CN108896596A - A kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement - Google Patents
A kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement Download PDFInfo
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- CN108896596A CN108896596A CN201811086081.6A CN201811086081A CN108896596A CN 108896596 A CN108896596 A CN 108896596A CN 201811086081 A CN201811086081 A CN 201811086081A CN 108896596 A CN108896596 A CN 108896596A
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- 238000012360 testing method Methods 0.000 title claims abstract description 83
- 238000005259 measurement Methods 0.000 title claims abstract description 44
- 239000003989 dielectric material Substances 0.000 title claims abstract description 38
- 238000010276 construction Methods 0.000 claims abstract description 76
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 20
- 239000000919 ceramic Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 9
- 239000000969 carrier Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 13
- 238000010894 electron beam technology Methods 0.000 description 10
- 238000009413 insulation Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000009958 sewing Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Electron Tubes For Measurement (AREA)
Abstract
The invention discloses a kind of sample test microscope carriers for secondary electron emission yield of dielectric material measurement, including microscope carrier ontology, the microscope carrier ontology includes sample construction section, insulating segment and linkage section, the sample construction section is connected with linkage section by insulating segment, and the insulating segment is as the insulating element between sample construction section and linkage section；It further include the Faraday cup being arranged on sample construction section.The sample test microscope carrier can be convenient accurately measurement incident pulse electronic signal, the interference that measured signal is subject to be reduced, to improve the accuracy of measurement of secondary electron emission yield of dielectric material.
Description
Technical field
The present invention relates to secondary electron emission yield of dielectric material technical fields, are used for dielectric material more particularly to one kind
The sample test microscope carrier of secondary electron yield measurement.
Background technique
When beam bombardment solid material with certain energy, material surface can launch electronics, and this phenomenon is known as
The secondary phenomenon of solid material.The number ratio of the secondary electron that material surface is launched and original incident electronics is known as
Secondary electron yield, it is a kind of figuratrix parameter of material, can and secondary electricity strong by measurement incident electron stream
The strong method of subflow is calculated.
Since dielectric material is non-conductive, sample surfaces emit the residual charge that secondary electron rear surface generates can be to subsequent
Secondary process has an impact, therefore in the secondary electron yield of measuring medium material, can only use pulse
Electron beam and direct current beamlet cannot be used, while in order to reduce single pulse electron beam it is incident caused by surface charge accumulate
Amount needs incident beam pulse width strong the smaller the better with stream.Also, since dielectric material is non-conductive, incident electron stream is strong
It cannot be calculated in such a way that target current is added with secondary electron electric current, when test, which obtains, first gets to incident pulse electron beam
It is strong that incident electron signal stream is measured in Faraday cup, then in the case where identical incident electron energy and stream are strong by incident pulse electron beam
Get on sample that measure secondary electron signal stream strong.
The structure design of secondary electron emission yield of dielectric material test equipment is advanced optimized, to improve dielectric material two
The accuracy of measurement of secondary electron emission coefficiency is those skilled in the art's technical problem urgently to be resolved.
Summary of the invention
It is designed for the structure for advanced optimizing secondary electron emission yield of dielectric material test equipment set forth above, with
The accuracy of measurement for improving secondary electron emission yield of dielectric material, is those skilled in the art's technical problem urgently to be resolved
The problem of, the present invention provides a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement, the samples
Test microscope carrier can be convenient accurately measurement incident pulse electronic signal, the interference that measured signal is subject to be reduced, to improve Jie
The accuracy of measurement of material secondary electron yield.
The technological means of this programme is as follows, a kind of sample test load for secondary electron emission yield of dielectric material measurement
Platform, including microscope carrier ontology, the microscope carrier ontology include sample construction section, insulating segment and linkage section, the sample construction section and company
It connects section to connect by insulating segment, and the insulating segment is as the insulating element between sample construction section and linkage section；
It further include the Faraday cup being arranged on sample construction section.
In the prior art, it is measured for secondary electron emission yield of dielectric material, such as application No. is 201210461824.X
Patent of invention provided by shown in technical solution, since Faraday cup, secondary electron collect ring, specimen holder three is independent
, thus for adapt to test, secondary electron collector in the prior art as provided by the above patent of invention shown in, generally in put down
Plate, ring-type, tubbiness or bowl-shape.Simultaneously as after pulsed electron beam is got on sample, although the overwhelming majority emitted
Electronics is moved along specific direction, but for whole electronics that sample surfaces are launched, the movement side of electronics in space
To along all directions, therefore existing secondary electron collector is practical at work, is only capable of being collected into Most electronic, this is just
Cause measured secondary electron signal stream by force with practical stream it is strong between there are differences.
Meanwhile the shape of secondary electron collector also results in it and can not shield sky completely in space in the prior art
Between the interference that measured signal is generated of radiation coupled noise.
As previously discussed, secondary electron emission yield of dielectric material measurement in the prior art is asked there are accuracy is poor
Topic.
In the present solution, the sample construction section is for installing dielectric material to be measured, the linkage section is as test microscope carrier
On for the connector with vacuum moving platform, the above vacuum moving platform is to be used to that test microscope carrier to be driven to move in vacuum space
Driving part, the accuracy for the benefit of tested, the above vacuum moving platform, linkage section are needed to be grounded during the test, therefore are set
It is set to including the above insulating segment, the above insulating segment is as the insulating element between sample construction section and linkage section, in this way, passing through company
The measured signal lead-out wire connect on sample construction section can be obtained test data.
In the present solution, by being set as on the sample construction section further including Faraday cup, in this way, compared to existing skill
Art, in the present solution, Faraday cup is an integral structure with specimen holder, in this way, when carrying out secondary electron yield measurement, it can
Using secondary electron collector spherical in shape, i.e., by the way that secondary electron collector spherical in shape to be installed on to the test for vacuum chamber
In chamber, since Faraday cup and sample construction section are an integral structure, in this way, can be by secondary electron collector spherical in shape
On open up the form of through-hole, by the through-hole, Faraday cup and sample construction section are placed in secondary electron collector
Portion, by be in spherical secondary electron collector, can not only be collected by secondary electron collector the total space it is all two
Secondary electronics, while can radiate what coupled noise generated measured signal by the more effective shielding space of secondary electron collector
Interference.
Therefore above scheme provides a kind of sample test microscope carrier that can be suitable for secondary electron collector spherical in shape, adopts
With this sample test microscope carrier, incident pulse electronic signal can be accurately measured, the interference that measured signal is subject to is reduced, to improve
The accuracy of measurement of secondary electron emission yield of dielectric material.Simultaneously as Faraday cup and sample construction section are integral type knot
Structure, therefore convenience when secondary electron yield measurement can be also effectively improved using this programme.
As those skilled in the art, the above insulating segment is also used as between this sample test microscope carrier and secondary electron collector
Insulating element be preferably arranged to outside of the outside of insulating segment relative to sample construction section therefore when the insulating segment is arranged
Concordant or evagination.
Further technical solution is：
As the specific implementation of Faraday cup, it is set as：The Faraday cup is to be provided on sample construction section
Duct.As those skilled in the art, for sample construction section for conductor material, the Faraday cup is to drill when using this programme
Duct on sample construction section.Meanwhile as those skilled in the art, the above Faraday cup also can be to be fixed on sample peace
The features such as filling the individual components in section, but having overall plan structure simple using the above duct scheme, be convenient for setting, preparation.
As the specific implementation of Faraday cup, the Faraday cup is that depth-to-width ratio is greater than 4, and bottom has cone
Top strip-shaped hole.In the present solution, the above depth-to-width ratio is the depth and width ratio of Faraday cup, using this programme, faraday
The electronics of cylinder bottom reflection can largely or be all incident on the side wall of Faraday cup, can be effectively prevented squeeze into this way
The secondary electron of incident electron and its generation inside Faraday cup escapes from Faraday cup, to reach the mesh for improving measuring accuracy
's.As those skilled in the art, the cross sectional shape of the above Faraday cup is any shape, but as a kind of easy to process
Scheme, it is rounded to be set as the strip-shaped hole section.
Due in secondary electron yield measurement process, needing the equal face electronics in the open end of sample and Faraday cup
The transmitting terminal of rifle is set as to make the operation of entire measurement process more easy：It further include the sample being arranged on microscope carrier ontology
Product mounting portion, axis and the perpendicular relationship of sample supporting surface on sample mounting portion of the Faraday cup, and the axis of Faraday cup
Line is located at the center in the sample support face.In the present solution, the sample mounting portion passes through setting for installing sample to be measured
Axis for Faraday cup and the perpendicular relationship of sample supporting surface on sample mounting portion, and the axis of Faraday cup is located at the sample
Incident pulse electron beam is got in Faraday cup and is measured into radio in this way, this programme is when in use by the center of product supporting surface
Subsignal stream is strong, and sample is mounted on the middle part in sample support face again in the case where identical incident electron energy and stream are strong by incident pulse
Electron beam, which is got on sample, measures that secondary electron signal stream is strong, only needs to guarantee the axis of Faraday cup in whole process
With the transmitting terminal axis collinear of electron gun.
As noted previously, as this programme need for the sample construction section with Faraday cup to be placed in when in use it is spherical in shape
Inside secondary electron collector, pretends as the specific implementation of microscope carrier ontology, be set as：The microscope carrier ontology is in the form of a column knot
Structure is followed successively by by top to the bottom end of microscope carrier ontology：Sample construction section, insulating segment, linkage section, the sample installation position is in sample
The top of product construction section.The sample installation position is set as in the top of sample construction section, is easy to implement：In this sample test
A vacuum chamber for the baking of sample test front surface is arranged in vacuum chamber side required for microscope carrier works again, and two vacuum chambers are logical
Cross valve plate isolation, complete surface baking pretreatment and sample after cooling by handle with vacuum chamber enter test vacuum chamber if
X-direction in rectangular coordinate system, then the transmitting terminal of corresponding electron gun towards, Faraday cup axis be set as Y direction and
The axis collinear of the axis of the transmitting terminal and the Y-axis, in this way, not only facilitating through corresponding such as magnetic rod component
Sample is transported to the top of sample construction section, and after completing the transhipment, it is only necessary to change sample on the transmitting terminal axis
Position is done directly required test using this sample test microscope carrier.
As the specific implementation of sample mounting portion, the sample mounting portion is that inserting at the top of sample construction section is arranged in
Slot further includes flaky sample tray, and the sample tray is installed on sample construction section by being embedded in the slot, described
Multiple sample tablettings are further fixed on sample tray.Using this programme, it can realize that sample is pre-processing by the sample tray
With vacuum chamber to the transhipment between test vacuum chamber, at the same it is different in sample size, on sample heating furnace and sample construction section
For constraining one timing of component or bulk of sample, also it can realize sample in heating furnace, sample by the sample tray
Being reliably fixed on product construction section.The above sample tabletting is for constraining position of the sample on sample tray, in this way, in sample quilt
After being fixed on sample tray specific position, after sample tray and slot cooperation in place, that is, it can guarantee that sample is located at sample construction section
Specific position so that sample corresponds to the position of electron gun transmitting terminal.
It can be achieved reliable insulation as one kind, and the specific implementation of size, shape insulating segment easy to process, it is described
Insulating segment is ceramics seat.
As the specific implementation of linkage section, the linkage section includes microscope carrier pedestal, junction block and microscope carrier connector, institute
It states junction block and microscope carrier connector is both secured on microscope carrier pedestal, fixed point of the insulating segment on linkage section is located at microscope carrier pedestal
On.In the present solution, intermediate connector of the microscope carrier pedestal as both junction block, microscope carrier connector with insulating segment, described to connect
Line seat is as the wire connecting portion on this programme, connector of the microscope carrier connector as this programme and vacuum moving platform.
Cavity is additionally provided in the junction block.In the present solution, the cavity is used for resistance, inductance as when needed
It is coaxial to sample test microscope carrier and 50 Ω to access resistance, inductance element in the cavity for the installation cavity of element, such as view testing requirement
Signal-transmitting cable carries out impedance matching, reduces the distortion of short pulse signal test waveform.
As noted previously, as this programme needs to carry out in vacuum environment at work, deflate to avoid above-mentioned cavity from being formed
Source and influence test vacuum environment vacuum degree, be set as：It further include that setting connects in junction block, insulating segment, microscope carrier pedestal, microscope carrier
Vacuum pumping hole of the fitting on any one, the vacuum pumping hole lead to as the pressure in the cavity and microscope carrier ontology external world
Road.
The invention has the advantages that：
In the present solution, by being set as on the sample construction section further including Faraday cup, in this way, compared to existing skill
Art, in the present solution, Faraday cup is an integral structure with specimen holder, in this way, when carrying out secondary electron yield measurement, it can
Using secondary electron collector spherical in shape, i.e., by the way that secondary electron collector spherical in shape to be installed on to the test for vacuum chamber
In chamber, since Faraday cup and sample construction section are an integral structure, in this way, can be by secondary electron collector spherical in shape
On open up the form of through-hole, by the through-hole, Faraday cup and sample construction section are placed in secondary electron collector
Portion, by be in spherical secondary electron collector, can not only be collected by secondary electron collector the total space it is all two
Secondary electronics, while can radiate what coupled noise generated measured signal by the more effective shielding space of secondary electron collector
Interference.
Therefore present solution provides a kind of sample test microscope carrier that can be suitable for secondary electron collector spherical in shape, use
This sample test microscope carrier can accurately measure incident pulse electronic signal, the interference that measured signal is subject to be reduced, to improve Jie
The accuracy of measurement of material secondary electron yield.Simultaneously as Faraday cup is an integral structure with sample construction section,
Therefore convenience when secondary electron yield measurement can be also effectively improved using this programme.
Detailed description of the invention
Fig. 1 is a kind of sample test microscope carrier one for secondary electron emission yield of dielectric material measurement of the present invention
The schematic perspective view of a specific embodiment；
Fig. 2 is a kind of sample test microscope carrier one for secondary electron emission yield of dielectric material measurement of the present invention
The top view of a specific embodiment；
Fig. 3 is a kind of sample test microscope carrier one for secondary electron emission yield of dielectric material measurement of the present invention
The cross-sectional view of a specific embodiment, the cross-sectional view are the cross-sectional view shown in Fig. 2 along the direction A-A；
Fig. 4 is a kind of sample test microscope carrier one for secondary electron emission yield of dielectric material measurement of the present invention
Matching relationship schematic diagram of a specific embodiment in utilization with secondary electron collector.
Appended drawing reference in figure is respectively：1, sample tray, 2, sample tabletting, 3, sample construction section, 4, insulating segment, 5, load
Sewing platform base, 6, microscope carrier connector, 7, junction block, 8, vacuum pumping hole, 9, electron gun, 10, electron gun be inserted into conduit, 11, secondary
Electron collector, 12, microscope carrier ontology, 13, Faraday cup.
Specific embodiment
Below with reference to embodiment, the present invention is described in further detail, but structure of the invention be not limited only to it is following
Embodiment.
Embodiment 1：
As shown in Figure 1 to Figure 3, a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement, packet
Include microscope carrier ontology 12, the microscope carrier ontology 12 includes sample construction section 3, insulating segment 4 and linkage section, the sample construction section 3 with
Linkage section is connected by insulating segment 4, and the insulating segment 4 is as the insulating element between sample construction section 3 and linkage section；
It further include the Faraday cup 13 being arranged on sample construction section 3.
In the prior art, it is measured for secondary electron emission yield of dielectric material, such as application No. is 201210461824.X
Patent of invention provided by shown in technical solution, since Faraday cup 13, secondary electron collect ring, specimen holder three is independent
, thus for adapt to test, secondary electron collector 11 in the prior art as provided by the above patent of invention shown in, generally in
Tabular, ring-type, tubbiness or bowl-shape.Simultaneously as after pulsed electron beam is got on sample, although the exhausted big portion emitted
Electronics is divided to move along specific direction, but for whole electronics that sample surfaces are launched, the movement of electronics in space
Direction is along all directions, therefore 11 reality of existing secondary electron collector is at work, is only capable of being collected into Most electronic,
This resulted in the secondary electron signal stream measured by force with practical stream it is strong between there are differences.
Meanwhile the shape of secondary electron collector 11 also results in it and can not shield completely in space in the prior art
The interference that space radiation coupled noise generates measured signal.
As previously discussed, secondary electron emission yield of dielectric material measurement in the prior art is asked there are accuracy is poor
Topic.
In the present solution, the sample construction section 3 is for installing dielectric material to be measured, the linkage section is as test microscope carrier
On for the connector with vacuum moving platform, the above vacuum moving platform is to be used to that test microscope carrier to be driven to move in vacuum space
Driving part, the accuracy for the benefit of tested, the above vacuum moving platform, linkage section are needed to be grounded during the test, therefore are set
It is set to including the above insulating segment 4, the above insulating segment 4 is as the insulating element between sample construction section 3 and linkage section, in this way, logical
Crossing the measured signal lead-out wire being connected on sample construction section 3 can be obtained test data.
In the present solution, by being set as on the sample construction section 3 further including Faraday cup 13, in this way, compared to existing
Technology, in the present solution, Faraday cup 13 is an integral structure with specimen holder, in this way, carrying out secondary electron yield measurement
When, secondary electron collector 11 spherical in shape can be used, i.e., be true by the way that secondary electron collector 11 spherical in shape to be installed on
In the test chamber of cavity, since Faraday cup 13 and sample construction section 3 are an integral structure, in this way, can be by spherical in shape
Faraday cup 13 and sample construction section 3 are placed in by the form that through-hole is opened up on secondary electron collector 11 by the through-hole
The inside of secondary electron collector 11 can not only be collected by being in spherical secondary electron collector 11 by secondary electron
Device 11 is collected into all secondary electrons of the total space, while can pass through the more effective shielding space spoke of secondary electron collector 11
Penetrate the interference that coupled noise generates measured signal.
Therefore above scheme provides a kind of sample test microscope carrier that can be suitable for secondary electron collector 11 spherical in shape,
Using this sample test microscope carrier, incident pulse electronic signal can be accurately measured, the interference that measured signal is subject to is reduced, to mention
The accuracy of measurement of high secondary electron emission yield of dielectric material.Simultaneously as Faraday cup 13 is integrated with sample construction section 3
Formula structure, therefore convenience when secondary electron yield measurement can be also effectively improved using this programme.
As those skilled in the art, the above insulating segment 4 is also as this sample test microscope carrier and secondary electron collector 11
Between insulating element be preferably arranged to the outside of insulating segment 4 relative to sample construction section 3 therefore when the insulating segment 4 is arranged
Outside is concordant or evagination.
Embodiment 2：
As shown in Figure 1 to Figure 3, the present embodiment is further qualified on the basis of embodiment 1：As Faraday cup 13
Specific implementation is set as：The Faraday cup 13 is the duct being provided on sample construction section 3.As art technology
Personnel, for sample construction section 3 for conductor material, the Faraday cup 13 is to drill on sample construction section 3 when using this programme
Duct.Meanwhile as those skilled in the art, the above Faraday cup 13 also can be fixed on it is only on sample construction section 3
The features such as founding component, but having overall plan structure simple using the above duct scheme, be convenient for setting, prepare.
As the specific implementation of Faraday cup 13, the Faraday cup 13 is that depth-to-width ratio is greater than 4, and bottom has circle
The strip-shaped hole of cone centre.In the present solution, the above depth-to-width ratio is the depth and width ratio of Faraday cup 13, using this programme,
The electronics of 13 bottom reflection of Faraday cup can largely or be all incident on the side wall of Faraday cup 13, in this way can be effective
The secondary electron that ground prevents from squeezing into incident electron and its generation inside Faraday cup 13 escapes from Faraday cup 13, mentions to reach
The purpose of high measuring accuracy.As those skilled in the art, the cross sectional shape of the above Faraday cup 13 is any shape, but
As a kind of scheme easy to process, it is rounded to be set as the strip-shaped hole section.
Due in secondary electron yield measurement process, needing the equal face electricity in open end of sample and Faraday cup 13
The transmitting terminal of sub- rifle 9 is set as to make the operation of entire measurement process more easy：It further include being arranged in microscope carrier ontology 12
On sample mounting portion, the perpendicular relationship of sample supporting surface on the axis of the Faraday cup 13 and sample mounting portion, and farad
13 axis is located at the center in the sample support face.In the present solution, the sample mounting portion is for installing sample to be measured
Product, by being set as the perpendicular relationship of sample supporting surface on the axis and sample mounting portion of Faraday cup 13, and Faraday cup 13
Axis be located at the center in the sample support face incident pulse electron beam got into faraday in this way, this programme is when in use
It is strong to measure incident electron signal stream in cylinder 13, sample is mounted on the middle part in sample support face again in identical incident electron energy
With stream it is strong under incident pulse electron beam got on sample to measure secondary electron signal stream strong, only needed in whole process
Guarantee the axis of Faraday cup 13 and the transmitting terminal axis collinear of electron gun 9.
As noted previously, as this programme needs the merging of sample construction section 3 that will have Faraday cup 13 in ball when in use
Inside the secondary electron collector 11 of shape, pretends as the specific implementation of microscope carrier ontology 12, be set as：The microscope carrier ontology 12
It is in the form of a column structure, is followed successively by by top to the bottom end of microscope carrier ontology 12：Sample construction section 3, insulating segment 4, linkage section, the sample
Installation position is in the top of sample construction section 3.The sample installation position is set as in the top of sample construction section 3, convenient for real
It is existing：Vacuum chamber side required for working in this sample test microscope carrier is arranged one for the true of sample test front surface baking again
Cavity, two vacuum chambers are isolated by valve plate, complete surface baking pretreatment and sample after cooling is entered by handling with vacuum chamber
Test vacuum chamber is if the X-direction in rectangular coordinate system, then the transmitting terminal of corresponding electron gun 9 is towards, Faraday cup 13
Axis is set as the axis collinear of Y direction and the axis of the transmitting terminal and the Y-axis, in this way, not only conveniently passing through
Corresponding such as magnetic rod component transports sample is to the top of sample construction section 3, and after the completion transhipment, it is only necessary to change sample
Position on the transmitting terminal axis, i.e., be done directly required test using this sample test microscope carrier.
As the specific implementation of sample mounting portion, the sample mounting portion is that 3 top of sample construction section is arranged in
Slot, further includes flaky sample tray 1, and the sample tray 1 is installed on sample construction section 3 by being embedded in the slot
On, multiple sample tablettings 2 are further fixed on the sample tray 1.Using this programme, sample can be realized by the sample tray 1
Product are in pretreatment vacuum chamber to the transhipment between test vacuum chamber, while, sample heating furnace and sample different in sample size
For constraining one timing of component or bulk of sample on product construction section 3, also it can realize that sample exists by the sample tray 1
Being reliably fixed in heating furnace, on sample construction section 3.The above sample tabletting 2 is for constraining position of the sample on sample tray 1
It sets, in this way, after sample tray 1 and slot cooperation in place, that is, can guarantee after sample is fixed in 1 specific position of sample tray
Sample is located at the specific position of sample construction section 3 so that sample corresponds to the position of 9 transmitting terminal of electron gun.
It can be achieved reliable insulation as one kind, and the specific implementation of size, shape insulating segment 4 easy to process, institute
Stating insulating segment 4 is ceramics seat.
As the specific implementation of linkage section, the linkage section includes microscope carrier pedestal 5, junction block 7 and microscope carrier connector
6, the junction block 7 is both secured on microscope carrier pedestal 5 with microscope carrier connector 6, and fixed point of the insulating segment 4 on linkage section, which is located at, to be carried
On sewing platform base 5.In the present solution, the microscope carrier pedestal 5 connects as both junction block 7, microscope carrier connector 6 and the centre of insulating segment 4
Fitting, the junction block 7 is as the wire connecting portion on this programme, and the microscope carrier connector 6 is as this programme and vacuum moving platform
Connector.
Cavity is additionally provided in the junction block 7.In the present solution, the cavity is used for resistance, inductance as when needed
It is coaxial to sample test microscope carrier and 50 Ω to access resistance, inductance element in the cavity for the installation cavity of element, such as view testing requirement
Signal-transmitting cable carries out impedance matching, reduces the distortion of short pulse signal test waveform.
As noted previously, as this programme needs to carry out in vacuum environment at work, deflate to avoid above-mentioned cavity from being formed
Source and influence test vacuum environment vacuum degree, be set as：It further include setting in junction block 7, insulating segment 4, microscope carrier pedestal 5, load
Vacuum pumping hole 8 of the platform connector 6 on any one, the vacuum pumping hole 8 are extraneous as the cavity and microscope carrier ontology 12
Equal pressure passageway.
Embodiment 3：
As shown in Figures 1 to 4, the present embodiment provides one kind measures specific for secondary electron emission yield of dielectric material
Sample test microscope carrier implementation, as shown in Figure 1, be sample test microscope carrier whole side view, be respectively from top to bottom
Sample construction section 3, for ceramic insulation seat insulating segment 4, including microscope carrier pedestal 5, microscope carrier connector 6, junction block 7 linkage section.
Entire sample test microscope carrier is fixed on vacuum moving platform by two screw holes on its bottom microscope carrier connector 6, is put down by vacuum moving
Platform is collected to drive sample test microscope carrier to complete insertion with the movement of spherical secondary electron collector 11, spherical secondary electron is exited
11 bottom of device is provided with the sample test microscope carrier insertion hole of diameter 41mm, receives to pass in and out spherical secondary electron convenient for sample test microscope carrier
Storage 11, sample construction section 3, insulating segment 4 are the column structure that outer diameter is 40mm, and sample construction section 3,4 centering of insulating segment
Installation.
As shown in Fig. 2, inserting the top view of middle insertion sample tray 1 for sample test microscope carrier top slot, sample tray 1 is thickness
The square sheets of 1mm, side length 25mm are spent, thickness is less than the sample of 2mm, side length less than 20mm by 1 four jiaos of sample tray
Four sample tablettings 2 be fixed on the center of sample tray 1, after sample tray 1 is horizontally inserted into slot bottom, the geometric center of sample is just
On the geometric center of sample test microscope carrier.
As shown in figure 3, being the sectional side elevation of sample test microscope carrier, promising duct is set in the center of sample construction section 3
Faraday cup 13, the opening diameter of Faraday cup 13 is 6mm, depth 25mm, the taper hole that bottom is 30 ° of apex angle, biggish
The cylinder base cone hole of depth-to-width ratio and small apex angle can be effectively prevented and vertically squeeze into the incident electron at bottom and its secondary electron of generation
Faraday cup 13 is escaped from, so that it is strong to measure accurate incident electron line；Sample construction section 3 is made of lower section of processable ceramic
Be the ceramic insulation seat of insulating segment 4, connect and insulate with the microscope carrier pedestal 5 of ground connection, opened on 3 bottom of sample construction section there are four
Through-hole, ceramic insulation seat corresponding position are also opened there are four through-hole, and ceramic insulation seat is fixed with sample construction section 3 by PEEK screw
Connection；5 inner hollow of microscope carrier pedestal, bottom are screw hole, and the screw hole, which is used to that microscope carrier pedestal 5 to be fixed on microscope carrier by screw, to be connected
On fitting 6, meanwhile, 5 side wall of microscope carrier pedestal is provided with the macropore for being installed as SMA junction block 7, aperture 20mm, inside SMA junction block 7
The cavity of reserved diameter 20mm long 30mm, accesses resistance, inductance element to sample test to regard testing requirement in the cavity
Microscope carrier and 50 Ω coaxial signal transmission cables carry out impedance matching, reduce the distortion of short pulse signal test waveform；Sample installation
3 bottoms of section are provided with the screw hole of fixed measured signal lead-out wire, and signal wire one end of outer insulating layer coating is fixed by screws in sample
3 bottom of construction section, one end are connected on the SMA junction block 7 on microscope carrier pedestal 5；It is straight there are two symmetrically being opened on ceramic insulation seat
Diameter is the vacuum pumping hole 8 of 8mm, and the aperture of above 8 one end of vacuum pumping hole is located at the outside of ceramic insulation seat, the other end and institute
It states cavity to communicate, its internal cavities can be evacuated and avoid becoming in vacuum environment when working so as to sample test microscope carrier
Deflation source.
When carrying out the secondary electron yield measurement of sample, sample test microscope carrier and spherical secondary electron collector 11
And the positional relationship between electron gun 9 is as shown in Figure 4；In experimental test procedures, when electron gun conduit 10 and sample test microscope carrier
It is inserted into spherical secondary electron collector 11, the outermost grounding electrode of secondary electron collector 11 can be preferably by
Portion's structual shield gets up, and avoids sample test microscope carrier reception space coupled noise to generate interference to measured signal；Draw letter
Number signal amplifier is connected to measured signal amplitude by 50 Ω coaxial signal transmission cables being connected on SMA junction block 7
It measures, measured signal is transmitted in coaxial line, avoids the interference that signal in transmission process is subject to.
The above content is combine specific preferred embodiment to the further description of the invention made, and it cannot be said that originally
The specific embodiment of invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
The other embodiments obtained in the case where not departing from technical solution of the present invention should be included in the protection scope of corresponding invention.
Claims (10)
1. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement, including microscope carrier ontology (12),
It is characterized in that, the microscope carrier ontology (12) includes sample construction section (3), insulating segment (4) and linkage section, the sample construction section
(3) it is connected with linkage section by insulating segment (4), and the insulating segment (4) is as exhausted between sample construction section (3) and linkage section
Edge part；
It further include the Faraday cup (13) being arranged on sample construction section (3).
2. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 1,
It is characterized in that, the Faraday cup (13) is the duct being provided on sample construction section (3).
3. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 2,
It is characterized in that, the Faraday cup (13) is that depth-to-width ratio is greater than 4, and bottom has the strip-shaped hole of beveled tip.
4. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 1,
It is characterized in that, further including the sample mounting portion being arranged on microscope carrier ontology (12), the axis and sample of the Faraday cup (13)
The perpendicular relationship of sample supporting surface on product mounting portion, and the axis of Faraday cup (13) is located at the center in the sample support face.
5. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 4,
It is characterized in that, the microscope carrier ontology (12) is in the form of a column structure, it is followed successively by by top to the bottom end of microscope carrier ontology (12)：Sample peace
Section (3), insulating segment (4), linkage section are filled, the sample installation position is in the top of sample construction section (3).
6. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 5,
It is characterized in that, the sample mounting portion is the slot being arranged at the top of sample construction section (3), it further include flaky sample carrier
Disk (1), the sample tray (1) is installed on sample construction section (3) by being embedded in the slot, on the sample tray (1)
It is further fixed on multiple sample tablettings (2).
7. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 1,
It is characterized in that, the insulating segment (4) is ceramics seat.
8. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 1,
It is characterized in that, the linkage section includes microscope carrier pedestal (5), junction block (7) and microscope carrier connector (6), the junction block (7) with
Microscope carrier connector (6) is both secured on microscope carrier pedestal (5), and fixed point of the insulating segment (4) on linkage section is located at microscope carrier pedestal (5)
On.
9. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 8,
It is characterized in that, being additionally provided with cavity in the junction block (7).
10. a kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement according to claim 9,
It is characterized in that, further include setting junction block (7), insulating segment (4), microscope carrier pedestal (5), microscope carrier connector (6) any one
On vacuum pumping hole (8), equal pressure passageway of the vacuum pumping hole (8) as the cavity and microscope carrier ontology (12) external world.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811086081.6A CN108896596A (en) | 2018-09-18 | 2018-09-18 | A kind of sample test microscope carrier for secondary electron emission yield of dielectric material measurement |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113495082A (en) * | 2020-03-19 | 2021-10-12 | 清华大学 | Secondary electron emission coefficient measuring device |
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