CN108917625A - A kind of light emitting device, Systems for optical inspection and optical detecting method - Google Patents
A kind of light emitting device, Systems for optical inspection and optical detecting method Download PDFInfo
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- CN108917625A CN108917625A CN201810846138.1A CN201810846138A CN108917625A CN 108917625 A CN108917625 A CN 108917625A CN 201810846138 A CN201810846138 A CN 201810846138A CN 108917625 A CN108917625 A CN 108917625A
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- light
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- light source
- emitting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of light emitting device, Systems for optical inspection and optical detecting methods, including light source, the aperture limiting unit on the light source emitting light path；The light source is for emitting beam；The aperture limiting unit is used for when the current detection region of determinand has high aspect ratio structure, the bore for the light that the light source issues is limited, to stop the biggish some light of normal direction angle with the determinand, so that light is incident on the current detection region of the determinand at the direction of low-angle along the normal direction of the determinand or with the normal direction of the determinand, is effectively detected so as to the high aspect ratio structure to current detection region.
Description
Technical field
The present invention relates to technical field of optical detection, more specifically to a kind of light emitting device, Systems for optical inspection and
Optical detecting method.
Background technique
With the development of modern science and technology, the size of semiconductor chip increasingly reduces, the processing technology of semiconductor chip is increasingly
It updates.But since the procedure of processing of semiconductor chip is more, and the chip of any procedure of processing production unqualified may all be led
Entire chip failure is caused, therefore, often chip is introduced after crucial procedure of processing in the prior art and detects process, pass through inspection
The information such as three-dimensional surface shape and the thicknesses of layers of chip are surveyed, unqualified chip is excluded in time, improves the qualification rate of chip product.
Optical detecting method is one of the main method for detecting semiconductor chip, the illumination that light source is emitted is mapped to be measured
Object surface, the information such as three-dimensional surface shape and thicknesses of layers further according to the reflected light acquisition chip of determinand.But using light
When learning the high aspect ratio structure in detection method detection chip, as shown in Figure 1, due to the depth D and width L of high aspect ratio structure
Large percentage, therefore, most of large angle incidence light α 1 in light source emergent light can be blocked by the structure of surrounding, only small portion
The bottom for dividing low-angle incident light α 2 that can be incident on high aspect ratio structure, the effective reflection formed so as to cause low-angle incident light
Optical signal is flooded by the noise signal that large angle incidence light is formed, and then the high aspect ratio structure on chip is caused not survey effectively
Amount.
Summary of the invention
In view of this, the present invention provides a kind of light emitting device, Systems for optical inspection and optical detecting method, it is existing to solve
Some optical detecting methods can not high aspect ratio structure in detection chip the problem of.
To achieve the above object, the present invention provides the following technical solutions：
A kind of light emitting device, the aperture limiting unit including light source and on the light source emitting light path；
The light source is for emitting beam；
The aperture limiting unit is used for when the current detection region of determinand has high aspect ratio structure, to the light
The bore for the light that source issues is limited, to stop the biggish some light of normal direction angle with the determinand.
Preferably, the aperture limiting unit includes the first diaphragm component and control assembly；
The control assembly is used for when the current detection region of the determinand has high aspect ratio structure, described in control
First diaphragm component enters the emitting light path of the light source, does not have high-aspect-ratio knot in the current detection region of the determinand
When structure, the emitting light path that first diaphragm component leaves the light source is controlled；
When first diaphragm component is located at the emitting light path of the light source, first diaphragm component is used for described
The bore for the light that light source issues is limited.
It preferably, further include object lens, the object lens are used to receive the light of first diaphragm component or light source outgoing
Line, and the light is projected to the determinand surface；
First diaphragm component includes the first diaphragm, when first diaphragm component is located at the emitting light path of the light source
When, first diaphragm is located at the entrance pupil of the object lens；
Alternatively, first diaphragm component includes the first diaphragm and matching lens, when first diaphragm component is located at institute
When stating the emitting light path of light source, it is described matching lens be used for make the matched lens of the first diaphragm at image position in the object lens
Entrance pupil at.
Preferably, the control assembly includes controller and first movement device；
The controller is used for the structured data of the determinand according to the pre-stored data, whether judges current detection region
With high aspect ratio structure, if so, sending the first control instruction to the first movement device, the first movement device is controlled
First diaphragm component is driven to enter the emitting light path of the light source, if it is not, sending the second control to the first movement device
System instruction, controls the emitting light path that the first movement device drives first diaphragm component to leave the light source.
A kind of Systems for optical inspection, including：
The light of described in any item light emitting devices as above, the light emitting device outgoing is reflected by determinand；
Receiving device, for receiving the light of the determinand reflection, and it is described to be measured according to the light acquisition received
The structural information of object.
Preferably, the light emitting device includes object lens, the Systems for optical inspection further include the first lens group, beam splitter and
Second lens group；
First lens group to the light that the light source issues for carrying out expanding shaping；
The beam splitter is used to reflect the outgoing of the emergent light or the reflection aperture limiting unit of first lens group
Light；
The object lens are for focusing on the emergent light of the emergent light of first lens group or first diaphragm component
On the determinand, and collect the reflected light of the determinand；
The beam splitter is also used to for the emergent light of the object lens to be transmitted through second lens group；
Second lens group is used to the emergent light of the object lens converging to the receiving device.
Preferably, the object lens are interference objective, and the receiving device is photodetector, and the Systems for optical inspection is also
Including the second mobile device；
The interference objective is also used to after the reflected light for collecting the determinand, and the reflected light and reference light occurs
Interference, and interference light is emitted to the beam splitter；
Second mobile device is for driving the interference objective or the determinand along perpendicular to the determinand
Direction is mobile；
The photodetector is used to reconstruct the surface tri-dimensional profile of the determinand according to the interference light received.
Preferably, the object lens are image-forming objective lens, and the receiving device is spectrometer, and the light inlet of the spectrometer has
Second diaphragm；
Second diaphragm is used to limit the emergent light bore for entering the spectrometer；
The spectrometer is used to obtain the thicknesses of layers information of the determinand according to the emergent light.
A kind of optical detecting method is applied to described in any item Systems for optical inspection as above, including：
Light source emits beam；
When the current detection region of determinand has high aspect ratio structure, aperture limiting unit issues the light source
The bore of light is limited, to stop the biggish some light of normal direction angle with the determinand.
Preferably, the aperture limiting unit includes the first diaphragm component and control assembly, the method also includes：
When the current detection region of determinand has high aspect ratio structure, the control assembly controls first diaphragm
Component enters the emitting light path of the light source；
When the current detection region of the determinand does not have high aspect ratio structure, control assembly control described the
One diaphragm component leaves the emitting light path of the light source.
Preferably, when the light emitting device includes object lens and first diaphragm component includes the first diaphragm, institute is controlled
State the first diaphragm component enter the light source emitting light path the step of include：First diaphragm is set to be located at the light of the object lens
At pupil；
When the light emitting device includes object lens and first diaphragm component includes the first diaphragm and matching lens, control
First diaphragm component enter the light source emitting light path the step of include：Make the matched lens of the first diaphragm at image position
At the entrance pupil of the object lens.
Preferably, the control assembly includes controller and first movement device, further includes：
The structured data of the controller determinand according to the pre-stored data, judges whether current detection region has
High aspect ratio structure；
If so, the first control instruction is sent to the first movement device, so that described in first movement device drive
First diaphragm component enters the emitting light path of the light source；
If it is not, the second control instruction is sent to the first movement device, so that described in first movement device drive
First diaphragm component leaves the emitting light path of the light source.Compared with prior art, technical solution provided by the present invention has
Following advantages：
Light emitting device, Systems for optical inspection and optical detecting method provided by the present invention, in the current detection of determinand
Region have high aspect ratio structure when, aperture limiting unit limits the bore for the light that light source issues, with stop and to
The biggish some light of normal direction angle for surveying object, makes light along the normal direction of determinand or with normal direction at low-angle
The current detection region of determinand is incident in direction, is effectively examined so as to the high aspect ratio structure to current detection region
It surveys.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the light path schematic diagram for detecting high aspect ratio structure in the prior art；
Fig. 2 is the structural schematic diagram of light emitting device provided in an embodiment of the present invention；
Fig. 3 is the light path schematic diagram that high aspect ratio structure is detected in the embodiment of the present invention；
Fig. 4 is a kind of structural schematic diagram of Systems for optical inspection provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram of another Systems for optical inspection provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of another Systems for optical inspection provided in an embodiment of the present invention；
Fig. 7 is a kind of flow chart of optical detecting method provided in an embodiment of the present invention.
Specific embodiment
As described in background, the high aspect ratio structure that existing optical detecting method cannot effectively in detection chip.
Although prior art discloses can also use SEM (scanning electron microscope, scanning electron microscope)
High aspect ratio structure is measured, still, could be imaged since this method needs to split high aspect ratio structure, is a kind of
Therefore destructive detection mode can not carry out the detection of a large amount of chip samples.
Based on this, the present invention provides a kind of light emitting devices, to overcome the above problem of the existing technology, including light source
With the aperture limiting unit being located on the light source emitting light path；
The light source is for emitting beam；
The aperture limiting unit is used for when the current detection region of determinand has high aspect ratio structure, to the light
The bore for the light that source issues is limited, to stop the biggish some light of normal direction angle with the determinand.
The present invention also provides a kind of Systems for optical inspection, including：
The light of light emitting device as described above, the light emitting device outgoing is reflected by determinand；
Receiving device, for receiving the light of the determinand reflection, and it is described to be measured according to the light acquisition received
The structural information of object.
The present invention also provides a kind of optical detecting methods, including：
Light source is set to emit beam；
When the current detection region of determinand has high aspect ratio structure, issue aperture limiting unit to the light source
The bore of light limited, to stop the biggish some light of normal direction angle with the determinand.
Systems for optical inspection and optical detecting method provided by the present invention have height in the current detection region of determinand
When aspect ratio structures, aperture limiting unit limits the bore for the light that light source issues, to stop the normal with determinand
The biggish some light in angular separation is incident on light at the direction of low-angle along the normal direction of determinand or with normal direction
The current detection region of determinand, is effectively detected so as to the high aspect ratio structure to current detection region.
It is core of the invention thought above, to keep the above objects, features and advantages of the present invention more obvious easily
Understand, following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention is clearly and completely retouched
It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of light emitting device, which can be applied to the surface three dimension of detection chip
The Systems for optical inspection of pattern also can be applied to the Systems for optical inspection of the information such as the thicknesses of layers of detection chip, the present invention
It is not limited to that.
In the embodiment of the present invention, as shown in Fig. 2, light emitting device includes light source 1, first on 1 emitting light path of light source
Lens group 2 and aperture limiting unit 3.
Wherein, light source 1 is for emitting beam, and optionally, light source 1 is the white light source for issuing wide spectrum optical.First lens group 2
Light for issuing to light source 1 carries out expanding shaping, and certainly, the present invention is not limited to this, in other embodiments, can be with
The first lens group 2 is not used to carry out expanding shaping.
Aperture limiting unit 3 is used to send out light source 1 when the current detection region of determinand 5 has high aspect ratio structure
The bore of light out is limited, and to stop the biggish some light of normal direction Y1 angle with determinand 5, makes light along figure
The normal direction Y1 of determinand 5 shown in 3 is incident on determinand at the direction Y2 of low-angle with the normal direction Y1 of determinand 5
The bottom of the high aspect ratio structure in 5 current detection region, so as to effectively be detected to high aspect ratio structure.
Optionally, the aperture limiting unit 3 in the present embodiment includes the first diaphragm component and control assembly.
In the present embodiment, control assembly is used for the control when the current detection region of determinand 5 has high aspect ratio structure
First diaphragm component is moved downwardly into the emitting light path of light source 1, does not have high-aspect-ratio in the current detection region of determinand 5
When structure, the first diaphragm component of control moves upwardly off the emitting light path of light source 1.When the first diaphragm component is located at going out for light source
When penetrating optical path, the bore for the light that the first diaphragm component is used to issue light source is limited.It should be noted that the first diaphragm
When component leaves the emitting light path of light source 1, control assembly will not the light on the emitting light path to light source 1 generate any influence.
Light emitting device in the present embodiment further includes object lens 4, which goes out for receiving the first diaphragm component or light source 1
The light penetrated, and light is projected to 5 surface of determinand.First diaphragm component passes through the mouth of the light issued to light source 1
Diameter is limited to limit the numerical aperture of the object lens 4.
Optionally, as shown in figure 4, the first diaphragm component in the present embodiment includes the first diaphragm 30, when the first diaphragm group
When part is located on the emitting light path of light source 1, the first diaphragm 30 is located at the entrance pupil of object lens 4, and the central axis and object of through-hole
The optical axis coincidence of mirror 4 or approximate coincidence.
Certainly, the present invention is not limited to this, and in other embodiments, the first diaphragm 30 can not be located at entering for object lens 4
Penetrate at pupil, at this time, it may be necessary to match lens make the matched lens 31 of the first diaphragm 30 at image position in the entrance pupil of object lens 4
Place.That is, the first diaphragm component in the embodiment of the present invention may include the first diaphragm 30, be located at 30 direction of the first diaphragm
The matching lens 31 and control assembly of 4 side of object lens；When the first diaphragm component is located at the emitting light path of light source 1, lens are matched
31 for make the matched lens 31 of the first diaphragm 30 at image position at the entrance pupil of object lens 4.
Based on this, Systems for optical inspection provided in an embodiment of the present invention can not only be carried out high aspect ratio structure effective
Detection, and will not influence the testing result and detection speed in the region of no high aspect ratio structure also has structure simple etc. excellent
Point.It should be noted that Systems for optical inspection provided in an embodiment of the present invention can be to depth and width than the profundity greater than 20
Width-ratio structure is effectively detected.
Wherein, with the diaphragm of through-hole centered on the first diaphragm, optionally, the range of the diameter of through-hole in 1mm~10mm
Interior, in addition, the shape and size of the shape of diaphragm, size and through-hole can be set according to actual needs, the present invention is simultaneously
It is not limited only to this.
Further, in this embodiment control assembly include controller and first movement device, optionally, first movement
Device is high-precision unidirectional electronic mobile platform.
Wherein, controller is used for the structured data of determinand 5 according to the pre-stored data, judges whether current detection region has
There is high aspect ratio structure, if so, sending the first control instruction to first movement device, control first movement device drives the first light
Late component enters the emitting light path of light source 1, if it is not, sending the second control instruction, control first movement dress to first movement device
Set the emitting light path for driving the first diaphragm component to leave light source 1.
The embodiment of the invention also provides a kind of Systems for optical inspection, as shown in Fig. 4 or Fig. 5, the Systems for optical inspection packet
Light emitting device and receiving device 8 as described above is included, the light of light emitting device outgoing is reflected by determinand 5, and receiving device 8 is used for
Receive the light of the reflection of determinand 5, and obtains the structural information of determinand 5 according to the light received.
Further, in this embodiment Systems for optical inspection further include beam splitter 6 and the second lens group 7；Beam splitter 6 is used
In the emergent light for the emergent light or aperture limiting unit 3 for reflecting the first lens group 2；Object lens 4 are used for the outgoing of the first lens group 2
The emergent light of light or aperture limiting unit 3 focuses on determinand 5, and collects the reflected light of determinand 5；Beam splitter 6 is also used to
The emergent light of object lens 4 is transmitted through the second lens group 7；Second lens group 7 is used to the emergent light of object lens 4 converging to receiving device
8；Receiving device 8 is used to obtain the structural information of determinand 5 according to the emergent light received.It should be noted that shown in Fig. 4
In Systems for optical inspection, the first diaphragm 30 is located at the entrance pupil of object lens 4, in Systems for optical inspection shown in fig. 5, the first light
Door screen 30 is not at the entrance pupil of object lens 4.
In the detection process of Systems for optical inspection shown in Fig. 4, light source 1 emits beam, and the first lens group 2 is to light source 1
Emergent light carry out shaping, the emergent light after shaping is incident on beam splitter 6, and beam splitter 6 is anti-by the emergent light of the first lens group 2
It is incident upon the first diaphragm 30, the first diaphragm 30 limits the bore for the light that light source 1 issues, i.e., to the light for entering object lens 4
Bore limited, object lens 4 focus on the emergent light of aperture limiting unit 3 on determinand 5, and make emergent light along Fig. 3 institute
The normal direction Y1 of the determinand 5 shown is incident on determinand 5 at the direction Y2 of low-angle with the normal direction Y1 of determinand 5
The bottom of the high aspect ratio structure in current detection region, effectively to be detected to high aspect ratio structure；Later, object lens 4 can be received
Collect the reflected light of determinand 5, and reflected light is transmitted through beam splitter 6, the emergent light of object lens 4 is transmitted through second thoroughly by beam splitter 6
Microscope group 7；The emergent light of object lens 4 is converged to receiving device 8 by the second lens group 7；Receiving device 8 is obtained according to the emergent light received
Obtain the structural information of determinand 5.
Detection process in the detection process of Systems for optical inspection shown in Fig. 5, with Systems for optical inspection shown in Fig. 4
The difference is that the emergent light of the first lens group 2 can first pass through the first diaphragm 30 and matching lens 31, the first 30 pairs of diaphragm light
After the bore of line is limited, matching lens 31 make the image formation by rays through the first diaphragm 30 at the entrance pupil of object lens 4, i.e.,
The emergent light of lens 31 is matched after the reflection of beam splitter 6, is imaged at the entrance pupil of object lens 4, later, object lens 4 limit aperture
The emergent light of unit 3 processed focuses on determinand 5, and make emergent light along the normal direction Y1 of determinand 5 shown in Fig. 3 or with it is to be measured
The normal direction Y1 of object 5 is incident on the bottom of the high aspect ratio structure in the current detection region of determinand 5 at the direction Y2 of low-angle
Portion, effectively to be detected to high aspect ratio structure.
In the specific embodiment of the present invention, Systems for optical inspection is using White Light Interferometer detection chip surface
The Systems for optical inspection of three-dimensional appearance.As shown in fig. 4 or 5, object lens 4 are interference objective, receiving device 8 in the Systems for optical inspection
For photodetector, in addition, the Systems for optical inspection further includes the second mobile device 9, wherein the second mobile device 9 is preferably
High-precision electronic mobile platform, the first lens group 2 and the second lens group 7 include at least one lens.
After interference objective 4 collects the reflected light of determinand 5, interfere reflected light with reference light, and interference light is gone out
It is incident upon beam splitter 6；Second mobile device 9 is for driving object lens 4 or determinand 5 to move along the direction perpendicular to determinand 5；Photoelectricity
Detector is used for the surface tri-dimensional profile according to the interference light reconstruct determinand 5 received.
It should be noted that in the detection process, the second mobile device 9 will drive object lens 4 or determinand 5 along perpendicular to
The direction for surveying object 5 moves up and down；The interference figure that photodetector obtains will be also presented with the height change in detection process
Vibrating type fluctuation, interference fringe brightness peak are the relative altitude value for detecting position, so as to pass through comparison different location
The height distribution of detection zone required for relative altitude value obtains.Although object lens 4 move down along the direction perpendicular to determinand 5
When dynamic, the position of entrance pupil can also change therewith, but due to range that object lens 4 scan be it is smaller (<5mm), to incidence
Pupil influences less, and therefore, the first diaphragm and the position for matching lens will not change therewith in the detection.
In addition, the second mobile device 9 can be the electronic mobile platform positioned at 5 bottom of determinand, the electronic mobile platform
Determinand 5 can not only be driven to move up and down, determinand 5 can also be driven mobile such as left and right in the direction for being parallel to determinand 5
It is mobile, so that incident light is radiated at the different zones of determinand 5, to obtain the three-dimensional surface shape letter of 5 different zones of determinand
Breath.
In another embodiment of the invention, Systems for optical inspection is using reflection spectrometry detection chip film layer
The Systems for optical inspection of thickness.As shown in fig. 6, receiving device 8 is spectrometer, the light inlet of the spectrometer has the second diaphragm
10, the second diaphragm 10 is used to limit the bore for the emergent light for entering spectrometer；Spectrometer according to emergent light for obtaining
The thicknesses of layers information of determinand 5.
It should be noted that the Systems for optical inspection further includes the electronic mobile platform 9 positioned at 5 bottom of determinand, the electricity
Dynamic mobile platform 9 can drive determinand 5 mobile in the direction for being parallel to determinand 5, so that incident light is radiated at determinand 5
Different zones obtain the thicknesses of layers information of 5 different zones of determinand.
Systems for optical inspection provided by the present invention, when the current detection region of determinand has high aspect ratio structure,
Aperture limiting unit limits the bore for the light for entering the object lens, to limit the numerical aperture of the object lens, makes institute
State the direction of the emergent lights of object lens along the direction perpendicular to the determinand or with the vertical direction of the determinand at low-angle
It is incident on the current detection region of the determinand, is effectively examined so as to the high aspect ratio structure to current detection region
It surveys.
The embodiment of the invention also provides a kind of optical detecting method, the optics inspection provided applied to any embodiment as above
Examining system, as shown in fig. 7, comprises：
S101：Light source emits beam；
S102：When the current detection region of determinand has high aspect ratio structure, aperture limiting unit is to the light source
The bore of the light of sending is limited, to stop the biggish some light of normal direction angle with the determinand.
In the present embodiment, aperture limiting unit includes the first diaphragm component and control assembly, then optics provided by the invention
Detection method further includes：
When the current detection region of determinand has high aspect ratio structure, control assembly controls the first diaphragm component and enters
The emitting light path of light source；
The current detection region of determinand do not have high aspect ratio structure when, control assembly control the first diaphragm component from
Open the light the emitting light path in source.
Preferably, light emitting device includes object lens, and when the first diaphragm component includes the first diaphragm, controls the first diaphragm group
Part enters the step of emitting light path of light source and includes：It is located at the first diaphragm at the pupil of object lens；
When the first diaphragm component includes the first diaphragm and matching lens, the first diaphragm component of control enters the outgoing of light source
The step of optical path includes：Make the matched lens of the first diaphragm at image position at the entrance pupil of object lens.
Further, control assembly includes controller and first movement device, and optical detecting method provided by the invention is gone back
Including：
The structured data of controller determinand according to the pre-stored data, judges whether current detection region has high-aspect-ratio
Structure；
If so, the first control instruction is sent to first movement device, so that first movement device drives the first diaphragm to enter
The emitting light path of light source drives the first diaphragm and matches the emitting light path that lens enter light source；
If it is not, the second control instruction is sent to first movement device, so that first movement device drives the first diaphragm to leave
The emitting light path of light source drives the first diaphragm and matches the emitting light path that lens leave light source.
Systems for optical inspection in the present invention further includes the first lens group, beam splitter, the second lens group and receiving device.Base
In this, after so that light source is emitted beam, further include：First lens group, which emits beam to the light source, to be carried out expanding shaping.
In addition, the optical detecting method in the present embodiment, further includes：
The emergent light of the first lens group of beam splitter reflection or the emergent light of aperture limiting unit；
Object lens focus on the emergent light of aperture limiting unit on determinand, and collect the reflected light of determinand；
The emergent light of object lens is transmitted through the second lens group by beam splitter；
The emergent light of object lens is converged to receiving device by the second lens group；
Receiving device obtains the structural information of determinand according to the emergent light received.
In the detection process of Systems for optical inspection shown in Fig. 4, light source 1 emits beam, and the first lens group 2 is to light source 1
Emergent light carry out shaping, the emergent light after shaping is incident on beam splitter 6, and beam splitter 6 is anti-by the emergent light of the first lens group 2
It is incident upon the first diaphragm 30, the bore that the first 30 pairs of diaphragm enters the light of object lens 4 limits, and object lens 4 are by aperture limiting unit 3
Emergent light focus on determinand 5, and make emergent light along the normal direction Y1 of determinand 5 shown in Fig. 3 or with determinand 5
Normal direction Y1 is incident on the bottom of the high aspect ratio structure in the current detection region of determinand 5 at the direction Y2 of low-angle, with
High aspect ratio structure is effectively detected；Later, object lens 4 can collect the reflected light of determinand 5, and reflected light is transmitted through point
The emergent light of object lens 4 is transmitted through the second lens group 7 by beam device 6, beam splitter 6；Second lens group 7 assembles the emergent light of object lens 4
To receiving device 8；Receiving device 8 obtains the structural information of determinand 5 according to the emergent light received.
Detection process in the detection process of Systems for optical inspection shown in Fig. 5, with Systems for optical inspection shown in Fig. 4
The difference is that the emergent light of the first lens group 2 can first pass through the first diaphragm 30 and matching lens 31, the first 30 pairs of diaphragm light
After the bore of line is limited, matching lens 31 make to be imaged at the entrance pupil of object lens 4 by the light of the first diaphragm 30, i.e.,
Emergent light with lens is imaged at the entrance pupil of object lens 4 after the reflection of beam splitter 6, and later, object lens 4 limit aperture single
The emergent light of member 3 focuses on determinand 5, and makes normal direction Y1 or and determinand of the emergent light along determinand 5 shown in Fig. 3
5 normal direction Y1 is incident on the bottom of the high aspect ratio structure in the current detection region of determinand 5 at the direction Y2 of low-angle,
Effectively to be detected to high aspect ratio structure.
In the specific embodiment of the present invention, Systems for optical inspection is using White Light Interferometer detection chip surface
The Systems for optical inspection of three-dimensional appearance.As shown in fig. 4 or 5, object lens 4 are interference objective, receiving device 8 in the Systems for optical inspection
For photodetector, in addition, the Systems for optical inspection further includes the second mobile device 9, wherein the second mobile device 9 is preferably
High-precision electronic mobile platform, the first lens group 2 and the second lens group 7 include at least one lens.
After interference objective 4 collects the reflected light of determinand 5, interfere reflected light with reference light, and interference light is gone out
It is incident upon beam splitter 6；Second mobile device 9 is for driving object lens 4 or determinand 5 to move along the direction perpendicular to determinand 5；Photoelectricity
Detector is used for the surface tri-dimensional profile according to the interference light reconstruct determinand 5 received.
It should be noted that in the detection process, the second mobile device 9 will drive object lens 4 or determinand 5 along perpendicular to
The direction for surveying object 5 moves up and down；The interference figure that photodetector obtains will be also presented with the height change in detection process
Vibrating type fluctuation, interference fringe brightness peak are the relative altitude value for detecting position, so as to pass through comparison different location
The height distribution of detection zone required for relative altitude value obtains.
In addition, the second mobile device 9 can be the electronic mobile platform positioned at 5 bottom of determinand, the electronic mobile platform
Determinand 5 can not only be driven to move up and down, determinand 5 can also be driven mobile such as left and right in the direction for being parallel to determinand 5
It is mobile, so that incident light is radiated at the different zones of determinand 5, to obtain the three-dimensional surface shape letter of 5 different zones of determinand
Breath.
In another embodiment of the invention, Systems for optical inspection is using reflection spectrometry detection chip film layer
The Systems for optical inspection of thickness.As shown in fig. 6, receiving device 8 is spectrometer, the light inlet of the spectrometer has the second diaphragm
10, the second diaphragm 10 is used to limit the bore for the emergent light for entering spectrometer；Spectrometer according to emergent light for obtaining
The thicknesses of layers information of determinand 5.
It should be noted that the Systems for optical inspection further includes the electronic mobile platform 9 positioned at 5 bottom of determinand, the electricity
Dynamic mobile platform 9 can drive determinand 5 mobile in the direction for being parallel to determinand 5, so that incident light is radiated at determinand 5
Different zones obtain the thicknesses of layers information of 5 different zones of determinand.
Optical detecting method provided by the present invention, when the current detection region of determinand has high aspect ratio structure,
Aperture limiting unit limits the bore for the light that light source issues, biggish with the normal direction angle of determinand to stop
Some light makes light be incident on the current inspection of determinand at the direction of low-angle along the normal direction of determinand or with normal direction
Region is surveyed, is effectively detected so as to the high aspect ratio structure to current detection region.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, related place is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (12)
1. a kind of light emitting device, which is characterized in that the aperture limiting unit including light source and on the light source emitting light path；
The light source is for emitting beam；
The aperture limiting unit is used to send out the light source when the current detection region of determinand has high aspect ratio structure
The bore of light out is limited, to stop the biggish some light of normal direction angle with the determinand.
2. light emitting device according to claim 1, which is characterized in that the aperture limiting unit includes the first diaphragm component
And control assembly；
The control assembly is used for the control described first when the current detection region of the determinand has high aspect ratio structure
Diaphragm component enters the emitting light path of the light source, does not have high aspect ratio structure in the current detection region of the determinand
When, control the emitting light path that first diaphragm component leaves the light source；
When first diaphragm component is located at the emitting light path of the light source, first diaphragm component is used for the light source
The bore of the light of sending is limited.
3. light emitting device according to claim 2, which is characterized in that further include object lens, the object lens are described for receiving
First diaphragm component or the light of light source outgoing, and the light is projected to the determinand surface；
First diaphragm component includes the first diaphragm, when first diaphragm component is located at the emitting light path of the light source,
First diaphragm is located at the entrance pupil of the object lens；
Alternatively, first diaphragm component includes the first diaphragm and matching lens, when first diaphragm component is located at the light
When the emitting light path in source, it is described matching lens be used for make the matched lens of the first diaphragm at image position entering in the object lens
It penetrates at pupil.
4. light emitting device according to claim 2 or 3, which is characterized in that the control assembly includes controller and first
Mobile device；
The controller is used for the structured data of the determinand according to the pre-stored data, judges whether current detection region has
High aspect ratio structure controls the first movement device and drives if so, sending the first control instruction to the first movement device
First diaphragm component enters the emitting light path of the light source, refers to if it is not, sending the second control to the first movement device
It enables, controls the emitting light path that the first movement device drives first diaphragm component to leave the light source.
5. a kind of Systems for optical inspection, which is characterized in that including：
The light of the described in any item light emitting devices of Claims 1-4, the light emitting device outgoing is reflected by determinand；
Receiving device for receiving the light of the determinand reflection, and obtains the determinand according to the light received
Structural information.
6. Systems for optical inspection according to claim 5, which is characterized in that the light emitting device includes object lens, the light
Learning detection system further includes the first lens group, beam splitter and the second lens group；
First lens group to the light that the light source issues for carrying out expanding shaping；
The beam splitter is used to reflect the emergent light of first lens group or the emergent light of the reflection aperture limiting unit；
The object lens are used to focus on the emergent light of the emergent light of first lens group or first diaphragm component described
On determinand, and collect the reflected light of the determinand；
The beam splitter is also used to for the emergent light of the object lens to be transmitted through second lens group；
Second lens group is used to the emergent light of the object lens converging to the receiving device.
7. Systems for optical inspection according to claim 6, which is characterized in that the object lens are interference objective, the reception
Device is photodetector, and the Systems for optical inspection further includes the second mobile device；
The interference objective is also used to after the reflected light for collecting the determinand, the reflected light and reference light occurs dry
It relates to, and interference light is emitted to the beam splitter；
Second mobile device is used to drive the interference objective or the determinand along the direction perpendicular to the determinand
It is mobile；
The photodetector is used to reconstruct the surface tri-dimensional profile of the determinand according to the interference light received.
8. Systems for optical inspection according to claim 6, which is characterized in that the object lens are image-forming objective lens, the reception
Device is spectrometer, and the light inlet of the spectrometer has the second diaphragm；
Second diaphragm is used to limit the emergent light bore for entering the spectrometer；
The spectrometer is used to obtain the thicknesses of layers information of the determinand according to the emergent light.
9. a kind of optical detecting method, which is characterized in that it is applied to the described in any item Systems for optical inspection of claim 5~8,
Including：
Light source emits beam；
When the current detection region of determinand has high aspect ratio structure, light that aperture limiting unit issues the light source
Bore limited, to stop and the biggish some light of normal direction angle of the determinand.
10. optical detecting method according to claim 9, which is characterized in that the aperture limiting unit includes the first light
Late component and control assembly, the method also includes：
When the current detection region of determinand has high aspect ratio structure, the control assembly controls first diaphragm component
Into the emitting light path of the light source；
When the current detection region of the determinand does not have high aspect ratio structure, the control assembly controls first light
Late component leaves the emitting light path of the light source.
11. optical detecting method according to claim 10, which is characterized in that when the light emitting device includes object lens and institute
When stating the first diaphragm component including the first diaphragm, the step of first diaphragm component enters the emitting light path of the light source is controlled
Including：It is located at first diaphragm at the pupil of the object lens；
When the light emitting device includes object lens and first diaphragm component includes the first diaphragm and matching lens, described in control
First diaphragm component enter the light source emitting light path the step of include：Make the matched lens of the first diaphragm at image position in institute
It states at the entrance pupil of object lens.
12. optical detecting method described in 0 or 11 according to claim 1, which is characterized in that the control assembly includes controller
With first movement device, further include：
The structured data of the controller determinand according to the pre-stored data, judges whether current detection region has profundity
Width-ratio structure；
If so, the first control instruction is sent to the first movement device, so that the first movement device drives described first
Diaphragm component enters the emitting light path of the light source；
If it is not, the second control instruction is sent to the first movement device, so that the first movement device drives described first
Diaphragm component leaves the emitting light path of the light source.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810846138.1A CN108917625A (en) | 2018-07-27 | 2018-07-27 | A kind of light emitting device, Systems for optical inspection and optical detecting method |
| KR1020217006012A KR102541847B1 (en) | 2018-07-27 | 2019-07-23 | Light emitting device, optical detection system, optical detection device and optical detection method |
| PCT/CN2019/097224 WO2020020130A1 (en) | 2018-07-27 | 2019-07-23 | Light emitting device, optical detection system, optical detection device and optical detection method |
| US17/263,560 US11796311B2 (en) | 2018-07-27 | 2019-07-23 | Light emitting device, optical detection system, optical detection device and optical detection method |
| SG11202100892PA SG11202100892PA (en) | 2018-07-27 | 2019-07-23 | Light emitting device, optical detection system, optical detection device and optical detection method |
| TW108126618A TWI744670B (en) | 2018-07-27 | 2019-07-26 | Light-emitting device, optical detection system, optical detection device and optical detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810846138.1A CN108917625A (en) | 2018-07-27 | 2018-07-27 | A kind of light emitting device, Systems for optical inspection and optical detecting method |
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| CN108917625A true CN108917625A (en) | 2018-11-30 |
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| CN201810846138.1A Pending CN108917625A (en) | 2018-07-27 | 2018-07-27 | A kind of light emitting device, Systems for optical inspection and optical detecting method |
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Application publication date: 20181130 |