CN109087626B - Phased array transmitting circuit, transmitting method, phased array device and preparation method thereof - Google Patents

Phased array transmitting circuit, transmitting method, phased array device and preparation method thereof Download PDF

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CN109087626B
CN109087626B CN201810897738.0A CN201810897738A CN109087626B CN 109087626 B CN109087626 B CN 109087626B CN 201810897738 A CN201810897738 A CN 201810897738A CN 109087626 B CN109087626 B CN 109087626B
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array element
array
phased array
focusing point
phased
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CN109087626A (en
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韩艳玲
王海生
丁小梁
郑智仁
王鹏鹏
刘伟
张平
曹学友
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BOE Technology Group Co Ltd
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    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/26Sound-focusing or directing, e.g. scanning
    • G10K11/34Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341Circuits therefor
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/26Sound-focusing or directing, e.g. scanning
    • G10K11/34Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/26Sound-focusing or directing, e.g. scanning
    • G10K11/34Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341Circuits therefor
    • G10K11/346Circuits therefor using phase variation

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Abstract

The application discloses a phased array transmitting circuit, a transmitting method, a phased array device and a preparation method thereof. The circuit comprises: array elements of the phased array, and shift registers corresponding to each row of array elements, wherein: each parallel output end of the shift register is respectively connected with each array element of the corresponding row of the shift register and used for controlling the phase delay of each array element of the corresponding row of the shift register. According to the technical scheme provided by the embodiment of the application, the number of the driving channels can be reduced, so that the power consumption and the cost are reduced.

Description

Phased array transmitting circuit, transmitting method, phased array device and preparation method thereof
Technical Field
The present disclosure relates generally to the field of phased array technology, and more particularly, to a phased array transmitting circuit, a transmitting method, a phased array device and a preparation method thereof.
Background
Phased array technology is used widely, and relates to radar detection, ultrasonic damage detection, ultrasonic tactile feedback, ultrasonic directional sound and other fields.
The existing phased array transmitting circuit is driven independently for each path, so that the phased array has how many array elements and how many paths of driving channels are needed, and the array elements of the existing phased array are dozens, even hundreds, so that the driving channels of the phased array transmitting circuit are dozens, even hundreds of paths. Such phased array transmit circuits are bulky in architecture, difficult to implement for miniaturized integration, and consume high power.
Disclosure of Invention
In view of the above-described drawbacks or shortcomings of the prior art, it is desirable to provide a phased array transmit circuit that is low in power consumption and low in cost.
In a first aspect, embodiments of the present application provide a phased array transmit circuit, the circuit comprising:
array elements of the phased array and a plurality of shift registers, wherein:
each row of array elements of the phased array corresponds to one shift register;
each parallel output end of each shift register is respectively connected with each array element of the corresponding row and used for controlling the phase delay of each array element of the corresponding row.
In a second aspect, an embodiment of the present application provides a phased array device, including a substrate board, a resin layer, a pixel defining layer, and an encapsulation layer stacked from bottom to top, the phased array device further including:
the phased array transmitting circuit and the phased array element switch arranged on the substrate base plate, wherein:
the plurality of shift registers are arranged on the substrate base plate;
the array elements of the phased array are arranged on the pixel definition layer;
and each parallel output end of each shift register is respectively connected with each array element of the corresponding row through the phased array element switch.
Optionally, a via hole is formed in the resin layer, and the phased array element switch is electrically connected with the lower electrode of the array element through the via hole.
Optionally, the plurality of shift registers are disposed in a non-display area of the substrate
In a third aspect, an embodiment of the present application provides a phased array transmitting method implemented based on the phased array device, where the method includes:
determining the position information of a focusing point on a phased array device and the position information of each array element in the phased array;
selecting an array element closest to the focusing point from the array elements according to the focusing point and the position information of the array elements, and determining the array element as a reference array element;
determining delay transmitting time of each array element according to the focusing point and the position information of each array element;
and taking the reference array element as a reference, and controlling the corresponding array elements to sequentially emit ultrasonic waves through a shift register according to the sequence of the delay emission time from large to small.
Optionally, according to the focal point and the position information of each array element, selecting an array element closest to the focal point from the array elements, and determining the array element as a reference array element, including:
determining a distance value between each array element and the focusing point according to the focusing point and the position information of each array element;
and determining the array element closest to the focusing point as a reference array element according to the distance value between each array element and the focusing point.
Optionally, the determining the delay transmitting time of each array element according to the focusing point and the position information of each array element includes:
determining a distance value between each array element and the focusing point according to the focusing point and the position information of each array element;
and determining the ratio of the distance value between the focusing point and each array element to the sound velocity as the delay emission time of each array element.
Optionally, the focal point and the position information of each array element are: position coordinate information in a three-axis coordinate system with a specified point in a plane where each array element is located as an origin; the x-axis and the y-axis of the three-axis coordinate system are respectively positioned on the plane where each array element is positioned, and the z-axis of the three-axis coordinate system is vertical to the plane where each array element is positioned;
the determining the distance value between each array element and the focusing point according to the focusing point and the position information of each array element comprises the following steps:
according to the formulaDetermining the array elements and the focusing pointA distance value therebetween; wherein S is a distance value and x is the distance value i Is the x-axis coordinate of the ith array element, and the y i Is the y-axis coordinate of the ith array element, the x is p The y is the x-axis coordinate of the focusing point p p The z is the z-axis coordinate of the focusing point p, which is the y-axis coordinate of the focusing point p.
Optionally, the step of controlling, by using the reference array element as a reference and according to the order of the delay transmission time from large to small, the corresponding array element to sequentially transmit ultrasonic waves through a shift register includes:
and taking the reference array element as a reference, setting the clock signal of the shift register corresponding to the corresponding array element as an enabling signal at a time point corresponding to the delay transmitting time according to the sequence from the large to the small of the delay transmitting time, and controlling the corresponding array element to sequentially transmit ultrasonic waves.
In a fourth aspect, an embodiment of the present application provides a method for preparing a phased array device, where the method includes:
depositing an etching shift register and a phased array element switch on a substrate;
forming a resin layer on the substrate, punching the resin layer, and depositing indium tin oxide to electrically connect the phased array element switch and the lower electrode of the phased array element;
forming a pixel definition layer on the resin layer, perforating the pixel definition layer to place the phased array element, depositing and etching a patterned cathode, and taking the cathode as an upper electrode of the phased array element;
and (5) performing film encapsulation.
The phased array transmitting circuit provided by the embodiment of the application comprises array elements of a phased array and a plurality of shift registers, wherein each row of array elements of the phased array corresponds to one shift register, and each parallel output end of each shift register is respectively connected with each array element of the corresponding row and is used for controlling the phase delay of each array element of the corresponding row. According to the technical scheme of the embodiment of the application, each row of array elements of the phased array share one path of driving pulse signal, so that the number of driving channels is reduced, and the power consumption and the cost are reduced.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:
fig. 1 is a schematic diagram of a phased array transmitting circuit according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a phased array device according to an embodiment of the present application;
FIG. 3 is a flow chart of a process for fabricating a phased array device according to an embodiment of the present application;
FIG. 4 is a schematic flow chart of a phased array transmitting method according to an embodiment of the application;
fig. 5 is a schematic diagram of a positional relationship between a focal point and a three-axis coordinate system according to an embodiment of the present application.
Detailed Description
The application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be noted that, for convenience of description, only the portions related to the application are shown in the drawings.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
Referring to fig. 1, a schematic diagram of a phased array transmitting circuit according to an embodiment of the application is shown.
The phased array transmitting circuit includes:
array elements 11 of the phased array and a plurality of shift registers 12, wherein:
each row of array elements 11 of the phased array corresponds to one shift register 12;
each parallel output of each shift register 12 is connected to each array element 11 of the corresponding row, respectively, for controlling the phase delay of each array element 11 of the corresponding row.
In the embodiment of the present application, when the phased array has N rows and M columns of array elements arranged in an array, the phased array transmitting circuit has N shift registers 12, and each shift register 12 has M parallel output ends, and is respectively connected to M array elements in a corresponding row.
In this case, the shift register 12 is an M-bit shift register, and is composed of M edge-triggered D flip-flops, which are controlled by clock signals and data signals, and can realize high-low level output.
It should be noted that, in fig. 1, only shift registers corresponding to one row of array elements are labeled, and shift registers of other rows are not labeled.
In the embodiment of the application, only one shift register needs to ensure that one D trigger outputs a high level, and the other D triggers output a low level, namely, only one array element in the corresponding row of one shift register transmits ultrasonic waves at the same time.
The phased array transmitting circuit provided by the embodiment of the application comprises array elements of a phased array and a plurality of shift registers, wherein each row of array elements of the phased array corresponds to one shift register, and each parallel output end of each shift register is respectively connected with each array element of the corresponding row and is used for controlling the phase delay of each array element of the corresponding row. According to the technical scheme of the embodiment of the application, each row of array elements of the phased array share one path of driving pulse signal, so that the number of driving channels is reduced, and the power consumption and the cost are reduced.
Based on the above inventive concept, the embodiment of the application also provides a phased array device. Referring to fig. 2, a schematic structural diagram of a phased array device according to an embodiment of the application is shown.
The phased array device includes: a substrate 21, a Resin (Resin) layer 22, a pixel defining layer (Pixel Define Layer, PDL) 23, and an encapsulation layer 24 are stacked from bottom to top.
In addition to the above structure, the phased array device further includes:
the phased array transmitting circuit and the phased array element switch 25 disposed on the substrate 21, wherein:
a plurality of shift registers 12 in the phased array transmitting circuit are provided on the substrate base 21;
alternatively, a plurality of shift registers 12 may be provided in a non-display area of the substrate 21, such as an edge portion of the substrate 21.
Array elements 11 of the phased array in the phased array transmit circuit are disposed on a pixel definition layer 23;
each parallel output of each shift register 12 is connected to each array element 11 of the corresponding row via a phased array element switch 25.
Specifically, each parallel output terminal of each shift register 12 may be connected to each array element 11 of a corresponding row by connecting the gate terminal of the phased array element switch 25.
In the embodiment of the present application, the resin layer 22 is provided with a via hole 26, and the phased array element switch 25 is electrically connected to the lower electrode 27 of the array element 11 through the via hole 26.
Specifically, indium Tin Oxide (ITO) is deposited in the vias 26 so that the phased array element switches 25 can electrically connect the lower electrodes 27 of the array elements 11.
In addition, a cathode may be provided on the pixel defining layer 23.
Alternatively, the cathode on the pixel defining layer 23 may be used as the upper electrode 28 of the array element 11, or a layer of electrode may be separately fabricated on the upper surface of the array element 11 to be used as the upper electrode.
In the embodiment of the application, the phased array device can be applied to a display device.
The following describes a preparation process of the phased array device provided in the embodiment of the present application.
Referring to fig. 3, a flowchart of a preparation process of a phased array device according to an embodiment of the application is shown.
The method comprises the following steps:
and step 31, depositing an etching shift register and a phased array element switch on the substrate.
The substrate is, for example, a glass substrate, a plastic substrate, or the like.
And step 32, forming a resin layer on the substrate, punching holes in the resin layer, and depositing ITO (indium tin oxide) to electrically connect the phased array element switch and the lower electrode of the phased array element.
And step 33, forming a pixel definition layer on the resin layer, perforating and placing a phased array element on the pixel definition layer, depositing and etching the patterned cathode, and taking the cathode as an upper electrode of the phased array element.
Step 34, film encapsulation (Thin Film Encapsulation, TFE) is performed.
Based on the inventive concept, the embodiment of the application also provides a phased array transmitting method realized based on the phased array device. Referring to fig. 4, a schematic flow chart of a phased array transmitting method according to an embodiment of the application is shown.
The method comprises the following steps:
and step 41, determining the position information of the focusing point on the phased array device and the position information of each array element in the phased array.
The focusing point is the place where the ultrasonic waves are overlapped and is the force application point. Taking phased array devices as an example, the focusing point is the point of application of force on the display device.
And 42, selecting an array element closest to the focusing point from the array elements according to the focusing point and the position information of the array elements, and determining the array element as a reference array element.
Specifically, firstly, determining a distance value between each array element and a focusing point according to the focusing point and the position information of each array element;
and determining the array element closest to the focusing point as a reference array element according to the distance value between each array element and the focusing point.
And step 43, determining the delay transmitting time of each array element according to the focusing point and the position information of each array element.
Specifically, firstly, determining a distance value between each array element and a focusing point according to the focusing point and the position information of each array element;
and determining the ratio of the distance value between the focusing point and each array element to the sound velocity as the delay transmitting time of each array element.
In the embodiment of the present application, the focal point and the position information of each array element may be, but not limited to,: position coordinate information in a three-axis coordinate system with a specified point in a plane where each array element is located as an origin; the x axis and the y axis of the three-axis coordinate system are respectively positioned on the plane where each array element is positioned, and the z axis of the three-axis coordinate system is perpendicular to the plane where each array element is positioned.
Referring to fig. 5, a positional relationship between the focal point and the three-axis coordinate system is shown. Wherein point P is the focus point, point O is the origin of the three-axis coordinate system, point I i For the ith array element, S is the focusing point P and point I i A distance value between them.
Based on the three-axis coordinate system, the steps 42 and 43 are performed: when determining the distance value between each array element and the focusing point according to the focusing point and the position information of each array element, the method specifically comprises the following steps:
according to the formulaDetermining the distance value between each array element and the focusing point; wherein S is a distance value, x i Is the x-axis coordinate, y of the ith array element i Is the y-axis coordinate and x of the ith array element p Is the x-axis coordinate, y of the focusing point p p For the y-axis coordinate of the focus point p, z is the z-axis coordinate of the focus point p.
And step 44, controlling the corresponding array elements to sequentially emit ultrasonic waves through the shift register according to the sequence of the delay emission time from large to small by taking the determined reference array elements as the reference.
Specifically, after the delay emission time of each array element is calculated, only the clock signal of the shift register needs to be set to enable the output state 1 at the delay emission time to emit ultrasonic waves.
The above description is only illustrative of the preferred embodiments of the present application and of the principles of the technology employed. It will be appreciated by persons skilled in the art that the scope of the application referred to in the present application is not limited to the specific combinations of the technical features described above, but also covers other technical features formed by any combination of the technical features described above or their equivalents without departing from the inventive concept. Such as the above-mentioned features and the technical features disclosed in the present application (but not limited to) having similar functions are replaced with each other.

Claims (9)

1. A phased array device comprising a substrate base plate, a resin layer, a pixel defining layer, and an encapsulation layer arranged in a bottom-to-top stack, the phased array device further comprising:
phased array transmitting circuit and set up phased array element switch on the substrate base plate, wherein, phased array transmitting circuit includes the array element and a plurality of shift register of phased array, wherein: each row of array elements of the phased array corresponds to one shift register; each parallel output end of each shift register is respectively connected with each array element of the corresponding row and controls the phase delay of each array element of the corresponding row, wherein:
the plurality of shift registers are arranged on the substrate base plate;
the array elements of the phased array are arranged on the pixel definition layer;
and each parallel output end of each shift register is respectively connected with each array element of the corresponding row through the phased array element switch.
2. The phased array device of claim 1, wherein a via is provided in the resin layer, and the phased array element switch is electrically connected to a lower electrode of the element through the via.
3. The phased array device of claim 1, wherein the plurality of shift registers are disposed in a non-display area of the substrate base plate.
4. A phased array transmission method implemented based on a phased array device as claimed in any of claims 1-3, the method comprising:
determining the position information of a focusing point on a phased array device and the position information of each array element in the phased array;
selecting an array element closest to the focusing point from the array elements according to the focusing point and the position information of the array elements, and determining the array element as a reference array element;
determining delay transmitting time of each array element according to the focusing point and the position information of each array element;
and taking the reference array element as a reference, and controlling the corresponding array elements to sequentially emit ultrasonic waves through a shift register according to the sequence of the delay emission time from large to small.
5. The method of claim 4, wherein selecting an element closest to the focus point from the elements based on the focus point and the positional information of the elements, and determining the element as a reference element, comprises:
determining a distance value between each array element and the focusing point according to the focusing point and the position information of each array element;
and determining the array element closest to the focusing point as a reference array element according to the distance value between each array element and the focusing point.
6. The method of claim 4, wherein said determining the delay firing time for each of said elements based on the location information of said focal point and each of said elements comprises:
determining a distance value between each array element and the focusing point according to the focusing point and the position information of each array element;
and determining the ratio of the distance value between the focusing point and each array element to the sound velocity as the delay emission time of each array element.
7. The method of claim 5 or 6, wherein the focal point and the positional information of each array element are: position coordinate information in a three-axis coordinate system with a specified point in a plane where each array element is located as an origin; the x-axis and the y-axis of the three-axis coordinate system are respectively positioned on the plane where each array element is positioned, and the z-axis of the three-axis coordinate system is vertical to the plane where each array element is positioned;
the determining the distance value between each array element and the focusing point according to the focusing point and the position information of each array element comprises the following steps:
according to the formulaDetermining the distance value between each array element and the focusing point; wherein S is a distance value and x is the distance value i Is the x-axis coordinate of the ith array element, and the y i Is the y-axis coordinate of the ith array element, the x is p The y is the x-axis coordinate of the focusing point p p The z is the z-axis coordinate of the focusing point p, which is the y-axis coordinate of the focusing point p.
8. The method of claim 4, wherein the controlling, by the shift register, the corresponding array elements to sequentially emit ultrasonic waves in order of the delay emission time from the higher to the lower with reference to the reference array element, comprises:
and taking the reference array element as a reference, setting the clock signal of the shift register corresponding to the corresponding array element as an enabling signal at a time point corresponding to the delay transmitting time according to the sequence from the large to the small of the delay transmitting time, and controlling the corresponding array element to sequentially transmit ultrasonic waves.
9. A method of fabricating a phased array device, the method comprising:
depositing an etching shift register and a phased array element switch on a substrate;
forming a resin layer on the substrate, punching the resin layer, and depositing indium tin oxide to electrically connect the phased array element switch and the lower electrode of the phased array element;
forming a pixel definition layer on the resin layer, perforating the pixel definition layer to place the phased array element, depositing and etching a patterned cathode, and taking the cathode as an upper electrode of the phased array element;
and (5) performing film encapsulation.
CN201810897738.0A 2018-08-08 2018-08-08 Phased array transmitting circuit, transmitting method, phased array device and preparation method thereof Active CN109087626B (en)

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GB1466272A (en) * 1973-06-28 1977-03-02 Siemens Ag Phased array radar antenna systems
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CN1227979A (en) * 1997-12-02 1999-09-08 日本电气株式会社 Phase controller for use in waveguide phased array antenna
KR20040050237A (en) * 2002-12-09 2004-06-16 엘지.필립스 엘시디 주식회사 Array substrate for LCD and Method for fabricating of the same
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EP1744174A1 (en) * 2005-07-12 2007-01-17 Mitel Networks Corporation Oversampled phased array beamformer
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