CN109030466A - A kind of laser breakdown spectral measurement system based on beam shaping - Google Patents
A kind of laser breakdown spectral measurement system based on beam shaping Download PDFInfo
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- CN109030466A CN109030466A CN201811156791.1A CN201811156791A CN109030466A CN 109030466 A CN109030466 A CN 109030466A CN 201811156791 A CN201811156791 A CN 201811156791A CN 109030466 A CN109030466 A CN 109030466A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
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Abstract
A kind of laser breakdown spectral measurement system based on beam shaping, the system contain pulse laser, condenser lens, sample to be tested, probe, optical fiber, spectrometer, computer, ICCD camera and programmable beam shaping；The beam shaping is arranged between pulse laser and condenser lens.Laser beam after programmable beam shaping and condenser lens by being irradiated on sample and generating plasma, plasma space intensity distribution is acquired by ICCD camera, program by adjusting programmable beam shaping constantly changes light beam spatial intensity distribution, so that the plasma space intensity distribution that ICCD camera collects is rendered as being uniformly distributed.At this point, laser is improved the ablation amount of sample to be tested and the stability of plasma spectrometry.The present invention can make that laser is more effective, ablation sample more evenly, to reduce fluctuation inside plasma, to improving LIBS technology measurement reproducibility and accuracy tool has very important significance.
Description
Technical field
The present invention relates to a kind of laser breakdown spectral measurement system more particularly to a kind of laser breakdowns based on beam shaping
Spectral measurement system belongs to laser induced breakdown spectroscopy and field of measuring technique.
Background technique
Laser induced breakdown spectroscopy is a kind of novel atomic emission spectrometry, laser breakdown spectral technique
(LIBS) system mainly includes the equipment such as pulse laser, spectrometer, basic technique principle are as follows: uses swashing for a branch of high-energy
Light pulse is focused into a hot spot in sample surfaces, has very high energy density in hot spot, so that sample as driving source, laser
Product are gasified within a very short time and generate plasma, and plasma temperature is very high, wherein in high level atom and from
Son understands spontaneous transition to lower level and releases the photon of specific frequency, records different frequency using spectrometer and CCD
Spectrum can be obtained in photon numbers, and the characteristic spectral line of different wave length represents element different in sample, characteristic spectral line in spectrum
Relative intensity then represent the concentration information of respective element.By analyzing the spectrum of sample, can be obtained first in test substance
The type and concentration information of element.Since all elements can all issue the light of characteristic frequency when being energized into sufficiently high temperature,
So can detecte all elements in LIBS principle.
Compared with other existing analytical technologies, LIBS technology mainly have the advantage that (i), the sample scope that is applicable in
Extensively, it is suitable for almost the substance of various forms, all there is very extensive application in solid, liquid or gasmetry, and
Also it can analyze the substance of high rigidity and indissoluble；(ii), it is a kind of full elemental analysis technology, only needs beam of laser pulse
It is substantially achieved all elements information contained by sample；(iii), sample preparation is simple, does not need or only need very simple specimen preprocessing
Reason process；It (iv), is a kind of micro- loss measurement method, since the amount of substance of each laser pulse ablation is few, sample will not detected
Secondary pollution is destroyed or occurred in the process, therefore can be used for the detection of valuables, such as the art work, antique, historical relic；
(v), analysis speed quickly, by building complete LIBS system and data processing module, only needs that analysis knot can be obtained within several seconds
Fruit is easy to implement real on-line measurement；(vi), equipment price relative moderate, and radiationless harm, later period operation expense
It is relatively low.
Based on above-mentioned advantage, LIBS can provide in situ, online or quick key element concentration for many production processes
Information, the quality to the efficiency or product that improve certain industrial processes, such as coal production and utilization, metallurgy, cement
Production etc. has very huge function and significance, and surveys in Soil K+adsorption, sewage detection, nuclear safety, deep-sea exploration, the outer space
The various aspects such as spy also have huge application potential.
But the problems such as accurate quantification of LIBS is poor there is repeatability is realized at present, stabilization needs into one
Step improves.For being commonly used in the laser of LIBS, the Energy distribution of beam profile is Gaussian Profile, and beam center is compared with cell
Assemble a large amount of laser energies in domain, there is relatively low energy in beam edge larger range.Use such laser
On the one hand irradiating sample can make within the time of a laser pulse, the sample in beam center region is burnt first
Erosion, compared to the generation plasma of other regions earlier, plasma can expand rapidly after a birth to become larger, will soon
Cover entire hot spot, due to plasma to laser have screen effect, thus inhibit laser beam fringe region for
The ablation of sample, so that total ablation amount reduces.On the other hand, the integrated distribution of the energy of laser section will lead in plasma
The energy that the heart and fringe region receive is different, to generate biggish temperature gradient, electron density ladder inside plasma
Degree etc., violent concussion occurs so as to cause plasma inside, so that plasma radiation intensity shakes therewith, directly results in
We have very big uncertainty using the spectral line that spectrometer receives.Currently, improving laser breakdown in optimization optical quality
In terms of spectrum stability, still lack corresponding research and application.
Summary of the invention
The object of the present invention is to provide a kind of laser breakdown spectral measurement system based on beam shaping, it is intended to overcome laser
The Energy distribution of section excessively concentrates the energy for causing Plasma Center and fringe region to receive asking there are notable difference
Topic so that laser can more effective, ablation sample more evenly, to increase laser to the ablation amount of sample to be tested and improve etc.
The stability of gas ions spectrum.
Technical scheme is as follows:
A kind of laser breakdown spectral measurement system based on beam shaping, the system contain pulse laser, condenser lens,
Sample to be tested, probe, optical fiber, spectrometer and computer, it is characterised in that: the system also includes ICCD cameras and one to change
Become the programmable beam shaping of laser beam profiles Energy distribution；The programmable beam shaping setting in pulse laser and
Between condenser lens；ICCD camera is connect by signal wire with programmable beam shaping；The laser beam that pulse laser issues
By being acted on sample to be tested after programmable beam shaping and condenser lens, plasma is generated, is acquired by ICCD camera
Plasma space intensity distribution constantly adjusts the program of programmable beam shaping until the collected plasma of ICCD camera
Body spatial-intensity becomes being uniformly distributed；The optical signal that plasma issues is after the collection of probe, optical fiber and spectrometer, by optical signal
Be converted to electric signal input computer.
The present invention has the following advantages that and the technical effect of high-lighting: in the ideal case, plasma should be space
On more uniform elliposoidal, in practical situations, due to the factor of various interference make plasma space distribution become
Change, the spectrum stability of plasma is poor, is unfavorable for carrying out quantitative analysis.If laser is without beam shaping, section
Rounded, intensity Gaussian distributed, i.e., light intensity is stronger at center, and edge is weaker, on sample to be tested surface after laser focusing
The hot spot of formation, high-energy density leads to the ablation and ionization of sample, generation plasma earlier faster at center.Due to
Plasma Shielding Effection, the plasma generated at center can generate interference to the ablation process at hot spot edge, to reduce
Total ablation amount of the laser to sample；The plasma of plasma and edge at center has biggish difference so that wait from
There is biggish temperature and electron density gradient, so that plasma becomes uneven unstable, to spectrum inside daughter
Stability has larger impact.The present invention uses beam shaping technology, changes the intensity distribution of laser section, so that laser is poly-
Defocused intensity and edge at the spot center that sample to be tested surface is formed no longer has apparent difference, can increase sharp
Light is to the ablation amount of test substance and the stability of raising plasma spectrometry.Therefore, present invention reduces in laser breakdown light
In spectral technology, uncertain factor in laser ablation sample allows that laser is more effective, burning more evenly
Lose sample, at the same allow laser energy more evenly pass to plasma, reduce fluctuation inside plasma, have
Improve the effect of the stability of spectrum.Have very important significance to raising LIBS technology measurement reproducibility and accuracy tool.
Detailed description of the invention
Fig. 1 is a kind of theory structure signal of laser breakdown spectral measurement system based on beam shaping provided by the invention
Figure.
Fig. 2 a is without using Al 237.3nm the intensity of spectral line under beam shaping situation.
Fig. 2 b is to use Al 237.3nm the intensity of spectral line under beam shaping situation.
In figure: 1- pulse laser；2- may be programmed beam shaping；3- condenser lens；4- sample to be tested；5-ICCD phase
Machine；6- probe；7- optical fiber；8- spectrometer；9- computer；10- plasma.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples.
As shown in Figure 1, a kind of laser breakdown spectral measurement system based on beam shaping provided by the invention, the system packet
Include pulse laser 1, condenser lens 3, sample to be tested 4, ICCD camera 5, programmable beam shaping 2, probe 6, optical fiber 7, light
Spectrometer 8 and computer 10；The programmable beam shaping 2 is arranged between pulse laser 1 and condenser lens 3, is one
The Energy distribution of laser beam profiles can be changed to equally distributed optical device from Gaussian Profile；ICCD camera 5 passes through signal
Line is connect with programmable beam shaping 2；The laser beam that pulse laser 1 issues enters in programmable beam shaping 2, whole
Laser beam line focus lens 3 after shape act on generation plasma 10 on sample to be tested 4, the optical signal warp that plasma issues
After probe 6, optical fiber 7 and spectrometer 8 are collected, electric signal input computer 9 is converted optical signals to, the spectrum of sample to be tested is obtained
Signal.
Plasma space intensity distribution is acquired by ICCD camera 5, feedback is to programmable beam shaping 2, by constantly adjusting
Whole light beam spatial intensity distribution, enables after laser beam focus the uniform and sufficient ablation sample on sample to be tested surface.It is right
In different samples, the spatial intensity distribution of laser beam can be separately optimized in different experimental provisions.
The operation principle of the present invention is that: pulse laser 1 issues the pulse laser of a branch of high-energy, by may be programmed light beam
After reshaper 2 changes laser section light spot shape, line focus lens 3 focus on the surface of sample to be tested 4, make in intense laser pulse
It is ablated and generate plasma 10 under, spatial intensity distribution is acquired by ICCD camera 5, and feed back to programmable beam shaping
Device 2 constantly adjusts the program of programmable beam shaping 2 until the collected plasma space intensity of ICCD camera 5 becomes
It is uniformly distributed；The optical signal that plasma 10 issues after probe 6, optical fiber 7 and spectrometer 8 are collected, adopted by computer by electric signal
The spectrum of sample to be tested can be obtained in collection, and the element by analyzing the available sample to be tested of spectral characteristic forms information.
Embodiment 1:
By taking aluminum alloy sample as an example, LIBS experiment is carried out to aluminum alloy sample, testing pulse laser used is ND:
YAG solid state laser, optical maser wavelength 1064nm, pulse laser can be with emission pulse laser, the total energys of each pulse laser
Amount is 50mJ, and the pulsewidth of laser pulse is 10ns.Laser facula before shaping is circle, at spot center energy density compared with
Height, edge are lower.Laser beam profiles shape is changed to following distribution from Gaussian Profile by programmable beam shaping: after shaping
Laser section shape be still it is round, there is almost the same energy density, edge laser energy is slightly higher at section center
In center.Laser is focused on into sample surfaces and ablation sample, spectral line is analyzed after generating plasma.
In this case, without using beam shaping and using two kinds of beam shaping, carry out 30 times respectively
Experiment acquires spectrum, and the wavelength that aluminium element is picked out from each spectrum is a spectral line of 237.3nm, and analysis compares this
The strength and stability of spectral line, the experimental results showed that, after beam shaping, has for the intensity of spectral line and slightly improves,
Mean intensity is from 4.5 × 105It is promoted to 5.1 × 105, have for stability and be obviously improved, with relative standard deviation (RSD) weighing apparatus
Amount, RSD drop to 6.3% from 11.7%.Fig. 2 a, 2b be using the spectrum obtained before and after beam shaping of the invention intensity and
The comparison diagram of repeatability.
Plasma under same experiment condition is shot, the difference between image taken more each time,
More intuitively to illustrate the promotion of repeatability and stability with this.In the case of not using beam shaping, according to taking
Plasma picture, discovery plasma changed significantly in many aspects such as position and intensity, surface plasma
With very big uncertainty, stability is poor.And after having used beam shaping, the plasma figure that takes each time
Difference as between is smaller, illustrates that plasma is relatively stable.
Claims (1)
1. a kind of laser breakdown spectral measurement system based on beam shaping, the system contain pulse laser (1), condenser lens
(3), sample to be tested (4), probe (6), optical fiber (7), spectrometer (8) and computer (9), it is characterised in that: the system is also wrapped
Include ICCD camera (5) and a programmable beam shaping (2) that can change laser beam profiles Energy distribution；The programmable optical
Beam reshaper (2) is arranged between pulse laser (1) and condenser lens (3)；ICCD camera (5) is by signal wire and may be programmed
Beam shaping (2) connection；The laser beam that pulse laser (1) issues is by may be programmed beam shaping (2) and condenser lens
(3) it acts on sample to be tested (4), generates plasma (10) after, by ICCD camera (5) acquisition plasma space intensity point
Cloth constantly adjusts the program of programmable beam shaping (2) until the collected plasma space intensity of ICCD camera becomes
It is uniformly distributed；After the optical signal that plasma issues is popped one's head in (6), optical fiber (7) and spectrometer (8) are collected, optical signal is converted
Computer (9) are inputted for electric signal.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110296976A (en) * | 2019-07-04 | 2019-10-01 | 沈阳理工大学 | A kind of vortex ray laser induced breakdown spectroscopy Enhancement Method |
| CN112945936A (en) * | 2021-01-28 | 2021-06-11 | 西安电子科技大学 | Liquid sample spectral measurement method and device based on laser plasma self-constraint |
| CN113310968A (en) * | 2021-04-22 | 2021-08-27 | 清华大学 | Method for improving repeatability of laser-induced breakdown spectroscopy based on beam shaping |
| CN113484620A (en) * | 2021-07-06 | 2021-10-08 | 北京航空航天大学 | Method and system for rapidly measuring amplitude and phase distribution of optical scanning electromagnetic wave |
| CN113624745A (en) * | 2021-07-01 | 2021-11-09 | 清华大学 | Method for improving long-term stability of laser-induced breakdown spectroscopy based on light spots |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110296976A (en) * | 2019-07-04 | 2019-10-01 | 沈阳理工大学 | A kind of vortex ray laser induced breakdown spectroscopy Enhancement Method |
| CN110296976B (en) * | 2019-07-04 | 2022-03-01 | 沈阳理工大学 | Vortex light laser-induced breakdown spectroscopy enhancement method |
| CN112945936A (en) * | 2021-01-28 | 2021-06-11 | 西安电子科技大学 | Liquid sample spectral measurement method and device based on laser plasma self-constraint |
| CN113310968A (en) * | 2021-04-22 | 2021-08-27 | 清华大学 | Method for improving repeatability of laser-induced breakdown spectroscopy based on beam shaping |
| CN113310968B (en) * | 2021-04-22 | 2022-07-08 | 清华大学 | Method for improving repeatability of laser-induced breakdown spectroscopy based on beam shaping |
| CN113624745A (en) * | 2021-07-01 | 2021-11-09 | 清华大学 | Method for improving long-term stability of laser-induced breakdown spectroscopy based on light spots |
| CN113484620A (en) * | 2021-07-06 | 2021-10-08 | 北京航空航天大学 | Method and system for rapidly measuring amplitude and phase distribution of optical scanning electromagnetic wave |
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