CN109297932A - A kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz - Google Patents
A kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz Download PDFInfo
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- CN109297932A CN109297932A CN201810991427.0A CN201810991427A CN109297932A CN 109297932 A CN109297932 A CN 109297932A CN 201810991427 A CN201810991427 A CN 201810991427A CN 109297932 A CN109297932 A CN 109297932A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N2021/4776—Miscellaneous in diffuse reflection devices
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Abstract
The invention discloses a kind of quasi-optical servo scarnning mirror continuous wave reflection imaging systems of Terahertz, it include: terahertz signal source (1), electromagnetic horn (2), Fresnel lens A (3), beam splitter (4), Fresnel lens B (5), sample platform (9) and computer (11), further includes: refluxing reflection mirror (6), plane of scanning motion mirror (7), servo (8) and self-mixing terahertz detector (10)；The present invention replaces the automatically controlled bracket scanning of two dimension using quasi-optical servo lens scanning technique, can be improved the acquisition speed of sample data；Pyroelectric detector is replaced using self-mixing terahertz detector simultaneously, improves the response speed of signal detection, can effectively cooperate plane of scanning motion mirror to realize the acquisition to sample to be tested reflected image information, meet the higher application of requirement of real-time.
Description
Technical field
The present invention relates to a kind of THz continuous wave reflection imaging system, especially a kind of quasi-optical servo scarnning mirror of Terahertz
Continuous wave reflection imaging system.
Background technique
THz wave has good penetrability, certain specific substances, in THz wave to nonpolarity, nonmetallic substance
There are absorption peaks for section, therefore terahertz wave band is usually used in sample detection.THz continuous wave reflection imaging system is due to only recording
The strength information of sample reflection, and time delay device is not needed, simple compared to terahertz time-domain spectroscopy imaging system structure,
Easy to operate, data acquisition fast speed has application prospect in some aspects.Existing THz continuous wave catoptric imaging system
It include: terahertz signal source, electromagnetic horn, chopper, imaging len, beam splitter, thermal detector, automatically controlled movement branch as unified
Frame, computer.Sample to be tested is fixed in scanning bracket, and computer control scanning bracket is scanned, so that imaging len
Converging beam is successively incident on the different position of sample to be tested, is obtained by the two-dimensional intensity information that thermal detector acquires sample reflection
Obtain the reflected image of target.But automatically controlled motion bracket scanning speed and thermal detector response speed are limited, want in real-time
Higher occasion THz continuous wave reflection imaging system is asked to be unable to satisfy use demand.
Summary of the invention
It is an object of that present invention to provide a kind of quasi-optical servo scarnning mirror continuous wave reflection imaging systems of Terahertz, solve automatically controlled
Motion bracket scanning speed and thermal detector response speed are limited, and under the higher occasion of requirement of real-time, Terahertz is continuous
The problem of wave reflection imaging system is unable to satisfy use demand.
A kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz, comprising: terahertz signal source, loudspeaker day
Line, Fresnel lens A, beam splitter, Fresnel lens B, sample platform, computer further include refluxing reflection mirror, the plane of scanning motion
Mirror, servo, self-mixing terahertz detector.
Using confocal transmission imaging optical path, connection relationship are as follows: the delivery outlet in terahertz signal source and horn feed are defeated
Entrance connection；The front focus of Fresnel lens A is overlapped with the Gauss beam waist position of electromagnetic horn, the rear focus of Fresnel lens A
It is overlapped with the front focus position of Fresnel lens B, beam splitter is placed on the public focus of Fresnel lens A Yu Fresnel lens B
Place；Refluxing reflection mirror is placed in behind Fresnel lens B, plane of scanning motion mirror staggered relatively, sample parallel with refluxing reflection mirror
Sampling platform is located at behind plane of scanning motion mirror, at the rear focus convergence of Fresnel lens B.The reception window of self-mixing terahertz detector
Mouth is located on the reflected light path of beam splitter, and the data output of self-mixing terahertz detector and the data of computer are acquired and inputted
Mouth connection, servo is located at the back of plane of scanning motion mirror, while the control mouth of servo and the control mouth of computer connect.
More preferably, the self-mixing terahertz detector is a kind of based on the spy of GaN/AlGaN field-effect tube room temperature Terahertz
Device is surveyed, non-linear using field-effect tube exports the voltage signal for being proportional to incident wave energy to THz wave self-mixing is received,
The detector has the characteristics that fast response time, high sensitivity.
More preferably, the electromagnetic horn is using the diagonal form pyramidal horn antenna or circular cone ripple that can radiate Gaussian beam
Electromagnetic horn, radiation efficiency are greater than 85%.
More preferably, the beam splitter is the semi-transparent semi-reflecting lens of high resistance silicon materials, with optical path placement at 45 °, emits optical path
Using its transmissison characteristic, receiving light path utilizes its reflection characteristic.
Further, when imaging system works, emit in optical path, terahertz signal source output signal is converted through electromagnetic horn
It is radiate at Gaussian beam, Gaussian beam converges and be incident on beam splitter by Fresnel lens A, and Fresnel lens A's goes out
It penetrates light and enters Fresnel lens B after beam splitter transmits, outgoing beam enters reflection of turning back after Fresnel lens B convergence
Mirror, the emergent light of refluxing reflection mirror enter plane of scanning motion mirror, the emergent light of plane of scanning motion mirror converge on sample platform to
It surveys in target；On receiving light path, the THz wave of object to be measured reflection is scanned plane mirror and refluxing reflection mirror reflection is laggard
Enter Fresnel lens B, Fresnel lens B converges the THz wave for receiving object to be measured reflection again, is redirected back into beam splitting
The THz wave for carrying object to be measured image information is reflected on self-mixing terahertz detector by mirror, beam splitter；In imaging process
Plane of scanning motion mirror position different to object to be measured on sample platform under the control of servo is scanned, due to object to be measured
The difference of different location surface and internal structure, the reflected terahertz that self-mixing terahertz detector receives hereby wave signal strength or weakness
With regard to difference；Computer control servo scanning works asynchronously with the reception of self-mixing terahertz detector signal, and it is defeated to acquire servo in real time
The voltage data of angle signal and the output of self-mixing terahertz detector out, handles finally by computer data analysis, obtains
The Terahertz two dimension reflected image of the object to be measured arrived, to realize the non-destructive testing to object to be measured.
The present invention replaces the automatically controlled bracket scanning of two dimension using quasi-optical servo lens scanning technique, can be improved sample data
Acquisition speed；Pyroelectric detector is replaced using self-mixing terahertz detector simultaneously, improves the response speed of signal detection,
It can effectively cooperate plane of scanning motion mirror to realize the acquisition to sample to be tested reflected image information, it is higher to meet requirement of real-time
Application.
Detailed description of the invention
A kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system schematic diagram of Terahertz of Fig. 1.
1. 2. electromagnetic horn, 3. Fresnel lens A, 4. beam splitter 5. Fresnel lens B6. in terahertz signal source turns back
10. self-mixing terahertz detector of reflecting mirror 7. plane of scanning motion mirror, 8. servo, 9. sample platform, 11. computer
Specific embodiment
A kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz, comprising: terahertz signal source 1, loudspeaker day
Line 2, Fresnel lens A3, beam splitter 4, Fresnel lens B5, sample platform 9, computer 11, further includes: refluxing reflection mirror
6, plane of scanning motion mirror 7, servo 8, self-mixing terahertz detector 10.
Imaging system, connection relationship are built using confocal transmission optical path are as follows: the delivery outlet and loudspeaker day in terahertz signal source 1
Line 2 feeds input port connection；The front focus of Fresnel lens A3 is overlapped with the Gauss beam waist position of electromagnetic horn 2, and Fresnel is saturating
The rear focus of mirror A3 is overlapped with the front focus position of Fresnel lens B5, and beam splitter 4 is placed on Fresnel lens A3 and Fresnel
At the public focus of lens B5；Refluxing reflection mirror 6 is placed in behind Fresnel lens B5, plane of scanning motion mirror 7 and reflection of turning back
Mirror 6 is parallel staggered relatively, and sample platform 9 is located at behind plane of scanning motion mirror 7, at the rear focus convergence of Fresnel lens B5.From
The reception window of mixing terahertz detector 10 is located on the reflected light path of beam splitter 4, the number of self-mixing terahertz detector 10
It being connect according to the data acquisition input port of delivery outlet and computer 11, servo 8 is located at the back of plane of scanning motion mirror 7, while servo 8
Control mouth is connect with the control mouth of computer 11.
Self-mixing terahertz detector 10 is a kind of based on GaN/AlGaN field-effect tube room temperature terahertz detector, is utilized
Field-effect tube it is non-linear to THz wave self-mixing is received, output is proportional to the voltage signal of incident wave energy, the detector
Have the characteristics that fast response time, high sensitivity.
Electromagnetic horn 2, use can radiate the diagonal form pyramidal horn antenna or conical corrugated speaker antenna of Gaussian beam,
Radiation efficiency is greater than 85%.
Beam splitter 4 is the semi-transparent semi-reflecting lens of high resistance silicon materials, with optical path placement at 45 °, emits optical path using its transmission
Characteristic, receiving light path utilize its reflection characteristic.
When work, emit in optical path, 1 output signal of terahertz signal source is transformed into Gaussian beam through electromagnetic horn 2 and radiates
It goes out, Gaussian beam converges and be incident on beam splitter 4 by Fresnel lens A3, and the emergent light of Fresnel lens A3 passes through beam splitting
Mirror 4 enters Fresnel lens B5 after transmiting, and outgoing beam enters refluxing reflection mirror 6 after Fresnel lens B5 convergence, turns back anti-
The emergent light for penetrating mirror 6 enters plane of scanning motion mirror 7, and the emergent light of plane of scanning motion mirror 7 converges in the object to be measured on sample platform 9
On.On receiving light path, the THz wave of object to be measured reflection enters phenanthrene after being scanned plane mirror 7 and the reflection of refluxing reflection mirror 6
Alunite ear lens B5, Fresnel lens B5 converge the THz wave for receiving object to be measured reflection again, are redirected back into beam splitter
4, the THz wave for carrying object to be measured image information is reflected on self-mixing terahertz detector 10 by beam splitter 4.Imaging process
Middle plane of scanning motion mirror 7 position different to object to be measured on sample platform 9 under the control of servo 8 is scanned, due to
The difference of target different location surface and internal structure is surveyed, the reflected terahertz that self-mixing terahertz detector 10 receives hereby believe by wave
Number power is also just different.Computer 11 controls the scanning of servo 8 and works asynchronously with the reception of 10 signal of self-mixing terahertz detector, real
When acquisition servo 8 export angle signal and self-mixing terahertz detector 10 export voltage data, finally by computer
11 Data Analysis Services, the Terahertz two dimension reflected image of obtained object to be measured, to realize the lossless inspection to object to be measured
It surveys.
Claims (5)
1. a kind of quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz, comprising: terahertz signal source (1), loudspeaker day
Line (2), Fresnel lens A (3), beam splitter (4), Fresnel lens B (5), sample platform (9) and computer (11), it is special
Sign is further include: refluxing reflection mirror (6), plane of scanning motion mirror (7), servo (8) and self-mixing terahertz detector (10)；
Imaging system, connection relationship are built using confocal transmission optical path are as follows: the delivery outlet and electromagnetic horn of terahertz signal source (1)
(2) feed input port connection；The front focus of Fresnel lens A (3) is overlapped with the Gauss beam waist position of electromagnetic horn (2), Fei Nie
The rear focus of ear lens A (3) is overlapped with the front focus position of Fresnel lens B (5), and beam splitter (4) is placed on Fresnel lens A
(3) and at the public focus of Fresnel lens B (5)；Refluxing reflection mirror (6) is placed in behind Fresnel lens B (5), scanning
Plane mirror (7) is parallel with refluxing reflection mirror (6) staggered relatively, and sample platform (9) is located at plane of scanning motion mirror (7) back, Fei Nie
At the rear focus convergence of ear lens B (5)；The reception window of self-mixing terahertz detector (10) is located at the reflection of beam splitter (4)
In optical path, the data output of self-mixing terahertz detector (10) is connect with the data of computer (11) acquisition input port, is watched
Clothes (8) are located at the back of plane of scanning motion mirror (7), while the control mouth of servo (8) is connect with the control mouth of computer (11).
2. the quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz according to claim 1, which is characterized in that institute
Stating self-mixing terahertz detector (10) is a kind of based on GaN/AlGaN field-effect tube room temperature terahertz detector, is imitated using field
Should pipe it is non-linear to THz wave self-mixing is received, output is proportional to the voltage signal of incident wave energy.
3. the quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz according to claim 1, which is characterized in that institute
It states electromagnetic horn (2), using the diagonal form pyramidal horn antenna or conical corrugated speaker antenna that can radiate Gaussian beam, radiation
Efficiency is greater than 85%.
4. the quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz according to claim 1, which is characterized in that institute
The semi-transparent semi-reflecting lens that beam splitter (4) are high resistance silicon materials to be stated, are placed with optical path at 45o, transmitting optical path utilizes its transmissison characteristic,
Receiving light path utilizes its reflection characteristic.
5. the quasi-optical servo scarnning mirror continuous wave reflection imaging system of Terahertz according to any one of claims 1 to 4, feature
It is, when imaging system works, emits in optical path, terahertz signal source (1) output signal is transformed into Gauss through electromagnetic horn (2)
Beam radiation is gone out, and Gaussian beam is converged and is incident on beam splitter (4) by Fresnel lens A (3), Fresnel lens A's (3)
Emergent light by beam splitter (4) transmit after enter Fresnel lens B (5), through Fresnel lens B (5) convergence after outgoing beam into
Enter refluxing reflection mirror (6), the emergent light of refluxing reflection mirror (6) enters plane of scanning motion mirror (7), the emergent light of plane of scanning motion mirror (7)
It converges in the object to be measured on sample platform (9)；On receiving light path, the THz wave of object to be measured reflection is scanned flat
Enter Fresnel lens B (5) after face mirror (7) and refluxing reflection mirror (6) reflection, Fresnel lens B (5) will receive object to be measured
The THz wave of reflection converges again, is redirected back into beam splitter (4), and beam splitter (4) will carry the terahertz of object to be measured image information
In hereby wave reflection to self-mixing terahertz detector (10)；Plane of scanning motion mirror (7) is under the control of servo (8) pair in imaging process
The different position of object to be measured is scanned on sample platform (9), due to object to be measured different location surface and internal structure
Difference, hereby wave signal strength or weakness is also just different for the reflected terahertz that self-mixing terahertz detector (10) receives；Computer (11)
Control servo (8) scanning works asynchronously with the reception of self-mixing terahertz detector (10) signal, acquires servo (8) output in real time
The voltage data of angle signal and self-mixing terahertz detector (10) output, at computer (11) data analysis
Reason, the Terahertz two dimension reflected image of obtained object to be measured, to realize the non-destructive testing to object to be measured.
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Cited By (3)
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|---|---|---|---|---|
| CN111024642A (en) * | 2019-10-30 | 2020-04-17 | 东南大学 | Terahertz wave beam splitting system |
| CN112304431A (en) * | 2019-07-26 | 2021-02-02 | 中国科学院上海微系统与信息技术研究所 | Imaging system and imaging method |
| CN114216853A (en) * | 2021-12-13 | 2022-03-22 | 清华大学 | Real-time detection system and method based on terahertz leaky-wave antenna |
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| CN112304431A (en) * | 2019-07-26 | 2021-02-02 | 中国科学院上海微系统与信息技术研究所 | Imaging system and imaging method |
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| CN114216853A (en) * | 2021-12-13 | 2022-03-22 | 清华大学 | Real-time detection system and method based on terahertz leaky-wave antenna |
| CN114216853B (en) * | 2021-12-13 | 2023-12-29 | 清华大学 | Real-time detection system and method based on terahertz leaky-wave antenna |
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