CN109092076A - Monocrystalline silicon material precision transfusion filter membrane and preparation method thereof, filter and infusion apparatus - Google Patents
Monocrystalline silicon material precision transfusion filter membrane and preparation method thereof, filter and infusion apparatus Download PDFInfo
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- CN109092076A CN109092076A CN201810903727.9A CN201810903727A CN109092076A CN 109092076 A CN109092076 A CN 109092076A CN 201810903727 A CN201810903727 A CN 201810903727A CN 109092076 A CN109092076 A CN 109092076A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/165—Filtering accessories, e.g. blood filters, filters for infusion liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/105—Support pretreatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/165—Filtering accessories, e.g. blood filters, filters for infusion liquids
- A61M2005/1657—Filter with membrane, e.g. membrane, flat sheet type infusion filter
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
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- Vascular Medicine (AREA)
- Anesthesiology (AREA)
- Inorganic Chemistry (AREA)
- Heart & Thoracic Surgery (AREA)
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Abstract
The invention discloses a kind of monocrystalline silicon material precision transfusion filter membrane and preparation method thereof, filter and infusion apparatuses, monocrystalline silicon material precision transfusion filter membrane includes ontology, the monocrystalline silicon grid support body that the ontology has monocrystalline silicon filter membrane and the side of monocrystalline silicon filter membrane is arranged in and is linked together with monocrystalline silicon filter membrane, with the filter opening of multiple perforations on the monocrystalline silicon filter membrane, the aperture of the filter opening is 0.2 micron ~ 5 microns, and the depth of the filter opening is 2 microns ~ 50 microns.The present invention not only has good bond strength and sealing performance, ensure to remain intact state under stress, solves the problems, such as the thin easy brittle failure of thickness, and having filtration path short, structural strength is high, good seal performance, filtration pressure difference is small, the features such as filter membrane swelling is small, and Drug absorbability is few, can better meet the ultra-filtration filters requirement of different type medication infusion.
Description
Technical field
The present invention relates to a kind of monocrystalline silicon material precision transfusion filter membrane and preparation method thereof, filter and infusion apparatuses.
Background technique
Currently, venous transfusion is one of most common drug delivery methods, the effective component in medical fluid is by delivering into
Blood circulation of human body system, treats diseased region, has become common class of medications.This drug conveyor surface
It is facing common problem encountered is that often being had still in medical fluid since current drug production technology and the environmental conditions such as transport and preservation limit
So microparticle substance containing different-diameter, infusion process enter hematological system together with active drug ingredient, and strong to human body
Health brings different degrees of influence, may bring serious harmfulness to tissue or organ, serious person may jeopardize
Human life safety.
Most for the treatment of medical fluid has the requirement of filtering, such as standard GB/T 8368(2005 to these microparticles at present) in
Gravity type disposable infusion set clear stipulaties filtering particle diameter is required, the disposable infusion in existing medical industry
Filter has been matched can be with the filter of 25 microns of filter diameter or more particles.More and more clinical researches show have at present
Some drugs require to improve the precision of filter in infusion, have there is some drug clear stipulaties subparticle in the world
Filtering requirement, such as glycoprotein iib/iiia inhibitor medicaments Abciximab ReoPro, antiarrhythmic drug amiodarone (can dragons
Up to), anti-tumor drug clofazimine (Clolar), the requirements filtering particle such as antitumor drug paclitaxel (Taxol, Onxol) it is straight
Diameter is 0.2 micron.
There have been nanofiltration filter for transfusion in foreign countries at present, and match with drug.Such as Paul company of the U.S.
Micro IV filter filter.These filters mainly use high-molecular porous filter membrane.High molecular nanometer filter membrane production technology phase
To maturation, cost is relatively low for high-volume processing.High molecular nanometer filter membrane is used for the filtering of drug, is primarily present at present following
The deficiency of aspect: macromolecular filter membrane is since filtration path is long, and complexity, and thus caused pressure difference is larger, furthermore
It will increase the probability that drug adsorbs on filter membrane, after macromolecular filter membrane works long hours, it may appear that the Swelling in medical fluid
Deng.
The research and development and application of accurate filter become the Focus Area of inside and outside medical device industry at present.
Chinese patent CN102527255A discloses answering for a kind of liquid medicine filtering membrane and preparation method and the liquid medicine filtering membrane
With the preparation of filter membrane includes the following steps: step 1, prepares silica latex；Step 2, pore-forming is added into silica latex
Agent forms silica latex solution；Step 3, silica latex solution is spin-coated on aluminium oxide thin plate substrate material quotient, and repeatedly
Spin coating obtains the silicon oxide film with a thickness of 0.5 micron to 1 millimeter；Step 4, silicon oxide film is in 680 to 750 degrees Celsius of items
It is sintered under part, obtains pure silicon oxide ceramics film.The process employs inorganic material, may be implemented 1.8 microns to 2.8 microns
The microparticle of diameter range or more filters.But particle filtering diameter has not been reached yet 1 micron or less.
Chinese patent CN106621510A discloses a kind of softwood matter macromolecule accurate filter and its system for infusion
Method is made, filter membrane is that core miillpore filter, Ju Mi Feng film, polyester film or nylon membrane, film are referred to as tunica fibrosa, nylon membrane or polyester
Film.This method is still based on high-molecular organic material, the path length of filtering, and can equally face the problem of material is swollen.
Chinese patent CN106031247A discloses a kind of filter for infusion device.Filter, which uses, passes through positive electricity
The macromolecular filter membrane of lotus processing, may be implemented in 0.2 micron of particle diameter or more of the protein therapeutic drug with positive charge
The filtering of particle.This method realizes 0.2 micron of filtering, but material still falls within height in the ability of filtering particle diameter
Molecular material, non-inorganic material.
Therefore accurate filter involved in above-mentioned patent not can achieve 0.2 micron of pure inorganic material filter membrane skill still
Art.Compared with organic material filter membrane, inorganic material the strength of materials, anti-swelling, short filtration path, in terms of have
Natural advantage.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies of existing technologies, it is defeated to provide a kind of monocrystalline silicon material precision
Liquid filter membrane, it not only has good bond strength and sealing performance, it is ensured that remains intact state under stress, solves
The problem of thickness thin easy brittle failure, and have filtration path short, structural strength is high, and good seal performance, filtration pressure difference is small, and filter membrane is molten
It is swollen small, the features such as Drug absorbability is few, the ultra-filtration filters requirement of different type medication infusion can be better met.
In order to solve the above-mentioned technical problem, the technical scheme is that a kind of monocrystalline silicon material precision transfusion filter membrane, it
Including ontology, the ontology is included
Monocrystalline silicon filter membrane, with the filter opening of multiple perforations on the monocrystalline silicon filter membrane, the aperture of the filter opening is 0.2 micron ~ 5 micro-
Rice, the depth of the filter opening are 2 microns ~ 50 microns；
The monocrystalline silicon grid support body that the side of monocrystalline silicon filter membrane is set and is linked together with monocrystalline silicon filter membrane.
Further, the grid side length of the monocrystalline silicon grid support body is 0.05 millimeter ~ 10 millimeters；And/or the ontology
Overall thickness be 100 microns ~ 450 microns.
The present invention also provides a kind of preparation method of monocrystalline silicon material precision transfusion filter membrane, the step of method in contain:
S1: monocrystalline silicon grid support body semi-finished product are prepared；Wherein, there is monocrystalline silicon grid on monocrystalline silicon grid support body semi-finished product
Supporter；
S2: monocrystalline silicon filter membrane is prepared on monocrystalline silicon grid support body semi-finished product and obtains monocrystalline silicon grid support body, shape simultaneously
At monocrystalline silicon material precision transfusion filter membrane.
Further, step S1 specifically:
Twin polishing monocrystalline silicon is taken, and in the anti-etching film of the bottom surface deposition of twin polishing monocrystalline silicon；
It opens a window to anti-etching film, is patterned processing, obtains graphical film；
Then graphical film by windowing performs etching twin polishing monocrystalline silicon as etch mask, twin polishing list
It is monocrystalline silicon grid support body semi-finished product after crystal silicon etching；Wherein, there are 2 ~ 50 microns with hole bottom for etching deep-controlled
Subject to thickness, hole bottom there are material used as monocrystalline silicon filter membrane.
Further, step S2 specifically:
Anti-etching mask layer is deposited in the top surface of monocrystalline silicon grid support body semi-finished product；
Etching mask layer windowing is fought, processing is patterned, obtains graphic diaphragm layer；
Then graphic diaphragm layer by windowing performs etching monocrystalline silicon grid support body semi-finished product as etch mask, will
The figure of graphic diaphragm layer passes to hole, to obtain monocrystalline silicon material precision transfusion filter membrane.
Further for some drugs ingredient is solved the problems, such as in filter surfaces charge adsorption, preparation method further includes step
S3: in the surface silicon oxide film of monocrystalline silicon filter membrane and monocrystalline silicon grid support body, then to deposited silicon oxide film
Monocrystalline silicon filter membrane and monocrystalline silicon grid support body surface pass through chemical method carry out positive charge processing.
The present invention also provides a kind of filters, it includes:
Monocrystalline silicon material precision transfusion filter membrane；
Shell, the monocrystalline silicon material precision transfusion filter membrane is arranged in shell, and the shell is by the monocrystalline silicon material
Precision transfusion filter membrane is divided into admission chamber and out sap cavity；
Infusion import, the infusion import is connected on shell, and the infusion import is connected with the admission chamber；
Filtrate (liquid, the filtrate (liquid are connected on shell, and the filtrate (liquid is connected with the sap cavity out.
Further, filter further includes filtering exhaust mouth, and the filtering exhaust mouth is connected on shell, and the filtering
Exhaust outlet is connected with the sap cavity out.
The present invention also provides a kind of infusion apparatuses to include:
Filter；
Conduit, one end of the conduit are connected with the filtrate (liquid of filter；
Drop speed pipe, described one end for dripping fast pipe are connected with the other end of the conduit；
Piercing assembly, the piercing assembly are connected on the fast pipe of drop；
Speed regulator, the speed regulator are arranged on conduit.
Further, infusion apparatus further includes three-way piece, and the import of the three-way piece is connected with the filtrate (liquid of filter, institute
One point of mouth for stating three-way piece is connected with one end of conduit, and another point of mouth of the three-way piece is filler.
Further, it is provided with drop pot in the fast pipe of the drop, the piercing assembly includes puncture outfit, the puncture outfit and drop pot
It is connected.
Further, Rule spiral interface is provided in the infusion import of the filter.
After above-mentioned technical proposal, monocrystalline silicon material precision transfusion filter membrane of the invention is integrated, single
It is brittle under pressure that the structure type of crystal silicon filter membrane and monocrystalline silicon grid support body mainly aims at the ultra-thin filter membrane of solution
It is bonded between disconnected problem, monocrystalline silicon filter membrane and monocrystalline silicon grid support body and sealing problem and filter membrane system surface modification
A possibility that, in the present invention, monocrystalline silicon filter membrane and monocrystalline silicon grid support body are prepared in the same monocrystalline substrate
, therefore can effectively solve the problem above-mentioned.The present invention can fully ensure that the mechanical strength of filter membrane, during the filtration process,
Breakage will not be generated by being under pressure, compared with organic filter membrane, the present invention in inorganic filter membrane, filtration path is short, filter membrane swelling it is small,
The contact interface of drug and filter membrane is few, therefore the adsorbance of drug can be smaller in principle.In view of some drugs are in non-positive charge
Filter membrane surface is easy to produce the phenomenon that absorption, and for the monocrystalline silicon filter membrane in the present invention since thickness is small, filtration path is short, it is easier to right
Surface carries out positive charge modification.In the present invention, one layer of silica is deposited in filter membrane and screen surface, and utilize the elution of hydrochloric acid
Journey carries out positive charge modification to surface, so as to utmostly reduce the absorption of some drugs.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of filter of the invention；
Fig. 2 is the A-A cross-sectional view of Fig. 1；
Fig. 3 is B-B cross-sectional view of the invention；
Fig. 4 is the structural schematic diagram of infusion apparatus of the invention.
Specific embodiment
In order that the present invention can be more clearly and readily understood, right below according to specific embodiment and in conjunction with attached drawing
The present invention is described in further detail.
Embodiment one
As shown in Fig. 1 ~ 3, a kind of monocrystalline silicon material precision transfusion filter membrane, it includes ontology, and the ontology includes
Monocrystalline silicon filter membrane 87, with the filter opening of multiple perforations on the monocrystalline silicon filter membrane 87, the aperture of the filter opening is 0.2 micron
~ 5 microns, the depth of the filter opening is 2 microns ~ 50 microns；
The monocrystalline silicon grid support body 86 that the side of monocrystalline silicon filter membrane 87 is set and is linked together with monocrystalline silicon filter membrane 87.
The grid side length of the monocrystalline silicon grid support body 86 is 0.05 millimeter ~ 10 millimeters；The overall thickness of the ontology is
100 microns ~ 450 microns.
According to filtering needs, the aperture of filter opening can be set to 0.2 micron, filter membrane thickness (depth of filter opening) is set as
30 microns.Subparticle for particle diameter greater than 0.2 micron will be stopped by monocrystalline silicon filter membrane 87, and diameter is micro- less than 0.2
The particle of rice can be by monocrystalline silicon filter membrane 87, in addition, needing to carry out surface positive electricity to monocrystalline silicon filter membrane 87 for some drugs
Modification reduces effective ingredient in the charge adsorption of filter membrane surface.
Contain in the step of preparation method of the monocrystalline silicon material precision transfusion filter membrane, method:
S1: monocrystalline silicon grid support body semi-finished product are prepared；Wherein, there is monocrystalline silicon grid on monocrystalline silicon grid support body semi-finished product
Supporter 86；
S2: monocrystalline silicon filter membrane is prepared on monocrystalline silicon grid support body semi-finished product and obtains monocrystalline silicon grid support body, shape simultaneously
At monocrystalline silicon material precision transfusion filter membrane.
Step S1 specifically:
Twin polishing monocrystalline silicon is taken, and in the anti-etching film of the bottom surface deposition of twin polishing monocrystalline silicon；Wherein, twin polishing monocrystalline
The crystal orientation of silicon is<100>；Anti-etching film for example including but be not limited to dielectric material silicon nitride, metal material chromium etc., thickness 50
Nanometer is to 2 microns；In the present embodiment, anti-etching film is metal material chromium, with a thickness of 150 nanometers；
It opens a window to anti-etching film, is patterned processing, obtains graphical film；Then to the anti-etching mask material of deposition
It is patterned, specifically: the photoresist of 1 micron to 10 microns thickness (in the present embodiment, with a thickness of 1 micron) of surface spin coating,
After the photoresist drying of spin coating, photoetching and development are carried out.It then will with wet etching liquid or dry etching or ion beam etching
The unprotected deposition film of photoresist etches away, then remaining photoresist is removed clean, and the technique of photoetching can be used but not
It is limited to laser direct-writing, purple light contact photolithography, step-by-step movement projection lithography etc..
Then graphical film by windowing performs etching twin polishing monocrystalline silicon as etch mask, two-sided throwing
It is monocrystalline silicon grid support body semi-finished product after light monocrystalline silicon etching；Specifically it is put into potassium hydroxide KOH or tetramethyl hydrogen-oxygen
Change in ammonium TMAH solution, carries out anisotropic etching, or with high-density plasma dry etching；Wherein, the depth of etching
Control is subject to hole bottom there are 2 ~ 50 microns of thickness, hole bottom there are material used as monocrystalline silicon filter membrane；In this reality
It applies in example, there are 30 microns.
Step S2 specifically:
Anti-etching mask layer is deposited in the top surface of monocrystalline silicon grid support body semi-finished product；Anti-etching mask layer may include, but not
It is limited to silicon nitride, silica, crome metal, metallic silver Ag, metallic gold, metal platinum etc.；
Etching mask layer windowing is fought, processing is patterned, obtains graphic diaphragm layer；
Then graphic diaphragm layer by windowing performs etching monocrystalline silicon grid support body semi-finished product as etch mask, will
The figure of graphic diaphragm layer passes to hole, to obtain monocrystalline silicon material precision transfusion filter membrane；Specifically: surface spin coating photoetching
Glue, photoresist can be positivity or negative photoresist, and 0.2 micron to 10 microns of thickness (in the present embodiment, micro- with a thickness of 1
Rice).After the photoresist drying of spin coating, photoetching and development are carried out, is then carved with wet etching liquid or dry etching or ion beam
Erosion etches away the unprotected deposition film of photoresist, then remaining photoresist is removed completely, and what is left is graphical anti-etching
Exposure mask of the mask pattern as subsequent etching silicon support construction can use hydrofluoric acid and mistake for silver or the anti-etching exposure mask of gold
The mixed solution of hydrogen oxide carries out wet process anisotropic metal catalytic etching；It is anti-for silica, silicon nitride or crome metal etc.
Etch mask can use the dry etchings such as high-density plasma or reactive ion, until filter opening etching finishes.Photoetching process
It can be used and include, but are not limited to electron beam lithography, laser direct-writing, purple light contact photolithography, step-by-step movement projection lithography etc..
Preparation method further includes step S3: thin in the surface cvd silicon oxide of monocrystalline silicon filter membrane and monocrystalline silicon grid support body
Then film is carried out the surface of the monocrystalline silicon filter membrane and monocrystalline silicon grid support body that deposited silicon oxide film by chemical method
Positive charge processing；Wherein, silicon oxide film is with a thickness of 2 nanometers to 200 nanometers (in the present embodiment, with a thickness of 10 nanometers), institute
The deposition method of use includes but is not limited to atomic layer deposition, ion beam deposition, sputter coating, constant-pressure and high-temperature oxidation, quickly moves back
The technologies such as fiery oxidation, low-pressure chemical vapor deposition, plasma enhanced chemical vapor deposition, are then placed in hydrochloric acid solution and carry out
Rinsing time 2 ~ 30 minutes in the hydrochloric acid HCl solution that chemical surface treatment, specially weight percent concentration are 5 ~ 15%.
In the present embodiment, 30 microns of filter opening depth, 200 microns of the grid through-hole side length of supporter, can fully ensure that
The mechanical strength of filter membrane, during the filtration process, breakage will not be generated by being under pressure.Nothing compared with organic filter membrane, in the present invention
Machine filter film, filtration path is short, filter membrane swelling it is small, the contact interface of drug and filter membrane is few, thus in principle drug adsorbance meeting
It is smaller.Monocrystalline silicon filter membrane in view of some drugs are the phenomenon that non-positive charge filter membrane surface is easy to produce absorption, in the present invention
Since thickness is small, filtration path is short, it is easier to carry out positive charge modification to surface.It is heavy in filter membrane and screen surface in the present invention
One layer of silica of product, and using the lessivation of hydrochloric acid, positive charge modification is carried out to surface, so as to utmostly reduce certain
The absorption of a little drugs.
Embodiment two
As shown in Fig. 1 ~ 3, a kind of filter, it includes:
Monocrystalline silicon material precision transfusion filter membrane 83 in embodiment one；
Shell 85, the monocrystalline silicon material precision transfusion filter membrane 83 is arranged in shell 85, and the shell 85 is by the list
Crystal silicon material precision transfusion filter membrane 83 is divided into admission chamber and out sap cavity；Specifically, monocrystalline silicon material precision transfusion filter membrane 83
Surrounding and shell 85 are bonded and sealed, and admission chamber is completely isolated by monocrystalline silicon material precision transfusion filter membrane 83 with sap cavity out；
Infusion import 81, the infusion import 81 is connected on shell 85, and the infusion import 81 and the admission chamber phase
Connection；
Filtrate (liquid 84, the filtrate (liquid 84 are connected on shell 85, and the filtrate (liquid 81 and the sap cavity phase out
Connection.
Filter further includes filtering exhaust mouth 82, and the filtering exhaust mouth 82 is connected on shell 85, and the filtering
Exhaust outlet 82 is connected with the sap cavity out.
Embodiment three
As shown in figure 4, a kind of infusion apparatus, it includes:
Filter in embodiment two；
Conduit 5, one end of the conduit 5 are connected with the filtrate (liquid 84 of filter 8；
Fast pipe 4 is dripped, described one end for dripping fast pipe 4 is connected with the other end of the conduit 5；
Piercing assembly, the piercing assembly are connected on the fast pipe 4 of drop；
Speed regulator 7, the speed regulator 7 are arranged on conduit 5.
As shown in figure 4, infusion apparatus further includes three-way piece, the import and 84 phase of filtrate (liquid of filter 8 of the three-way piece
Connection, one point of mouth of the three-way piece are connected with one end of conduit 5, and another point of mouth of the three-way piece is filler 6.
As shown in figure 4, being provided with drop pot 3 in the fast pipe 4 of the drop, the piercing assembly includes puncture outfit 2, the puncture outfit
2 are connected with drop pot 3；It is cased with outside puncture outfit 2 and punctures protective cap 1.
As shown in figure 4, being provided with Rule spiral interface 9 in the infusion import 81 of the filter 8；Specifically, Rule spiral shell
The mouth 9 that is screwed on is cased with interface protection set 10 outside.
It when using infusion apparatus of the invention, is used as common infusion apparatus, does not increase special operation additionally, essence
Close filter for transfusion.Positioned at the lower end of filler 6, therefore the whole medical fluids for entering human body can be filtered, it can be effective
Protect the infusion safety of patient.
Particular embodiments described above, pair present invention solves the technical problem that, technical scheme and beneficial effects carry out
It is further described, it should be understood that the above is only a specific embodiment of the present invention, is not limited to this
Invention, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in this hair
Within bright protection scope.
Claims (12)
1. a kind of monocrystalline silicon material precision transfusion filter membrane, which is characterized in that it includes ontology, and the ontology includes
Monocrystalline silicon filter membrane (87), with the filter opening of multiple perforations on the monocrystalline silicon filter membrane (87), the aperture of the filter opening is 0.2
Micron ~ 5 microns, the depth of the filter opening are 2 microns ~ 50 microns；
The monocrystalline silicon grid support body that side in monocrystalline silicon filter membrane (87) is set and is linked together with monocrystalline silicon filter membrane (87)
(86).
2. monocrystalline silicon material precision transfusion filter membrane according to claim 1, it is characterised in that: the monocrystalline silicon grid support
The grid side length of body (86) is 0.05 millimeter ~ 10 millimeters；And/or the overall thickness of the ontology is 100 microns ~ 450 microns.
3. a kind of preparation method of monocrystalline silicon material precision transfusion filter membrane as claimed in claim 1 or 2, it is characterised in that method
The step of in contain:
S1: monocrystalline silicon grid support body semi-finished product are prepared；Wherein, there is monocrystalline silicon grid on monocrystalline silicon grid support body semi-finished product
Supporter (86)；
S2: monocrystalline silicon filter membrane (87) is prepared on monocrystalline silicon grid support body semi-finished product and while obtaining monocrystalline silicon grid support body
(86), monocrystalline silicon material precision transfusion filter membrane is formed.
4. preparation method according to claim 3, it is characterised in that: step S1 specifically:
Twin polishing monocrystalline silicon is taken, and in the anti-etching film of the bottom surface deposition of twin polishing monocrystalline silicon；
It opens a window to anti-etching film, is patterned processing, obtains graphical film；
Then graphical film by windowing performs etching twin polishing monocrystalline silicon as etch mask, twin polishing list
It is monocrystalline silicon grid support body semi-finished product after crystal silicon etching；Wherein, there are 2 ~ 50 microns with hole bottom for etching deep-controlled
Subject to thickness, hole bottom there are material as monocrystalline silicon filter membrane (87) use.
5. the preparation method according to claim 4, it is characterised in that: step S2 specifically:
Anti-etching mask layer is deposited in the top surface of monocrystalline silicon grid support body semi-finished product；
Etching mask layer windowing is fought, processing is patterned, obtains graphic diaphragm layer；
Then graphic diaphragm layer by windowing performs etching monocrystalline silicon grid support body semi-finished product as etch mask, will
The figure of graphic diaphragm layer passes to hole, to obtain monocrystalline silicon material precision transfusion filter membrane.
6. preparation method according to claim 3, it is characterised in that: further include step S3: in monocrystalline silicon filter membrane (87) and
The surface silicon oxide film of monocrystalline silicon grid support body (86), then to the monocrystalline silicon filter membrane that deposited silicon oxide film
(87) and the surface of monocrystalline silicon grid support body (86) passes through chemical method progress positive charge processing.
7. a kind of filter, it is characterised in that: it includes:
Monocrystalline silicon material precision transfusion filter membrane (83) as claimed in claim 1 or 2；
Shell (85), monocrystalline silicon material precision transfusion filter membrane (83) setting is in shell (85), and the shell (85)
Admission chamber and out sap cavity are divided by the monocrystalline silicon material precision transfusion filter membrane (83)；
Be infused import (81), the infusion import (81) is connected on shell (85), and the infusion import (81) with it is described
Admission chamber is connected；
Filtrate (liquid (84), the filtrate (liquid (84) are connected on shell (85), and the filtrate (liquid (81) with it is described
Sap cavity is connected out.
8. filter according to claim 7, it is characterised in that: it further includes filtering exhaust mouth (82), the filtering row
Port (82) is connected on shell (85), and the filtering exhaust mouth (82) is connected with the sap cavity out.
9. a kind of infusion apparatus, which is characterized in that it includes:
Filter as described in any one of claim 7 to 8；
Conduit (5), one end of the conduit (5) are connected with the filtrate (liquid (84) of filter (8)；
One end of drop speed pipe (4), the drop speed pipe (4) is connected with the other end of the conduit (5)；
Piercing assembly, the piercing assembly are connected on drop speed pipe (4)；
Speed regulator (7), the speed regulator (7) are arranged on conduit (5).
10. infusion apparatus according to claim 9, it is characterised in that: it further includes three-way piece, the import of the three-way piece with
The filtrate (liquid (84) of filter (8) is connected, and one point of mouth of the three-way piece is connected with one end of conduit (5), and described three
Another point of mouth of parts is filler (6).
11. infusion apparatus according to claim 9, it is characterised in that: drop pot (3) is provided in the drop speed pipe (4), it is described
Piercing assembly includes puncture outfit (2), and the puncture outfit (2) is connected with drop pot (3).
12. infusion apparatus according to claim 9, it is characterised in that: be arranged in the infusion import (81) of the filter (8)
There are Rule spiral interface (9).
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Application publication date: 20181228 |