CN109283476A - The low frequency intrinsic noise test macro and test method of Magnetic Sensor - Google Patents
The low frequency intrinsic noise test macro and test method of Magnetic Sensor Download PDFInfo
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- CN109283476A CN109283476A CN201811041109.4A CN201811041109A CN109283476A CN 109283476 A CN109283476 A CN 109283476A CN 201811041109 A CN201811041109 A CN 201811041109A CN 109283476 A CN109283476 A CN 109283476A
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The present invention provides the low frequency intrinsic noise test macro and test method of a kind of Magnetic Sensor, comprising: is set to the steady field Magnetic Sensor and Magnetic Sensor to be measured of compensating module；The detection signal for reading the output signal of steady field Magnetic Sensor and Magnetic Sensor to be measured reads module；The signal that steady field Magnetic Sensor is detected feeds back the feedback module into compensating module；Generate the compensating module in the compensation magnetic field opposite with environmental magnetic field fluctuation.Steady field Magnetic Sensor detection environmental magnetic field is simultaneously fed back to compensating module, and the compensating module generation compensation magnetic field opposite with environmental magnetic field obtains stabilizing magnetic field；Magnetic Sensor to be measured detects environmental magnetic field in stabilizing magnetic field, exports the low frequency intrinsic noise of stabilizing magnetic field signal and Magnetic Sensor to be measured.The present invention effectively suppresses environment magnetic fluctuation using dynamic compensation way, to achieve the purpose that stabilizing magnetic field, and then accurately measures the low frequency intrinsic noise of Magnetic Sensor.
Description
Technical field
The present invention relates to magnetic field detection fields, a kind of low frequency intrinsic noise test macro more particularly to Magnetic Sensor and
Test method.
Background technique
Superconducting quantum interference device (Superconducting Quantum Interference Device, SQUID) is
The most sensitive Magnetic Sensor being currently known, wherein low-temperature superconducting SQUID sensitivity can be better than 1fT/Hz1/2, it is important high-end
Using Magnetic Sensor, it is widely used in biologic medical, the fields such as geophysical exploration and basic research.SQUID Magnetic Sensor
It is limit detection, magnetic sensor device important in scientific research, there is very high scientific research and application value.
To the high sensitivity magnetic sensors intrinsic noise such as SQUID, the test of especially low-frequency noise is usually a difficult point.
It usually measures, and is testing under good magnetic screen (superconducting shielding or magnetic shield room, magnetic shielding barrel etc.) environment at present
Mechanical oscillation bring additional noise should be reduced to the greatest extent in the process.Nonetheless, it is also difficult to guarantee to measure Magnetic Sensor
Intrinsic noise.
Therefore, the low frequency intrinsic noise of Magnetic Sensor how is accurately measured, it has also become those skilled in the art urgently solve
One of certainly the problem of.
Summary of the invention
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of low frequency of Magnetic Sensor is intrinsic
Noise measuring system and test method, the low frequency intrinsic noise measuring condition for solving Magnetic Sensor in the prior art is harsh,
The problems such as accuracy is low.
To achieve the above object and his related purpose, the present invention provide a kind of low frequency intrinsic noise test system of Magnetic Sensor
System, the low frequency intrinsic noise test macro of the Magnetic Sensor include at least:
Steady field Magnetic Sensor, Magnetic Sensor to be measured, detection signal read module, feedback module and compensating module；
The steady field Magnetic Sensor and the Magnetic Sensor to be measured are set in the compensating module；
The detection signal reads the output end that module is connected to the steady field Magnetic Sensor and the Magnetic Sensor to be measured,
For reading the output signal of the steady field Magnetic Sensor and the Magnetic Sensor to be measured；
The input terminal of the feedback module is connected to the detection signal and reads described in the output end of module, output end connection
Compensating module, the signal for detecting the steady field Magnetic Sensor are fed back into the compensating module；
The compensating module is generated based on the output signal of the feedback module and fluctuates opposite compensation magnetic with environmental magnetic field
?.
Optionally, the Magnetic Sensor to be measured includes SQUID Magnetic Sensor, Hall magnetic sensor, anisotropic magnetoresistance
Magnetic Sensor or giant magnetoresistance Magnetic Sensor.
Optionally, the steady field Magnetic Sensor includes SQUID Magnetic Sensor, Hall magnetic sensor, anisotropic magnetoresistance
Magnetic Sensor or giant magnetoresistance Magnetic Sensor.
Optionally, the steady field Magnetic Sensor includes the SQUID magnetometer being set at least one axial direction.
More optionally, the Magnetic Sensor low frequency intrinsic noise test macro further includes providing for the SQUID magnetometer
The refrigerant liquid of low temperature environment, the refrigerant liquid are placed in Non-magnetic dewar.
More optionally, it includes SQUID reading circuit that the detection signal, which reads module, and the SQUID reading circuit leads to
Road is corresponding with the quantity of the SQUID magnetometer.
More optionally, the steady field Magnetic Sensor include three SQUID magnetometers, be respectively arranged at three it is mutually perpendicular
In plane.
More optionally, the compensating module includes being respectively arranged at three mutually perpendicular axial bucking coils, and each
The axial direction of SQUID magnetometer is correspondingly arranged.
Optionally, the feedback module includes at least proportional integral differential circuit all the way, the proportional integral differential circuit
Input terminal connect described one axial direction of steady field Magnetic Sensor detection signal, output end connection and the detection signal of input it is axial
Consistent bucking coil.
More optionally, the proportional integral differential circuit includes that sequentially connected proportional amplifier, integrator and power are put
Big device.
Optionally, the compensating module includes the consistent bucking coil of axial direction with the steady field Magnetic Sensor.
More optionally, the bucking coil is positive polygon or round.
More optionally, each axial direction includes two bucking coils, and two bucking coils in any axial direction are respectively arranged at
The two sides of the steady field Magnetic Sensor.
More optionally, the low frequency intrinsic noise test macro of the Magnetic Sensor further includes data acquisition module, is connected to
The detection signal reads module, for obtaining the output signal of the detection signal reading module and being handled.
More optionally, the steady field Magnetic Sensor and the Magnetic Sensor to be measured use the same Magnetic Sensor.
To achieve the above object and his related purpose, the present invention also provides a kind of above-mentioned Magnetic Sensor low frequency intrinsic noises to survey
The Magnetic Sensor low frequency intrinsic noise test method of test system, the Magnetic Sensor low frequency intrinsic noise test method are at least wrapped
It includes:
Steady field Magnetic Sensor detects environmental magnetic field, the signal feedback that the steady field Magnetic Sensor is detected to compensation mould
Block, the compensating module generate the compensation magnetic field opposite with environmental magnetic field, dynamically compensate the environmental magnetic field, and then stablized
Magnetic field；
Magnetic Sensor to be measured detects environmental magnetic field in the stabilizing magnetic field, exports stabilizing magnetic field signal and the magnetic to be measured
The low frequency intrinsic noise of sensor, and then obtain the low frequency intrinsic noise of the Magnetic Sensor to be measured.
As described above, the low frequency intrinsic noise test macro and test method of Magnetic Sensor of the invention, have with following
Beneficial effect:
Magnetic Sensor low frequency intrinsic noise test macro of the invention and test method are provided using the method for dynamic compensation
One stabilizing magnetic field, effect compacting environmental magnetic field low-frequency noise, for Magnetic Sensor to be measured low frequency intrinsic noise provide it is good
Environment, and then obtain the low frequency intrinsic noise of accurate Magnetic Sensor；The present invention has system simple, the reliable advantage of method.
Detailed description of the invention
Fig. 1 is shown as a kind of embodiment of the low frequency intrinsic noise test macro of Magnetic Sensor of the invention.
Fig. 2 is shown as the structural schematic diagram of SQUID three axis magnetometer of the invention.
Fig. 3 is shown as the structural schematic diagram of feedback module of the invention.
Fig. 4 is shown as the another embodiment of the low frequency intrinsic noise test macro of Magnetic Sensor of the invention.
Fig. 5 is shown as the prior art and low frequency noise measurement result of the invention.
Component label instructions
The low frequency intrinsic noise test macro of 1 Magnetic Sensor
11 steady Magnetic Sensors
The SQUID magnetometer of 11a~11c first~the 3rd
12 Magnetic Sensors to be measured
13 detection signals read module
14 feedback modules
141~143 first~third proportional integral differential circuits
1411 proportional amplifiers
1412 integrators
1413 power amplifiers
15 compensating modules
16 data acquisition modules
17 Non-magnetic dewars
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from
Various modifications or alterations are carried out under spirit of the invention.
Please refer to FIG. 1 to FIG. 5.It should be noted that diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, only shown in schema then with related component in the present invention rather than package count when according to actual implementation
Mesh, shape and size are drawn, when actual implementation kenel, quantity and the ratio of each component can arbitrarily change for one kind, and its
Assembly layout kenel may also be increasingly complex.
Embodiment one
As shown in Figure 1, the present embodiment provides a kind of low frequency intrinsic noise test macro 1 of Magnetic Sensor, the magnetic sensing
The low frequency intrinsic noise test macro 1 of device includes:
Steady field Magnetic Sensor 11, Magnetic Sensor to be measured 12, detection signal read module 13, feedback module 14, compensating module
15 and data acquisition module 16.
As shown in Figure 1, the steady field Magnetic Sensor 11 is set in the compensating module 15.
Specifically, the steady field Magnetic Sensor 11 include but is not limited to SQUID Magnetic Sensor, Hall magnetic sensor, respectively to
Anisotropic magneto-resistor Magnetic Sensor or giant magnetoresistance Magnetic Sensor.In the present embodiment, the steady field Magnetic Sensor 11 is SQUID magnetic
Sensor, more specifically, the steady field Magnetic Sensor 11 is SQUID three axis magnetometer.As shown in Figure 1, the tri- axis magnetic of SQUID
Strong meter is immersed in refrigerant liquid, and is set to 15 center of compensating module, and the SQUID three axis magnetometer is for detecting three
A axial environmental magnetic field fluctuation.As shown in Fig. 2, the SQUID three axis magnetometer includes three SQUID magnetometers, in this reality
It applies in example, the first SQUID magnetometer 11a, the 2nd SQUID magnetometer 11b and the 3rd SQUID magnetometer 11c are respectively arranged at one
On the front surface of regular cube, upper surface and left surface (three orthogonal surfaces).Each SQUID magnetic strength is calculated as a circle
Ring, the SQUID magnetometer are made of superconductor, and the magnetometer signal for will test is converted to voltage signal.
Specifically, the SQUID three axis magnetometer work is in the low temperature environment for making it into superconducting state.It is described
SQUID three axis magnetometer 1 is placed in Non-magnetic dewar 17, holds the refrigerating fluid for being provided with low temperature environment in the Non-magnetic dewar 17
Body, the SQUID three axis magnetometer are immersed in the refrigerant liquid, to ensure that it is super that the SQUID three axis magnetometer works in
Lead state.If the SQUID three axis magnetometer is made of high temperature superconducting materia, the refrigerant liquid is that (temperature is about liquid nitrogen
77K)；If the SQUID three axis magnetometer is made of low temperature superconducting material, the refrigerant liquid is that (temperature is about liquid helium
4.2K).In actual use, the refrigerant liquid can be replaced as needed, be not limited to this embodiment.
As shown in Figure 1, the Magnetic Sensor to be measured 12 is set in the compensating module 15.
Specifically, the Magnetic Sensor to be measured 12 include but is not limited to SQUID Magnetic Sensor, Hall magnetic sensor, respectively to
Anisotropic magneto-resistor Magnetic Sensor or giant magnetoresistance Magnetic Sensor.In the present embodiment, the Magnetic Sensor to be measured 12 is SQUID magnetic
Sensor, more specifically, the Magnetic Sensor to be measured 12 is SQUID three axis magnetometer, structure and the steady field Magnetic Sensor
11 is identical, will not repeat them here.
As shown in Figure 1, the detection signal, which reads module 13, is connected to the steady field Magnetic Sensor 11 and the magnetic to be measured
The output end of sensor 12, for reading the output signal of the steady field Magnetic Sensor 11 and the Magnetic Sensor to be measured 12.
Specifically, in the present embodiment, it is SQUID reading circuit that the detection signal, which reads module 13, and the SQUID is read
Circuit includes LIULUTONG road out, corresponding with the quantity of the SQUID magnetometer.The SQUID reading circuit works in room temperature ring
In border, it is connected by conducting wire with the SQUID three axis magnetometer, each SQUID magnetometer is debugged using multichannel playback mode
Operating point works normally each SQUID magnetometer, and reads after the signal that each SQUID magnetometer detects is handled.Institute
Stating SQUID reading circuit can be used any one SQUID reading circuit realization in the prior art, not carry out herein to its structure
It illustrates one by one.
As shown in Figure 1, the input terminal of the feedback module 14 be connected to it is described detection signal read module 13 output end,
Output end connects the compensating module 15, the signal feedback for detecting the steady field Magnetic Sensor 11 to the compensation mould
In block 15.
Specifically, the feedback module 14 includes that at least proportional integral differential circuit, the proportional integral differential are electric all the way
The input terminal on road connects the detection signal of the detection signal of described 11 1 axial directions of steady field Magnetic Sensor, output end connection and input
Axial consistent bucking coil.In the present embodiment, the feedback module 14 includes the first proportional integral differential circuit 141, the
Two proportional integral differential circuits 142 and third proportional integral differential circuit 143, the input terminal difference of each proportional integral differential circuit
Magnetometer detection signal, the output end for connecting an axial direction are separately connected corresponding bucking coil.The steady field Magnetic Sensor 11
In the signal that detects of the first SQUID magnetometer 11a be input to the input of the first proportional integral differential circuit 141
Ina is held, is output in the compensating module 15 and described first after the first proportional integral differential circuit 141 processing
(in the present embodiment, it is located at and the first SQUID magnetometer on the parallel bucking coil of plane where SQUID magnetometer 11a
The parallel bucking coil of plane where 11a includes two, the output end Outa connection of the first proportional integral differential circuit 141
Two bucking coils, Fig. 1 are to simplify only to connect a bucking coil).The first proportional integral differential circuit 141 includes ratio
Amplifier 1411, is connected to the integrator 1412 of 1411 output end of proportional amplifier, and is connected to the integrator 1412
The power amplifier 1413 of output end.Similarly, input terminal Inb, the output end Outb of the second proportional integral differential circuit 142
And input terminal Inc, the output end Outc of the third proportional integral differential circuit 143 are separately connected corresponding input signal and defeated
Signal out, and particular circuit configurations are similar with the first proportional integral differential circuit 141, will not repeat them here.
It should be noted that the structure of each proportional integral differential circuit includes but is not limited to cited by the present embodiment, arbitrarily
The circuit structure for being able to achieve proportional integral differential is suitable for the present invention.
As shown in Figure 1, the compensating module 15 is generated and environmental magnetic field wave based on the output signal of the feedback module 14
Opposite compensation magnetic field is moved, to have the function that stabilizing magnetic field fluctuates.
Specifically, in the present embodiment, the compensating module 15 is three axis bucking coils, including is respectively arranged at three mutually
Perpendicular axial bucking coil, it is axial corresponding with three of the steady field Magnetic Sensor 11.In the present embodiment, each compensation
Coil is square, and same axis sets up two bucking coils, and the two sides for being located at the steady field Magnetic Sensor 11 (mention
Highfield uniformity)；The center of same two axial bucking coils be overlapped in its axially vertical plane, three axis
The outer profile of bucking coil is cube, and the steady field Magnetic Sensor 11 is located at the center of the cube structure.
It should be noted that the shape of the bucking coil includes but is not limited to other cyclic structures, it is equal to improve magnetic field
Even property, preferably regular polygon or circle.The quantity of bucking coil in same axial direction is at least one, can be set as needed
The quantity of bucking coil, is not limited to this embodiment.
As shown in Figure 1, the data acquisition module 16 is connected to the output end that the detection signal reads module 13, read
The output signal of the Magnetic Sensor to be measured 12 is simultaneously handled, and the low frequency to obtain the Magnetic Sensor to be measured 12 is intrinsic to make an uproar
Sound.
Specifically, in the present embodiment, the data acquisition module 16 is realized using computer.
It should be noted that the present embodiment uses triple channel compensation model, i.e., the described steady field Magnetic Sensor 11 is set as
SQUID three axis magnetometer, it includes three channels corresponding with the steady field Magnetic Sensor 11 that the detection signal, which reads module 13,
And channel (being also three in the present embodiment) corresponding with the Magnetic Sensor 12 to be measured, the feedback module 14 includes three road ratios
Example integral differential circuit, the compensating module 15 are set as three axis bucking coils；Pass through three sets of mutually orthogonal Magnetic Sensors, three
It covers compensation circuit and three sets of mutually orthogonal bucking coils realizes preferably steady field effect, and the magnetic of multiple directions can be passed simultaneously
Sensor carries out noise testing, has better test effect.Wherein, the type of steady field Magnetic Sensor 11 is not limited to the present embodiment
SQUID Magnetic Sensor.In actual use, single-channel compensation mode can be used, i.e., only with single pass Magnetic Sensor, single-pass
The bucking coil of road compensating module and single direction, to simplify system.Detection letter of the invention can be set according to the quantity in channel
Number read module 13, feedback module 14, compensating module 15 number of channels, be not limited to this embodiment.
It should be noted that the type and structure of the steady field Magnetic Sensor 11 and the Magnetic Sensor 12 to be measured are not necessarily to phase
Together, it is not limited to this embodiment.
The working principle of the low frequency intrinsic noise test macro of the Magnetic Sensor is as follows:
1) the steady field Magnetic Sensor 11 detects environmental magnetic field, and the signal that the steady field Magnetic Sensor 11 is detected is fed back
To compensating module 15, the compensating module 15 generates the compensation magnetic field opposite with environmental magnetic field, dynamically compensates the environmental magnetic field,
And then obtain stabilizing magnetic field.
Specifically, the steady field Magnetic Sensor 11 and the Magnetic Sensor to be measured 12 are correctly connected, is placed in Non-magnetic dewar
In 17, SQUID signal is read using multichannel reading circuit, signal is collected using data acquisition module 16；
The steady field Magnetic Sensor 11 and the Magnetic Sensor to be measured 12 are placed in bucking coil center (uniaxial or three axis), adjustment again
The direction SQUID is consistent with coil direction.
Specifically, SQUID output is accessed to the input terminal of the feedback module 14；By the output end of the feedback module 14
It is linked into bucking coil.
Specifically, the feedback module 14 is adjusted, its normal work is made, reaches good steady field effect.
2) Magnetic Sensor 12 to be measured detects environmental magnetic field in the stabilizing magnetic field, export stabilizing magnetic field signal and it is described to
The low frequency intrinsic noise of Magnetic Sensor 12 is surveyed, and then obtains the low frequency intrinsic noise of the Magnetic Sensor 12 to be measured.
Specifically, the output for acquiring the Magnetic Sensor 12 to be measured, does Fourier analysis, low-frequency component be it is described to
Survey the low frequency intrinsic noise of Magnetic Sensor 12.
Embodiment two
As shown in Fig. 2, the present embodiment provides a kind of low frequency intrinsic noise test macros 1 of Magnetic Sensor, with embodiment one
The difference is that embodiment one realizes dystopy test, the steady field magnetic sensing of the embodiment of the present invention using two Magnetic Sensors
Device 11 and the Magnetic Sensor to be measured 12 use the same Magnetic Sensor 18, realize in-situ test.
Specifically, the Magnetic Sensor 18 is not only used to form stabilizing magnetic field, but also as object to be measured, correspondingly, the inspection
The number of channels for surveying signal reading module 13 is done to be deleted accordingly, will not repeat them here.
The present embodiment is due to that by the way of in-situ test, can further decrease bucking coil uniformity, sensor spacing
Etc. influence of the factors to test result.
It is illustrated in figure 5 the low frequency noise measurement result of the present invention with the prior art, wherein biggish variation tendency is existing
The low frequency noise measurement of technology as a result, variation tendency it is lesser be low frequency noise measurement result of the invention, it is clear that the present invention
Magnetic Sensor the low frequency intrinsic noise that measures of low frequency intrinsic noise test macro it is clean, and accuracy is significantly larger than existing skill
Art, high reliablity.
The present invention forms a set of magnetic-field dynamic compensation system using steady field Magnetic Sensor, feedback module and bucking coil,
Magnetic Sensor to be measured is placed in bucking coil center when work, the measurement direction of Magnetic Sensor to be measured be adjusted to it is corresponding
Bucking coil direction it is consistent；When magnetic-field dynamic compensation system is working properly, Magnetic Sensor region to be measured will form one
The test of the low frequency band intrinsic noise of Magnetic Sensor to be measured is realized in the stabilizing magnetic field region in stabilizing magnetic field region.
In conclusion the present invention provides the low frequency intrinsic noise test macro and test method of a kind of Magnetic Sensor, comprising:
Steady field Magnetic Sensor, Magnetic Sensor to be measured, detection signal read module, feedback module and compensating module；The steady field magnetic sensing
Device and the Magnetic Sensor to be measured are set in the compensating module；The detection signal reads module and is connected to the steady field magnetic
The output end of sensor and the Magnetic Sensor to be measured, for reading the steady field Magnetic Sensor and the Magnetic Sensor to be measured
Output signal；The input terminal of the feedback module is connected to the detection signal and reads the output end of module, output end connection institute
Compensating module is stated, the signal for detecting the steady field Magnetic Sensor is fed back into the compensating module；The compensation mould
Block is generated based on the output signal of the feedback module and fluctuates opposite compensation magnetic field with environmental magnetic field.Steady field Magnetic Sensor detection
Environmental magnetic field, the signal feedback that the steady field Magnetic Sensor is detected is to compensating module, and the compensating module generates and environment
The opposite compensation magnetic field in magnetic field dynamically compensates the environmental magnetic field, and then obtains stabilizing magnetic field；Magnetic Sensor to be measured is described steady
Environmental magnetic field is detected in fixed-field, exports the low frequency intrinsic noise of stabilizing magnetic field signal and the Magnetic Sensor to be measured, and then is obtained
Obtain the low frequency intrinsic noise of the Magnetic Sensor to be measured.The present invention effectively suppresses environment magnetic field wave using dynamic compensation way
It is dynamic, the variation of environmental magnetic field is detected by magnetic detector, then improve the variation by feed circuit, one is driven after amplification
Group feedback coil, which is generated, changes opposite magnetic field with environmental magnetic field, to achieve the purpose that stabilizing magnetic field；The present invention can be accurately
Measure the low frequency intrinsic noise of Magnetic Sensor.So the present invention effectively overcomes various shortcoming in the prior art and has height
Value of industrial utilization.
The principle of the present invention and effect is only illustrated in above-described embodiment, and is not intended to limit the present invention.It is any to be familiar with
The personage of this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Therefore,
Such as those of ordinary skill in the art is completed without departing from the spirit and technical ideas disclosed in the present invention
All equivalent modifications or change, should be covered by the claims of the present invention.
Claims (16)
1. a kind of low frequency intrinsic noise test macro of Magnetic Sensor, which is characterized in that the low frequency of the Magnetic Sensor is intrinsic to make an uproar
Sounding test system includes at least:
Steady field Magnetic Sensor, Magnetic Sensor to be measured, detection signal read module, feedback module and compensating module；
The steady field Magnetic Sensor and the Magnetic Sensor to be measured are set in the compensating module；
The detection signal reads the output end that module is connected to the steady field Magnetic Sensor and the Magnetic Sensor to be measured, is used for
Read the output signal of the steady field Magnetic Sensor and the Magnetic Sensor to be measured；
The input terminal of the feedback module is connected to the detection signal and reads the output end of module, the output end connection compensation
Module, the signal for detecting the steady field Magnetic Sensor are fed back into the compensating module；
The compensating module is generated based on the output signal of the feedback module and fluctuates opposite compensation magnetic field with environmental magnetic field.
2. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the magnetic to be measured
Sensor includes SQUID Magnetic Sensor, Hall magnetic sensor, anisotropic magnetoresistance Magnetic Sensor or giant magnetoresistance magnetic sensing
Device.
3. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the steady field magnetic
Sensor includes SQUID Magnetic Sensor, Hall magnetic sensor, anisotropic magnetoresistance Magnetic Sensor or giant magnetoresistance magnetic sensing
Device.
4. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the steady field magnetic
Sensor includes the SQUID magnetometer being set at least one axial direction.
5. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 4, it is characterised in that: the magnetic sensing
Device low frequency intrinsic noise test macro further includes providing the refrigerant liquid of low temperature environment, the refrigeration for the SQUID magnetometer
Liquid is placed in Non-magnetic dewar.
6. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 4, it is characterised in that: the detection letter
Number read module include SQUID reading circuit, the quantity pair in the channel of the SQUID reading circuit and the SQUID magnetometer
It answers.
7. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 4, it is characterised in that: the steady field magnetic
Sensor includes three SQUID magnetometers, is respectively arranged in three mutually perpendicular planes.
8. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 7, it is characterised in that: the compensation mould
Block includes being respectively arranged at three mutually perpendicular axial bucking coils, is correspondingly arranged with the axial direction of each SQUID magnetometer.
9. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the feedback mould
Block includes that at least proportional integral differential circuit, the input terminal connection steady field magnetic of the proportional integral differential circuit sense all the way
One axial direction of device detects signal, output end connection and the detection signal inputted axially consistent bucking coil.
10. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 9, it is characterised in that: the ratio
Integral differential circuit includes sequentially connected proportional amplifier, integrator and power amplifier.
11. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the compensation
Module includes the consistent bucking coil of axial direction with the steady field Magnetic Sensor.
12. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 11, it is characterised in that: the compensation
Coil is positive polygon or round.
13. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 11, it is characterised in that: each axial direction is equal
Including two bucking coils, two bucking coils in any axial direction are respectively arranged at the two sides of the steady field Magnetic Sensor.
14. the low frequency intrinsic noise test macro of Magnetic Sensor according to claim 1, it is characterised in that: the magnetic passes
The low frequency intrinsic noise test macro of sensor further includes data acquisition module, is connected to the detection signal and reads module, is used for
It obtains the output signal of the Magnetic Sensor to be measured and is handled, the low frequency to obtain the Magnetic Sensor to be measured is intrinsic to make an uproar
Sound.
15. the low frequency intrinsic noise test macro of Magnetic Sensor described in any one, feature exist according to claim 1~14
In: the steady field Magnetic Sensor and the Magnetic Sensor to be measured use the same Magnetic Sensor.
16. a kind of low frequency intrinsic noise test macro based on the Magnetic Sensor as described in claim 1~15 any one
The low frequency intrinsic noise test method of Magnetic Sensor, which is characterized in that the low frequency intrinsic noise test method of the Magnetic Sensor
It includes at least:
Steady field Magnetic Sensor detects environmental magnetic field, the signal feedback that the steady field Magnetic Sensor is detected to compensating module, institute
It states compensating module and generates the compensation magnetic field opposite with environmental magnetic field, dynamically compensate the environmental magnetic field, and then obtain stabilizing magnetic field；
Magnetic Sensor to be measured detects environmental magnetic field in the stabilizing magnetic field, exports stabilizing magnetic field signal and the magnetic sensing to be measured
The low frequency intrinsic noise of device, and then obtain the low frequency intrinsic noise of the Magnetic Sensor to be measured.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110160630A (en) * | 2019-05-09 | 2019-08-23 | 中国地质大学（北京） | Orthogonal basic mode fluxgate sensor noise detection apparatus and noise detecting method |
| CN115919318A (en) * | 2022-10-18 | 2023-04-07 | 北京大学 | Measuring system and measuring method for biological magnetic field |
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