CN109002021A - Semiconductor production remote monitoring system based on OCR image processing techniques - Google Patents
Semiconductor production remote monitoring system based on OCR image processing techniques Download PDFInfo
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- CN109002021A CN109002021A CN201810868613.5A CN201810868613A CN109002021A CN 109002021 A CN109002021 A CN 109002021A CN 201810868613 A CN201810868613 A CN 201810868613A CN 109002021 A CN109002021 A CN 109002021A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 69
- 238000012545 processing Methods 0.000 title claims abstract description 42
- 238000012544 monitoring process Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 238000009472 formulation Methods 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 19
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000012986 modification Methods 0.000 claims description 3
- 230000004048 modification Effects 0.000 claims description 3
- 238000007781 pre-processing Methods 0.000 claims description 3
- 238000007619 statistical method Methods 0.000 claims description 3
- 238000012795 verification Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 abstract description 8
- 230000009471 action Effects 0.000 abstract description 3
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32252—Scheduling production, machining, job shop
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- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
Abstract
The invention discloses a kind of semiconductor production remote monitoring systems based on OCR image processing techniques, including for control board equipment production FTP client FTP, for the central control server of user management and operation, the FTP client FTP includes OCR image processing module, remote monitoring module, recipe configuration module, data acquisition module, alarming and managing module and log processing module, the FTP client FTP is interacted by USB interface and board equipment, is read board device parameter and is sent instruction control board device action；The central control server, which is connected by the Socket programming interface based on ICP/IP protocol with FTP client FTP, controls the operation of FTP client FTP.The present invention solves the problems, such as that the board equipment of SECS/GEM communication interface is not supported to realize long-range monitoring automation production in Semiconductor enterprises, is conducive to the full-automatic production level for improving semiconductor packages, reduces production cost.
Description
Technical field
The present invention relates to a kind of remote monitoring system more particularly to a kind of semiconductor based on OCR image processing techniques are raw
Produce remote monitoring system.
Background technique
With constantly advancing for computer integrated manufacturing system (CIMS), more and more semiconductor production manufacturers will
Sight is transferred to the direction of automated production, makes every effort to solve semiconductors manufacture cost by way of automated production increasingly
The problem of high, manufacturing process technology becomes increasingly complex.
Currently, most of equipment of Semiconductor enterprises support SECS/GEM communication interface, it is still logical using base SECS/GEM
The automated production solution for believing agreement, because SECS/GEM communication protocol has been unified between each production equipment and produced
Communication specification between equipment and control equipment is current most widely used semiconductor communication protocol, however, much partly leading
Still possess a large amount of board equipment for not supporting SECS/GEM communication interface in body packaging and testing enterprise, it is automatic to cause enterprise
Change the reduction of production level and greatly improving for production cost.
It would therefore be highly desirable to solve the above problems.
Summary of the invention
Goal of the invention: it can solve not supporting that SECS/GEM is logical in current Semiconductor enterprises the object of the present invention is to provide one kind
The board equipment of communication interface realizes that the semiconductor production based on OCR image processing techniques of long-range monitoring automation production is remotely supervised
Control system.
Technical solution: in order to achieve the above object, the invention discloses a kind of, the semiconductor based on OCR image processing techniques is raw
Produce remote monitoring system, including for control board equipment production FTP client FTP, for the center of user management and operation
Control server, the FTP client FTP include that OCR image processing module, remote monitoring module, recipe configuration module, data are adopted
Collection module, alarming and managing module and log processing module, the FTP client FTP are interacted by USB interface and board equipment, are read
It takes board device parameter and sends instruction control board device action；The central control server is by being based on ICP/IP protocol
Socket programming interface be connected with FTP client FTP and control the operation of FTP client FTP.
Wherein, the OCR image processing module handles board device screen information for identification, including image preprocessing,
Character cutting, feature extraction identify and set up character database；The OCR image processing module is based on OCR image recognition technology
Production process parameters are read to board device screen, are first that production process parameters establish corresponding character by the process learnt
Then feature database and structural classification device carry out binary conversion treatment to the image identified and obtain the two of only foreground and background colour
It is worth image, row, column character cutting then is carried out to bianry image and obtains single character, feature finally is carried out to single character and is mentioned
It takes, the feature extracted is matched with character feature library, successful match then identifies character.
Preferably, the remote monitoring module is for monitoring in real time and controlling semiconductor production process, including length of run prison
Depending on equipment state and long-range control board equipment production；Wherein, in data acquisition module real-time collecting board equipment production process
Data, and it is for statistical analysis to send data to remote monitoring module, if monitoring, production is abnormal, starts alarming and managing
Module controls production process.
Furthermore the formulation management module is used to manage the formula of board equipment, examination & approval are uploaded including formula, are matched
Side's downloading is verified using with formulation parameter, and it is that prescription program newly created in board equipment is uploaded to center that formula, which uploads examination & approval,
Control server, and upgraded by the tuning modification and the examination & approval of prescription program of production technology engineer completion formulation parameter, warp
Prescription program after crossing upgrading can be downloaded in board equipment and be produced and used, formulation parameter verification occur board equipment just
Before formula booting production, current device manufacturing parameter is read by data acquisition module, and carry out with the formulation parameter after upgrading
Comparison passes through if comparing, and board device power-up is allowed to produce, and does not pass through if comparing, and needs to refer to client transmission shutdown
It enables, board equipment is prevented to continue to produce.
Further, the data acquisition module is obtained after OCR image processing module identifying processing for acquiring
Board device parameter, including creation data and real time data.
Preferably, the alarming and managing module is used to monitor and handle the abnormal report that board equipment occurs in process of production
It is alert, the ID of number, equipment alarm including equipment alarm and the content of equipment alarm；Wherein alarming and managing module is by monitoring simultaneously
The warning message of board equipment is recorded, the reason of board equipment is alarmed is precipitated in statistical, then by the information of equipment alarm
Classify and takes different counter-measures according to different type of alarm.
Furthermore the log processing module is used to record system log, operation log and the running log of FTP client FTP,
The wherein load information of system log essential record current time of day, system version number and FTP client FTP initialization；Operation
The day of log essential record FTP client FTP manual operation in the operating process of OCR image processing module and formulation management module
Will；Running log is mainly the instruction and phase for recording FTP client FTP and receiving central control server transmission in the process of running
The treatment process answered.
The utility model has the advantages that compared with prior art, the present invention has following remarkable advantage:
(1) FTP client FTP and board equipment use USB interface, central control server and FTP client FTP in the present invention
The Socket programming interface based on ICP/IP protocol is directlyed adopt, huge interface exploitation cost can be eliminated；And traditional
Based in SECS/GEM solution, it is equipment that semiconductor assembly and test enterprise, which needs to spend the cost request device manufacturer of great number,
The SECS/GEM communication interface of exploitation standard, wherein the cost of great number not only includes the hardware costs such as sensor, PLC controller,
It further include the software costs such as research and development, test；
(2) present invention can support different vendor, different types of board, not need to go to develop according to different board types
Different clients eliminates a large amount of research and development and testing cost, and the solution based on SECS/GEM is needed according to difference
The device type work being tested, developed according to its corresponding device's document, the R&D cycle is long, researches and develops at high cost；
(3) present invention not only supports new-type board equipment, and old-fashioned board equipment a large amount of in workshop are equally supported,
Solve the limitation of traditional scheme implementation, and the solution based on SECS/GEM is only applicable to new-type board, and it is old-fashioned
Production board then not support SECS/GEM interface exploitation, even if support, the cost of exploitation also can be very expensive.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the functional block diagram of FTP client FTP in the present invention.
Specific embodiment
Technical solution of the present invention is described further with reference to the accompanying drawing.
As shown in Figure 1, a kind of semiconductor production remote monitoring system based on OCR image processing techniques of the present invention, including
FTP client FTP 1 and central control server 2, the FTP client FTP 1 are interacted by USB interface with board equipment 9, reading machine
9 parameter of platform equipment simultaneously sends the instruction control movement of board equipment 9.Central control server 2 is by based on ICP/IP protocol
Socket programming interface is connected with FTP client FTP 1 controls the operation of FTP client FTP 1.Transportation level in TCP/IP protocol suite
Agreement mainly includes TCP and two kinds of UDP, and the main distinction of Transmission Control Protocol and udp protocol is that Transmission Control Protocol can guarantee data
The other end can be reached, reliability is higher, and udp protocol does not ensure that data can reach the other end；Transmission Control Protocol reliability
High feature can be so that central control server 2 realizes that high reliability data interacts with FTP client FTP 1, so the present invention selects
The network transmission of central control server 2 Yu FTP client FTP 1 is carried out with Transmission Control Protocol.
As shown in Fig. 2, FTP client FTP 1 of the present invention includes OCR image processing module 3, remote monitoring module 4, matches
Set module 5, data acquisition module 6, alarming and managing module 7 and log processing module 8.OCR image processing module 3 of the invention is used
In 9 screen message of identifying processing board equipment, including image preprocessing, character cutting, feature extraction identify and set up number of characters
According to library；The OCR image processing module 3 is to read production process parameters to 9 screen of board equipment based on OCR image recognition technology,
It is first that production process parameters establish corresponding character feature library and structural classification device by the process learnt, then to being identified
Image carry out binary conversion treatment obtain the bianry image of only foreground and background colour, then to bianry image carry out row, column
Character cutting obtains single character, finally carries out feature extraction to single character, by the feature extracted and character feature library into
Row matching, successful match then identify character.
Remote monitoring module 4 of the invention is for real-time process monitoring and process control semiconductor production process, including fortune
Journey supervision equipment state and long-range control board equipment 9 produce；Wherein, 6 real-time collecting board equipment 9 of data acquisition module produces
Data in the process, and send data to that remote monitoring module 4 is for statistical analysis, using the result of data statistic analysis as
The standard whether board equipment normally produces continues real time data prison if board equipment is in the state normally produced
It surveys, needs remote control equipment movement to realize the mistake to entire semiconductor production if monitoring that production exception occurs in board equipment
Process control.The process monitoring of entire semiconductor production of the invention is the basis of process control, and semiconductor production is excessively program-controlled
System then realizes dispatch control to entire production process, process monitoring and the process control of semiconductor production be it is complementary,
Common service is in entire semiconductor production automation process.
Formulation management module 5 of the invention is used to manage the prescription program of board equipment, and formulation management module is to incite somebody to action
All required arguments that semiconductor board equipment is defined when producing the product of a batch are all defined as a prescription program, such as
This is just not necessarily to re-define manufacturing parameter, and the life cycle of prescription program mainly includes 5 stages: creation upload, arameter optimization
Modification, downloading use, formulation parameter is monitored and stopped using；Wherein formula, which uploads examination & approval, is matched newly created in board equipment
Equation is uploaded to central control server, and is modified by the tuning that production technology engineer completes formulation parameter and matched equation
The examination & approval of sequence upgrade, and the prescription program after upgrading, which can download in board equipment, to be produced and used, formulation parameter verification
Occur board equipment formally be switched on production before, by data acquisition module 6 reading current device manufacturing parameter, and with upgrading
Formulation parameter afterwards is compared, if compare pass through, allow board device power-up produce, if compare do not pass through, need to
Client sends halt instruction, and board equipment is prevented to continue to produce.
Data acquisition module 6 of the present invention is for acquiring the obtained board after 3 identifying processing of OCR image processing module
Device parameter, including creation data and real time data.Alarming and managing module 7 of the invention exists for monitoring and handling board equipment
The abnormal alarm occurred in production process, the ID of number, equipment alarm including equipment alarm and the content of equipment alarm；Wherein
Alarming and managing module passes through the warning message for monitoring and recording board equipment, and the original that board equipment is alarmed is precipitated in statistical
Then the information of equipment alarm is carried out classification and takes different counter-measures according to different type of alarm by cause.Work as monitoring
It when occurring to the alarm of a certain seed type, only may need to record time, the equipment state in which etc. of alarm generation, but work as
It may be considered that current board equipment is in improper production status when the alarm repeats multiple, then needs to control equipment and stop
Machine or the processing for locking batch.
Log processing module 8 of the invention is used to record system log, operation log and the running log of FTP client FTP,
The wherein load information of system log essential record current time of day, system version number and FTP client FTP initialization；Operation
The day of log essential record FTP client FTP manual operation in the operating process of OCR image processing module and formulation management module
Will；Running log is mainly the instruction and phase for recording FTP client FTP and receiving central control server transmission in the process of running
The treatment process answered.
It is involved in the present invention to data mainly include configuration data and creation data, configuration data mainly includes system fortune
The instruction of network configuration required for row such as IP address, the port Port, board device type information and FTP client FTP configuration
Name information.Creation data mainly includes manufacturing parameter, real-time parameter, formulation parameter and the alarm signal obtained from board equipment
Breath, wherein creation data is the core data of entire remote monitoring system.
Above-described embodiment is only the preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill of the art
For personnel, without departing from the principle of the present invention, several improvement and equivalent replacement can also be made, these are to the present invention
Claim improve with the technical solution after equivalent replacement, each fall within protection scope of the present invention.
Claims (7)
1. a kind of semiconductor production remote monitoring system based on OCR image processing techniques, which is characterized in that including for controlling
FTP client FTP (1), the central control server (2) for user management and operation of board equipment production, the client
System (1) includes OCR image processing module (3), remote monitoring module (4), recipe configuration module (5), data acquisition module
(6), alarming and managing module (7) and log processing module (8), the FTP client FTP (1) pass through USB interface and board equipment (9)
It interacts, read board equipment (9) parameter and sends instruction control board equipment (9) movement；The central control server (2)
It is connected by the Socket programming interface based on ICP/IP protocol with FTP client FTP (1) and controls the behaviour of FTP client FTP (1)
Make.
2. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the OCR image processing module (3) handles board equipment (9) screen message, including image preprocessing, character for identification
Cutting, feature extraction identify and set up character database；The OCR image processing module (3) is based on OCR image recognition technology pair
Board equipment (9) screen reads production process parameters, is first that production process parameters establish corresponding word by the process learnt
Feature database and structural classification device are accorded with, binary conversion treatment then is carried out to the image identified and obtains only foreground and background colour
Then bianry image carries out row, column character cutting to bianry image and obtains single character, finally carry out feature to single character and mention
It takes, the feature extracted is matched with character feature library, successful match then identifies character.
3. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the remote monitoring module (4) is for monitoring in real time and controlling semiconductor production process, including length of run supervision equipment state
With long-range control board equipment (9) production；Wherein, in data acquisition module (6) real-time collecting board equipment (9) production process
Data, and it is for statistical analysis to send data to remote monitoring module (4), if monitoring, production is abnormal, starts alarm pipe
It manages module (7), production process is controlled.
4. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the formulation management module (5) is used to manage the formula of board equipment, uploads examination & approval, recipe download including formula
It is verified using with formulation parameter, it is that prescription program newly created in board equipment is uploaded to center control clothes that formula, which uploads examination & approval,
Business device, and upgraded by the tuning modification and the examination & approval of prescription program of production technology engineer completion formulation parameter, by upgrading
Prescription program afterwards can be downloaded in board equipment and be produced and used, and formulation parameter verification occurs formally to be switched in board equipment
Before production, current device manufacturing parameter is read by data acquisition module (6), and compared with the formulation parameter after upgrading
It is right, pass through if comparing, board device power-up is allowed to produce, do not pass through if comparing, needs to send halt instruction to client,
Board equipment is prevented to continue to produce.
5. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the data acquisition module (6) sets for acquiring the obtained board after OCR image processing module (3) identifying processing
Standby parameter, including creation data and real time data.
6. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the alarming and managing module (7) is used to monitor and handle the abnormal alarm that board equipment occurs in process of production, including sets
Number, the ID of equipment alarm and the content of equipment alarm of standby alarm；Wherein alarming and managing module is by monitoring and recording board
The warning message of equipment, statistical are precipitated the reason of board equipment is alarmed, then the information of equipment alarm are classified
And different counter-measures is taken according to different type of alarm.
7. the semiconductor production remote monitoring system according to claim 1 based on OCR image processing techniques, feature exist
In: the log processing module (8) is used to record system log, operation log and the running log of FTP client FTP, wherein being
The load information of system log essential record current time of day, system version number and FTP client FTP initialization；Operation log master
Record the log of FTP client FTP manual operation in the operating process of OCR image processing module and formulation management module；Fortune
Row log is mainly to record FTP client FTP to receive the instruction of central control server transmission and corresponding in the process of running
Treatment process.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810868613.5A CN109002021A (en) | 2018-08-02 | 2018-08-02 | Semiconductor production remote monitoring system based on OCR image processing techniques |
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| CN201810868613.5A CN109002021A (en) | 2018-08-02 | 2018-08-02 | Semiconductor production remote monitoring system based on OCR image processing techniques |
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Cited By (5)
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| CN110995709A (en) * | 2019-12-05 | 2020-04-10 | 南京品微智能科技有限公司 | SECSGEM communication protocol conversion method |
| CN111654529A (en) * | 2020-05-21 | 2020-09-11 | 沈阳诚桥真空设备有限公司 | Remote monitoring method and device for vapor phase drying equipment |
| CN112541379A (en) * | 2019-09-23 | 2021-03-23 | 北京国双科技有限公司 | Industrial boiler operation guarantee system, method, equipment and readable storage medium |
| WO2022164846A1 (en) * | 2021-01-29 | 2022-08-04 | Fresenius Medical Care Holdings Co, Inc. | Medical device troubleshooting using computational models |
| WO2023030119A1 (en) * | 2021-08-30 | 2023-03-09 | 北京北方华创微电子装备有限公司 | Data acquisition method, device, and system for semiconductor process equipment |
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Application publication date: 20181214 |