CN109405957A - A kind of electric and magnetic oscillation sensor - Google Patents
A kind of electric and magnetic oscillation sensor Download PDFInfo
- Publication number
- CN109405957A CN109405957A CN201811275732.6A CN201811275732A CN109405957A CN 109405957 A CN109405957 A CN 109405957A CN 201811275732 A CN201811275732 A CN 201811275732A CN 109405957 A CN109405957 A CN 109405957A
- Authority
- CN
- China
- Prior art keywords
- electric
- magnetic oscillation
- oscillation sensor
- pedestal
- reception device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/02—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by magnetic means, e.g. reluctance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The present invention provides a kind of electric and magnetic oscillation sensors, the electric and magnetic oscillation sensor includes: sensing device and reception device and the amplifier that connect with reception device, extraneous vibration is passed into pedestal by elastic device, drive Hall element mobile relative to c-type iron core by pedestal, make the electromotive force for generating variation in Hall element, sound equipment acoustic compliance can be increased when electric and magnetic oscillation sensor is used for acoustic sensor.
Description
Technical field
The present invention relates to sensor fields, and in particular to a kind of electric and magnetic oscillation sensor.
Background technique
Currently, just being developed using semiconductor integrated circuit manufacturing technology to following electric and magnetic oscillation sensor, the electricity
Magnetic vibration sensor on a silicon substrate lamination monocrystalline silicon or polysilicon and form film, and by the film be used as diaphragm.By silicon
The metal phases ratios such as the diaphragm and aluminium or titanium of composition, internal stress is few and density is low, therefore can obtain the electromagnetic vibration of high sensitivity
Dynamic sensor, and it is good with the matching of semiconductor integrated circuit manufacturing process.In the Electret Condencer Microphone of the prior art,
After the surface for the semiconductor substrate being made of monocrystalline silicon face is formed with diaphragm (movable electrode) and fixed electrode, partly lead at this
The back side peripheral part of structure base board forms etching mask, semiconductor substrate is etched from back side to surface, in semiconductor substrate
Central portion offers through hole.As a result, diaphragm will be fixed on the surface of semiconductor substrate, the hollow twelve Earthly Branches of central portion around it
It holds on through hole, can be vibrated by acoustical vibration etc..
But in the engraving method, when the substrate after the protective layer to etching surface is etched, film exposes to the open air
In the etchant of substrate, so the material as film can not use monocrystalline silicon or polysilicon.In addition, since film is direct
It is formed on substrate, so it is difficult to add the Stress Control for film, for improving venthole etc., electric and magnetic oscillation sensor
The process and structure of characteristic.
Summary of the invention
The technical scheme adopted by the invention is that: a kind of electric and magnetic oscillation sensor, the electric and magnetic oscillation sensor include:
Sensing device and reception device and the amplifier being connect with reception device；
The sensing device, comprising: c-type iron core and the induction coil being wrapped on c-type iron core；
The reception device, comprising: pedestal, the elastic device for setting Hall element on the base and being located at below pedestal；
The amplifier is connect with Hall element.
Further, corresponding with two ends of corresponding c-type iron core respectively there are two the Hall elements.
Further, the reception device under the drive of elastic device can relative induction device relative displacement, with inspection
Survey extraneous vibration.
Further, the elastic device is multiple resonant springs composition.
Further, the elastic device is multiple elastic slices composition.
The beneficial effects of the present invention are: application scheme can realize the miniaturization of electric and magnetic oscillation sensor, in addition, due to
The volume in aperture can be increased, sound equipment acoustic compliance can be increased when electric and magnetic oscillation sensor is used for acoustic sensor.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of electric and magnetic oscillation sensor according to an embodiment of the invention.
Specific embodiment
Invention is further described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1, its structure of the technical solution adopted in the present invention includes:
Sensing device 10 and reception device 20 and the amplifier 30 being connect with reception device 20；
The sensing device 10, comprising: c-type iron core 11 and the induction coil 12 being wrapped on c-type iron core 11；
The reception device 20, comprising: pedestal 21, the Hall element 22 being located on pedestal 21 and be located at the lower section of pedestal 21
Extraneous vibration is passed to pedestal 21 by elastic device 23, drives 22 phase of Hall element by pedestal 21 by elastic device 23
It is mobile to c-type iron core 11, make the electromotive force that variation is generated in Hall element 22；
The amplifier 30 is connect with Hall element 22, for the variation of the electromotive force in Hall element 22 is further
Amplification is finally output to carry out the test of display vibration on display.
Specifically, there are two the Hall elements 22, it is corresponding with two ends of corresponding c-type iron core 11 respectively.
Specifically, the reception device 20 under the drive of elastic device 23 can 10 relative displacement of relative induction device,
To detect extraneous vibration.
Specifically, the elastic device 23 is multiple resonant springs composition.
Specifically, the elastic device 23 is multiple elastic slices composition.
The beneficial effects of the present invention are: application scheme can realize the miniaturization of electric and magnetic oscillation sensor, in addition, due to
Extraneous vibration is passed to pedestal by elastic device, drives Hall element with respect to C by pedestal by the volume that can increase aperture
Shaped iron core is mobile, makes the electromotive force that variation is generated in Hall element, can be when electric and magnetic oscillation sensor is used for acoustic sensor
Increase sound equipment acoustic compliance.
It should be noted that described in attached drawing positional relationship for only for illustration, should not be understood as to this
The limitation of patent, it is clear that the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be
Restriction to embodiments of the present invention.For those of ordinary skill in the art, on the basis of the above description also
It can make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all
Made any modifications, equivalent replacements, and improvements etc. within the spirit and principles in the present invention should be included in right of the present invention and want
Within the protection scope asked.
Claims (5)
1. a kind of electric and magnetic oscillation sensor, which is characterized in that the electric and magnetic oscillation sensor includes: sensing device and reception device
And the amplifier being connect with reception device；
The sensing device, comprising: c-type iron core and the induction coil being wrapped on c-type iron core；
The reception device, comprising: pedestal, the elastic device for setting Hall element on the base and being located at below pedestal；
The amplifier is connect with Hall element.
2. electric and magnetic oscillation sensor according to claim 1, which is characterized in that there are two the Hall elements, respectively with
Two ends of corresponding c-type iron core are corresponding.
3. electric and magnetic oscillation sensor according to claim 2, which is characterized in that band of the reception device in elastic device
It is dynamic lower can relative induction device relative displacement, to detect the vibration in the external world.
4. electric and magnetic oscillation sensor according to claim 3, which is characterized in that the elastic device is multiple resonant springs
Composition.
5. electric and magnetic oscillation sensor according to claim 3, which is characterized in that the elastic device is multiple shrapnel groups
At.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811275732.6A CN109405957A (en) | 2018-10-30 | 2018-10-30 | A kind of electric and magnetic oscillation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811275732.6A CN109405957A (en) | 2018-10-30 | 2018-10-30 | A kind of electric and magnetic oscillation sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109405957A true CN109405957A (en) | 2019-03-01 |
Family
ID=65469771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811275732.6A Pending CN109405957A (en) | 2018-10-30 | 2018-10-30 | A kind of electric and magnetic oscillation sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109405957A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111122903A (en) * | 2020-01-09 | 2020-05-08 | 华中科技大学 | Self-powered electromagnetic motion perception sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4749056A (en) * | 1987-01-22 | 1988-06-07 | Kabushiki Kaisha Iwata Electric | Sensor of the theft and the like of an automobile |
| CN201724652U (en) * | 2010-07-28 | 2011-01-26 | 刘飞 | Hall linear micro-distance sensor |
| JP5218988B2 (en) * | 2009-07-27 | 2013-06-26 | 株式会社ユピテル | Vibration detector |
| CN204514463U (en) * | 2015-03-25 | 2015-07-29 | 华北电力大学 | A kind of inertia vibration-measuring sensor based on Hall effect |
-
2018
- 2018-10-30 CN CN201811275732.6A patent/CN109405957A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4749056A (en) * | 1987-01-22 | 1988-06-07 | Kabushiki Kaisha Iwata Electric | Sensor of the theft and the like of an automobile |
| JP5218988B2 (en) * | 2009-07-27 | 2013-06-26 | 株式会社ユピテル | Vibration detector |
| CN201724652U (en) * | 2010-07-28 | 2011-01-26 | 刘飞 | Hall linear micro-distance sensor |
| CN204514463U (en) * | 2015-03-25 | 2015-07-29 | 华北电力大学 | A kind of inertia vibration-measuring sensor based on Hall effect |
Non-Patent Citations (1)
| Title |
|---|
| 朱世国 等: "《大学基础物理实验》", 31 October 1988, 四川大学出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111122903A (en) * | 2020-01-09 | 2020-05-08 | 华中科技大学 | Self-powered electromagnetic motion perception sensor |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190301 |
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| RJ01 | Rejection of invention patent application after publication |