminals SO1 for testing. For example, the number of the first signal input terminals SI1 and the number of the first signal output terminals SO1 electrically connected to the first electrode group G1 may be two, respectively, but is not limited thereto. In another embodiment, the detecting structure 100 may also include a plurality of first electrode groups G1 to separate different first electrode groups G1 for detection. The second electrode groups G2 are sequentially arranged along a second direction D2 and are interlaced and insulated from the first electrode groups G1. Each of the second electrode groups G2 can be electrically connected to a plurality of second signal input terminals SI2 and a plurality of second signal output terminals SO2, respectively, to separately detect different second electrode groups G2. The number of the second signal input terminals SI2 and the number of the second signal output terminals SO2 electrically connected to each of the second electrode groups G2 may be two, but is not limited thereto, and may be three or more.

The detection structure 100 will be described in further detail below. Referring to fig. 3, a top view of a second electrode group, a corresponding conductive wire and a connecting line segment according to a first embodiment of the invention is shown. As shown in fig. 3, each of the second electrode groups G2 can be formed by a second conductive layer CL 2. Each second electrode group G2 includes a third electrode group S3 and a fourth electrode group S4, which can be used to transmit different signals to determine short circuit and open circuit during the testing process. The third and fourth electrode groups S3 and S4 may include a plurality of second electrode bars E2, respectively, spaced apart from each other. In the present embodiment, the second electrode stripes E2 of the third electrode group S3 and the second electrode stripes E2 of the fourth electrode group S4 in the second electrode group G2 are alternately arranged along the second direction D2, but the invention is not limited thereto.

In addition, the detecting structure 100 may further include a plurality of first connecting line segments CS1 and a plurality of second connecting line segments CS 2. Each first connecting line segment CS1 is electrically connected to two adjacent second electrode strips E2 in each fourth electrode group S4, and each second connecting line segment CS2 is electrically connected to two adjacent second electrode strips E2 in each third electrode group S3. In the present embodiment, the first connection line segment CS1 and the second connection line segment CS2 corresponding to the same second electrode group G2 are located on the same side of the corresponding second electrode group G2. Moreover, since the second electrode bars E2 of the third electrode group S3 and the second electrode bars E2 of the fourth electrode group S4 are alternately arranged along the second direction D2, each second connecting line segment CS2 crosses a corresponding first connecting line segment CS 1. In order to avoid the first connection segment CS1 and the second connection segment CS2 being electrically connected to each other, the first connection segment CS1 is formed by a first conductive layer CL1, and the second connection segment CS2 is formed by a second conductive layer CL2, but not limited thereto. In another embodiment, the first connection segment CS1 and the second connection segment CS2 may also be formed by the second conductive layer CL2 and the first conductive layer CL1, respectively. In addition, the second electrode strips E2 of the third electrode group S3 in each second electrode group G2 can be electrically connected in series to form a first electrode series ES1 at least through a second connecting line segment CS2, and the second electrode strips E2 of the fourth electrode group S4 in each second electrode group G2 can be electrically connected in series to form a second electrode series ES2 at least through a first connecting line segment CS 1. For example, when the number of the second electrode strips E2 in each first electrode series ES1 and the number of the second electrode strips E2 in the second electrode series ES1 are two, each first electrode series ES1 may be formed by electrically connecting two second electrode strips E2 only through one second connection line segment CS2, and similarly, each second electrode series ES2 may be formed by electrically connecting two second electrode strips E2 only through one first connection line segment CS 1. When the number of the second electrode bars E2 in each first electrode series ES1 and the number of the second electrode bars E2 in each second electrode series ES1 are respectively greater than two, for example, four, the detection structure 100 corresponding to each second electrode group G2 may further include at least one fifth connecting line segment CS5 and at least one sixth connecting line segment CS 6. Taking the second electrode strips E21, E22, E23 and E24 of the third electrode group S3 as an example, except that each second connecting line segment CS2 may respectively connect two adjacent second electrode strips E21 and E22 and two adjacent second electrode strips E23 and E24, the other side of the second electrode strips E21, E22, E23 and E24 may further include a fifth connecting line segment CS5 electrically connected between the second electrode strips E22 and E23, that is, the fifth connecting line segment CS5 is electrically connected between the two second electrode strips E22 and E23 connected by different second connecting line segments CS2, so that the second electrode strips E21, E22, E23 and E24 can be connected in series with the fifth connecting line segment CS5 through each second connecting line segment CS2 to form the first electrode string ES 1. Similarly, taking the second electrode strips E25, E26, E27 and E28 of the fourth electrode group S4 as an example, the fourth electrode group may further include a sixth connecting line segment CS6 electrically connected between the second electrode strips E26 and E27, that is, the sixth connecting line segment CS6 is electrically connected between the two second electrode strips E26 and E27 connected to different first connecting lines CS1, and the sixth connecting line segment CS6 and the first connecting line segment CS1 are respectively disposed on two opposite sides of the second electrode strips E25, E26, E27 and E28.

The detecting structure 100 may further include a plurality of first conductive lines 104 and a plurality of second conductive lines 106. Each of the first wires 104 is electrically connected to a corresponding second electrode bar E2 of each of the third electrode sets S3, and is used to electrically connect each second electrode bar E2 of each of the third electrode sets S3 to a corresponding pad P1 (not shown). In addition, each second wire 106 is electrically connected to a corresponding second electrode bar E2 of each fourth electrode group S4, and is used to electrically connect each second electrode bar E2 of each fourth electrode group S4 to a corresponding pad P2 (not shown). In the present embodiment, the first wire 104 and the second wire 106 corresponding to the same second electrode group G2 extend from the same side of the corresponding second electrode group G2, and in order to avoid the first wire 104 and the second wire 106 corresponding to the same second electrode group G2 from being configured to interact with the first connection line segment CS1 and the second connection line segment CS2, the first wire 104 and the second wire 106 corresponding to the same second electrode group G2 and the first connection line segment CS1 and the second connection line segment CS2 are respectively located at two opposite sides of the corresponding second electrode group G2. It should be noted that in the present embodiment, the first conductive lines 104 and the second conductive lines 106 can be formed by the second conductive layer CL2 and the first conductive layer CL1, respectively, so that the distance between the adjacent first conductive lines 104 and the adjacent second conductive lines 106 is not limited by the patterning process, and further, the distance between the adjacent first conductive lines 104 and the adjacent second conductive lines 106 can be reduced to reduce the width of the peripheral region PR at the left and right sides of the fingerprint sensing region FR. In addition, the first conductive wires 104 and the second conductive wires 106 electrically connected to the adjacent second electrode groups G2 respectively may be disposed on two sides of the second electrode bar, so as to uniformly disperse the first conductive wires 104 and the second conductive wires 106 in the peripheral region PR on the left and right sides of the fingerprint sensing region FR. Thus, the first connection line segment CS1 and the second connection line segment CS2 corresponding to the adjacent second electrode group G2 are respectively disposed on two sides of the second electrode group CS 2. Furthermore, the fifth connecting line segment CS5 can be connected between two corresponding first conducting lines 104, i.e. two first conducting lines 104 respectively connected to the second electrode strips E22 and E23, and cross over the second conducting line 106 between the two first conducting lines 104. The sixth connecting line segment CS6 may be connected between two corresponding second conducting lines 106, i.e. two second conducting lines 106 respectively connected to the second electrode strips E26 and E27, and cross over the first conducting line 104 between the two second conducting lines 106. In the present embodiment, each fifth connection segment CS5 and the first conductive line 104 may be formed by the same second conductive layer CL2, so that each fifth connection segment CS5 may directly cross over the corresponding second conductive line 106 without an additional bridge segment. Each sixth connecting line segment CS6 may be formed of the same first conductive layer CL1 as the second conductive line 106, so that each sixth connecting line segment CS5 may directly cross over the corresponding first conductive line 104 without an additional bridging line segment.

Referring to fig. 4, a top view of the first electrode group, the corresponding conductive wires and the connecting line segments according to the first embodiment of the invention is shown. As shown in fig. 4, the first electrode group G1 can be formed by the first conductive layer CL1, and the first electrode group G1 can include a first electrode group S1 and a second electrode group S2, which can be used to transmit different signals to determine short circuit and open circuit during the detection process. The first and second electrode groups S1 and S2 may include a plurality of first electrode bars E1 spaced apart from each other, respectively. In the present embodiment, the first electrode stripes E1 of the first electrode group S1 and the first electrode stripes E1 of the second electrode group S2 are alternately arranged along the first direction D1, but not limited thereto. Please refer to fig. 2, fig. 3 and fig. 4. As shown in fig. 2, the first electrode groups G1 are interleaved with the second electrode groups G2. As shown in fig. 3 and 4, the second electrode group G2 includes a plurality of second electrode stripes E2 spaced apart from each other, and the first electrode group G1 includes a plurality of first electrode stripes E1 spaced apart from each other. Accordingly, the first electrode stripes E1 are interleaved with the second electrode stripes E2, so that each first electrode stripe E1 can be capacitively coupled with each second electrode stripe E2. Moreover, the distance between the center points of any two adjacent first electrode strips E1 and the distance between the center points of any two adjacent second electrode strips E2 may be, for example, 50 micrometers, so that the capacitance difference between the peak and the trough of the fingerprint can be detected by the coupling capacitor formed by each first electrode strip E1 and each second electrode strip E2, thereby achieving the purpose of fingerprint sensing.

The detecting structure 100 may further include a plurality of third connecting line segments CS3, and each of the third connecting line segments CS3 connects two adjacent first electrode strips E1 of the first electrode group S1, so that the first electrode strips E1 of the first electrode group S1 of the first electrode group G1 can be electrically connected in series through the third connecting line segments CS3 to form a third electrode string ES 3. Specifically, the detecting structure 100 may further include a plurality of seventh connecting segments CS7 electrically connected between any two adjacent third connecting segments CS3, i.e., electrically connected to the two first electrode strips E1 connected to different third connecting segments CS3, so that the first electrode strips E1 are located between the third connecting segments CS3 and the seventh connecting segments CS 7. Thus, the first electrode stripes E1 of the first electrode group S1 can be connected in series with the seventh connecting line segments CS7 through the third connecting line segments CS3, so as to form a third electrode series ES 3.

In addition, the detecting structure 100 may further include a plurality of fourth connecting line segments CS4, and each of the fourth connecting line segments CS4 connects two adjacent first electrode strips E1 of the second electrode group S2, so that the first electrode strips E1 of the second electrode group S2 of the first electrode group G1 can be electrically connected in series to form a fourth electrode series ES4 through the fourth connecting line segments CS 4. The fourth connecting line segment CS4 and the third connecting line segment CS3 are disposed on the same side of the first electrode group G1, and since the first electrode strips E1 of the first electrode group S1 and the first electrode strips E1 of the second electrode group S2 are sequentially and alternately arranged along the first direction D1, each third connecting line segment CS3 crosses over a corresponding fourth connecting line segment CS 4. By forming the third connecting line segment CS3 and the fourth connecting line segment CS4 by the first conductive layer CL1 and the second conductive layer CL2, respectively, the third connecting line segment CS3 and the fourth connecting line segment CS4 are insulated from each other, so as to prevent the third connecting line segment CS3 and the fourth connecting line segment CS4 from being short-circuited. In another embodiment, the third connecting line segment CS3 and the fourth connecting line segment CS4 may also be formed by the second conductive layer CL2 and the first conductive layer CL1, respectively.

The detecting structure 100 may further include a plurality of eighth connecting segments CS8 electrically connected between any two adjacent fourth connecting segments CS4, i.e., electrically connected two first electrode strips E1 connected to different fourth connecting segments CS4, so that the first electrode strip E1 is located between the fourth connecting segment CS4 and the eighth connecting segment CS 8. Thus, the first electrode stripes E1 of the second electrode group S2 can be connected in series with the eighth connecting line segments CS8 through the fourth connecting line segments CS4, so as to form the third electrode series ES 3.

In the embodiment, the detecting structure 100 may further include a plurality of third wires 112 electrically connected to a corresponding first electrode bar E1, and electrically connecting the corresponding first electrode bar E1 to the corresponding pad P along the second direction D2. The third wire 112 extends from the same side of the first electrode group G1, and in order to prevent the third wire 112 from being configured to interact with the third connecting line CS3 and the fourth connecting line CS4, the third wire 112, the third connecting line CS3 and the fourth connecting line CS4 are respectively located on two opposite sides of the first electrode group G1. In the present embodiment, the third conductive line 112 and the first electrode bar E1 are formed by the same first conductive layer CL 1. In addition, the seventh connecting segment CS7 may be connected between two corresponding third conductive wires 112, that is, connected between two third conductive wires 112 respectively connected to two adjacent first electrode strips E11 and E12 of the first electrode group S1, and cross over the third conductive wires 112 between the two third conductive wires 112. The eighth connecting line segment CS8 may be connected between two corresponding third conducting lines 112, that is, connected between two third conducting lines 112 respectively connected to the second electrode strips E13 and E14, and cross over the third conducting lines 112 between the two third conducting lines 112. Since the seventh connection line segment CS7, the eighth connection line segment CS8 and the third conductive line 112 are located on the same side of the first electrode group G1, in order to prevent the seventh connection line segment CS7 and the eighth connection line segment CS8 from electrically connecting two adjacent third conductive lines 112, the seventh connection line segment CS7 and the eighth connection line segment CS8 may be formed by the same second conductive layer CL2, so that the seventh connection line segment CS7 and the eighth connection line segment CS8 may respectively directly cross over the corresponding third conductive lines 112 without additional bridge connection lines. In the present embodiment, each of the seventh connecting segments CS7 and each of the eighth connecting segments CS8 can be electrically connected to the corresponding third conductive wires 112 through a through hole.

Referring to fig. 5 and 6, fig. 5 is a top view illustrating a fingerprint sensing region and a detection structure in a partial peripheral region according to a first embodiment of the present invention, and fig. 6 is a cross-sectional view taken along a sectional line a-a' of fig. 5. As shown IN fig. 5 and 6, a first insulating layer IN1 is disposed between the first conductive layer CL1 and the second conductive layer CL2, so that the first electrode stripe E1 formed by the first conductive layer CL1 and the second electrode stripe E2 formed by the second conductive layer CL2 can be insulated from each other by the first insulating layer IN 1. Similarly, the first connecting line segment CS1 formed by the first conductive layer CL1 can be electrically insulated from the second connecting line segment CS2 formed by the second conductive layer CL2 through the first insulating layer IN 1. The third connecting line segment CS3 formed by the first conductive layer CL1 can be electrically insulated from the fourth connecting line segment CS4 formed by the second conductive layer CL2 through the first insulating layer IN 1. IN addition, the fifth connection segment CS5 and the sixth connection segment CS6 can be electrically insulated from the second conductive line 106 and the first conductive line 104 crossing over through the first insulating layer IN1, respectively. The seventh connection segment CS7 and the eighth connection segment CS8 can be electrically insulated from the crossing third conductive line 112 by the first insulating layer IN1, respectively. IN addition, the second electrode strip E2 formed of the second conductive layer CL2 and the second conductive line 106 formed of the first conductive layer CL1 can be IN contact with each other through the through hole of the first insulating layer IN1, and thus are electrically connected to each other. Similarly, the connecting line segment formed by the first conductive layer CL1 or the second conductive layer CL2 may also be electrically connected to the corresponding electrode strip or wire through another through hole of the first insulating layer IN1, which is not described herein.

IN the embodiment, the detecting structure 100 may further include a second insulating layer IN2 and a cover layer 102 sequentially disposed on the second conductive layer CL 2. For example, the first conductive layer CL1 and the second conductive layer CL2 may respectively include metal, graphene or other conductive materials, which is not limited thereto. The first insulating layer IN1, the second insulating layer IN2, and the capping layer 102 may comprise silicon oxide, silicon nitride, or other insulating materials, but the invention is not limited thereto.

In order to electrically connect the first electrode serials ES1 and the second electrode serials ES2 to the second signal input terminal SI2 and the second signal output terminal SO2, respectively, the detecting structure 100 may further include a plurality of first bridge lines BL1, a plurality of second bridge lines BL2, a plurality of third bridge lines BL3 and a plurality of fourth bridge lines BL4, wherein each first bridge line BL1 can electrically connect one end of the first electrode string ES1 in each second electrode group G2 to a corresponding second signal input terminal SI2, each second bridge line BL2 can electrically connect one end of the second electrode string ES2 in each second electrode group G2 to a corresponding second signal input terminal SI2, each third bridge line BL3 can electrically connect the other end of the first electrode string ES1 in each second electrode group G2 to a corresponding second signal output terminal SO2, and each fourth bridge line BL4 can electrically connect the other end of the second electrode series ES2 in each second electrode group G2 to a corresponding second signal output terminal SO2, respectively. It should be noted that, in addition to the first bridge line BL1 and the second bridge line BL2 connected to the first conductive line 104 and the second conductive line 106 nearest to the detection region IR respectively, that is, the first bridge line BL1 and the second bridge line BL2 connected to the first electrode series ES1 and the second electrode series ES2 of the two second electrode groups G2 farthest from the chip region CR, the remaining first bridge line BL1, the second bridge line BL2, the third bridge line BL3 and the fourth bridge line BL4 cross at least one first conductive line 104 or one second conductive line 106, and therefore, each of the first bridge line BL1, the second bridge line BL2, the third bridge line BL3 and the fourth bridge line BL4 includes at least one cross-over portion, which may be formed by different conductive layers from the cross-over first conductive line 104 or second conductive line 106. For example, the third bridging line BL3 connecting the second electrode group G2 may include three first bridging portions 108 and three second bridging portions 110, wherein the first bridging portions 108 are formed by the first conductive layer CL1, and the second bridging portions 110 are formed by the second conductive layer CL 2. Each first bridge portion 108 and each second bridge portion 110 are alternately connected in sequence, and each first bridge portion 108 crosses over a corresponding first conductive line 104, and each second bridge portion 110 crosses over a corresponding second conductive line 106. The first bridge 108 of the third bridge line BL3 nearest the detection zone IR may extend into the detection zone IR to connect with the second signal output SO2, and the second bridge 110 nearest the fingerprint sensing region FR may connect with the second wire 106. The fourth bridge line BL4 connected to the second electrode group G2 may include four first bridges 108 and three second bridges 110, and each second bridge 110 is disposed between any two adjacent first bridges 108. The invention is not limited thereto. The number of the first bridging portions 108 and the second bridging portions 110 of the first bridging lines BL1, the second bridging lines BL2, the third bridging lines BL3 and the fourth bridging lines BL4 may depend on the number of the first conductive lines 104 and the second conductive lines 106 crossed, and the number of the first conductive lines 104 and the second conductive lines 106 crossed may depend on the positions of the second electrode groups G2 and the number of the second electrode strips E2 in the first electrode series ES1 and the second electrode series ES 2. The bridge lines of the other second electrode groups G2 can be designed in the same manner as described above, and therefore, the description thereof is omitted.

In addition, the detecting structure 100 may include at least one fifth bridge line BL5, at least one sixth bridge line BL6, at least one seventh bridge line BL7, and at least one eighth bridge line BL8, wherein the fifth bridge line BL5 may electrically connect one end of the third electrode string ES3 to a first signal input terminal SI1, the sixth bridge line BL6 may electrically connect one end of the fourth electrode string ES4 to another first signal input terminal SI1, the seventh bridge line BL7 may electrically connect the other end of the third electrode string ES3 to a second signal output terminal SO2, and each eighth bridge line BL8 may electrically connect the other end of the fourth electrode string ES4 to another second signal output terminal SO2, respectively. The fifth bridge line BL5, the sixth bridge line BL6, the seventh bridge line BL7, and the eighth bridge line BL8 need to cross over the first conductive line 104 and the second conductive line 106, and therefore each of the fifth bridge line BL5, the sixth bridge line BL6, the seventh bridge line BL7, and the eighth bridge line BL8 includes a plurality of crossing portions. For example, the fifth bridge line BL5 includes five first bridge portions 108 and four second bridge portions 110, each second bridge portion 110 is disposed between any two adjacent first bridge portions 108, each second bridge portion 110 crosses over the corresponding second conductive line 106, and the first bridge portion 108 located between any two adjacent second bridge portions 110 crosses over the corresponding first conductive line 104. The sixth bridge line BL6 includes four first bridge portions 108 and four second bridge portions 110, each first bridge portion 108 is alternately connected to each second bridge portion 110 in sequence, each first bridge portion 108 crosses over a corresponding first conductive line 104, and the second bridge portions 110 between any two adjacent first bridge portions 108 cross over a corresponding second conductive line 106. The number of the first and

second junctions

108 and 110 of the fifth, sixth, seventh and eighth bridge lines BL5, BL6, BL7 and BL8 may depend on the number of the first and second

conductive lines

104 and 106 crossed, and the number of the first and second

conductive lines

104 and 106 crossed may depend on the position of the second electrode group G2 and the number of the first and second electrode stripes ES1 and E2 in the second electrode string ES 2.

The detecting structure 100 may further include a guard ring GR disposed outside the first electrode strip E1 and the second electrode strip E2, and the first connecting line segment CS1, the second connecting line segment CS2, the fifth connecting line segment CS5, the sixth connecting line segment CS6, the first conducting wire 104, and the second conducting wire 106 are disposed between the guard ring GR and the first electrode strip E1 and the second electrode strip E2.

Please refer to fig. 7 to fig. 9. Fig. 7 is a top view of a detection structure in a chip region and a partial periphery region according to a first embodiment of the invention, and fig. 8 and 9 are cross-sectional views taken along the cross-sectional lines B-B 'and C-C' of fig. 7, respectively. As shown in fig. 7 to 9, each first wire 104 may be electrically connected to a corresponding pad P1, and each second wire 106 and each third wire 112 may be electrically connected to a corresponding pad P2. In the present embodiment, each of the first conductive lines 104, each of the second conductive lines 106, and each of the third conductive lines 112 may extend into the chip region CR, respectively. The first insulating layer IN1 may have a plurality of first through holes TH1 exposing the second conductive line 106 and the third conductive line 112 formed by the first conductive layer CL1, respectively. The second insulating layer IN2 may have a plurality of second through holes TH2 and a plurality of third through holes TH 3. Each of the second through holes TH2 is disposed corresponding to the first through hole TH1 to expose the corresponding second conductive line 106 and the third conductive line 112, and each of the third through holes TH3 exposes the first conductive line 104 formed by the second conductive layer CL 2. In addition, the pads P1 and P2 may include a plurality of transparent conductive pads TC respectively disposed on the exposed first conductive line 104, second conductive line 106 and third conductive line 112 to prevent the first conductive line 104, second conductive line 106 and third conductive line 112 from being oxidized. The transparent conductive pad TC may be formed of the same transparent conductive layer, and the transparent conductive layer may include a transparent conductive material such as indium zinc oxide or indium tin oxide.

After the test structure 100 is formed, a test step is performed to provide a first voltage signal at one end of each of the first electrode strings ES1 and at one end of each of the second electrode strings ES2, i.e. to input a corresponding first voltage signal, such as a voltage of 5 v or a signal with a specific test code, at each of the second signal input terminals SI 2. In addition, the detecting step measures a corresponding second voltage signal from the other end of each first electrode string ES1 and the other end of each second electrode string ES2, i.e. receives the second voltage signal from each second signal output terminal SO 2. By measuring the first voltage signal and the second voltage signal corresponding to the same first electrode string ES1 and the same second electrode string ES2, it can be determined whether each first electrode string ES1 and each second electrode string ES2 are open-circuited and whether a short circuit occurs between each first electrode string ES1 and each second electrode string ES 2.

In addition, the detecting step further includes providing a third voltage signal to one end of each third electrode string ES3 and one end of each fourth electrode string ES4, i.e. providing a corresponding third voltage signal, such as a voltage of 5 v or a signal with a specific detection code, from each first signal input terminal SI1, and measuring a corresponding fourth voltage signal from the other end of each third electrode string ES3 and the other end of each fourth electrode string ES4, i.e. receiving a corresponding fourth voltage signal from each first signal output terminal SO 1. By measuring the third voltage signal and the fourth voltage signal corresponding to the same third electrode string ES3 and the same fourth electrode string ES4, it can be determined whether each third electrode string ES3 and each fourth electrode string ES4 are open-circuited and whether a short circuit occurs between each third electrode string ES3 and each fourth electrode string ES 4. It should be noted that, during the detecting step, no chip is disposed on the pads P1 and P2 of the chip region CR, so as to avoid the waste of chips caused by detecting that the detecting structure 100 is a defective product.

Referring to fig. 10, a schematic top view of a fingerprint sensor according to a first embodiment of the invention is shown. As shown in fig. 10, after the detection step is completed, if there is an open circuit in each of the first electrode serials ES1, the second electrode serials ES2, the third electrode serials ES3 or the fourth electrode serials ES4, a short circuit between each of the first electrode serials ES1 and each of the second electrode serials ES2, or a short circuit between each of the first electrode serials ES1 and each of the second electrode serials ES2, the detection structure 100 is determined as a defective product. When the first electrode strings ES1 and the second electrode strings ES2 are not open-circuited and there is no short circuit between the first electrode strings ES1 and the second electrode strings ES2, a laser cutting process is performed to electrically insulate the second electrode strips E2, thereby forming the fingerprint sensor 114 of the present embodiment. Specifically, the laser cutting process cuts each first connecting segment CS1 into a first floating segment FS1 and cuts each second connecting segment CS2 into a second floating segment FS 2. In addition, when each first electrode series ES1 further includes a fifth connecting line segment CS5, and each second electrode series ES2 further includes a sixth connecting line segment CS6, the laser cutting process cuts each fifth connecting line segment CS5 into two first line segments SE1, and cuts each sixth connecting line segment CS6 into two second line segments SE 2. Thereby, the second electrode bars E2 in the first electrode serials ES1 and the second electrode bars E2 in the second electrode serials ES2 can be electrically insulated from each other. In the present embodiment, each first floating segment FS1 and each second floating segment FS2 may be electrically insulated and separated from each second electrode stripe E2. Each first segment SE1 may be electrically connected to a corresponding second electrode stripe E2 in each third electrode group S3, i.e., the non-outermost second electrode stripe E2 in each third electrode group S3. Each second segment SE2 can be electrically connected to a corresponding second electrode stripe E2 in each fourth electrode group S4, i.e., the non-outermost second electrode stripe E2 in each third electrode group S3. For example, the laser cutting process may cut along the cutting line CU as shown in fig. 5, but not limited thereto. Referring to fig. 5, since the first connecting line segment CS1 and the second connecting line segment CS2 are cut along the cutting line CU directly by laser, two end points of each second floating line segment FS2 may respectively correspond to end points of two adjacent second electrode bars E2 in each third electrode group S3, and two end points of each first floating line segment FS1 may respectively correspond to end points of two adjacent second electrode bars E2 in each fourth electrode group S4. Since the width of the cutting line CU in the laser cutting process may be, for example, 8 microns, the distance extending from the end of each electrode bar of each connecting line segment may be greater than the width of the laser cutting line CU.

In addition, when the third electrode string ES3 and the fourth electrode string ES4 are not open-circuited and there is no short circuit between the third electrode string ES3 and the fourth electrode string ES4, the laser dicing process electrically insulates each of the first electrode stripes E2. Specifically, the laser cutting process cuts each third connecting line segment CS3 into a third floating line segment FS3, and cuts each fourth connecting line segment CS4 into a fourth floating line segment FS 4. Meanwhile, the laser cutting process cuts each seventh connecting line segment CS7 into two third line segments SE3, and cuts each eighth connecting line segment CS8 into two fourth line segments SE 4. Thereby, each of the first electrode stripes E1 in the third electrode series ES3 and each of the first electrode stripes E1 in the fourth electrode series ES4 can be electrically insulated from each other. In the present embodiment, each of the third floating line segments FS3 and each of the fourth floating line segments FS4 may be electrically insulated and separated from each of the first electrode stripes E1. Each third segment SE3 can be electrically connected to a corresponding first electrode stripe E1 of the first electrode set S1, i.e., the non-outermost first electrode stripe E1 of the first electrode set S1. Each fourth segment SE4 may be electrically connected to a corresponding first electrode stripe E1 of the second electrode group S2, i.e., the non-outermost first electrode stripe E1 of the second electrode group S2. Since each third connecting line segment CS3 and each fourth connecting line segment CS4 are cut along the cutting line CU directly by the laser, two end points of each third floating line segment FS3 may respectively correspond to end points of two adjacent first electrode stripes E1 in the first electrode group S1, and two end points of each fourth floating line segment FS4 may respectively correspond to end points of two adjacent first electrode stripes E1 in the second electrode group S2.

Furthermore, the laser dicing process may further optionally include dicing the first bridge line BL1, the second bridge line BL2, the third bridge line BL3, the fourth bridge line BL4, the fifth bridge line BL5, the sixth bridge line BL6, the seventh bridge line BL7, and the eighth bridge line BL8 to electrically insulate the second electrode strips E2, the second signal input terminals SI2, and the second signal output terminals SO 2. Specifically, the first bridge line BL1 may be cut into two fifth line segments SE5, wherein one of the fifth line segments SE5 is electrically connected to the corresponding first conductive line 104, i.e., the first conductive line 104 electrically connected to the outermost second electrode stripe E2 of the third electrode group S3. The second bridge line BL2 can be cut into two sixth line segments SE6, wherein a sixth line segment SE6 is electrically connected to the corresponding second conductive line 106, i.e. the second conductive line 106 electrically connected to the outermost second electrode stripe E2 in the fourth electrode group S4. The first bridging portion 108 of the third bridging line BL3 nearest to the detection region IR may be cut into two seventh line segments SE7, wherein one of the seventh line segments SE7 is electrically connected to the corresponding first conductive line 104, i.e., the first conductive line 104 electrically connected to the second electrode stripe E2 of the third electrode group S3 nearest to the other second electrode group G2. The first bridging portion 108 of the fourth bridging line BL4 nearest to the detection region IR may be cut into two eighth line segments SE8, wherein an eighth line segment SE8 is electrically connected to the corresponding second conductive line 106, i.e., the second conductive line 106 electrically connected to the second electrode stripe E2 nearest to another second electrode group G2 in the fourth electrode group S4. Similarly, the first bridging portions 108 of the fifth bridging line BL5 and the eighth bridging line BL8 closest to the detection region IR may be cut into the ninth line segments SE9, respectively, and the first bridging portions 108 of the sixth bridging line BL6 and the seventh bridging line BL7 closest to the detection region IR may be cut into the tenth line segments SE10, respectively.

Since the detection step of the detection structure 100 of the present embodiment is before the step of disposing the chip in the chip region CR, the fingerprint sensor 114 of the present embodiment can detect whether there is a disconnection or short circuit before the chip is adhered to the pads P1 and P2 of the chip region CR, thereby avoiding the waste of the chip due to the defect of the fingerprint sensor 114 and further saving the manufacturing cost.

The fingerprint sensor and the manufacturing method thereof of the present invention are not limited to the above embodiments. In order to facilitate comparison of differences between the first embodiment and other embodiments or variations and simplify descriptions, the same reference numerals are used for the same elements in the other embodiments or variations, and descriptions are mainly provided for the differences between the embodiments, and repeated descriptions are omitted.

Referring to fig. 11, fig. 11 is a schematic top view of a fingerprint sensor according to another variation of the first embodiment of the present invention. As shown in fig. 11, compared to the first embodiment, the fingerprint sensor 114' of the present variation is different from the first embodiment in that the third electrode group S3 and the fourth electrode group S4 of each second electrode group G2 are sequentially arranged along the second direction D2. In other words, the second electrode bars E2 of the third electrode group S3 are the second electrode bars E2 arranged in series, and the second electrode bars E2 of the fourth electrode group S4 are also the second electrode bars E2 arranged in series, so that the second electrode bars E2 of the fourth electrode group S4 are not disposed between any two adjacent second electrode bars E2 of the third electrode group S3, and the second electrode bars E2 of the third electrode group S3 are not disposed between any two adjacent second electrode bars E2 of the fourth electrode group S4.

Referring to fig. 12 and 13, fig. 12 and 13 are schematic diagrams illustrating a method for manufacturing a fingerprint sensor according to a second embodiment of the invention, wherein fig. 13 is a schematic top view illustrating the fingerprint sensor according to the second embodiment of the invention. As shown in fig. 12, a substrate Sub and a detection structure 200 are provided. In the present embodiment, the detecting structure 200 includes a plurality of first electrode bars E1, a plurality of odd detecting line segments 202, a plurality of even detecting line segments 204, and a plurality of second electrode bars E2 disposed on the substrate Sub. The first electrode bars E1 may include a plurality of odd electrode bars OE and a plurality of even electrode bars EE, and each odd electrode bar OE and each even electrode bar EE may be sequentially and alternately arranged in the fingerprint sensing region FR along the first direction D1. The second electrode stripes E2 may be arranged in the fingerprint sensing region FR along the second direction D2 and interleaved with the first electrode stripes E1. The first electrode bar E1 may be formed of a first conductive layer CL1, the second electrode bar E2 may be formed of a second conductive layer CL2, and a first insulating layer IN1 may be disposed between the first conductive layer CL1 and the second conductive layer CL2 for electrically insulating the first electrode bar E1 and the second electrode bar E2, so that each first electrode bar E1 and each second electrode bar E2 may form a coupling capacitor to detect a capacitance difference between a peak and a valley of a fingerprint, and achieve the purpose of fingerprint sensing. The configurations of the first conductive layer CL1, the second conductive layer CL2, and the first insulating layer IN1 IN this embodiment are the same as those IN the first embodiment, as shown IN fig. 6, and therefore are not repeated herein. Moreover, each odd line segment 202 can be electrically connected to a corresponding odd electrode bar OE, and the odd line segments 202 are electrically connected to the same first signal terminal SN 1. Each even-numbered detection line segment 204 is electrically connected to a corresponding even-numbered electrode bar EE, and the even-numbered detection line segments 204 are electrically connected to the same second signal terminal SN 2. Therefore, the odd detection line segments 202 and the even detection line segments 204 can be alternately arranged along the first direction D1.

The detecting structure 200 may further include a guard ring GR disposed outside the first electrode bar E1 and the second electrode bar E2, and insulated from the first electrode bar E1 and the second electrode bar E2 for functioning as an electrostatic protection. In order to electrically connect each odd-numbered detection line segment 202 to the same first signal terminal SN1 and each even-numbered detection line segment 204 to the same second signal terminal SN2, each odd-numbered detection line segment 202 and each even-numbered detection line segment 204 extend from the fingerprint sensing region FR to the detection region IR through the peripheral region PR, thus crossing the guard ring GR and overlapping the guard ring GR in the top view direction D3 of the substrate Sub. IN the embodiment, the guard ring GR and the second electrode bar E2 may be formed by the same second conductive layer CL2, and the odd-numbered detection line segment 202 and the even-numbered detection line segment 204 and the first electrode bar E1 may be formed by the same first conductive layer CL1, so that the odd-numbered detection line segment 202 and the even-numbered detection line segment 204 may be electrically insulated from the guard ring GR by the first insulating layer IN1, but the invention is not limited thereto. In another embodiment, the odd detection line segment 202, the even detection line segment 204 and the guard ring GR may also be formed by different conductive layers.

In the present embodiment, the detecting structure 200 further includes a first detecting line 210 and a second detecting line 212 disposed on the substrate Sub in the detecting region IR, wherein the first detecting line 210 electrically connects each odd detecting line segment 202 to the first signal terminal SN1, and the second detecting line 212 electrically connects each even detecting line segment 204 to the second signal terminal SN 2. The second detection line 212 is disposed between the first detection line 210 and the guard ring GR, so that the second detection line 212 crosses each odd detection line segment 202 for electrically connecting each even detection line segment 204 to the second signal terminal SN2, but not limited thereto. In another embodiment, the first detection lines 210 can also be disposed between the second detection lines 212 and the guard ring GR, so that the first detection lines 210 cross over each even detection line segment 204. In the present embodiment, the second detection lines 212 and the odd detection line segments 202 may be formed of different conductive layers to electrically insulate the second detection lines 212 from the odd detection line segments 202. For example, the odd detection line segments 202 may be formed of the first conductive layer CL1, and the second detection lines 212 may be formed of the second conductive layer CL 2. The first sensing lines 210 may be formed of the first conductive layer CL1 or the second conductive layer CL 2.

In the embodiment, the detecting structure 200 may further include a plurality of third wires 214, each of which is electrically connected to a corresponding first electrode bar E1 for electrically connecting each first electrode bar E1 to the pad. The third conductive line 214 may be formed of, for example, the first conductive layer CL 1.

In addition, the detecting structure 200 may further include a plurality of first conductive lines 216 and a plurality of second conductive lines 218. The second electrode bar E2 may include a plurality of first sub-electrode bars E2a and a plurality of second sub-electrode bars E2 b. Each of the first sub-electrode strips E2a may be electrically connected to a corresponding first conductive line 216, and each of the second sub-electrode strips E2b may be electrically connected to a corresponding second conductive line 218. In the present embodiment, every two first sub-electrode stripes E2a and every two second sub-electrode stripes E2b are alternately arranged along the second direction D2. In addition, two first conductive wires 216 electrically connected to two adjacent first sub-electrode strips E2a are disposed on two sides of the first sub-electrode strip E2a, respectively, and two second conductive wires 218 electrically connected to two adjacent second sub-electrode strips E2b are disposed on two sides of the second sub-electrode strip E2b, respectively. With this arrangement, the first conductive lines 216 and the second conductive lines 218 on either side of the second electrode stripe E2 can be alternately arranged in sequence. By forming the first conductive lines 216 by the second conductive layer CL2 and forming the second conductive lines 218 by the first conductive layer CL1, the distance between adjacent first conductive lines 216 and second conductive lines 218 is not limited by the patterning process, so that the distance between adjacent first conductive lines 216 and second conductive lines 218 can be reduced to reduce the width of the peripheral region PR at the left and right sides of the fingerprint sensing region FR.

Furthermore, the detecting structure 200 may further include four first detecting line segments 220. Each first detection line segment 220 is connected to the two outermost first sub-electrode stripes E2a and the two outermost second sub-electrode stripes E2b, respectively, and extends from the fingerprint sensing region FR to the detection region IR through the peripheral region PR. Therefore, each first detection line segment 220 crosses the guard ring GR and overlaps the guard ring GR in the top view direction D3 of the substrate Sub. To be insulated from the guard ring GR, the first sensing line segment 220 may be formed of, for example, a first conductive layer CL 1. Each first sensing line segment 220 may electrically connect the corresponding first sub-electrode bar E2a or the corresponding second sub-electrode bar E2b to a corresponding third signal output terminal SO 3. The outermost first sub-electrodes E2a are disposed between the corresponding first sensing line segment 220 and the corresponding first conductive line 216, and the outermost second sub-electrodes E2b are disposed between the corresponding first sensing line segment 220 and the corresponding second conductive line 218. Since the two first wires 216 electrically connected to the two adjacent first sub-electrode bars E2a are disposed on two sides of the first sub-electrode bar E2a, the first detection line segments 220 connected to the two adjacent first sub-electrode bars E2a are also disposed on two sides of the first sub-electrode bar E2 a. Similarly, two first detection line segments 220 electrically connected to two adjacent second sub-electrode bars E2b are also disposed on two sides of the second sub-electrode bar E2 b.

The detecting structure 200 further includes two second detecting line segments 222 and two third detecting line segments 224. The second sensing line segments 222 are respectively connected to the two first conductive lines 216 corresponding to the outermost two first sub-electrode strips E2a, and extend from the peripheral region PR to the sensing region IR for electrically connecting the corresponding first sub-electrode strip E2a to a corresponding third signal input terminal SI 3. The third sensing line segment 224 is respectively connected to the two second conductive lines 218 of the corresponding outermost two second sub-electrode strips E2b and extends from the peripheral region PR to the sensing region IR for electrically connecting the corresponding second sub-electrode strip E2b to a corresponding third signal input terminal SI 3. For example, the second sensing line segment 222 can be formed by the second conductive layer CL2, and the third sensing line segment 224 can be formed by the first conductive layer CL1, so that the third sensing line segment 224 can cross the outermost first conductive line 216 without being electrically connected to the first conductive line 216.

After the detection structure 200 is completed, a detection step is performed to provide a first voltage signal at the first signal terminal SN1 and measure a corresponding second voltage signal from the second signal terminal SN2 to determine whether a short circuit occurs between each odd electrode bar OE and each even electrode bar EE. In the present embodiment, the detecting step further provides a third voltage signal to each of the second detecting line segments 222 and each of the third detecting line segments 224, and measures a corresponding fourth voltage signal from each of the first detecting line segments 220 to determine whether each of the first sub-electrode strips E2a and each of the second sub-electrode strips E2b are open-circuited or whether a short circuit occurs between each of the first sub-electrode strips E2a and each of the second sub-electrode strips E2 b.

As shown in fig. 13, after the detecting step is completed, if each odd-numbered electrode bar OE and each even-numbered electrode bar EE are short-circuited, each first sub-electrode bar E2a and each second sub-electrode bar E2b are open-circuited, or each first sub-electrode bar E2a and each second sub-electrode bar E2b are short-circuited, the detecting structure 200 is determined to be a defective product. If the above situation does not occur, a cutting process is performed to cut off each odd-numbered detection line segment 202 and each even-numbered detection line segment 204 to electrically insulate each odd-numbered electrode bar OE and each even-numbered electrode bar EE, thereby forming a plurality of first line segments 226. The first line segment 226 may include a plurality of odd line segments and a plurality of even line segments, each odd line segment connects to each odd electrode bar OE, and each even line segment connects to each even electrode bar EE. Thereby, the fingerprint sensor 232 of the present embodiment can be formed. For example, the cutting process may be a process of cutting apart the substrate Sub in the detection region IR and the substrate Sub in the device region DR, or a laser cutting process. In the present embodiment, the first segments 226 are electrically connected to a corresponding first electrode bar E1, and each of the first segments 226 overlaps with the guard ring GR in the top view direction D3 of the substrate Sub.

In addition, the dicing process may cut off each of the first detection line segments 220, the second detection line segments 222, and the third detection line segments 224 to form four second line segments 228 and four third line segments 230. Each of the second segments 228 is connected to the two outermost first sub-electrode bars E2a and the two outermost second sub-electrode bars E2b, respectively, and each of the third segments 230 is connected to the first conductive line 216 and the second conductive line 218 electrically connected to the second segments 228, respectively. The outermost first sub-electrode stripes E2a are disposed between the corresponding second line segments 228 and the corresponding first conductive lines 216, and the outermost second sub-electrode stripes E2b are disposed between the corresponding second line segments 228 and the corresponding second conductive lines 218. Each second segment 228 overlaps the guard ring GR in the plan view direction D3 of the substrate Sub.

Referring to fig. 14 to 16, fig. 14 is a top view illustrating a fingerprint sensor according to a third embodiment of the present invention, wherein fig. 15 and 16 are cross-sectional views taken along the cross-sectional lines D-D 'and E-E' of fig. 14, respectively. As shown in fig. 14 to 16, the difference between the fingerprint sensor 300 of the present embodiment and the detecting structure of the above embodiment is that two ends of each first electrode strip E1, one end of each second electrode strip E2, and the corresponding first conductive line 302 or second conductive line 304 are respectively exposed by punching, so that whether each first electrode strip E1 and each second electrode strip E2 are open-circuited and whether the first electrode strip E1 and each second electrode strip E2 are short-circuited can be directly detected by using the probe PB. Specifically, as shown IN fig. 15, the first insulating layer IN1 and the second insulating layer IN2 may have a through hole TH4 and a through hole TH5, respectively, and the through hole TH4 of the second insulating layer IN2 corresponds to the through hole TH5 of the first insulating layer IN1, so as to expose one end of each first electrode stripe E1 formed by the first conductive layer CL 1. Similarly, the first insulating layer IN1 and the second insulating layer IN2 corresponding to the other end of each first electrode bar E1 and the second conductive line 304 may have the same structure. The second conductive line 304 is exposed at an end away from the second electrode strip E2.

As shown IN fig. 16, the second insulating layer IN2 on the second conductive layer CL2 may have another through hole TH6 exposing the second electrode stripe E2 formed by the second conductive layer CL 2. Specifically, an end of each second electrode stripe E2, which is away from the connection with the corresponding first conductive line 302 or second conductive line 304, is exposed by the through hole TH 6. Similarly, the second insulating layer IN2 corresponding to each first conductive line 302 may have the same structure. The first conductive line 302 is exposed at an end away from the second electrode strip E2.

Through forming the through holes TH4, TH5, and TH6 at the two ends of each first electrode strip E1 and the two ends of each second electrode strip E2, the wafer-level probe PB can be directly used to detect whether each first electrode strip E1 and each second electrode strip E2 are open-circuited or not and whether each first electrode strip E1 and each second electrode strip E2 are short-circuited or not, so the fingerprint sensor 300 of the present embodiment does not require an additional laser dicing process after detection. Since the distance between the center points of the adjacent first electrode strips E1 is only 50 μm, the inspection method is performed in a foundry with wafer-level inspection equipment.

In another embodiment, the structure and the manufacturing method of the fingerprint sensor of any of the above embodiments may also be applied to a touch panel, and the difference between the structure and the manufacturing method of the fingerprint sensor of any of the above embodiments is that the distance between the center points of any two adjacent first electrode strips E1 and the distance between the center points of any two adjacent second electrode strips E2 are greater than the distance between the center points of any two adjacent first electrode strips E1 and the distance between the center points of any two adjacent second electrode strips E2 of the fingerprint sensor.

In summary, since the step of detecting the structure or the sensor is performed before the step of disposing the chip on the chip area, the fingerprint sensor manufactured by the present invention can detect whether there is a disconnection or short circuit problem before the chip is adhered to the pad of the chip area, thereby avoiding wasting the chip due to the defect of the sensor and further saving the manufacturing cost.

The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in accordance with the claims of the present invention should be covered by the present invention.

Claims

1. A sensor, comprising:

a substrate;

the first electrode group is arranged on the substrate and comprises a first electrode group and a second electrode group, and the first electrode group and the second electrode group respectively comprise a plurality of first electrode strips;

a plurality of first floating line segments formed of the same first conductive layer as the at least one first electrode group, the first floating line segments being insulated and separated from the at least one first electrode group;

an insulating layer disposed on the first conductive layer;

a plurality of second electrode groups arranged on the insulating layer, wherein the second electrode groups are sequentially arranged along a second direction and are staggered with the at least one first electrode group, each second electrode group comprises a third electrode group and a fourth electrode group, the third electrode group and the fourth electrode group respectively comprise a plurality of second electrode strips, and each second electrode strip of the third electrode group and each second electrode strip of the fourth electrode group in each second electrode group are sequentially and alternately arranged along the second direction; and

and a plurality of second floating line segments and the second electrode groups are formed by the same second conducting layer, and the second floating line segments are insulated and separated from the second electrode groups, wherein two end points of each second floating line segment respectively correspond to the end points of two adjacent second electrode strips in each third electrode group, and two end points of each first floating line segment respectively correspond to the end points of two adjacent second electrode strips in each fourth electrode group.

2. The sensor of claim 1, wherein the sensor is a fingerprint sensor.

3. The sensor of claim 1, wherein the sensor is a touch panel.

4. The sensor as claimed in claim 1, further comprising a plurality of first conductive lines and a plurality of second conductive lines, the first conductive lines being formed by the second conductive layer, and the second conductive lines being formed by the first conductive layer, wherein each of the first conductive lines is electrically connected to a corresponding one of the second electrode bars in each of the third electrode groups, and each of the second conductive lines is electrically connected to a corresponding one of the second electrode bars in each of the fourth electrode groups.

5. The sensor of claim 1, wherein the third electrode set and the fourth electrode set in each of the second electrode groups are sequentially arranged along the second direction.

6. The sensor of claim 1, wherein each of the first electrode strips of the first electrode set and each of the first electrode strips of the second electrode set alternate sequentially along a first direction.

7. The sensor of claim 1, further comprising a plurality of first segments and a plurality of second segments, wherein the first segments are formed by the first conductive layer and the second segments are formed by the second conductive layer, each of the first segments is electrically connected to a corresponding one of the second electrode strips in each of the third electrode groups, and each of the second segments is electrically connected to a corresponding one of the second electrode strips in each of the fourth electrode groups.

8. The sensor according to claim 1, further comprising a plurality of third floating line segments and a plurality of fourth floating line segments, wherein the third floating line segments are formed by the first conductive layer and the fourth floating line segments are formed by the second conductive layer, wherein two end points of each of the third floating line segments respectively correspond to end points of two adjacent first electrode strips in the first electrode group, and two end points of each of the fourth floating line segments respectively correspond to end points of two adjacent first electrode strips in the second electrode group.

9. The sensor of claim 1, further comprising a plurality of third segments and a plurality of fourth segments, wherein the third segments are formed by the first conductive layer and the fourth segments are formed by the second conductive layer, wherein each of the third segments is electrically connected to a corresponding one of the first electrode strips in the first electrode set, and each of the fourth segments is electrically connected to a corresponding one of the first electrode strips in the second electrode set.

10. The sensor as claimed in claim 1, wherein each of the first floating line segments is electrically connected to two adjacent second electrode strips of each of the fourth electrode sets, and each of the second floating line segments is electrically connected to two adjacent second electrode strips of each of the third electrode sets, respectively, when the sensor is performing a test.

11. A method of making a sensor, comprising:

providing a detection structure, wherein the detection structure comprises:

at least one first electrode group comprising a first electrode group and a second electrode group, wherein the first electrode group and the second electrode group respectively comprise a plurality of first electrode strips; and

a plurality of first connecting line segments formed of the same first conductive layer as the at least one first electrode group, the first connecting line segments being insulated and separated from the at least one first electrode group;

an insulating layer disposed on the first conductive layer;

a plurality of second electrode groups arranged on the insulating layer, wherein the second electrode groups are sequentially arranged along a second direction and are in insulation staggered with the at least one first electrode group, each second electrode group comprises a third electrode group and a fourth electrode group, and the third electrode group and the fourth electrode group respectively comprise a plurality of second electrode strips; and

a plurality of second connecting line segments formed by the same second conductive layer as the second electrode groups, wherein the second electrode strips of the third electrode group in each second electrode group are electrically connected in series through at least one second connecting line segment to form a first electrode string, and the second electrode strips of the fourth electrode group in each second electrode group are electrically connected in series through at least one first connecting line segment to form a second electrode string; and

and performing a detection step, providing a first voltage signal at one end of each first electrode string and one end of each second electrode string, and measuring a corresponding second voltage signal from the other end of each first electrode string and the other end of each second electrode string, so as to determine whether each first electrode string and each second electrode string are open-circuited or whether a short circuit occurs between each first electrode string and a corresponding second electrode string.

12. The method of claim 11, wherein the sensor is a fingerprint sensor.

13. The method of claim 11, wherein the sensor is a touch panel.

14. The method of claim 11, further comprising performing a laser cutting process to electrically isolate the second electrode strips when the first electrode strings and the second electrode strings are not open and there is no short circuit between the first electrode strings and the second electrode strings.

15. The method of claim 11, wherein the detecting structure further comprises a plurality of third connecting lines and a plurality of fourth connecting lines, the third connecting line segments are formed by the first conductive layer, the fourth connecting line segments are formed by the second conductive layer, the first electrode strips of the first electrode group in the at least one first electrode group and the third connecting line segments are electrically connected in series to form a third electrode string, and the first electrode strips of the second electrode group in the at least one first electrode group and the fourth connecting line segments are electrically connected in series to form a fourth electrode string, and wherein the detecting step further comprises providing a third voltage signal to one end of each of the third electrode strings and one end of each of the fourth electrode strings, and measuring a corresponding fourth voltage signal from the other end of each third electrode string and the other end of each fourth electrode string.

16. The method of claim 15, further comprising performing a laser cutting process to electrically isolate the first electrode strips when there is no open circuit between each third electrode string and each fourth electrode string and there is no short circuit between each third electrode string and each fourth electrode string.

17. A sensor, comprising:

a substrate;

a plurality of first electrode strips arranged on the substrate, wherein the first electrode strips are sequentially arranged along a first direction;

a plurality of first line segments which are respectively and electrically connected with a corresponding first electrode strip;

a plurality of second electrode strips which are arranged in sequence along a second direction, insulated from the first electrode strips and staggered with the first electrode strips; and

and the protective ring is arranged at the outer sides of the first electrode strips and the second electrode strips and is insulated from the first electrode strips and the second electrode strips, wherein each first line segment is overlapped with the protective ring in the overlooking direction of the substrate.

18. The sensor of claim 17, wherein the sensor is a fingerprint sensor.

19. The sensor of claim 17, wherein the sensor is a touch panel.

20. The sensor as claimed in claim 17 wherein the first line segments and the first electrode strips are formed from the same first conductive layer, the second electrode strips and the guard ring are formed from a second conductive layer, and the sensor further comprises an insulating layer disposed between the first conductive layer and the second conductive layer.

21. The sensor of claim 20, further comprising a plurality of first conductive lines and a plurality of second conductive lines, wherein the first conductive lines are formed by the second conductive layer, and the second conductive lines are formed by the first conductive layer, wherein the second electrode strips comprise a plurality of first sub-electrode strips and a plurality of second sub-electrode strips, each of the first sub-electrode strips is electrically connected to a corresponding one of the first conductive lines, and each of the second sub-electrode strips is electrically connected to a corresponding one of the second conductive lines.

22. The sensor as claimed in claim 21, wherein the first conductive lines respectively electrically connecting two adjacent first sub-electrode strips are respectively disposed at two sides of the first sub-electrode strips, and the second conductive lines respectively electrically connecting two adjacent second sub-electrode strips are respectively disposed at two sides of the second sub-electrode strips.

23. The sensor as claimed in claim 21, further comprising four second line segments formed by the first conductive layer, wherein each of the second line segments is connected to two outermost first sub-electrode strips and two outermost second sub-electrode strips, the outermost first sub-electrode strip is disposed between a corresponding second line segment and a corresponding first conductive line, the outermost second sub-electrode strip is disposed between a corresponding second line segment and a corresponding second conductive line, and each of the second line segments overlaps the guard ring in a top view direction of the substrate.

24. The sensor as claimed in claim 23 further comprising four third segments respectively connected to the first conductive lines and the second conductive lines electrically connected to the second segments.

25. The sensor as claimed in claim 17, wherein the first electrode strips include a plurality of odd electrode strips and a plurality of even electrode strips, each of the odd electrode strips and each of the even electrode strips are alternately arranged along the first direction, the first line segments include a plurality of odd line segments and a plurality of even line segments, the odd line segments electrically connect the odd electrode strips to a same first signal terminal, and the even line segments electrically connect the even electrode strips to a same second signal terminal when the sensor is performing a test.